CN106111469B - PL grades of ultramicron liquid supply devices and method - Google Patents
PL grades of ultramicron liquid supply devices and method Download PDFInfo
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- CN106111469B CN106111469B CN201610698227.7A CN201610698227A CN106111469B CN 106111469 B CN106111469 B CN 106111469B CN 201610698227 A CN201610698227 A CN 201610698227A CN 106111469 B CN106111469 B CN 106111469B
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- liquid
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- pipe
- micropipe
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/105—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material by capillary action, e.g. using wicks
Abstract
The present invention provides pL grades of ultramicron liquid supply devices and methods.Liquid supply device includes liquid-transfering needle, motion controller, glass-micropipe linker, volume control device, five part of liquid transporting apparatus；Wherein, motion controller control liquid-transfering needle moves up and down；Glass-micropipe linker is designed according to law of connected vessels with capillary phenomenon principle；The speed and amount infused of the adjustable fluid infusion of volume control device, meet the needs of different viscosities liquid；Volume control device is connect by liquid transporting apparatus by being connected to interface with glass-micropipe linker, provides micro liquid for glass-micropipe linker.In the method for the present invention, pL grades of ultramicron liquid replenishing methods are the micro pressure differences inside and outside the micro-pipe generated during the up and down motion in capillary micro-pipe by liquid-transfering needle, by the liquid sucking micro-pipe in linker, realize the supplement of pL grades of liquid in micro-pipe.The present invention is suitable for the continuous fluid infusion of pL grade ultramicron of various viscous liquids and flow speed is easy to observe, adjust.
Description
Technical field
The present invention relates to deposition techniques fields, more particularly to a kind of pL(picoliters for micro assemby) grade ultramicron point sample
The liquid supply device and method of platform.
Background technique
Deposition techniques are of wide application, from semiconductor packaging industry, IC industry, SMT/PCB assembly industry to
The welding of general industry, note apply and sealing point sample, deposition techniques all play a crucial role.The present invention is in south China science and engineering
The continuous liquid supply device of new type micro is proposed on the basis of the ultramicron spotting methods that university frequently proposes, solves original point sample
Method, can not continuous fluid infusion the problem of.Ultramicron spotting methods are liquid reliefs when passing through the liquid in glass-micropipe using liquid-transfering needle
The fine droplet of needle apex absorption realizes ultramicron point sample.Wherein the storage of spotting fluid is located in glass-micropipe, former
Reason is to fill liquid in the middle toward glass-micropipe by capillary phenomenon.In original device, realize that liquid is stored by capillary phenomenon
The glass-micropipe device of glass-micropipe is limited to the influence of storage principle and self structure, and capillary can not store big quantity of fluid,
And it cannot achieve to the continuous fluid infusion of the real-time minimum of capillary.Therefore, it is dynamic to cannot achieve point sample in original ultramicron spot sample device
That makees is carried out continuously, and needs to stop point sample movement, carries out the supplement of liquid.It is limited to this, original method is unable to satisfy to ultramicron
The requirement that sample application platform is worked continuously is only applicable to minute quantity, discontinuous point sample application field.Method proposed by the present invention,
The micro continuous fluid infusion of ultramicron spot sample device may be implemented；Retaining original glass that liquid storage is realized by capillary phenomenon
On micro-pipe device basic, by law of connected vessels, a kind of real-time liquid supply device has been invented.Solves original ultramicron sample application platform
The problem of can not working continuously.
Summary of the invention
In order to overcome the above-mentioned deficiencies of the prior art, the present invention retain it is original by capillary phenomenon realize liquid storage
On glass-micropipe device basic, by law of connected vessels, pL grades of ultramicron liquid supply devices and method have been invented in design.
The purpose of the present invention is realized at least through one of following technical solution.
