CN106024984A - Drying sintering furnace and drying sintering method - Google Patents
Drying sintering furnace and drying sintering method Download PDFInfo
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- CN106024984A CN106024984A CN201610543723.5A CN201610543723A CN106024984A CN 106024984 A CN106024984 A CN 106024984A CN 201610543723 A CN201610543723 A CN 201610543723A CN 106024984 A CN106024984 A CN 106024984A
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- zone
- cooling
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- 238000005245 sintering Methods 0.000 title claims abstract description 115
- 238000001035 drying Methods 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title claims description 10
- 238000001816 cooling Methods 0.000 claims abstract description 83
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 71
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 71
- 239000010703 silicon Substances 0.000 claims abstract description 71
- 238000002485 combustion reaction Methods 0.000 claims abstract description 56
- 238000007664 blowing Methods 0.000 claims abstract description 27
- 229920000742 Cotton Polymers 0.000 claims description 50
- 239000007789 gas Substances 0.000 claims description 25
- 238000012544 monitoring process Methods 0.000 claims description 20
- 238000004321 preservation Methods 0.000 claims description 17
- 239000012528 membrane Substances 0.000 claims description 14
- 230000036413 temperature sense Effects 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 238000005485 electric heating Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 9
- 230000001276 controlling effect Effects 0.000 claims description 8
- 239000007787 solid Substances 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims description 8
- 239000000523 sample Substances 0.000 claims description 6
- 230000036760 body temperature Effects 0.000 claims description 4
- 229910052571 earthenware Inorganic materials 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 4
- 230000005619 thermoelectricity Effects 0.000 claims description 4
- 238000012937 correction Methods 0.000 claims description 3
- 238000003032 molecular docking Methods 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 210000000232 gallbladder Anatomy 0.000 claims description 2
- 229910052573 porcelain Inorganic materials 0.000 claims description 2
- 239000012141 concentrate Substances 0.000 claims 1
- 239000002912 waste gas Substances 0.000 abstract description 5
- 238000007599 discharging Methods 0.000 abstract 1
- 230000032258 transport Effects 0.000 description 17
- 230000006872 improvement Effects 0.000 description 8
- 238000013459 approach Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000008187 granular material Substances 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009841 combustion method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 235000019628 coolness Nutrition 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
- F27B9/062—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
- F27B9/063—Resistor heating, e.g. with resistors also emitting IR rays
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
- F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D17/00—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases
- F27D17/008—Arrangements for using waste heat; Arrangements for using, or disposing of, waste gases cleaning gases
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a drying sintering furnace which comprises a conveying table. A conveying belt is arranged on the upper plane of the conveying table. A single motor controls two stick wheels to drive the conveying belt to carry out transporting. The conveying table is successively provided with a silicon slice preheating zone, a waste gas combustion zone, a sintering zone and a silicon slice cooling zone from the feeding end to the discharging end. A number of drying preheating furnaces are arranged in the silicon slice preheating zone at intervals. The temperature of a number of drying preheating furnaces gradually rises. A combustion tower is arranged in the waste gas combustion zone. A number of sealed sintering furnaces whose temperature is independently controlled are arranged at intervals in the sintering zone. The temperature of each sintering furnace is the same. A number of blowing devices and suction devices are arranged at intervals in the silicon slice cooling zone. A control device is arranged before or after the conveying table. According to the invention, the structure is simple; the temperature of each sintering temperature zone is balanced; and harmful waste gas is sufficiently combusted.
Description
Technical field
The present invention relates to solar silicon wafers agglomerating plant, dry sintering furnace particularly to one.
Background technology
Solaode is mainly made up of silicon chip, forms quasiconductor P-N on highly purified silicon chip
Knot, the course of processing includes cleaning, dry, spread, etch, spray, print and sintering.
Currently used solar silicon wafers sintering furnace, is generally provided with multiple warm area, each warm area
It is provided with and adds heat pipe and temperature control equipment, for maintaining the temperature constant of each warm area, but by
Temperature in each position of warm area is inconsistent, it is difficult to ensure that the temperature of warm area.
Summary of the invention
It is an object of the invention to the drawbacks described above for prior art, it is provided that a kind of simple in construction,
May insure that the drying sintering furnace of the warm area hygral equilibrium of each sintering.
