CN106029298A - Dry barrel polishing method, and medium production method - Google Patents

Dry barrel polishing method, and medium production method Download PDF

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Publication number
CN106029298A
CN106029298A CN 201580010935 CN201580010935A CN106029298A CN 106029298 A CN106029298 A CN 106029298A CN 201580010935 CN201580010935 CN 201580010935 CN 201580010935 A CN201580010935 A CN 201580010935A CN 106029298 A CN106029298 A CN 106029298A
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medium
step
material
barrel polishing
workpiece
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CN 201580010935
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Chinese (zh)
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平塚阳郎
平塚阳一郎
末菅启朗
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新东工业株式会社
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/12Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
    • B24B31/14Abrading-bodies specially designed for tumbling apparatus, e.g. abrading-balls
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/02Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving rotary barrels

Abstract

In a first step, the surface of a polishing medium (40) is coated with a lubrication-property-imparting material (44) to form a non-wetting coating (44C) and impart lubrication properties to the surface of the medium (40). In a second step, the medium (40) and workpieces (W) are mixed inside a barrel vessel (12). In a third step, the medium (40) and the workpieces (W) are made to circulate inside the barrel vessel (12) to polish the workpieces (W).

Description

干式滚筒研磨法以及介质的制造方法 Dry barrel polishing method and a medium manufacturing method

技术领域 FIELD

[0001] 本发明的一个方面及实施方式涉及干式滚筒研磨法及适用于该方法的介质的制造方法。 [0001] An aspect and embodiment of the invention relates to a method for producing a dry roller milling method applicable to the method and medium.

背景技术 Background technique

[0002] 公知有如下滚筒研磨方法:通过将被加工物及介质装入滚筒研磨装置的研磨槽内并使它们混合流动,来利用介质对被加工物的表面进行研磨(例如,参照专利文献1)。 [0002] There is known a drum polishing method: mixing them flow to the surface of the workpiece is polished using a medium (e.g., refer to Patent Document 1 will be loaded in the drum by means of the workpiece and the polishing media and grinding vessel ). 这样的滚筒研磨方法存在向研磨槽内加水的湿式滚筒研磨方法以及不向研磨槽内加水的干式滚筒研磨方法。 The presence of water was added to the polishing bath wet barrel polishing method, and a method of dry barrel polishing without adding water to the milled groove such barrel polishing method. 在此,虽然湿式滚筒研磨方法由于被加工物的光泽精加工或被加工物的平滑精加工等这样目的而被广泛使用,但是存在在研磨后需要进行废水处理的课题。 Here, although the wet barrel polishing method since such object is finished smooth glossy finish of the workpiece and the workpiece or the like is widely used, but there is a problem of waste water treatment is required after milling. 因此,存在采用干式滚筒研磨方法的情况。 Thus, the presence of a dry roller milling process.

[0003] 专利文献1:日本特公昭44-23873号公报 [0003] Patent Document 1: Japanese Patent Publication No. Sho 44-23873 Patent Publication

[0004] 然而,干式滚筒研磨方法中,很难确保与湿式滚筒研磨方法同等或相近的精加工性能。 [0004] However, a dry roller milling process, it is difficult to ensure equal or similar to a wet barrel polishing method for finishing performance.

发明内容 SUMMARY

[0005] 本发明的一个方面的目的在于,获得在表面粗糙度或形状的调整等中能够确保与湿式滚筒研磨方法同等或相近的精加工性能的干式滚筒研磨方法及适用于该方法的介质的制造方法。 [0005] An aspect of the object of the present invention is to obtain a surface roughness can be adjusted to ensure that the shape or the like with a wet barrel polishing method of the same or similar properties dry finishing barrel polishing method and a medium suitable for this method the manufacturing methods.

[0006] 本发明的一个方面所涉及的干式滚筒研磨方法以干式的方式对被加工物进行滚筒研磨,其中,具有:第一工序,在该第一工序中,通过对上述滚筒研磨中所使用的介质的表面涂敷润滑性赋予材料来形成非湿润的涂敷部,对上述介质的表面赋予润滑性;第二工序, 在该第二工序中,使上述介质与被加工物在研磨槽内混合;以及,第三工序,在该第三工序中,通过使上述介质与上述被加工物在上述研磨槽内流动来对上述被加工物进行研磨。 [0006] The method of dry barrel polishing to an aspect of the present invention in a dry manner was subjected to barrel polishing the workpiece, wherein: a first step, the first step by grinding of the drum surface coating medium used lubricity imparting material to form a non-wetting coating portion, imparting lubricity to the surface of the medium; a second step, the second step, so that the medium and the workpiece in grinding mixing tank; and a third step, the third step, so that the above-described medium to grind the workpiece above the workpiece in the polishing vessel flow.

[0007] 根据上述结构,由于利用润滑性赋予材料来提高介质的流动性(滑动性能),因此能够抑制介质将被加工物的表面研磨得过于粗糙,从而被加工物的表面被加工为平滑的研磨面。 [0007] According to the above configuration, to improve the fluidity of the medium (sliding performance) using the lubricity imparting agent, it is possible to suppress the medium to the surface of the workpiece polished too rough, so that the surface of the workpiece is machined in a smooth abrasive surface. 在此所述的非湿润是指介质的表面因油脂等而不湿润的状态。 Herein refers to the non-wetting surface of the medium due to grease, etc. without wet state. 此外,本发明的一个方面包括分别独立进行上述第一工序、第二工序以及第三工序的情况、与同时进行至少两个以上的工序的情况这两种。 Furthermore, an aspect of the present invention comprises the first step are performed independently, where the second step and a third step of, simultaneously with the case where two or more of the at least two steps.

[0008] -个实施方式中,也可以构成为,在上述第三工序中,一边向上述研磨槽内供给上述润滑性赋予材料一边使上述介质与上述被加工物流动。 [0008] - described embodiment, may be configured, in the third step, while supplying the lubricating property imparting to the abrasive material tank while the above medium so that the flow of the workpiece.

[0009] 根据上述结构,即使因与被加工物的碰撞而润滑性赋予材料从介质上逐渐削落, 介质的表面也能够利用新被供给的润滑性赋予材料来被涂敷。 [0009] According to the above configuration, even if the collision with the workpiece while imparting lubricity progressively peeling off from the medium, it is possible to use the surface of the medium newly supplied lubricity imparting material is applied. 因此,抑制被加工物的表面过于粗糙的效果能够持续。 Thus, inhibition of the workpiece surface is too rough effect can be sustained. 此外,也欲对被加工物涂敷润滑性赋予材料。 Further, the workpiece to be coated for lubricity imparting material. 然而,由于被涂敷前或刚被涂敷的被加工物的表面被介质研磨,因此被加工物的表面被逐渐研磨。 However, due to the milling media just prior to being coated or coated surface of a workpiece, the surface of the workpiece thus gradually polished.

[0010] -个实施方式中,上述润滑性赋予材料也可以含有脂肪酸或脂肪酸盐。 [0010] - embodiment, the above-described slipping material may also contain a fatty acid or fatty acid salt.

[0011] 根据上述结构,由于润滑性赋予材料含有脂肪酸或脂肪酸盐,因此能够实现低成本并且对介质的表面赋予润滑性。 [0011] According to the above configuration, since the lubricity imparting material containing a fatty acid or fatty acid salts, can be realized at low cost and imparting lubricity to the surface of the medium. 特别是在脂肪酸或脂肪酸盐中含有脂肪酸钠的情况下, 能够以低成本赋予良好的润滑性。 In particular, when fat-containing sodium salt of the fatty acid or fatty acid, at low cost impart good lubricity. 另外,在脂肪酸钠作为润滑性赋予材料的主要成分的情况下,由于被加工物上几乎不附着油脂,因此能够无需洗净工序或简化洗净工序。 Further, in a case where the main component is fatty acid sodium as a lubricity imparting material, since the oil is hardly adhered on the workpiece, without washing step can be simplified or washing step.

[0012] -个实施方式中,也可以构成为,上述介质是无机质的介质,在上述介质的表面设置有供上述润滑性赋予材料进入并对上述润滑性赋予材料进行保持的保持部。 [0012] - described embodiment, may be arranged such that the inorganic medium is a medium, provided on the surface of the medium into which the material enters and lubricity imparting lubricity imparting the above-described material holding part.