A kind of pL grades of ultramicron liquid supply device, including liquid-transfering needle, motion controller, glass-micropipe linker, flow control
Device and liquid transporting apparatus；The glass-micropipe linker is designed according to law of connected vessels with capillary phenomenon principle,
It is made of linker, capillary micro-pipe, liquid flooding mouth；Hair in the longitudinal center line and glass-micropipe linker of the liquid-transfering needle
Subtle tube portion longitudinal center line is overlapped；
The motion controller and liquid-transfering needle is connected, and controls liquid-transfering needle moving up and down in glass-micropipe linker；
The volume control device is by sequentially connected connection interface, infusion tube, flow regulator, drop pot and needle mouth group
At connection interface is connected to glass-micropipe linker, is connect by needle mouth with liquid transporting apparatus；
The liquid transporting apparatus is connect by volume control device with glass-micropipe linker, and liquid is provided.
Further, in the glass-micropipe linker, the bottom end of linker one end connects capillary micro-pipe, and capillary is micro-
Pipe top half protrudes into linker inner cavity, and linker is stretched out in lower half portion；Liquid flooding mouth is set to by glass-micropipe linker
Road side, liquid flooding mouth position are located on the outside of linker bypass branch.
Further, capillary micro-pipe top half protrudes into linker inner cavity, and the length protruded into is 10mm-15mm；Lower half
Divide stretching linker, the length of stretching is 5mm-10mm；The inside diameter ranges 0.8-1mm of capillary micro-pipe；Main liquid storage chamber in linker
Internal diameter range 25mm-26mm, linker bypass liquid supplementation pipe internal diameter range 3-4mm.
Further, in the glass-micropipe linker, for the liquid of different viscosities attribute, using different liquid
Overflow open height controls liquid levels line at a distance from capillary micro-pipe upper end, and liquid level is higher than capillary micro-pipe 1-2mm.
Further, the liquid-transfering needle is formed by the ultra tiny accurate electro-discharge machining of tungsten wire needle, and tip dimensions are according to liquid
Sendout requires to determine.
Further, the motion controller is made of linear servo-actuator, servo-driver, liquid-transfering needle fixture；It moves
Liquid needle fixture is using scroll chuck structure to clamp liquid-transfering needle.
Further, linker includes the main liquid storage chamber of liquid, communicating pipe bypasses liquid supplementation pipe, wherein the main liquid storage chamber of liquid, uses
The liquid to come is conveyed in storage liquid supply device, supplies capillary micro-pipe liquid, communicating pipe is for being connected to bypass liquid supplementation pipe and liquid
Main liquid storage chamber；Capillary micro-pipe is for storing the liquid contacted in ultramicron spot sample device with liquid-transfering needle；Liquid flooding mouth is for controlling
The height of the main liquid storage chamber metal line of liquid processed.
Further, the speed and amount infused of the adjustable fluid infusion of volume control device, meets the need of different viscosities liquid
It wants.Volume control device drips pot, needle mouth composition by connection interface, infusion tube, flow regulator.Wherein connection interface is used for
It is connected to volume control device and glass-micropipe linker bypasses liquid supplementation pipe, infusion tube is used for conveying liquid, flow regulator
In adjusting fluid infusion velocity, drop pot is used to observe fluid infusion flow rate of liquid and excludes the bubble in infusion tube, and needle mouth is for being connected to stream
Amount control device and liquid transporting apparatus.
Liquid replenishing method suitable for pL grades of ultramicron liquid supply devices, comprising: micro fluid infusion is by moving in motion controller
Liquid needle clamp liquid-transfering needle generates during driving up and down motion of the liquid-transfering needle in linker micro-pipe by linear servo-actuator
Micro-pipe inside and outside micro pressure difference, by linker liquid sucking micro-pipe in, realize micro-pipe in pL grades of liquid supplement.
Further, the control of amount infused is the apex geometric dimension and up and down motion frequency control by changing liquid-transfering needle
The amount of liquid of the primary micro fluid infusion of liquid-transfering needle up and down motion processed, meets the requirement under pL grades of volume dimensions to different amount infuseds,
Wherein up and down motion frequency is determined by the received pulse frequency of motion controller.
