CN106100636B - Frequency divider based on MEMS wideband phases detector and thermo-compensator - Google Patents
Frequency divider based on MEMS wideband phases detector and thermo-compensator Download PDFInfo
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- CN106100636B CN106100636B CN201610393055.2A CN201610393055A CN106100636B CN 106100636 B CN106100636 B CN 106100636B CN 201610393055 A CN201610393055 A CN 201610393055A CN 106100636 B CN106100636 B CN 106100636B
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION, OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L7/00—Automatic control of frequency or phase; Synchronisation
- H03L7/06—Automatic control of frequency or phase; Synchronisation using a reference signal applied to a frequency- or phase-locked loop
- H03L7/16—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop
- H03L7/18—Indirect frequency synthesis, i.e. generating a desired one of a number of predetermined frequencies using a frequency- or phase-locked loop using a frequency divider or counter in the loop
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03G—CONTROL OF AMPLIFICATION
- H03G3/00—Gain control in amplifiers or frequency changers without distortion of the input signal
- H03G3/20—Automatic control
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- Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
Abstract
The invention discloses a kind of frequency divider based on MEMS wideband phases detector and thermo-compensator, including MEMS wideband phases detector, thermo-compensator R, direct current automatic growth control AGC amplifier, the first voltage controlled oscillator VCO 1, the second voltage controlled oscillator VCO 2, the first variable resistance R1 and the second adjustable resistance R2, multiplier.Beneficial effects of the present invention are：Frequency divider has broadband character, and the frequency dividing to the reference signal of different frequency may be implemented；The synchronous adjustment to reference signal and feedback signal is realized in control by variable resistance to the control of voltage-controlled oscillator voltage and to direct current automatic growth control AGC amplifier gain, even if can also realize frequency dividing in the case where circuit has fluctuation；With temperature compensation characteristic, when temperature changes, influence of the temperature change to divider state can be eliminated, there is temperature stability；Novelty simple in structure, it is easy to operate, it is compatible with GaAs monolithic integrated microwave circuits.
Description
Technical field
The present invention relates to microelectromechanical systems fields, especially a kind of to be based on MEMS wideband phases detector and temperature
Compensate the frequency divider of resistance.
Background technology
Frequency divider is a kind of instrument for the frequency signal obtaining 1/N times of reference signal frequency using feedback control principle.Point
Frequency device is in various fields, as being all widely used in wireless communication, radar, DTV.
In the prior art, frequency divider is the frequency dividing for single frequency point mostly, cannot be satisfied the demand of wideband communication system,
In addition, temperature stability is also one of the basic demand to frequency divider.
Invention content
Technical problem to be solved by the present invention lies in provide a kind of reasonable for structure based on the detection of MEMS wideband phases
The frequency divider of device and thermo-compensator, realizes the frequency dividing of different frequency signals in broad frequency range, and avoids temperature change pair
The influence of frequency divider.
In order to solve the above technical problems, the present invention provides one kind based on MEMS wideband phases detector and temperature-compensating electricity
The frequency divider of resistance, including MEMS wideband phases detector, thermo-compensator R, direct current automatic growth control AGC amplifier,
First voltage controlled oscillator VCO 1, the second voltage controlled oscillator VCO 2, the first variable resistance R1 and the second adjustable resistance R2, multiplier；
The base biasing resistor R of thermo-compensator R and direct current automatic growth control AGC amplifierbIt is in parallel；Power supply VEIt can by first
Become resistance R1 to be loaded into the first voltage controlled oscillator VCO 1, while direct current automatic gain control is loaded by the second adjustable resistance R2
On AGC amplifier processed；First voltage controlled oscillator VCO 1 generates reference signal, and the size by adjusting the first variable resistance R1 changes
The frequency of first voltage controlled oscillator VCO 1；Reference signal and feedback signal are loaded into the ground of MEMS wideband phase detectors respectively
Two symmetrical input ports that line 2 and CPW signal wires 3 form, obtain DC voltage V related with phase difference, DC voltage V
Input direct-current automatic growth control AGC amplifier, amplified signal are the control voltage V of the second voltage controlled oscillator VCO 2C2, the
After the output signal of two voltage controlled oscillator VCOs 2 is by multiplier, frequency becomes original N times, the feedback signal as frequency divider
Input MEMS wideband phase detectors；Adjust the size control direct current automatic growth control AGC amplifications of the second adjustable resistance R2
The gain of device adjusts the control voltage of the second voltage controlled oscillator VCO 2, controls the control voltage and frequency of feedback signal；Same step
The first variable resistance R1 and the second adjustable resistance R2 is saved, it is the first voltage controlled oscillation to make the output frequency of the second voltage controlled oscillator VCO 2
1/N times of device VCO1 output frequencies completes the frequency dividing to the reference signal of different frequency.