[0013] 无机质的介质(烧成介质、烧结介质)与有机质的介质(树脂介质)相比价格低廉。 [0013] inorganic medium (medium firing, the sintered media) low compared to vehicle (resin medium) organic price. 然而,由于无机质的介质与有机质的介质相比润滑性较低,因此对于被加工物的冲击力更强。 However, since the medium of inorganic and organic matter in the medium as compared to a lower lubricity, and therefore it is a stronger impact force for the workpiece. 结果,无法得到与湿式滚筒研磨的情况同等的研磨精度。 As a result, the case can not be obtained with the same wet-grinding barrel polishing accuracy. 在此,根据上述结构,由于介质在表面具备供润滑性赋予材料进入并对其进行保持的保持部,因此润滑性赋予材料相对于介质的附着力增强。 Here, the above-described configuration, since the surface of the medium includes a material for slipping them into and holding part, thus imparting the lubricity enhancing the adhesion with respect to the medium. 由此,与不具备保持部的情况相比,能够更长久地持续对被加工物的表面过于粗糙进行抑制的效果。 Accordingly, the holding portion of the case does not have compared to the effect duration is too rough surface of the workpiece can be suppressed more long.

[0014] -个实施方式中,上述保持部也可以通过使上述介质成为多孔质体而形成。 [0014] - described embodiment, the holding portion may be formed by the medium become porous body.

[0015] 如上述结构那样,若使介质为多孔质则介质的比重变低,因此介质相对于被加工物的冲击力下降。 [0015] As in the above arrangement, when the porous medium is the medium of low specific gravity, and therefore the medium is lowered with respect to impact the workpiece. 其结果,能够抑制被加工物的表面过于粗糙。 As a result, the workpiece can be suppressed surface is too rough. 因此,通过润滑性赋予材料的效果与多孔质的效果的协同效果,能够确保与湿式滚筒研磨方法同等或相近的精加工性能。 Thus, the synergistic effect of the effect of imparting lubricating properties by the effect of the porous, can be secured with the same or similar wet process finishing barrel polishing performance. 此外,在上述的多孔质的介质中的气泡的形式也可以是独立气泡构造或连续气泡构造中的任意一种。 In addition, the form of bubbles in the above-described porous medium may be any one of closed cell or open cell structure construction.

[0016] 一个实施方式中,上述介质也可以是至少含有60~80质量%的氧化铝(Al2〇3)、10 ~30质量%的二氧化硅(Si02)、4~8质量%的氧化锆(Zr02)、l~3质量%的氧化钙(CaO)、以及1~4质量%的氧化镁(MgO)的烧结体。 [0016] In one embodiment, the medium may contain at least 60 to 80 mass% of aluminum oxide (Al2〇3), 10 to 30 mass% of silica (Si02), 4 ~ 8 mass% of zirconium oxide (Zr02), l ~ 3% of calcium oxide (CaO), and 1 to 4% by mass of magnesia (MgO) sintered body.

[0017]多孔质的介质在滚筒研磨中以细孔为基点产生裂缝等,从而与非多孔质的介质相比强度较低。 [0017] The porous medium pore anchored to barrel polishing cracks, etc., as compared with a non-porous low dielectric strength. 在上述结构中,通过含有1~4质量%的氧化镁,能够防止作为介质整体的强度过于下降。 In the above structure, by containing 1 to 4% by mass of magnesium oxide, strength of the medium can be prevented as a whole is too lowered. 另外,由于该结构的介质是烧结介质,因此与烧成介质相比寿命较长。 Further, since the medium is the structure of the sintered media, compared with baking medium longer life.

[0018] 本发明的另一方面所涉及的干式滚筒研磨方法所使用的介质的制造方法是用于制造上述介质的方法,包括:混匀工序,在该混匀工序中,对研磨颗粒、粘合剂、氧化镁以及消失材料粉末进行混匀;成型工序,在该成型工序中,将在上述混匀工序中混匀而得的混匀物成型为规定的形状;以及烧结工序,在该烧结工序中,对在上述成型工序中成型出的成型体进行烧结而形成烧结体,并且使上述消失材料粉末消失,在上述烧结体的表面形成上述保持部。 [0018] The method for producing a dry roller milling medium to another aspect of the method of the present invention is a method used for manufacturing the medium, comprising: a mixing step of mixing in this step, the abrasive particles, binder, magnesium oxide and kneading powder materials disappeared; molding step, the molding step, the mixed obtained in the above kneading step, kneading was formed into a predetermined shape; and a sintering step, in which in the sintering step, the molded in said molding step to form the sintered molded body is a sintered body, and the above-mentioned material powder disappear disappeared, the holding portion is formed on the surface of the sintered body. 另外,在将上述研磨颗粒、上述粘合剂、上述氧化镁以及上述消失材料粉末的合计设为100质量%的情况下,上述消失材料粉末的添加量是1~40质量%的量。 Further, in a case where the above-described abrasive particles, the binder, the above-described magnesium oxide, and said erasure material powder is 100 mass% of the total added amount of the material powder disappear an amount of 1 to 40% by mass.

[0019] 通过根据上述结构使介质整体形成为多孔质,能够得到利用细孔在表面形成有保持部的烧结体的介质。 [0019] By the above-described configuration is formed integrally medium is porous, the pores are formed can be obtained by using the sintered body has a medium holding portion on the surface. 此外,也可以在混匀工序中,根据需要而添加水。 Furthermore, in the mixing step may be, adding water as needed.

[0020] -个实施方式中,上述消失材料粉末也可以是氢氧化铝粉末。 [0020] - embodiment, the material powder described above may disappear aluminum hydroxide powder.

[0021] 根据上述结构,氢氧化铝在烧结工序中脱水分解。 [0021] According to the above configuration, dehydration decomposition of aluminum hydroxide in the sintering step. 其结果,氢氧化铝转化为氧化铝并作为固体物从而体积减少,并且氢氧基成为水蒸气而挥发。 As a result, the conversion of alumina and aluminum hydroxide as to reduce the volume of solids, a hydroxyl group into a steam and volatilized. 由于氢氧化铝粉末分散于成型体,所以在上述烧结工序中形成多孔质体。 Since aluminum hydroxide powder is dispersed in the molded body, the porous body is formed in the above sintering step.

[0022] -个实施方式中,也可以构成为,在上述混匀工序中,在由上述研磨颗粒、上述粘合剂、上述氧化镁以及上述消失材料粉末构成的混合材料中添加氧化猛(MnO)和氧化铁(Fe203)中的至少一种,在将上述混合材料、与所添加的该至少一种(即,在添加了氧化锰和氧化铁中任意一种的情况下是其中一种,在添加了氧化锰和氧化铁这两种的情况下是这两种)的合计设为1〇〇质量%的情况下,该至少一种(即,在添加了氧化锰和氧化铁中任意一种的情况下是其中一种,在添加了氧化锰和氧化铁这两种的情况下是这两种)的含量为5质量%以下。 [0022] - described embodiment, may be configured, in the kneading step, the oxide is added to the mixed material by the fierce abrasive particles, the binder, the above-described magnesium oxide and said material powder consisting of disappearance (MnO ) and at least one iron oxide (Fe203) is, in the above mixed material, with the added at least one (i.e., one is added in the case of the manganese oxide and iron oxide in any one, are both) to the total of the 1〇〇 mass% in the iron oxide and manganese oxide is added in both cases, the at least one (i.e., addition of any one of manganese oxide and iron oxide the case is one species, the addition of these two cases the manganese oxide and iron oxide are two) in an amount of 5% by mass or less.

[0023] 根据上述结构,在烧结工序中,所添加的该至少一种作为烧结助剂而有效地发挥作用。 [0023] According to the above configuration, in the sintering step, the at least one added as a sintering aid to function effectively.

[0024] 如上所述,根据本发明的各种方面,具有能够确保与湿式滚筒研磨方法同等或相近的精加工性能这一优异的效果。 [0024] As described above, in accordance with various aspects of the invention, and can be secured with a wet barrel polishing method for finishing properties equal to or close to this excellent effect.

附图说明 BRIEF DESCRIPTION

[0025] 图1是示出适用于一个实施方式所涉及的干式滚筒研磨方法的干式滚筒研磨装置的示意结构图。 [0025] FIG. 1 is a diagram illustrating a schematic configuration diagram of a dry barrel polishing apparatus suitable for use in a method of dry barrel polishing in the embodiment of the invention.

[0026] 图2是将介质的表面侧放大而示意性地示出的剖视图。 [0026] FIG. 2 is a schematic and cross-sectional view showing an enlarged surface side of the medium.

[0027] 图3是示出在介质的表面涂敷润滑性赋予材料的分析结果。 [0027] FIG. 3 is a diagram illustrating the analysis results providing material is coated on the surface of lubricating medium. 图3(A)示出光谱分析的结果,图3(B)示出面分析的结果。 FIG 3 (A) shows the results of spectral analysis, FIG. 3 (B) shows the analysis results come out.

具体实施方式 detailed description

[0028] 对本实施方式所涉及的干式滚筒研磨方法及介质的制造方法进行说明。 [0028] The method for producing a dry roller milling method and medium of the present embodiment will be described. 图1中通过示意结构图而示出了适用于本实施方式所涉及的干式滚筒研磨方法的干式滚筒研磨装置10。 In FIG. 1 by a schematic configuration diagram is shown for a dry barrel polishing apparatus suitable for dry barrel polishing method according to the present embodiment is 10. 首先,对该干式滚筒研磨装置10进行概述。 First, the dry barrel polishing apparatus 10 is outlined.

