CN2550757Y - X-ray transmission holographic microscope - Google Patents

X-ray transmission holographic microscope Download PDF

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Publication number
CN2550757Y
CN2550757Y CN 01274448 CN01274448U CN2550757Y CN 2550757 Y CN2550757 Y CN 2550757Y CN 01274448 CN01274448 CN 01274448 CN 01274448 U CN01274448 U CN 01274448U CN 2550757 Y CN2550757 Y CN 2550757Y
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ray
microscope
zone plates
testing sample
resolution
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CN 01274448
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谢红兰
陈建文
高鸿奕
蒋诗平
徐至展
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Shanghai Institute of Optics and Fine Mechanics of CAS
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Abstract

The utility model relates to an X-ray transmitting holographical microscope, comprising convergent zone plates positioned in the vacuum housing, pin pole diaphragms, under test samples positioned at the focus of the convergent zone plates; wherein, the X-ray emitted from the X-ray source passes by the convergent zone plates; interference fields are formed by the object lights of X-ray passing by the under test samples and the reference lights of the untested samples. Micro-zone plates, the waveband of which is N (more than 100), are positioned between the interference fields and an acquisition element, and output of the acquisition element is connected to the computer. Compared with the prior art, the utility model has the advantages of convenient operation, signal-to-noise ratio improvement, and more accuracy, truthfulness and timeliness, which is particularly suitable for observing the three-dimensional ultramicro structure of the biological samples under natural conditions.

