CN106125291B - A kind of bistable state electric moistening display and preparation method thereof - Google Patents
A kind of bistable state electric moistening display and preparation method thereof Download PDFInfo
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- CN106125291B CN106125291B CN201610494895.8A CN201610494895A CN106125291B CN 106125291 B CN106125291 B CN 106125291B CN 201610494895 A CN201610494895 A CN 201610494895A CN 106125291 B CN106125291 B CN 106125291B
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
- G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting
Abstract
The invention discloses a kind of bistable state electric moistening displays and preparation method thereof, display includes lower substrate, lower substrate includes substrate and the conductive layer, insulating layer and the pixel wall construction that are set in turn on substrate, conductive layer includes multiple electrodes pair being made of first electrode and second electrode, the each pixel compartments of correspondence are arranged in each electrode, first electrode is set to one jiao of pixel compartments, an arc spacer tape is formed between first electrode and second electrode, insulating layer includes hydrophobic region and hydrophilic area, and hydrophilic area is a plurality of arc banded zone of corresponding each arc spacer tape；The configuration of the present invention is simple, preparation process is simple, and on public electrode and second electrode plus direct current, ink can be retracted to one jiao of pixel compartments corresponding to first electrode；After removing voltage, pixel keeps steady-state characteristic, then adds direct current on public electrode and first electrode, then ink can be moved and be sprawled in the region of the corresponding pixel compartments of second electrode, and after removing voltage, pixel will keep steady-state characteristic.
Description
Technical field
The present invention relates to electrowetting display technology field more particularly to a kind of bistable state electric moistening display and its preparation sides
Method.
Background technology
It is to utilize polar liquid surface tension in extra electric field manipulation pixel, and then promotion ink that electrowetting Electronic Paper, which is shown,
It sprawls and shrinks, realize the Novel reflection-type display technology of optical switch and gray-scale Control.Bistable state is Electronic Paper display technology
Realize the initial approach to become a Buddhist believer of super low energy consumption.Self-reflection type electrowetting display technology is born, and the exploration of display technology is soaked for bistable electro
Never stop.The advanced display technology Co., Ltd (ADT) of Germany utilizes liquid of the electrowetting under electrode array drive within 2008
Transport property proposes a kind of bistable electro wetting display structure (referring to bibliography [1]), is successfully realized high contrast, height
The segment encode of reflectivity is shown.However the effective aperture opening ratio loss of the design is serious, and it is limited to ink traversal rate response speed
Rate is low.University of Cincinnati of the U.S. in 2010 proposes that a kind of double-deck stereo channel electrowetting shows structure (referring to bibliography
[2]), the stability of fluid boundary form is obtained and kept by harsh channel symmetry.Stream is controlled by applying voltage
The movement and positioning of body interface achieve the effect that multistable operates.The structure can realize faster response speed, and greatly improve
Electrowetting shows reflectivity and aperture opening ratio.However, the structure fabrication process is considerably complicated, production prepares very difficult, it is difficult to real
Existing industrialization and application.
Bibliography [1]：Blankenbach,K.,Schmoll,A.,Bitman,A.,Bartels,F.,Jerosch,
D.,Novel highly reflective and bistable electrowetting displays,Journal of
the SID,16,237-244(2008).
Bibliography [2]：Yang S.,Zhou K.,Kreit E.,et al.,High reflectivity
electrowetting pixels with zero-power grayscale operation.,Applied physics
letters,2010,97(14):143501.
Invention content
Technical problem to be solved by the invention is to provide a kind of bistable state electric moistening displays and preparation method thereof.
The technical solution used in the present invention is：
A kind of bistable state electric moistening display, including lower substrate, the lower substrate include substrate and are set in turn in described
Conductive layer, insulating layer on substrate and the pixel wall construction for surrounding pixel compartments array, the conductive layer include multiple by the first electricity
The each pixel compartments of correspondence are arranged in the electrode pair of pole and second electrode composition, each electrode, and the first electrode is set to picture
One jiao of plain lattice forms an arc spacer bar between the first electrode and the second electrode of each electrode centering
Band, the insulating layer include hydrophobic region and hydrophilic area, and the hydrophilic area is that the position of corresponding each arc spacer tape is set
The a plurality of hydrophilic arc banded zone set.
In some specific embodiments, each electrode is identical to shape, each electrode pair and its formation
The arc spacer tape combination shape be rectangle.