[0029](干式滚筒研磨装置的结构) [0029] (Structure dry barrel polishing apparatus)

[0030] 干式滚筒研磨装置10(以下,仅称为"滚筒研磨装置10"。)具备作为研磨槽的滚筒槽12。 [0030] dry barrel polishing apparatus 10 (hereinafter, simply referred to as "barrel polishing apparatus 10".) Provided as a grinding roller grooves 12 of the groove. 滚筒槽12形成为容器状并固定于底座(省略图示)。 Drum grooves 12 formed into a container shape and is fixed to the base (not shown). 在滚筒槽12的内侧表面固定有内衬14。 Groove 12 on the inside surface of the drum 14 fixed liner. 在该滚筒槽12装入研磨用的介质40以及被加工物W等(它们统称为"块状体")。 40 and the workpiece W and the like (collectively referred to as "lump") groove of the drum 12 charged with the polishing media. 此外, 在图中示意性地示出了介质40及被加工物W。 Further, in FIG schematically illustrates medium 40 and the workpiece W.

[0031] 吸尘管20的一端与滚筒槽12的底部连结。 [0031] One end of the suction tube connected to the bottom 12 of the groove 20 of the drum. 吸尘管20的另一端与吸尘器16的吸入部侧连结。 The other end of the cleaner suction pipe 20 the suction side 16 of the connecting portion. 吸尘器16具备吸入吸尘管20内的空气的风扇(省略图示)以及用于不使尘埃排出的过滤器(省略图示)。 Vacuum cleaner 16 includes a suction fan 20 in the air (not shown) and is used without a filter (not shown) of the dust discharge pipe.

[0032]在滚筒槽12的上方侧,根据需要而配置吸尘罩18。 [0032] In the upper side of the drum grooves 12, needed dust cover 18 is arranged. 吸尘管20A的一端与吸尘罩18连结。 One end of the suction tube 18 connected to the dust collecting cup 20A. 吸尘管20A的另一端与吸尘管20的另一端连接。 The other end of the suction pipe 20A of the suction pipe 20 is connected to the other end.

[0033]另一方面,在滚筒槽12的底部上表面侧配置有转盘22。 [0033] On the other hand, on the bottom of the groove of the drum 12 arranged on the side surface of the turntable 22. 转盘22以其中央部作为轴安装部而固定于旋转轴24。 Rotary shaft 22 as the mounting portion in its center portion is fixed to the rotary shaft 24. 另外,在滚筒槽12的底部设置有轴承部26。 Further, the drum is provided at the bottom of the groove 12 of the bearing portion 26. 固定于转盘22的旋转轴24能够旋转地轴支承于滚筒槽12的轴承部26。 The turntable 22 is fixed to the rotating shaft 24 is rotatably supported by the drum shaft bearing portion 2612 of the groove. 并且,旋转轴24的下端在滚筒槽12的底部下方侧与驱动力传递机构28连接。 Further, the lower end of the rotary shaft 24 is connected to the bottom and the lower side of the drum driving force transmission mechanism 12 in the groove 28.

[0034] 驱动力传递机构28包括一对滑轮30、32以及卷挂于一对滑轮30、32的V型带34。 [0034] The drive force transmission mechanism 28 includes a pair of pulleys 30 and 32 and wound around the pair of pulleys 30, 32 with V-34. 上述的旋转轴24同轴地固定于一个滑轮30的轴心部。 The above-described rotation shaft 24 is coaxially fixed to the axial portion 30 of a pulley. 另外,带减速机的马达36的输出轴同轴地固定于另一个滑轮32的轴心部。 Further, the output shaft of the motor with reduction gear 36 is coaxially fixed to the axial portion 32 of the other pulley.

[0035]如上所述,滚筒研磨装置10通过利用马达36的驱动使转盘22旋转,来使块状体在滚筒槽12内流动。 [0035] As described above, by barrel polishing apparatus 10 driven by a motor 36 so that the turntable 22 is rotated to cause massive fluid flow groove 12 in the drum. 这样的滚筒研磨方式被称为流动式滚筒。 This approach is called the flow barrel polishing drum.

[0036](介质) [0036] (medium)

[0037]接下来,对被装入滚筒槽12的介质40进行概述。 [0037] Next, the medium is loaded into the drum 40 of the groove 12 an overview. 介质40是根据研磨的目的而成为从几毫米至几十毫米的球形、三角锤形、三棱柱形、圆柱形、斜向切割圆柱而成的形状、或者四棱柱形等任意形状的小颗粒体。 The object of the medium 40 is polished to become an arbitrary shape from a few millimeters to tens of millimeters spherical, triangular hammer, triangular prism, cylinder, cut obliquely from a cylindrical shape, or a rectangular column like small granules . 作为一个例子,本实施方式的介质40是高度6mm的三棱柱形状。 As one example, medium 40 of this embodiment is highly 6mm triangular prism shape. 介质40在滚筒槽12中与被加工物W-同流动,利用在介质40与被加工物W之间产生的摩擦力来对被加工物W进行研磨。 Medium 40 and the medium 40 is a frictional force generated between the workpiece W to the workpiece W on the workpiece with the polishing W- with the flow, using the groove 12 in the drum.

[0038]图2中示出了将介质40的表面侧扩大的示意性的剖视图。 In [0038] FIG. 2 shows a schematic cross-sectional view of a surface side of the medium 40 will be enlarged. 图2所示的研磨用介质40 是无机质的介质。 FIG polishing medium 240 is shown in inorganic media. 作为无机质的介质,例如能够列举出对混勾研磨颗粒与粘土质材料而成型的介质进行烧成而得的烧成体的介质(烧成介质)、和通过研磨颗粒的烧结而形成的烧结体的介质(烧结介质)。 The inorganic medium, for example, include a mixed dielectric medium on the abrasive particles to clay hook material is molded fired body obtained by firing (baking medium), and is formed by sintering the sintered abrasive particles dielectric body (sintered media). 一般而言,无机质的介质与有机质的介质(混合树脂与磨料而成型的树脂介质)相比成本低。 In general, the media (abrasive molded resin is mixed with a resin medium) organic medium as compared to the inorganic low cost. 然而,对于无机质的介质而言,由于其表面坚硬,对被加工物W产生的冲击力过强,因此通常很难实现与湿式滚筒研磨的情况同等的研磨。 However, for the inorganic media, because of its surface is hard, too strong impact force is generated in the workpiece W, it is often difficult to achieve the same with the case of wet grinding barrel polishing. 另一方面,若使介质40为多孔质体(整体为多孔质),则因细孔而介质40的比重降低,因此介质40对被加工物W产生的碰撞能量降低。 On the other hand, when the medium 40 is a porous body (porous as a whole), due to the pores 40 and reduce the proportion of the medium, the medium thus collision energy generated workpiece W 40 to reduce. 其结果,由于介质40对被加工物W产生的冲击力减小,因此能够抑制被加工物W的表面过于粗糙。 As a result, since the medium 40 to reduce the impact force pairs are generated in the workpiece W can be suppressed surface of the workpiece W is too rough. 此外,也能够期待利用形成于介质40的表面附近的细孔产生的缓冲效果。 Further, the cushioning effect can be expected by using the medium 40 is formed in the vicinity of the surface pores produced. 另外,无机质的介质中,烧结介质与烧成介质相比,损耗率更低从而寿命更长。 Further, the inorganic medium, the medium compared to firing the sintered dielectric loss rate is lower and thus longer life. 在本实施方式中选择烧结介质。 In the present embodiment of the sintered media selection mode.

[0039]另外,在介质40表面形成有供后述的润滑性赋予材料44进入并对其进行保持的凹状保持部42。 [0039] In addition, a later-described lubrication of the surface of the medium 40 into the material 44 and impart its concave holding portion 42 holding. 通过该保持部42,相对于介质40牢固地保持润滑性赋予材料44。 By this holding portion 42, the medium 40 is firmly held with respect to the lubricity imparting material 44. 即,润滑性赋予材料44相对于介质40的附着力增加。 That is, the lubricity imparting material 44 to increase the adhesion of the medium 40. 保持部42可以通过设置沟槽来形成,也可以通过设置凹坑来形成,或者还可以通过设置凹凸来形成。 Holding portion 42 may be formed by providing a groove may be formed by providing the pits, or may also be formed by providing irregularities. 保持部42由通过作为多孔质体的介质40 的细孔而形成于介质40的表面的凹凸来形成。 Holding portion 42 is formed by irregularities on the surface of the medium 40 is formed through the pores of the porous body as a medium 40. 这样,通过使介质40为多孔质体,能够得到抑制上述的冲击力的效果与牢靠地保持润滑性赋予材料44的效果这两种效果。 Thus, the medium 40 by a porous body, it is possible to obtain the above-described effect of suppressing the impact force securely held slipping effect of the material 44 of both effects. 因此,能够防止被加工物W的表面过于粗糙。 Accordingly, it is possible to prevent the surface of the workpiece W is too rough.