Further, it is adjusted, is infused in control volume control device soft by the rotation to flow rate adjustment device middle pulley
The caliber of pipe adjusts infusion flow rate, realizes the liquid replenishing function to different viscosities liquid；In above-mentioned volume control device, pass through
Observation to the drop frequency of drop in drop pot, obtains real-time fluid infusion flow velocity.
Compared with prior art, the beneficial effects of the present invention are:
(1) the real-time liquid replenishing function of pL grades of ultramicron spot sample devices is realized.
(2) the continuous uninterrupted point sample function of pL grades of ultramicron spot sample devices is realized.
(3) monitoring function of the fluid infusion velocity of pL grades of ultramicron spot sample devices is realized.
(4) function that the fluid infusion velocity of pL grades of ultramicron spot sample devices is adjusted is realized.
(5) pL grades of ultramicron spot sample devices are realized to operate the fluid infusion of different liquids viscosity.
(6) function that pressure type liquid replenishing method uniformly goes out liquid is realized.
Detailed description of the invention
Fig. 1 is the structure principle chart of the micro continuous liquid supply device of pL grade of present example.
Fig. 2 is the structural schematic diagram of the glass-micropipe linker of present example.
Fig. 3 is the micro fluid infusion schematic diagram of pL grade of present example.
Fig. 4 a is the schematic diagram of the volume control device of present example；
Fig. 4 b is the cross-sectional view of needle mouth 605.
Fig. 5 is the flow monitoring schematic diagram of present example.
Fig. 6 is the schematic diagram of the flow regulator of present example.
In figure: 1- glass-micropipe linker；101- linker；102- capillary micro-pipe；103- liquid flooding mouth；2- liquid-transfering needle
Motion controller；3- liquid-transfering needle；4- first support；5- liquid；6- volume control device；601- is connected to interface；602- infusion is soft
Pipe；603- flow regulator；60301- pulley linear guide；60302- pulley；604- drop pot；605- needle mouth；The conveying of 7- liquid
Device；701- reservoir；702- pressure apparatus；8- second support；
9- fine droplet.
Specific embodiment
The object of the invention will be described in further detail in the following with reference to the drawings and specific embodiments, and embodiment is not
It can repeat one by one herein, but therefore embodiments of the present invention are not limited to the following examples.Unless stated otherwise, of the invention
The material and processing method used is the art conventional material and processing method.
As shown in Figure 1, a kind of pL grade ultramicron liquid supply device suitable for ultramicron sample application platform, including liquid-transfering needle 3, fortune
Movement controller 2, glass-micropipe linker 1, volume control device 6,7 five part of liquid transporting apparatus.
The glass-micropipe linker 1 is including first support 4, the linker 101 being mounted in first support 4, and
It is mounted on the capillary micro-pipe 102 and liquid flooding mouth 103 of linker one end bottom end.
Micro fluid infusion as shown in Figure 2 and Figure 3 is to drive liquid-transfering needle 3 upper in capillary micro-pipe 102 by motion controller 2
The micro pressure difference inside and outside micro-pipe generated in lower motion process realizes micro-pipe in the liquid sucking micro-pipe in linker 101
The supplement of interior pL grades of liquid.Liquid 5 in linker 101 is supplemented into capillary micro-pipe 102 in the form of fine droplet 9,
It realizes and the continuous micro of liquid 5 in capillary micro-pipe 102 is supplemented, and then complete the movement of ultramicron point sample.Different glass micro-pipe connects
In logical device 1, stretching size and liquid flooding open height size of the capillary micro-pipe 102 in linker 101 are adjustable, with full
The demand of sufficient different viscosities liquid.
As shown in fig. 4 a, the volume control device 6 includes by sequentially connected connection interface 601, infusion tube
602, flow regulator 603, drop pot 604 and needle mouth 605 form, and connection interface 601 bypasses interface tube with linker 101 and is connected.
