CN106153090B - Rotor position detection device and rotary valve - Google Patents
Rotor position detection device and rotary valve Download PDFInfo
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- CN106153090B CN106153090B CN201510185983.5A CN201510185983A CN106153090B CN 106153090 B CN106153090 B CN 106153090B CN 201510185983 A CN201510185983 A CN 201510185983A CN 106153090 B CN106153090 B CN 106153090B
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Abstract
The invention relates to a rotor position detection device and a rotary valve, which can realize a device for detecting the absolute position of the rotor of the rotary valve with low cost. The position detecting device includes a position detecting unit having a position detecting plate and a plurality of sensors. The position detection plate rotates in conjunction with the rotor, and has a notch in the peripheral edge of the main plane. The sensor detects the presence or absence of the notch portion at a plurality of positions on the rotation path of the notch portion. The notch portion of the position detecting plate and the sensors are designed so that the combination pattern of the detection signals of the sensors when the rotor is positioned at each position where the output port is connected to the input port is different. The signal pattern holding unit holds a combination pattern of detection signals of the sensors and signal pattern data of the rotor position at that time, and detects the absolute position of the rotor based on the detection signals of the sensors and the signal pattern data.
Description
Technical Field
The present invention relates to a rotary valve having an input port and a plurality of output ports and switching the output port connected to the input port by the position of a rotor, and a rotor position detecting device suitable for the rotary valve.
Background
The rotary valve is configured to have an input port and a plurality of output ports, and to switch the output port connected to the input port by controlling the position (rotational position) of a rotor (rotary valve body). The position of the rotor is usually controlled using an encoder (see, for example, patent document 1).
An encoder for performing position control of a rotor includes: a circular encoder plate rotating in conjunction with the rotor and having a plurality of slits formed uniformly in the peripheral edge thereof; and a sensor that detects the slit of the encoder board. When the encoder plate rotates, the number of slits corresponding to the displacement of the encoder is detected by the sensor. Therefore, by counting the number of slits detected by the sensor, the displacement of the rotor can be detected or the rotor can be positioned.
Documents of the prior art
Patent document
Disclosure of Invention
Technical problem to be solved by the invention
The position of the rotor is relatively detected by counting of the encoder from a home position which is a reference position of the displacement of the rotor. However, in the method of relatively detecting the position of the rotor, if the home position is erroneously detected or the count is erroneously counted, there is a problem that the positioning and position detection of the rotor cannot be accurately performed.
It is conceivable to use an absolute encoder for absolute position detection (see, for example, patent document 2), to provide a pattern for absolute position detection on an encoder board, and to detect the absolute position of the encoder board by reading the pattern with an optical sensor. However, the associated absolute type encoder is expensive, resulting in an increase in the cost of the rotary valve.
Therefore, an object of the present invention is to realize a device for detecting an absolute position of a rotor of a rotary valve at low cost.
Means for solving the problems
A rotor position detection device according to the present invention includes a position detection unit, a signal pattern holding unit, and a position detection unit. The position detection unit includes: a position detection plate which rotates in conjunction with a rotor of the rotary valve, has a notch at a peripheral edge of a main plane of the position detection plate, and switches an output port connected to an input port among a plurality of output ports provided in the rotary valve depending on a position of the rotor; and a plurality of sensors for detecting the existence of the notch portion at a plurality of positions on the rotation track of the notch portion, wherein the notch portion of the position detection plate and the sensor for detecting the notch portion are provided with: the combination pattern of the detection signals of the sensors when the rotor is positioned at each position where the output port is connected to the input port is different. The signal pattern holding unit holds a combination pattern of detection signals of the sensors and signal pattern data of a position of the rotor at that time. The position detection unit reads detection signals of the sensors and detects an absolute position of the rotor based on the signal pattern data held by the signal pattern holding unit.
In the present invention,since the sensor for detecting the presence or absence of the notch portion of the position detection plate is only required to detect the presence or absence of the notch portion, it is not necessary to use a high-performance sensor, and an inexpensive photoelectric sensor can be used. Binarizing the signal of the relevant sensor, e.g. setting the signal as the notch portion detected<1>When the notch portion is not detected, the signal is set as<0>. Therefore, the combination pattern of the detection signals of n sensors when these sensors are used has 2nAs an absolute position of the rotor, 2 can be detectednAnd (4) a position.
