CN110308752A - A kind of superhigh precision thermostat - Google Patents
A kind of superhigh precision thermostat Download PDFInfo
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- CN110308752A CN110308752A CN201810259968.4A CN201810259968A CN110308752A CN 110308752 A CN110308752 A CN 110308752A CN 201810259968 A CN201810259968 A CN 201810259968A CN 110308752 A CN110308752 A CN 110308752A
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- 230000005855 radiation Effects 0.000 claims abstract description 24
- 239000002131 composite material Substances 0.000 claims abstract description 23
- 238000005057 refrigeration Methods 0.000 claims abstract description 19
- 150000001875 compounds Chemical class 0.000 claims description 24
- 239000007789 gas Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 14
- 230000001681 protective effect Effects 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 239000007769 metal material Substances 0.000 claims description 5
- 229910001220 stainless steel Inorganic materials 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 229910052754 neon Inorganic materials 0.000 claims description 4
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 239000002887 superconductor Substances 0.000 claims description 4
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 239000005341 toughened glass Substances 0.000 claims description 3
- UGKDIUIOSMUOAW-UHFFFAOYSA-N iron nickel Chemical compound [Fe].[Ni] UGKDIUIOSMUOAW-UHFFFAOYSA-N 0.000 claims description 2
- 238000010276 construction Methods 0.000 abstract description 8
- 238000012546 transfer Methods 0.000 description 9
- 238000013461 design Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 8
- 239000010410 layer Substances 0.000 description 6
- 230000003313 weakening effect Effects 0.000 description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- 239000011229 interlayer Substances 0.000 description 5
- 241001657674 Neon Species 0.000 description 4
- 239000006260 foam Substances 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229920001342 Bakelite® Polymers 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229920000271 Kevlar® Polymers 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 244000273618 Sphenoclea zeylanica Species 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000003556 assay Methods 0.000 description 2
- 239000004637 bakelite Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011796 hollow space material Substances 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000004761 kevlar Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910000967 As alloy Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000037396 body weight Effects 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- SWQJXJOGLNCZEY-BJUDXGSMSA-N helium-3 atom Chemical compound [3He] SWQJXJOGLNCZEY-BJUDXGSMSA-N 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000010358 mechanical oscillation Effects 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 235000010446 mineral oil Nutrition 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- -1 steel Chemical class 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/30—Automatic controllers with an auxiliary heating device affecting the sensing element, e.g. for anticipating change of temperature
- G05D23/32—Automatic controllers with an auxiliary heating device affecting the sensing element, e.g. for anticipating change of temperature with provision for adjustment of the effect of the auxiliary heating device, e.g. a function of time
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
Abstract
The present invention discloses a kind of superhigh precision thermostat comprising: refrigeration machine, with level-one cold head and second level cold head；At least double confined space is connected between the confined space by connecting component；Confined space positioned at internal layer includes thermal switch, realizes the superhigh precision temperature control being continuously adjusted between 2.2K-300K by the temperature control of thermal switch.The present invention uses lightweight, the composite evacuated cover of multilayer hollow, radiation shield, and lower thermal conductivity overhung construction is, it can be achieved that the superelevation of device is insulated.
Description
Technical field
The present invention relates to a kind of thermostats, more particularly to a kind of superhigh precision thermostat.
Background technique
Thermostat is that one kind is capable of providing steady temperature environment, is widely used in sample mechanical property, thermal physical characteristic
The occasion and other research equipments dress of the various low-temperature characteristics measurements such as matter, optical physics characteristic, magnetic thermal characteristics, superconducting characteristic
It sets and develops the occasions such as occasion and national defense safety.Currently, common constant thermal apparatus at low temperature is divided into according to cold source difference is with cryogenic liquid
The cryostat of cold source and using dry type refrigeration machine as the cryostat of cold source.Wherein, using cryogenic liquid as the low temperature of cold source
Thermostat the shortcomings that there are boiling noise and sustainable limited times；And it is deposited by the cryostat of cold source of dry type refrigeration machine
Vibrating larger problem, and by dry type refrigeration machine intrinsic Temperature cycling fluctuation, will influence to a certain extent
The temperature stability of sample.With the development of Cryo Refrigerator and various cushion techniques, using dry type refrigeration machine as the low of cold source
Warm thermostat has been increasingly becoming the development trend of mainstream.