In further preferred embodiment, the first electrode is multiple sector electrodes, the arc of the sector electrode
Shape side is towards the inside of the rectangle.
In some specific embodiments, the area ratio of first electrode and second electrode described in the electrode pair >=
1/3。
In some specific embodiments, the width of the arc spacer tape is 2-10 μm.
In some specific embodiments, the insulating layer is monolayer insulating layer structure or double-layer structure, the bilayer
Structure is made of underlying insulating layer and the upper layer composite layer on the underlying insulating layer, described in the underlying insulating layer covering
The upper surface of the substrate of the upper surface of conductive layer and arc spacer tape position, the upper layer composite layer is by hydrophobic region and parent
Pool forms, and the hydrophilic area is a plurality of hydrophilic arc ribbon area of the position setting of corresponding each arc spacer tape
Domain.
In some specific embodiments, the hydrophilic area shape is identical as the arc spacer tape shape.
The present invention also provides a kind of preparation method of bistable state electric moistening display as described above, the preparation methods
Include the steps that preparing lower substrate, described the step of preparing lower substrate includes the following steps：
S1：Substrate is taken, prepares the conductive layer on the substrate, the conductive layer includes multiple by the first electrode
With the electrode pair of second electrode composition；
S2：Coating prepares the insulating layer on preparing the substrate for having the conductive layer, is led described in the insulating layer covering
The upper surface of the substrate of the upper surface of electric layer and arc spacer tape position；
S3：Under mask plate protection, hydrophilic modifying, corresponding each arc interval are patterned to the insulating layer
The position of band carries out hydrophilic modifying, obtains the hydrophilic area；
S4：Pixel wall construction is prepared on the insulating layer, obtains the lower substrate of electric moistening display.
It is that institute is prepared using physical vaporous deposition on the substrate in some specific embodiments, in the S1
State conductive layer.
In some specific embodiments, graphical hydrophilic modifying is hydrophilic by graphical magnetron sputtering in the S3
What material or graphical dry etching were realized.
The beneficial effects of the invention are as follows：
The bistable electro wetting display device structure technique proposed at present is considerably complicated, it is difficult to realize that industrialization and application push away
Extensively, for this problem, the present invention provides a kind of bistable state electric moistening display and preparation method thereof, the bistable electro wetting
Display includes lower substrate, and the lower substrate includes substrate and the conductive layer being set in turn on the substrate, insulating layer and encloses
The pixel wall construction of pixel lattice array, the conductive layer include multiple electrodes pair being made of first electrode and second electrode,
The each pixel compartments of correspondence are arranged in each electrode, and the first electrode is set to one jiao of pixel compartments, each electrode pair
In the first electrode and the second electrode between form an arc spacer tape, the insulating layer includes hydrophobic region and parent
Pool, the hydrophilic area are a plurality of hydrophilic arc banded zone of the position setting of corresponding each arc spacer tape；This
Inventive structure is simple, and preparation process is simple, by adding direct current on the public electrode of upper substrate and the second electrode, in electricity
Under the action of wetting effect, ink can be retracted to one jiao of pixel compartments corresponding to the first electrode；After removing voltage, ink will
It is remained stationary as under the constraint of hydrophilic area, pixel keeps steady-state characteristic, then the public electrode in upper substrate and the first electrode
Upper plus direct current, when voltage overcomes the potential barrier of hydrophilic area enough, then ink can move and in the corresponding pixel of the second electrode
The region of lattice is sprawled, and after removing voltage, ink will remain stationary as under the constraint of hydrophilic area, and pixel will keep steady-state characteristic.
Description of the drawings
Fig. 1 is that bistable electro soaks display local sectional view；
Fig. 2 is the conductive layer vertical view of bistable state electric moistening display lower substrate；
Fig. 3 is partial enlarged view of the oil droplet on hydrophilic area boundary；
Fig. 4 is the relational graph between the droplets contact angle and aperture opening ratio/voltage of hydrophilic area；
Fig. 5 is the driver' s timing figure of bistable state electric moistening display；
Fig. 6 is that bistable electro wetting shows fundamental diagram.