The connection interface both ends bypass interface tube with infusion tube 602 and linker 101 respectively and connect, and 603 sets of flow regulator
In 602 outer end of infusion tube, 602 both ends of infusion tube are connect with connection interface 601 and drop 604 lower port of pot respectively,
The drop pot is connect respectively at infusion tube 602 with needle mouth 605.By volume control device 6, maintain liquid level in linker high
Degree maintains 1-2mm with 102 upper end port of capillary micro-pipe distance, prevents because of capillary caused by 5 amount of liquid is excessive in linker
Micro-pipe 102 can not lead to the problem of leaking under liquid by absorption liquid in pipe.
As shown in figure 5, flow regulator 603 in the volume control device 6, by adjustable pulley 60302 in pulley
Upper and lower position in linear guide 60301 adjusts the pipe diameter size of infusion tube 602, and then controls flow rate of liquid.
As shown in fig. 6, dripping pot 604 in the volume control device 6, fluid infusion is obtained by the dropping frequency of observed drop
Speed, and then flow controller is adjusted, maintain liquid levels line and 102 upper end port of capillary micro-pipe distance in linker to maintain 1-
2mm。
The liquid transporting apparatus 7 is fixed by second support 8, and liquid transporting apparatus 7 passes through 6 end of volume control device
End connection interface 601 is connected with glass-micropipe linker 1, and the liquid transporting apparatus 7 conveys liquid by pressure apparatus 702
To volume control device 6, liquid 5 is supplemented to glass-micropipe linker 1 by volume control device 6.
Linker 101 includes the main liquid storage chamber of liquid, communicating pipe liquid supplementation pipe is bypassed, wherein the main liquid storage chamber of liquid, for storing
Liquid supply device conveys the liquid to come, supplies 102 liquid of capillary micro-pipe, communicating pipe is for being connected to bypass liquid supplementation pipe and the main storage of liquid
Sap cavity；Capillary micro-pipe 102 is for storing the liquid contacted in ultramicron spot sample device with liquid-transfering needle 3；Liquid flooding mouth 103 is used for
Control the height of the main liquid storage chamber metal line of liquid.
The speed and amount infused of the adjustable fluid infusion of volume control device 6, meet the needs of different viscosities liquid.Flow control
Device 6 processed drips pot 604 by connection interface 601, infusion tube 602, flow regulator 603, and needle mouth 605 forms.Wherein connection connects
Mouth 601 bypasses liquid supplementation pipe for being connected to volume control device 6 and glass-micropipe linker 1, and infusion tube 602 is for conveying liquid
5, flow regulator 603 is for adjusting fluid infusion velocity, and drop pot 604 is for observing fluid infusion flow rate of liquid and excluding in infusion tube
Bubble, needle mouth 605 is for being connected to volume control device 6 and liquid transporting apparatus 7.
In this example, micro fluid infusion is by liquid-transfering needle clamp liquid-transfering needle 3 in motion controller 2, by linear servo
The micro pressure difference inside and outside micro-pipe that motor drives liquid-transfering needle 3 to generate during the up and down motion in linker micro-pipe, will even
In liquid sucking micro-pipe in logical device, the supplement of pL grades of liquid in micro-pipe is realized.
The control of amount infused is that the apex geometric dimension and up and down motion frequency by changing liquid-transfering needle 3 control liquid-transfering needle
The amount of liquid of the primary micro fluid infusion of 3 up and down motions, meets the requirement under pL grades of volume dimensions to different amount infuseds, wherein up and down
Motion frequency is determined by the received pulse frequency of motion controller 2.
It is adjusted, is infused in control volume control device 6 soft by the rotation to 603 middle pulley 60302 of flow rate adjustment device
The caliber of pipe 602 adjusts infusion flow rate, realizes the liquid replenishing function to different viscosities liquid；In above-mentioned volume control device 6,
By the observation to the drop frequency of drop in drop pot 604, real-time fluid infusion flow velocity is obtained.
