CN106054378B - Portable big view field imaging device and method - Google Patents
Portable big view field imaging device and method Download PDFInfo
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- G—PHYSICS
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- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
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- G—PHYSICS
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- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0055—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing a special optical element
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0085—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras employing wafer level optics
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Abstract
The present invention proposes a kind of portable big view field imaging device and method, for solving existing big view field imaging apparatus structure complexity, bulky technical problem, imaging device includes imaging main lens, microlens array, zone plate, detector and signal processing unit；It is imaged the homocentric globe lens structure that main lens uses double glazing；Microlens array uses the semiglobe closely arranged by multiple lenticule units, and lenticule unit is using double glyglass lens arrangements；Zone plate uses the semiglobe of multiple Fresnel blade units composition, and the radius of Fresnel zone plate unit cell is identical in same annulus；Successively in the coaxial arrangement in imaging primary optical axis side of imaging main lens, detector is vertical with imaging primary optical axis and is electrically connected with signal processing unit for microlens array, zone plate and detector.The present invention has the characteristics that small, visual field is big and high resolution, can be applied to that forest monitoring, monitoring, astronomical observation and space are supervised over the ground.
Description
Technical field
The invention belongs to optical image technology fields, are related to a kind of big view field imaging device and method, and in particular to a kind of
Portable big view field imaging device and method, available for forest monitoring, over the ground monitoring, astronomical observation and space supervision etc. fields.
Background technology
With the development of space technology, people more and more urgently wish to obtain scene letter abundant in big field range
Breath, so real-time obtain of big visual field, high resolution space image information is particularly important.Necessary group as image acquisition
Into part, big visual field, the design pressure of high-resolution imaging system are also increasing.Traditional big view field imaging system is mainly wrapped
Include neglect the single-lens scanning imaging system of field high resolution, fish-eye lens hyper-hemispherical staring imaging system, annulus stare panorama into
As system, the big view field imaging system of catadioptric and the big view field imaging system of multisensor array, but it can not all take into account big visual field, height
Resolution ratio.
In scientific research, people gradually put into sight with reference to the novel big visual field, high-resolution small-sized for calculating imaging
Optical imaging system development comes up.There are 3 kinds of modes in the big view field imaging for combining calculating imaging at present：1. with reference to multiple small field of view
The big view field imaging mode of imaging subsystems, 2. with reference to the big view field imaging mode of the compound eye type of multilayer curved surface, 3. with reference to globe lens
With the big view field imaging mode of micro- camera array.
Wherein, the 1. kind mode use the structure designs of multiple and different subsystems, using partly overlapping for adjacent subsystems,
Big view field imaging is realized with reference to image processing algorithm, such as：Chinese patent application, Authorization Notice No. CN102821238B, title
For the patent of invention of " a kind of wide-field ultra optical imaging system ", a kind of wide-field ultra optics is disclosed
Imaging system, the invention are overlapped using the image of adjacent imaging subsystems, are controlled by image processing apparatus and with system
The system control device of function obtains big view field imaging effect, but system bulk is big, and Project Realization difficulty is big, so generally not
Using；The 2. kind mode use the design of large scale multilayer toroidal lens, the imaging of analog simulation biology curved compound eye utilizes visit more
Device combination is surveyed, receives big view field image surface, such as：Chinese patent application, Authorization Notice No. CN102944934B are entitled：It is " a kind of
The patent of invention of the big view field imaging system of multilayer curve compound eye type " discloses a kind of big view field imaging system of multilayer curve compound eye type
System, the invention use multilayer compound eye structural design philosophy, in a manner that multichannel ccd detector combines, realize big view field imaging,
But system bulk and quality are all larger, and large-sized toroidal lens cost is high, also need further to explore development；3. plants mode
The structure design being combined using homocentric main lens with camera array corrects field first with the ball symmetrical structure of homocentric main lens
Secondly relevant aberration further corrects the residual aberration of globe lens, each microfacies machine array element pair using micro- camera array
Answer a detector, followed by multi-detector hemisphere arrangement simulation curved detector imaging, finally using multi-detector into
Big view field imaging effect is finally realized in the splicing fusion of picture, such as：Chinese patent application, Authorization Notice No. CN102866480B,
Entitled " a kind of based on the big field optical imaging system for calculating imaging technique " discloses a kind of based on calculating imaging technique
Big field optical imaging system, the invention are realized big by the design of homocentric globe lens and the calculating arrangement of micro- camera array
Visual field, high-resolution imaging, but planar detector can not exactly match with curved surface picture and part edge can be caused to distort, and microfacies
Machine array volume is excessive to limit the systematic difference range.