Preferably, when environment temperature increases, the DC voltage V of MEMS wideband phase detectors output becomes larger, temperature
Compensate resistance R and its and RbParallel resistance also will increase, cause the base potential of direct current automatic growth control AGC amplifier to drop
Low, gain reduces, and compensating direct current voltage V becomes larger the influence brought, while adjusting the second adjustable resistance R2, makes direct current automatic gain
Control the output voltage V of AGC amplifierC2It keeps stablizing, not be acted upon by temperature changes；When temperature reduces, thermo-compensator R
And its and RbParallel resistance reduce, base potential increases, and the gain of direct current automatic growth control AGC amplifier becomes larger, and compensates
DC voltage V becomes smaller the influence brought, while adjusting the second adjustable resistance R2, makes the output voltage V of direct current AGC amplifierC2It protects
It is fixed to keep steady, and frequency divider has temperature stability.
Preferably, power supply VEIt is loaded into the first voltage controlled oscillation respectively by the first variable resistance R1 and the second adjustable resistance R2
On device VCO1 and direct current automatic growth control AGC amplifier, the first voltage controlled oscillator VCO 1 is adjusted by the first variable resistance R1
Control voltage VC1Control under, export reference signal, by adjust the first variable resistance R1, control the frequency of reference signal；
After reference signal and feedback signal input MEMS wideband phase detectors by input port, sweared first by work(clutch
Amount synthesis, composite signal are converted into DC voltage V related with phase difference by thermoelectric (al) type power sensor, through direct current output electricity
Pole 11 exports, this DC voltage V can be expressed as：Wherein K is related with input signal amplitude
Coefficient, ωrefFor reference signal angular frequency, ωbackFor feedback signal angular frequency,It is poor for proper phase；MEMS broadband phases
The DC voltage V of bit detector output is input to direct current automatic growth control AGC amplifier by first port 14 and is amplified,
Amplified DC voltage VC2It can be expressed as：Wherein A is direct current automatic growth control AGC
The gain coefficient of amplifier, amplified DC voltage VC2For the control voltage of the second voltage controlled oscillator VCO 2, pass through second end
Mouth 15 controls the output frequency of the second voltage controlled oscillator VCOs 2, voltage controlled oscillator output frequency ωoIt can be expressed by following formula：By adjusting the second adjustable resistance R2, change direct current automatic growth control AGC
The DC bias supplies V of amplifierCThe adjusting to gain coefficient A is realized, to change the control of the second voltage controlled oscillator VCO 2
The frequency of voltage and its corresponding output signal；The output signal of second voltage controlled oscillator VCO 2 is multiplied by the input of third port 16
Musical instruments used in a Buddhist or Taoist mass, after multiplier, frequency becomes original N times, ωback=N × ωo, this signal is the feedback signal of frequency divider, is led to
It crosses the 4th port 17 and re-enters MEMS wideband phase detectors；It is variable by synchronous control the first variable resistance R1 and second
Resistance R2 keeps the frequency of feedback signal and reference signal equal, i.e.,Second voltage controlled oscillator VCO 2
Output frequency is 1/N times of 1 output frequency of the first voltage controlled oscillator VCO, realizes frequency dividing, obtains working in broad frequency range
Frequency divider.
Preferably, there is the case where fluctuation in the output DC voltage V of MEMS wideband phases detector at different frequencies
Under, still it can realize that frequency dividing, the signal after frequency dividing pass through by adjusting the first variable resistance R1 and the second adjustable resistance R2
Fifth port 18 exports.
