CN106125184B - A kind of formaldehyde gas detection infrared fileter and preparation method thereof - Google Patents
A kind of formaldehyde gas detection infrared fileter and preparation method thereof Download PDFInfo
- Publication number
- CN106125184B CN106125184B CN201610778570.2A CN201610778570A CN106125184B CN 106125184 B CN106125184 B CN 106125184B CN 201610778570 A CN201610778570 A CN 201610778570A CN 106125184 B CN106125184 B CN 106125184B
- Authority
- CN
- China
- Prior art keywords
- membrane system
- film
- infrared fileter
- zns
- formaldehyde gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 title claims abstract description 67
- 238000001514 detection method Methods 0.000 title claims abstract description 18
- 238000002360 preparation method Methods 0.000 title abstract description 8
- 239000012528 membrane Substances 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 17
- 238000000151 deposition Methods 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 230000008021 deposition Effects 0.000 claims abstract description 12
- 238000007747 plating Methods 0.000 claims abstract description 9
- 238000000576 coating method Methods 0.000 claims abstract description 7
- 238000002834 transmittance Methods 0.000 claims abstract description 7
- 229910021419 crystalline silicon Inorganic materials 0.000 claims abstract description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052750 molybdenum Inorganic materials 0.000 claims abstract description 4
- 239000011733 molybdenum Substances 0.000 claims abstract description 4
- 238000005566 electron beam evaporation Methods 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 29
- 230000003287 optical effect Effects 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 6
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 239000005083 Zinc sulfide Substances 0.000 claims description 4
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000001228 spectrum Methods 0.000 claims description 3
- 238000002207 thermal evaporation Methods 0.000 claims description 3
- 230000000747 cardiac effect Effects 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 28
- 238000005485 electric heating Methods 0.000 abstract description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 3
- 239000000126 substance Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000002537 cosmetic Substances 0.000 description 2
- 238000004128 high performance liquid chromatography Methods 0.000 description 2
- 238000003969 polarography Methods 0.000 description 2
- 239000004753 textile Substances 0.000 description 2
- 102000004190 Enzymes Human genes 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- 229930040373 Paraformaldehyde Natural products 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- JPYHHZQJCSQRJY-UHFFFAOYSA-N Phloroglucinol Natural products CCC=CCC=CCC=CCC=CCCCCC(=O)C1=C(O)C=C(O)C=C1O JPYHHZQJCSQRJY-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- QSLVNXFQCCTGET-UHFFFAOYSA-N benzene;hydrazine;hydrochloride Chemical compound Cl.NN.C1=CC=CC=C1 QSLVNXFQCCTGET-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 238000004440 column chromatography Methods 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 238000004817 gas chromatography Methods 0.000 description 1
- 238000002290 gas chromatography-mass spectrometry Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229920002866 paraformaldehyde Polymers 0.000 description 1
- QCDYQQDYXPDABM-UHFFFAOYSA-N phloroglucinol Chemical compound OC1=CC(O)=CC(O)=C1 QCDYQQDYXPDABM-UHFFFAOYSA-N 0.000 description 1
- 229960001553 phloroglucinol Drugs 0.000 description 1
- 238000005375 photometry Methods 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 238000004313 potentiometry Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of formaldehyde gas detection infrared fileter and preparation method thereof, infrared fileter base material selects single crystalline Si, and high-index material selects Ge, and low-index material selects ZnS.Deposit main membrane system face film and interference cut-off membrane system face film respectively on two surfaces of substrate, coating process condition is that Ge selects electron beam evaporation plating, and deposition rate isZnS selects porous molybdenum boat electric heating vapor deposition, and deposition rate isStart that vacuum degree is deposited to be 1.0 × 10‑3Pa, depositing temperature are 130 DEG C.The 5768nm band logical infrared fileter that the present invention obtains, peak transmittance greatly improve signal-to-noise ratio up to 90% or more, inhibit the interference of other gases well, improve instrument detection accuracy and efficiency.