Description

X ray transmission hologram microscope
Technical field:
The utility model is a kind of X ray transmission hologram microscope, is mainly used in the three-dimensional hyperfine structure of the biological sample under the observation state of nature.
Background technology:
Be used to observe the holographic microscope of the three-dimensional hyperfine structure of biological sample to mainly contain two classes: optical holography microscope and X ray holographic microscope.The optical holography microscope has pre-amplification, back to amplify and three kinds of structures of holographic amplification.Because be subjected to the restriction of relevant x-ray source and optical element, the X ray holographic microscope has only two kinds of structure recorded holograms at present, promptly there is not the holographic and lid cypress in-line holographic of lens Fourier transform.
The optical holography microscope (referring to the optical technology handbook, the first volume, China Machine Press, Beijing, in August, 1994, P326-328)
1.1 amplify the optical holography microscope in advance, mainly be testing sample to be amplified the back by object lens become a real image, with the picture of directional light optical recording amplification for referencial use.Reproduce with former reference light illumination, observe by eyepiece.
1.2 the optical holography microscope is amplified in the back, mainly is the hologram that writes down testing sample earlier with general structure, uses the real image that reproduces testing sample with the light wave illumination of reference light conjugation, observes with simple microscope then.
1.3 the holographic optical holography microscope that amplifies has three kinds of structures to make and reproduces the picture amplification: a) amplify hologram; B) short wavelength's record, the long wavelength reproduces; C) suitably select the radius-of-curvature on reference light and illumination light corrugated.
2.X ray holographic microscope
2.1 do not have lens Fourier transform X ray holographic microscope (referring to Science, 1992,256:1009-1012).The relevant X-ray beam of monochromatic X-ray source outgoing is through the convergent wave strap, and its zero order wave is used for the testing sample that throws light on, and its first-order diffraction ripple focuses on and produces with reference to point source, testing sample with reference to point source at grade.On this plane, place a pinhole diaphragm, strobe.The thing bundle is restrainted the generation interference fringe of meeting with reference, is scribbled the charge-coupled device record of the X ray wave band of fluorescent powder, and direct input computing machine carries out digital reconstruction after the A/D conversion again.
2.2 the coaxial X ray holographic microscope of lid cypress is (referring to J.Opt.Soc.Am. (A), 1990,7 (10): 1847-1861).This interrecord structure is simple, without any need for optical element, only needs a suitable light source and recording medium, does not also need light path is carried out meticulous adjustment.The X ray of x-ray source emission carries out filtering by pinhole diaphragm again and obtains quasi monochromatic X ray after the convergent wave strap focuses on, wherein a part is used to provide the illumination to testing sample, is used for reference to bundle without another part of testing sample disturbance.The thing bundle is restrainted on same axis with reference.Polymethylmethacrylate with photoresist, as the recording medium recording hologram, with high-resolution transmission electron microscope or atomic force microscope hologram is read amplification then, carry out digitizing with microdensitometer again and be input to computing machine and carry out digital reconstruction.
The shortcoming that above-mentioned various holographic microscope mainly exists is:
1. the optical holography microscope is a visible light wave range because of the lighting source that it adopted, and wavelength is longer, so its resolution is lower than X ray holographic microscope.And the penetration depth of visible light is little than X ray, so the optical holography microscope can only provide the structural information of testing sample surface and near surface thereof, can not provide the structural information of testing sample inside.In addition, observe the three-dimensional hyperfine structure of biological sample, need dewater testing sample with the optics holographic microscope, dyeing, fixing processing procedure improves the contrast of imaging, and this will destroy original, the real structural information of testing sample.
2.X the ray holographic microscope is the X ray wave band because of the lighting source that it adopted, wavelength is very short, and penetration depth is very big, so than more the have superiority observation of the three-dimensional hyperfine structure that carries out biological sample of optical holography microscope.In addition, the most important is that the X ray (2.3nm-4.4nm) of water window wave section differs magnitude nearly to the absorption of protein and water, thereby can form natural contrast mechanism and enhancement mechanism to biological sample.So the X ray holographic microscope does not need biological sample is dewatered, dyeing, fixing processing procedure improves the contrast of imaging, has avoided the destruction to the biological sample structure information under the state of nature.So the X ray holographic microscope is more suitable in the three-dimensional ultrastructure that is used for observing biological sample under the state of nature.But, but exist many shortcomings at above-mentioned X ray holographic microscope.
2.1 though it is low to the resolution requirement of recording medium not have lens Fourier transform X ray holographic microscope, but require very high to the fresnel's zone plate that produces with reference to point source.Because the spatial frequency of the peripheral endless belt of fresnel's zone plate will determine the resolution of X ray lensless Fourier transform hologram.And make high-resolution fresnel's zone plate is to can't do without high-resolution recording medium.So making this holographic microscope is difficult to realize.
That 2.2 though lid cypress coaxial X ray holographic microscope has light path is simple, do not need any optical element, do not need the advantage of meticulous adjustment light path yet, it has the shortcoming of a maximum, is that the resolution requirement of detecting element is very high to recording medium promptly.Because obtain higher holographic imaging resolution, then recording medium need be noted senior time very meticulous interference fringe.Recording medium raising resolution for photoresist just needs to increase exposure.And the increase of time shutter very easily causes recording medium to be damaged by electron beam.In addition, because it is too little to be recorded in the spacing of the holographic interference fringes on the photoresist, need the amplification of reading through high-resolution follow-up equipment such as transmission electron microscope or atomic force microscope, transcribe on film, with microdensitometer the image on the film is carried out digitizing again and is converted to data file, just can be input to computing machine and carry out digital reconstruction, like this hologram through repeatedly process, amplify, developing and printing, digitized processing process, introduce very big noise, reduced signal to noise ratio (S/N ratio) and image quality.Therefore covering the coaxial X ray holographic microscope of cypress is that very difficult acquisition is high-resolution.
Summary of the invention:
The utility model is for overcoming above-mentioned all shortcomings, for the three-dimensional hyperfine structure of observing the biological testing sample 5 under the state of nature provides a kind of X ray transmission hologram microscope.It will fundamentally overcome all shortcomings of the coaxial X ray holographic microscope of technology middle cover cypress formerly, to detecting element is that the recording medium resolution requirement is very low, can directly use the detecting element of low resolution as recording medium, with breaking through the limitation that imaging resolution is subjected to the restriction of recording medium ultimate resolution, can improve imaging resolution significantly.
X ray transmission hologram microscope of the present utility model comprises placing in the vacuum casting 8, has from the X ray of x-ray source 1 emission through convergent wave strap 2, pinhole diaphragm 3 with place the testing sample 4 of convergent wave strap 2 focus O.X ray is through behind the testing sample 4, be divided into two bundles, a branch of be by testing sample 4 for the thing bundle, another Shu Wei be with reference to restrainting by testing sample 4, the thing bundle and the formation interference field A that meets with reference to bundle, the interference X ray of being launched by interference field A reaches detecting element 6 through micro zone plates 5.That is to say between interference field A and detecting element 6 and be equipped with micro zone plates 5.The output of detecting element 6 is connected on the computing machine 7.As shown in Figure 1.
Wavestrip number of rings N>100 of said micro zone plates 5.The imaging of micro zone plates 5 meets the isochromatic lens imaging formula: 1 f = 1 u + 1 v , wherein f is the focal length of micro zone plates 5, and u is an object distance, and this object distance is the distance between the micro zone plates 5 to above-mentioned interference field A, and v is an image distance.