The invention relates to a rotary valve comprising: a port connection portion having an input port, a plurality of output ports, and a rotor for switching the output ports connected to the input port; a motor for rotating the rotor; the rotor position detection device of the present invention; and a control unit that drives the motor so that the rotor is positioned at a predetermined position based on the rotor position detected by the rotor position detection device.
ADVANTAGEOUS EFFECTS OF INVENTION
The rotor position detecting device of the present invention detects the absolute position of the rotor by a combination pattern of detection signals of a plurality of sensors that detect the presence or absence of the notch portion provided in the position detecting plate, and therefore, a general optical sensor can be used as a sensor that detects the presence or absence of the notch portion of the position detecting plate. Therefore, unlike an absolute position detecting encoder, a high-performance sensor for reading an absolute position detecting pattern provided on an encoder board is required, and the absolute position of the rotor can be detected with a low-cost configuration.
The rotary valve of the present invention detects the absolute position of the rotor using the rotor position detection device of the present invention, and therefore, the position of the rotor can be controlled with high accuracy and at low cost.
Drawings
Fig. 1 is a perspective view showing an appearance of an embodiment of a rotary valve.
Fig. 2 is a side view of a rotary valve showing the structure of the position detection portion of the embodiment.
Fig. 3 is a perspective view showing the inside of the position detection unit of the configuration of the position detection unit of the embodiment.
Fig. 4A is a view of the position detection plate and the photosensor of the position detection unit as viewed from above.
Fig. 4B is a view of the positioning plate and the photoelectric sensor of the position detection unit as viewed from above.
FIG. 5 is a block diagram schematically illustrating the control system of the embodiment.
Fig. 6 is a table showing an example of the correspondence between the signal pattern of each photosensor for position detection and the connection port at this time in the embodiment.
Fig. 7 is a flowchart showing an example of the positioning operation of the rotor according to the embodiment.
FIG. 8 is a side view of a rotary valve showing the construction of other embodiments of the rotary valve.
FIG. 9 is a plan view of each position detecting plate of this embodiment.
Fig. 10 is a table showing an example of the correspondence between the signal pattern of each of the photoelectric sensors for position detection of the embodiment and the connection port at this time.
Detailed Description
In the rotor position detecting device of the present invention, the position detecting plate may be one plate. This makes it possible to reduce the size of the position detection device in the rotor rotation axis direction.
Further, a plurality of position detection plates may be provided. In this case, the notch portion can be easily designed so that the combination pattern of the detection signals of the sensors differs for each of the plurality of rotational positions, as compared with the case where the position detection plate is one plate.
In the rotary valve of the present invention, when the position detecting unit of the rotor position detecting device has n sensors, the port connecting unit can be provided with 2nAnd an output port.
The rotary valve of the invention preferably has an encoder for positioning the rotor. The positioning encoder is configured to include, for example, a positioning plate that rotates in conjunction with the rotor and has slits at a plurality of positions that are uniform in the circumferential direction of the peripheral edge portion; and a positioning sensor for detecting the slit of the positioning plate, wherein the positioning sensor detects the slit when the rotor is positioned at a position where the output port is connected to the input port.
Hereinafter, an embodiment of a rotary valve will be described with reference to the drawings.
First, a schematic configuration of the entire rotary valve of this embodiment will be described with reference to fig. 1.
The rotary valve of this embodiment has a rotor driving unit 2, a rotor position detecting unit 4 (position detecting unit), and a port connecting unit 6. The rotor position detection unit 4 is provided between the rotor drive unit 2 and the port connection unit 6.
The rotor driving unit 2 includes a stepping motor 8 for rotationally driving a rotor provided at the port connection unit 6. The stepping motor 8 is fixed to a motor fixing plate 9 by a bolt and nut connection.
The port connecting portion 6 has a cylindrical housing 11, and 8 outlets 10 arranged uniformly in the circumferential direction are provided on the outer circumferential surface of the housing 11. Although not visible in fig. 1, an inlet 13 (see fig. 2) is provided in the central portion of the rear surface (the surface opposite to the rotor driving portion 2) of the port connecting portion 6. Although not shown in the drawings, a stator (stationary member) and a rotor (rotating member) are provided inside the port connecting portion 6, and the rotor rotates while sliding with respect to the stator, whereby the groove of the surface of the rotor provided on the stator side is displaced, and thereby the outlet 10 connected to the inlet is switched. The frame 11 of the port connection portion 6 and the motor fixing plate 9 are connected by the support column 30 and fixed to each other.