Specific implementation mode
Referring to Fig.1, the present invention provides a kind of bistable state electric moistening display, electrowetting also becomes electricity moistening, the present invention
It is equally applicable to electric wet-type display, the bistable state electric moistening display includes the lower substrate and upper substrate being oppositely arranged, institute
It includes substrate 1 and the conductive layer, insulating layer and the picture for surrounding 10 array of pixel compartments that are set in turn on the substrate 1 to state lower substrate
Plain wall construction 2, the conductive layer include multiple electrodes pair being made of first electrode 3 and second electrode 4, each electrode pair
Corresponding each pixel compartments 10 are arranged, and the first electrode 3 is set to one jiao of pixel compartments 10, and described the of each electrode centering
Forming an arc spacer tape 5 between one electrode 3 and the second electrode 4, the insulating layer includes hydrophobic region 6 and hydrophilic area 7,
The hydrophilic area 7 is a plurality of hydrophilic arc banded zone of the position setting of corresponding each arc spacer tape 5, it is described on
Substrate includes substrate 9 and the public electrode 8 on the substrate 9, encapsulates and is formed between the lower substrate and the upper substrate
One closed chamber, the chamber is interior to be filled with mutual exclusive first fluid 11 and second fluid 12, and the first fluid 11 is
Electrolyte solution, the second fluid 12 are ink.
With reference to Fig. 2, Fig. 2 is the conductive layer vertical view of bistable state electric moistening display lower substrate, and each electrode is to shape
Shape is identical, and the shape of the combination of each electrode pair and its arc spacer tape 5 formed is rectangle, in the present embodiment
In, the shape of the combination of each electrode pair and its arc spacer tape 5 formed is square.The first electrode
3 be multiple sector electrodes, and the arc-shaped side of the sector electrode is towards the inside of the rectangle, the fan of each electrode pair
It is one jiao identical that shape electrode is set to direction in 10 4 angles of each pixel compartments.In a preferred embodiment, the electrode
Area ratio >=1/3 of first electrode 3 and second electrode 4 to described in.The width of the arc spacer tape 5 is 2-10 μm.
In a further preferred embodiment, 7 shape of the hydrophilic area is identical as 5 shape of arc spacer tape.
Heretofore described insulating layer is monolayer insulating layer structure or double-layer structure, and the double-layer structure is by underlying insulating layer
With the upper layer composite layer composition on the underlying insulating layer, the underlying insulating layer cover the conductive layer upper surface and
The upper surface of the substrate 1 of 5 position of arc spacer tape, the upper layer composite layer are made of hydrophobic region 6 and hydrophilic area 7, institute
State a plurality of hydrophilic arc banded zone for the position setting that hydrophilic area 7 is corresponding each arc spacer tape 5.In this implementation
In example, the insulating layer is monolayer insulating layer structure, and the monolayer insulating layer structure is made of hydrophobic region 6 and hydrophilic area 7.
Under unpowered state, due to wetting effect, the ink spreading in pixel compartments is filled in hydrophobic region 6, each
In pixel compartments 10, ink is divided into two parts, intersection of the oil in the hydrophilic area 7 and the hydrophobic region 6 by the hydrophilic area 7
Form electrolyte-ink-insulating layer three-phase boundary line.
With reference to Fig. 3, according to principle of energy balance, pixel opening process is equivalent to electric field energy and overcomes viscous work(across hydrophilic arc
Shape banded zone is stored as the process of surface potential energy, and pixel closing process can then regard storage surface potential energy as and overcome adhesion work
It is spontaneous to sprawl process.To continue to keep oil droplet pattern after a loss of power, then the oil-water interfaces near three-phase line of contact is needed to meet heat
Mechanical balance, i.e. the oil droplet static contact angle θ of the hydrophilic area 7 need to meet the form after power-up；To ensure dynamic (dynamical) stabilization
Then needing to meet the ink static contact angle θ of contact angle >=hydrophilic area 7 of ink and surface of insulating layer, (i.e. hydrophilic area is to water
The supplementary angle of contact angle≤θ).
1, the relationship between pixel aperture ratio WA and application voltage
Assuming that the oil droplet filled in pixel compartments keeps spherical cap shape, meet volume conservation；Then give applied voltage, you can logical
Cross the information that following formula obtains pixel aperture ratio：
According to Lippmann-Yong equations, the relationship such as formula (1) of the contact angle θ and voltage V of oil droplet：
Wherein, ε0And εAFIndicate that permittivity of vacuum and relative dielectric constant, d are the thickness of insulating layer respectively, γ ow are
The interfacial tension of water and oil droplet, cos θ (V) indicate the function of the V cos θ indicated.Additionally, due to γow+γoI＜ γIw, then oily
Ink can be sprawled and cos θ completely on drain insulating layer surface0=1.