Description
Technical field
The present invention relates to a kind of infrared fileter production technologies, and in particular to infrared fileter is used in a kind of detection of formaldehyde gas
And preparation method thereof.
Background technique
Infrared-gas concentration detection principle is gas concentration to be measured according to gas infrared signature absorption peak, therefore select specific
The infrared gas analysis optical filter of wavelength is the critical component of infrared gas analyser.Light source issue light after optical filter,
The quasi-monochromatic light (the narrower degree of monochromaticity of bandwidth is better) of certain bandwidth is obtained, after which is actually taken up by gas by gas sample cell, by
Detector detects output intensity, to extrapolate the concentration of gas.
Indoors in air, textile, decorative materials, food, waste water, cosmetics and furniture etc., there are a large amount of formaldehyde gas
Body, however formaldehyde gas causes very big influence to human health and environmental pollution as a kind of poisonous gas.Therefore, I
National standard as an enforceable index and is implemented formaldehyde determination.
PARA FORMALDEHYDE PRILLS(91,95) detection method is broadly divided into chemical method and two kinds of instrumental method both at home and abroad at present.Chemical method is broadly divided into: point
Light photometry (acetylacetone method, phenol reagent process, AHM T method, magenta-sulfurous method, off-color acid method, phloroglucinol method, hydrochloric acid benzene
Hydrazine method, enzyme process), Catalytic-Kinetic Spectrophotometric, fluorimetry.Instrumental method is broadly divided into: electrochemical process (differential (mercury is poor) pulse
Polarography, oscilloscopic polarography, potentiometry), chromatography (HPLC method, GC method, column chromatography) be combined method (gas phase-mass spectrum (GC-MS)
Method, High Performance Liquid Chromatography/Mass Spectrometry (H PLC-MS) method, gas-chromatography-flame ionization detector (GC-FD) method, gas-chromatography-
Nitrogen phosphorous detector (GC-NPD) method, gas chromatography-electron capture detector (GC-ECD) method), sensor method.Chemical method has valence
The advantages that lattice are cheap, operation is classical, easy to spread, but due to the principle based on chemical reaction, specificity is inadequate, is easy by phase
Like the interference of substance；Though instrumental method has stronger selectivity and higher sensitivity, at high cost because it is expensive, right
Operator's technical requirements are high, it is difficult to universal.
The safety accidents such as room, textile, food, Formaldehyde In Cosmetics over-standard phenomenon occur again and again at present, not only influence
People's lives quality, and many obstacles are increased to Chinese commodity foreign trade.Therefore develop a kind of high sensitivity,
Selectivity is good, formaldehyde gas that stability is good, accurate, economic band logical infrared fileter be it is in due course and necessary, have certain
Realistic meaning and extensive practical value.
Summary of the invention
It is high that a kind of peak transmittance is provided the purpose of the present invention is to solve above-mentioned the deficiencies in the prior art, it can be greatly
Raising signal-to-noise ratio, effectively detect formaldehyde gas 5768nm band logical infrared fileter and preparation method thereof.
To achieve the goals above, a kind of formaldehyde gas detection infrared fileter designed by the present invention, it is characterized in that:
(1) substrate is made using single crystalline Si；Silicon twin polishing, 300 ± 10 μm of thickness, crystal orientation<100>.
(2) Coating Materials selects zinc sulphide ZnS and monocrystalline germanium Ge, and it is thin to deposit main membrane system face respectively on two surfaces of substrate
Film and interference cut-off membrane system face film.
(3) main membrane system face membrane structure uses Sub/ (HL) 6H (LH) L (HL) 4H (LH) L (HL) 6H (LH) L/Air.
