CN106125291A - A kind of bistable state electric moistening display and preparation method thereof - Google Patents

Abstract

The invention discloses a kind of bistable state electric moistening display and preparation method thereof, display includes infrabasal plate, infrabasal plate includes substrate and the conductive layer, insulating barrier and the pixel wall structure that are set in turn on substrate, conductive layer includes multiple electrode pair being made up of the first electrode and the second electrode, each pixel compartments corresponding is arranged by each electrode, first electrode is located at a jiao of pixel compartments, an arc spacer tape is formed between first electrode and the second electrode, insulating barrier includes hydrophobic region and hydrophilic area, and hydrophilic area is a plurality of arc strip region of each arc spacer tape corresponding；Present configuration is simple, and preparation technology is simple, and public electrode and the second electrode add unidirectional current, and ink can be retracted to a jiao of pixel compartments corresponding to the first electrode；After removing voltage, pixel keeps steady-state characteristic, then adds unidirectional current on public electrode and the first electrode, then ink can move and sprawl in the region of pixel compartments corresponding to the second electrode, and after removing voltage, pixel will keep steady-state characteristic.

Description

A kind of bistable state electric moistening display and preparation method thereof

Technical field

The present invention relates to electrowetting Display Technique field, particularly relate to a kind of bistable state electric moistening display and preparation side thereof Method.

Background technology

Electrowetting Electronic Paper shows it is to utilize polar liquid surface tension in extra electric field manipulation pixel, and then promotes ink Sprawl and shrink, it is achieved the Novel reflection-type Display Technique of optical switch and gray-scale Control.Bistable state is Electronic Paper Display Technique Realize the initial approach to become a Buddhist believer of super low energy consumption.Self-reflection type electrowetting Display Technique is born, for the exploration of bistable electro moistening Display Technique Never stop.Within 2008, the advanced Display Technique company limited (ADT) of Germany utilizes electrowetting liquid under electrode array drive Transport property proposes a kind of bistable electro moistening display structure (seeing list of references [1]), is successfully realized high-contrast, height The segment encode of reflectance shows.But the loss of this design effective aperture opening ratio is serious, and it is limited to ink traversal rate response speed Rate is low.University of Cincinnati of the U.S. in 2010 proposes a kind of double-deck stereo passage electrowetting display structure and (sees list of references [2]), by harsh passage symmetry acquisition and the stability of holding fluid boundary form.Stream is controlled by applying voltage The movement of body interface and location, reach the effect of multistable operation.This structure can realize response speed faster, and is greatly improved Electrowetting display reflectance and aperture opening ratio.But, this structure fabrication process is considerably complicated, produces preparation the most difficult, it is difficult to real Existing industrialization and application.

List of references [1]: Blankenbach, K., Schmoll, A., Bitman, A., Bartels, F., Jerosch, D.,Novel highly reflective and bistable electrowetting displays,Journal of the SID,16,237-244(2008).

List of references [2]: Yang S., Zhou K., Kreit E., et al., High reflectivity electrowetting pixels with zero-power grayscale operation.,Applied physics letters,2010,97(14):143501.

Summary of the invention

The technical problem to be solved is to provide a kind of bistable state electric moistening display and preparation method thereof.

The technical solution used in the present invention is:

A kind of bistable state electric moistening display, including infrabasal plate, described infrabasal plate includes substrate and is set in turn in described Conductive layer on substrate, insulating barrier and surround the pixel wall structure of pixel compartments array, described conductive layer includes multiple by the first electricity Pole and the electrode pair of the second electrode composition, each pixel compartments corresponding is arranged by each described electrode, and described first electrode is located at picture One jiao of element lattice, forms an arc spacer bar between described first electrode and described second electrode of each described electrode centering Band, described insulating barrier includes that the position that hydrophobic region and hydrophilic area, described hydrophilic area are each described arc spacer tape corresponding sets The a plurality of hydrophilic arc strip region put.

In some specific embodiments, each described electrode is identical to shape, each described electrode to and formed Described arc spacer tape combination be shaped as rectangle.

In further preferred embodiment, described first electrode is multiple sector electrode, the arc of described sector electrode Shape limit is towards the inside of described rectangle.

In some specific embodiments, described electrode to described in the first electrode and the second electrode area ratio >= 1/3。

In some specific embodiments, the width of described arc spacer tape is 2-10 μm.

