CN106133189B - 包括高容量预加热器区的cvi致密化装置 - Google Patents

包括高容量预加热器区的cvi致密化装置 Download PDF

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CN106133189B
CN106133189B CN201580013881.3A CN201580013881A CN106133189B CN 106133189 B CN106133189 B CN 106133189B CN 201580013881 A CN201580013881 A CN 201580013881A CN 106133189 B CN106133189 B CN 106133189B
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wall
distribution grid
plate
room
heater
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CN106133189A (zh
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B·戴尔佩里亚
J-F·颇汀
S·苏利纳克
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Safran Ceramics SA
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Herakles SA
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/614—Gas infiltration of green bodies or pre-forms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
    • F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
    • F28D2021/0022—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for chemical reactors

Abstract

本发明涉及热化学处理装置(100)，包括：反应室(140)、至少一个气体入口(104)和位于气体入口(104)与反应室(140)之间的气体预加热器室(110)。预加热器室(110)具有一个在另一个上面的、相互间隔开的多个穿孔分布板(111‑114)。至少在相对分布板之间，预加热器室(110)还包括多个壁(1110、1120、1130)，其限定了所述板(111‑114)之间的气流的流动路径。

Description

包括高容量预加热器区的CVI致密化装置
背景技术
本发明涉及用于进行热处理的装置或烘箱，其中，对用于处理的气体进行预加热，之后引入到装置的处理室中。此类装置具体用于进行热化学处理，例如通过化学气相渗透进行部件的渗碳化或者多孔基材的致密化。
本发明的应用领域是从热结构复合材料制造部件，即从同时具有使其适用于构造结构部件的机械性质并且还能够在高温下保留这些性质的能力的复合材料进行制造。热结构复合材料的典型例子是：碳/碳(C/C)复合物，其具有通过热解碳的基质致密化的碳纤维的强化织物，以及陶瓷基质复合物(CMC)，其具有通过陶瓷基质致密化的耐火纤维(碳或陶瓷)的强化织物。
对多孔基材进行致密化从而制造C/C或CMC复合部件的众所周知的方法是化学气相渗透(CVI)。将用于致密化的基材放在装置的负载区中，在其中对其进行加热。将含有一种或多种构成基质的材料的气态前体的反应性气体引入烘箱中。对装置内部的温度和压力进行调节，从而使得反应性气体能够在基材的孔中扩散，并且作为反应性气体的一种或多种组分发生分解的结果或者作为多个组分之间发生反应的结果，在其中沉积构成基质的材料，这些组分形成基质的前体。在低压下进行该工艺，从而有助于反应性气体在基材内扩散。前体发生转变从而形成基质材料(例如热解碳或陶瓷)的温度通常位于900-1100℃，但是对于通过化学气相沉积(CVD)的热解碳的大量沉积，该温度仍然可能高至2000℃。
