CN106111469A - PL level ultramicron liquid supply device and method - Google Patents

PL level ultramicron liquid supply device and method Download PDF

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Publication number
CN106111469A
CN106111469A CN201610698227.7A CN201610698227A CN106111469A CN 106111469 A CN106111469 A CN 106111469A CN 201610698227 A CN201610698227 A CN 201610698227A CN 106111469 A CN106111469 A CN 106111469A
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China
Prior art keywords
liquid
linker
pipe
micro
micropipe
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CN201610698227.7A
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Chinese (zh)
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CN106111469B (en
Inventor
张勤
范吉斌
刘嘉超
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South China University of Technology SCUT
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South China University of Technology SCUT
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Priority to CN201610698227.7A priority Critical patent/CN106111469B/en
Publication of CN106111469A publication Critical patent/CN106111469A/en
Priority to PCT/CN2016/110551 priority patent/WO2018036033A1/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/105Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material by capillary action, e.g. using wicks

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  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The invention provides pL level ultramicron liquid supply device and method.Liquid supply device includes liquid-transfering needle, motion controller, glass-micropipe linker, volume control device, liquid transporting apparatus five part;Wherein, motion controller controls liquid-transfering needle up and down motion;Glass-micropipe linker, forms with capillarity principle design according to law of connected vessels;Volume control device can regulate speed and the amount infused of fluid infusion, meets the needs of different viscosities liquid;Volume control device is connected with glass-micropipe linker by liquid transporting apparatus by connection interface, provides micro liquid for glass-micropipe linker.In the inventive method, pL level ultramicron liquid replenishing method is the trace pressure differential inside and outside the micro-pipe by producing during liquid-transfering needle up and down motion in the micro-pipe of capillary, is sucked by the liquid in linker in micro-pipe, it is achieved in micro-pipe, pL level liquid supplements.The present invention is applicable to the pL continuous fluid infusion of level ultramicron of various viscous liquid and flow speed is prone to observation, regulation.