In some specific embodiments, described insulating barrier is single layer dielectrics Rotating fields or double-decker, described bilayer Structure is made up of underlying insulating layer and the upper strata composite bed being located on described underlying insulating layer, and described underlying insulating layer covers described The upper surface of conductive layer and the upper surface of the substrate of described arc spacer tape position, described upper strata composite bed is by hydrophobic region and parent Pool forms, and described hydrophilic area is a plurality of hydrophilic arc strip zone of the position setting of each described arc spacer tape corresponding Territory.

In some specific embodiments, described hydrophilic area shape is identical with described arc spacer tape shape.

Present invention also offers the preparation method of a kind of bistable state electric moistening display as above, described preparation method Including preparing the step of infrabasal plate, the described step preparing infrabasal plate comprises the following steps:

S1: take substrate, prepares described conductive layer on the substrate, and described conductive layer includes multiple by described first electrode Electrode pair with described second electrode composition；

S2: have coating on the substrate of described conductive layer to prepare described insulating barrier in preparation, lead described in the covering of described insulating barrier The upper surface of electric layer and the upper surface of the substrate of described arc spacer tape position；

S3: under mask plate is protected, is patterned hydrophilic modifying, corresponding each described arc interval to described insulating barrier The position of band carries out hydrophilic modifying, obtains described hydrophilic area；

S4: prepare pixel wall structure on described insulating barrier, obtain the infrabasal plate of electric moistening display.

In some specific embodiments, described S1 is use physical vaporous deposition to prepare institute on the substrate State conductive layer.

In some specific embodiments, in described S3, graphical hydrophilic modifying is hydrophilic by graphical magnetron sputtering Material or graphical dry etching realize.

The invention has the beneficial effects as follows:

The bistable electro moistening display device structure technique proposed at present is considerably complicated, it is difficult to realize industrialization and application pushes away Extensively, for this problem, the invention provides a kind of bistable state electric moistening display and preparation method thereof, described bistable electro moistening Display includes that infrabasal plate, described infrabasal plate include substrate and the conductive layer, the insulating barrier that are set in turn on described substrate and enclose The pixel wall structure of pixel lattice array, described conductive layer includes multiple electrode pair being made up of the first electrode and the second electrode, Each pixel compartments corresponding is arranged by each described electrode, and described first electrode is located at a jiao of pixel compartments, each described electrode pair In described first electrode and described second electrode between form an arc spacer tape, described insulating barrier includes hydrophobic region and parent Pool, described hydrophilic area is a plurality of hydrophilic arc strip region of the position setting of each described arc spacer tape corresponding；This Inventive structure is simple, and preparation technology is simple, by adding unidirectional current, at electricity on the public electrode of upper substrate and described second electrode Under the effect of wetting effect, ink can be retracted to a jiao of pixel compartments corresponding to described first electrode；After removing voltage, ink will Remaining stationary as under the constraint of hydrophilic area, pixel keeps steady-state characteristic, then at the public electrode of upper substrate and described first electrode On add unidirectional current, when voltage enough overcomes the potential barrier of hydrophilic area, then ink can move and in pixel corresponding to described second electrode The region of lattice is sprawled, and after removing voltage, ink will remain stationary as under the constraint of hydrophilic area, and pixel will keep steady-state characteristic.

Accompanying drawing explanation

Fig. 1 is bistable electro moistening display local sectional view；

Fig. 2 is the conductive layer top view of bistable state electric moistening display infrabasal plate；

Fig. 3 is the oil droplet partial enlarged drawing on border, hydrophilic area；

Fig. 4 is the graph of a relation between the droplets contact angle of hydrophilic area and aperture opening ratio/voltage；

Fig. 5 is the driver' s timing figure of bistable state electric moistening display；

Fig. 6 is that bistable electro moistening shows fundamental diagram.

Detailed description of the invention

With reference to Fig. 1, the invention provides a kind of bistable state electric moistening display, it is moistening that electrowetting also becomes electricity, the present invention Being equally applicable to electric wet-type display, described bistable state electric moistening display includes infrabasal plate and the upper substrate being oppositely arranged, institute State infrabasal plate include substrate 1 and the conductive layer being set in turn on described substrate 1, insulating barrier and surround the picture of pixel compartments 10 array Element wall construction 2, described conductive layer includes multiple electrode pair being made up of the first electrode 3 and the second electrode 4, each described electrode pair Each pixel compartments 10 corresponding is arranged, and described first electrode 3 is located at a jiao of pixel compartments 10, described the of each described electrode centering Forming an arc spacer tape 5 between one electrode 3 and described second electrode 4, described insulating barrier includes hydrophobic region 6 and hydrophilic area 7, Described hydrophilic area 7 is a plurality of hydrophilic arc strip region that the position of each described arc spacer tape 5 corresponding is arranged, described on Substrate includes substrate 9 and the public electrode 8 being located on described substrate 9, and between described infrabasal plate and described upper substrate, encapsulation is formed One closes chamber, is filled with mutual exclusive first fluid 11 and second fluid 12 in described chamber, and described first fluid 11 is Electrolyte solution, described second fluid 12 is ink.