为了在整个负载区中进行基材中尽可能均匀的致密化(无论这是以密度增加方面进行测量或者以形成的基质材料的微结构方面进行测量)，需要使得反应性气体在尽可能低且均匀的温度下渗透进入负载区。
因此，装置通常包括用于对气体进行预加热的工具。此类预加热器工具可以位于装置的周界，即，位于气体进入装置的处理容器之前的路径上。此类预加热器工具增加了装置的复杂度和整体尺寸。
为了避免这些缺点，已知提供具有用于对反应性气体进行预加热的区或室的装置，所述区或室位于用于使得反应性气体进行装置的入口与负载区之间。通常来说，预加热器区包括多个穿孔板，经由其使得反应性气体通过。
作为存在于装置中的结果，对气体预加热器板，例如基材，进行加热。通常通过感应加热或者电加热方式，例如装在装置的壁中的电阻器元件对装置进行加热。
然而，虽然预加热器室能够在将反应性气体引入负载区之前进行加热，这难以控制预加热器室中的反应性气体的温度，从而其是呈径向均匀的，特别是大直径的装置中。
为了解决该问题，可能考虑可以通过放大预加热器区，特别是通过垂直增加其体积，来增加对气体进行预加热的效率，即使这对于总体积不变的装置会有损负载区的体积。不幸的是，在工业规模上，诸如化学气相渗透工艺之类的处理需要昂贵的投资，并且需要长的耗时。因此，非常希望装置具有高水平的生产力，无论它们是已经安装进行使用或者尚未制造的新装置，因此，希望它们在旨在负载进行处理的基材或部件的工作体积与旨在加热反应性气体的体积之间具有尽可能大的比例。
发明目的和概述
本发明的目的是提供用于热化学处理装置的设计，其能够将气流预加热至确定的温度，同时使得装置的中心与(在预加热器室的出口的)周界之间的温差最小化，并且无需增加其体积，从而增强装置的生产力。
为此，本发明提供了热化学处理装置，其包括：反应室、至少一个气体入口以及位于气体入口和反应室之间的气体预加热器室，所述预加热器室具有一个在另一个上面的、多个相互间隔开的穿孔分布板，所述装置的特征在于，预加热器室还包括：在至少两个相对分布板之间的限定了所述板之间的气流的流动路径的多个壁，每个壁在所述至少两个相对分布板之间垂直延伸。
通过在分布板之间使用壁，首先通过经由对流增加的热交换，并且其次，通过延长移动路径进而延长气体通过预加热器室的通行时间，增加了预加热器室的热容量。还改善了离开预加热器室的反应性气体的温度分布的均匀性，并且无论装置的直径如何，这都是适用的。对于本发明的装置，可以获得相同或者甚至改善的预加热性能，同时使用的预加热器室的体积小于不具有此类壁的室的体积。或者，对于相同的预加热器室体积，对于本发明具有壁的预加热器室，在温度和加热均匀性方面获得的性能相比于不具有此类壁的预加热器室得到明显改善。
根据本发明的装置的特性，分布板是碟状的，并且至少部分壁在所述板之间以径向方向延伸。该布置的作用是引导气流在板的整个表面上流动，从而使得热传输最大化。
根据本发明的装置的另一个特性，至少部分壁具有波状形状，从而可以延长壁，因而延长气流的热交换区域。
根据本发明的装置的另一个特性，壁具有的导热性在平行于分布板的方向大于垂直于所述穿孔板的方向。这使其可以在分布板之间限定各向异性的热传导，从而在装置的冷部分与负载区之间产生部分热去耦，同时还增加了预加热器室的热容量。在这些情况下，壁可以由石墨制造或者由复合材料制造，所述复合材料具有通过基质致密化的纤维强化，强化纤维大部分以平行于分布板的方向延伸。
根据本发明的装置的另一个特性，壁的数量在靠近分布板的周界处大于所述板的中心处。这优化了板之间的壁分布，并且还增加了气流的热交换面积。
根据本发明的装置的另一个特性，其包括在预加热器室的分布板上方的负载板，所述负载板经由穿过分布板的柱支撑。这提供了预加热器室的机械功能与热功能之间的去耦。
附图说明
参照附图的非限制性例子，阅读如下描述，清楚地了解根据本发明致密化烘箱的其他特征和优点，其中：
图1是根据本发明实施方式的用于化学气相渗透的装置的截面示意图；
图2是放大图，透视显示图1的装置的预加热器室的组件元件；
图3是图2的预加热器室的分布板的平面图；
图4是放大图，透视显示根据本发明的另一个实施方式的预加热器室的组件元件；以及
图5是图4的预加热器室的分布板的平面图。
实施方式的详述
本发明适用于用作进行热处理的任意类型的装置或烘箱，其中，在预加热器室中对用于处理的气体进行预加热，之后引入到装置的处理或负载区中。此类装置具体用于进行热化学处理，例如通过化学气相渗透进行部件的渗碳化或者多孔基材的致密化。