For solving the drawbacks described above of prior art, present invention provide the technical scheme that a kind of baking
Dry combustion method freezing of a furnace, including transport platform, the upper plane of described transport platform is provided with conveyer belt, described conveying
Band is controlled two rods wheel by single-motor and drives transport, described transport platform by feed end to discharge end
It is sequentially provided with silicon chip preheating zone, Litter combustion zone, sintering zone and silicon chip cooling zone, described silicon
Be interval with multiple drying preheating furnace in sheet preheating zone, the temperature of multiple described drying preheating furnaces by
Gradually rise, be provided with combustion tower in described Litter combustion zone, be interval with many in described sintering zone
Individual sealing and the sintering furnace that can independently control temperature, the temperature of multiple sintering furnaces gradually rises
Height, is interval with multiple blowing device and multiple air intake device in described silicon chip cooling zone, described
The front side of transport platform or rear side are provided with control device.
Dry a kind of improvement of sintering furnace as the present invention, described sintering furnace includes temperature-adjustable
Upper furnace and lower furnace, described upper furnace and described lower furnace mirror image docking, formed one close
The silicon chip conveying sintering space of envelope, is provided with for carrying silicon in described silicon chip conveying sintering space
The conveyer belt of sheet, be provided with in described upper furnace for heat upper furnace warm area temperature on add hot charging
Put and for reducing the upper heat sink of upper furnace warm area temperature, in described upper furnace, be additionally provided with use
The upper temperature sense controlling described upper furnace warm area temperature in sensing controls assembly, described lower furnace
Inside it is provided with the lower heater for heating lower furnace warm area temperature and for reducing lower furnace temperature
The borehole cooling device of district's temperature, is additionally provided with in described lower furnace for sensing control lower furnace warm area
The lower temperature sense of temperature controls assembly；The temperature of described upper furnace warm area and described lower furnace temperature
The temperature difference of a balance and stability is formed between district；The temperature of described upper furnace warm area with described under
The temperature difference formed between flue warm area is less than 300 DEG C.
Dry a kind of improvement of sintering furnace as the present invention, described upper heater include to
A few upper heat-generating pipe being transversely mounted on described upper furnace warm area, the power supply of described upper heat-generating pipe
Be provided with the upper monitoring display device for monitoring upper heat-generating pipe duty on connecting line, described on
When monitoring display device can not show light, described upper heat-generating pipe damages, can be from described upper furnace temperature
Replacing is taken off in the position in district；
Described upper heat sink includes the up-draught of at least connection and described upper furnace warm area
Pipeline, the air inlet of described up-draught pipeline stretches out outside described upper furnace, described up-draught pipeline
Blowing amount controlled by a flow controller.
Dry a kind of improvement of sintering furnace as the present invention, be provided with in described upper furnace warm area one in
The upper ventilative cotton cover of U-shaped, the medial wall of described upper furnace warm area is provided with solid heat-preservation cotton, institute
Stating up-draught pipeline air outlet to stretch in described ventilative cotton cover, the conveying of described up-draught pipeline is cold
But during wind, cooling wind it is full of the confined space between heat-preservation cotton and ventilative cotton, and forms one
Airtight wind chamber, owing to ventilative cotton is planar structure, therefore cooling wind passes through thoroughly under wind cavity pressure
After gas cotton, the plane cooling airflow with the flow direction can be become in flue, it is thus possible to furnace chamber is put down
Weighing apparatus cooling；
Described upper temperature sense controls assembly and includes temperature thermo-coupler on several, described upper temperature
The temperature-sensing probe of thermocouple stretches in described upper furnace warm area, described upper temperature thermo-coupler and temperature
Controller connects.
Dry a kind of improvement of sintering furnace as the present invention, described lower heater includes at least one
Root is transversely mounted on the lower heat-generating pipe of described lower furnace warm area, and the power supply of described lower heat-generating pipe connects
The lower monitoring display device for monitoring lower heat-generating pipe duty, described lower monitoring it is provided with on line
When display can not show light, described lower heat-generating pipe damages, can be from described lower furnace warm area
Replacing is taken off in position；
Described borehole cooling device includes the lower blowing of at least connection and described lower furnace warm area
Pipeline, the air inlet of described lower blower duct stretches out outside described lower furnace, described lower blower duct
Blowing amount controlled by a flow controller.