[0040] 润滑性赋予材料44几乎不含油脂。 [0040] 44 lubricity imparting almost no fat. 例如,润滑性赋予材料44的油脂的含有率也可以是0.5质量%以下。 For example, the lubricity imparting fat content of 44 may be 0.5 mass% or less. 由于润滑性赋予材料44实际上不含油脂,从而当在介质40的表面涂敷了润滑性赋予材料44的情况下,不使介质40表面湿润就能够对介质40表面赋予润滑性。 Since slipping material 44 practically free of grease, so that when the coated surface of the medium 40 lubricity imparting material in the case 44, the medium 40 without wetting the surface lubricity can be imparted to the surface of the medium 40. 作为一个例子,本实施方式的润滑性赋予材料44由脂肪酸钠与若干不可避免杂质构成。 As an example, the present embodiment lubricity imparting material 44 is composed of a number of fatty acid sodium and unavoidable impurities. 作为脂肪酸钠中的脂肪酸,例如可以列举出络酸、己酸、辛酸、癸酸、十二烷酸、十四烷酸、十六烷酸、十八烷酸、油酸、亚油酸、亚麻酸、或蓖麻油酸等。 As fatty acid sodium fatty acid, and examples include a complex acid, caproic acid, caprylic acid, capric acid, lauric acid, myristic acid, palmitic acid, stearic acid, oleic acid, linoleic acid, ricinoleic acid, or the like. 上述脂肪酸可以是单一种类的脂肪酸, 也可以是含有两种以上脂肪酸的混合物。 The fatty acid may be a single type of fatty acid, it may be a mixture of two or more fatty acids containing.

[0041] 另外,润滑性赋予材料44也可以代替脂肪酸钠、或者与脂肪酸钠一并含有脂肪酸。 [0041] Further, the lubricity imparting material 44 may be used instead of sodium fat or fat together with sodium containing a fatty acid. 作为该脂肪酸,例如可以列举出十二烷酸或油酸等。 Examples of the fatty acid, etc. Examples include dodecanoic acid or oleic acid. 润滑性赋予材料44也可以代替脂肪酸钠、或者与脂肪酸钠一并含有例如脂肪酸镁、脂肪酸钙、或脂肪酸钾等其他的脂肪酸金属盐。 Imparting lubricity material 44 may be used instead of sodium fat or fat together with sodium containing a fatty acid such as other salts of fatty acids, magnesium, calcium fatty acid, fatty acid potassium salt, or the like.

[0042] 介质40至少含有60~80质量%的氧化铝、10~30质量%的二氧化硅、4~8质量% 的氧化锆、以及1~3质量%的氧化钙,此外也可含有若干的不可避免杂质(例如、K20、Ti02、 Na20、Hf02或者P2〇3等)。 [0042] 40 medium containing at least 60 to 80 mass% of alumina, 10 to 30 mass% of silica, 4 to 8 mass% of zirconium oxide, and 1 to 3% of calcium oxide, in addition, may contain several unavoidable impurities (e.g., K20, Ti02, Na20, Hf02 P2〇3 or the like). 不可避免杂质也可在3%以下(或2%以下)。 Unavoidable impurities may be 3% or less (2% or less).

[0043]然而,由于介质40整体为多孔质,因此介质40整体的强度下降。 [0043] However, since the porous medium 40 as a whole, the entire medium 40 so strength is lowered. 例如,有时因滚筒研磨的冲击而以细孔为基点在介质40出现裂纹或缺口。 For example, the barrel polishing may be due to the impact of the starting point of pores in the crack or gap 40 medium. 因此,通过使其还含有氧化镁作为强化材料,从而即使介质40为多孔质,也能够使介质40的强度提高为在滚筒研磨中在介质40不会出现裂纹或缺口的程度。 Thus, by making further containing magnesia as a reinforcing material, even if a porous medium 40, it is possible to make the strength of the medium 40 is increased in the degree of polishing the drum does not occur in cracking or chipping of the medium 40. 氧化镁的含量可以是1~4质量% (或2~3质量%),在这种情况下,通过实验能够确认得到了上述的效果。 The magnesium content may be from 1 to 4 mass% (or 2-3% by mass), in this case, it can be confirmed experimentally to obtain the above effect.

[0044](介质的制造方法) [0044] (Method for producing medium)

[0045]在此,对用于制造介质40的方法进行说明(介质40的制造方法)。 [0045] Here, a method for manufacturing the medium 40 will be described below (a method for producing medium 40).

[0046] 在介质40的制造方法中,首先进行混匀工序。 [0046] In the manufacturing method of the medium 40, first kneading step. 在该混匀工序中,将研磨颗粒、粘合剂、作为强化材料的氧化镁以及作为消失材料粉末的氢氧化铝粉末以成为规定的含量的方式进行称量,之后进行混匀(下文中将这些材料统称为"混合材料a")。 In the kneading step, the abrasive particles, a binder, a reinforcing material as well as magnesium aluminum hydroxide powder material powder disappear in a manner so as to be a predetermined content were weighed, followed by kneading (hereinafter these materials are collectively referred to as "mixed material a"). 混匀时也可以根据需要而添加水。 Water can also be added as needed during mixing. 氢氧化铝粉末的添加量是在混合材料a为100质量%时的1~40质量%的量。 The addition amount of aluminum hydroxide powder is a hybrid material in an amount of 100 to 1% by mass to 40% by mass.

[0047] 作为研磨颗粒,可以使用氧化铝系研磨颗粒(铝氧粉)、碳化硅系研磨颗粒(金刚砂)、错刚玉研磨颗粒、金刚石研磨颗粒、或CBN研磨颗粒等。 [0047] As the abrasive particles, alumina-based abrasive particles (aluminum oxide powder), silicon carbide abrasive particles (diamond), mistaken corundum abrasive particles, diamond abrasive grains or CBN abrasive particles. 在作为研磨颗粒而使用了白色氧化铝系研磨颗粒(WA)的情况下,能够以低价格得到高的研磨力,并且不会向被加工物转印研磨颗粒的颜色,因此优选。 In the case of using white alumina-based abrasive particles (WA) as the abrasive particles, it is possible to obtain a high polishing force at a low price, and does not transfer to the color of the workpiece abrasive particles are therefore preferred. 另外,研磨颗粒的平均粒径能够根据研磨的目的而适当地选择。 Further, the average particle size of the abrasive particles can be appropriately selected depending on the purpose of polishing. 例如,在以细微研磨为目的的情况下,从1~40mi的范围选择。 For example, in the case of fine polishing purposes, selected from the range of 1 ~ 40mi. 在此,若研磨颗粒的粒径过小则介质的研磨力降低。 Here, when the particle diameter of the abrasive particles is too small grinding force of the medium is lowered. ,另一方面,若研磨颗粒的粒径过大则粒子彼此之间的结合力弱而介质的强度低。 On the other hand, when the particle diameter of the abrasive particles is too large, binding force between particles to each other and a low dielectric strength.

[0048] 粘合剂为是用于在烧结时使研磨颗粒彼此结合的结合材料。 [0048] The binder is used to bind the abrasive particles upon sintering of the bonding material to each other. 粘合剂能够根据研磨颗粒的种类或烧结温度等而适当地选择。 Adhesive can be appropriately selected depending on the type of abrasive particles or sintering temperature of the like. 在本实施方式中,粘合剂至少包含二氧化娃、氧化锆以及氧化钙。 In the present embodiment, the adhesive comprises at least baby oxide, zirconium oxide and calcium oxide. 此外,在粘合剂含有氧化镁的情况下,该氧化镁能够作为强化材料而被利用。 Further, in the case where the adhesive contains magnesium oxide, magnesium oxide capable of being utilized as a reinforcing material.

[0049] 另外,在本实施方式的混匀工序中,作为一例,在混合材料a中添加烧结助剂。 [0049] Further, in the mixing step of the present embodiment, as an example, to add a sintering aid in the mixed material. 烧结助剂可以是氧化锰及氧化铁中的至少一种(即,任意一种或两种)。 Sintering aid may be manganese oxide and iron oxide of at least one (i.e., either or both). 烧结助剂的添加量在混合材料a与烧结助剂的合计为100质量%时为5质量%以下(在作为烧结助剂而使用了多种材料的情况下,它们的合计为5质量%以下)的范围。 The addition amount of sintering aid material is mixed with a sintering aid when the total of 100% by mass of 5 mass% (in the case of using a plurality of materials as a sintering aid, and the total of 5 mass% or less ) range.

[0050] 在接下来的成型工序中,将在混匀工序中混匀而得的混匀物投入挤压成型机并使之成型为规定的形状(在本实施方式中为三棱柱形状)。 [0050] In the next molding step, the mixing step is obtained by mixing in the kneading was put in an extrusion molding machine and molded into the predetermined shape (in the present embodiment is a triangular prism shape).