(4) interference cut-off membrane system face film uses: Sub/0.485 (HL)7 0.71(HL)7 1.4(HL)7/Air。
It is substrate that symbol meaning, which is respectively as follows: Sub, in membrane system, and Air is air, and H and L respectively represent film layer Ge (high refractive index
Material layer) and film layer ZnS (low refractive index material layer) 1/4 wave optical thickness, central wavelength lambda=5768nm, 1H=
(4nHd)/λ；1L=(4nLD)/λ, number is the thickness coefficient of film layer in structural formula, the index in structural formula is membrane stack plated film
Periodicity.
A kind of above-mentioned formaldehyde gas detection preparation method of infrared fileter, using monocrystalline silicon Si as substrate, zinc sulphide
ZnS and germanium Ge is Coating Materials, prepares film plating layer using the method that vacuum thermal evaporation film deposits, and Ge selects electron beam evaporation plating,
Deposition rate is/sec；ZnS selects porous molybdenum boat electric heating vapor deposition, and deposition rate is/ sec starts that vacuum degree is deposited
It is 1.0 × 10-3Pa, depositing temperature are 130 DEG C.
A kind of above-mentioned formaldehyde gas detection preparation method of infrared fileter is thick using optical monitor control film layer
Degree, and it is aided with quartz-crystal control control deposition rate.
The above-mentioned 5768nm band logical infrared fileter being prepared, main membrane system use multi-cavity narrowband film structure, cooperation
The interference of height cut-off depth ends membrane system, and central wavelength 5768nm, 5700nm~5840nm wave band mean transmissivity is
91.87%, halfwidth 190nm；In addition to the passband of central wavelength 5768nm bandwidth 190nm, out of 2500~10000nm
Remaining spectrum all end, 2500~5600 average transmittances be 0.16%, 5940~10000 average transmittances be 0.3%,
Signal-to-noise ratio can be greatly improved, can be very good the interference for inhibiting other gases, product optical property and physical strength can be very well
Meet actual operation requirements, be widely used in formaldehyde gas infrared acquisition instrument, improve instrument detection accuracy and efficiency, can be with
Accomplish more rapidly, more accurately confirmation leakage point.
Compared with the prior art, the present invention has the following advantages:
1, optical filter penetrates spectrum, transmission bands with the narrowband that central wavelength is 5768nm compared with traditional technology method
Rising edge and failing edge it is precipitous, waveform rectangular degree is good, depth<0.3% is ended in peak transmittance>90%, cut-off region, because
Effective service band of this 5768nm can be as big as possible transmission, and the background noise of remaining invalid wave band is then great
Reduce, thus excellent signal-to-noise ratio can be obtained, improves the measurement sensitivity and precision of instrument.
2, filter technology prepared by the present invention is simple, can form batch production, and performance is stablized, and meets high-precision formaldehyde
The performance requirement of gas infrared acquisition instrument.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of formaldehyde gas detection infrared fileter of the present invention.
Wherein: substrate 1 is single crystalline Si, and film material 2 is Ge, and film material 3 is ZnS.
Fig. 2 is optical filter final performance measured curve figure.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
Embodiment 1:
As shown in Figure 1, a kind of formaldehyde gas detection provided in this embodiment is with infrared fileter:
(1) substrate is made using the single crystalline Si having a size of 50.8 × 0.3mm of Φ；Silicon twin polishing, it is 300 ± 10 μm of thickness, brilliant
To<100>.
(2) Coating Materials selects zinc sulphide ZnS and monocrystalline germanium Ge, and it is thin to deposit main membrane system face respectively on two surfaces of substrate
Film A and interference cut-off membrane system face film B.
(3) main membrane system face film A is used: Sub/ (HL) 6H (LH) L (HL) 4H (LH) L (HL) 6H (LH) L/Air.
(4) interference cut-off membrane system face film B is used: Sub/0.485 (HL)7 0.71(HL)7 1.4(HL)7/Air。
It is substrate that symbol meaning, which is respectively as follows: Sub, in membrane system, and Air is air, and H and L respectively represent film layer 2 (Ge) (height refraction
Rate material layer) and film layer 3 (ZnS) (low refractive index material layer) 1/4 wave optical thickness, central wavelength lambda=5768nm,
1H=(4nHd)/λ；1L=(4nLD)/λ, number is the thickness coefficient of film layer in structural formula, the index in structural formula is membrane stack
The periodicity of plated film.