参见图1-3描述了致密化烘箱的第一个实施方式。图1显示用于通过化学气相渗透进行致密化的装置100，其被圆柱形侧壁101、底壁102和顶壁103所限定。
下文详细描述的结构的气体预加热器室110在烘箱的底部102与负载板120之间延伸。管道106通过底部102连接反应性气体入口104和预加热器室110。
将用于致密化的基材130放在负载区或者反应室140中，作为多个环状垂直堆叠131，由负载板120支撑。具有多个与堆叠的内部体积130a对准的通道121，并且每个堆叠在其顶部由覆盖物132封闭。基材130的堆叠131位于负载板120上，并且可以将它们再细分成多个重叠区段，它们被一个或多个中间板122分开，其具有与基材130中的通道对准的中心通道122a。通过限定了间隙的间隔楔133，将每个基材130与相邻基材隔开，或者当适用的情况下，与相邻板120、122或者覆盖物132隔开。楔133，或者至少部分楔133布置成留出用于体积130a与141之间的气体的通道。制造这些通道从而基本平衡体积130a与141之间的压力，如专利文件US 5 904 957所述，或者构成简单的泄露通道，维持体积130a与141之间的压力梯度，如专利申请EP 0 063 988所述。
使得含有一种或多种构成基材的材料的气态前体的气流150通过入口104进入烘箱，然后通过预加热器室110。然后，通过负载板120中的通道121将经过预加热的气体传送进入堆叠131的内部体积130a。然后气体进入堆叠外部和反应室140内部的体积38。通过顶壁103中形成的通道105抽取排出气体，通道105通过管道107与诸如(未示出的)真空泵之类的抽气工具相连。
在变化形式的实施方式中，内部体积130a可以在它们的底部部分封闭，并且可以使它们在它们的顶部部分与通道105连通。然后使得来自预加热器室110的气流进入反应室140的体积141中，气体在该区中从体积141流到体积130a，体积141的顶部部分被关闭。
在另一个变化形式中，可以通过装置的顶壁103提供用于气流的入口，然后使得预加热器室位于装置的顶部部分，体积130a与预加热器室连通并且在它们的底部关闭，同时体积141与通过烘箱的底壁形成的气体出口连通，或者反之亦可。
在现在描述的例子中，装置进行感应加热。更准确来说，圆柱形侧壁101构成感受器，例如，由石墨制造，其与通过位于烘箱外部的至少一个感应线圈108形成的感应绕组连接。装置109置于感应绕组108与壁101之间。以众所周知的方式，当通过交流电(A/C)向感应绕组108供电时，通过感受器101的加热来对烘箱进行加热。为此，将感应绕组的线圈与(未示出的)AC发电机相连。
通过感应绕组108产生的磁场诱发了壁101(感受器)中的电流，使其通过焦耳效应进行加热，从而使得存在于壁101内侧的元件经受辐射加热。
可以通过其他方式来加热装置100，例如，由诸如嵌入在壁101中的加热器电阻元件构成的电加热器方式进行加热。
预加热器室110具有多个分布板，在该例子(图2)中，是4块板111、112、113和114。每块分布板111、112、113和114具有相应的多个穿孔111a、112a、113a和114a，当预加热气流150时，气流150通过它们(图1)。
根据本发明，在分布板之间存在的空间中布置壁或导向装置。在现在描述的实施方式中：
在分布板111和112之间布置壁1110，每个壁1110与板111和112都发生接触；
在分布板112和113之间布置壁1120，每个壁1120与板112和113都发生接触；以及
在分布板113和114之间布置壁1130，每个壁1130与板114和113都发生接触。
此外，并且仍然是在现描述的实施方式中，还在分布板114和负载板120之间布置壁1140。
在本发明的变形形式的实施方式中，可以仅在有限数量的分布板或者事实上仅在两块分布板之间插入壁或导向装置。
在现在描述的实施方式中，壁1110、1120、1130和1140是平面形状并且在分布板之间垂直延伸，壁垂直于板的相对表面布置。分布板112、113和114分别被壁1110、1120和1130支撑。分布板111被间隔物1400支撑，其在装置100的底部120与板111的底表面之间延伸。