Preferably, MEMS wideband phases detector is using GaAs1 as substrate, including work(clutch and thermoelectric (al) type power sensing
Device, work(clutch include ground wire 2, CPW signal wires 3, the first ACPS transmission lines 4, the 2nd ACPS transmission lines 5, the 3rd ACPS transmission lines 6
With isolation resistance 7, thermoelectric (al) type power sensor includes terminal resistance 8, thermoelectric pile semiconductor arm 9, thermoelectric pile metal arm 10, direct current
Output electrode 11；For MEMS wideband phases detector using GaAs substrate, ground wire 2 constitutes the input of work(clutch with CPW signal wires 3
And output port, the first ACPS transmission lines 4, the 2nd ACPS transmission lines 5 are mutually cascaded with the 3rd ACPS transmission lines 6, isolation resistance 7 divides
It is not arranged in the end of the first ACPS transmission lines 4, the 2nd ACPS transmission lines 5 and the 3rd ACPS transmission lines 6, terminal resistance 8 is arranged
At the output port of CPW signal wires 3, thermoelectric pile semiconductor arm 9 is sequentially connected with thermoelectric pile metal arm 10, constitutes thermoelectric pile,
Direct current output electrode 11 is connected to thermoelectric pile both ends.
Preferably, the characteristic impedance of the first ACPS transmission lines 4 is Z1, and the characteristic impedance of the 2nd ACPS transmission lines 5 is Z2, the
The characteristic impedance of three ACPS transmission lines 6 is Z3.
Beneficial effects of the present invention are：Frequency divider has broadband character, and the reference signal to different frequency may be implemented
Frequency dividing；By variable resistance to the control of voltage-controlled oscillator voltage and to direct current automatic growth control AGC amplifier gain
Control realizes to the synchronous adjustment of reference signal and feedback signal, even if there is the in the case of fluctuated in circuit can also realize point
Frequently；With temperature compensation characteristic, when temperature changes, influence of the temperature change to divider state can be eliminated, is had
Temperature stability；Novelty simple in structure, it is easy to operate, it is compatible with GaAs monolithic integrated microwave circuits.
Description of the drawings
Fig. 1 is the frequency divider vertical view of the present invention.
Fig. 2 is the A-A ' of the frequency divider of the present invention to sectional view.
Fig. 3 is the B-B ' of the frequency divider of the present invention to sectional view.
Fig. 4 is the C-C ' of the frequency divider of the present invention to sectional view.
Specific implementation mode
As shown in Fig. 1,2,3 and 4, a kind of frequency divider based on MEMS wideband phases detector and thermo-compensator,
Including MEMS wideband phases detector, thermo-compensator R, direct current automatic growth control AGC amplifier, the first voltage controlled oscillation
Device VCO1, the second voltage controlled oscillator VCO 2, the first variable resistance R1 and the second adjustable resistance R2, multiplier；Thermo-compensator R
With the base biasing resistor R of direct current automatic growth control AGC amplifierbIt is in parallel；Power supply VEIt is loaded by the first variable resistance R1
In first voltage controlled oscillator VCO 1, while being loaded on direct current automatic growth control AGC amplifier by the second adjustable resistance R2；
First voltage controlled oscillator VCO 1 generates reference signal, and the size by adjusting the first variable resistance R1 changes the first voltage controlled oscillator
The frequency of VCO1；Reference signal and feedback signal are loaded into the ground wire 2 and CPW signal wires of MEMS wideband phase detectors respectively
Two symmetrical input ports of 3 compositions, obtain DC voltage V related with phase difference, DC voltage V input direct-currents increase automatically
Benefit control AGC amplifier, amplified signal are the control voltage V of the second voltage controlled oscillator VCO 2C2, the second voltage controlled oscillator
After the output signal of VCO2 is by multiplier, frequency becomes original N times, and the feedback signal as frequency divider inputs MEMS widebands
Band phase detectors；The gain for adjusting the size control direct current automatic growth control AGC amplifier of the second adjustable resistance R2, is adjusted
The control voltage of second voltage controlled oscillator VCO 2 controls the control voltage and frequency of feedback signal；Being adjusted in synchronism first can power transformation
R1 and the second adjustable resistance R2 is hindered, it is the first voltage controlled oscillator VCO 1 output frequency to make the output frequency of the second voltage controlled oscillator VCO 2
1/N times of rate completes the frequency dividing to the reference signal of different frequency.