In cryostat, in order to realize High Accuracy Constant Temperature, need to realize good insulation, to reduce external environment pair
The influence of sample temperature usually includes the structures such as vacuum (-tight) housing, protective shield of radiation in constant thermal apparatus at low temperature to reduce radiation leakage heat,
Wherein vacuum (-tight) housing generallys use the materials such as solid stainless steel, aluminium alloy, and quality is larger, in addition the solid radiation shield of multilayer, so that whole
Body weight bearing is larger, needs to increase the sizes of support overhung constructions at different levels to meet safe design requirement, this is just to a certain extent
The heat transfer leakage heat from room temperature environment is increased, the difficulty of temperature control is increased.Therefore, it is necessary to comprehensively consider the radiation of system leakage
Heat and conductive heat leakage, rational deployment design.
Summary of the invention
The object of the present invention is to provide one kind to have good low temperature environment, realizes long-time, high stable, high-precision low
Warm thermostat, the constant thermal apparatus at low temperature is using reasonable glissando, reasonable temperature fluctuation braking measure and efficient
Heat insulating construction.
The present invention provides a kind of constant thermal apparatus at low temperature comprising:
Refrigeration machine, with level-one cold head and second level cold head；
At least double confined space is connected between the confined space by connecting component；
Confined space positioned at internal layer includes thermal switch, is continuously adjusted between realizing 2.2K-300K by the temperature control of thermal switch
Superhigh precision temperature control.
Wherein, weakening dynamic component is set at cold head position.
Wherein, described device includes triple confined spaces.
Wherein, zero level flange and hollow composite evacuated cover form the first heavy confined space；Level-one flange and hollow out Composite Coatings
Golden protective shield of radiation forms the second resealing space；The gold-plated cylinder of thermal switch and second level flange form third weight confined space.
Wherein, the connecting component is sunpender and/or filament.
Wherein, the thermal switch includes the first temperature controlling mode and the second temperature controlling mode.
Wherein, thermal switch working media is 3He, 4He, or is neon, nitrogen, argon gas etc..
It wherein, further comprise having Laboratory Module in the confined space of the internal layer.
Wherein, the Laboratory Module can be the geometry of any Suitable assays, including but not limited to it is cylindrical, spherical,
The geometries such as torispherical, spheroid, cuboid, cube, polyhedron.
Wherein, the cabin material of the Laboratory Module including but not limited to metals such as oxygen-free high conductivity type copper, beryllium copper, stainless steels and its
The nonmetallic materials such as alloy material, sapphire, organic glass, tempered glass, the superconductors such as copper oxygen compound, iron (nickel) base.
Constant thermal apparatus at low temperature of the invention solves traditional thermostat intrinsic temperature and fluctuates that big temperature-controlled precision is poor, is difficult to
The problems such as realizing small superelevation insulation, effective temperature control section, poor temperature uniformity.There is provided it is a kind of using special composite structure design
With wide warm area (2.2K-300K), the fast thermostat for balancing (more temperature control operating modes), superelevation temperature-controlled precision.
The present invention uses lightweight, the composite evacuated cover of multilayer hollow, radiation shield, and lower thermal conductivity overhung construction is, it can be achieved that be
The superelevation of system is insulated.Small add can be used using operation mode Laboratory Module of exchanging work in constant thermal apparatus at low temperature of the invention under two-mode
Hot device carries out temperature control, it can be achieved that thermostat apparatus (2.2K-300K) in very low temperature region to the wide warm area of room temperature is realized and is continuously adjusted
Superhigh precision temperature control and samming.The operation mode of exchanging work of constant thermal apparatus at low temperature of the invention realizes that ultra-high temperature uniformity, heat are opened
The heat transfer of helium mode uniform gas is filled in pass, and thermal switch takes out helium mode, reasonable Arrangement hot spot.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of superhigh precision constant thermal apparatus at low temperature of the invention.
Specific embodiment
To facilitate the understanding of the present invention, the embodiment of the present invention is illustrated with reference to the accompanying drawing, those skilled in the art
Member should be appreciated that following explanations only to facilitate explaining to invention, and not as the specific restriction to its range.
