CN106048729A - 一种pvt法大直径碳化硅单晶生长装置 - Google Patents
一种pvt法大直径碳化硅单晶生长装置 Download PDFInfo
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- CN106048729A CN106048729A CN201610486891.5A CN201610486891A CN106048729A CN 106048729 A CN106048729 A CN 106048729A CN 201610486891 A CN201610486891 A CN 201610486891A CN 106048729 A CN106048729 A CN 106048729A
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- silicon carbide
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109355706A (zh) * | 2018-11-02 | 2019-02-19 | 山东天岳先进材料科技有限公司 | 一种碳化硅单晶生长装置 |
CN109666971A (zh) * | 2017-10-16 | 2019-04-23 | 北京北方华创微电子装备有限公司 | 生长炉 |
CN110306238A (zh) * | 2019-07-16 | 2019-10-08 | 中国科学院上海硅酸盐研究所 | 一种晶体生长装置及晶体生长方法 |
CN110528079A (zh) * | 2019-08-20 | 2019-12-03 | 山东天岳先进材料科技有限公司 | 一种在真空状态下对测温镜片进行更换的装置及其应用 |
CN111501096A (zh) * | 2020-07-02 | 2020-08-07 | 眉山博雅新材料有限公司 | 一种晶体制备装置 |
CN113122923A (zh) * | 2021-04-16 | 2021-07-16 | 上海天岳半导体材料有限公司 | 一种高质量碳化硅晶体及其生长方法和装置 |
US11408089B2 (en) | 2020-05-06 | 2022-08-09 | Meishan Boya Advanced Materials Co., Ltd. | Devices and methods for growing crystals |
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CN101805927A (zh) * | 2010-04-20 | 2010-08-18 | 中国科学院上海硅酸盐研究所 | 一种高纯半绝缘碳化硅体单晶的生长装置 |
CN102703966A (zh) * | 2012-05-28 | 2012-10-03 | 中国科学院力学研究所 | 一种籽晶温度梯度方法生长碳化硅单晶的装置 |
CN202492614U (zh) * | 2012-02-28 | 2012-10-17 | 常州天合光能有限公司 | 复合型坩埚侧面护板 |
CN104514034A (zh) * | 2015-01-08 | 2015-04-15 | 中国科学院半导体研究所 | 用于碳化硅生长的高温装置及方法 |
CN105316765A (zh) * | 2014-06-16 | 2016-02-10 | 台聚光电股份有限公司 | 制造若干个碳化硅单晶晶体的装置及其方法 |
CN105543966A (zh) * | 2016-02-02 | 2016-05-04 | 北京华进创威电子有限公司 | 一种碳化硅单晶生长用复合保温结构 |
JP2016098157A (ja) * | 2014-11-25 | 2016-05-30 | 住友電気工業株式会社 | 炭化珪素単結晶の製造方法 |
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2016
- 2016-06-28 CN CN201610486891.5A patent/CN106048729B/zh active Active
Patent Citations (7)
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CN101805927A (zh) * | 2010-04-20 | 2010-08-18 | 中国科学院上海硅酸盐研究所 | 一种高纯半绝缘碳化硅体单晶的生长装置 |
CN202492614U (zh) * | 2012-02-28 | 2012-10-17 | 常州天合光能有限公司 | 复合型坩埚侧面护板 |
CN102703966A (zh) * | 2012-05-28 | 2012-10-03 | 中国科学院力学研究所 | 一种籽晶温度梯度方法生长碳化硅单晶的装置 |
CN105316765A (zh) * | 2014-06-16 | 2016-02-10 | 台聚光电股份有限公司 | 制造若干个碳化硅单晶晶体的装置及其方法 |
JP2016098157A (ja) * | 2014-11-25 | 2016-05-30 | 住友電気工業株式会社 | 炭化珪素単結晶の製造方法 |
CN104514034A (zh) * | 2015-01-08 | 2015-04-15 | 中国科学院半导体研究所 | 用于碳化硅生长的高温装置及方法 |
CN105543966A (zh) * | 2016-02-02 | 2016-05-04 | 北京华进创威电子有限公司 | 一种碳化硅单晶生长用复合保温结构 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109666971A (zh) * | 2017-10-16 | 2019-04-23 | 北京北方华创微电子装备有限公司 | 生长炉 |
CN109666971B (zh) * | 2017-10-16 | 2020-11-10 | 北京北方华创微电子装备有限公司 | 生长炉 |
CN109355706A (zh) * | 2018-11-02 | 2019-02-19 | 山东天岳先进材料科技有限公司 | 一种碳化硅单晶生长装置 |
CN110306238A (zh) * | 2019-07-16 | 2019-10-08 | 中国科学院上海硅酸盐研究所 | 一种晶体生长装置及晶体生长方法 |
CN110306238B (zh) * | 2019-07-16 | 2021-05-04 | 安徽微芯长江半导体材料有限公司 | 一种晶体生长装置及晶体生长方法 |
CN110528079A (zh) * | 2019-08-20 | 2019-12-03 | 山东天岳先进材料科技有限公司 | 一种在真空状态下对测温镜片进行更换的装置及其应用 |
US11408089B2 (en) | 2020-05-06 | 2022-08-09 | Meishan Boya Advanced Materials Co., Ltd. | Devices and methods for growing crystals |
CN111501096A (zh) * | 2020-07-02 | 2020-08-07 | 眉山博雅新材料有限公司 | 一种晶体制备装置 |
CN111501096B (zh) * | 2020-07-02 | 2020-11-10 | 眉山博雅新材料有限公司 | 一种晶体制备装置 |
CN113122923A (zh) * | 2021-04-16 | 2021-07-16 | 上海天岳半导体材料有限公司 | 一种高质量碳化硅晶体及其生长方法和装置 |
CN113122923B (zh) * | 2021-04-16 | 2022-07-12 | 上海天岳半导体材料有限公司 | 一种高质量碳化硅晶体及其生长方法和装置 |
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Denomination of invention: Device for growing large-diameter silicon carbide crystal by PVT method Effective date of registration: 20200628 Granted publication date: 20190409 Pledgee: Agricultural Bank of China Limited by Share Ltd. Ji'nan Licheng branch Pledgor: Shandong Tianyue Advanced Materials Technology Co.,Ltd. Registration number: Y2020980003534 |
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Date of cancellation: 20201119 Granted publication date: 20190409 Pledgee: Agricultural Bank of China Limited by Share Ltd. Ji'nan Licheng branch Pledgor: Shandong Tianyue Advanced Materials Technology Co.,Ltd. Registration number: Y2020980003534 |
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Address after: No.99, Tianyue South Road, Huaiyin District, Jinan City, Shandong Province Patentee after: Shandong Tianyue advanced technology Co., Ltd Address before: Room 1106-6-01, block AB, Century Fortune Center, west side of Xinyu Road, high tech Zone, Jinan City, Shandong Province Patentee before: Shandong Tianyue Advanced Materials Technology Co.,Ltd. |
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