Invention content
It is an object of the invention to overcome the problems of the above-mentioned prior art, it is proposed that portable big view field imaging device
And method, it is asked for solving existing big view field imaging device and method technology not portable caused by complicated, volume are big
Topic.
To achieve these goals, the technical solution taken of the present invention is：
A kind of portable big view field imaging device, including：Main lens 1 is imaged, for acquiring optical signal, obtains big visual field figure
Picture；Detector 4, for receiving plane image information；Signal processing unit 5, for handling flat image information；Detector 4
Primary optical axis arrangement is total to, and electric with signal processing unit 5 in the imaging primary optical axis side of imaging main lens 1, and with imaging main lens 1
Property connection；Between imaging main lens 1 and detector 4, it is disposed with microlens array 2 and zone plate 3；It is imaged main lens 1
Using homocentric globe lens structure；Microlens array 2 uses the semiglobe closely arranged by multiple lenticule units, for changing
The optical path direction of big view field image, while correct the residual aberration of the big view field image, and be divided into and multiple uniformly neglect
Field picture；Zone plate 3 uniformly neglects field picture using the semiglobe of multiple Fresnel blade units composition for correcting
Emitting light path, and image planes conversion is carried out, obtain flat image information；It is common to be imaged main lens 1, microlens array 2 and zone plate 3
The heart.
Above-mentioned portable big view field imaging device, homocentric globe lens use double-layer glass structure.
Above-mentioned portable big view field imaging device, the semiglobe closely arranged by multiple lenticule units, is by multiple
Lenticule unit is using hemisphere face center as basic point, globally radially into multi-layer circular annulus arrangement form, each lenticule list
The corresponding 1 ° of field angle of member, wherein lenticule unit is using double glyglass lens arrangements.
Above-mentioned portable big view field imaging device, the semiglobe of multiple Fresnel blade unit compositions, is by multiple
Fresnel blade unit is using hemisphere face center as basic point, globally radially into multi-layer circular annulus arrangement form, and it is same
The radius of Fresnel zone plate unit cell is identical in annulus.
Above-mentioned portable big view field imaging device, multiple lenticule units and multiple Fresnel blade units, micro-
Corresponding position on lens array spherical surface and zone plate spherical surface corresponds, wherein lenticule unit and Fresnel blade unit
Size be a micron order of magnitude.
Above-mentioned portable big view field imaging device, detector 4 are vertical with the primary optical axis for being imaged main lens 1.
The imaging method of above-mentioned portable big view field imaging device, includes the following steps：
Step 1：Optical signal is acquired using main lens 1 is imaged, obtains the big visual field optical signal of curved surface；
Step 2：Divide the big visual field optical signal of the curved surface using microlens array 2 and change its optical path direction, while school
The just residual aberration of the original big visual field optical signal obtains the uniform small field of view optical signal of multiple almost planes；
Step 3：Change the optical path direction of the uniform small field of view optical signal of the multiple almost plane using zone plate 3, obtain
The level light signals parallel with the primary optical axis for being imaged main lens 1 are taken, obtain multiple uniform planar light signals；
Step 4：The multiple uniform planar light signal is received using detector 4, obtains the big view field image surface of original plane
Information；
Step 5：The big view field image surface information of the original plane is handled using signal processing unit 5, is obtained high-resolution
Big view field imaging effect.
The imaging method of above-mentioned portable big view field imaging device, the big field image of processing original plane described in step 5
Face information includes image co-registration, brightness uniformity and the super-resolution rebuilding of view field image surface information big to original plane.