A kind of formaldehyde gas detection provided in this embodiment preparation method of infrared fileter, using germanium Ge as substrate, sulphur
Change zinc ZnS and germanium Ge is Coating Materials, prepares film plating layer using the method that vacuum thermal evaporation film deposits, Ge selects electron beam to steam
Plating, deposition rate are/sec；ZnS selects porous molybdenum boat electric heating vapor deposition, and deposition rate is / sec starts that vacuum is deposited
Degree is 1.0 × 10-3Pa, depositing temperature are 130 DEG C.
It is those skilled in the art institute by specifically how to evaporate using electron gun evaporation and using resistance steaming evaporation coating
The routine techniques of grasp, no further details to be given herein.
A kind of this patent optical filter provided in this embodiment improves effective service band using one side plating multi-cavity narrowband membrane system
Transmitance and waveform rectangular degree, once improve valid signal strengths；The interference of the high cut-off depth of another side plating ends membrane system, arrives
All invalid secondary peaks in the range of up to 2500~10000nm in addition to passband.
Formaldehyde gas provided in this embodiment detection infrared fileter, central wavelength positioning accuracy within 0.7%,
Thicknesses of layers is controlled using optical monitor to membrane system, and is aided with quartz-crystal control control deposition rate.
Prepared optical filter is surveyed using German 70 type Fourier infrared spectrograph of Bruker company VERTEX
Examination.The optical filter final performance measured curve figure of this optical filter final performance structure such as Fig. 2:
1. central wavelength lambda=5768nm；
2. bandwidth Delta lambda=190nm；
3. form factor Δ λ 10%/Δ λ 50%=1.42；
4. peak transmittance Tp=91.87%
The 1500-10000nm T in addition to passbandavg≤ 0.3%.
The above is only presently preferred embodiments of the present invention, is not intended to limit the invention in any way, it is all according to the present invention
Technical spirit any simple modification, change and equivalent structure transformation to the above embodiments, still fall within skill of the present invention
In the protection scope of art scheme.
Claims (3)
1. a kind of formaldehyde gas detection infrared fileter, it is characterised in that:
(1) substrate is made using single crystalline Si；Silicon twin polishing, 300 ± 10 μm of thickness, crystal orientation<100>；
(2) Coating Materials select zinc sulphide ZnS and monocrystalline germanium Ge, deposited respectively on two surfaces of substrate main membrane system face film and
Interference cut-off membrane system face film；
(3) main membrane system face membrane structure uses Sub/ (HL) 6H (LH) L (HL) 4H (LH) L (HL) 6H (LH) L/Air；
(4) interference cut-off membrane system face film uses: Sub/0.485 (HL)70.71(HL)71.4(HL)7/Air；
It is substrate that symbol meaning, which is respectively as follows: Sub, in membrane system, and Air is air, H and L respectively represent high-index material Ge film layer and
One 1/4 wave optical thickness of low-index material ZnS film layer, central wavelength lambda=5768nm, 1H=(4nHd)/λ；1L=
(4nLD)/λ, number is the thickness coefficient of film layer in structural formula, the index in structural formula is the periodicity of membrane stack plated film；
The infrared fileter, main membrane system use multi-cavity narrowband film structure, and the interference of high cut-off depth is cooperated to end membrane system, in
Cardiac wave a length of 5768nm, 5700nm~5840nm wave band mean transmissivity is 91.87%, halfwidth 190nm；Except central wavelength
Outside the passband of 5768nm bandwidth 190nm, all end from remaining spectrum within the scope of 2500~10000nm, 2500~5600 is flat
Equal transmissivity is 0.16%, and 5940~10000 average transmittances are 0.3%.