Description

PL level ultramicron liquid supply device and method
Technical field
The present invention relates to deposition techniques field, particularly relate to a kind of pL(picoliters for micro assemby) level ultramicron point sample The liquid supply device of platform and method.
Background technology
Being of wide application of deposition techniques, from semiconductor packaging industry, IC industry, SMT/PCB assembly industry to The welding of general industry, note are coated with and seal point sample, and deposition techniques all plays vital effect.The present invention is in south China science and engineering University proposes the continuous liquid supply device of new type micro on the basis of opening the diligent ultramicron spotting methods proposed, and solves original point sample Method, it is impossible to the problem of fluid infusion continuously.When ultramicron spotting methods is to use liquid-transfering needle through liquid in glass-micropipe, move liquid The fine droplet of pin tip absorption realizes ultramicron point sample.Wherein the storage of spotting fluid is in the middle of glass-micropipe, and it is former Reason is dependent on capillarity and fills liquid in the middle of glass-micropipe.In original device, capillarity is relied on to realize liquid storage The glass-micropipe device of glass-micropipe, is limited to the impact of storage principle and self structure, and capillary tube cannot store big quantity of fluid, And the continuous fluid infusion of the real-time minimum to capillary tube cannot be realized.Therefore, original ultramicron spot sample device cannot realize point sample move That makees is carried out continuously, and needs to stop point sample action, carries out supplementing of liquid.Being limited to this, former method cannot meet ultramicron The requirement that sample application platform is worked continuously, is only applicable to very small amount, discontinuous point sample application.The method that the present invention proposes, The continuous fluid infusion of trace of ultramicron spot sample device can be realized;The glass that liquid stores is realized retaining original dependence capillarity On micro-pipe device basic, rely on law of connected vessels, invented a kind of real-time liquid supply device.Solve original ultramicron sample application platform The problem that cannot work continuously.
Summary of the invention
In order to overcome above-mentioned the deficiencies in the prior art, the present invention realizes liquid storage in the original dependence capillarity of reservation On glass-micropipe device basic, law of connected vessels, design is relied on to invent pL level ultramicron liquid supply device and method.
The purpose of the present invention realizes at least through one of following technical scheme.
A kind of pL level ultramicron liquid supply device, including liquid-transfering needle, motion controller, glass-micropipe linker, flow-control Device and liquid transporting apparatus;Described glass-micropipe linker forms with capillarity principle design according to law of connected vessels, It is made up of linker, the micro-pipe of capillary, liquid flooding mouth;The longitudinal center line of described liquid-transfering needle and hair in glass-micropipe linker Trickle tube portion longitudinal center line overlaps;
Described motion controller is connected with liquid-transfering needle, controls liquid-transfering needle moving up and down in glass-micropipe linker;
Described volume control device is made up of the connection interface being sequentially connected with, infusion tube, flow regulator, a kettle and pin mouth, Connection interface connects with glass-micropipe linker, is connected with liquid transporting apparatus by pin mouth;
Described liquid transporting apparatus is connected with glass-micropipe linker by volume control device, it is provided that liquid.
Further, in described glass-micropipe linker, the bottom of linker one end connects the micro-pipe of capillary, and capillary is micro- Pipe top half stretches into linker inner chamber, and linker is stretched out in the latter half;Liquid flooding mouth is arranged at by glass-micropipe linker Side, road, liquid flooding mouth position is positioned at outside linker bypass branch.
Further, capillary micro-pipe top half stretches into linker inner chamber, a length of 10mm-15mm stretched into;Lower half Divide and stretch out linker, a length of 5mm-10mm stretched out;Inside diameter ranges 0.8-1mm of the micro-pipe of capillary;Main liquid storage cylinder in linker Internal diameter size scope 25mm-26mm, linker bypass liquid supplementation pipe internal diameter size scope 3-4mm.
Further, in described glass-micropipe linker, for the liquid of different viscosities attribute, use different liquid Overfall height, controls the distance of liquid levels line and capillary micro-pipe upper end, and liquid level is higher than capillary micro-pipe 1-2mm.
Further, described liquid-transfering needle is formed by the ultra tiny accurate electro-discharge machining of tungsten filament pin, and tip dimensions is according to liquid Sendout requires to determine.
Further, described motion controller is made up of linear servo-actuator, servo-driver, liquid-transfering needle fixture;Move Liquid pin fixture uses scroll chuck structure in order to clamp liquid-transfering needle.