Fig. 1 show superhigh precision thermostat structural schematic diagram of the invention.Superhigh precision thermostat of the invention
It include: refrigeration machine 1, four-way valve 2, triple valve 3, zero level flange 4, hollow composite evacuated cover 5, zero level sunpender 6, level-one cold head 7, one
The compound thermal resistance 8 of grade, temperature control tube 9, level-one flexibility hot link 10, the compound thermal resistance 11 of second level, level-one flange 12, the outlet of constant temperature bath foam
13, the compound gold-plated protective shield of radiation 14 of hollow out, level-one sunpender 15, second level cold head 16, the compound thermal resistance 17 of three-level, second level flexibility are thermally connected
18, the compound thermal resistance 19 of level Four, primary heater 20, second level flange 21, composite evacuated interface 22, " thermal switch " gold-plated cylinder 23, two
Grade sunpender 24, secondary heater 25, thermometric/control temperature meter 26, Laboratory Module 27, constant temperature bath foam import 28.
As shown in Figure 1, refrigeration machine 1, is the pulse type refrigeration machine of low vibration, in order to eliminate the vibration of refrigeration machine 1 to device
Influence, in the cold head link position of refrigeration machine, at least one weakening dynamic component is set, due to weakening dynamic component need and meanwhile have
There is good heat transfer performance, it is therefore preferable that the weakening dynamic component is flexible thermal connecting component, passes through the flexible thermal connection
Component can either realize good heat transmitting and can effectively solve the mechanical oscillation of refrigeration machine inherently；Refrigeration machine 1 is at least
There are level-one cold head 7 and second level cold head 16, wherein level-one cold head 7 passes through the compound thermal resistance 8 of level-one, level-one flexibility hot link 10 and second level
Compound thermal resistance 11 is connected with level-one flange 12, the top of the level-one cold head 7 is provided with zero level flange 4, the zero level flange 4
Between the main body and the level-one cold head 7 of refrigeration machine；The second level cold head 16 of refrigeration machine 1 passes through the compound thermal resistance 17 of three-level, second level
Flexibility thermal connection 18 and the compound thermal resistance 19 of level Four are connected with second level flange 21, and the second level cold head 16 is located under level-one flange 12
Side.
In order to guarantee thermal conduction effect, it is provided at each cold head link position of level-one cold head 7 and second level cold head 16
At least two compound thermal resistances, so that the compound thermal resistance 8 of level-one and the compound thermal resistance 11 of second level are coupled with level-one cold head 7, three-level is multiple
Thermal resistance 17 and the compound thermal resistance of level Four is closed to be coupled with second level cold head 16 so that in cooling capacity transmittance process cryocooler cold head temperature
Degree fluctuation obtains effective attenuation, guarantees the stability and uniformity of heat transmitting；In order to further eliminate cold head and connecting element it
Between vibration, further at cold head position be arranged weakening dynamic component, wherein using level-one flexibility be thermally connected 10 with level-one cold head 7
Cooperated, is thermally connected and 18 is cooperated with second level cold head 16 using second level flexibility, it can be with by way of flexibility and thermal connection
Achieve the effect that weakening is moved and efficient heat transfer.It is preferred that the level-one flexibility is thermally connected 10 and 18 use of second level flexibility thermal connection
" C " type and/or the design of " S " type structure, have efficient heat-transfer character, and the intrinsic vibration for the refrigeration machine that can substantially decay；Pass through
At least two compound thermal resistances and a flexible thermal connection match designing with cold head can significantly reduce Laboratory Module 27
Temperature fluctuation achievees the effect that improve temperature-controlled precision.Above-mentioned level-one flexibility is thermally connected 10 and second level flexibility thermal connection 18, comprising appointing
" C " type for angle of anticipating, " S " type structure；Material is including but not limited to non-metallic materials such as the metal materials such as oxygen-free high conductivity type copper, sapphires
Material；The including but not limited to composition forms such as silk, thin slice；Diameter 0.1mm-100mm, length 1mm-1000mm.Above-mentioned compound thermal resistance
Structure can realize different temperature-controlled precisions by controlling different pretightning forces.