[0051] 在接下来的烧结工序中,将在成型工序中成型出的成型体在干燥的状态下装入耐热容器并在炉内以规定的温度烧结规定的时间。 [0051] In the next step of sintering, the molded out of the molded body in the molding step heat-resistant container was charged in a dry state in a furnace and sintered at a predetermined temperature in a predetermined time. 在该烧结工序中,氢氧化铝脱水分解。 In the sintering step, dehydration decomposition of aluminum hydroxide. 其结果,转化为氧化铝而作为固体物体积减小,并且氢氧基变成水蒸气而挥发。 As a result, conversion of alumina as a solid volume is reduced, and a hydroxyl group volatilized into steam. 即,在该工序中使氢氧化铝消失。 That is, in this step manipulation aluminum hydroxide disappears. 通过上述的混匀,使氢氧化铝均匀地分散于混合材料a。 By the above-described mixing, aluminum hydroxide mixed material uniformly dispersed in a. 因此,通过该烧结工序来形成独立气泡结构的多孔质体,从而得到在表面形成有保持部42的烧结体的介质40 〇 Thus, a porous body to form a closed cell structure by the sintering process, whereby the medium 42 is formed on the surface of the sintered body holding portion 40 billion

[0052]此外,若氢氧化铝粉末的含有比率过高,则寿命会缩短,因此氢氧化铝粉末的含有比率也可以如上述那样设定。 [0052] Further, when the content ratio of the aluminum hydroxide powder is too high, the life will be shortened, and therefore the content ratio of aluminum hydroxide powder may be set as described above. 另外,在该烧结工序中,在混匀工序中添加的氧化锰及氧化铁中的至少一种作为烧结助剂而有效地发挥作用。 Further, in the sintering step, the manganese oxide and iron oxide added in the kneading step, at least one of a sintering aid as effectively function.

[0053](干式滚筒研磨方法) [0053] (dry barrel polishing method)

[0054]接下来,对使用了介质40的干式滚筒研磨方法进行说明。 [0054] Next, using dry barrel polishing medium 40 will be described methods.

[0055]首先,在图1所示的滚筒研磨装置10的滚筒槽12装入介质40以及润滑性赋予材料(在图1中省略图示)。 [0055] First, the drum groove barrel polishing apparatus shown in FIG. 10 and 12 of the medium 40 loaded lubricity imparting material (not shown in FIG. 1) in FIG. 接下来,使与滚筒研磨装置10连结的吸尘器16动作。 Subsequently, the cleaner 10 and the barrel polishing apparatus 16 of the coupling operation.

[0056]接下来,使滚筒研磨装置10动作,并且使介质40与润滑性赋予材料(在图1中省略图示)在滚筒槽12内流动。 [0056] Next, the operation of barrel polishing apparatus 10, and the medium 40 and slipping material (not shown in FIG. 1) flows in the grooves 12 of the drum. 由此,如图2所示,在研磨用介质40的表面涂敷几乎不含有油脂的润滑性赋予材料44。 Accordingly, as shown in Figure 2, applied to the surface in the polishing medium 40 hardly contain lubricating oil imparting material 44. 具体而言,在介质40的表面形成非湿润的涂敷部44C对介质40表面赋予润滑性(第一工序)。 Specifically, a portion of the non-wetting coating on the surface of the medium 40 to 44C lubricity imparting surface of the medium 40 (the first step). 作为一例,润滑性赋予材料44通过使5~SOOwii左右(然而,并不限定于该尺寸)粒径的粉末状的材料与介质40混合并流动,而涂敷于介质40的表面。 As an example, the lubricating property imparting material 44 by about 5 ~ SOOwii (however, not limited to this size) 40 mixed powdered material with the particle diameter and the flow medium, and applied to the surface of the medium 40. 在本实施方式中,滑性赋予材料44的主要成分例如为脂肪酸钠。 In the present embodiment, the main component imparting slipperiness material 44 is, for example, sodium fat. 因此,能够抑制润滑性赋予材料44的成本并且对介质40的表面赋予润滑性。 Accordingly, it is possible to suppress the cost of material 44 to impart lubricity and impart lubricity to the surface of the medium 40.

[0057]另外,润滑性赋予材料44例如也可以通过使立方体状(作为一例为10mm X 10mm X 10mm~70mm X 70mm X 70mm的立方体状)的材料与介质40混合并流动,而涂敷于介质40的表面。 40 material is mixed with the medium [0057] Further, to impart lubricity material 44 may be, for example, by a cube-shaped (as one example, 10mm X 10mm X 10mm ~ 70mm X 70mm X 70mm cube shape) and flows, but applied to medium surface 40. 另外,润滑性赋予材料44例如也可以通过使液体状(作为一例为浓度10vo 1 % )的材料与介质40混合流动并使其固化,而涂敷于介质40的表面。 Further, imparting lubricity material 44 may be, for example, by liquid (as one example, the concentration 10vo 1%) medium material 40 and curing the mixed flow, and applied to the surface of the medium 40. 在使液体状的材料作为润滑性赋予材料44混合而进行涂敷的情况下,具有容易进行定量添加难以被吸尘器16(参照图1)吸引的优点,而也能够适用于针对离心式滚筒的定量添加。 A case where a mixed material 44 to impart lubricity as in the liquid-like material is coated, with the advantage of easy dosing is difficult to be attracted to the cleaner 16 (refer to FIG. 1), but may also be applied to a centrifugal drum for quantitative Add to. 此外,在投入液体状的润滑性赋予材料44的情况下,投入不使介质40表面湿润的程度的量。 Further, in the case where the input lubricity imparting liquid material 44, the amount of investment is not wet the surface of the medium 40 so that the extent.

[0058]在使图1所示的滚筒研磨装置10动作后经过了规定时间之后,停止滚筒研磨装置10的动作。 After [0058] In the drum polishing apparatus shown in FIG 10 is operated after a predetermined time, stopping the operation of apparatus 10 of barrel polishing. 接下来,向滚筒研磨装置10的滚筒槽12内装入被加工物W,并使介质40与被加工物W在滚筒槽12内混合(第二工序)。 Subsequently, the workpiece W is loaded into the drum slot 10 in the barrel polishing apparatus 12, and the medium 40 and the workpiece W in the drum mixing tank 12 (second step).

[0059] 接下来,使滚筒研磨装置10动作,使表面被润滑性赋予材料44(参照图2)涂敷了的介质40与被加工物W在滚筒槽12内流动。 [0059] Next, the operation of barrel polishing apparatus 10, the surface to be slipping material 44 (see FIG. 2) coated with a dielectric material 40 and the workpiece W to flow in the drum grooves 12. 通过利用该流动使介质40以滑动的方式与被加工物W接触,来对被加工物W进行研磨(第三工序)。 By utilizing the flow of the medium 40 sliding in contact with the workpiece W, the polishing is performed (third step) of the workpiece W. 此时,由于利用润滑性赋予材料44来提高介质40的流动性(滑动性能),因此不会对被加工物W赋予由介质40的碰撞所产生的过度的研磨负荷。 At this time, since the lubricating property imparting material 44 to improve the fluidity of the medium 40 (sliding performance), it will not be imparted to the workpiece W by the grinding media to excessive load generated by the collision 40. 另外,由于利用介质40的细孔来缓冲与被加工物W碰撞时的冲击力,因此不会对被加工物W赋予由介质40的碰撞所产生的过度的研磨力。 Further, since the buffer 40 with the use of the medium pore impact force of collision when the workpiece W, it will not be imparted to an excessive force by the grinding medium 40 generated by the collision of the workpiece W. 因此,能够抑制介质40使被加工物W 的表面过于粗糙,能够进行减小被加工物W的表面粗糙度的研磨。 Thus, the medium 40 can be suppressed so that the surface of the workpiece W is too rough, the surface roughness can be polished to reduce the work W. 即,被加工物W的表面被加工为平滑的研磨面。 That is, the surface of the workpiece W is processed into a smooth polished surface.

[0060] 另外,如图2所示,由于多孔质体的介质40在表面整体具备保持部42,因此润滑性赋予材料44相对于介质40的附着力增强。 [0060] Further, as shown in Figure 2, since the dielectric of the porous body 40 integrally includes a holding portion 42 on the surface 44 so slipping relative to the material of the adhesion enhancing medium 40. 由此,介质40与不具备保持部42的情况相比能够更长时间地保持润滑性赋予材料44,因此能够更长久地持续对被加工物W的表面过于粗糙进行抑制的效果。 Thus, the medium does not have the holder portion 40 and the case 42 can be maintained for a longer time compared to the lubricity imparting material 44, it is possible to continuously longer to be too rough surface of the workpiece W is suppressing effect. 因此,能够充分发挥润滑性赋予材料44的性能。 Accordingly, it is possible maximize the performance of the lubricity imparting member 44.