Compared with prior art, the present invention it has the following advantages that：
1) present invention on the primary optical axis between main lens and detector due to setting gradually homocentric small size lenticule battle array
Row and the zone plate of homocentric high integration, with setting multiple micro- camera arrays between main lens and detector in the prior art
The structure of big view field imaging system is compared, and is reduced the volume weight of system and is reduced, has expanded systematic difference field.
2) present invention is converted to curved surface picture flat due to correcting optical path direction using microlens array and Fresnel zone plate
Image surface matches existing planar detector, with using the arrangement simulation curved surface detection of detector curved surface in existing big view field imaging technology
The structure of device is compared, and eliminates the marginal distortion of curved planar reformation, improves the imaging resolution of system edges visual field.
3) present invention is due to using in planar detector structure, with existing big view field imaging technology using the half of multi-detector
The structure of ball arrangement simulation curved detector is compared, and is reduced the complexity of system structure, has been widened systematic difference range.
Description of the drawings
Fig. 1 is overall structure diagram in the present invention；
Fig. 2 is the imaging method principle schematic in the present invention；
Fig. 3 is the structure diagram of microlens array in the present invention；
Fig. 4 is the structure diagram of zone plate in the present invention；
Fig. 5 is the imaging method flow diagram in the present invention；
Fig. 6 is the modulation transfer function simulation curve figure of different visual fields in the present invention；
Fig. 7 is the emulation point range figure of different visual fields in the present invention.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the purpose of the present invention, technical solution and technique effect are made further detailed
Thin description.
It is the system structure diagram of the present invention with reference to Fig. 1, including：Main lens 1, zone plate 3, is visited microlens array 2
Survey device 4 and signal processing unit 5.Microlens array 2, zone plate 3 and detector 4 are successively in the imaging key light of imaging main lens 1
The coaxial arrangement in axis side, while detector 4 is electrically connected with signal processing unit 5.
Main lens 1 is using the homocentric globe lens structure of two half-sphere mirrors, and material is high refractive index, the lanthanum crown of high Abbe constant
Glass LAK33, for receiving the radiated light energy of scene；General imaging system will introduce a series of aberration such as spherical aberrations, broom
Difference, astigmatism, aberration and distortion need to introduce the mutual cooperation aberration correction of multiple optical elements, so system structure is generally more
Complexity, due to the aberrations such as rotational symmetry structure design recoverable coma, astigmatism, distortion and the axial chromatic aberration of the main lens 1, institute
The imaging effect that simple chondritic obtains high-resolution can be used；It, can and since main lens 1 uses globe lens structure
Obtain the big view field imaging effect in 180 °.
Microlens array 2 uses hemispherical dome structure, positioned at the imaging primary optical axis side of main lens 1, with 1 homocentric row of main lens
Cloth, can be by original light path for correcting the residual aberration of main lens 1 and tentatively changing through the optical path direction after main lens 1
Parallel light path tentatively is converted into, so as to which the curved surface image planes of main lens 1 are tentatively converted into plane image planes；In microlens array 2
Lenticule unit globally radially ultimately forms hemispherical configuration using hemisphere face center as basic point into the distribution of multi-layer circular annulus,
For lenticule unit on same annulus along element thickness direction close-packed arrays, lenticule unit is arranged in environment-friendly type crown glass H-
In the hemispherical substrate of K9L；Since the design of cemented doublet can eliminate spherical aberration, aberration, coma these three aberrations, and it is homocentric
Main lens remains part spherical aberration and aberration, so each lenticule unit uses material as environment-friendly type dense flint glass H-ZF62
It is designed with the cemented doublet of high-refractivity lanthanide flint glass N-LASF41, further corrects the residual aberration of main lens 1, carry
The imaging resolution of high system；Each lenticule unit corresponds to 1 ° of field angle, so microlens array regards the big of main lens 1
Field is evenly divided into the small field of view that size is 1 °；Lenticule unit is in the micron order of magnitude, it is ensured that the portability of system；
Zone plate 3 is total to centre of sphere arrangement, and be set to microlens array 2 using the structure of Fresnel zone plate with main lens 1
Later；The laser engraving in the substrate of synthesis fused silica glass LITHOSIL-Q of zone plate 3, size in the micron order of magnitude, into
One step corrects optical path direction, ensures system-wide small size and quality；Fresnel blade unit in zone plate 3 is with zone plate
3 sphere centre is basic point, globally radially ultimately forms hemispherical configuration, each Fresnel into the distribution of more circular bands
Blade unit corresponds to a lenticule unit of spherical surface corresponding position；According to the focal length in different visual fields, each luxuriant and rich with fragrance alunite is calculated
The center radius of your zone plate unit cell, since the Fresnel blade unit on same annulus corresponds to identical focal length so radius
It is equal, and the Fresnel blade unit on different annulus corresponds to different focal lengths so radius is unequal；Zone plate 3 can be used for
Further change optical path direction, in combination with microlens array, which is converged on same focal plane so that curved surface
Image planes are converted to plane image planes, and the distortion of calibration edge visual field matches with existing planar detector.