Said detecting element 6 is charge-coupled devices, abbreviates CCD usually as.
Above-mentioned microscopic structure of the present utility model also be we can say main separated into two parts: the record of linear monochromatic X-ray source and hologram and return mechanism.Linear monochromatic X-ray source comprises x-ray source 1, convergent wave strap 2 and pinhole diaphragm 3, and its effect is the spatial filtering effect according to the dispersion interaction of convergent wave strap 2 and pinhole diaphragm 3.When the aperture of the pin hole of pinhole diaphragm 3 enough hour, can provide degree of coherence higher coherent light beam.Convergent wave strap 2 centers are prevented the direct irradiation testing sample of zero order light by metal barrier.The record of hologram and return mechanism mainly comprise detecting element 6, the computing machine 7 of testing sample 4, micro zone plates 5, CCD.Micro zone plates 5 is gained the name because of its diameter is little, claims the object lens zone plate again, can be used as image-forming objective lens.Near the higher testing sample of first-order diffraction focusing of utilization ratio carries out amplification imaging.This kind micro zone plates is made of electron beam plating, and its resolution is by outer shroud wavestrip width decision, and the height of resolution can directly have influence on the quality of zone plate image quality, and the highest resolution has reached 20nm at present.Moisture biological testing sample 4 is placed in the silicon nitride window, and this window separates the high vacuum environment of moisture testing sample 4 with the synchrotron radiation X-ray source, and biological testing sample 4 is remained under the original state of nature.By the polychrome X-ray of synchrotron radiation X-ray source 1 outgoing through convergent wave strap 2 and pinhole diaphragm 3 linear monochromatizations after irradiation to testing sample 4, the X ray by testing sample 4 is as the thing bundle, another part the X ray by testing sample 4 as with reference to bundle.When meeting, this two row beam forms interference field A.The interference fringe of this interference field A is upward changed through A/D to the CCD6 of recording medium by micro zone plates 5 amplification imaging B, is directly inputted to computing machine 7 and carries out digital reconstruction.This holographic microscope imaging system all places 8 li of vacuum castings except that computing machine 7.
The utility model is compared with technology formerly, because there is micro zone plates 5 to amplify in the utility model as pre-, so microscope of the present utility model does not need the amplification of reading of follow-up equipment, having avoided formerly, therefore technology middle cover cypress in-line holographic microscope need improve signal to noise ratio (S/N ratio) to hologram again through the artificial noise of introducing in the processing procedure of repeatedly processing, amplify, process; Easy to operate, simultaneously can directly adopt CCD detecting element 6 as recording medium, its benefit is that CCD integrates record, digitizing, having avoided formerly, technology middle cover cypress in-line holographic microscope need come hologram is carried out digitizing with the scanning microdensitometer, therefore, the utility model has saved a lot of troubles in the operating process, and the noise of having avoided digitized process to introduce.The signal that CCD detects outputs to computing machine and carries out digital reconstruction, can carry out various pre-service to hologram, as adjusting contrast, smooth noise etc., to improve image quality.In addition, can adopt special algorithm (as process of iteration, digital filtering) to handle, eliminate " twin image " interference noise in the in-line holographic reproducing the result.Microscope of the present utility model is no lens Fourier transform X ray holographic microscope in the technology more formerly, and is lower to the resolution requirement of convergent wave strap 2 and micro zone plates 5; Adopt CCD record, computer digit to reappear and to realize the online observation of the X ray holographic microphotography of biological testing sample 4 is shortened the reproduction time greatly, be applied to make it have more accuracy, authenticity, promptness in the modern medical service diagnosis.
Description of drawings:
Fig. 1 is the microscopical structural representation of X ray transmission hologram of the present utility model.
Further specify microscopic structure of the present utility model below in conjunction with accompanying drawing.
Embodiment:
X ray transmission hologram microscope of the present utility model mainly comprises two parts as shown in Figure 1:
1. linear monochromatic X-ray source
It comprises: x-ray source 1, convergent wave strap 2 and pinhole diaphragm 3, its course of work is the X ray chromatic dispersion with different wave length of the character that is inversely proportional to according to the focal length of convergent wave strap 2 and wavelength, carry out filtering and reduce light line degree with pinhole diaphragm 3, take out quasi-monochromatic light with certain coherence.The centre wavelength of convergent wave strap 2 is 2.3nm, and service band is 1.97~2.78nm.Convergent wave strap 2 is 9890~10110mm with the distance of x-ray source 1, and convergent wave strap 2 is 710~490mm with the distance of pinhole diaphragm 3.Change the distance of convergent wave strap 2 and pinhole diaphragm 3, just can select suitable operation wavelength.Convergent wave strap 2 outermost ring diameters are 2.8mm, and the outermost ring width is 0.465 μ m, and number of rings N=1506, one-level focal length are 566mm.The aperture of pinhole diaphragm 3 is 8 μ m, 30 μ m and 200 μ m.Select the pinhole diaphragm 3 of smaller aperture due, can reduce monochromatic live width, improve the coherence of light beam.For example, operation wavelength λ=2.3nm, the pinhole aperture d=8 μ m of pinhole diaphragm 3, the radius ρ=1.4mm of convergent wave strap 2, live width Δ λ=λ d/ ρ=0.013nm, monochromaticity is λ/Δ λ=10 3, then temporal coherent length is L c2/ Δ λ=0.407 μ m.Testing sample 4 is R=700mm apart from pinhole diaphragm 3, and then the coherent ranges at this place is b=R λ/d=201 μ m.This shows to have certain coherence, be fit to carry out holographic imaging through the X ray after the monochromatization.
2. write down and return mechanism
Because the utility model has adopted the structure that pre-amplification is arranged, the interference fringe spacing can be advanced Room amplification by micro zone plates 5, therefore can reduce the requirement to the recording medium resolution of detecting element greatly.Detecting element 6 records that adopt CCD can directly reappear at computing machine 7 enterprising line number words through the A/D conversion.The diameter D=80 μ m of micro zone plates 5, outermost ring width δ=40nm, its resolution is 1.22 δ=1.22 * 40=48.8nm.Wavelength X=the 2.3nm of the X ray of used x-ray source 1 emission, the then focal distance f=D of micro zone plates 5 * δ/λ=1391 μ m among the embodiment.As the thing bundle and the generation interference field A that meets with reference to bundle.In order to utilize the limited temporal coherence of linear monochromatic X-ray source, record the diffracted wave of the micro-structure of testing sample 4, visual this interference field A is a localization, is about 400 μ m with testing sample 4 distances.Regard the interference field A at this place as imaging object, micro zone plates 5 is regarded image-forming objective lens as, the wavestrip number of rings N=500 of micro zone plates in the present embodiment, because wavestrip number of rings N>100 of micro zone plates 5, so its imaging meets the isochromatic lens imaging formula 1 f = 1 u + 1 v , Wherein f is a focal length, and u is an object distance, and ν is an image distance.Wherein object distance u is apart from the interference field A at testing sample 4 about 400 μ m places and the distance of micro zone plates 5.When object distance u=1392 μ m, when promptly the distance of testing sample 4 and micro zone plates 5 is u+400=1392+400=1792 μ m,, can get image distance ν=1936mm by imaging formula, its enlargement factor is v u = 1936 × 10 3 1392 = 1002 , hence one can see that with micro zone plates 5 focal imagings, can make interference fringe be amplified to 10 3Doubly.If each pixel size of CCD is 24 μ m, promptly distinguishable object spacing is 24 μ m, and then distinguishable object size is 48 μ m.The pre-amplification multiple of known again micro zone plates is 1002, and then the microscopical resolution of this X ray transmission hologram is 48 μ m/1002=24nm.This Confirmation Of Number adopt micro zone plates 5 pre-structures of amplifying, the spacing of interference fringe is amplified, reduce resolution requirement greatly to recording medium, increase substantially the imaging resolution of X ray holographic microscope.
With X ray transmission hologram microscope of the present utility model, can realize observing real-time the three-dimensional hyperfine structure of the biological sample under the state of nature, resolution can reach nanometer scale, is applied in the modern medical service diagnosis, makes it have more accuracy, authenticity, promptness.

