CN106024984B - One kind drying sintering furnace and drying sintering method - Google Patents
One kind drying sintering furnace and drying sintering method Download PDFInfo
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- CN106024984B CN106024984B CN201610543723.5A CN201610543723A CN106024984B CN 106024984 B CN106024984 B CN 106024984B CN 201610543723 A CN201610543723 A CN 201610543723A CN 106024984 B CN106024984 B CN 106024984B
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- 238000005245 sintering Methods 0.000 title claims abstract description 114
- 238000001035 drying Methods 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 71
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 71
- 239000010703 silicon Substances 0.000 claims abstract description 71
- 238000001816 cooling Methods 0.000 claims abstract description 64
- 238000002485 combustion reaction Methods 0.000 claims abstract description 62
- 238000007664 blowing Methods 0.000 claims abstract description 25
- 238000007789 sealing Methods 0.000 claims abstract description 16
- 229920000742 Cotton Polymers 0.000 claims description 50
- 239000007789 gas Substances 0.000 claims description 23
- 238000012544 monitoring process Methods 0.000 claims description 20
- 238000004321 preservation Methods 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 14
- 239000012528 membrane Substances 0.000 claims description 14
- 230000036413 temperature sense Effects 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 238000005485 electric heating Methods 0.000 claims description 10
- 239000007787 solid Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims description 8
- 230000036760 body temperature Effects 0.000 claims description 7
- 239000012141 concentrate Substances 0.000 claims description 7
- 229910052571 earthenware Inorganic materials 0.000 claims description 6
- 239000002912 waste gas Substances 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 4
- 230000033228 biological regulation Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000012937 correction Methods 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 230000008901 benefit Effects 0.000 abstract description 4
- 230000006872 improvement Effects 0.000 description 8
- 239000000428 dust Substances 0.000 description 4
- 230000029058 respiratory gaseous exchange Effects 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 239000008187 granular material Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 230000005619 thermoelectricity Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
- F27B9/062—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
- F27B9/063—Resistor heating, e.g. with resistors also emitting IR rays
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
- F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
- F27D17/008—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases cleaning gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The present invention discloses a kind of drying sintering furnace, including transport platform, the upper plane of transport platform is provided with conveyer belt, conveyer belt controls two rod wheels to drive transport by single-motor, transport platform is sequentially provided with silicon chip preheating zone by feed end to discharge end, Litter combustion zone, sintering zone and silicon chip cooling zone, multiple drying preheating furnaces are interval with silicon chip preheating zone, the temperature of multiple drying preheating furnace is gradually increasing, Litter is provided with combustion tower in combustion zone, multiple sealings are interval with sintering zone, and can be with the sintering furnace of independent control temperature, the temperature all same of each sintering furnace, multiple blowing devices and multiple air intake devices are interval with silicon chip cooling zone, the front side of transport platform or rear side are provided with control device.Simple structure of the present invention, the warm area equalized temperature that may insure each sintering, and the advantages of harmful Litter is fully burnt.
Description
Technical field
The present invention relates to solar silicon wafers agglomerating plant, more particularly to a kind of drying sintering furnace.
Background technology
Solar cell is mainly made up of silicon chip, and semiconductor P-N junction is formed on the silicon chip of high-purity, and process includes
Clean, dry, spreading, etching, spraying, printing and sintering.
The solar silicon wafers sintering furnace for using at present, is generally provided with multiple warm areas, and each warm area is provided with heating tube and temperature
Degree control device, for maintaining the temperature of each warm area constant, but because the temperature of each position of warm area is inconsistent, it is difficult to protect
Demonstrate,prove the temperature of warm area.
The content of the invention
The purpose of the present invention is directed to the drawbacks described above of prior art, there is provided a kind of simple structure, may insure each burn
The drying sintering furnace of the warm area equalized temperature of knot.
To solve the drawbacks described above of prior art, the technical scheme that the present invention is provided is：One kind drying sintering furnace, including it is defeated
The upper plane of platform, the transport platform is sent to be provided with conveyer belt, the conveyer belt controls two rod wheels to drive transport, institute by single-motor
State transport platform and silicon chip preheating zone, Litter combustion zone, sintering zone and silicon chip cooling zone, institute are sequentially provided with by feed end to discharge end
State and multiple drying preheating furnaces are interval with silicon chip preheating zone, the temperature of multiple drying preheating furnaces is gradually increasing, described useless
Combustion tower is provided with gas thing combustion zone, be interval with the sintering zone multiple sealings and can be with the of independent control temperature
One sintering furnace, the temperature of multiple first sintering furnaces gradually rises, be interval with the silicon chip cooling zone multiple blowing devices and
Multiple air intake devices, the front side of the transport platform or rear side are provided with control device.