[00611另外,在该工序(第三工序)中,通过使润滑性赋予材料44的供给装置(省略图示) 动作,一边向滚筒槽12内供给润滑性赋予材料44 一边使介质40与被加工物W流动。 [00611 Further, in the step (third step) by feeding means (not shown) is actuated to impart the lubricating property of the material 44, while imparting material 44 into the groove 12 of the drum while supplying lubrication of the medium 40 and the workpiece W was flowing. 因此,即使因与加工物W的碰撞而润滑性赋予材料44从介质40逐渐削落,也能够向介质40的表面涂敷新供给的润滑性赋予材料44。 Thus, even if the collision with the workpiece W while slipping material 44 is gradually scraped off from the medium 40, it is possible to impart lubricity material 44 newly supplied coating the surface of the medium 40. 因此,抑制被加工物W表面过于粗糙的效果持续。 Thus, inhibition of the workpiece W is continuously too rough surface effect. 此外,也欲对被加工物W涂敷润滑性赋予材料44。 Further, the workpiece W to be applied to the lubricity imparting material 44. 然而,由于被涂敷前或刚被涂敷的被加工物W的表面被介质40研磨,因此加工物W的表面被逐渐研磨。 However, since just before being coated or coated surface of the workpiece W is polished medium 40, the surface of the workpiece W is gradually polished.

[0062]在使滚筒研磨装置10动作后经过了规定时间之后,停止润滑性赋予材料44的供给装置的动作,然后停止滚筒研磨装置10的动作,进而然后停止吸尘器16的动作。 After [0062] The polishing apparatus 10 in the operation of the drum after a predetermined time, stops the operation of the lubricity imparting agent supply device 44, and then stops the operation of barrel polishing apparatus 10, thereby stopping operation and then the cleaner 16. 然后,从滚筒研磨装置10的滚筒槽12排出介质40及被加工物W,将它们分开并回收被加工物W。 Then, the discharge 40 and the workpiece W medium from the drum barrel polishing apparatus 10 of the groove 12, to separate them and recovering the workpiece W.

[0063]如上所述,根据本实施方式,虽然是干式滚筒研磨方法,但是能够确保与湿式滚筒研磨方法同等或者相近的精加工性能。 [0063] As described above, according to the present embodiment, although the method of dry barrel polishing, it is possible to ensure equal or close to a wet barrel polishing and finishing performance method.

[0064]此外,例如,在将表面涂敷有油脂的材料作为介质来进行研磨那样的以往的例子中,由于在被加工物附着油脂,因此需要洗净工序。 [0064] Further, for example, the surface coated with oil as a medium material for grinding as a conventional example, since the workpiece attached grease cleaning step is required. 与此相对,在本实施方式的情况下,利用几乎不含有油脂的润滑性赋予材料44涂敷介质40表面,而形成非湿润的涂敷部44C。 Lubricating the other hand, in the case of this embodiment, using almost no oil containing 44 to impart a surface coating material medium 40, 44C to form a non-wetting coating portion. 由此, 在被加工物W几乎不附着油脂。 Accordingly, the workpiece W is hardly adhered oil. 其结果,具有无需洗净工序或简化洗净工序的优点。 As a result, the advantage of having simplified without washing step or washing step.

[0065]接下来,对实施例进行说明。 [0065] Next, the embodiment will be described.

[0066] 首先,表1中示出确认了介质流动性的实验结果。 [0066] First, Table 1 shows the experimental results confirmed flowability medium. 在此,表中的数值是所测定的介质的安息角。 Here, the value in the table is the angle of repose of the medium to be measured. 当在表面粗糙度为Ra = 0.0146wii的板放置了介质后,使该板逐渐倾斜,将介质沿着该板落下时的倾斜角度作为安息角。 When the surface roughness Ra = 0.0146wii medium plates placed so that the plate is gradually inclined, the angle of inclination of the medium along the fall plate as the angle of repose. 该测定相对于涂敷了润滑性赋予材料的介质(在表中记载为"有涂敷")与未由润滑性赋予材料涂敷的介质(在表中记载为"无涂敷")的各个介质,每20个进行测定。 The assay medium with respect to the lubricity imparting coating material (as described in the table "with a coating") is not granted and the dielectric material is coated by the lubricity (described in the table as "No coating") each medium was measured every 20.

[0067] 表1 [0067] TABLE 1

Figure CN106029298AD00091

[0069]根据表1的结果,判断为通过进行涂敷使介质的安息角变小。 [0069] The results in Table 1, that the coating is determined by the angle of repose of the medium becomes small. 该结果暗示出:若利用润滑性赋予材料对介质的表面进行涂敷,则提高介质的润滑性,所以在滚筒研磨时提高介质的流动性。 The results suggest that: if the surface of the medium to be coated using the slipping material, the lubrication medium is improved, the fluidity is improved when the barrel polishing medium.

[0070] 另一方面,将用脂肪酸钠(润滑性赋予材料)对介质的表面进行涂敷的情况作为实施例(实施例1~10),将不对介质的表面进行涂敷的情况作为比较例(比较例1~5),进行了通过在滚筒槽(研磨槽)内使介质在与被加工物混合的状态下流动来研磨被加工物的试验。 Where [0070] On the other hand, the (lubricity imparting material) coated with fatty acid sodium case where the surface of the medium as an example (Examples 1 to 10), the surface of the medium is not applied as a comparative example (Comparative Examples 1 to 5), were tested by the medium in the drum grooves (groove polishing) are mixed in with the state of the workpiece to be polished by the flow of the workpiece.

[0071] 研磨(滚筒研磨)的条件如下表2所示。 [0071] The polishing conditions (barrel polishing) is shown in Table 2 below. 作为被加工物,使用了一片测定用的被加工物((pl:5mmxtl5mm的S45C材料(机械构造用碳素钢钢材:JIS(Japanese Industrial Standards;日本工业标准)))、与12L(表观容积)的样品的被加工物(30mmX 30mm X t3mm的SS400材料(一般构造用乳制钢材:JIS))。 As a workpiece, a workpiece using a measurement of ((pl: 5mmxtl5mm material of S45C (carbon steel for machine structural steel: JIS (Japanese Industrial Standards; Japanese Industrial Standard))), and 12L (apparent volume ) sample workpiece (30mmX 30mm X t3mm the SS400 material (typically configured with dairy steel: JIS)).

[0072] 表2 [0072] TABLE 2

[0073] [0073]

Figure CN106029298AD00101

[0074] 对表2介质的种类进行补充说明。 [0074] The type table 2 medium supplement. 介质A及介质C(烧结介质)是使研磨颗粒彼此烧结而成的介质。 A medium and a medium C (medium sintering) is obtained by the abrasive particles are sintered to one another medium. 介质B及介质D (烧成介质)是使研磨颗粒与粘土质材料烧结而成的介质。 And a medium B medium D (medium firing) is a medium abrasive particles and the clay material is sintered. 介质E(树脂介质)是将树脂与磨料混合成型而得的介质。 Media E (resin medium) is a mixed resin obtained by molding the abrasive medium.

[0075] 另外,下述表3中示出实施例1~9以及比较例1~5的各条件、以及表面粗糙度、研磨量、及损耗率的测定结果。 [0075] Further, Table 3 below shows 1 to 9 and Comparative Examples 1 to 5 each condition, and the measurement results of surface roughness, the amount of grinding, attrition rate and embodiments.

[0076] 表3 [0076] TABLE 3

Figure CN106029298AD00111

[0078]在表3的条件项目中,"介质"这一项目不出是表2中介质的哪一种,"方法"这一项目示出是干式滚筒研磨方法还是湿式滚筒研磨方法。 [0078] In the condition item of Table 3, "medium" is not the item in Table 2 which medium, "method" of the item shown is a dry method or a wet barrel polishing method of polishing the drum. 此外,在湿式滚筒研磨方法中,向研磨槽内中加入11L水并且添加了50ml的研磨助剂(研磨膏)。 Further, in the wet barrel polishing process, 11L water was added to the polishing bath and added 50ml of a grinding aid (polishing paste).

[0079] "脂肪酸钠的投入"这一项目示出"有"或"无"向介质表面涂敷作为润滑性赋予材料的脂肪酸钠的工序。 [0079] "Sodium fat into" the item shows "YES" or "no" to the surface of the medium as a coating step of sodium fatty slipping material. 在此,在"有"的情况下,在括号中示出是以粉末、固体、液体的哪一种状态进行投入。 Here, in the "presence" case is shown in parentheses as a powder, solid, which is put into a liquid state.