When environment temperature increases, the DC voltage V of MEMS wideband phase detectors output becomes larger, thermo-compensator
R and its and RbParallel resistance also will increase, cause the base potential of direct current automatic growth control AGC amplifier to reduce, gain
Reduce, compensating direct current voltage V becomes larger the influence brought, while adjusting the second adjustable resistance R2, makes direct current automatic growth control AGC
The output voltage V of amplifierC2It keeps stablizing, not be acted upon by temperature changes；Temperature reduce when, thermo-compensator R and its with
RbParallel resistance reduce, base potential increases, and the gain of direct current automatic growth control AGC amplifier becomes larger, compensating direct current electricity
Pressure V becomes smaller the influence brought, while adjusting the second adjustable resistance R2, makes the output voltage V of direct current AGC amplifierC2It keeps stablizing,
Frequency divider has temperature stability.
Power supply VEIt is loaded into the first voltage controlled oscillator VCO 1 respectively by the first variable resistance R1 and the second adjustable resistance R2
On direct current automatic growth control AGC amplifier, the first voltage controlled oscillator VCO 1 is in the control adjusted by the first variable resistance R1
Voltage VC1Control under, export reference signal, by adjust the first variable resistance R1, control the frequency of reference signal；With reference to letter
Number and feedback signal by input port input MEMS wideband phase detectors after, first pass through work(clutch carry out vector conjunction
At composite signal is converted into DC voltage V related with phase difference by thermoelectric (al) type power sensor, through direct current output electrode 11
Output, this DC voltage V can be expressed as：Wherein K is system related with input signal amplitude
Number, ωrefFor reference signal angular frequency, ωbackFor feedback signal angular frequency,It is poor for proper phase；MEMS wideband phases are examined
The DC voltage V of survey device output is input to direct current automatic growth control AGC amplifier by first port 14 and is amplified, and amplifies
DC voltage V afterwardsC2It can be expressed as：Wherein A is the AGC amplifications of direct current automatic growth control
The gain coefficient of device, amplified DC voltage VC2For the control voltage of the second voltage controlled oscillator VCO 2, pass through second port 15
Control the output frequency of the second voltage controlled oscillator VCO 2, voltage controlled oscillator output frequency ωoIt can be expressed by following formula：By adjusting the second adjustable resistance R2, change direct current automatic growth control AGC
The DC bias supplies V of amplifierCThe adjusting to gain coefficient A is realized, to change the control of the second voltage controlled oscillator VCO 2
The frequency of voltage and its corresponding output signal；The output signal of second voltage controlled oscillator VCO 2 is multiplied by the input of third port 16
Musical instruments used in a Buddhist or Taoist mass, after multiplier, frequency becomes original N times, ωback=N × ωo, this signal is the feedback signal of frequency divider, is led to
It crosses the 4th port 17 and re-enters MEMS wideband phase detectors；It is variable by synchronous control the first variable resistance R1 and second
Resistance R2 keeps the frequency of feedback signal and reference signal equal, i.e.,Second voltage controlled oscillator VCO 2
Output frequency is 1/N times of 1 output frequency of the first voltage controlled oscillator VCO, realizes frequency dividing, obtains working in broad frequency range
Frequency divider.
In the case that the output DC voltage V of MEMS wideband phases detector at different frequencies has fluctuation, still
It can realize that frequency dividing, the signal after frequency dividing pass through fifth port by adjusting the first variable resistance R1 and the second adjustable resistance R2
18 outputs.
MEMS wideband phases detector is using GaAs1 as substrate, including work(clutch and thermoelectric (al) type power sensor, work(clutch
Including ground wire 2, CPW signal wires 3, the first ACPS transmission lines 4, the 2nd ACPS transmission lines 5, the 3rd ACPS transmission lines 6 and isolation electricity
Resistance 7, thermoelectric (al) type power sensor includes terminal resistance 8, thermoelectric pile semiconductor arm 9, thermoelectric pile metal arm 10, direct current output electrode
11；For MEMS wideband phases detector using GaAs substrate, ground wire 2 constitutes the input and output side of work(clutch with CPW signal wires 3
Mouthful, the first ACPS transmission lines 4, the 2nd ACPS transmission lines 5 are mutually cascaded with the 3rd ACPS transmission lines 6, and isolation resistance 7 is separately positioned on
The end of first ACPS transmission lines 4, the 2nd ACPS transmission lines 5 and the 3rd ACPS transmission lines 6, terminal resistance 8 are arranged in CPW signals
At the output port of line 3, thermoelectric pile semiconductor arm 9 is sequentially connected with thermoelectric pile metal arm 10, constitutes thermoelectric pile, direct current output electricity
Pole 11 is connected to thermoelectric pile both ends.