2. a kind of formaldehyde gas detection infrared fileter as described in claim 1, it is characterised in that: use vacuum thermal evaporation
The method of film deposition prepares film plating layer, and Ge selects electron beam evaporation plating, and deposition rate isZnS selects porous molybdenum boat electricity
Hot evaporation, deposition rate areStart that vacuum degree is deposited to be 1.0 × 10-3Pa, depositing temperature are 130 DEG C.
3. a kind of formaldehyde gas detection infrared fileter as claimed in claim 2, it is characterised in that: use optical monitor
Thicknesses of layers is controlled, and is aided with quartz-crystal control control deposition rate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610778570.2A CN106125184B (en) | 2016-08-30 | 2016-08-30 | A kind of formaldehyde gas detection infrared fileter and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610778570.2A CN106125184B (en) | 2016-08-30 | 2016-08-30 | A kind of formaldehyde gas detection infrared fileter and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106125184A CN106125184A (en) | 2016-11-16 |
| CN106125184B true CN106125184B (en) | 2019-01-25 |
Family
ID=57273338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610778570.2A Active CN106125184B (en) | 2016-08-30 | 2016-08-30 | A kind of formaldehyde gas detection infrared fileter and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106125184B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110261949B (en) * | 2019-06-25 | 2021-10-15 | 镇江爱豪科思电子科技有限公司 | Infrared filter for detecting sulfur dioxide gas and preparation method thereof |
| CN111323861B (en) * | 2020-05-13 | 2021-12-03 | 翼捷安全设备（昆山）有限公司 | Infrared filter for acetylene gas detection, preparation method and application thereof |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59204726A (en) * | 1983-05-10 | 1984-11-20 | Minolta Camera Co Ltd | Flame detector |
| CN1432128A (en) * | 2000-06-02 | 2003-07-23 | 拉蒂斯知识产权有限公司 | Non-dispersive IR measurement of gases using optical filter |
| JP2006098372A (en) * | 2004-09-30 | 2006-04-13 | Nohmi Bosai Ltd | Flame detector |
| CN202275172U (en) * | 2012-03-12 | 2012-06-13 | 杭州麦乐克电子科技有限公司 | 8000-14000 nanometer band-pass infrared filter |
| CN202275173U (en) * | 2012-03-12 | 2012-06-13 | 杭州麦乐克电子科技有限公司 | Infrared filter allowing transmission of 3650-nanometer long waves |
| CN202275177U (en) * | 2012-03-12 | 2012-06-13 | 杭州麦乐克电子科技有限公司 | 4260-nanometer band-pass infrared optical filter |
| CN202275174U (en) * | 2012-03-12 | 2012-06-13 | 杭州麦乐克电子科技有限公司 | 3400-nanometer band-pass infrared filter |
| CN202472020U (en) * | 2012-03-12 | 2012-10-03 | 杭州麦乐克电子科技有限公司 | Infrared optical filter with 4640-nanometer bandpass |
| CN105842770A (en) * | 2016-05-17 | 2016-08-10 | 江苏大学 | CO2 gas detection infrared filter and preparation method thereof |
-
2016
- 2016-08-30 CN CN201610778570.2A patent/CN106125184B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59204726A (en) * | 1983-05-10 | 1984-11-20 | Minolta Camera Co Ltd | Flame detector |
| CN1432128A (en) * | 2000-06-02 | 2003-07-23 | 拉蒂斯知识产权有限公司 | Non-dispersive IR measurement of gases using optical filter |
| JP2006098372A (en) * | 2004-09-30 | 2006-04-13 | Nohmi Bosai Ltd | Flame detector |
| CN202275172U (en) * | 2012-03-12 | 2012-06-13 | 杭州麦乐克电子科技有限公司 | 8000-14000 nanometer band-pass infrared filter |
| CN202275173U (en) * | 2012-03-12 | 2012-06-13 | 杭州麦乐克电子科技有限公司 | Infrared filter allowing transmission of 3650-nanometer long waves |
| CN202275177U (en) * | 2012-03-12 | 2012-06-13 | 杭州麦乐克电子科技有限公司 | 4260-nanometer band-pass infrared optical filter |