Since the volume of oil droplet remains unchanged, with the contact area A of the V oil droplets indicated and hydrophobic regionoilFunction
Aoil(V) such as formula (2)：
In no application voltage, the initial contact angle α (usually less than 10 °) of spherical crown shape oil droplet can use blob volume v
It is indicated with contact radius R, such as formula (3)：
Formula (4) is may be defined as to the aperture opening ratio WA of pixel：
Wherein, A0Indicate the contact area of ink and lower substrate when voltage is 0.
In summary equation can obtain, with the function WA (V) such as formula (5) of the V WA indicated：
2, the grease confining region contact angle θ design requirements under given voltage
According to formula (5) it is found that device opening rate with droplets contact angle and driving voltage is in functional relation.According to
Lippmann-Yong equations, contact angle θ when oil droplet reaches balance after power-upeSuch as formula (6)：
Wherein, θ0For oil droplet initial contact angle.It, then need to be in ink if after removing voltage, oil droplet to be made to still maintain pattern
The surface for shrinking edge carries out hydrophilic modifying, and the droplets contact angle of this region surface is made to meet θ >=θeEven if also hydrophilic area
Droplets contact angle θ meets θ >=θe, to balance the surface potential energy of drop.
Each physical parameter setting, aperture opening ratio and voltage and the parent of test bistable state electric moistening display are set according to table 1
The relationship at the droplets contact angle in pool obtains experimental result such as Fig. 4.Can be seen that according to such as Fig. 4 can be by regulating and controlling voltage tune
Droplets contact angle and the display aperture ratio of hydrophilic area are saved, voltage is bigger, and contact angle is smaller, and aperture opening ratio is bigger.For what is given
Aperture opening ratio design requirement can calculate the hydrophilic modifying demand of corresponding driving voltage value and arc banded zone by upper formula
(i.e. contact angle θ >=θe)。
The setting of 1 each physical parameter of table
| The viscosity (Pas) of oil droplet | μ=0.0018 |
| Interfacial tension (the mJ/m of water and oil droplet2) | γow=22 |
| The initial contact angle (degrees) of oil droplet | θ0=0 |
| Oil droplet volume (μm3) | V=123750 |
| The original depth (μm) of oil film | H=5.6 |
| Relative dielectric constant | εAF=2.1 |
| Pixel size (μm) | Lx=150 |
| The thickness (μm) of insulating layer | D=1.5 |
It is the driver' s timing figure of bistable state electric moistening display with reference to Fig. 5-6, Fig. 5, Fig. 6 is that bistable electro wetting shows work
Make schematic diagram, electric moistening display is controlled according to the driver' s timing figure of Fig. 5, under unpowered state, due to wetting effect, fills out
The ink spreading in pixel compartments is filled in hydrophobic region 6, in each pixel compartments, ink is divided into two parts by the hydrophilic area 7,
Oil forms electrolyte-ink-insulating layer three-phase boundary line in the intersection of the hydrophilic area 7 and the hydrophobic region 6, first,
In public electrode 8 and second electrode 4 plus direct current, under the action of electrowetting effect, second fluid 12 can be retracted to described the
One jiao (such as Fig. 6 B) of one electrode, 3 corresponding pixel compartments 10；After removing voltage, ink will be kept not under the constraint of hydrophilic area 7
Dynamic, pixel keeps steady-state characteristic (such as Fig. 6 C)；Add direct current on the public electrode of upper substrate 8 and the first electrode 3 again, when
Voltage overcomes the potential barrier of hydrophilic area 7 enough, then second fluid 12 can move and in 4 corresponding pixel compartments 10 of the second electrode
It sprawls (such as Fig. 6 D) in region；After removing voltage, second fluid 12 will remain stationary as under the constraint of hydrophilic area 7, and pixel will be kept
Steady-state characteristic (such as Fig. 6 E).