With reference to the conductive layer top view that Fig. 2, Fig. 2 are bistable state electric moistening display infrabasal plate, each described electrode is to shape Shape is identical, each described electrode to and formed described arc spacer tape 5 combination be shaped as rectangle, at the present embodiment In, each described electrode to and formed described arc spacer tape 5 combination be shaped as square.Described first electrode 3 is multiple sector electrode, the arc-shaped side of described sector electrode towards the inside of described rectangle, the described fan of each described electrode pair Shape electrode is located at a jiao that in each 10 4 angles of described pixel compartments, direction is identical.In a preferred embodiment, described electrode First electrode 3 and area ratio >=1/3 of the second electrode 4 described in.The width of described arc spacer tape 5 is 2-10 μm. In a further preferred embodiment, described hydrophilic area 7 shape is identical with described arc spacer tape 5 shape.

Heretofore described insulating barrier is single layer dielectrics Rotating fields or double-decker, and described double-decker is by underlying insulating layer With the upper strata composite bed composition being located on described underlying insulating layer, described underlying insulating layer cover described conductive layer upper surface and The upper surface of the substrate 1 of described arc spacer tape 5 position, described upper strata composite bed is made up of hydrophobic region 6 and hydrophilic area 7, institute State a plurality of hydrophilic arc strip region that the position that hydrophilic area 7 is each described arc spacer tape 5 corresponding is arranged.In this enforcement In example, described insulating barrier is single layer dielectrics Rotating fields, and described single layer dielectrics Rotating fields is made up of hydrophobic region 6 and hydrophilic area 7.

Under being not powered on state, due to wetting effect, the ink spreading being filled in pixel compartments is in hydrophobic region 6, at each In pixel compartments 10, ink is divided into two parts by described hydrophilic area 7, and oil is at described hydrophilic area 7 and the intersection of described hydrophobic region 6 Form electrolyte-ink-insulating barrier three-phase boundary line.

With reference to Fig. 3, according to principle of energy balance, pixel opening process is equivalent to electric field energy and overcomes viscous merit to stride across hydrophilic arc Shape banded zone is stored as the process of surface potential energy, and pixel closing process then can be regarded storage surface potential energy as and overcome adhesion work Spontaneous sprawl process.To continue after a loss of power to keep oil droplet pattern, then need the oil-water interfaces near three-phase line of contact to meet heat Mechanical balance, the oil droplet static contact angle θ of the most described hydrophilic area 7 need to meet the form after powering up；Dynamic (dynamical) stable for guaranteeing (i.e. hydrophilic area is to water then to need to meet the ink static contact angle θ of ink and the contact angle >=described hydrophilic area 7 of surface of insulating layer The supplementary angle of contact angle≤θ).

1, the relation between pixel aperture ratio WA and applying voltage

The oil droplet filled in assuming pixel compartments keeps spherical cap shape, meets volume conservation；Then give applied voltage, Ji Ketong Cross below equation obtain pixel aperture ratio information:

According to Lippmann-Yong equation, the relation such as formula (1) of the contact angle θ and voltage V of oil droplet:

$cos\mathrm{\θ}\left(V\right)=1-\frac{{\mathrm{\ϵ}}_0{\mathrm{\ϵ}}_{AF}{V}^2}{2{\mathrm{d\γ}}_{ow}}---\left(1\right)$

Wherein, ε₀And ε_AFRepresenting permittivity of vacuum and relative dielectric constant respectively, d is the thickness of insulating barrier, and γ ow is Water and the interfacial tension of oil droplet, the function of the cos θ that cos θ (V) expression V represents.Additionally, due to γ_ow+γ_oI＜ γ_Iw, then oil Ink can be sprawled and cos θ completely on drain insulating layer surface₀=1.