As shown in Figure 1, zero level flange 4 is connected with level-one flange 12 by zero level sunpender 6；Level-one flange 12 and second level flange
21 are connected by level-one sunpender 15；Second level flange 21 is connected with Laboratory Module 27 by second level sunpender 24, the zero level sunpender 6, one
Grade sunpender 15 and second level sunpender 24 use lower thermal conductivity material (including but not limited to G10 etc.), and heat is avoided to carry out by sunpender
Transmitting, the zero level sunpender 6, level-one sunpender 15 and second level sunpender 24 are designed using hollow structure or engraved structure, hollow or engrave
Empty hanging rod structure can reduce area of heat transfer, so that the heat transmitting carried out between flange by sunpender can be ignored, have
Have the advantages that structure is simple, easy for assemble or unload, heat-insulating property is good.Sunpender of the invention as connecting component using it is hollow, engrave
The design such as sky, uses the lower thermal conductivity material including but not limited to G10, bakelite etc..In addition, as further deformation implementation side
Formula can replace sunpender using filament, or using the combination of sunpender and filament, the connecting component is sunpender and/or filament.
In order to reduce the corresponding load of each flange in device, lightweight and better temperature stability are realized, in
Empty composite evacuated cover 5 is connected with zero level flange 4 by clamp or/and bolt, and the hollow composite evacuated cover 5 is multilayered structure,
The close inside cavities of the hollow composite evacuated cover 5 are vacuum hollow cavity, the close outermost layer of the hollow composite evacuated cover 5
It include at least a pair of of liquid entrance on the constant temperature interlayer for constant temperature interlayer, preferably the pair of liquid entrance is
Constant temperature bath foam import 28 and constant temperature bath foam outlet 13, the constant temperature interlayer inside is full of flowing or the isothermal liquid stood.As
Further to improve, of the invention hollow composite evacuated cover 5, can not include constant temperature interlayer, only single-layer or multi-layer vacuum knot
Structure, thereon at least one external vacuum interface.
The isothermal liquid can be high specific heat environment-friendly type working medium, the isothermal liquid including but not limited to water, mineral oil,
Alkanes and its derivative, olefines and its derivative, alcohols and its derivative, ethers and its derivative etc..Isothermal liquid can
It is maintained by outside business refrigeration system.Composite evacuated 22 one end of interface is with hollow composite evacuated cover 5 in addition to constant temperature interlayer
Other vacuum layers are connected, and the other end of composite evacuated interface 22 is connected to provide high vacuum environment with vacuum pump group, in this way may be used
Ensure that the inner wall of hollow composite evacuated cover 5 has stationary temperature, can substantially reduce radiation leakage heat and its caused temperature fluctuation,
To mitigate the load of internal radiation screen, mitigate its weight.Additionally, it is preferred that the hollow composite evacuated cover using comprising but it is unlimited
In domed bottom structure.
The compound gold-plated protective shield of radiation 14 of hollow out is connected with level-one flange 12 by bolt or other fixed forms, and hollow out is compound
It is hollow space inside gold-plated protective shield of radiation 14, is can be used in the hollow space including but not limited to gold-plated radiation shield, aluminium
The engraved structures such as foil cloth.It is hollow engrave by setting intermediate position for the screen body of the compound gold-plated protective shield of radiation 14 of hollow out itself
Hollow structure can reach the load of internal radiation screen, mitigate the beneficial effect of its weight.Additionally, it is preferred that the hollow out is compound gold-plated
The gold-plated radiation protection structure of single layer hollow out can be used in protective shield of radiation.
" thermal switch " gold-plated cylinder 23 is single or multi-layer structure, is connected with second level flange 21 by bolt or other fixed forms
It connects, using sealing structure, it can be achieved that disassembled and assembled freely and superelevation sealing performance.Construct multiple confined space, wherein zero level flange 4,
Hollow composite evacuated cover 5, level-one flange 12, the compound gold-plated protective shield of radiation 14 of hollow out collectively form confined space, " thermal switch " plating
Golden cylinder 23 constitutes confined space with second level flange 21.Wherein, zero level flange and hollow composite evacuated cover form the first heavy confined air
Between；Level-one flange and the compound gold-plated protective shield of radiation of hollow out form the second resealing space；The gold-plated cylinder of thermal switch and second level flange shape
At third weight confined space.It is connected between different confined spaces by connecting component, the connecting component is preferably sunpender, described
Sunpender reduces the load of the support overhung construction in a variety of confined spaces, drop by using hollow, hollow out and gold-plated design
Low heat transfer leakage heat and radiation leakage heat.