Detector 4 uses ccd detector, which is total to primary optical axis after zone plate 3 with imaging main lens 1, and visits
It is vertical with the central optical path for being imaged main lens 1 to survey device plane, for receiving plane imaging effect；After the detector 4 receives correction
Optical signal, be real-time transmitted to signal processing unit 5.
Signal processing unit 5 is electrically connected with detector 4, the optical signal of pick-up probe 4；According to calculate image-forming principle,
The optical signal of each visual field is merged using image procossing principle in signal processing unit 5, brightness uniformity and super-resolution
Rate reconstruction and etc., the big visual field of final output, high-resolution imaging effect.
It is the imaging method principle schematic in the present invention with reference to Fig. 2：Scene light is incident to imaging main lens from object space
1, imaged main lens 1 reaches microlens array 2 after transmiting, then is transmitted to Fresnel zone plate 32 two times through microlens array,
Further change optical path direction using Fresnel zone plate 3, after be transmitted on detector 4 and be imaged；Finally in signal processing unit 5
In, export 160 ° big visual field, height using into principle of image fusion, brightness uniformity principle and image super-resolution rebuilding principle
Image in different resolution.Wherein, microlens array 2 and the structure diagram of zone plate 3 are distinguished as shown in Figure 3 and Figure 4.
It is the structure diagram of microlens array in the present invention with reference to Fig. 3：Lenticule unit in microlens array 2 with
Hemisphere face center is basic point, is globally radially distributed into multi-layer circular annulus and ultimately forms hemispherical configuration, on same annulus
The thickness direction close-packed arrays on lenticule unit edge, lenticule unit are all pasted on the hemispherical of environment-friendly type crown glass H-K9L
In substrate.
It is the structure diagram of zone plate in the present invention with reference to Fig. 4：Fresnel blade unit in zone plate 3 is closing
Laser engraving on into the substrate of fused silica glass LITHOSIL-Q, Fresnel blade unit is with the sphere centre of zone plate 3
For basic point, globally radially hemispherical configuration is ultimately formed into round polycyclic band distribution.
With reference to Fig. 5, it is the imaging method flow diagram in the present invention, includes the following steps：
Step 1：Using the optical signal for being imaged the acquisition scene of main lens 1, the big visual field optical signal of curved surface is obtained；
Step 2：Divide the big visual field optical signal of curved surface using microlens array 2 and tentatively change the big visual field optical signal of curved surface
Optical path direction, while the remaining spherical aberration and axial chromatic aberration of the original big visual field optical signal are corrected, obtain multiple almost planes
Uniform small field of view optical signal；
Step 3, further change the optical path direction of the uniform small field of view optical signal of multiple almost planes using zone plate 3,
The level light signals parallel with the primary optical axis for being imaged main lens 1 are obtained, obtain multiple uniform planar light signals；
Step 4, multiple uniform planar light signals are received using detector 4, obtains the big view field image surface information of original plane；
Step 5, using signal processing unit 5, to original plane, big view field image surface information carries out image co-registration, brightness uniformity
The processing such as change and super-resolution rebuilding, obtain high-resolution big view field imaging effect.
Below in conjunction with emulation experiment, the technique effect of the present invention is described further.
1st, simulated conditions
On the basis of initial configuration is calculated with P-W methods, whole system, simulation are optimized using ZEMAX optical design softwares
Imaging effect.