Further, linker includes the main liquid storage cylinder of liquid, communicating pipe, bypasses liquid supplementation pipe, the wherein main liquid storage cylinder of liquid, uses Carry, in storage liquid supply device, the liquid come, supply capillary micro-pipe liquid, be used for communicating pipe connecting bypass liquid supplementation pipe and liquid Main liquid storage cylinder;The micro-pipe of capillary is for storing the liquid contacted in ultramicron spot sample device with liquid-transfering needle;Liquid flooding mouth is used for controlling The height of liquid processed main liquid storage cylinder metal line.
Further, volume control device can regulate speed and the amount infused of fluid infusion, meets the need of different viscosities liquid Want.Volume control device is by connecting interface, and infusion tube, flow regulator, a kettle, pin mouth forms.Wherein connection interface is used for Connection volume control device bypasses liquid supplementation pipe with glass-micropipe linker, and infusion tube is used for carrying liquid, and flow regulator is used In regulation fluid infusion velocity, dripping the bubble that kettle is used for observing fluid infusion flow rate of liquid and getting rid of in infusion tube, pin mouth is used for connecting stream Amount control device and liquid transporting apparatus.
It is applicable to the liquid replenishing method of pL level ultramicron liquid supply device, including: trace fluid infusion is by moving in motion controller Liquid pin clamp liquid-transfering needle, linear servo-actuator produce during driving liquid-transfering needle up and down motion in the micro-pipe of linker Micro-pipe inside and outside trace pressure differential, the liquid in linker is sucked in micro-pipe, it is achieved in micro-pipe, pL level liquid supplements.
Further, the control of amount infused is by changing the tip physical dimension of liquid-transfering needle and up and down motion frequency control The amount of liquid of a liquid-transfering needle processed trace fluid infusion of up and down motion, meets the requirement to different amount infuseds under pL level volume dimension, The pulse frequency that wherein up and down motion frequency is received by motion controller determines.
Further, by the rotation of flow rate adjustment device middle pulley is regulated, control volume control device is infused soft The caliber of pipe regulates infusion flow rate, it is achieved the liquid replenishing function to different viscosities liquid;In above-mentioned volume control device, pass through To dripping the observation of the drop frequency of drop in kettle, obtain real-time fluid infusion flow velocity.
Compared with prior art, the invention has the beneficial effects as follows:
(1) the real-time liquid replenishing function of pL level ultramicron spot sample device is achieved.
(2) the most uninterrupted point sample function of pL level ultramicron spot sample device is achieved.
(3) monitoring function of the fluid infusion velocity of pL level ultramicron spot sample device is achieved.
(4) function of the fluid infusion velocity regulation of pL level ultramicron spot sample device is achieved.
(5) achieve pL level ultramicron spot sample device the fluid infusion of different liquids viscosity is operated.
(6) achieve pressure type liquid replenishing method and uniformly go out the function of liquid.
Accompanying drawing explanation
Fig. 1 is the structure principle chart of the pL continuous liquid supply device of level trace of present example.
Fig. 2 is the structural representation of the glass-micropipe linker of present example.
Fig. 3 is the pL level trace fluid infusion schematic diagram of present example.
Fig. 4 is the schematic diagram of the volume control device of present example.
Fig. 5 is the flow monitoring schematic diagram of present example.
Fig. 6 is the schematic diagram of the flow regulator of present example.
In figure: 1-glass-micropipe linker;101-linker;The micro-pipe of 102-capillary;103-liquid flooding mouth;2-liquid-transfering needle Motion controller;3-liquid-transfering needle;4-the first support;5-liquid;6-volume control device;601-connects interface;602-transfusion is soft Pipe;603-flow regulator;60301-pulley line slideway;60302-pulley;604-drips kettle;605-pin mouth;7-liquid carries Device;701-reservoir;702-pressure apparatus;8-the second support;
9-fine droplet.
Detailed description of the invention
Being described in further detail the goal of the invention of the present invention with specific embodiment below in conjunction with the accompanying drawings, embodiment is not Can repeat one by one at this, but the most therefore embodiments of the present invention are defined in following example.Unless stated otherwise, the present invention The material and the processing method that use are the art conventional material and processing method.
As it is shown in figure 1, a kind of pL level ultramicron liquid supply device being applicable to ultramicron sample application platform, including liquid-transfering needle 3, fortune Movement controller 2, glass-micropipe linker 1, volume control device 6, liquid transporting apparatus 7 five part.
Described glass-micropipe linker 1 includes the first support 4, is arranged on the linker 101 on the first support 4, and It is arranged on the micro-pipe of capillary 102 of bottom, linker one end, and liquid flooding mouth 103.