Temperature control tube 9 is connected with level-one flange 12, second level flange 21, help to obtain stable Temperature Distribution, smaller temperature
Fluctuation.Vacuum (-tight) housing, radiation shield are made of the metal of low-density, stiffness, the low coefficient of conductivity, stainless including but not limited to 316
The metals such as steel, 304 stainless steels, aluminium alloy.By the design of above-mentioned composite construction, it can be achieved that superelevation is insulated.Wherein, refrigeration machine 1,
There is provided reliable cooling capacity for Laboratory Module 27 makes its internal temperature be down to target temperature；Zero level flange 4, hollow composite evacuated cover 5, level-one
The compound gold-plated protective shield of radiation 14 of flange 12, hollow out, second level flange 21, " thermal switch " gold-plated cylinder 23 provide surely for Laboratory Module 27 together
Fixed ultrahigh vacuum adiabatic environment；The temperature-controlling system being connected with the port 2-3 of four-way valve 2 provides superhigh precision for Laboratory Module 27
Controlled heat environment.
In case study on implementation as shown in Figure 1, it is connected using the 2-1 interface of four-way valve with high-purity gas source, the gas source
Including but not limited to ultra-pure gases such as 3He, 4He, neons, the 2-2 interface of four-way valve is connected with vacuum pump group, the 2- of four-way valve
2 interfaces are outer to be connected with temperature-controlling system, and the 4th port of four-way valve 2 is connected with " thermal switch " gold-plated cylinder 27 by temperature-controlled tube 9, uses
In the opening and closing of " thermal switch ".The 3-1 interface of triple valve is outer to be connected with vacuum pump group, and the 3-2 interface of triple valve is system
Pin interfaces.
Different warm areas carry out temperature control using different gas " thermal switch " modes.It is vacuum shape in " thermal switch " gold-plated cylinder 23
It is thermal switch closed state when state；It is opened when Working medium gas in " thermal switch " gold-plated cylinder 23 filled with certain pressure for thermal switch
State.When thermal switch is closed, temperature control is divided into two states, state 1: sample chamber temperature is lower than setting value, is directly based upon at this time
Thermometric/control temperature meter 26 and Multi-point temperature-controlled algorithm realize high-temperature region (such as by adjusting heater 25,23 electric current of heater
40K or more warm area) high accuracy temperature control；State 2: sample chamber temperature is higher than setting value, can be filled in thermal switch at this time certain
Working gas is measured, thermal switch open state is converted to, makes sample chamber fast cooling to setting value temperature below, evacuates heat later
Switch, is converted to thermal switch closed state, by adjusting heater 25,23 electric current of heater, realizes high-temperature region (such as 40K or more
Warm area) high accuracy temperature control.When thermal switch is closed, it can be directly based upon thermometric/control temperature meter 26 and Multi-point temperature-controlled algorithm, led to
Heater 25,23 electric current of heater are overregulated, realizes the high accuracy temperature control of low-temperature space (2.2K-40K).
As further temperature control example, the temperature controlling mode of thermal switch is further detailed, to help to understand.Control
For temperature in 77K-300K warm area, " thermal switch " working media is 3He, 4He, and the environmental protection such as neon, nitrogen, argon gas also can be used
Gas is closed " thermal switch ", since second level sunpender 24 has good heat-insulating property, applies lesser electric current to heater 25,
The substantially heating of Laboratory Module 27 can be realized, cooperation heater 23, thermometric/control temperature meter 26 and Multi-point temperature-controlled algorithm can be real
The now high accuracy temperature control of the warm area.