Owing to the volume of oil droplet keeps constant, the oil droplet therefore represented with V and contact area A of hydrophobic region_oilFunction A_oil(V) such as formula (2):

$A_{oil}\left(V\right)={\mathrm{\πsin}}^2\mathrm{\θ}\left(V\right)\×{\left(\frac{3v}{\mathrm{\π}(2-3cos\mathrm{\θ}(V)+{\cos }^3\mathrm{\θ}(V\left)\right)}\right)}^{2/3}---\left(2\right)$

When not applying voltage, the initial contact angle α (typically smaller than 10 °) of spherical crown shape oil droplet can use blob volume v Represent with contact radius R, such as formula (3):

$v=\frac{{\mathrm{\πR}}^3}{3sin\mathrm{\α}}{(1-cos\mathrm{\α})}^2(2+cos\mathrm{\α})---\left(3\right)$

Thus the aperture opening ratio WA of pixel may be defined as formula (4):

$WA\left(V\right)=(1-\frac{A_{oil}\left(V\right)}{A_0})---\left(4\right)$

Wherein, A₀Represent ink and the contact area of infrabasal plate when voltage is 0.

Comprehensive above equation can obtain, with the function WA (V) such as formula (5) of the WA that V represents:

$WA\left(V\right)=(1-\frac{{\sin }^2\mathrm{\θ}\left(V\right)\×{(2-3cos\mathrm{\α}+{\cos }^3\mathrm{\α})}^{2/3}}{{\sin }^2\mathrm{\α}\×{(2-3cos\mathrm{\θ}(V)+{\cos }^3\mathrm{\θ}(V\left)\right)}^{2/3}})---\left(5\right)$

2, the profit confining region contact angle θ under given voltage designs requirement

Understanding according to formula (5), device opening rate is functional relationship with droplets contact angle and driving voltage.According to Lippmann-Yong equation, powers up rear oil droplet and reaches contact angle θ during balance_eSuch as formula (6):

${\mathrm{\θ}}_e=\arccos ({\mathrm{cos\θ}}_0-\frac{V^2{\mathrm{\ϵ}}_0{\mathrm{\ϵ}}_{AF}}{2{\mathrm{d\γ}}_{ow}})---\left(6\right)$

Wherein, θ₀For oil droplet initial contact angle.If after removing voltage, oil droplet to be made remains in that pattern, then need to be at ink The surface shrinking edge carries out hydrophilic modifying, makes the droplets contact angle of this region surface meet θ >=θ_eEven if, also hydrophilic area Droplets contact angle θ meets θ >=θ_e, to balance the surface potential energy of drop.

Set each physical parameter according to table 1 to set, the aperture opening ratio of test bistable state electric moistening display and voltage and parent The relation at the droplets contact angle in pool, obtains experimental result such as Fig. 4.According to such as Fig. 4 it can be seen that can by regulation and control voltage adjust The droplets contact angle of joint hydrophilic area and display aperture ratio, voltage is the biggest, and contact angle is the least, and aperture opening ratio is the biggest.For given Aperture opening ratio design requirement, can calculate corresponding driving voltage value and the hydrophilic modifying demand of arc strip region by upper formula (i.e. contact angle θ >=θ_e)。

The setting of each physical parameter of table 1

The viscosity (Pa s) of oil droplet	μ=0.0018
		Interfacial tension (the mJ/m of water and oil droplet2)	γow=22
The initial contact angle (degrees) of oil droplet	θ0=0
		Volume (the μm of oil droplet3)	V=123750
The original depth (μm) of oil film	H=5.6
		Relative dielectric constant	εAF=2.1
Pixel size (μm)	Lx=150
		The thickness (μm) of insulating barrier	D=1.5

With reference to Fig. 5-6, Fig. 5 is the driver' s timing figure of bistable state electric moistening display, and Fig. 6 is that bistable electro moistening shows work Make schematic diagram, control electric moistening display according to the driver' s timing figure of Fig. 5, under being not powered on state, due to wetting effect, fill out Filling the ink spreading in pixel compartments in hydrophobic region 6, in each pixel compartments, ink is divided into two parts by described hydrophilic area 7, Oil intersection formation electrolyte-ink-insulating barrier three-phase boundary line in described hydrophilic area 7 and described hydrophobic region 6, first, Adding unidirectional current at public electrode 8 and the second electrode 4, under the effect of electrowetting effect, second fluid 12 can be retracted to described One jiao (such as Fig. 6 B) of the pixel compartments 10 of one electrode 3 correspondence；After removing voltage, ink will keep not under the constraint of hydrophilic area 7 Dynamic, pixel keeps steady-state characteristic (such as Fig. 6 C)；Unidirectional current is added again on the public electrode 8 and described first electrode 3 of upper substrate, when Voltage enough overcomes the potential barrier of hydrophilic area 7, then second fluid 12 can move and in the pixel compartments 10 of described second electrode 4 correspondence (such as Fig. 6 D) is sprawled in region；After removing voltage, second fluid 12 will remain stationary as under the constraint of hydrophilic area 7, and pixel will keep Steady-state characteristic (such as Fig. 6 E).