| CN202275174U (en) * | 2012-03-12 | 2012-06-13 | 杭州麦乐克电子科技有限公司 | 3400-nanometer band-pass infrared filter |
| CN202472020U (en) * | 2012-03-12 | 2012-10-03 | 杭州麦乐克电子科技有限公司 | Infrared optical filter with 4640-nanometer bandpass |
| CN105842770A (en) * | 2016-05-17 | 2016-08-10 | 江苏大学 | CO2 gas detection infrared filter and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106125184A (en) | 2016-11-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105842770B (en) | A kind of CO2Gas detection infrared fileter and preparation method thereof | |
| CN106291795B (en) | A kind of CO gas detection infrared fileter and preparation method thereof | |
| CN106125183B (en) | A kind of sulfur hexafluoride gas detection infrared fileter and preparation method thereof | |
| CN106054300B (en) | A kind of CO2Gas detection binary channels infrared fileter and preparation method thereof | |
| CN106125184B (en) | A kind of formaldehyde gas detection infrared fileter and preparation method thereof | |
| Bayón et al. | Preparation of selective absorbers based on CuMn spinels by dip-coating method | |
| CN106990466B (en) | Narrow-band optical filter and preparation method thereof | |
| CN106405708B (en) | A kind of methane gas detection infrared fileter and preparation method thereof | |
| CN105974505B (en) | A kind of temperature sensing long wave leads to infrared fileter and preparation method thereof | |
| CN110261949A (en) | A kind of sulfur dioxide gas detection infrared fileter and preparation method thereof | |
| CN101893604B (en) | Method for manufacturing surface acoustic wave humidity-dependent sensor | |
| CN106199803B (en) | A kind of temperature sensing broadband infrared optical filter and preparation method thereof | |
| CN106125182B (en) | A kind of flame detecting infrared fileter and preparation method thereof | |
| CN201876563U (en) | Narrow-band infrared filter with 5.25 micrometers of wavelength | |
| Nizamidin et al. | Optical properties and sensing applications of lithium iron phosphate thin films | |
| Yang et al. | A portable detection method for organophosphorus and carbamates pesticide residues based on multilayer paper chip | |
| Neto et al. | Chromium silica co-sputtered graded Cermet for solar thermal collectors | |
| CN101986174B (en) | Medium-wave infrared narrow band filter with wavelength of 5.25 microns | |
| CN103293577B (en) | 4-14.5-micrometer infrared wide-spectrum beam splitting film with ZnSe substrate | |
| CN110261948B (en) | Infrared filter for nitric oxide gas detection and preparation method thereof | |
| Mamtmin et al. | Composite optical waveguide sensor based on porphyrin@ ZnO film for sulfide-gas detection | |
| Bing et al. | High sensitivity dual core photonic crystal fiber sensor for simultaneous detection of two samples | |
| CN113307763A (en) | Amino acid derivative, preparation method thereof and application of amino acid derivative as acid-base indicator and fluorescent probe | |
| Joly et al. | Energy-efficient sol-gel process for production of nanocomposite absorber coatings for tubular solar thermal collectors | |
| CN106835110B (en) | A kind of environment-friendly type antiradar reflectivity membrane material and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240628 Address after: Room J12694, No. 912 Yecheng Road, Jiading District, Shanghai, 2018 Patentee after: Shanghai LISI Microelectronics Technology Co.,Ltd. Country or region after: China Address before: 212009 building 26, No.99, dingmaojing 15th Road, Zhenjiang New District, Jiangsu Province Patentee before: ZHENJIANG AIHAO KESI ELECTRONIC TECHNOLOGY Co.,Ltd. Country or region before: China |