CN106092952B - A kind of central shielding device - Google Patents
A kind of central shielding device Download PDFInfo
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- CN106092952B CN106092952B CN201610370334.7A CN201610370334A CN106092952B CN 106092952 B CN106092952 B CN 106092952B CN 201610370334 A CN201610370334 A CN 201610370334A CN 106092952 B CN106092952 B CN 106092952B
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- 238000003384 imaging method Methods 0.000 claims abstract description 29
- 239000007788 liquid Substances 0.000 claims description 26
- 239000000126 substance Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical group O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 238000002347 injection Methods 0.000 claims description 4
- 239000007924 injection Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000012153 distilled water Substances 0.000 claims description 3
- 229920002521 macromolecule Polymers 0.000 claims 1
- 230000007547 defect Effects 0.000 abstract description 9
- 230000000903 blocking effect Effects 0.000 abstract description 7
- 239000002245 particle Substances 0.000 abstract description 4
- 239000000523 sample Substances 0.000 description 29
- 238000010521 absorption reaction Methods 0.000 description 5
- 208000002925 dental caries Diseases 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- VIKNJXKGJWUCNN-XGXHKTLJSA-N norethisterone Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 VIKNJXKGJWUCNN-XGXHKTLJSA-N 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 239000005022 packaging material Substances 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/064—Stray light conditioning
- G01N2201/0642—Light traps; baffles
Abstract
This application discloses a kind of central shielding devices, which is applied to THz wave imaging system, so that sample to be tested is imaged in the system.The THz wave of terahertz imaging system is before being irradiated on sample to be tested, central shielding device is for blocking the central part of THz wave, the detector of THz wave imaging system generates terahertz wave signal according to the THz wave received, and finally obtains the THz wave image of sample to be tested.Central shielding device is due to blocking the central part of THz wave; cannot be introduced into vertical incidence wave in object lens; and enter the terahertz wave beam of object lens only scattered by the surface texture of particle or sample to be tested, convex high or defect etc.; make to provide brighter image in darker comparison field; that is dark-field imaging mode, so as to solve the problems, such as the detail sections such as surface texture, the convex high and defect that can not show sample to be tested under light field imaging mode.
Description
Technical field
This application involves THz wave technology fields, more specifically to a kind of central shielding device.
Background technique
The research of substance characteristics in relation to THz wave spectral coverage is always " no-man's-land " (terahertz of scientific circles
Gap), being showing improvement or progress day by day with THz source and detector technology gradually makes THz wave and its application become academic in recent years
Boundary, industrial circle research and development focus.
Why THz wave in fields such as basic research, industrial application, biomedicine, military affairs has considerable application
Prospect is that it has the following characteristics that (a) Terahertz bands of a spectrum wavelength is longer than the wavelength of general optics and near-infrared spectra, detection
Biological organization sample is not susceptible to scatter;Terahertz emission has shorter wavelength than microwave, this has tera-hertz spectra
Higher spatial resolution, the bigger depth of field.(b) THz wave penetrability is good, can penetrate nonpolar liquid and many dielectrics
Material (clothes, plastics, timber, paper etc.), it means that people can penetrate packaging material to its inside object using THz wave
Body is detected.(c) it since the photon energy of THz wave is very low (milli electron volts magnitude), when its penetrating material, is not susceptible to
Ionization, thus can be utilized for safe non-destructive testing, corresponding X-ray detection then has comparable ionising radiation dangerous.
(d) many substance macromoleculars, the vibration and speed such as large biological molecule are all in terahertz wave band, so in terahertz wave band
Show very strong absorption and resonance, this show using terahertz light spectral analysis technology can see clearly that many objects,
Material is in the characteristic absorption peak of terahertz wave band, i.e., available THz wave is to the contactless constituent analysis of article to be checked progress.(e)
The time-domain spectral signal-to-noise ratio of THz wave is very high, this makes Terahertz be highly suitable for imaging applications.The typical case of terahertz pulse
Pulsewidth is in picosecond magnitude, when carrying out to a variety of materials (including liquid, semiconductor, superconductor, biological sample etc.) with can be convenient
Between the research differentiated.
In view of these advantages that THz wave has, sample is imaged using THz wave, with this to tested
The inside of sample, which carries out detection, becomes one important application direction of THz wave.When detecting to substance, traditional is bright
Imaging mode can illuminate simultaneously sample and background, cause into that image contrast is poor, to can not show sample
The detail sections such as surface texture, convex height, defect.