支撑了所有堆叠131的负载板120自身由位于装置100的底部102上的柱1410支撑。柱1410经由分别形成在分布板111、112、113和114中的开口111b、112b、113b和114b穿过分布板。因此，在预加热器室中，机械功能和热功能是分开的，柱1410具有支撑负载的机械功能，而分布板111、112、113和114以及壁1110、1120、1130和1140具有热功能。
分别存在于分布板111、112、113和114中的穿孔111a、112a、113a和114a优选布置成在两块相邻板之间是不同位置，从而延长分布板之间的气体流动路径。在图2中，穿孔111a和113a布置在板111和113的周界附近，而置于板111和113之间的板112中的穿孔112a布置在板112的中心附近。作为预加热器室中的最后一块板的板114在其整个表面上具有穿孔114a。
如图3所示，在板112上，以基本径向方向布置壁1120。该径向布置(还用于壁1110、1130和1140)起到对渗透进入两块分布板之间的空间中的气流150进行加热和引导的作用。在图3中，壁1120起到对经由板112中的穿孔112a渗透到分布板112和113之间的气流进行引导和加热的作用。因而，壁1110、1120、1130和1140对于板111、112、113、114和120之间的气体流动路径，分别限定了气体的流动路径。壁1110、1120、1130和1140是由适合在来自装置100的壁101的热辐射效应下进行加热的材料制造的，从而通过经由对流传热到气体以及通过优化所述气体在预加热器室内的流动，它们显著增加了预加热器室的热容量。
此外，优选壁的尺度小于分布板的半径，从而能够以最佳方式占据存在于分布板之间的空间中。在图3中，壁1120以三组径向排列，即第一组1120a最靠近板11的中心，第二组1120b位于板112的中间部分，以及第三组1120c在板112的周界附近。该布置同样适用于壁1110、1130和1140。这种作为多组方式的径向布置能够将大量的壁进一步远离板的中心安装，从而起到优化由壁构成的热交换区域的作用。此外，作为多组壁的这种径向布置使得气流的流动路径可以具有不连续性，起到优化其流动的作用。
用于本发明的预加热器室的壁是由对于对流传热具有良好能力的材料制造，例如石墨或者耐火金属如不锈钢或钼。壁还优选由如下材料制得，其在平行于分布板方向的热导率大于垂直于所述穿孔板方向的热导率。对于该材料，在分布板之间限定了各向异性导热性，这使得其可以获得装置的冷的部分(装置的底壁或顶壁，功能是预加热器室的定位)与负载区之间的热去耦，同时仍然增加预加热器室的热容量(heating capacity)。具体来说，此类材料可以是石墨或者热结构复合材料，所述热结构复合材料具有通过基质致密化的纤维强化，强化纤维大部分以平行于分布板的方向取向。
图4显示不同于上文所述的预加热器室110的预加热器室210，其中，使用了波状形状的壁。将预加热器室210结合到装置100中用于CVI致密化，如上文关于预加热器室110所示相同的方式。出于简化目的，在上文中描述过的装置100的元件不再进行描述。
预加热器室210具有多块分布板，在该例子中，4块分布板211、212、213和214分别具有相应的多个穿孔211a、212a、213a和214a，当预加热气体时，气体流动通过它们。根据本发明，在分布板之间存在的空间中布置壁或导向装置。在现在描述的实施方式中：
在分布板211和212之间布置壁2110，每个壁2110与板211和212都发生接触；
在分布板212和213之间布置壁2120，每个壁2120与板212和213都发生接触；以及
在分布板213和214之间布置壁2130，每个壁2130与板213和214都发生接触。
此外，仍然是在现描述的实施方式中，还在分布板214和负载板220之间布置壁2140。在本发明的变形形式的实施方式中，可以仅在有限数量的分布板或者事实上仅在两块分布板之间插入壁或导向装置。
在现在描述的实施方式中，壁2110、2120、2130和2140是波状形状并且它们在分布板之间垂直延伸，壁垂直于板的相对表面布置。相比于平面形状的壁，例如上文所述的壁1110、1120、1130和1140，壁的这种波状形状延长了壁，因此增加了当气体通过预加热器室210时与气体的热交换表面积。
分布板212、213和214分别被壁2110、2120和2130支撑。分布板211被间隔物1400支撑，其在装置100的底部102与板111的底表面之间延伸。
