CN106092329A - A kind of integrated miniature Dewar inner tube and implementation method - Google Patents

A kind of integrated miniature Dewar inner tube and implementation method Download PDF

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Publication number
CN106092329A
CN106092329A CN201610538849.3A CN201610538849A CN106092329A CN 106092329 A CN106092329 A CN 106092329A CN 201610538849 A CN201610538849 A CN 201610538849A CN 106092329 A CN106092329 A CN 106092329A
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cold finger
cold
solder
inner tube
finger
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CN106092329B (en
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王小坤
张珏颖
孙闻
王煜宇
陈俊林
曾智江
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Shanghai Institute of Technical Physics of CAS
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Shanghai Institute of Technical Physics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details

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  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)

Abstract

The invention discloses a kind of integrated miniature Dewar inner tube and implementation method, integrated miniature Dewar inner tube includes cold finger pedestal, cold finger and cold head.One end of cold finger is arranged on cold finger pedestal, and the mode using soldering is integrally welded by it, then is arranged on cold head by the other end of cold finger, and cold head is integral with cold finger soldering.The present invention had both met the rigidity required for detector supports, and achieved again the air-tightness needed for cryogenic refrigeration and the high accuracy required for the reciprocating motion of refrigeration machine movable part when high-pressure working medium expands.Present invention reduces the heat load of integrated miniature Dewar inner tube, the present invention is made up of three part airtight weldings simultaneously, and beneficially mass production reduces cost.Present configuration is simple, easy to operate, compatible good, can be applicable to various integrated infrared detector assembly.

Description

A kind of integrated miniature Dewar inner tube and implementation method
Technical field
The present invention relates to low temperature minitype Dewar component technology, refer specifically to a kind of integrated miniature Dewar inner tube and realization side Method, it is applicable to the encapsulation of refrigeration type infrared detector integrated form.
Background technology
Infrared detector dewar assembly has a wide range of applications at space flight and aviation infrared regime.Along with wavelength extends to long wave With the raising of detectivity, Infrared Detectors could must work under profound hypothermia.Due to mechanical refrigeration have compact conformation, The advantages such as volume is little, lightweight, cooling time is short, cryogenic temperature adjustable extent is big, such sensitive detection parts are the most at present Use mechanical refrigeration mode.Sterlin refrigerator is one of mechanical refrigeration mode of Chang Xuan.Due to electric rotating machine and crank connecting link The sterlin refrigerator of structure has compact conformation, efficiency height and technology relative to the sterlin refrigerator of free piston structure Maturation, price are low, are widely used.
The cold being provided that because of the sterlin refrigerator of electric rotating machine and brace and connecting rod framework is typically small, red at refrigeration mode During the encapsulation of external detector, mostly Infrared Detectors is directly installed in the inner tube of minitype Dewar, Dewar inner tube and Stirling Refrigeration machine connects, and the refrigerating capacity that refrigeration machine provides directly cools down Dewar inner tube.Dewar inner tube is the carrier that low temperature detector supports, It it is the expansion chamber of refrigeration machine high-pressure working medium simultaneously.The control of Dewar inner tube heat load and rigidity are design and the key of processing.? Abroad, the preparation of minitype Dewar inner tube mainly has French thales company and Ricor company of Israel, but its preparation method has no Report.At home, Chinese patent " micro metal inner tube is used in guidance " (201310000806.6) mainly reports the knot of Dewar inner tube Structure, in terms of patent accompanying drawing, it is welded with cold platform after processing for traditional mechanical, and its preparation method has no report.In order to drop The heat load of low Dewar inner tube and mass production reduce the purpose of cost, it is necessary to a kind of new method of exploration solves this and asks Topic.
Summary of the invention
It is an object of the invention to provide a kind of integrated miniature Dewar inner tube and implementation method, integrated miniature can be reduced The heat load of Dewar inner tube, meets mass production simultaneously and reduces the requirement of cost.
The object of the present invention is achieved like this: integrated miniature Dewar inner tube is by cold finger pedestal 1, cold finger 2, cold head 3 groups Become, as shown in Figure 1.