The preparation method of bistable state electric moistening display as above, described preparation method includes the step preparing infrabasal plate Suddenly, the described step preparing infrabasal plate comprises the following steps: S1: take substrate 1, prepares described conductive layer, institute on described substrate 1 State conductive layer and include multiple electrode pair being made up of described first electrode 3 and described second electrode 4；S2: lead described in having in preparation On the substrate 1 of electric layer, described insulating barrier is prepared in coating, and described insulating barrier covers between upper surface and the described arc of described conductive layer The upper surface of the substrate of parting bead band 5 position；S3: under mask plate is protected, described insulating barrier is patterned hydrophilic modifying is right The position answering each described arc spacer tape 5 carries out hydrophilic modifying, obtains described hydrophilic area 7；S4: after modification described absolutely Prepare pixel wall structure 2 in edge layer, obtain the infrabasal plate of electric moistening display.Wherein, described S1 is use physical vapor to sink Area method prepares described conductive layer on the substrate, and in described S3, graphical hydrophilic modifying is hydrophilic by graphical magnetron sputtering Material or graphical dry etching realize.Described S2 can be to have on the substrate 1 of described conductive layer in preparation to be directly coated with list Layer insulating material, prepares monolayer insulating layer, and described monolayer insulating layer covers the upper surface of described conductive layer and described arc The upper surface of the substrate of shape spacer tape position；Described S2 can also be first to have on the substrate of described conductive layer to be coated with in preparation to plant Layer insulating, prepares underlying insulating layer, is then coated with one layer of hydrophobic material on underlying insulating layer, obtains double-decker Insulating barrier.

Embodiment 1:

Taking substrate, use the substrate of glass material in the present embodiment, the other materials with same effect all can be as base Plate.In the zones of different of substrate surface, the preparation conductions such as one layer of silver, gold or ITO are deposited respectively by modes such as magnetron sputterings Layer, described conductive layer includes multiple electrode pair being made up of the first electrode and the second electrode, each described electrode to corresponding each Pixel compartments is arranged, and described first electrode is located at a jiao of pixel compartments, described first electrode of each described electrode centering and described An arc spacer tape is formed between second electrode.The thickness of conductive layer can be controlled by the time of magnetron sputtering, generally Film thickness monitoring is between 25-100nm.The width of described arc spacer tape is the narrowest more good, usually 2-10 micron.Wherein, as The aperture opening ratio of element is controlled by the area ratio of electrode 1 with electrode 2, and the area ratio of the second electrode and the first electrode is typically larger than 1/3.

The substrate surface of described conductive layer is had to form one layer by modes such as spin coating, silk screen printing, slot coated in preparation Uniform drain insulating layer, in the present invention, the material of drain insulating layer is preferably AF1600 or AF1600X, and solvent is perfluoro solvent 7100, it is configured to the solution that mass fraction is 3～5%, is placed on baking-curing 90min in 85 DEG C of baking ovens after the film was formed.

Described arc spacer tape is to isolate described first electrode and the arc strip strip region of described second electrode, uses Mask plate carries out hydrophilic modifying according to the pattern of described arc spacer tape to described drain insulating layer, and described hydrophilic modifying is permissible Realized by the method for graphical dry etching RIE or the specific water wetted material of magnetron sputtering.Surface of insulating layer is included Hydrophobic region and hydrophilic area.

By the method such as slot coated or spin coating at drain insulating layer surface coating ground floor slightly water-wet photoresist (such as SU-8 Deng), thickness is 5-8 μm.After heated drying processes, obtain weak through standard lithographic and developing process under the effect of mask plate Hydrophilic pixels wall construction.