Dry a kind of improvement of sintering furnace as the present invention, be provided with in described lower furnace warm area
The one lower ventilative cotton cover taken the shape of the letter U, the medial wall of described lower furnace warm area is provided with down solid insulation
Cotton, described lower blower duct air outlet stretches in described lower ventilative cotton cover, described lower blower duct
During conveying cooling wind, cooling wind it is full of the confined space between heat-preservation cotton and ventilative cotton, and shape
Becoming an airtight wind chamber, owing to ventilative cotton is planar structure, therefore cooling wind is under wind cavity pressure
After ventilative cotton, the plane cooling airflow with the flow direction can be become in flue, it is thus possible to right
Furnace chamber balance cooling；
Described lower temperature sense controls assembly and includes several lower temperature thermo-coupler, described lower temperature
The temperature-sensing probe of thermocouple stretches in described lower furnace warm area, described lower temperature thermo-coupler and temperature
Controller connects.
Dry a kind of improvement of sintering furnace as the present invention, described combustion tower includes a combustion box
Body, it is characterised in that: it is sequentially provided with from the bottom to top and can increase in the cavity of described burning casing
The combustion cavity of burning time, for gather burning gases burning gases collection cavity and for
By the cooling cavity of the gas cooling after burning, front side or the rear side of described burning casing are provided with use
In the control chamber of the temperature controlling described burning casing, the cavity sidewalls of described burning casing sets
There is heat-preservation cotton；Described combustion cavity is separated by a dividing plate with described burning gases collection cavity,
Multiple air-vent it is interval with on described dividing plate.
Dry a kind of improvement of sintering furnace as the present invention, depend on from the bottom to top in described combustion cavity
Minor tick is provided with the many groups of electric heating burners for the Litter that burns, every two groups of adjacent electric heating
Burner is all to be separated by a breathable membrane, forms multiple combustion zone, every piece described ventilative every
Wherein one end of plate is all interval with multiple through hole, leading on two adjacent described breathable membrane
Hole site is for shifting to install.
Dry a kind of improvement of sintering furnace as the present invention, the bottom of described burning casing is provided with useless
Gas thing enters passage, and Litter enters passage from this Litter and enters the combustion zone of the bottom, many
The temperature of individual described combustion zone raises the most successively, and Litter is through multiple combustion zones not
Synthermal burning, after reaching fully to burn, flows in burning gases collection cavity, through cooling
Discharge after cavity cooling；
Described electric heating burner includes that one or more is transversely mounted on the pottery of described combustion zone
Porcelain tube, every described earthenware is all wound with heating wire；
Be provided with in described cooling cavity can with the water condenser of circulation temperature lowering, described water condenser
Cooling pipe is that multiple U-tube is formed by connecting, and each U-tube all connects, described cooling pipe
Outlet and water inlet all stretch out outside described cooling cavity；
Described control chamber is provided with on and off switch, heater switch, power supply indicator, ignition temperature
Display, furnace body temperature display, ceiling temperature display and outlet temperature display；
The trailing flank of described burning casing is provided with multiple thermoelectricity for sensing body of heater ignition temperature
Even, multiple described thermocouples are arranged in order from bottom to up, for testing the stove of each differing heights
Temperature.
Compared with prior art, the invention have the advantage that present invention employs and can balance control
The sintering furnace of temperature difference, the upper furnace of sintering furnace and lower furnace mirror image connect, and form a sealing
Silicon chip conveying sintering space, control upper furnace warm area temperature and lower furnace warm area temperature it
Between the temperature difference, make silicon chip conveying sintering space temperature keep a stable equilibrium temperature approach,
This temperature difference is less than 300 DEG C；The mode of this sealing temperature control, can ignore outer bound pair silicon chip
The impact of conveying sintering space.Improve the stability of the temperature difference, product sintering matter can be effectively improved
Amount.The present invention is also provided with the combustion tower that can discharge again after fully being burnt by Litter, the row of making
The gas conformance with standard put, more environmentally-friendly, the waste particles dust after burning in combustion tower,
Both can be easy to clean with complete liquidation by vacuum cleaner.The present invention is also provided with can prompt drop soon
The cooling device of low silicon temperature, through above blowing down the mode of suction, accelerates gas flowing, makes silicon
Sheet is quickly reduced to room temperature level.