The shape of described cold finger pedestal 1 such as hollow boss shape, material selection stainless steel 304 L.Cold finger pedestal 1 is internal to be had Circular solder slotted eye 101, cold finger pilot hole 102, cold finger hole 103, location and coupling seal hole 104.Solder slotted eye 101 straight Footpath 0.6mm-1mm bigger than the outside diameter of cold finger 2, the degree of depth is 0.5mm-1mm.Outside the diameter of cold finger pilot hole 102 is than cold finger 2 The big 0.005mm-0.01mm of circular diameter, the degree of depth is 1mm-3mm.The diameter in hole 103, cold finger location is less than the interior circular diameter of cold finger 2 1mm-1.3mm, the degree of depth is 0.5mm-1.5mm.Coupling seals a diameter of 11.9mm-12.1mm in hole 104, and the degree of depth is 12mm- 13mm.There is a circular chimb 105 outside the face of cylinder of cold finger pedestal 1, have a circular groove in the lower surface of circular chimb 105 106, groove depth is 0.5mm-0.6mm, and groove width is 0.9mm-1.1mm.
The shape of described cold finger 2 such as hollow cylinder shape, material selection stainless steel 304 L, titanium alloy TC 4 or GH605. The a diameter of 7.5mm-7.7mm of inner circle of cold finger 2, the outside diameter of cold finger 2 as required, is processed into linear type, inverted cone-shaped respectively Or the notch cuttype of lower end overstriking, the wall thickness of close cold head 3 end after the processing of its part is 0.1mm-0.3mm, the total height of cold finger 2 For 46mm-47mm.
Described cold head 3 material selection 4J32 or 4J29.There is the gas expansion platform of a round boss shape its lower end, face of cylinder 301, the external diameter of gas expansion platform 301 is than the big 0.005mm-0.015mm of interior circular diameter of cold finger 2, and height is 1mm-2mm.Gas There is an annular nib solder loading stage 302 in the outside expanding platform 301, and the internal diameter of solder loading stage 302 is than the outside diameter of cold finger 2 Big 0.6mm-1mm, the low 0.5mm-1.5mm of height of solder loading stage 302 aspect ratio gas expansion platform 301.The device of cold head 3 upper end The external diameter of part erecting bed 303 is 14.9mm-15.1mm, and thickness is 0.5mm-0.6mm.
The lower surface of cold finger 2 is inserted the cold finger pilot hole 102 of cold finger pedestal 1, uses the mode of soldering to be welded into one Body, then the upper surface of cold finger 2 is inserted the solder loading stage 302 of cold head 3, by integral with cold finger 1 soldering for cold head 3.
The preparation method of the present invention a kind of integrated miniature Dewar inner tube is as follows:
(1) when part machines, the size of integrated miniature Dewar diameter of inner pipe needs less than diameter during finished product 0.2mm-0.4mm.Cold finger 2 uses machining molding or uses cold drawn forming, the most first carries out Honing process and makes its circle Post degree is less than 0.03mm;Device erecting bed 303 0.1mm-thicker than design size of thickness when machining of cold head 3 upper end 0.2mm;The lower surface of cold finger 2 is inserted at the cold finger pilot hole 102 of cold finger pedestal 1, at the solder slotted eye 101 of cold finger pedestal 1 And adding solder in the gap between cold finger 2 outside diameter, what solder was the fullest inserts in fit clearance, puts into vacuum brazing Stove, vacuum is less than 1 × 10-3Pa.10 DEG C-30 DEG C are increased as welding temperature, holding 5-10min on the basis of solder melt point Weld.If the material selection rustless steel of cold finger 2 or GH605, then iron-nickel alloy (trade mark DHNi-C) selected by solder;If The material of cold finger 2 uses selects TC4, then Ti-based solder (trade mark 40Ti20Zr20Cu20Ni) selected by solder.
(2) in cold finger 2 endoporus, fill in special core rod, on the basis of special core rod, process the outer circumference surface of cold finger 2 and cold Refer to that the coupling of pedestal 1 seals hole 104 and arrives required size, guarantee that coupling seals the axiality in hole 104 and cold finger 2 endoporus simultaneously Less than 0.02mm.