As a kind of improvement of present invention drying sintering furnace, first sintering furnace include the upper furnace of temperature-adjustable and
Lower furnace, the upper furnace and the lower furnace mirror image are docked, and a silicon chip conveying sintering space for sealing are formed, in the silicon
The conveyer belt for conveying silicon chip is provided with piece conveying sintering space, is provided with the upper furnace for heating upper furnace warm area temperature
The upper heater and the upper heat sink for reducing upper furnace warm area temperature of degree, are additionally provided with for sensing in the upper furnace
The upper temperature sense control assembly of the upper furnace warm area temperature is controlled, is provided with the lower furnace for heating lower furnace warm area
The lower heater of temperature and the lower heat sink for reducing lower furnace warm area temperature, are additionally provided with for feeling in the lower furnace
The lower temperature sense control assembly of lower furnace warm area temperature should be controlled；The temperature of the upper furnace warm area and the lower furnace warm area
Between formed a temperature difference for balance and stability；The temperature formed between the temperature of the upper furnace warm area and the lower furnace warm area
Degree difference is less than 300 DEG C.
Used as a kind of improvement of present invention drying sintering furnace, the upper heater is transversely mounted on institute including at least one
The upper heat-generating pipe of upper furnace warm area is stated, is provided with the electric power connection line of the upper heat-generating pipe for monitoring upper heat-generating pipe work shape
The upper monitoring display device of state, when the upper monitoring display device can not show light, represents that the upper heat-generating pipe is damaged, the upper hair
Heat pipe removes replacing from the position of the upper furnace warm area；
The upper heat sink includes the up-draught pipeline of at least one connection and the upper furnace warm area, the up-draught
The air inlet of pipeline is stretched out outside the upper furnace, and the blowing amount of the up-draught pipeline is controlled by a flow controller.
As a kind of improvement of present invention drying sintering furnace, a upper ventilative cotton for taking the shape of the letter U is provided with the upper furnace warm area
Cover, the madial wall of the upper furnace warm area is provided with solid heat-preservation cotton, and the up-draught pipeline air outlet stretches into described ventilative
In cotton cover, during the up-draught pipeline cooling wind, by cooling wind full of the confined space between heat-preservation cotton and ventilative cotton, and
One closed wind chamber of formation, after due to breathing freely, cotton is planar structure, therefore cooling wind passes through ventilative cotton under wind cavity pressure, meeting exists
Turn into the plane cooling airflow with flow direction in flue, lower the temperature so as to be balanced to furnace chamber；
The upper temperature sense control assembly includes temperature thermo-coupler on several, and the temperature-sensitive of the upper temperature thermo-coupler is visited
Head is stretched into the upper furnace warm area, and the upper temperature thermo-coupler is connected with temperature controller.
Used as a kind of improvement of present invention drying sintering furnace, the lower heater is transversely mounted on institute including at least one
The lower heat-generating pipe of lower furnace warm area is stated, is provided with the electric power connection line of the lower heat-generating pipe for monitoring lower heat-generating pipe work shape
The lower monitoring display device of state, when the lower monitoring display device can not show light, represents that the lower heat-generating pipe is damaged, described to issue
Heat pipe removes replacing from the position of the lower furnace warm area；
The lower heat sink includes the lower blower duct of at least one connection and the lower furnace warm area, the lower blowing
The air inlet of pipeline is stretched out outside the lower furnace, and the blowing amount of the lower blower duct is controlled by a flow controller.
As a kind of improvement of present invention drying sintering furnace, a lower ventilative cotton for taking the shape of the letter U is provided with the lower furnace warm area
Cover, the madial wall of the lower furnace warm area is provided with down solid heat-preservation cotton, and the lower blower duct air outlet stretches into described lower ventilative
In cotton cover, during the lower blower duct conveying cooling wind, by cooling wind full of the confined space between heat-preservation cotton and ventilative cotton, and
One closed wind chamber of formation, after due to breathing freely, cotton is planar structure, therefore cooling wind passes through ventilative cotton under wind cavity pressure, meeting exists
Turn into the plane cooling airflow with flow direction in flue, lower the temperature so as to be balanced to furnace chamber；
The lower temperature sense control assembly includes several lower temperature thermo-couplers, and the temperature-sensitive of the lower temperature thermo-coupler is visited
Head is stretched into the lower furnace warm area, and the lower temperature thermo-coupler is connected with temperature controller.
Used as a kind of improvement of present invention drying sintering furnace, the combustion tower includes a burning casing, the burning casing
Cavity in be sequentially provided with can increase the combustion cavity of burning time, the burning gases for gathering burning gases from the bottom to top
Concentrate cavity and for by the cooling cavity of the gas cooling after burning, the front side of the burning casing or rear side to be provided with for controlling
The control cabinet of the temperature of the system burning casing, the cavity sidewalls of the burning casing are provided with heat-preservation cotton；The combustion cavity
Concentrate cavity to separate by a dividing plate with the burning gases, multiple air-vents are interval with the dividing plate.