2nd, emulation content
(1) system modulation transmission function is emulated, the results are shown in Figure 6.
(2) system imaging face light path distribution situation is emulated, the results are shown in Figure 7.
It is the modulation transfer function simulation curve figure of different visual fields in the present invention with reference to Fig. 6：Fig. 6 (a), Fig. 6 (b), Fig. 6
(c) the modulation transfer function curve of 0 ° of visual field, 8 ° of visual fields, 10 ° of visual fields and 16 ° of visual fields, the horizontal stroke of curve are represented respectively with Fig. 6 (d)
Coordinate representation spatial frequency, ordinate represent the size of modulation transfer function (MTF) numerical value, and T represents different visual fields from S respectively
Meridian and the MTF curve in sagitta of arc direction, DIFF.LIMIT represent diffraction limit of the system in this visual field.
In Fig. 6 (a), the meridian (T) of 0 ° of visual field and the MTF curve on the sagitta of arc (S) direction and the diffraction limit curve of system
It almost overlaps, and 0.86 is up at cutoff frequency 50lp/mm, illustrate preferable in 0 ° of visual field system imaging quality；In Fig. 6 (b),
8 ° of visual field meridians (T) and the MTF curve on the sagitta of arc (S) direction are consistent with the diffraction limit curvilinear trend of system, in cutoff frequency
MTF numerical value is 0.35 at 50lp/mm, meets imaging requirements；In Fig. 6 (c), on 10 ° of visual field meridians (T) and the sagitta of arc (S) direction
MTF curve is consistent with the diffraction limit curvilinear trend of system, and MTF numerical value is 0.30 at cutoff frequency 50lp/mm, meets imaging
It is required that；In Fig. 6 (d), 10 ° of visual field meridians (T) and the MTF curve and the diffraction limit curvilinear trend of system on the sagitta of arc (S) direction
Unanimously, although meridian is partially separated with the MTF curve on sagitta of arc direction, overall trend is identical, at cutoff frequency 50lp/mm
MTF numerical value is 0.30, meets imaging requirements.
It is the emulation point range figure of different visual fields in the present invention with reference to Fig. 7：Fig. 7 (a), Fig. 7 (b), Fig. 7 (c) and Fig. 7 (d) points
Not Biao Shi 0 ° of visual field, 8 ° of visual fields, 10 ° of visual fields and 16 ° of visual fields system point range figure.The principle of point range figure is that simulated optical system exists
Imaging in image planes, be by calculating, a series of object space points by optical system after, it is real to be imaged on situation in image planes
It draws out on border.Root mean square radii refers to the size of typical disc of confusion in figure, the spot of reflection this system reality that can be quantified
Point size, geometry disc of confusion radius refers to the diameter of whole discs of confusion in figure；Ensure that root mean square radii is less than selected by system during judge
The pixel dimension of detector.
In Fig. 7 (a), the system root mean square radii of 0 ° of visual field is 0.442 μm, much smaller than the pixel for the detector that system is drafted
Size；In Fig. 7 (b), the system root mean square radii of 8 ° of visual fields is 3.823 μm, less than the pixel dimension for the detector that system is drafted
5.5μm；In Fig. 7 (c), the system root mean square radii of 10 ° of visual fields is 5.383 μm, less than the pixel ruler for the detector that system is drafted
Very little 5.5 μm；In Fig. 7 (d), the system root mean square radii of 16 ° of visual fields is 4.973 μm, less than the pixel for the detector that system is drafted
5.5 μm of size；To sum up, the present invention has excellent optical property.
The content not being described in detail in description of the invention belongs to the known technology of those skilled in the art.Thought based on the present invention
The modifications and variations thought are still within the claims of the present invention.