It is a further object of the present invention to provide a kind of sintering method drying sintering furnace, including following
Step:
A) solar silicon wafers is put into one can circulate on the conveyer belt of conveying, this conveyer belt
Being controlled two rod wheels by single-motor and drive transport, this conveyer belt has correction effect；
B) solar silicon wafers by tape transport once through silicon chip preheating zone, Litter burning
District, sintering zone and silicon chip cooling zone；In silicon chip preheating zone, interval arranges multiple drying preheating furnace,
The temperature of multiple drying preheating furnaces is gradually increasing, and arranges combustion tower in Litter combustion zone, sintering
Sintering furnace that is that be interval with multiple sealing in district and that can independently control temperature, multiple sintering
The temperature of stove gradually rises, and in silicon chip cooling zone, interval arranges the blowing device of multiple downward blowing
Air intake device with multiple air draughts；
C) the preheating furnace temperature of silicon chip preheating zone is controlled at 200 DEG C～300 DEG C；Control sintering zone
The upper furnace temperature 350 DEG C～1000 DEG C of sintering furnace, the temperature of lower furnace 350 DEG C～1000
℃；The temperature of sintering furnace is regulated by the temperature difference of upper furnace and lower furnace, makes the upper of sintering furnace
The temperature difference of flue and lower furnace is held at less than 300 DEG C
D) silicon chip enters into cooling zone behind sintering zone, the multiple downward blowing of cooling zone
Blowing device is to fall wind, and hot blast is detached by multiple air intake devices, makes the silicon chip transferred out
Temperature is below room temperature.
Compared with prior art, the invention have the advantage that present invention employs and can balance control
The sintering furnace of temperature difference, the upper furnace of sintering furnace and lower furnace mirror image connect, and form a sealing
Silicon chip conveying sintering space, control upper furnace warm area temperature and lower furnace warm area temperature it
Between the temperature difference, make silicon chip conveying sintering space temperature keep a stable equilibrium temperature approach,
This temperature difference is less than 200 DEG C；The mode of this sealing temperature control, can ignore outer bound pair silicon chip
The impact of conveying sintering space.The sintering method of this sintering furnace simply, easily implement, can in case
Only Litter Environmental capacity, makes the gas of discharge reach standard state, and this sealed
Sintering process, substantially increases the stability of sintering.
Accompanying drawing explanation
The most with reference to the accompanying drawings with detailed description of the invention to the present invention and useful technique effect thereof
It is described in further detail, wherein:
Fig. 1 is front view of the present invention.
Fig. 2 is combustion furnace of the present invention front view.
Fig. 3 is combustion furnace of the present invention sectional view.
Fig. 4 is combustion tower front view.
Fig. 5 is A-A sectional view in Fig. 4.
Reference title: 1, transport platform 3, rod wheel 4, silicon chip preheating zone 5, waste gas
Thing combustion zone 6, sintering zone 7, silicon chip cooling zone 8, drying preheating furnace 9, combustion tower
10, sintering furnace 11, blowing device 12, air intake device 13, control device.101、
Upper furnace 102, lower furnace 103, silicon chip conveying sintering space 104, silicon chip 105, conveying
Band 106, upper furnace warm area 107, upper heater 108, upper heat sink 109, lower stove
Gallbladder warm area 1010, lower heater 1011, borehole cooling device 1012, upper ventilative cotton cover
1013, upper solid heat-preservation cotton 1014, upper temperature thermo-coupler 1015, lower ventilative cotton cover 1016,
Under solid heat-preservation cotton 1017, lower temperature thermo-coupler 1071, upper heat-generating pipe 1072, power supply even
Wiring 1073, upper monitoring display device 10101, lower heat-generating pipe 10102, monitoring display device 91,
Burning casing 92, combustion cavity 93, burning gases collection cavity 94, cooling cavity 95,
Control chamber 96, dividing plate 97, air-vent 98, electric heating burner 99, breathable membrane
910, combustion zone 911, through hole 912, Litter enter passage 913, heat-preservation cotton 941,
Water condenser 942, cooling pipe 943, outlet 944, water inlet 951, on and off switch
952, heater switch 953, power supply indicator 954, ignition temperature display 955, body of heater
Temperature indicator 956, ceiling temperature display 957, outlet temperature display 981, pottery
Pipe 982, heating wire.