As a kind of improvement of present invention drying sintering furnace, it is interval with successively from the bottom to top in the combustion cavity multigroup
For the electric heating burner of burning waste gas thing, every two groups adjacent electric heating burners are separated by a breathable membrane, shape
Into multiple combustion zones, wherein one end of every piece of breathable membrane is interval with multiple through holes, and adjacent two are described ventilative
Lead to the hole site on dividing plate is to shift to install.
Used as a kind of improvement of present invention drying sintering furnace, the bottom of the burning casing is provided with Litter and enters passage,
Litter enters the combustion zone that passage enters the bottom from the Litter, and the temperature of multiple combustion zones rises successively from bottom to up
Height, Litter after reaching fully burning, flows to burning gases and concentrates in cavity by the different temperatures burning of multiple combustion zones,
Discharged by after cooling cavity cooling；
The electric heating burner is transversely mounted on the earthenware of the combustion zone, the every pottery including one or more
Heating wire is wound with porcelain tube；
Being provided with the cooling cavity can be with the water condenser of circulation temperature lowering, and the cooling pipe of the water condenser is in multiple
U-tube is formed by connecting, and each U-tube is connected, and the delivery port and water inlet of the cooling pipe stretch out the cooling cavity
Outward；
The control cabinet is provided with power switch, heater switch, power supply indicator, ignition temperature display, furnace body temperature
Display, ceiling temperature display and outlet temperature display；
The trailing flank of the burning casing is provided with multiple thermocouples for sensing body of heater ignition temperature, multiple thermoelectricity
It is even to be arranged in order from bottom to up, the furnace body temperature for testing each different height.
Compared with prior art, it is an advantage of the invention that：Present invention employs the sintering furnace that can balance control temperature difference,
Upper furnace and lower furnace the mirror image connection of sintering furnace, form a silicon chip conveying sintering space for sealing, control upper furnace warm area
Temperature and the temperature of lower furnace warm area between the temperature difference, the temperature for making silicon chip convey sintering space keeps stable equilibrium's
Temperature approach, the temperature difference is less than 300 DEG C；The mode of this sealing temperature control, can ignore outer bound pair silicon chip conveying sintering space
Influence.The stability of the temperature difference is improved, product sintering quality can be effectively improved.The present invention is also provided with to fill Litter
The combustion tower discharged again after divided combustion, makes the gas of discharge meet standard, more environmentally-friendly, and the waste particles dust after burning is in combustion
Burn in tower, both can be easy to clean with complete liquidation by dust catcher.The present invention is also provided with quickly reducing silicon temperature
Cooling device, by above blowing down the mode of suction, accelerates gas flowing, silicon chip is quickly reduced to normal temperature level.
It is a further object of the present invention to provide a kind of sintering method for drying sintering furnace, comprise the following steps：
A）Solar silicon wafers are put into one can be so that on the conveyer belt of circulation conveying, the conveyer belt controls two by single-motor
Individual rod wheel drives transport, and the conveyer belt is acted on correction；
B）Solar silicon wafers are by tape transport once by silicon chip preheating zone, Litter combustion zone, sintering zone and silicon chip
Cooling zone；The multiple drying preheating furnaces of interval setting in silicon chip preheating zone, the temperature of multiple drying preheating furnace is gradually increasing, Litter
Combustion tower is set in combustion zone, be interval with sintering zone multiple sealings and can with the first sintering furnace of independent control temperature,
The temperature of multiple the one the first sintering furnaces gradually rises, in silicon chip cooling zone the multiple blowing devices of blowing downwards of interval setting and
The air intake device of multiple air draughts；
C）The preheating furnace temperature of control silicon chip preheating zone is at 200 DEG C~300 DEG C；Control sintering zone the first sintering furnace it is upper
350 DEG C~1000 DEG C of flue temperature, 350 DEG C~1000 DEG C of the temperature of lower furnace；The temperature of the first sintering furnace by upper furnace and
The temperature difference regulation of lower furnace, makes the temperature difference of the upper furnace of sintering furnace and lower furnace be maintained at less than 300 DEG C
D）Silicon chip blows downwards cold by entering into cooling zone, the blowing device of the multiple blowing downwards of cooling zone behind sintering zone
Wind, multiple air intake devices detach hot blast, make the silicon temperature for transferring out below normal temperature.
Compared with prior art, it is an advantage of the invention that：Present invention employs the first burning that can balance control temperature difference
Freezing of a furnace, upper furnace and lower furnace the mirror image connection of the first sintering furnace forms a silicon chip conveying sintering space for sealing, in control
The temperature difference between the temperature of flue warm area and the temperature of lower furnace warm area, the temperature for making silicon chip convey sintering space is kept for one surely
The temperature approach of weighing apparatus is allocated, the temperature difference is less than 200 DEG C；The mode of this sealing temperature control, can ignore outer bound pair silicon chip conveying
The influence of sintering space.The sintering method of this sintering furnace is simple, easily implementation, can prevent Litter Environmental capacity, makes discharge
Gas reach standard state, and this sealed sintering process, substantially increase the stability of sintering.