The rotor position detecting unit 4 includes, in addition to the positioning plate 22 and the position detecting plate 26 that rotate coaxially with the rotor of the port connecting unit 6 in conjunction with the rotor, the following: a 1 st sensor 14a, a 2 nd sensor 14b, and a 3 rd sensor 14c for detecting a notch portion provided in a peripheral edge portion of the positioning plate 22; and a positioning sensor 28 for detecting a slit provided in a peripheral edge portion of the position detection plate 26 (the positioning sensor 28 is not shown in fig. 1). The 1 st sensor 14a, the 2 nd sensor 14b, and the 3 rd sensor 14c are fixed to a common sensor mounting cover 12. The sensor mounting cover 12 is fixed to the motor fixing plate 9. The positioning sensor 28 is attached to the housing 11 side of the port connection portion 6.
The internal structure of the rotor position detection unit 4 will be described with reference to fig. 2, 3, 4A, and 4B. In order to make the internal structure of the rotor position detecting unit 4 easily visible, the support column 30 is shown in a transparent view in fig. 2, and the 1 st sensor 14a and the 3 rd sensor 14c are not shown.
In the rotor position detection unit 4, an end portion of a drive shaft 16 of the stepping motor 8 and an end portion of a rotation shaft 18 for rotating the rotor are connected by a connection unit 20, and the rotor is rotatable by the stepping motor 8. The positioning plate 22 and the position detection plate 26 are provided in parallel with each other between the port connection portion 6 and the connection portion 20. The rotation shaft 18 penetrates the center of the main plane of the positioning plate 22 and the position detection plate 26.
The positioning plate 22 is fixed to a cylindrical support block 21 that rotates together with the rotating shaft 18. A spacer 24 is provided between the positioning plate 22 and the position detection plate 26. One end of the spacer 24 is fixed to the positioning plate 22 by a bolt and a nut, and the other end is fixed to the position detection plate 26 by a bolt and a nut. Thereby, the positioning plate 22 and the position detection plate 26 rotate in conjunction with the rotor.
As shown in fig. 4B, the positioning plate 22 is provided with 8 slits 22a uniformly in the circumferential direction of the peripheral edge portion thereof. A positioning sensor 28 for detecting the slit 22a is provided on a side of the positioning plate 22. The positioning sensor 28 is a photoelectric sensor having a light emitting element and a light receiving element facing each other, and the peripheral edge portion of the positioning plate 22 is inserted between the light emitting element and the light receiving element.
When the slit 22a is not located at the position of the positioning sensor 28, light from the light emitting element is blocked by the positioning plate 22, and the light receiving element does not detect light from the light emitting element. When the slit 22a is rotated to the position of the positioning sensor 28, light from the light emitting element enters the light receiving element, and the light receiving element detects the light from the light emitting element. The detection signal of the positioning sensor 28 is binarized, and the detection signal when the slit 22a is not detected is set to signal <0>, and the detection signal when the slit 22a is detected is set to signal <1 >. The positioning plate 22 and the positioning sensor 28 constitute a positioning encoder for positioning the rotor in a state where any one of the output ports 10 is connected to the input port 13.
The positions of the slit 22a and the positioning sensor 28 are adjusted so that when the slit 22a is rotated to the position of the positioning sensor 28, any one of the output ports 10 is connected to the input port 13. Therefore, when any one of the output ports 10 is connected to the input port 13, the binarized signal of the positioning sensor 28 is <1>, and when any one of the output ports 10 is not connected to the input port 13, the signal is <0 >. The rotor is positioned by driving the stepping motor 8 while monitoring the signal of the positioning sensor 28 so that the binarized signal of the positioning sensor 28 is <1 >.
As shown in fig. 4A, the position detection plate 26 has a plurality of notches 26a in its peripheral edge. The position detection plate 26 has a 1 st sensor 14a, a 2 nd sensor 14b, and a 3 rd sensor 14c on its side for detecting the cutout 26 a. Each of the 1 st sensor 14a, the 2 nd sensor 14b, and the 3 rd sensor 14c is a photoelectric sensor having a light emitting element and a light receiving element facing each other, like the positioning sensor 28, and is inserted between the light emitting element and the light receiving element to the peripheral edge portion of the position detection plate 26.