Detailed description of the invention
The invention will be further described with specific embodiment the most with reference to the accompanying drawings, but the present invention
Embodiment be not limited to this.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4 and Fig. 5, a kind of dry sintering furnace, including
Transport platform 1, the upper plane of transport platform 1 is provided with conveyer belt 105, and conveyer belt 105 is by single horse
Reaching two rod wheel 3 drive transports of control, transport platform 1 is sequentially provided with silicon by feed end to discharge end
Sheet preheating zone 4, Litter combustion zone 5, sintering zone 6 and silicon chip cooling zone 7, silicon chip preheats
Being interval with multiple drying preheating furnace 8 in district 4, the temperature of multiple drying preheating furnaces 8 gradually goes up
Rise, be provided with combustion tower 9 in Litter combustion zone 5, in sintering zone 6, be interval with multiple sealing
And the sintering furnace 10 that can independently control temperature, the temperature of multiple sintering furnaces 10 gradually rises
Height, is interval with multiple blowing device 11 and multiple air intake device 12 in silicon chip cooling zone 7,
The front side of transport platform 1 or rear side are provided with control device 13.
Preferably, sintering furnace 10 includes upper furnace 101 and the lower furnace 102 of temperature-adjustable,
Upper furnace 101 and the docking of lower furnace 102 mirror image, form a silicon chip conveying sintering sky sealed
Between 103, silicon chip conveying sintering space 103 in be provided with the conveyer belt for carrying silicon chip 104
105, it is provided with the upper heater for heating upper furnace warm area 106 temperature in upper furnace 101
107 and for reducing the upper heat sink 108 of upper furnace warm area 106 temperature, upper furnace 101
Inside it is additionally provided with for sensing the upper temperature sense control assembly controlling upper furnace warm area 106 temperature,
The lower heater 1010 for heating lower furnace warm area 109 temperature it is provided with in lower furnace 102
With for reducing the borehole cooling device 1011 of lower furnace warm area 109 temperature, in lower furnace 101
It is additionally provided with for sensing the lower temperature sense control assembly controlling lower furnace warm area 109 temperature.
Preferably, one is formed between temperature and the lower furnace warm area 109 of upper furnace warm area 106
The temperature difference of balance and stability.
Preferably, the temperature formed between temperature and the lower furnace warm area 109 of upper furnace warm area 106
Degree difference is for less than 300 DEG C.
Preferably, upper heater 107 includes that at least is transversely mounted on a upper furnace warm area
The upper heat-generating pipe 1071 of 106, the electric power connection line 1072 of upper heat-generating pipe 1071 is provided with use
In the upper monitoring display device 1073 of the upper heat-generating pipe duty of monitoring, upper monitoring display device 1073
When can not show light, upper heat-generating pipe 1071 damages, can be from the position of upper furnace warm area 106
Take off replacing；
Upper heat sink 108 includes the up-draught pipe of at least connection and upper furnace warm area 106
Road, the air inlet 1018 of up-draught pipeline stretches out outside upper furnace 1.The blowing of up-draught pipeline
Measure and controlled by a flow controller.
Preferably, in upper furnace warm area 106, it is provided with a upper ventilative cotton cover 1012 taken the shape of the letter U,
The medial wall of upper furnace warm area 106 is provided with solid heat-preservation cotton 1013, up-draught pipeline air-out
Mouth stretches in ventilative cotton cover 1012, during up-draught pipeline conveying cooling wind, fills cooling wind
Full confined space between heat-preservation cotton and ventilative cotton, and form an airtight wind chamber, due to ventilative
Cotton is planar structure, after therefore cooling wind is under wind cavity pressure through ventilative cotton, and can be in flue
Become the plane cooling airflow with the flow direction, it is thus possible to furnace chamber balance cooling.
Preferably, upper temperature sense controls assembly and includes temperature thermo-coupler 1014 on several,
The temperature-sensing probe of upper temperature thermo-coupler 1014 stretches in upper furnace warm area 106, upper temperature thermoelectricity
Even 1014 are connected with temperature controller.