Summary of the invention
In view of this, the application provides a kind of central shielding device, for the Terahertz in THz wave imaging system
The central part of wave is blocked, to solve the surface texture, convex height and defect that are not easy to embody sample under light field imaging mode
The problem of equal detail sections.
To achieve the goals above, it is proposed that scheme it is as follows:
A kind of central shielding device is applied to THz wave imaging system, and the central shielding device includes circular non-opaque
Cavity, in which:
It include the liquid substance for absorbing THz wave in the circular non-opaque cavity.
Optionally, the material of the circular non-opaque cavity is high molecular material or semiconductor material.
Optionally, the liquid substance is distilled water.
Optionally, the injection hole of the circular non-opaque cavity being provided centrally with for injecting the liquid substance.
Optionally, the circular non-opaque cavity includes multiple chambers, wherein the multiple chamber includes:
Positioned at the circular chamber of the circular non-opaque cavity;
The multiple annular compartments being distributed with one heart around the circular chamber.
Optionally, it is arranged between the circular chamber and adjacent annular compartment between the different annular compartments
Fluid-through port.
Optionally, flow control valve is provided on the fluid-through port.
Optionally, including multiple circular non-opaque cavitys, in which:
The radius of the inner cavity of multiple circular non-opaque cavitys is sequentially increased;
It further include baffle bracket, the baffle bracket is used to for some or all of multiple described circular non-opaque cavitys being overlapped
It is assembled together.
It can be seen from the above technical scheme that this application discloses a kind of central shielding device, the central shielding device
Applied to THz wave imaging system, so that sample to be tested is imaged in the system.The THz wave of terahertz imaging system
Before being irradiated on sample to be tested, central shielding device is for blocking the central part of THz wave, THz wave imaging
The detector of system generates terahertz wave signal according to the THz wave received, and finally obtains the THz wave of sample to be tested
Image.Central shielding device cannot be introduced into vertical incidence wave in object lens due to blocking the central part of THz wave,
And enter the terahertz wave beam of object lens only scattered by the surface texture of particle or sample to be tested, convex high or defect etc., make
Brighter image, i.e. dark-field imaging mode are provided, in darker comparison field so as to solve nothing under light field imaging mode
Faxian shows the problem of detail sections such as the surface texture of sample to be tested, convex high and defect.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of application for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is a kind of top view of central shielding device provided by the embodiments of the present application;
Fig. 2 is a kind of structural schematic diagram of THz wave imaging system provided by the present application;
Fig. 3 is a kind of side view for central shielding device that another embodiment of the application provides;
Fig. 4 is the top view of multiple circular non-opaque cavitys provided by the present application.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of embodiments of the present application, instead of all the embodiments.It is based on
Embodiment in the application, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall in the protection scope of this application.
Embodiment one
Fig. 1 is a kind of top view of central shielding device provided by the embodiments of the present application.
As shown in Figure 1, central shielding device provided in this embodiment be applied to THz wave imaging system, including one thoroughly
The circular non-opaque cavity 61 of bright material, " transparent " at this place refer to that the cavity is made by absorbing lesser material to THz wave,
Such as high molecular material or semiconductor material.And perfusion can absorb the liquid substance of THz wave in transparent cavity 61.
In addition, THz wave imaging system mentioned by the present embodiment be used for sample to be tested 30 carry out THz wave at
Picture specifically includes the THz source 10 being arranged successively, condenser 20, object lens 40, Terahertz and visits analyzed as structure it
Device 50 and processing unit (not shown) are surveyed, sample to be tested 30 is between condenser 20 and object lens 40, in addition, further including that center hides
Blocking means 60, as shown in Figure 2.
For THz source 10 for generating THz wave, the production principle of THz wave can be based on optical means, electronics side
Method and plasma method etc., thus THz source 10 can for based on optical means optics THz source, be based on electronics side
The electronics THz source of method or plasma THz source based on plasma principle.
Condenser 20 is located at the rear of THz source 10, is specially located at the road for the THz wave that THz source 10 is issued
On diameter, for collimating THz wave and being focused, only it is carried out with condenser 20 in the application to simplify statement, it is tangible
Specifically include the collimation mechanism (not shown) for being collimated to THz wave in practical application, and for THz wave into
The Focusing mechanism (not shown) of row focusing.