As shown in Figure 2 and Figure 3 trace fluid infusion be by motion controller 2 drive liquid-transfering needle 3 in the micro-pipe of capillary 102 upper The trace pressure differential inside and outside micro-pipe produced in lower motor process, sucks the liquid in linker 101 in micro-pipe, it is achieved micro-pipe Supplementing of interior pL level liquid.Being supplemented with the form of fine droplet 9 by liquid 5 in linker 101 enters in the micro-pipe of capillary 102, Realize the continuous micro of liquid 5 in pipe 102 micro-to capillary to supplement, and then complete ultramicron point sample action.The micro-Guan Lian of different glass In logical device 1, the micro-pipe of capillary 102 in linker 101 stretch out size and liquid flooding open height size can adjust, with full The demand of foot different viscosities liquid.
As shown in Figure 4, described volume control device 6 include by the connection interface 601 being sequentially connected with, infusion tube 602, Flow regulator 603, a kettle 604 and pin mouth 605 form, and connection interface 601 is connected with linker 101 shunt valve interface.Described Connection interface two ends be connected with infusion tube 602 and linker 101 shunt valve interface respectively, flow regulator 603 is enclosed within defeated Liquid flexible pipe 602 outer end, described infusion tube 602 two ends are connected with connection interface 601 and kettle 604 lower port respectively, described Drip a kettle be connected with pin mouth 605 respectively at infusion tube 602.By volume control device 6, maintain in linker liquid level with Capillary micro-pipe 102 upper end port distance maintains 1-2mm, prevents the micro-pipe of capillary too much caused because of liquid 5 amount in linker 102 cannot rely on absorption liquid in pipe to cause the problem of leakage under liquid.
As it is shown in figure 5, flow regulator 603 in described volume control device 6, by adjustable pulley 60302 at pulley Upper-lower position in line slideway 60301, the pipe diameter size of regulation infusion tube 602, and then control flow rate of liquid.
As shown in Figure 6, described volume control device 6 drips kettle 604, obtains fluid infusion by the dropping frequency of observed drop Speed, and then regulation flow controller, in maintaining linker, liquid levels line maintains 1-with capillary micro-pipe 102 upper end port distance 2mm。
Described liquid transporting apparatus 7 is fixed by the second support 8, and liquid transporting apparatus 7 is by volume control device 6 end End connection interface 601 is connected with glass-micropipe linker 1, and described liquid transporting apparatus 7 carries liquid by pressure apparatus 702 To volume control device 6, give glass-micropipe linker 1 liquid make-up 5 by volume control device 6.
Linker 101 includes the main liquid storage cylinder of liquid, communicating pipe, bypasses liquid supplementation pipe, the wherein main liquid storage cylinder of liquid, is used for storing Liquid supply device carries the liquid come, and supplies capillary micro-pipe 102 liquid, is used for communicating pipe connecting bypass liquid supplementation pipe and the main storage of liquid Sap cavity;The micro-pipe of capillary 102 is for storing the liquid contacted in ultramicron spot sample device with liquid-transfering needle 3;Liquid flooding mouth 103 is used for Control the height of liquid main liquid storage cylinder metal line.
Volume control device 6 can regulate speed and the amount infused of fluid infusion, meets the needs of different viscosities liquid.Flow control Device 6 processed, by connection interface 601, infusion tube 602, flow regulator 603, drips kettle 604, and pin mouth 605 forms.Wherein connection connects Mouth 601 is used for connecting volume control device 6 and bypasses liquid supplementation pipe with glass-micropipe linker 1, and infusion tube 602 is used for carrying liquid 5, flow regulator 603 is used for regulating fluid infusion velocity, drips kettle 604 for observing fluid infusion flow rate of liquid and getting rid of in infusion tube Bubble, pin mouth 605 is used for connecting volume control device 6 and liquid transporting apparatus 7.
In this example, trace fluid infusion is by liquid-transfering needle clamp liquid-transfering needle 3 in motion controller 2, by linear servo The trace pressure differential inside and outside micro-pipe produced during the driven by motor liquid-transfering needle 3 up and down motion in the micro-pipe of linker, will even Liquid in logical device sucks in micro-pipe, it is achieved in micro-pipe, pL level liquid supplements.
The control of amount infused is by changing the tip physical dimension of liquid-transfering needle 3 and up and down motion FREQUENCY CONTROL liquid-transfering needle The amount of liquid of 3 trace fluid infusion of up and down motion, meets the requirement to different amount infuseds under pL level volume dimension, the most up and down The pulse frequency that motion frequency is received by motion controller 2 determines.
By the rotation of flow rate adjustment device 603 middle pulley 60302 is regulated, control volume control device 6 is infused soft The caliber of pipe 602 regulates infusion flow rate, it is achieved the liquid replenishing function to different viscosities liquid;In above-mentioned volume control device 6, By to dripping the observation of the drop frequency of drop in kettle 604, obtaining real-time fluid infusion flow velocity.