Claims (7)
1.pL grades of ultramicron liquid supply devices, it is characterised in that including liquid-transfering needle (3), motion controller (2), glass-micropipe linker
(1), volume control device (6) and liquid transporting apparatus (7)；The glass-micropipe linker (1) according to law of connected vessels with
Capillary phenomenon principle designs, and is made of linker (101), capillary micro-pipe (102), liquid flooding mouth (103)；The shifting
The longitudinal center line of liquid needle (3) is overlapped with capillary micro-pipe (102) longitudinal center line in glass-micropipe linker (1)；
The motion controller (2) and liquid-transfering needle (3) is connected, and control liquid-transfering needle (3) is upper in glass-micropipe linker (1)
Lower movement；
The volume control device (6) is by sequentially connected connection interface (601), infusion tube (602), flow regulator
(603), pot (604) and needle mouth (605) composition are dripped, connection interface (601) is connected to glass-micropipe linker (1), passes through needle mouth
(605) it is connect with liquid transporting apparatus (7)；
The liquid transporting apparatus (7) is connect by volume control device (6) with glass-micropipe linker (1), and liquid is provided
(5)；In the glass-micropipe linker (1), the bottom end of linker (101) one end connects capillary micro-pipe (102), and capillary is micro-
Pipe (102) top half protrudes into linker (101) inner cavity, and linker (101) are stretched out in lower half portion；Liquid flooding mouth (103) is set
It is placed in glass-micropipe linker (1) bypass side, liquid flooding mouth (103) position is located on the outside of linker (101) bypass branch.
2. pL grades of ultramicron liquid supply device according to claim 1, it is characterised in that: capillary micro-pipe (102) top half
Linker (101) inner cavity is protruded into, the length protruded into is 10mm-15mm；Linker (101) are stretched out in lower half portion, the length of stretching
For 5mm-10mm；The inside diameter ranges 0.8-1mm of capillary micro-pipe (102)；Main liquid storage chamber internal diameter range in linker (101)
25mm-26mm, linker (101) bypass liquid supplementation pipe internal diameter range 3-4mm.
3. pL grades of ultramicron liquid supply device according to claim 1, it is characterised in that: the glass-micropipe linker
(1) in, liquid levels line and hair are controlled using different liquid flooding mouth (103) height for the liquid of different viscosities attribute
The distance of subtle pipe (102) upper end, liquid level are higher than capillary micro-pipe (102) 1-2mm.
4. pL grades of ultramicron liquid supply device according to claim 1, it is characterised in that: the liquid-transfering needle (3) is by tungsten wire
The ultra tiny accurate electro-discharge machining of needle forms, and tip dimensions require to determine according to liquid sendout.
5. pL grades of ultramicron liquid supply device according to claim 1, it is characterised in that: the motion controller (2) by
Linear servo-actuator, servo-driver, liquid-transfering needle fixture composition；Liquid-transfering needle fixture is using scroll chuck structure to clamp liquid relief
Needle (3).
6. utilizing the liquid replenishing method of pL grade ultramicron liquid supply device described in claim 1, it is characterised in that: micro fluid infusion is logical
Liquid-transfering needle clamp liquid-transfering needle (3) in motion controller (2) is crossed, drives liquid-transfering needle (3) in linker by linear servo-actuator
The micro pressure difference inside and outside micro-pipe generated during up and down motion in micro-pipe, the liquid in linker is sucked in micro-pipe,
Realize the supplement of pL grades of liquid in micro-pipe.