Claims (8)
1. a kind of portable big view field imaging device, including：
Main lens (1) is imaged, for acquiring optical signal, obtains big view field image；
Detector (4), for receiving plane image information；
Signal processing unit (5), for handling flat image information；
The detector (4) positioned at imaging main lens (1) imaging primary optical axis side, and with its be total to primary optical axis arrangement, and with letter
Number processing unit (5) is electrically connected；
It is characterized in that：
Between the imaging main lens (1) and detector (4), it is disposed with microlens array (2) and zone plate (3)；Institute
It states imaging main lens (1) and uses homocentric globe lens structure；The microlens array (2) uses and is closely arranged by multiple lenticule units
The semiglobe of cloth for changing the optical path direction of the big view field image, while corrects the residual aberration of the big view field image,
And it is divided into and multiple uniformly neglects field picture；The zone plate (3) is using the half of multiple Fresnel blade units composition
Spherical structure, for correct it is described uniformly neglect the emitting light path of field picture, and carry out image planes conversion, obtain flat image information；
The imaging main lens (1), microlens array (2) and zone plate (3) are homocentric.
2. portable big view field imaging device according to claim 1, which is characterized in that the homocentric globe lens is using double
Layer glass structure.
3. portable big view field imaging device according to claim 1, which is characterized in that described by multiple lenticule units
The semiglobe closely arranged is using hemisphere face center as basic point, globally radially into multi-layer circular by multiple lenticule units
Annulus arrangement form, each lenticule unit corresponds to 1 ° of field angle, and wherein lenticule unit is using double glyglass lens knots
Structure.
4. portable big view field imaging device according to claim 1, which is characterized in that the multiple Fresnel zone plate
The semiglobe of unit composition is using hemisphere face center as basic point, globally radially into more by multiple Fresnel blade units
Layer circular band arrangement form, and in same annulus Fresnel zone plate unit cell radius it is identical.
5. portable big view field imaging device according to claim 1, which is characterized in that the multiple lenticule unit with
Multiple Fresnel blade units, the corresponding position on microlens array spherical surface and zone plate spherical surface correspond, wherein
The size of lenticule unit and Fresnel blade unit is a micron order of magnitude.
6. portable big view field imaging device according to claim 1, which is characterized in that the detector (4) and imaging
The primary optical axis of main lens (1) is vertical.
7. the imaging method of portable big view field imaging device according to claim 1, includes the following steps：
1) using main lens (1) acquisition optical signal is imaged, the big visual field optical signal of curved surface is obtained；
2) divide the big visual field optical signal of the curved surface using microlens array (2) and change its optical path direction, while described in correction
The residual aberration of the big visual field optical signal of curved surface obtains the uniform small field of view optical signal of multiple almost planes；
3) change the optical path direction of the uniform small field of view optical signal of the multiple almost plane using zone plate (3), obtain with into
As the parallel level light signals of the primary optical axis of main lens (1), multiple uniform planar light signals are obtained；
4) the multiple uniform planar light signal is received using detector (4), obtains the big view field image surface information of original plane；
5) the big view field image surface information of original plane is handled using signal processing unit (5), obtains high-resolution big visual field
Imaging effect.
8. the imaging method of portable big view field imaging device according to claim 7, which is characterized in that institute in step 5)
The big view field image surface information of processing original plane stated, image co-registration, brightness including view field image surface information big to original plane are equal
It homogenizes and super-resolution rebuilding.
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| CN110824454B (en) * | 2018-08-08 | 2023-11-03 | 宁波舜宇车载光学技术有限公司 | Lens system and construction method thereof |
| CN111190285A (en) * | 2020-02-18 | 2020-05-22 | 中国人民解放军陆军工程大学 | Multi-aperture single-detector optical imaging system |
| CN111641812B (en) * | 2020-05-29 | 2021-09-10 | 西安应用光学研究所 | Multi-camera array arrangement method suitable for airborne wide-area reconnaissance and monitoring |
| CN111711803A (en) * | 2020-07-25 | 2020-09-25 | 广东兆邦智能科技股份有限公司 | Multi-target panoramic search tracking and recognition system |
| CN117408881B (en) * | 2023-09-28 | 2024-05-03 | 上海纬而视科技股份有限公司 | Super-resolution image reconstruction method based on insect compound eye vision net nerve membrane |
| CN117146973B (en) * | 2023-11-01 | 2023-12-26 | 长春理工大学 | Spherical aberration eliminating large area array detector, spherical aberration eliminating method and detector manufacturing method |
| CN117233874B (en) * | 2023-11-16 | 2024-02-09 | 西安信飞特信息科技有限公司 | Image acquisition device and image acquisition equipment |
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