Sample to be tested 30 is placed on a mobile platform (not shown), when detecting to sample to be tested, by shifting
Moving up and down for moving platform can move sample to be tested, so as to so that by condenser 20 collimate and focus
The wave beam of THz wave comprehensively irradiates sample to be tested 30.
Object lens 40 are converged to positioned at its rear too for collecting the THz wave scattered out from sample to be tested 30
On hertz detector 50.
Terahertz detector 50 is used to receive the THz wave of the convergence of object lens 40, and THz wave is converted to accordingly too
Hertz wave signal, the signal are the electric signal or digital signal for being adapted for image procossing.
The terahertz wave signal that processing unit is used to export terahertz detector 50 is handled, and obtains reflecting to test sample
The THz wave image of the structure of product 30.
Central shielding device 60 is located on the path of terahertz wave beam, for by the THz wave of condenser 20
Heart district domain is blocked, so that vertical incidence wave not made to enter in object lens 40, make into object lens 40 only by particle or to
The terahertz wave beam that the surface texture of sample, convex high or defect etc. are scattered, to make to provide in darker comparison field
Brighter image, i.e. dark-field imaging mode.Central shielding device 60 can be set at the position of condenser 20.
It can be seen from the above technical proposal that a kind of central shielding device is present embodiments provided, the central shielding device
Applied to THz wave imaging system, so that sample to be tested is imaged in the system.The THz wave of terahertz imaging system
Before being irradiated on sample to be tested, central shielding device is for blocking the central part of THz wave, THz wave imaging
The detector of system generates terahertz wave signal according to the THz wave received, and finally obtains the THz wave of sample to be tested
Image.Central shielding device cannot be introduced into vertical incidence wave in object lens due to blocking the central part of THz wave,
And enter the terahertz wave beam of object lens only scattered by the surface texture of particle or sample to be tested, convex high or defect etc., make
Brighter image, i.e. dark-field imaging mode are provided, in darker comparison field so as to solve nothing under light field imaging mode
Faxian shows the problem of detail sections such as the surface texture of sample to be tested, convex high and defect.
In addition, since water has stronger absorption to THz wave, according to bibliography, in 0.3THz-3.72THz frequency
Section, the minimum 123cm of its absorption coefficient of 22 DEG C of distilled water-1As long as therefore the thickness of moisture film is set as 0.5mm by we,
Moisture film can be made to drop to one thousandth or so to the transmitance of THz wave, and (according to formula L=-ln (T)/α, wherein L is that moisture film is thick
Degree, T are THz wave transmitance, and α is absorption coefficient of the water to THz wave), and water is relatively inexpensive, therefore liquid substance is preferred
Distilled water is as the liquid substance.And in the injection hole of cavity being provided centrally with for injecting liquid substance.
In addition, needing the numerical aperture according to focus lamp, Terahertz when carrying out dark-field imaging to different samples to be tested
Wavelength, sample material parameters are adjusted shielded area, for this purpose, the transparent cavity can also be made of multiple chambers, it is multiple
Chamber includes a centrally located transparent chamber 611 and successively increases around the multiple arranged concentrics and radius of the transparent chamber
Big annular compartment 612.Logical liquid is provided between transparent chamber 611 and annular compartment 612 and between annular compartment 612
Mouthful, the flow control valve 614 that control liquid substance passes through is provided on fluid-through port.
Liquid substance is injected by injection hole 613 inside circular non-opaque cavity 61, is allowed to full of entire internal cavity, and
Each layer of annular compartment 612 is passed in and out by flow control valve 614, thus reaches liquid film in the specified region of liquid film baffle
Covering, make the region of the only non-Covering Liguid film of baffle fringe region that can just penetrate terahertz wave beam.
The surface area that this central shielding device only need to simply adjust wherein liquid film can meet replacement, and other are hard
The dark field measuring condition of new system after part.The adjustment not only can be by manually adjusting, but also can pass through motor adjust automatically, root
Liquid film region area is adjusted according to dark-field imaging clarity, reaches best dark-field imaging effect.