7. liquid replenishing method according to claim 6, it is characterised in that: the control of amount infused is by changing liquid-transfering needle (3)
Apex geometric dimension and up and down motion frequency control liquid-transfering needle (3) move up and down the amount of liquid of primary micro fluid infusion, meet
To the requirement of different amount infuseds under pL grades of volume dimensions, wherein up and down motion frequency is by motion controller (2) received pulse
Frequency determines.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610698227.7A CN106111469B (en) | 2016-08-20 | 2016-08-20 | PL grades of ultramicron liquid supply devices and method |
| PCT/CN2016/110551 WO2018036033A1 (en) | 2016-08-20 | 2016-12-16 | Pl-grade ultra-micro liquid supplementing device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610698227.7A CN106111469B (en) | 2016-08-20 | 2016-08-20 | PL grades of ultramicron liquid supply devices and method |
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| Publication Number | Publication Date |
|---|---|
| CN106111469A CN106111469A (en) | 2016-11-16 |
| CN106111469B true CN106111469B (en) | 2019-01-18 |
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| CN201610698227.7A Active CN106111469B (en) | 2016-08-20 | 2016-08-20 | PL grades of ultramicron liquid supply devices and method |
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| CN (1) | CN106111469B (en) |
| WO (1) | WO2018036033A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106111469B (en) * | 2016-08-20 | 2019-01-18 | 华南理工大学 | PL grades of ultramicron liquid supply devices and method |
| CN110918384B (en) * | 2019-11-21 | 2021-05-14 | 沈阳工业大学 | Ultra-precise dispensing system and method |
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| JP2002273316A (en) * | 2001-03-19 | 2002-09-24 | Toppan Forms Co Ltd | Liquid agent feeding apparatus |
| CN102101097A (en) * | 2011-03-31 | 2011-06-22 | 华南理工大学 | Ultra-micro glue dispensing device and method |
| CN203316322U (en) * | 2013-06-26 | 2013-12-04 | 山东鑫汇铜材有限公司 | Surface coating device for oxygen-free copper rod |
| CN205084104U (en) * | 2015-10-26 | 2016-03-16 | 师文强 | Novel infusion apparatus |
| CN205966413U (en) * | 2016-08-20 | 2017-02-22 | 华南理工大学 | PL level ultramicron liquid supplementation device |
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| CN85201252U (en) * | 1985-04-01 | 1986-07-30 | 复旦大学 | Flow velocity stabilizer for current (flow) measurement |
| US7964237B2 (en) * | 2003-08-21 | 2011-06-21 | International Business Machines Corporation | Fully automated paste dispense process for dispensing small dots and lines |
| CN201949996U (en) * | 2011-03-31 | 2011-08-31 | 华南理工大学 | Ultramicro point gum device |
| JP5759058B1 (en) * | 2014-03-11 | 2015-08-05 | エンジニアリングシステム株式会社 | Micro fluid discharge method and micro fluid dispenser |
| US10221060B2 (en) * | 2014-05-20 | 2019-03-05 | Engineering System Co., Ltd. | Microvolume-liquid dispensing method and microvolume-liquid dispenser |
| CN106111469B (en) * | 2016-08-20 | 2019-01-18 | 华南理工大学 | PL grades of ultramicron liquid supply devices and method |
-
2016
- 2016-08-20 CN CN201610698227.7A patent/CN106111469B/en active Active
- 2016-12-16 WO PCT/CN2016/110551 patent/WO2018036033A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002273316A (en) * | 2001-03-19 | 2002-09-24 | Toppan Forms Co Ltd | Liquid agent feeding apparatus |
| CN102101097A (en) * | 2011-03-31 | 2011-06-22 | 华南理工大学 | Ultra-micro glue dispensing device and method |
| CN203316322U (en) * | 2013-06-26 | 2013-12-04 | 山东鑫汇铜材有限公司 | Surface coating device for oxygen-free copper rod |
| CN205084104U (en) * | 2015-10-26 | 2016-03-16 | 师文强 | Novel infusion apparatus |
| CN205966413U (en) * | 2016-08-20 | 2017-02-22 | 华南理工大学 | PL level ultramicron liquid supplementation device |
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| Publication number | Publication date |
|---|---|
| WO2018036033A1 (en) | 2018-03-01 |
| CN106111469A (en) | 2016-11-16 |
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