(3) under the auxiliary of special tooling, the inner circle of cold finger 2 is carried out honing so that the roughness of cold finger 2 inner circle is less than Ra0.4, circularity is less than 0.02mm, and cylindricity is less than 0.03mm.
(4) it is inverted, at cold head 3 solder loading surface after the gas expansion platform 301 of cold head 3 lower end is inserted the upper end of stem stem 2 The gap location that the inner side of 302 coordinates with cold finger 2 cylindrical inserts solder.Silver copper material (trade mark Ag72Cu28) selected by solder, puts into true Empty soldering oven, vacuum is less than 1 × 10-3Pa, increases by 10 DEG C-30 DEG C as welding temperature, holding on the basis of solder melt point Within 5-20 minute, weld.
(5) being completely immersed in liquid nitrogen by cold head 3, soak time 1-3 minute is taken out, and room temperature i time is more than 5 minutes, weight Multiple 5-10 time.
(6) upper surface of the device erecting bed 303 of cold head 3 is carried out turning, reserved surplus is worked into design size. Cold finger endoporus is ground by recycling specific purpose tool, it is ensured that the cylindricity of cold finger 2 inner circle is less than 0.02mm.
(7) with special tooling, the integrated miniature Dewar inner tube prepared is hunted leak, when leak rate is less than 3 × 10- 11Pa.m3During/s, hunt leak qualified, as shown in Figure 2.
(8) helium utilizing special tooling to be filled with 5MPa at the inner chamber of the integrated miniature Dewar inner tube prepared is carried out Leak detection, when leak rate is less than 3 × 10-11Pa.m3During/s, hunt leak qualified, as shown in Figure 3.
(9) utilizing special tooling, the inner chamber to the integrated miniature Dewar inner tube prepared pours appropriate liquid nitrogen into, makes collection The cold head of accepted way of doing sth minitype Dewar inner tube is cooled to temperature required 77K.When liquid nitrogen surface evaporation to cold finger pedestal 1 and cold finger 2 soldering Commissure time, helium is filled with to cold pipe, hunts leak, when leak rate is less than 3 × 10-11Pa.m3During/s, hunt leak qualified.When When liquid nitrogen runs out of soon, helium is filled with to cold pipe, hunts leak, when leak rate is less than 3 × 10-11Pa.m3During/s, leak detection is closed Lattice, as shown in Figure 4.
Below the preparation of integrated miniature Dewar inner tube is just completed.
The invention have the advantage that
(1) simple in construction of the present invention, easy to operate, with low cost;
(2) compatible good, it is applied to various integrated infrared detector assembly;
(3) heat load of Dewar inner tube, beneficially mass production can be reduced, reduce cost.
Accompanying drawing explanation
Fig. 1 is that integrated miniature Dewar inner tube is always schemed:
In figure: 1 cold finger pedestal;
101 solder slotted eyes;
102 cold finger pilot holes;
103 hole, cold finger location;
104 couplings seal hole;
105-circle chimb;
106-circular groove;
2 cold fingers;
3 cold heads;
301 gas expansion platforms;
302 solder loading stages;
303 device erecting beds.
Fig. 2 is integrated miniature Dewar inner tube normal temperature and pressure leakage detection apparatus figure.
Fig. 3 is integrated miniature Dewar inner tube normal temperature high voltage leakage detection apparatus figure.
Fig. 4 is integrated miniature Dewar inner tube low-temperature atmosphere-pressure leakage detection apparatus figure.
Fig. 5 is integrated miniature Dewar inner tube notch cuttype cold finger figure.
Fig. 6 is integrated miniature Dewar inner tube inverted cone cold finger figure.