For control temperature in 2.2K-77K warm area, " thermal switch " working media is 3He or 4He, is opened " thermal switch ", due to
Second level sunpender 24 has good heat-insulating property and the good convective heat transfer characteristic of working media, applies to heater 25 smaller
Electric current, the high-precision control of the warm area can be realized in cooperation heater 23, thermometric/control temperature meter 26 and Multi-point temperature-controlled algorithm
Temperature.It is designed by gas thermal switch different working modes, reasonable multipoint heating temperature control and superelevation heat insulating construction, thus to be real
Hatch checking 27 provides the superelevation temperature-controlled precision (0.01mK~0.1mK) being continuously adjusted between 2.2K-300K.
Thermal switch working gas is also possible to neon, nitrogen, argon gas etc. including but not limited to helium -3, helium -4, in high-temperature region
Other environmental protection working medium；According to warm area difference, air pressure can change within the scope of 0~10MPa.Comprising extremely in " thermal switch "
Few 1 Laboratory Module, when multiple Laboratory Modules can parallel connection be suspended to second level flange, can also connect and be suspended to Laboratory Module；Single Laboratory Module
0.01 liter~100 liters of internal effective volume.Thermal switch sealing structure can be sealed using indium silk, and tetrafluoro, c-type can also be used
Other low temperature seal modes such as spring seals.
Thermal switch Internal Experiment cabin suspention low thermally conductive hollow stem can be used, can also be used KEVLAR (Kevlar) filament etc. its
Its heat-insulated suspention form；Hollow stem uses the lower thermal conductivity including but not limited to G10, bakelite etc. using the design such as hollow, hollow out
Material；Hollow sunpender, preferably overall diameter 0.1mm~100mm, interior diameter are 0~0.80 times of overall diameter；Hollow out sunpender, hollow out
For round and/or ellipse, preferably overall diameter 0.1mm~100mm, interior diameter is 0~0.80 times of overall diameter, hollow out equivalency tables
Radius surface is 0~0.5 times of interior diameter；Filament diameter is preferably 0.1mm~10mm, length 1mm~500mm.Thermal switch temperature control
Preferred diameter 1mm~2cm, thin-wall tube 0.01mm~0.2mm, length 10cm~5m are managed, inside can be hollow or walks other leads
Or vacuumize, material is using low Heat Conduction Materials such as stainless steel, titanium alloys.It is above-mentioned specifically preferred to be applicable in having a size of of the invention
Range, size can carry out reducing selection or expanded scope in above-mentioned preferred scope.To those skilled in the art, exist
Suitably expanding or shrinking for range is carried out on the basis of the scope of the present invention to fall within the scope of protection of the present invention.
Laboratory Module 27 can be any Suitable assays geometry, including but not limited to cylinder, spherical shape, torispherical,
The geometries such as spheroid, cuboid, cube, polyhedron；Cabin material is including but not limited to oxygen-free high conductivity type copper, beryllium copper, no
The nonmetallic materials such as metal materials and its alloy material, sapphire, organic glass, tempered glass, copper oxygen compound, iron such as rust steel
The superconductors such as (nickel) base；Structure further includes the compound knot being made by metal material, nonmetallic materials, superconductor etc.
Structure.One or more can be used including but not limited to position in Fig. 1, quantity in heater locations.
The present invention uses lightweight, the composite evacuated cover of multilayer hollow, radiation shield, and lower thermal conductivity overhung construction is, it can be achieved that be
The superelevation of system is insulated.Small add can be used using operation mode Laboratory Module of exchanging work in constant thermal apparatus at low temperature of the invention under two-mode
Hot device carries out temperature control, it can be achieved that thermostat apparatus (2.2K-300K) in very low temperature region to the wide warm area of room temperature is realized and is continuously adjusted
Superhigh precision temperature control and samming.The operation mode of exchanging work of constant thermal apparatus at low temperature of the invention realizes that ultra-high temperature uniformity, heat are opened
The heat transfer of helium mode uniform gas is filled in pass, and thermal switch takes out helium mode, reasonable Arrangement hot spot.
It is understood that although the present invention has been disclosed in the preferred embodiments as above, above-described embodiment not to
Limit the present invention.For any person skilled in the art, without departing from the scope of the technical proposal of the invention,
Many possible changes and modifications all are made to technical solution of the present invention using the technology contents of the disclosure above, or are revised as
With the equivalent embodiment of variation.Therefore, anything that does not depart from the technical scheme of the invention are right according to the technical essence of the invention
Any simple modifications, equivalents, and modifications made for any of the above embodiments still fall within the range of technical solution of the present invention protection
It is interior.