The characteristic impedance of first ACPS transmission lines 4 is Z1, and the characteristic impedance of the 2nd ACPS transmission lines 5 is Z2, the 3rd ACPS
The characteristic impedance of transmission line 6 is Z3.
The preparation method of the frequency divider based on MEMS wideband phases detector and thermo-compensator of the present invention is as follows：
1) prepare GaAs substrates：The half-insulating GaAs substrate of extension is selected, wherein extension N+GaAs's
Doping concentration is 1018cm-3, square resistance is 100~130 Ω/；
2) photoetching and the N+GaAs of extension is isolated, forms the semiconductor thermocouple arm of thermoelectric pile and the figure of thermo-compensator
And ohmic contact regions；
3) N+GaAs is anti-carved, it is 10 to form its doping concentration17cm-3Thermoelectric pile semiconductor thermocouple arm and temperature-compensating
Resistance；
4) photoetching：Removal will retain the photoresist in gold germanium ni au place；
5) gold germanium ni au is sputtered, thickness is altogether
6) it removes, forms the metal thermocouple arm of thermoelectric pile；
7) photoetching：Removal will retain the photoresist in tantalum nitride place；
8) tantalum nitride is sputtered, thickness is 1 μm；
9) it removes；
10) photoetching：Removal will retain the photoresist in the place of first layer gold；
11) evaporation first layer gold, thickness are 0.3 μm；
12) it removes, forms CPW signal wires, ACPS signal wires, ground wire, direct current output electrode and metal contact wires；
13) tantalum nitride is anti-carved, terminal resistance is formed, square resistance is 25 Ω/；
14) titanium/gold/titanium is evaporated, thickness isDown payment of the evaporation for plating；
15) photoetching：The photoresist in place will be electroplated in removal；
16) plating second layer gold, thickness are 2 μm；
17) anti-carve titanium/gold/titanium, corrode down payment, formed CPW signal wires, ACPS signal wires, ground wire, direct current output electrode and
Metal contact wires；
18) the GaAs substrate backs are thinned to 100 μm；
19) the MEMS wideband phases detector of preparation is connected with other circuit elements, constitutes frequency divider.
Distinguish whether be the structure standard it is as follows：
The frequency divider based on MEMS wideband phases detector and thermo-compensator of the present invention includes MEMS broadbands
Phase detectors, thermo-compensator R, direct current automatic growth control AGC amplifier, the first voltage controlled oscillator VCO 1 and second pressure
Control oscillator VCO2, the first variable resistance R1 and the second adjustable resistance R2 and multiplier.MEMS wideband phase detectors are logical
It crosses three section transmission line cascade structures and realizes broadband character.DC power supply VEPass through the first variable resistance R1 and the second adjustable resistance R2
It is connected respectively in the first voltage controlled oscillator VCO 1 and direct current automatic growth control AGC amplifier, reference signal is voltage-controlled by first
Oscillator VCO1 is generated, and the frequency of reference signal is controlled by adjusting the size of the first variable resistance R1.Reference signal and anti-
Feedback signal is by exporting the DC voltage V for including phase information after MEMS wideband phase detectors, through direct current automatic gain
Control AGC amplifier is amplified, and generates the control voltage V of the second voltage controlled oscillator VCO 2C2, the second voltage controlled oscillator VCO 2
Output signal generates feedback signal after multiplier, and direct current automatic growth control AGC amplifier is controlled by the second adjustable resistance R2,
Stool and urine by adjusting the second adjustable resistance R2 can control the frequency of feedback signal, be adjusted in synchronism the first variable resistance R1 and the
Two variable resistance R2 make the output frequency of the second voltage controlled oscillator VCO 2 be the 1/N of 1 output frequency of the first voltage controlled oscillator VCO,
Frequency dividing is completed, realizes the frequency divider to work in broad frequency range.The material of thermo-compensator R and thermoelectric pile semiconductor arm
Material is all N+GaAs, which increases with temperature and increased, and reduces and reduces with temperature.R and direct current automatic gain control
Base biasing resistor R in AGC amplifier processedbIt is in parallel.When temperature increases, the DC voltage of MEMS wideband phase detectors output
V increases, but R and its and RbParallel resistance resistance value increase, so that the base potential of direct current automatic growth control AGC amplifier is dropped
Low, gain reduces, and compensates for the influence that DC voltage V increases are brought, while adjusting variable resistance R2, makes direct current automatic gain control
The output voltage V of AGC amplifier processedC2It keeps stablizing, not be acted upon by temperature changes.It similarly, when the temperature decreases, still can be with
Keep VC2Constant, frequency divider has temperature stability.