Carrying out ink filling under electrolyte solution environment, ink material is usually the little molecule of non-polar dyes at oils Lysate in solvent, electrolyte solution generally selects polarity conductivity solution (such as sodium-chloride water solution).Owing to hydrophobic region is to oil Ink is filled in pixel compartments by ink wettability preference, and slightly water-wet pixel wall has hydrophilic, can be cut off by ink and make its point Not being filled in each pixel compartments, electrolyte solution covers continuously above ink and pixel wall.

Upper substrate is the glass substrate that preparation has public electrode, and wherein, public electrode is for having high transmission rate and low resistance The conductive layer (preferably ITO) of characteristic.

The encapsulation of upper substrate and infrabasal plate uses the fluid sealant frame that ultra-violet curing pressure sensitive adhesive silk-screen shapes；Fluid sealant frame is one Planting pressure sensitive adhesive, the material selected in the present invention is UV pressure-sensitive acrylate, passes through according to the size of electric moistening display part UV pressure-sensitive acrylate is graphically printed on upper substrate surface by screen printing mode, at 100mj/cm²Ultraviolet light environments Lower solidification 10s obtains fluid sealant frame.Finally, in electrolyte solution, the encapsulation of device is realized by flattening laminating.Above section Technique refers to patent 201310740361.5 and patent 201410030375.2.

Claims (10)

1. a bistable state electric moistening display, including infrabasal plate, it is characterised in that described infrabasal plate includes substrate and sets successively Being placed in the conductive layer on described substrate, insulating barrier and surround the pixel wall structure of pixel compartments array, described conductive layer includes multiple The electrode pair being made up of the first electrode and the second electrode, each pixel compartments corresponding is arranged by each described electrode, described first electricity One jiao of pixel compartments is located in pole, forms an arc between described first electrode and described second electrode of each described electrode centering Spacer tape, described insulating barrier includes that hydrophobic region and hydrophilic area, described hydrophilic area are each described arc spacer tape corresponding The a plurality of hydrophilic arc strip region that position is arranged.

Bistable state electric moistening display the most according to claim 1, it is characterised in that each described electrode is to shape phase With, each described electrode to and the combination of described arc spacer tape that formed be shaped as rectangle.

Bistable state electric moistening display the most according to claim 2, it is characterised in that described first electrode is multiple sector Electrode, the arc-shaped side of described sector electrode is towards the inside of described rectangle.

Bistable state electric moistening display the most according to claim 1, it is characterised in that described electrode to described in first electricity Pole and area ratio >=1/3 of the second electrode.

Bistable state electric moistening display the most according to claim 1, it is characterised in that the width of described arc spacer tape For 2-10 μm.

Bistable state electric moistening display the most according to claim 1, it is characterised in that described insulating barrier is monolayer insulating layer Structure or double-decker, described double-decker is by underlying insulating layer and the upper strata composite bed group being located on described underlying insulating layer Becoming, described underlying insulating layer covers the upper surface of described conductive layer and the upper surface of the substrate of described arc spacer tape position, Described upper strata composite bed is made up of hydrophobic region and hydrophilic area, and described hydrophilic area is the position of each described arc spacer tape corresponding The a plurality of hydrophilic arc strip region arranged.

Bistable state electric moistening display the most according to claim 1, it is characterised in that described hydrophilic area shape and described arc Shape spacer tape shape is identical.

8. the preparation method of the bistable state electric moistening display as described in any one of claim 1-7, it is characterised in that institute Stating preparation method and include preparing the step of infrabasal plate, the described step preparing infrabasal plate comprises the following steps:

S1: take substrate, prepares described conductive layer on the substrate, and described conductive layer includes multiple by described first electrode and institute State the electrode pair of the second electrode composition；

S2: having coating on the substrate of described conductive layer to prepare described insulating barrier in preparation, described insulating barrier covers described conductive layer Upper surface and the upper surface of substrate of described arc spacer tape position；

S3: under mask plate is protected, is patterned hydrophilic modifying, each described arc spacer tape corresponding to described insulating barrier Position carry out hydrophilic modifying, obtain described hydrophilic area；

S4: prepare pixel wall structure on described insulating barrier, obtain the infrabasal plate of electric moistening display.

The preparation method of bistable state electric moistening display the most according to claim 8, it is characterised in that be to use in described S1 Physical vaporous deposition prepares described conductive layer on the substrate.

The preparation method of bistable state electric moistening display the most according to claim 8, it is characterised in that figure in described S3 Change hydrophilic modifying to be realized by graphical magnetron sputtering water wetted material or graphical dry etching.