Claims (10)
1. a kind of superhigh precision thermostat comprising:
Refrigeration machine, with level-one cold head and second level cold head；
At least double confined space is connected between the confined space by connecting component；
It is characterized by:
Confined space positioned at internal layer includes thermal switch, super by being continuously adjusted between the temperature control realization 2.2K-300K of thermal switch
High accuracy temperature control.
2. superhigh precision thermostat as described in claim 1, it is characterised in that: the vibration section that disappears is arranged at cold head position
Part.
3. superhigh precision thermostat as described in claim 1, it is characterised in that: described device includes triple confined spaces.
4. superhigh precision thermostat as claimed in claim 3, it is characterised in that: zero level flange and hollow composite evacuated cover shape
At the first heavy confined space；Level-one flange and the compound gold-plated protective shield of radiation of hollow out form the second resealing space；Thermal switch is gold-plated
Cylinder forms third weight confined space with second level flange.
5. superhigh precision thermostat as described in claim 1, it is characterised in that: the connecting component is for sunpender and/or carefully
Silk.
6. superhigh precision thermostat as described in claim 1, it is characterised in that: the thermal switch includes the first temperature controlling mode
With the second temperature controlling mode.
7. superhigh precision thermostat as described in claim 1, it is characterised in that: thermal switch working media be 3He, 4He, or
Person is neon, nitrogen, argon gas etc..
8. superhigh precision thermostat as described in claim 1, it is characterised in that: into one in the confined space of the internal layer
Step includes Laboratory Module.
9. superhigh precision thermostat as claimed in claim 8, it is characterised in that: the Laboratory Module can be any suitable reality
The geometry tested, including but not limited to the geometry such as cylinder, spherical shape, torispherical, spheroid, cuboid, cube, polyhedron
Structure.
10. superhigh precision thermostat as claimed in claim 8, it is characterised in that: the cabin material of the Laboratory Module includes
But it is non-to be not limited to the metals such as oxygen-free high conductivity type copper, beryllium copper, stainless steel and its alloy material, sapphire, organic glass, tempered glass etc.
The superconductors such as metal material, copper oxygen compound, iron (nickel) base.
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| CN113049145A (en) * | 2021-03-29 | 2021-06-29 | 中国空气动力研究与发展中心设备设计与测试技术研究所 | Equipment for carrying out full-system-width low-temperature comprehensive calibration on temperature measurement system |
| CN114111156A (en) * | 2021-11-29 | 2022-03-01 | 清华大学 | Modular low-temperature refrigeration system device and building method |
| CN115266814A (en) * | 2022-06-21 | 2022-11-01 | 安徽万瑞冷电科技有限公司 | Low-temperature thermal conductivity measuring device and measuring method |
| CN115509275A (en) * | 2022-10-07 | 2022-12-23 | 哈尔滨工业大学 | Multi-mode composite and active gas bath double-layer ultra-precise temperature control device |
| CN115525075A (en) * | 2022-10-07 | 2022-12-27 | 哈尔滨工业大学 | Dual-mode composite double-layer ultra-precise temperature control device |
| CN115629634A (en) * | 2022-10-07 | 2023-01-20 | 哈尔滨工业大学 | Multi-mode composite low-pressure double-layer ultra-precise temperature control device |
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| CN115525075A (en) * | 2022-10-07 | 2022-12-27 | 哈尔滨工业大学 | Dual-mode composite double-layer ultra-precise temperature control device |
| CN115629634A (en) * | 2022-10-07 | 2023-01-20 | 哈尔滨工业大学 | Multi-mode composite low-pressure double-layer ultra-precise temperature control device |
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| CN115509275B (en) * | 2022-10-07 | 2024-04-12 | 哈尔滨工业大学 | Multimode composite and active gas bath double-layer ultra-precise temperature control device |
| CN115525075B (en) * | 2022-10-07 | 2024-05-14 | 哈尔滨工业大学 | Double-mode composite double-layer ultra-precise temperature control device |
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