Although the present invention is illustrated and has been described with regard to preferred embodiment, it is understood by those skilled in the art that
Without departing from scope defined by the claims of the present invention, variations and modifications can be carried out to the present invention.
Claims (6)
1. a kind of frequency divider based on MEMS wideband phases detector and thermo-compensator, which is characterized in that including：MEMS
Wideband phase detector, thermo-compensator R, direct current automatic growth control AGC amplifier, the first voltage controlled oscillator VCO 1,
Second voltage controlled oscillator VCO 2, the first variable resistance R1 and the second adjustable resistance R2, multiplier；Thermo-compensator R and direct current
The base biasing resistor R of automatic growth control AGC amplifierbIt is in parallel；Power supply VEIt is loaded into the first pressure by the first variable resistance R1
It controls on oscillator VCO1, while being loaded on direct current automatic growth control AGC amplifier by the second adjustable resistance R2；First pressure
It controls oscillator VCO1 and generates reference signal, the size by adjusting the first variable resistance R1 changes the first voltage controlled oscillator VCO 1
Frequency；Reference signal and feedback signal are loaded into the ground wire (2) and CPW signal wires (3) of MEMS wideband phase detectors respectively
Two symmetrical input ports of composition, obtain DC voltage V related with phase difference, DC voltage V input direct-currents increase automatically
Benefit control AGC amplifier, amplified signal are the control voltage V of the second voltage controlled oscillator VCO 2C2, the second voltage controlled oscillator
After the output signal of VCO2 is by multiplier, frequency becomes original N times, and the feedback signal as frequency divider inputs MEMS widebands
Band phase detectors；The gain for adjusting the size control direct current automatic growth control AGC amplifier of the second adjustable resistance R2, is adjusted
The control voltage of second voltage controlled oscillator VCO 2 controls the control voltage and frequency of feedback signal；Being adjusted in synchronism first can power transformation
R1 and the second adjustable resistance R2 is hindered, it is the first voltage controlled oscillator VCO 1 output frequency to make the output frequency of the second voltage controlled oscillator VCO 2
1/N times of rate completes the frequency dividing to the reference signal of different frequency.
2. the frequency divider based on MEMS wideband phases detector and thermo-compensator as described in claim 1, feature
Be, when environment temperature increases, MEMS wideband phase detectors output DC voltage V become larger, thermo-compensator R and
Itself and RbParallel resistance also will increase, cause the base potential of direct current automatic growth control AGC amplifier to reduce, gain subtracts
Small, compensating direct current voltage V becomes larger the influence brought, while adjusting the second adjustable resistance R2, and direct current automatic growth control AGC is made to put
The output voltage V of big deviceC2It keeps stablizing, not be acted upon by temperature changes；When temperature reduces, thermo-compensator R and its and Rb
Parallel resistance reduce, base potential increases, and the gain of direct current automatic growth control AGC amplifier becomes larger, compensating direct current voltage V
Become smaller the influence brought, while adjusting the second adjustable resistance R2, makes the output voltage V of direct current AGC amplifierC2It keeps stablizing, point
Frequency utensil has temperature stability.