The 1 st sensor 14a, the 2 nd sensor 14b, and the 3 rd sensor 14c detect the presence or absence of the notch 26a at the position of each of the sensors 14a to 14c by whether or not the light receiving element detects light from the light emitting element. The detection signals of the sensors 14a to 14c are binarized, the detection signal of the sensor that does not detect the notch portion 26a is the signal <0>, and the detection signal of the sensor that detects the notch portion 26a is the signal <1 >.
The positions of the 1 st, 2 nd, and 3 rd sensors 14a, 14b, and 14c and the widths and the number of the notches 26a of the position detection plate 26 are designed so that the combination pattern of the detection signals (signals <0> or <1>) of the sensors 14a to 14c is different when the rotor is positioned at the 8 positions at which the positioning sensor 28 detects the slits 22 a. Fig. 6 shows an example of signal pattern data showing a combination pattern of detection signals of the sensors 14a to 14c and a correspondence relationship between the combination pattern and the outlet 10 (connection port in the table) connected to the inlet 13 in each pattern.
The control unit 32 (see fig. 5) that controls the operation of the rotary valve holds relevant signal pattern data in advance, and detects the outlet 10 connected to the inlet 13, that is, detects the absolute position of the rotor based on the signal pattern data. The sensors 14a to 14c, the position detection plate 26, and the control unit 32 constitute rotor position detection means for detecting the absolute position of the rotor.
FIG. 5 shows the control system of this embodiment.
The stepping motor 8 is controlled by the control section 32. The control unit 32 can be realized by a dedicated computer or a general-purpose personal computer. The control unit 32 is provided with a position detection unit 32a, a positioning unit 32b, and a signal pattern holding unit 32 c. The position detection unit 32a and the positioning unit 32b are configured to function by an arithmetic device such as a CPU provided in the control unit 32 executing a program stored in the control unit 32. The signal pattern holding unit 32c can be realized by one area of a storage device such as an HDD (hard disk drive) provided in the control unit 32.
As shown in fig. 6, the signal pattern holding unit 32c holds signal pattern data indicating the correspondence relationship between the combination pattern of the signals of the sensors 14a to 14c and the connection port at that time.
The position detecting unit 32a is configured to detect the absolute position of the rotor (the number of the outlet 10 connected to the inlet 13) using the detection signals of the 1 st sensor 14a, the 2 nd sensor 14b, and the 3 rd sensor 14c and the signal pattern data held in the signal pattern holding unit 32 c.
The positioning unit 32b is configured to control the stepping motor to position the rotor such that a desired outlet 10 is connected to the inlet 13, based on the signal of the positioning sensor 28 and the absolute position of the rotor detected by the position detecting unit 32 a.
An example of the positioning operation of the rotor will be described with reference to the flowchart of fig. 7.
The target position (the serial number of the output port connected to the input port) where the rotor should be positioned is determined. The signals of the 1 st sensor 14a, the 2 nd sensor 14b, and the 3 rd sensor 14c are read, and the current position of the rotor is detected based on the signal pattern data of the signal pattern holding unit 32c according to the combination pattern of the signals.
When the current position of the rotor is different from the target position, the stepping motor 8 (see fig. 1) is driven until the positioning sensor 28 detects the slit 22a of the positioning plate 22. When the positioning sensor 28 detects the slit 22a, the current position of the rotor is detected from the signals of the 1 st sensor 14a, the 2 nd sensor 14b, and the 3 rd sensor 14c at that time, and it is checked whether or not the current position matches the target position. This operation is repeatedly executed, and if the current position of the rotor matches the target position, the positioning of the rotor is terminated.
In the above-described embodiment, 3 sensors 14a to 14c are arranged around 1 position detection plate 26, and the absolute position of the rotor is detected based on the combination pattern of the signals from the sensors. An embodiment using 3 position detection plates 36, 37, and 38 will be described with reference to fig. 8.
The rotor position detecting unit 4a of this embodiment includes 1 positioning plate 22 and 3 position detecting plates 36, 37, and 38. The positioning plate 22 is provided on the port connection portion 6 side and fixed to a cylindrical support block 21 that rotates together with the rotation shaft 18. The position detection plate 36 is connected to the positioning plate 22 via the spacer 34 c. The position detection plate 37 is connected to the position detection plate 36 via the spacer 34 b. The position detection plate 38 is connected to the position detection plate 37 via the spacer 34 a. Thereby, the 4 plates 22, 36, 37, and 38 rotate coaxially in conjunction with the rotor.