Brief description of the drawings
Further details of just is made to technique effect of the invention and its beneficial with specific embodiment with reference to the accompanying drawings below
Description, wherein：
Fig. 1 is front view of the present invention.
Fig. 2 is combustion furnace front view of the present invention.
Fig. 3 is combustion furnace sectional view of the present invention.
Fig. 4 is combustion tower front view.
Fig. 5 is A-A sectional views in Fig. 4.
Reference title：1st, transport platform 3, rod wheel 4, silicon chip preheating zone 5, Litter combustion zone 6, sintering zone 7, silicon
Piece cooling zone 8, drying preheating furnace 9, combustion tower 10, the first sintering furnace 11, blowing device 12, air intake device 13, control
Device.101st, upper furnace 102, lower furnace 103, silicon chip conveying sintering space 104, silicon chip 105, conveyer belt 106, upper stove
Courage warm area 107, upper heater 108, upper heat sink 109, lower furnace warm area 1010, lower heater 1011, decline
Warm device 1012, upper ventilative cotton cover 1013, upper solid heat-preservation cotton 1014, upper temperature thermo-coupler 1015, lower ventilative cotton cover
1016th, solid heat-preservation cotton 1017, lower temperature thermo-coupler 1071, upper heat-generating pipe 1072, electric power connection line 1073, upper monitoring under
Display 10101, lower heat-generating pipe 10102, monitoring display device 91, burning casing 92, combustion cavity 93, burning gases are concentrated
Cavity 94, cooling cavity 95, control cabinet 96, dividing plate 97, air-vent 98, electric heating burner 99, breathable membrane 910,
Combustion zone 911, through hole 912, Litter enter passage 913, heat-preservation cotton 941, water condenser 942, cooling pipe 943,
Delivery port 944, water inlet 951, power switch 952, heater switch 953, power supply indicator 954, ignition temperature display
955th, furnace body temperature display 956, ceiling temperature display 957, outlet temperature display 981, earthenware 982, heating
Silk.
Specific embodiment
Just the invention will be further described with specific embodiment with reference to the accompanying drawings below, but embodiments of the present invention not office
It is limited to this.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4 and Fig. 5, one kind drying sintering furnace, including transport platform 1, the upper plane of transport platform 1
Conveyer belt 105 is provided with, conveyer belt 105 controls two rod wheels 3 to drive transport by single-motor, and transport platform 1 is by feed end to discharging
End is sequentially provided with interval in silicon chip preheating zone 4, Litter combustion zone 5, sintering zone 6 and silicon chip cooling zone 7, silicon chip preheating zone 4 and sets
The temperature for having multiple drying preheating furnaces 8, multiple drying preheating furnace 8 is gradually increasing, and combustion tower 9 is provided with Litter combustion zone 5, is burnt
Be interval with interface 6 multiple sealings and can with the first sintering furnace 10 of independent control temperature, multiple first sintering furnaces 10
Temperature gradually rises, and multiple blowing devices 11 and multiple air intake devices 12 is interval with silicon chip cooling zone 7, before transport platform 1
Side or rear side are provided with control device 13.
Preferably, the first sintering furnace 10 includes the upper furnace 101 and lower furnace 102 of temperature-adjustable, and upper furnace 101 is with
The mirror image of flue 102 is docked, and forms a silicon chip conveying sintering space 103 for sealing, is provided with silicon chip conveying sintering space 103
The upper heating for heating the temperature of upper furnace warm area 106 is provided with conveyer belt 105 for conveying silicon chip 104, upper furnace 101 to fill
Put 107 and is additionally provided with for sensing control in the upper heat sink 108 of the temperature of upper furnace warm area 106, upper furnace 101 for reducing
It is provided with the upper temperature sense control assembly of the temperature of upper furnace warm area 106, lower furnace 102 for heating the temperature of lower furnace warm area 109
The lower heater 1010 and the lower heat sink 1011 for reducing the temperature of lower furnace warm area 109 of degree, also set in lower furnace 101
There is the lower temperature sense control assembly for sensing the temperature of control lower furnace warm area 109.
Preferably, a temperature for balance and stability is formed between the temperature of upper furnace warm area 106 and lower furnace warm area 109
Difference.
Preferably, the temperature difference for being formed between the temperature of upper furnace warm area 106 and lower furnace warm area 109 is less than 300 DEG C.
Preferably, upper heater 107 includes at least one upper heat-generating pipe for being transversely mounted on upper furnace warm area 106
1071, the upper monitoring display for monitoring upper heat-generating pipe working condition is provided with the electric power connection line 1072 of upper heat-generating pipe 1071
Device 1073, when upper monitoring display device 1073 can not show light, heat-generating pipe 1071 is damaged in expression, and upper heat-generating pipe 1071 can be from upper
Remove replacing in the position of flue warm area 106；
Upper heat sink 108 includes the up-draught pipeline of at least one connection and upper furnace warm area 106, up-draught pipeline
Air inlet 1018 is stretched out outside upper furnace 1.The blowing amount of up-draught pipeline is controlled by a flow controller.