3. the frequency divider based on MEMS wideband phases detector and thermo-compensator as described in claim 1, feature
It is, power supply VEIt is loaded into the first voltage controlled oscillator VCO 1 and straight respectively by the first variable resistance R1 and the second adjustable resistance R2
It flows on automatic growth control AGC amplifier, the first voltage controlled oscillator VCO 1 is in the control voltage adjusted by the first variable resistance R1
VC1Control under, export reference signal, by adjust the first variable resistance R1, control the frequency of reference signal；Reference signal and
After feedback signal inputs MEMS wideband phase detectors by input port, Vector modulation is carried out by work(clutch first, is closed
DC voltage V related with phase difference is converted by thermoelectric (al) type power sensor at signal, it is defeated through direct current output electrode (11)
Go out, this DC voltage V is expressed as：Wherein K is coefficient related with input signal amplitude, ωref
For reference signal angular frequency, ωbackFor feedback signal angular frequency,It is poor for proper phase；MEMS wideband phase detectors export
DC voltage V direct current automatic growth control AGC amplifier be input to by first port (14) be amplified, it is amplified straight
Galvanic electricity presses VC2It is expressed as：Wherein A is the gain of direct current automatic growth control AGC amplifier
Coefficient, amplified DC voltage VC2For the control voltage of the second voltage controlled oscillator VCO 2, pass through second port (15) control the
The output frequency of two voltage controlled oscillator VCOs 2, voltage controlled oscillator output frequency ωoIt is expressed by following formula：By adjusting the second adjustable resistance R2, change direct current automatic growth control AGC
The DC bias supplies V of amplifierCThe adjusting to gain coefficient A is realized, to change the control of the second voltage controlled oscillator VCO 2
The frequency of voltage and its corresponding output signal；The output signal of second voltage controlled oscillator VCO 2 is inputted by third port (16)
Multiplier, after multiplier, frequency becomes original N times, ωback=N × ωo, this signal is the feedback signal of frequency divider,
MEMS wideband phase detectors are re-entered by the 4th port (17)；Pass through synchronous control the first variable resistance R1 and second
Variable resistance R2 keeps the frequency of feedback signal and reference signal equal, i.e.,Second voltage controlled oscillator
The output frequency of VCO2 is 1/N times of 1 output frequency of the first voltage controlled oscillator VCO, realizes frequency dividing, obtains in broad frequency range
The frequency divider of work.
4. the frequency divider based on MEMS wideband phases detector and thermo-compensator as claimed in claim 3, feature
It is, it, still can be in the case that the output DC voltage V of MEMS wideband phases detector at different frequencies has fluctuation
Realize that frequency dividing, the signal after frequency dividing pass through fifth port (18) by adjusting the first variable resistance R1 and the second adjustable resistance R2
Output.
5. the frequency divider based on MEMS wideband phases detector and thermo-compensator as described in claim 1, feature
Be, MEMS wideband phases detector with GaAs (1) for substrate, including work(clutch and thermoelectric (al) type power sensor, work(clutch
Including ground wire (2), CPW signal wires (3), the first ACPS transmission lines (4), the 2nd ACPS transmission lines (5), the 3rd ACPS transmission lines
(6) and isolation resistance (7), thermoelectric (al) type power sensor include terminal resistance (8), thermoelectric pile semiconductor arm (9), thermoelectric pile metal
Arm (10), direct current output electrode (11)；MEMS wideband phases detector is using GaAs substrate, ground wire (2) and CPW signal wires
(3) input and output port of work(clutch is constituted, the first ACPS transmission lines (4), the 2nd ACPS transmission lines (5) and the 3rd ACPS are passed
Defeated line (6) mutually cascades, and isolation resistance (7) is separately positioned on the first ACPS transmission lines (4), the 2nd ACPS transmission lines (5) and third
The end of ACPS transmission lines (6), terminal resistance (8) are arranged at the output port of CPW signal wires (3), thermoelectric pile semiconductor arm
(9) it is sequentially connected with thermoelectric pile metal arm (10), constitutes thermoelectric pile, direct current output electrode (11) is connected to thermoelectric pile both ends.
6. the frequency divider based on MEMS wideband phases detector and thermo-compensator as claimed in claim 5, feature
It is, the characteristic impedance of the first ACPS transmission lines (4) is Z1, and the characteristic impedance of the 2nd ACPS transmission lines (5) is Z2, the 3rd ACPS
The characteristic impedance of transmission line (6) is Z3.
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| CN110823140B (en) * | 2019-11-11 | 2021-04-30 | 华滋奔腾（苏州）安监仪器有限公司 | Demodulator and demodulation method based on frequency mixer and power detector strain sensor |
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| JP5092770B2 (en) * | 2008-01-29 | 2012-12-05 | 富士通セミコンダクター株式会社 | Phase lock loop circuit and delay lock loop circuit |
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| US8643415B1 (en) * | 2012-10-22 | 2014-02-04 | Micrel, Inc. | Phase-locked loop having a constant damping ratio |
| CN104796138A (en) * | 2015-04-22 | 2015-07-22 | 西安电子科技大学 | LC voltage-controlled oscillator with automatic output oscillation amplitude correction function |
| CN105162462A (en) * | 2015-08-24 | 2015-12-16 | 广西师范大学 | Frequency-adaptive variable capacitance circuit |
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