Claims (8)

1.pL level ultramicron liquid supply device, it is characterised in that include liquid-transfering needle (3), motion controller (2), glass-micropipe linker (1), volume control device (6) and liquid transporting apparatus (7);Described glass-micropipe linker (1) according to law of connected vessels with Capillarity principle design forms, and is made up of linker (101), the micro-pipe of capillary (102), liquid flooding mouth (103);Described shifting The longitudinal center line of liquid pin (3) overlaps with capillary micro-pipe (102) part longitudinal center line in glass-micropipe linker (1);
Described motion controller (2) and liquid-transfering needle (3) are connected, and control upper in glass-micropipe linker (1) of liquid-transfering needle (3) Lower movement;
Described volume control device (6) is by the connection interface (601) being sequentially connected with, infusion tube (602), flow regulator (603), dripping kettle (604) and pin mouth (605) composition, connection interface (601) connects with glass-micropipe linker (1), by pin mouth (605) it is connected with liquid transporting apparatus (7);
Described liquid transporting apparatus (7) is connected with glass-micropipe linker (1) by volume control device (6), it is provided that liquid (5).
PL level ultramicron liquid supply device the most according to claim 1, it is characterised in that: described glass-micropipe linker (1) in, the bottom of linker (101) one end connects the micro-pipe of capillary (102), and capillary micro-pipe (102) top half stretches into connection Device (101) inner chamber, linker (101) is stretched out in the latter half;It is other that liquid flooding mouth (103) is arranged at glass-micropipe linker (1) Side, road, liquid flooding mouth (103) position is positioned at outside linker (101) bypass branch.
PL level ultramicron liquid supply device the most according to claim 2, it is characterised in that: capillary micro-pipe (102) top half Stretch into linker (101) inner chamber, a length of 10mm-15mm stretched into;Linker (101), the length stretched out are stretched out in the latter half For 5mm-10mm;Inside diameter ranges 0.8-1mm of the micro-pipe of capillary (102);Main liquid storage cylinder internal diameter size scope in linker (101) 25mm-26mm, linker (101) bypass liquid supplementation pipe internal diameter size scope 3-4mm.
PL level ultramicron liquid supply device the most according to claim 2, it is characterised in that: described glass-micropipe linker (1) in, for the liquid of different viscosities attribute, use different liquid flooding mouths (103) highly, control liquid levels line and hair The distance of trickle pipe (102) upper end, liquid level is higher than capillary micro-pipe (102) 1-2mm.
PL level ultramicron liquid supply device the most according to claim 2, it is characterised in that: described liquid-transfering needle (3) is by tungsten filament The ultra tiny accurate electro-discharge machining of pin forms, and tip dimensions requires to determine according to liquid sendout.
PL level ultramicron liquid supply device the most according to claim 1, it is characterised in that: described motion controller (2) by Linear servo-actuator, servo-driver, liquid-transfering needle fixture form;Liquid-transfering needle fixture uses scroll chuck structure in order to clamp shifting liquid Pin (3).
7. utilize the liquid replenishing method of pL level ultramicron liquid supply device described in claim 1, it is characterised in that: trace fluid infusion is logical Cross liquid-transfering needle clamp liquid-transfering needle (3) in motion controller (2), linear servo-actuator drive liquid-transfering needle (3) at linker The trace pressure differential inside and outside micro-pipe produced during up and down motion in micro-pipe, sucks the liquid in linker in micro-pipe, Realize supplementing of pL level liquid in micro-pipe.
Liquid replenishing method the most according to claim 7, it is characterised in that: the control of amount infused is by changing liquid-transfering needle (3) Tip physical dimension and up and down motion FREQUENCY CONTROL liquid-transfering needle (3) move up and down a trace fluid infusion amount of liquid, meet Requirement to different amount infuseds under pL level volume dimension, the pulse that wherein up and down motion frequency is received by motion controller (2) Frequency determines.
CN201610698227.7A 2016-08-20 2016-08-20 PL grades of ultramicron liquid supply devices and method Expired - Fee Related CN106111469B (en)

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CN201610698227.7A CN106111469B (en) 2016-08-20 2016-08-20 PL grades of ultramicron liquid supply devices and method
PCT/CN2016/110551 WO2018036033A1 (en) 2016-08-20 2016-12-16 Pl-grade ultra-micro liquid supplementing device and method

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CN110918384A (en) * 2019-11-21 2020-03-27 沈阳工业大学 Ultra-precise dispensing system and method
CN114289417A (en) * 2020-10-08 2022-04-08 佳能医疗系统株式会社 Automatic analyzer and cleaning method

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CN114289417A (en) * 2020-10-08 2022-04-08 佳能医疗系统株式会社 Automatic analyzer and cleaning method

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Granted publication date: 20190118