[0080] 利用扫描电子显微镜((株)日立制作所制;S3400)及能量分散型X射线分析装置(EDAX制;Genesis 4000)进行光谱分析以及面分析(mapping),从而确认了在介质的表面形成有脂肪酸钠。 [0080] using a scanning electron microscope ((Hitachi, Ltd.) prepared; S3400) and an energy dispersive X-ray analyzer (EDAX system; Genesis 4000) and the spectral analysis of surface analysis (mapping), confirming the surface of the medium It is formed with a fatty acid sodium. 作为一例,实施例3的光谱分析结果如图3(A)所示,对实施例3及比较例1的介质表面进行面分析的结果如图3(B)所示。 As an example, embodiments spectral analysis results of Example 3 in FIG. 3 (A), the surface of the medium of Example 3 and Comparative Example 1 for surface analysis is shown in Figure 3 (B). 对于实施例3的介质而言,根据图3(A),由于检测到来自脂肪酸钠的离子(钠离子),从而确认了脂肪酸钠的存在。 For the medium of Example 3 according to FIG. 3 (A), due to detection of ions (sodium ions) from the fatty acid sodium, confirming the presence of sodium fat. 此外,该附图中的其他峰值示出来自介质的成分。 In addition, the other peaks of the components shown in the figures from the media. 另外,根据图3(B)判断出脂肪酸钠分布于介质的表面整体。 Further, (B) it is determined that the entire surface of the medium as sodium fat distribution according to FIG. 3. 即,示出如下情况:若在进行滚筒研磨时投入脂肪酸钠,则在介质的表面整体涂敷脂肪酸钠。 I.e., shows the following: sodium fatty acid into if barrel polishing is performed, the entire surface is coated with sodium fat medium.

[0081] 另外,在表3的条件项目中,"A1(0H)3"的添加这一项目示出在制造介质时的混匀工序中是否添加了氢氧化铝的粉末。 [0081] Further, in the condition item of Table 3, "A1 (0H) 3" was added in the mixing step shown items during production medium whether the aluminum hydroxide powder is added. 在添加了氢氧化铝的粉末的情况下,在括号中示出其添加量的比例。 In the case where the aluminum hydroxide powder is added in the proportion shown in parentheses in the amount added. 上述在括号中示出的氢氧化铝的添加量的比例是将混合材料(上述实施方式中的混合材料a)设为100质量%时的质量%。 In parentheses above the amount of aluminum hydroxide added at a ratio shown is the mixed material (a composite material of the above-described embodiment) is 100% by mass% by mass. 此外,在添加有A1(0H)3的情况下,介质为多孔质体,而在没有添加A1(0H)3的情况下,介质不会成为多孔质体而成为表面比较平滑的致密体。 Further, in the case of addition of A1 (0H) 3, a porous body medium, but without the addition of A1 (0H) 3 in the case, the medium does not become a porous surface becomes relatively smooth dense body.

[0082] 此外,"批次数"这一项目示出利用同一介质进行的第几次研磨。 [0082] In addition, "lot number" of the item is shown using the same milling media of times. 在实际的研磨处理中,在第一次研磨后取出被加工物,然后装入新的被加工物并利用同一介质进行第二次研磨,以如上方式使用同一介质反复进行研磨、被加工物的取出及装入。 In the actual polishing process, taken after the first polishing the workpiece, and then load a new second grinding workpiece using the same medium, in a manner as described above was repeated using the same polishing media, the workpiece removed and loaded. 在此,在表中批次数是1的例子示出在第一次研磨后取出的被加工物的测定结果,在表中批次数是10的例子(实施例9)示出在第十次研磨后取出的被加工物的测定结果。 Here, the batch number in Table 1 is an example illustrating the results of measurement of the workpiece is taken out after the first polishing, the batch number in the table is an example (Example 9) shown in the tenth polishing 10 after removing the measurement result of the workpiece.

[0083]另外,在表3的结果项目中,"表面粗糙度"是利用表面形状粗糙度测定仪((株)东京精密制;311奸(:〇11115000乂)测定出被加工物表面的表面粗糙度1^(115 86001;1994)的结果。"表面粗糙度"的单位为Mi。"研磨量"是利用电子天平((株)岛津制作所制;IPS-DP10)分别测定"加工前的被加工物的质量"以及"加工后的被加工物的质量",并将它们的差换算为每单位时间而进行评价的结果。"研磨量"的单位为mg/h。 [0083] In Table 3 the results of the project, the "surface roughness" is the use of a surface roughness shape measuring instrument ((Ltd.) manufactured by Tokyo Seimitsu; 311 rape (: 〇11115000 qe) measured surface of the workpiece surface 1 ^ roughness (11,586,001; 1994). results "surface roughness" units of Mi. "polishing amount" using an electronic balance ((Shimadzu Corporation) Seisakusho; IPS-DP10) were measured "unprocessed is by mass "and" mass of the workpiece after machining of the workpiece "and the difference between them in terms of per unit time of the evaluation results." amount of polishing "units of mg / h.

[0084] 另外,"损耗率"是利用上述的电子天平分别测定"加工前的介质(测定用)的质量" 及"加工后的介质(测定用)的质量,并通过下述算式1计算出的结果。"损耗率"的单位为%/ h〇 [0084] Further, "loss rate" is the mass of the media were measured after the "mass media before processing (measurement)" and the "processing (measurement) using the above-described electronic balance, and calculated by the following equation 1 results. "loss rate" in% / h〇

[0085] 算式1 [0085] Equation 1

Figure CN106029298AD00121

[0087]根据表3的结果,判断为在实施例1~10中,能够精加工为与比较例3、4的湿式滚筒研磨方法同等或相近的表面粗糙度。 [0087] The results of Table 3, it is determined as in Example 1 to 10, the wet barrel polishing with the finishing Comparative Examples 3 and 4 the same or similar method of surface roughness. 特别是在比较实施例3与实施例10时,在选择烧结介质作为介质的情况下,判断为能够得到更好的结果。 Especially in Comparative Example 3 and Example 10, the selection of the sintered media is used as the medium, it is determined that better results can be obtained.

[0088](实施方式的补充说明) [0088] (Supplementary explanation of the embodiment)

[0089] 此外,作为上述实施方式的变形例,也可以通过利用研磨槽的行星旋转或振动等使块状体流动,来进行被加工物的研磨。 [0089] Further, as a modified embodiment of the above-described embodiment, the groove may be milled by using a vibration or the like planetary rotary block fluid flow to the workpiece to be polished. 此外,作为滚筒研磨的种类,除了上述实施方式那样的流动式滚筒之外,例如还有被称作离心式滚筒、振动式滚筒、旋转式滚筒、以及陀螺式滚筒等种类。 Further, as the kind of barrel polishing, in addition to the drum as the flow of the above embodiment, for example, also it is referred to as the centrifugal drum, drum-type vibration, rotary drum, and the drum like a gyro.

[0090] 另外,作为上述实施方式的变形例,使研磨用的介质、被加工物以及润滑性赋予材料在研磨槽内混合(第二工序),使这些块状体在研磨槽内流动,对介质的表面涂敷润滑性赋予材料。 [0090] Further, as a modified embodiment of the above-described embodiment, the polishing of the medium, the workpiece material and imparting lubricity mixing (a second step) in the grinding tank, these block fluid flow in the grinding tank, for applied to the surface lubricity imparting dielectric material. 由此,也可以采用以下形式:形成非湿润的涂敷部对介质的表面赋予润滑性(第一工序),并且通过使介质与被加工物在研磨槽内流动来研磨被加工物(第三工序)。 This can also take the form of: forming a non-wetting coating lubricity imparting portion (a first step) on the surface of the medium, and to grind the workpiece in the grinding vessel of the medium flowing through the workpiece (Third step).

[0091] 另外,在上述实施方式的第三工序中,一边利用未图示的供给装置将润滑性赋予材料供给至滚筒槽12内,一边使介质40与被加工物W流动。 [0091] In the third step of the above-described embodiment, while the use of supply means (not shown) to impart lubricity feed material into the drum grooves 12, 40 so that while the flow medium W to be processed. 然而,也可以不进行这样的润滑性赋予材料的供给,而通过追加将需要的分量的润滑性赋予材料预先装入滚筒槽12内。 However, this may not be supplied lubricity imparting material, and by adding the required lubricity imparting component 12 pre-loaded into the drum groove.

[0092] 另外,作为上述实施方式的变形例,根据介质所需的性能(精加工性能以及寿命等),也能够成为使烧结体的介质的组成为例如包含60~80质量%的氧化铝、10~30质量% 的二氧化硅、4~8质量%的氧化锆、1~3质量%的氧化钙、以及不足1质量%或为5质量%的氧化镁的烧结体的介质。 [0092] Further, as a modified example of the embodiment described above, depending upon the desired properties of the medium (finishing performance and life, etc.), it is possible to become a sintered body of the medium, for example, a composition comprising 60 to 80 mass% of aluminum oxide, 10 to 30 mass% of silica, 4 to 8 mass% of zirconium oxide, 1 to 3% of calcium oxide, and less than 1% by mass or medium is 5% by mass of the sintered body of magnesium oxide.