Preferably, lower heater 1010 includes that at least is transversely mounted on a lower furnace warm area
The lower heat-generating pipe 10101 of 109, the electric power connection line 1072 of lower heat-generating pipe 10101 is provided with
For monitoring the lower monitoring display device 10102 of lower heat-generating pipe duty, lower monitoring display device
10102 when can not show light, and lower heat-generating pipe 10101 damages, can be from lower furnace warm area 109
Position take off replacing；
Borehole cooling device 1011 includes the lower blowing of at least connection and lower furnace warm area 109
Pipeline, the air inlet 1018 of lower blower duct stretches out outside lower furnace 102.Lower blower duct
Blowing amount is controlled by a flow controller.
Preferably, in lower furnace warm area 109, it is provided with a lower ventilative cotton cover 1015 taken the shape of the letter U,
The medial wall of lower furnace warm area 109 is provided with down solid heat-preservation cotton 1016, lower blower duct air-out
Mouth stretches in lower ventilative cotton cover 1015, during lower blower duct conveying cooling wind, fills cooling wind
Full confined space between heat-preservation cotton and ventilative cotton, and form an airtight wind chamber, due to ventilative
Cotton is planar structure, after therefore cooling wind is under wind cavity pressure through ventilative cotton, and can be in flue
Become the plane cooling airflow with the flow direction, it is thus possible to furnace chamber balance cooling.
Preferably, lower temperature sense controls assembly and includes several lower temperature thermo-coupler 1017,
The temperature-sensing probe of lower temperature thermo-coupler 1017 stretches in lower furnace warm area 109, lower temperature thermoelectricity
Even 1017 are connected with temperature controller.
Combustion tower 9 includes a burning casing 91, depends on from the bottom to top in the cavity of burning casing 91
Secondary being provided with can increase the combustion cavity 92 of burning time, for gathering the burning of burning gases
Gas collection cavity 93 and the cooling cavity 94 of the gas cooling after burning, combustion box
The front side of body 91 or rear side are provided with the control chamber 95 of the temperature for controlling burning casing 91,
The cavity sidewalls of burning casing 91 is provided with heat-preservation cotton 913.
Preferably, combustion cavity 92 and burning gases collection cavity 93 by a dividing plate 96 every
Open, dividing plate 96 is interval with multiple air-vent 97.
Preferably, be interval with the most successively in combustion cavity 92 many groups useless for burning
The electric heating burner 98 of gas thing, every two groups of adjacent electric heating burners 98 are all saturating by one
Air bound plate 99 separates, and forms multiple combustion zone 910, wherein one end of every piece of breathable membrane 99
All it is interval with multiple through hole 911, the adjacent through hole 911 on two breathable membrane 99
It is set to shift to install.
Preferably, adjacent through hole 911 position on two breathable membrane 99 is not in same one end.
The adjacent through hole 911 on two breathable membrane 99, leading on upper and lower two breathable membrane 99
911 1, hole on one, the left side on the right, or the through hole 911 on following breathable membrane 99
On the right, the through hole 911 on the breathable membrane 99 of top is on the left side.
Preferably, the bottom of burning casing 91 is provided with Litter and enters passage 912, Litter
Enter passage 912 from this Litter and enter the combustion zone 910 of the bottom, multiple combustion zones 910
Temperature raise the most successively, Litter through multiple burnings 910 different temperatures fire
Burn, after reaching fully to burn, flow in burning gases collection cavity 93, through cooling cavity
Discharge after 94 coolings.
Preferably, electric heating burner 98 includes that one or more is transversely mounted on combustion zone 910
Earthenware 981, every earthenware 981 is all wound with heating wire 982.
Preferably, being provided with in cooling cavity 94 can be with the water condenser 941 of circulation temperature lowering, water
The cooling pipe 942 of condenser 941 is formed by connecting in multiple U-tube, and each U-tube all connects
Logical, the outlet 943 of cooling pipe 942 and water inlet 944 all stretch out outside cooling cavity 94.
Preferably, control chamber 95 is provided with on and off switch 951, heater switch 952, power supply refer to
Show that lamp 953, ignition temperature display 954, furnace body temperature display 955, ceiling temperature are aobvious
Show device 956 and outlet temperature display 957.
Preferably, the trailing flank of burning casing 91 is provided with multiple for sensing body of heater ignition temperature
Thermocouple, multiple thermocouples are arranged in order from bottom to up, for testing each differing heights
Furnace body temperature.