The liquid film baffle can also be adjusted to not block the state (liquid film therein is discharged) of THz wave completely,
In this case the mechanism that passes through that directly incoming terahertz wave beam can be unobstructed is assembled from focus lamp to reach to test sample
Product surface, here it is common light field measurement methods.With manually or electrically control liquid film in the baffle structure of center slowly
It spreads out, the direct projection terahertz wave beam at focus lamp center is absorbed by liquid film, and only the terahertz wave beam at edge is with biggish
Scattering angle reaches on sample, reaches dark-field imaging effect.Therefore the present invention can very easily switching system light field measurement
It is available more abundant from being carried out from two light field, dark field states to sample convenient for user with dark field measuring state
Image feature information.
Embodiment two
Fig. 3 is a kind of side view for central shielding device that another embodiment of the application provides.
As shown in figure 3, including baffle bracket 62 for central shielding device provided in this embodiment, set in baffle bracket 62
Multiple dismountable circular non-opaque cavitys 63 are equipped with, as shown in Figure 4.The liquid film radius of each circular non-opaque cavity 63 successively increases
Greatly.When in use, according to processing circular non-opaque cavity 63 is calculated, then circular non-opaque cavity 63 is pressed according to the range of adjusting suitable
Sequence (the equal circle variation of liquid area) is fitted into baffle bracket 62 after being sequentially overlapped, then by being fixed on baffle bracket 62 and push plate
Spring 641 on 64 makes liquid film baffle be in the state clamped.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.To the upper of the disclosed embodiments
It states bright, can be realized professional and technical personnel in the field or using the application.Various modifications to these embodiments are to ability
It will be apparent for the professional technician in domain, the general principles defined herein can not depart from the application's
In the case where spirit or scope, realize in other embodiments.Therefore, the application be not intended to be limited to it is shown in this article these
Embodiment, and it is to fit to the widest scope consistent with the principles and novel features disclosed herein.
Claims (3)
1. a kind of central shielding device, it is applied to THz wave imaging system, which is characterized in that the central shielding device includes
Circular non-opaque cavity, in which:
It include the liquid substance for absorbing THz wave in the circular non-opaque cavity;
The circular non-opaque cavity includes multiple chambers, wherein the multiple chamber includes:
Positioned at the circular chamber of the circular non-opaque cavity;
The multiple annular compartments being distributed with one heart around the circular chamber;The circular non-opaque cavity is provided centrally with for infusing
Enter the injection hole of the liquid substance;
Fluid-through port is set between the circular chamber and adjacent annular compartment between the different annular compartments;
Flow control valve is provided on the fluid-through port.
2. central shielding device as described in claim 1, which is characterized in that the material of the circular non-opaque cavity is macromolecule
Material or semiconductor material.
3. central shielding device as described in claim 1, which is characterized in that the liquid substance is distilled water.
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CN201610370334.7A CN106092952B (en) | 2016-05-30 | 2016-05-30 | A kind of central shielding device |
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CN201610370334.7A CN106092952B (en) | 2016-05-30 | 2016-05-30 | A kind of central shielding device |
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CN106092952B true CN106092952B (en) | 2019-03-22 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104238063A (en) * | 2013-06-18 | 2014-12-24 | 三星电机株式会社 | lens module and camera module including the same |
CN105486625A (en) * | 2016-01-28 | 2016-04-13 | 中国科学院重庆绿色智能技术研究院 | Cell counting device and method based on Terahertz time-domain spectroscopy technology |
CN105572797A (en) * | 2016-02-15 | 2016-05-11 | 欧阳征标 | Terahertz wave pulse amplitude modulation signal and optical pulse amplitude modulation signal conversion amplifier |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US7608827B2 (en) * | 2006-02-09 | 2009-10-27 | Alcatel-Lucent Usa Inc. | Near-field terahertz imaging |
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2016
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104238063A (en) * | 2013-06-18 | 2014-12-24 | 三星电机株式会社 | lens module and camera module including the same |
CN105486625A (en) * | 2016-01-28 | 2016-04-13 | 中国科学院重庆绿色智能技术研究院 | Cell counting device and method based on Terahertz time-domain spectroscopy technology |
CN105572797A (en) * | 2016-02-15 | 2016-05-11 | 欧阳征标 | Terahertz wave pulse amplitude modulation signal and optical pulse amplitude modulation signal conversion amplifier |
Non-Patent Citations (1)
Title |
---|
"Remote identification of protrusions and dents on surfaces by terahertz reflectometry with spatial beam filtering and out-of-focus detection";Noboru Hasegawa 等;《Applied Physics Letters》;20031110;第83卷(第19期);第3996页 |
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