Preferably, a upper ventilative cotton cover 1012 for taking the shape of the letter U, the inner side of upper furnace warm area 106 are provided with upper furnace warm area 106
Wall is provided with solid heat-preservation cotton 1013, and up-draught pipeline air outlet is stretched into ventilative cotton cover 1012, and up-draught pipeline is cold
But during wind, by cooling wind full of the confined space between heat-preservation cotton and ventilative cotton, and a closed wind chamber is formed, due to cotton of breathing freely
Planar structure, thus cooling wind under the wind cavity pressure through ventilative cotton after, can turn into flue has the plane of flow direction cold
It is distinguished and admirable, lower the temperature so as to be balanced to furnace chamber.
Preferably, upper temperature sense control assembly includes temperature thermo-coupler 1014, upper temperature thermo-coupler 1014 on several
Temperature-sensing probe stretch into upper furnace warm area 106, upper temperature thermo-coupler 1014 is connected with temperature controller.
Preferably, lower heater 1010 includes at least one lower heat-generating pipe for being transversely mounted on lower furnace warm area 109
10101, the lower monitoring for monitoring lower heat-generating pipe working condition is provided with the electric power connection line 1072 of lower heat-generating pipe 10101 and is shown
Show device 10102, when lower monitoring display device 10102 can not show light, represent that lower heat-generating pipe 10101 is damaged, lower heat-generating pipe 10101
Replacing can be removed from the position of lower furnace warm area 109；
Lower heat sink 1011 includes the lower blower duct of at least one connection and lower furnace warm area 109, lower blower duct
Air inlet 1018 stretch out outside lower furnace 102.The blowing amount of lower blower duct is controlled by a flow controller.
Preferably, a lower ventilative cotton cover 1015 for taking the shape of the letter U, the inner side of lower furnace warm area 109 are provided with lower furnace warm area 109
Wall is provided with down solid heat-preservation cotton 1016, and lower blower duct air outlet is stretched into lower ventilative cotton cover 1015, and lower blower duct conveying is cold
But during wind, by cooling wind full of the confined space between heat-preservation cotton and ventilative cotton, and a closed wind chamber is formed, due to cotton of breathing freely
Planar structure, thus cooling wind under the wind cavity pressure through ventilative cotton after, can turn into flue has the plane of flow direction cold
It is distinguished and admirable, lower the temperature so as to be balanced to furnace chamber.
Preferably, lower temperature sense control assembly includes several lower temperature thermo-couplers 1017, lower temperature thermo-coupler 1017
Temperature-sensing probe stretch into lower furnace warm area 109, lower temperature thermo-coupler 1017 is connected with temperature controller.
Combustion tower 9 includes a burning casing 91, and being sequentially provided with from the bottom to top in the cavity of the casing 91 that burns can increase combustion
The combustion cavity 92 of burning time, for gather burning gases burning gases concentrate cavity 93 and for by after burning gas drop
The cooling cavity 94 of temperature, the front side of burning casing 91 or rear side are provided with the control cabinet 95 of the temperature for controlling burning casing 91,
The cavity sidewalls of burning casing 91 are provided with heat-preservation cotton 913.
Preferably, combustion cavity 92 concentrates cavity 93 to separate by a dividing plate 96 with burning gases, and interval sets on dividing plate 96
There are multiple air-vents 97.
Preferably, it is interval with multigroup electric heating burning dress for burning waste gas thing in combustion cavity 92 successively from the bottom to top
98 are put, every two groups adjacent electric heating burners 98 are separated by a breathable membrane 99, form multiple combustion zones 910, every piece
Wherein one end of breathable membrane 99 is interval with multiple through holes 911, the position of through hole 911 on two adjacent breathable membranes 99
To shift to install.
Preferably, the position of through hole 911 on two adjacent breathable membranes 99 is not in same one end.Adjacent two it is ventilative every
Through hole 911 on plate 99, through hole 911 1 on upper and lower two breathable membranes 99 one, the left side on the right, it is or following
On the right, the through hole 911 on the breathable membrane 99 of top is on the left side for through hole 911 on breathable membrane 99.
Preferably, the bottom of burning casing 91 is provided with Litter into passage 912, and Litter enters passage from the Litter
912 combustion zones 910 for entering the bottom, the temperature of multiple combustion zones 910 is raised successively from bottom to up, and Litter fires by multiple
910 different temperatures burning is burnt, after reaching fully burning, burning gases is flowed to and is concentrated in cavity 93, cavity 94 is cold by lowering the temperature
But discharge afterwards.
Preferably, electric heating burner 98 is transversely mounted on the earthenware 981 of combustion zone 910 including one or more, often
Heating wire 982 is wound with root earthenware 981.