The planar shape of the position detection plate 38 is as shown in fig. 9 (a), and the plate has notch portions 38a having a width of 45 ° of the rotation angle at 4 positions equal in the circumferential direction of the peripheral edge portion. The planar shape of the position detection plate 37 is as shown in fig. 9 (B), and the plate has notch portions 37a having a width of 90 ° of the rotation angle at 2 positions equal in the circumferential direction of the peripheral edge portion. The planar shape of the position detection plate 36 is as shown in fig. 9 (C), and has a notch 36a having a rotation angle of 180 ° at its peripheral edge.
The 1 st sensor 14a is provided at a position to detect the notch 38a at the peripheral edge of the position detection plate 38. The 2 nd sensor 14b is provided at a position to detect the notch 37a at the peripheral edge of the position detection plate 37. The 3 rd sensor 14c is provided at a position to detect the notch 36a at the peripheral edge of the position detection plate 36.
In this embodiment, the 1 st sensor 14a, the 2 nd sensor 14b, and the 3 rd sensor 14c are arranged in a line in the longitudinal direction (direction parallel to the rotation axis 38), but need not necessarily be arranged in a line. The positional relationship (phase difference) between the positions of the 1 st sensor 14a, the 2 nd sensor 14b, and the 3 rd sensor 14c and the position detection plates 36, 37, and 38 is designed so that the combination patterns of the detection signals (signals <0> or <1>) of the sensors 14a to 14c are different when the rotor is positioned at the 8 positions where the positioning sensor 28 detects the slit 22 a. Fig. 10 shows an example of signal pattern data indicating the correspondence between the combination pattern of the detection signals of the sensors 14a to 14c and the entrance/exit connection ports (connection ports) in each pattern.
The method of positioning the rotor using the signals of the 1 st sensor 14a, the 2 nd sensor 14b, the 3 rd sensor 14c, and the positioning sensor 28 is the same as the embodiment described with reference to fig. 1 to 7.
Description of the symbols
2 rotor drive part
4. 4a rotor position detecting part
6-port connection part
8 step motor
9 Motor fixing plate
10 outlet
Frame of 11-port connecting part
12 sensor mounting cover
16 drive shaft
18 rotating shaft
20 connecting part
21 supporting block
22 positioning plate
22a slit
24. 34a, 34b, 34c spacer
26. 36, 37, 38 position detecting plate
26a, 36a, 37a, 38a notch
38 positioning sensor
30 support column
32 control part
32a position detection unit
32b positioning unit
32c signal pattern holding section.
Claims (3)
1. A rotor position detecting device, characterized by comprising:
a position detection unit having: a position detection plate that rotates in conjunction with a rotor of a rotary valve, the rotary valve having a notch at a peripheral edge thereof, the rotary valve switching an output port connected to an input port among a plurality of output ports provided depending on a position of the rotor; and a plurality of sensors for detecting the presence or absence of the notch portion at a plurality of positions on a rotation path of the notch portion, the notch portion of the position detection plate and the sensors being provided so as to: the combination modes of the detection signals of the sensors when the rotor is positioned at the positions where the output port is connected with the input port are different;
a signal pattern holding unit that holds a combination pattern of detection signals of the sensors and signal pattern data of a position of the rotor at that time;
a position detection unit that reads detection signals of the sensors and detects an absolute position of the rotor based on the signal pattern data held by the signal pattern holding unit; and
a positioning encoder configured to include: a positioning plate that rotates in conjunction with the rotor and has slits at a plurality of positions that are uniform in the circumferential direction of a peripheral edge portion; and a positioning sensor for detecting the slit of the positioning plate, wherein the positioning sensor detects the slit when the rotor is positioned at a position where one of the output ports is connected to the input port,
the position detecting plate is provided with a plurality of pieces,
the notches provided in the peripheral edge portions of the plurality of position detection plates have widths of different angular sizes so as to be circumferentially uniform,
the position detection plates and the positioning plate are arranged coaxially.
2. A rotary valve, comprising:
a port connection portion having an input port, a plurality of output ports, and a rotor for switching the output ports connected to the input port;
a motor that rotates the rotor;
the rotor position detecting device according to claim 1; and
and a control unit that drives the motor so that the rotor is positioned at a predetermined position based on the rotor position detected by the rotor position detection device.