The preparation method of bistable state electric moistening display as described above, the preparation method includes preparing the step of lower substrate
Suddenly, described the step of preparing lower substrate, includes the following steps：S1：Substrate 1 is taken, the conductive layer, institute are prepared on the substrate 1
It includes multiple electrodes pair being made of the first electrode 3 and the second electrode 4 to state conductive layer；S2：There is described lead in preparation
Coating prepares the insulating layer on the substrate 1 of electric layer, and the insulating layer covers between the upper surface of the conductive layer and the arc
The upper surface of the substrate of 5 position of parting bead band；S3：Under mask plate protection, hydrophilic modifying is patterned to the insulating layer, it is right
It answers the position of each arc spacer tape 5 to carry out hydrophilic modifying, obtains the hydrophilic area 7；S4：After modification it is described absolutely
Pixel wall construction 2 is prepared in edge layer, obtains the lower substrate of electric moistening display.Wherein, it is heavy using physical vapor in the S1
Area method prepares the conductive layer on the substrate, and graphical hydrophilic modifying is hydrophilic by graphical magnetron sputtering in the S3
What material or graphical dry etching were realized.The S2 can be that directly coating is single on preparing the substrate 1 for having the conductive layer
Layer insulating material, is prepared monolayer insulating layer, and the monolayer insulating layer covers the upper surface of the conductive layer and the arc
The upper surface of the substrate of shape spacer tape position；The S2 can also be first to apply to plant on preparing the substrate for having the conductive layer
Underlying insulating layer is prepared in layer insulating, and one layer of hydrophobic material is then coated on underlying insulating layer, obtains double-layer structure
Insulating layer.
Embodiment 1：
Substrate is taken, the substrate of glass material, the other materials with same effect is used to can be used as base in the present embodiment
Plate.One layer of silver, gold or ITO etc. are deposited in the different zones of substrate surface respectively by modes such as magnetron sputterings prepares conduction
Layer, the conductive layer includes multiple electrodes pair being made of first electrode and second electrode, and each electrode is each to correspondence
Pixel compartments are arranged, and the first electrode is set to one jiao of pixel compartments, the first electrode of each electrode centering and described
An arc spacer tape is formed between second electrode.The thickness of conductive layer can be controlled by the time of magnetron sputtering, usually
Film thickness monitoring is between 25-100nm.The narrower the width of the arc spacer tape the better, usually 2-10 microns.Wherein, as
The aperture opening ratio of element is by the area of electrode 1 and electrode 2 than controlling, and the area of second electrode and first electrode is than being typically larger than 1/3.
There is the substrate surface of the conductive layer to form one layer by modes such as spin coating, silk-screen printing, slot coateds preparing
Uniform drain insulating layer, the material of drain insulating layer is preferably AF1600 or AF1600X in the present invention, and solvent is perfluoro solvent
7100, it is configured to the solution that mass fraction is 3~5%, is placed on baking-curing 90min in 85 DEG C of baking ovens after the film was formed.
The arc spacer tape is the arc strip strip region that the first electrode and the second electrode is isolated, and is used
Mask plate carries out hydrophilic modifying according to the pattern of the arc spacer tape to the drain insulating layer, and the hydrophilic modifying can be with
It is realized by the method for graphical dry etching RIE or the specific water wetted material of magnetron sputtering.So that surface of insulating layer includes
Hydrophobic region and hydrophilic area.
By the methods of slot coated or spin coating first layer slightly water-wet photoresist (such as SU-8 is coated on drain insulating layer surface
Deng), thickness is 5-8 μm.After being handled by heated drying, obtained through standard lithographic and developing process under the action of mask plate weak
Hydrophilic pixels wall construction.
Ink filling is carried out under electrolyte solution environment, ink material is usually non-polar dyes small molecule in grease type
Lysate in solvent, electrolyte solution usually select polarity conductivity solution (such as sodium-chloride water solution).Since hydrophobic region is to oil
Ink is filled in pixel compartments by black wettability preference, and slightly water-wet pixel wall has hydrophily, and can separate ink makes its point
It is not filled in each pixel compartments, electrolyte solution is continuously covered in above ink and pixel wall.
Upper substrate is to prepare the glass substrate for having public electrode, wherein public electrode is with high transparency and low resistance
The conductive layer (preferably ITO) of characteristic.
The sealing glue frame that the encapsulation of upper substrate and lower substrate is shaped using ultra-violet curing pressure sensitive adhesive silk-screen；Sealing glue frame is one
Kind pressure sensitive adhesive, the material selected in of the invention is UV pressure-sensitive acrylates, is passed through according to the size of electric moistening display part
UV pressure-sensitive acrylates are graphically printed on upper substrate surface by screen printing mode, in 100mj/cm2Ultraviolet light environments
Lower solidification 10s obtains sealing glue frame.Finally, in electrolyte solution the encapsulation for realizing device is bonded by flattening.Above section
Technique can refer to patent 201310740361.5 and patent 201410030375.2.