Preferably, being provided with cooling cavity 94 can be with the water condenser 941 of circulation temperature lowering, the cooling tube of water condenser 941
Road 942 is in that multiple U-tubes are formed by connecting, and each U-tube is connected, and the delivery port 943 and water inlet 944 of cooling pipe 942 are equal
Stretch out outside cooling cavity 94.
Preferably, control cabinet 95 is provided with power switch 951, heater switch 952, power supply indicator 953, ignition temperature and shows
Show device 954, furnace body temperature display 955, ceiling temperature display 956 and outlet temperature display 957.
Preferably, the trailing flank of burning casing 91 is provided with multiple thermocouples for sensing body of heater ignition temperature, Duo Gere
Galvanic couple is arranged in order from bottom to up, the furnace body temperature for testing each different height.
The present invention by the way of successively burning from the bottom to top, by way of the through hole of breathable membrane 99 is shifted to install,
Increase time of the waste gas composition granule by each burning 910, make burning degree of the waste gas composition granule in each combustion zone more abundant,
The gas discharged after being allowed to reaches the levels of emissions of mark, and the combustion system of this combustion tower can substantially reduce waste gas composition granule
Discharge, make the gas of discharge more environmentally friendly, and this product can be by dust catcher whole by the dust after burning particulate matter
Clean out, be easy to collect and clean combustion tower, the present invention is provided with the thermocouple of successively temperature sense, may be displayed on each
The ignition temperature of combustion zone, monitor in real time can prevent Litter particle burning insufficient.
Transport platform of the invention 1 can set two-wire while drying sintering, and enough skies are provided between two transport platforms 1
Between enter to maintenance personal, the more convenient production of this two-wire drying sintering processing is installed, it is possible to reduce floor space, it is possible to carry
The output of production line high.
A kind of sintering method for drying sintering furnace, comprises the following steps：
A）Solar silicon wafers are put into one can be so that on the conveyer belt of circulation conveying, the conveyer belt controls two by single-motor
Individual rod wheel drives transport, and the conveyer belt is acted on correction；
B）Solar silicon wafers are by tape transport once by silicon chip preheating zone, Litter combustion zone, sintering zone and silicon chip
Cooling zone；The multiple drying preheating furnaces of interval setting in silicon chip preheating zone, the temperature of multiple drying preheating furnace is gradually increasing, Litter
Combustion tower is set in combustion zone, be interval with sintering zone multiple sealings and can with the first sintering furnace of independent control temperature,
The temperature of multiple first sintering furnaces gradually rises, the blowing device and multiple of the multiple blowings downwards of interval setting in silicon chip cooling zone
The air intake device of air draught；
C）The preheating furnace temperature of control silicon chip preheating zone is at 200 DEG C~300 DEG C；Control sintering zone the first sintering furnace it is upper
350 DEG C~1000 DEG C of flue temperature, 350 DEG C~1000 DEG C of the temperature of lower furnace；The temperature of the first sintering furnace by upper furnace and
The temperature difference regulation of lower furnace, makes the temperature difference of the upper furnace of sintering furnace and lower furnace be maintained at less than 300 DEG C.
D）Silicon chip blows downwards cold by entering into cooling zone, the blowing device of the multiple blowing downwards of cooling zone behind sintering zone
Wind, multiple air intake devices detach hot blast, make the silicon temperature for transferring out below normal temperature.
This have the advantage that：Present invention employs can balance control temperature difference sintering furnace, sintering furnace it is upper
Flue and lower furnace mirror image are connected, and form a silicon chip conveying sintering space for sealing, and the temperature of control upper furnace warm area is with
The temperature difference between the temperature of flue warm area, the temperature for making silicon chip convey sintering space keeps the temperature approach of stable equilibrium, should
Temperature difference is less than 200 DEG C；The mode of this sealing temperature control, can ignore the influence that outer bound pair silicon chip conveys sintering space.This
The sintering method of sintering furnace is simple, easily implementation, can prevent Litter Environmental capacity, the gas of discharge is reached standard shape
State, and this sealed sintering process, substantially increase the stability of sintering.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understanding can carry out various changes, modification, replacement in the case where principle of the invention and structure is not departed to these embodiments
And modification, the scope of the present invention limits by appended claims and its equivalency range.
Claims (10)
1. a kind of drying sintering furnace, including transport platform, it is characterised in that the upper plane of the transport platform is provided with conveyer belt, described
Conveyer belt controls two rod wheels to drive transport by single-motor, and it is pre- that the transport platform is sequentially provided with silicon chip by feed end to discharge end
Hot-zone, Litter combustion zone, sintering zone and silicon chip cooling zone, are interval with multiple drying preheating furnaces in the silicon chip preheating zone,
The temperature of multiple drying preheating furnaces are gradually increasing, and combustion tower is provided with the Litter combustion zone, in the sintering zone between
Every being provided with multiple sealings and can be gradually risen with the first sintering furnace of independent control temperature, the temperature of multiple first sintering furnaces,
Multiple blowing devices and multiple air intake devices are interval with the silicon chip cooling zone, the front side of the transport platform or rear side are provided with
Control device.