The present invention uses the mode the most successively burnt, by the through hole of breathable membrane 99
The mode shifted to install, growth Litter granule, through the time of each burning 910, makes waste gas
The composition granule burning degree in each combustion zone is more abundant, and after being allowed to, the gas of discharge reaches mark
Levels of emissions, the combustion system of this combustion tower can be substantially reduced the row of Litter granule
Put, make the gas more environmental protection of discharge, and this product is by permissible for the dust after burning particulate matter
Clean by vacuum cleaner complete liquidation, it is simple to collect and clean combustion tower, the present invention be provided with by
The thermocouple of layer temperature sense, may be displayed on the ignition temperature of each combustion zone, monitors in real time,
It is possible to prevent Litter particle burning insufficient.
The transport platform 1 of the present invention can arrange two-wire and dry sintering simultaneously, two transport platform 1 it
Between be provided with enough spaces to maintainer enter, this two-wire dry sintering processing more convenient
Produce and install, it is possible to reduce floor space, it is possible to improve the volume of production of production line.
A kind of sintering method drying sintering furnace, comprises the following steps:
A) solar silicon wafers is put into one can circulate on the conveyer belt of conveying, this conveyer belt
Being controlled two rod wheels by single-motor and drive transport, this conveyer belt has correction effect；
B) solar silicon wafers by tape transport once through silicon chip preheating zone, Litter burning
District, sintering zone and silicon chip cooling zone；In silicon chip preheating zone, interval arranges multiple drying preheating furnace,
The temperature of multiple drying preheating furnaces is gradually increasing, and arranges combustion tower in Litter combustion zone, sintering
Sintering furnace that is that be interval with multiple sealing in district and that can independently control temperature, multiple sintering
The temperature of stove gradually rises, and in silicon chip cooling zone, interval arranges the blowing device of multiple downward blowing
Air intake device with multiple air draughts；
C) the preheating furnace temperature of silicon chip preheating zone is controlled at 200 DEG C～300 DEG C；Control sintering zone
The upper furnace temperature 350 DEG C～1000 DEG C of sintering furnace, the temperature of lower furnace 350 DEG C～1000
℃；The temperature of sintering furnace is regulated by the temperature difference of upper furnace and lower furnace, makes the upper of sintering furnace
The temperature difference of flue and lower furnace is held at less than 300 DEG C.
D) silicon chip enters into cooling zone behind sintering zone, the multiple downward blowing of cooling zone
Blowing device is to fall wind, and hot blast is detached by multiple air intake devices, makes the silicon chip transferred out
Temperature is below room temperature.
This have the advantage that: present invention employs and can balance the sintering controlling temperature difference
Stove, the upper furnace of sintering furnace and lower furnace mirror image connect, and form a silicon chip conveying sealed and burn
Knot space, controls the temperature difference between temperature and the temperature of lower furnace warm area of upper furnace warm area, makes
The temperature of silicon chip conveying sintering space keeps the temperature approach of a stable equilibrium, and this temperature difference is little
In 200 DEG C；The mode of this sealing temperature control, can ignore outer bound pair silicon chip conveying sintering space
Impact.The sintering method of this sintering furnace simply, easily implement, is possible to prevent Litter to pollute
Control, make the gas of discharge reach standard state, and this sealed sintering process, greatly
Improve greatly the stability of sintering.
Although an embodiment of the present invention has been shown and described, for the ordinary skill of this area
For personnel, it is possible to understand that can be to this in the case of without departing from the principle of the present invention and structure
A little embodiments carry out multiple change, revise, replace and modification, and the scope of the present invention is by appended power
Profit requires and equivalency range limits.
Claims (10)
1. a drying sintering furnace, including transport platform, it is characterised in that described transport platform
Upper plane is provided with conveyer belt, and described conveyer belt is controlled two rod wheels by single-motor and drives transport,
Described transport platform by feed end to discharge end be sequentially provided with silicon chip preheating zone, Litter combustion zone,
Sintering zone and silicon chip cooling zone, be interval with multiple drying preheating furnace in described silicon chip preheating zone,
The temperature of multiple described drying preheating furnaces is gradually increasing, and is provided with burning in described Litter combustion zone
Tower, sintering that is that be interval with multiple sealing in described sintering zone and that can independently control temperature
Stove, the temperature of multiple sintering furnaces gradually rises, and is interval with multiple blowing in described silicon chip cooling zone
Wind apparatus and multiple air intake device, the front side of described transport platform or rear side are provided with control device.