Claims (10)
1. a kind of bistable state electric moistening display, including lower substrate, which is characterized in that the lower substrate includes substrate and sets successively
Conductive layer, insulating layer and the pixel wall construction for surrounding pixel compartments array being placed on the substrate, the conductive layer includes multiple
The each pixel compartments of correspondence are arranged in the electrode pair being made of first electrode and second electrode, each electrode, first electricity
Pole is set to one jiao of pixel compartments, and an arc is formed between the first electrode and the second electrode of each electrode centering
Spacer tape, the insulating layer include hydrophobic region and hydrophilic area, and the hydrophilic area is corresponding each arc spacer tape
The a plurality of arc banded zone of position setting.
2. bistable state electric moistening display according to claim 1, which is characterized in that each electrode is to shape phase
Together, the shape of the combination of each electrode pair and its arc spacer tape formed is rectangle.
3. bistable state electric moistening display according to claim 2, which is characterized in that the first electrode is fan-shaped electricity
Pole, the arc-shaped side of the sector electrode is towards the inside of the rectangle.
4. bistable state electric moistening display according to claim 1, which is characterized in that the first electricity described in the electrode pair
Area ratio >=1/3 of pole and second electrode.
5. bistable state electric moistening display according to claim 1, which is characterized in that the width of the arc spacer tape
It is 2-10 μm.
6. bistable state electric moistening display according to claim 1, which is characterized in that the insulating layer is monolayer insulating layer
Structure or double-layer structure, upper layer composite layer group of the double-layer structure by underlying insulating layer and on the underlying insulating layer
At, the underlying insulating layer covers the upper surface of the upper surface of the conductive layer and the substrate of arc spacer tape position,
The upper layer composite layer is made of hydrophobic region and hydrophilic area, and the hydrophilic area is the position of corresponding each arc spacer tape
The a plurality of arc banded zone being arranged.
7. bistable state electric moistening display according to claim 1, which is characterized in that the hydrophilic area shape and the arc
Shape spacer tape shape is identical.
8. a kind of preparation method of such as claim 1-7 any one of them bistable state electric moistening displays, which is characterized in that institute
It includes the steps that preparing lower substrate to state preparation method, and described the step of preparing lower substrate includes the following steps：
S1：Substrate is taken, prepares the conductive layer on the substrate, the conductive layer includes multiple by the first electrode and institute
State the electrode pair of second electrode composition；
S2：Coating prepares the insulating layer on preparing the substrate for having the conductive layer, and the insulating layer covers the conductive layer
Upper surface and arc spacer tape position substrate upper surface；
S3：Under mask plate protection, hydrophilic modifying, corresponding each arc spacer tape are patterned to the insulating layer
Position carry out hydrophilic modifying, obtain the hydrophilic area；
S4：Pixel wall construction is prepared on the insulating layer after modification, obtains the lower substrate of electric moistening display.
9. the preparation method of bistable state electric moistening display according to claim 8, which is characterized in that be to use in the S1
Physical vaporous deposition prepares the conductive layer on the substrate.
10. the preparation method of bistable state electric moistening display according to claim 8, which is characterized in that figure in the S3
Changing hydrophilic modifying is realized by graphical magnetron sputtering water wetted material or graphical dry etching.
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| CN106773013B (en) * | 2016-11-22 | 2019-01-01 | 华南师范大学 | A kind of electrowetting optical device and preparation method |
| CN107092088A (en) * | 2017-05-05 | 2017-08-25 | 华南师范大学 | A kind of bistable electro wetting board structure and display device |
| CN107300763B (en) * | 2017-07-13 | 2020-04-07 | 华南师范大学 | Bistable electrowetting display device |
| CN107765423A (en) * | 2017-10-17 | 2018-03-06 | 华南师范大学 | A kind of bistable electro wetting display device and preparation method thereof |
| CN108627969B (en) * | 2018-05-11 | 2020-08-18 | 南京晶奥微光电技术有限公司 | Bistable electrowetting structure and preparation process thereof |
| CN109932815A (en) * | 2019-03-08 | 2019-06-25 | 华南师范大学 | A kind of bistable electro wetting display base plate and preparation method thereof and display device |
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