Detailed description of the invention
Below in conjunction with the accompanying drawings the detailed description of the invention of the present invention is described in further detail:
Embodiment 1 is GH605 integrated miniature Dewar inner tube:
As it is shown in figure 1, the material selection stainless steel 304 L of cold finger pedestal 1, there is the solder slotted eye of circle its cylinder upper end 101, a diameter of 9 ± 0.1mm, the degree of depth is 1mm.Cold finger pilot hole 102 a diameter ofThe degree of depth is 1.5mm.Cold finger is fixed Position hole 103 a diameter ofThe degree of depth is 0.5mm.Coupling seals a diameter of 12 ± 0.1mm in hole 104, and the degree of depth is 12.6mm.The external diameter of circular chimb 105 is 31.9mm, and height is 3.6mm.The external diameter of circular groove 106 is 27mm, and groove width is 1mm, groove depth is 0.6mm.The shape of cold finger 2 such as hollow cylinder shape, material selection GH605, inner circle is a diameter of Outside diameterThe a length of 46.5mm of cold finger 2.Cold finger 2 uses cold drawn forming, carries out Honing process after shaping and makes Its cylindricity is better than 0.03mm.Cold head 3 material selection 4J32, the outside diameter of the gas expansion platform 301 of cold head 3 isThe degree of depth is 1.5mm.There are an annular nib solder loading stage 302, solder loading stage in the outside of gas expansion platform 301 The internal diameter of 302 is 8.8 ± 0.1mm, and the degree of depth is 0.6mm, and the height of the aspect ratio gas expansion platform 301 of solder loading stage 302 is low 0.5mmmm.The device erecting bed 303 of cold head 3 upper part aspect ratio integrated miniature Dewar inner tube after machining Molding height 0.2mm.The step of the present embodiment 1 is as follows:
(1) lower surface of cold finger 2 is inserted at the cold finger pilot hole 102 of cold finger pedestal 1, at the solder bath of cold finger pedestal 1 Iron-nickel alloy solder (trade mark DHNi-C), the fullest the filling out of iron-nickel alloy solder is added in gap between hole 101 and cold finger 2 Enter in fit clearance, put into vacuum brazing furnace.Vacuum is better than 1 × 10-3Pa, welding temperature is 1055 DEG C, keeps 15min to carry out Welding.
(2) special core rod is filled in the endoporus of cold finger 2, on the basis of special core rod, processes the outer circumference surface of cold finger 2 and cold Referring to that the coupling of pedestal 1 seals hole 104, the processing that coupling seals hole 104 is a diameter ofGuarantee that coupling seals hole simultaneously 104 are better than 0.02mm with the axiality of cold finger 2 endoporus.
(3) inner circle of cold finger 2 is carried out honing so that the inner circle roughness of cold finger 2 is better than Ra0.4, the circular degree of inner circle Being better than 0.02mm, cylindricity is better than 0.03mm.
(4) being inverted after the gas expansion platform 301 of cold head 3 lower end inserts the upper end of stem stem 2, the solder at cold head 3 loads The gap location that the inner side of platform 302 coordinates with cold finger 2 cylindrical inserts solder.Silver-copper brazing alloy (trade mark: Ag72Cu28) selected by solder, puts Entering vacuum brazing furnace, vacuum is better than 1 × 10-3Pa, and welding temperature is 810 DEG C, keeps welding for 10 minutes.
(5) being completely immersed in liquid nitrogen by cold head 3, soak time is taken out for 3 minutes, and room temperature i time 7 minutes is repeated 8 times.
(6) carry out turning on the device erecting bed 303 of cold head 3, reserved surplus is worked into 66.5 ± 0.02mm. Utilize specific purpose tool that the endoporus of cold finger 2 is ground.Guarantee that the cylindricity of cold finger 2 inner circle is better than 0.02mm.
(7) with special tooling, the integrated miniature Dewar inner tube prepared is carried out room temperature leak detection.Special tooling former As shown in Figure 2, special tooling includes hunt leak mouth seat, leak detection testing tube and fixing briquetting to reason.Special tooling is declined with integrated Type Dewar inner tube is sealed by sealing medium (O), is screwed into four screws and compresses.The integrated of special tooling will be installed Formula minitype Dewar inner tube inserts leak detector by leak detection testing tube, starts instrument, tube cavity winding-up in integrated miniature Dewar Helium, when leak rate is less than 3 × 10-11Pa.m3During/s, hunt leak qualified.