Claims (1)

1. X ray transmission hologram microscope, comprise and placing in the vacuum casting (8), have from the X ray of x-ray source (1) emission and pass through convergent wave strap (2), pinhole diaphragm (3) and place the testing sample (4) of convergent wave strap (2) focus (0) to arrive detecting element (6), the output of detecting element (6) is connected on the computing machine (7), it is characterized in that being equipped with between testing sample (4) and detecting element (6) micro zone plates (5) of wavestrip number of rings N>100.
CN 01274448 2001-12-26 2001-12-26 X-ray transmission holographic microscope Expired - Fee Related CN2550757Y (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100526867C (en) * 2004-11-03 2009-08-12 中国科学院上海光学精密机械研究所 Timer resolved photoelectron amplifying X-ray microscope
CN102881347A (en) * 2012-10-15 2013-01-16 中国科学院上海应用物理研究所 Method for focusing cylindrical wave line source into point light spot by using zone plate
CN106054378A (en) * 2016-03-17 2016-10-26 西安电子科技大学 Portable wide-field-of-view imaging device and method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100526867C (en) * 2004-11-03 2009-08-12 中国科学院上海光学精密机械研究所 Timer resolved photoelectron amplifying X-ray microscope
CN102881347A (en) * 2012-10-15 2013-01-16 中国科学院上海应用物理研究所 Method for focusing cylindrical wave line source into point light spot by using zone plate
CN102881347B (en) * 2012-10-15 2015-05-20 中国科学院上海应用物理研究所 Method for focusing cylindrical wave line source into point light spot by using zone plate
CN106054378A (en) * 2016-03-17 2016-10-26 西安电子科技大学 Portable wide-field-of-view imaging device and method
CN106054378B (en) * 2016-03-17 2018-06-26 西安电子科技大学 Portable big view field imaging device and method

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