承载了所有堆叠131的负载板120由位于装置100的底壁102上的柱1410支撑。柱1410经由相应分布板211、212、213和214提供的开口211b、212b、213b和214b穿过分布板。在预加热器室中，这将机械功能与热功能分开，柱1410提供支撑负载的机械功能，而分布板211、212、213和214以及壁2110、2120、2130和2140具有热功能。
分别存在于分布板211、212、213和214中的穿孔211a、212a、213a和214a优选布置成在两块相邻板之间是不同位置，从而延长分布板之间的气体流动路径。在图4中，穿孔211a、212a、213a和214a的定位分别与上文所述的穿孔111a、112a、113a和114a相同。
如图5所示，在板213上，以基本径向方向布置壁2130。该径向布置(与壁2110、2120和2140相同)起到对渗透进入两块分布板之间的空间中的气流进行加热和引导的作用。在图5中，壁2130起到对经由板213中的穿孔213a渗透到分布板214和213之间的气流进行引导和加热的作用。
优选壁的尺度小于分布板的半径，从而能够以最佳方式占据存在于分布板之间的空间中。在图5中，壁2130以三组径向排列，即第一组2110a最靠近板213的中心，第二组2130b位于板213的中间部分，以及第三组2130c在板213的周界附近。这种作为多组方式的径向布置增加了进一步远离板的中心的壁的数量，从而优化由壁构成的热交换表面区域。此外，作为多组壁的这种径向布置使得气流的流动路径可以具有不连续性，优化其流动。
用于本发明的预加热器室的壁是由对于对流传热具有良好能力的材料制造，例如石墨或者耐火金属如不锈钢或钼。壁还优选由如下材料制得，其在平行于分布板方向的热导率大于垂直于所述穿孔板方向的热导率。具体来说，对于该材料，在分布板之间限定了各向异性导热性，从而提供装置的冷的部分(装置的底壁或顶壁，功能是预加热器室的定位)与负载区之间的热去耦，同时仍然增加预加热器室的热容量。具体来说，此类材料可以是石墨或者热结构复合材料，所述热结构复合材料具有通过基质致密化的纤维强化，强化的纤维大部分以平行于分布板的方向取向。
作为用于通过CVI致密化的装置中的对比例子，使用根据本发明的预加热器区(即，在板之间具有限定了气体的流动路径的壁的预加热器区)可以减少30％的预加热器室高度，同时仍然获得等于或优于现有技术的预加热器室(即，在板之间没有此类壁的室)的性能，其中，性能是以气流加热的容量和均匀性方面而言。这种通过本发明的方式减少了预加热器室的高度，产生了对于装置的工作区(即处理室)的相应高度增加，这进而增加其负载容量。

Claims (10)

1.一种热化学处理装置，其包括：反应室、至少一个气体入口以及位于所述气体入口和所述反应室之间的气体预加热器室，所述预加热器室具有一个在另一个上面的、相互间隔开的多个穿孔分布板，所述装置的特征在于，在至少两个相对分布板之间，所述预加热器室还包括限定了所述板之间的气流的流动路径的多个壁，每个壁在所述至少两个相对分布板之间垂直延伸。
2.如权利要求1所述的装置，其中，所述分布板是碟状的，并且至少部分的壁在所述板之间以径向方向延伸。
3.如权利要求1所述的装置，其中，至少部分壁具有波状形状。
4.如权利要求1所述的装置，其中，所述壁的导热性在平行于所述分布板的方向大于垂直于所述穿孔板的方向。
5.如权利要求4所述的装置，其中，所述壁是由复合材料制造的，所述复合材料具有通过基质致密化的纤维强化，并且强化纤维大部分以平行于分布板的方向延伸。
6.如权利要求4所述的装置，其中，所述壁是由石墨制造的。
7.如权利要求2所述的装置，其中，壁的数量在所述分布板的周界附近大于所述板的中心处。
8.如权利要求1所述的装置，其中，所述装置在所述预加热器室的所述分布板上方包括负载板，所述负载板经由穿过所述分布板的柱支撑。
9.如权利要求8所述的装置，其特征在于，所述负载板具有多个通道，每个通道具有与环状垂直堆叠协作进行致密化的作用。
10.如权利要求1所述的装置，其中，所述装置包括感受器，所述感受器由所述装置的侧壁构成，并且所述感受器与用于通过感应加热对所述侧壁进行加热的感应绕组连接。
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