(8) utilize special fixture that the integrated miniature Dewar inner tube prepared is carried out pressurization leakage detection.Special fixture As shown in Figure 3, special fixture includes hunt leak mouth seat, leak detection testing tube, fixing block and inflation clamp pipe to principle.By exclusive clamps Tool is sealed by sealing medium (O) with integrated miniature Dewar inner tube, is screwed into four screws and compresses, then by inflation Clamp pipe is filled with the helium of 5MPa, clamp inflation clamp pipe to the inner chamber of Dewar inner tube.The integrated form of special fixture will be installed Minitype Dewar inner tube inserts leak detector by leak detection testing tube, starts instrument, when leak rate is less than 3 × 10-11Pa.m3During/s, leak detection Qualified.
(9) utilize special tooling that the integrated miniature Dewar inner tube prepared is carried out low temperature leak detection, such as accompanying drawing 4 institute Show.Special tooling is sealed by sealing medium (O) with integrated miniature Dewar inner tube, is screwed into four screws and presses Tightly.The integrated miniature Dewar inner tube installing special tooling is inserted leak detector, to integrated miniature by leak detection testing tube The inner chamber of Dewar inner tube pours appropriate liquid nitrogen into, makes integrated miniature Dewar inner tube cold head be cooled to temperature required 77K.When liquid nitrogen table When face is evaporated to the commissure of cold finger pedestal 1 and cold finger 2 soldering, helium is filled with the inner chamber of integrated miniature Dewar inner tube, enters Row leak detection, when leak rate is less than 3 × 10-11Pa.m3During/s, hunt leak qualified.When liquid nitrogen consumes soon and do not has, with helium winding-up stem stem 2 He The welding position of cold head 3, hunts leak, when leak rate is less than 3 × 10-11Pa.m3During/s, hunt leak qualified.
Below the preparation of GH605 integrated miniature Dewar inner tube is just completed.
Embodiment 2 is TC4 integrated miniature Dewar inner tube:
As it is shown in figure 5, the material selection stainless steel 304 L of cold finger pedestal 1, there is the solder slotted eye 101 of circle cylinder upper end, A diameter of 9.8 ± 0.1mm, the degree of depth is 1mm.Cold finger pilot hole 102 a diameter ofThe degree of depth is 1.5mm, and cold finger is fixed Position hole 103 a diameter ofThe degree of depth is 0.5mm.Coupling seals a diameter of 12mm in hole 104, and the degree of depth is 12.6mm. The external diameter of circular chimb 105 is 31.9mm, and height is 3.6mm.The external diameter of circular groove 106 is 27mm, and groove width is 1mm, groove depth For 0.6mm.Cold finger 2 is hollow cylinder notch cuttype, material selection TC4, and inner circle is a diameter ofOutside at cold head 3 Circular diameterA length of 37 ± 0.1mm;Outside diameter at cold finger pedestal 1 is 8.8mm, a length of 10mm.Cold Refer to that 2 employings are machining, as shown in Figure 5.The most first carry out Honing process so that it is cylindricity is better than 0.03mm.Cold head 3 Consistent with embodiment 1.The step of the present embodiment is as follows:
(1) lower surface of cold finger 2 is inserted at the cold finger pilot hole 102 of cold finger pedestal 1, at the solder bath of cold finger pedestal 1 Ti-based solder (40Ti20Zr20Cu20Ni) is added in gap between hole 101 and cold finger 2.The fullest the inserting of Ti-based solder In fit clearance, putting into vacuum brazing furnace, vacuum is better than 1 × 10-3Pa, welding temperature is 910 DEG C, keeps welding for 15 minutes Connect.
(2) in cold finger 2 endoporus, fill in special core rod, on the basis of special core rod, process cold finger 2 outer circumference surface and cold finger The coupling of pedestal 1 seals hole 104, and the coupling of cold finger pedestal 1 seals a diameter of of hole 104Mm, guarantees to couple close simultaneously Sealing of hole 104 is better than 0.02mm with the axiality of cold finger 2 endoporus.
(3) inner circle of cold finger 2 is carried out honing so that the inner circle roughness of cold finger 2 is better than Ra0.4, the circular degree of inner circle It is better than 0.02mm and cylindricity is better than 0.03mm.