[0093] 另外,作为上述实施方式的介质的制造方法的变形例,消失材料粉末例如也可以是发泡聚苯乙烯树脂的粉末、石墨粉末等那样的其他的消失材料粉末。 [0093] Further, as the medium of the above-described embodiment of the modified embodiment of the production method, for example, the disappearance of material powder may be powder of other materials such as the disappearance of a powder, graphite powder expanded polystyrene resin. 此外,若陶瓷粘合剂中使用发泡聚苯乙烯树脂作为消失材料,则有在烧结后的介质内因消失材料的原因而产生的杂质(例如、碳)残留在晶界的可能性,该杂质有可能成为降低介质强度的一个原因(产生裂缝)。 Further, when the ceramic binder disappears as a foamed polystyrene resin material, the impurities (e.g., carbon) in the internal medium reasons after the disappearance of the sintered material and the resulting residue possibility grain boundary, the impurity It may become a reason for decrease of dielectric strength (crack). 与此相对,如上述实施方式那样,在使用氢氧化铝作为消失材料的情况下,即使进行烧结,氢氧化铝也分解为水蒸气与作为陶瓷粘合剂的主要成分的氧化铝(A1 203)。 On the other hand, as the embodiment described above, the use of aluminum hydroxide as the material disappears, even if the sintering, aluminum hydroxide and alumina can be decomposed into water vapor as a main component a ceramic binder (A1 203) . 因此,具有不会在烧结后的介质内残留因消失材料的原因而产生的杂质的优点。 Accordingly, an advantage is not due to residual impurities cause disappears material produced in the medium after sintering.

[0094] 另外,作为上述实施方式的介质的制造方法的变形例,也可以采用在混匀工序中不添加氧化锰及氧化铁的方法。 [0094] Further, as a modification of the manufacturing method of the medium above embodiment, a method may be manganese oxide and iron oxide was not added in the kneading step is employed.

[0095] 此外,上述实施方式及上述的多个变形例能够适当地组合来实施。 [0095] Further, the above-described embodiment and modification described above plurality of embodiments can be implemented in appropriate combination.

[0096] 以上,对实施方式以及变形例进行了说明,但当然本发明并不限定于上述的内容, 除上述以外,在不超出其主旨的范围内能够进行各种各样的变形来实施。 [0096] Hereinabove, the embodiments and modification examples have been described, but of course the present invention is not limited to the above contents, in addition to the above, within a range not departing from the gist various modifications can be implemented.

[0097]附图标记的说明: [0097] REFERENCE NUMERALS:

[0098] 12…滚筒槽(研磨槽);40…介质;42…保持部;44…润滑性赋予材料;44C…涂敷部;W…被加工物。 [0098] 12 ... roller grooves (groove polishing); 40 ... medium; holding portion 42 ...; 44 ... lubricity imparting material; applying portion 44C ...; ... W is the workpiece.

Claims (11)

  1. 1. 一种干式滚筒研磨方法,以干式的方式对被加工物进行滚筒研磨,其中,具有: 第一工序,在该第一工序中,通过对所述滚筒研磨中所使用的介质的表面涂敷润滑性赋予材料来形成非湿润的涂敷部,对所述介质的表面赋予润滑性; 第二工序,在该第二工序中,使所述介质与所述被加工物在研磨槽内混合;以及, 第三工序,在该第三工序中,通过使所述介质与所述被加工物在所述研磨槽内流动来对所述被加工物进行研磨。 A method of dry barrel polishing, a dry manner was subjected to barrel polishing the workpiece, wherein: a first step, the first step by the barrel polishing medium used in the surface slipping coating material to form a non-wetting coating portion, imparting lubricity to the surface of the medium; and a second step, the second step, the medium and the workpiece in the grinding groove mixing; and a third step, the third step, to be polished by the said medium and the workpiece in grinding the workpiece flow tank.
  2. 2. 根据权利要求1所述的干式滚筒研磨方法,其中, 在所述第三工序中,一边向所述研磨槽内供给所述润滑性赋予材料一边使所述介质与所述被加工物流动。 The dry barrel polishing method according to claim 1, wherein, in the third step, while the tank is supplied to the abrasive material while slipping the medium and the process stream is move.
  3. 3. 根据权利要求1或2所述的干式滚筒研磨方法,其中, 所述润滑性赋予材料含有脂肪酸或脂肪酸盐。 The dry barrel polishing method of claim 1 or claim 2, wherein said lubricating material comprising imparting a fatty acid or fatty acid salts.
  4. 4. 根据权利要求3所述的干式滚筒研磨方法,其中, 所述脂肪酸或脂肪酸盐含有脂肪酸钠。 4. The method of dry barrel polishing according to claim 3, wherein the fatty acid or fatty acid salt containing a fatty acid sodium.
  5. 5. 根据权利要求1~4中任意一项所述的干式滚筒研磨方法,其中,所述介质是无机质的介质,在所述介质的表面设置有供所述润滑性赋予材料进入并对所述润滑性赋予材料进行保持的保持部。 According to claim 1 to 4, in dry barrel polishing method according to any preceding claim, wherein said medium is an inorganic medium, slipping into the material and provided on the surface of the medium to which the supply the lubricity imparting material holding part.
  6. 6. 根据权利要求5所述的干式滚筒研磨方法,其中, 所述保持部通过使所述介质成为多孔质体而形成。 The dry barrel polishing method according to claim 5, wherein said holding portion is formed by the medium become porous.
  7. 7. 根据权利要求6所述的干式滚筒研磨方法,其中, 所述介质是至少含有60~80质量%的氧化错、10~30质量%的二氧化娃、4~8质量% 的氧化锆、1~3质量%的氧化钙、以及1~4质量%的氧化镁的烧结体。 The dry barrel polishing method according to claim 6, wherein said medium contains at least 60 to 80 mass% of oxide wrong, 10 to 30 mass% of baby dioxide, 4 to 8 mass% of zirconium oxide , 1 to 3% of calcium oxide, and sintered bodies 1 to 4 mass% of magnesium oxide.
  8. 8. -种介质的制造方法,是用于制造权利要求7所述的干式滚筒研磨方法所使用的介质的方法,其中,包括: 混匀工序,在该混匀工序中,对研磨颗粒、粘合剂、氧化镁以及消失材料粉末进行混匀; 成型工序,在该成型工序中,将在所述混匀工序中混匀而得的混匀物成型为规定的形状;以及烧结工序,在该烧结工序中,对在所述成型工序中成型出的成型体进行烧结而形成烧结体,并且使所述消失材料粉末消失,在所述烧结体的表面形成所述保持部。 8. - A method for producing seed medium, is a method for producing a dry medium according to claim 7, the barrel polishing method be used, wherein, comprising: a mixing step of mixing in this step, the abrasive particles, binder, magnesium oxide and kneading powder materials disappeared; molding step, the molding step, the mix obtained in the kneading step, kneading was formed into a predetermined shape; and a sintering step, in the sintering process, the molded in said molding step to form a sintered molded body was sintered body, and the disappearance of the powder material disappeared, the surface of the sintered body is formed in the holding portion.
  9. 9. 根据权利要求8所述的介质的制造方法,其中, 在将所述研磨颗粒、所述粘合剂、所述氧化镁以及所述消失材料粉末的合计设为100质量%的情况下,所述消失材料粉末的添加量是1~40质量%的量。 9. A method of manufacturing a medium as claimed in claim 8, wherein, in a case where the abrasive particles, the binder, and the disappearance of the magnesium oxide total is 100% by mass of the material powder, the amount of the material powder disappear is added an amount of 1 to 40% by mass.
  10. 10. 根据权利要求8或9所述的介质的制造方法,其中, 所述消失材料粉末为氢氧化铝粉末。 10. The method of claim 8 or 9 for producing medium according to claim, wherein said aluminum hydroxide powder material disappeared powder.
  11. 11. 根据权利要求8~10中任意一项所述的介质的制造方法,其中, 在所述混匀工序中,在含有所述研磨颗粒、所述粘合剂、所述氧化镁以及所述消失材料粉末的混合材料中添加氧化锰和氧化铁中的至少一种,在将所述混合材料、与所述氧化锰和所述氧化铁中的至少一种的合计设为100质量%的情况下,所述氧化锰和所述氧化铁中的至少一种的含量为5质量%以下。 According to claims 8 to 10 in the production method according to any one of the medium, wherein, in said mixing step, the abrasive particles containing the binder, the magnesium oxide and mixed material disappeared material powder was added manganese oxide and iron oxide of at least one, in the case of the mixed material with at least one of the total of 100% by mass of the manganese oxide and the iron oxide at least one of the content, the manganese oxide and the iron oxide is 5 mass% or less.
CN 201580010935 2014-04-07 2015-02-17 Dry barrel polishing method, and medium production method CN106029298A (en)

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