3. The rotary valve as set forth in claim 2,
the position detecting section of the rotor position detecting device has n sensors, where n is a positive integer,
the port connection part has 2nAnd an output port.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014221339A JP6459397B2 (en) | 2014-10-30 | 2014-10-30 | Rotor position detection device and rotary valve |
| JP2014-221339 | 2014-10-30 |
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| Publication Number | Publication Date |
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| CN106153090A CN106153090A (en) | 2016-11-23 |
| CN106153090B true CN106153090B (en) | 2020-03-24 |
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| CN201510185983.5A Active CN106153090B (en) | 2014-10-30 | 2015-04-17 | Rotor position detection device and rotary valve |
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| JP (1) | JP6459397B2 (en) |
| CN (1) | CN106153090B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2017959B1 (en) * | 2016-12-08 | 2018-06-19 | Illumina Inc | Cartridge assembly |
| IL290157B2 (en) | 2016-10-14 | 2023-09-01 | Illumina Inc | Cartridge assembly |
| WO2018176308A1 (en) * | 2017-03-30 | 2018-10-04 | Acm Research (Shanghai) Inc. | Exhaust apparatus |
| CN110741252B (en) * | 2017-09-01 | 2022-05-31 | 株式会社岛津制作所 | Switching valve |
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| CN85107469A (en) * | 1985-10-10 | 1987-04-15 | 桑盖莫韦斯顿有限公司 | Optical shaft encoder |
| JPH10252938A (en) * | 1997-03-10 | 1998-09-22 | Tec Corp | Position detecting device for rotary valve |
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| JPS4888957A (en) * | 1972-02-23 | 1973-11-21 | ||
| CA1116302A (en) * | 1978-03-16 | 1982-01-12 | Eugene C. Benbow | Adjustably lighted reference photocell circuit arrangement for a photocell sensing assembly |
| US4588982A (en) * | 1984-09-13 | 1986-05-13 | Sangamo Weston, Inc. | Optical shaft encoder |
| JP2678135B2 (en) * | 1993-11-01 | 1997-11-17 | ダイハツディーゼル株式会社 | Oil mist alarm device |
| JPH08219808A (en) * | 1995-02-15 | 1996-08-30 | Tokai Rika Co Ltd | Rotation detecting device |
| CN2515873Y (en) * | 2001-02-26 | 2002-10-09 | 张敏 | Absolute electrooptical switch rotary encoder |
| JP2005080473A (en) * | 2003-09-03 | 2005-03-24 | Brother Ind Ltd | Stepping motor and rotational position detecting device of motor |
| JP2004125812A (en) * | 2004-01-22 | 2004-04-22 | Mitsubishi Electric Corp | Optical rotary encoder |
| JP2006322929A (en) * | 2005-04-22 | 2006-11-30 | Alps Electric Co Ltd | Absolute angle detector |
| US7348545B2 (en) * | 2005-06-17 | 2008-03-25 | Avago Technologies Ecbu Ip Pte Ltd | System and method for optical encoding on two opposed surfaces of a pattern medium |
| CN2903916Y (en) * | 2006-01-20 | 2007-05-23 | 安徽金海迪尔信息技术有限责任公司 | Absolute multi-coil magnetic coder |
| CN100390505C (en) * | 2006-01-20 | 2008-05-28 | 安徽金海迪尔信息技术有限责任公司 | Absolute multi-coil magnetic encoder |
| CN102607617A (en) * | 2012-03-31 | 2012-07-25 | 中国科学院长春光学精密机械与物理研究所 | Multi-turn absolute type double-reading group combined photoelectric shaft angle encoder |
| CN102944254B (en) * | 2012-11-30 | 2015-11-25 | 欧姆龙(上海)有限公司 | Rotary encoder |
| CN203203607U (en) * | 2013-01-11 | 2013-09-18 | 江苏多维科技有限公司 | Multi-loop absolute magnetic encoder |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85107469A (en) * | 1985-10-10 | 1987-04-15 | 桑盖莫韦斯顿有限公司 | Optical shaft encoder |
| JPH10252938A (en) * | 1997-03-10 | 1998-09-22 | Tec Corp | Position detecting device for rotary valve |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106153090A (en) | 2016-11-23 |
| JP2016090266A (en) | 2016-05-23 |
| JP6459397B2 (en) | 2019-01-30 |
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