(4) step (4)-(9) repeating embodiment 1 complete the preparation of TC4 integrated miniature Dewar inner tube.
Embodiment 3 is rustless steel integrated miniature Dewar inner tube:
As shown in Figure 6, cold finger pedestal 1 is consistent with embodiment 2.Cold finger 2 is inverted cone-shaped, uses machining, and material selects Use Stainless steel 316 L,.Cold finger 2 inner circle is a diameter ofOutside diameter at cold head 3 isClose Outside diameter at cold finger pedestal 1 is 8.8mm, and total length is 46.5mm.Outside diameter at cold finger pedestal 1 isA length of 6 ± 0.1mm, remaining length diameter is for be transitioned into 8.8mm from 8mm.Carry out honing after shaping to add Work so that it is cylindricity is better than 0.03mm, as shown in Figure 6.Cold head 3 is consistent with 2 with embodiment 1.The step of the present embodiment is with real The step executing example 1 is consistent, and step (1)-(9) repeating embodiment 1 just complete the system of rustless steel integrated miniature Dewar inner tube Standby.

Claims (2)

1. an integrated miniature Dewar inner tube, including cold finger pedestal (1), cold finger (2), cold head (3), it is characterised in that:
The shape such as hollow boss shape of described cold finger pedestal (1), material selection stainless steel 304 L, cold finger pedestal (1) is internal to be had Circular solder slotted eye (101), cold finger pilot hole (102), cold finger hole, location (103) and coupling seal hole (104), solder slotted eye (101) diameter is than the big 0.6mm-1mm of outside diameter of cold finger (2), and the degree of depth is 0.5mm-1mm;Cold finger pilot hole (102) straight Footpath is than the big 0.005mm-0.01mm of outside diameter of cold finger (2), and the degree of depth is 1mm-3mm;The diameter ratio of cold finger hole, location (103) is cold Referring to the little 1mm-1.3mm of interior circular diameter of (2), the degree of depth is 0.5mm-1.5mm;Coupling seals a diameter of 11.6mm-in hole (104) 11.8mm, the degree of depth is 12mm-13mm;A circular chimb (105) is had, at circular chimb outside the face of cylinder of cold finger pedestal (1) (105) there is a circular groove (106) lower surface, and groove depth is 0.5mm-0.6mm, and groove width is 0.9mm-1.1mm;
Material selection stainless steel 304 L, titanium alloy TC 4 or the GH605 of described cold finger (2);The inner circle of cold finger (2) is a diameter of 7.5mm-7.7mm, the outside diameter of cold finger (2) is processed into linear type, inverted cone-shaped or the notch cuttype of overstriking below as required, its The wall thickness held near cold head (3) after part processing is 0.1mm-0.3mm, and the total height of cold finger (2) is 46mm-47mm;
Described cold head (3) material selection 4J32 or 4J29, there is the gas expansion platform of a round boss shape its lower end, face of cylinder (301), the external diameter of gas expansion platform (301) is than the big 0.005mm-0.015mm of interior circular diameter of cold finger (2), and height is 1mm- 2mm;There is annular nib solder loading stage (302) in the outside of gas expansion platform (301), the internal diameter ratio of solder loading stage (302) The big 0.6mm-1mm of outside diameter of cold finger (2), the height of solder loading stage (302) aspect ratio gas expansion platform (301) is low 0.5mm-1.5mm;Cold head (3) upper end is device erecting bed (303), and its external diameter is 14.9mm-15.1mm, and thickness is 0.5mm- 0.6mm;
The lower surface of cold finger (2) is inserted the cold finger pilot hole (102) of cold finger pedestal (1), uses the mode of soldering to be welded into Integrally, then the solder loading stage (302) by upper surface insertion cold head (3) of cold finger (2), cold head (3) is become with cold finger (1) soldering Integrally.