2. drying sintering furnace according to claim 1, it is characterised in that first sintering furnace includes temperature-adjustable
Upper furnace and lower furnace, the upper furnace and the lower furnace mirror image are docked, and form a silicon chip conveying sintering space for sealing,
The conveyer belt for conveying silicon chip is provided with silicon chip conveying sintering space, is provided with the upper furnace for heating upper stove
The upper heater of courage warm area temperature and the upper heat sink for reducing upper furnace warm area temperature, are additionally provided with the upper furnace
Upper temperature sense control assembly for sensing the control upper furnace warm area temperature, is provided with heating in the lower furnace
Also set in the lower heater of flue warm area temperature and the lower heat sink for reducing lower furnace warm area temperature, the lower furnace
There is the lower temperature sense control assembly for sensing control lower furnace warm area temperature；The temperature of the upper furnace warm area with it is described under
A temperature difference for balance and stability is formed between flue warm area；Between the temperature of the upper furnace warm area and the lower furnace warm area
The temperature difference of formation is less than 300 DEG C.
3. drying sintering furnace according to claim 2, it is characterised in that the upper heater includes at least one transverse direction
Installed in the upper heat-generating pipe of the upper furnace warm area, it is provided with for monitoring upper heating on the electric power connection line of the upper heat-generating pipe
The upper monitoring display device of pipe working condition, when the upper monitoring display device can not show light, represents that the upper heat-generating pipe is damaged,
The upper heat-generating pipe removes replacing from the position of the upper furnace warm area；
The upper heat sink includes the up-draught pipeline of at least one connection and the upper furnace warm area, the up-draught pipeline
Air inlet stretch out outside the upper furnace, the blowing amount of the up-draught pipeline is controlled by a flow controller.
4. drying sintering furnace according to claim 3, it is characterised in that is provided with the upper furnace warm area and is taken the shape of the letter U
Upper ventilative cotton cover, the madial wall of the upper furnace warm area is provided with solid heat-preservation cotton, and the up-draught pipeline air outlet stretches into institute
State in ventilative cotton cover, during the up-draught pipeline cooling wind, by cooling wind full of close between heat-preservation cotton and ventilative cotton
Space is closed, and forms a closed wind chamber, because ventilative cotton is planar structure, therefore cooling wind is passed through under wind cavity pressure and breathed freely
After cotton, the plane cooling airflow with flow direction can be turned into flue, lowered the temperature so as to be balanced to furnace chamber；
The upper temperature sense control assembly includes temperature thermo-coupler on several, and the temperature-sensing probe of the upper temperature thermo-coupler is stretched
Enter in the upper furnace warm area, the upper temperature thermo-coupler is connected with temperature controller.
5. drying sintering furnace according to claim 4, it is characterised in that the lower heater includes at least one transverse direction
Installed in the lower heat-generating pipe of the lower furnace warm area, it is provided with for monitoring lower heating on the electric power connection line of the lower heat-generating pipe
The lower monitoring display device of pipe working condition, when the lower monitoring display device can not show light, represents that the lower heat-generating pipe is damaged,
The lower heat-generating pipe removes replacing from the position of the lower furnace warm area；
The lower heat sink includes the lower blower duct of at least one connection and the lower furnace warm area, the lower blower duct
Air inlet stretch out outside the lower furnace, the blowing amount of the lower blower duct is controlled by a flow controller.
6. drying sintering furnace according to claim 5, it is characterised in that is provided with the lower furnace warm area in U
The lower ventilative cotton cover of shape, the madial wall of the lower furnace warm area is provided with down solid heat-preservation cotton, and the lower blower duct air outlet is stretched
Enter in the lower ventilative cotton cover, during the lower blower duct conveying cooling wind, be full of between heat-preservation cotton and ventilative cotton by cooling wind
Confined space, and form a closed wind chamber, because ventilative cotton is planar structure, therefore cooling wind is passed through under wind cavity pressure
After ventilative cotton, the plane cooling airflow with flow direction can be turned into flue, lowered the temperature so as to be balanced to furnace chamber；
The lower temperature sense control assembly includes several lower temperature thermo-couplers, and the temperature-sensing probe of the lower temperature thermo-coupler is stretched
Enter in the lower furnace warm area, the lower temperature thermo-coupler is connected with temperature controller.
7. drying sintering furnace according to claim 1, it is characterised in that the combustion tower includes a burning casing, described
Burn casing cavity in be sequentially provided with from the bottom to top can increase the combustion cavity of burning time, for gathering burning gases
Burning gases concentrate cavity and for by the cooling cavity of the gas cooling after burning, the front side of the burning casing or rear side to set
There is the control cabinet for controlling the temperature of the burning casing, the cavity sidewalls of the burning casing are provided with heat-preservation cotton；It is described
Combustion cavity concentrates cavity to separate by a dividing plate with the burning gases, and multiple air-vents are interval with the dividing plate.