2. the method realizing integrated miniature Dewar inner tube as claimed in claim 1, it is characterised in that method step is as follows:
1) when part machines, the diameter dimension of integrated miniature Dewar inner tube needs than the little 0.2mm-of diameter during finished product 0.4mm;Cold finger (2) uses machining molding or uses cold drawn forming, the most first carries out Honing process and makes its cylindricity Less than 0.03mm;Device erecting bed (303) thickness when the machining 0.1mm-thicker than design size of cold head (3) upper end 0.2mm;The lower surface of cold finger (2) is inserted cold finger pilot hole (102) place of cold finger pedestal (1), at the solder of cold finger pedestal (1) Adding solder in gap between slotted eye (101) and cold finger (2) outside diameter, what solder was the fullest inserts in fit clearance, puts Entering vacuum brazing furnace, vacuum is less than 1 × 10-3Pa, on the basis of solder melt point, increase by 10 DEG C-30 DEG C is as welding temperature, 5-10min is kept to weld;If the material selection rustless steel of cold finger (2) or GH605, then trade mark DHNi-C ferrum selected by solder Nickel alloy;If the material of cold finger (2) uses selects TC4, then trade mark 40Ti20Zr20Cu20Ni Ti-based solder selected by solder;
2) in cold finger (2) endoporus, fill in special core rod, on the basis of special core rod, process outer circumference surface and the cold finger of cold finger (2) The coupling of pedestal (1) seals hole (104) and arrives required size, guarantees that coupling seals hole (104) and cold finger (2) endoporus simultaneously Axiality is less than 0.02mm;
3) under the auxiliary of special tooling, the inner circle of cold finger (2) is carried out honing so that the roughness of cold finger (2) inner circle is less than Ra0.4, circularity is less than 0.02mm, and cylindricity is less than 0.03mm;
4) it is inverted after the gas expansion platform (301) of cold head (3) lower end is inserted the upper end of stem stem (2), loads at cold head (3) solder The gap location that the inner side of platform (302) coordinates with cold finger (2) cylindrical inserts solder, and trade mark Ag72Cu28 silver copper material selected by solder, puts Entering vacuum brazing furnace, vacuum is less than 1 × 10-3Pa, on the basis of solder melt point, increase by 10 DEG C-30 DEG C is as welding temperature, Keep welding for 5-20 minute;
5) being completely immersed in liquid nitrogen by cold head (3), soak time 1-3 minute is taken out, and room temperature i time is more than 5 minutes, repeats 5-10 time;
6) upper surface of the device erecting bed (303) of cold head (3) is carried out turning, reserved surplus is worked into design size; Cold finger (2) endoporus is ground by recycling specific purpose tool, it is ensured that the cylindricity of cold finger (2) inner circle is less than 0.02mm;
7) with special tooling, the integrated miniature Dewar inner tube prepared is hunted leak, when leak rate is less than 3 × 10-11Pa.m3/ During s, hunt leak qualified;
8) helium utilizing special tooling to be filled with 5MPa at the inner chamber of the integrated miniature Dewar inner tube prepared is hunted leak, When leak rate is less than 3 × 10-11Pa.m3During/s, hunt leak qualified;
9) utilizing special tooling, the inner chamber to the integrated miniature Dewar inner tube prepared pours appropriate liquid nitrogen into, makes integrated form The cold head (3) of minitype Dewar inner tube is cooled to temperature required 77K;When liquid nitrogen surface evaporation to cold finger pedestal (1) and cold finger (2) pricker During the commissure welded, helium is filled with to cold pipe, hunts leak, when leak rate is less than 3 × 10-11Pa.m3During/s, hunt leak qualified; When liquid nitrogen runs out of soon, helium is filled with to cold pipe, hunts leak, when leak rate is less than 3 × 10-11Pa.m3During/s, leak detection Qualified.
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CN109655165A (en) * 2019-01-10 2019-04-19 中国科学院上海技术物理研究所 Integrated encapsulation structure for inhibiting refrigeration working medium to influence infrared detector noise
CN111595463A (en) * 2020-05-22 2020-08-28 中国科学院上海技术物理研究所 Split type Dewar cold platform with low contact thermal resistance and coupling stress isolation
CN112241018A (en) * 2020-10-09 2021-01-19 中核核电运行管理有限公司 Gas cold finger sampling device
CN114406400A (en) * 2022-02-24 2022-04-29 中国科学院上海技术物理研究所 Titanium alloy core column and invar cold head combining piece brazing clamp and method

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