8. drying sintering furnace according to claim 7, it is characterised in that is spaced successively from the bottom to top in the combustion cavity
Multigroup electric heating burner for burning waste gas thing is provided with, every two groups adjacent electric heating burners are by a breathable membrane
Separate, form multiple combustion zones, wherein one end of every piece of breathable membrane is interval with multiple through holes, two adjacent institutes
The lead to the hole site on breathable membrane is stated to shift to install.
9. drying sintering furnace according to claim 8, it is characterised in that the bottom of the burning casing is provided with Litter and enters
Enter passage, Litter enters the combustion zone that passage enters the bottom from the Litter, the temperature of multiple combustion zones from it is lower to
On raise successively, Litter after reaching fully burning, flows to burning gases concentration by the different temperatures burning of multiple combustion zones
In cavity, discharged by after cooling cavity cooling；
The electric heating burner is transversely mounted on the earthenware of the combustion zone, the every earthenware including one or more
On be wound with heating wire；
Being provided with the cooling cavity can be with the water condenser of circulation temperature lowering, and the cooling pipe of the water condenser is in multiple U-shapeds
Pipe is formed by connecting, and each U-tube is connected, and the delivery port and water inlet of the cooling pipe are stretched out outside the cooling cavity；
The control cabinet is provided with power switch, heater switch, power supply indicator, ignition temperature display, furnace body temperature and shows
Device, ceiling temperature display and outlet temperature display；
The trailing flank of the burning casing is provided with multiple thermocouples for sensing body of heater ignition temperature, multiple thermocouples from
Under it is supreme be arranged in order, the furnace body temperature for testing each different height.
10. it is a kind of dry sintering furnace sintering method, it is characterised in that comprise the following steps：
A）Solar silicon wafers are put into one can be so that on the conveyer belt of circulation conveying, the conveyer belt controls two rods by single-motor
Wheel drives transport, and the conveyer belt is acted on correction；
B）Solar silicon wafers are once cooled down by tape transport by silicon chip preheating zone, Litter combustion zone, sintering zone and silicon chip
Area；The multiple drying preheating furnaces of interval setting in silicon chip preheating zone, the temperature of multiple drying preheating furnace is gradually increasing, Litter burning
Combustion tower is set in area, be interval with sintering zone multiple sealings and can be multiple with the first sintering furnace of independent control temperature
The temperature of the first sintering furnace gradually rises, the multiple blowing devices of blowing downwards of interval setting and multiple air draughts in silicon chip cooling zone
Air intake device；
C）The preheating furnace temperature of control silicon chip preheating zone is at 200 DEG C~300 DEG C；Control the upper furnace of the first sintering furnace of sintering zone
350 DEG C~1000 DEG C of temperature, 350 DEG C~1000 DEG C of the temperature of lower furnace；The temperature of the first sintering furnace passes through upper furnace and lower stove
The temperature difference regulation of courage, makes the temperature difference of the upper furnace of sintering furnace and lower furnace be maintained at less than 300 DEG C；
D）Silicon chip by entering into cooling zone behind sintering zone, the blowing devices of the multiple blowing downwards of cooling zone to fall wind,
Multiple air intake devices detach hot blast, make the silicon temperature for transferring out below normal temperature.
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| CN111192839B (en) * | 2020-01-07 | 2023-05-12 | 贵州振华风光半导体股份有限公司 | Method for controlling internal water vapor content of black ceramic low-melting glass shell integrated circuit |
| CN111554775A (en) * | 2020-04-29 | 2020-08-18 | 常州比太科技有限公司 | Automatic drying system for solar cell after silver paste printing |
| CN117410216B (en) * | 2023-12-15 | 2024-02-27 | 江苏快克芯装备科技有限公司 | Chip packaging system |
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| CN202793043U (en) * | 2012-08-13 | 2013-03-13 | 镇江金港磁性元件有限公司(中外合资） | Magnetic material sintering system |
| JP5825579B2 (en) * | 2013-01-16 | 2015-12-02 | 住友電工焼結合金株式会社 | Manufacturing method of high strength sintered parts and continuous sintering furnace |
| CN204478805U (en) * | 2015-03-20 | 2015-07-15 | 山西晨洋光伏科技有限公司 | Solar battery sheet sintering furnace |
| CN205900569U (en) * | 2016-07-09 | 2017-01-18 | 东莞市科隆威自动化设备有限公司 | Stoving fritting furnace |
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Address after: 523000 Building 2, 11 Jinfu West Road, Tangchun, Liaobu Town, Dongguan City, Guangdong Province Patentee after: Guangdong kelongwei Intelligent Equipment Co.,Ltd. Address before: Shi Bu Cun Shi Da Lu, Liaobu Town, Dongguan City, Guangdong Province Patentee before: FOLUNGWIN AUTOMATIC EQUIPMENT Co.,Ltd. |