Drying sintering furnace the most according to claim 1, it is characterised in that described sintering
Stove includes upper furnace and the lower furnace of temperature-adjustable, described upper furnace and described lower furnace mirror image
Docking, forms a silicon chip conveying sintering space sealed, carries sintering space at described silicon chip
Inside it is provided with the conveyer belt for carrying silicon chip, is provided with in described upper furnace for heating upper furnace temperature
The upper heater of district's temperature and for reducing the upper heat sink of upper furnace warm area temperature, described
It is additionally provided with in upper furnace for sensing the upper temperature sense control controlling described upper furnace warm area temperature
Assembly processed, be provided with in described lower furnace lower heater for heating lower furnace warm area temperature and
For reducing the borehole cooling device of lower furnace warm area temperature, it is additionally provided with for feeling in described lower furnace
The lower temperature sense that should control lower furnace warm area temperature controls assembly；The temperature of described upper furnace warm area
The temperature difference of a balance and stability is formed between degree and described lower furnace warm area；Described upper furnace temperature
The temperature difference formed between temperature and the described lower furnace warm area in district is less than 300 DEG C.
Drying sintering furnace the most according to claim 2, it is characterised in that described
Upper heater includes at least upper heat-generating pipe being transversely mounted on described upper furnace warm area, institute
State and be provided with on the electric power connection line of heat-generating pipe for monitoring upper heat-generating pipe duty
Monitoring display device, when described upper monitoring display device can not show light, described upper heat-generating pipe damages,
Replacing can be taken off from the position of described upper furnace warm area；
Described upper heat sink includes the up-draught of at least connection and described upper furnace warm area
Pipeline, the air inlet of described up-draught pipeline stretches out outside described upper furnace, described up-draught pipeline
Blowing amount controlled by a flow controller.
Drying sintering furnace the most according to claim 3, it is characterised in that described upper stove
Being provided with a upper ventilative cotton cover taken the shape of the letter U in gallbladder warm area, the medial wall of described upper furnace warm area sets
Upper solid heat-preservation cotton, described up-draught pipeline air outlet is had to stretch in described ventilative cotton cover, institute
State up-draught pipeline conveying cooling wind time, by cooling wind be full of between heat-preservation cotton and ventilative cotton close
Close space, and form an airtight wind chamber, owing to ventilative cotton is planar structure, therefore cool down wind
After passing through ventilative cotton under wind cavity pressure, the plane cooling wind with the flow direction can be become in flue
Stream, it is thus possible to furnace chamber balance cooling；
Described upper temperature sense controls assembly and includes temperature thermo-coupler on several, described upper temperature
The temperature-sensing probe of thermocouple stretches in described upper furnace warm area, described upper temperature thermo-coupler and temperature
Controller connects.
Drying sintering furnace the most according to claim 4, it is characterised in that add under described
Thermal includes at least lower heat-generating pipe being transversely mounted on described lower furnace warm area, described under
The lower monitoring for monitoring lower heat-generating pipe duty it is provided with on the electric power connection line of heat-generating pipe
Display, when described lower monitoring display device can not show light, described lower heat-generating pipe damages, can
Replacing is taken off from the position of described lower furnace warm area；
Described borehole cooling device includes the lower blowing of at least connection and described lower furnace warm area
Pipeline, the air inlet of described lower blower duct stretches out outside described lower furnace, described lower blower duct
Blowing amount controlled by a flow controller.
Drying sintering furnace the most according to claim 5, it is characterised in that described
A lower ventilative cotton cover taken the shape of the letter U, the inner side of described lower furnace warm area it is provided with in lower furnace warm area
Wall is provided with down solid heat-preservation cotton, and described lower blower duct air outlet stretches into described lower ventilative cotton cover
In, during described lower blower duct conveying cooling wind, cooling wind it is full of heat-preservation cotton and ventilative cotton
Between confined space, and form an airtight wind chamber, owing to ventilative cotton is planar structure, therefore
After cooling wind passes through ventilative cotton under wind cavity pressure, the plane with the flow direction can be become in flue
Cooling airflow, it is thus possible to furnace chamber balance cooling；
Described lower temperature sense controls assembly and includes several lower temperature thermo-coupler, described lower temperature
The temperature-sensing probe of thermocouple stretches in described lower furnace warm area, described lower temperature thermo-coupler and temperature
Controller connects.
Drying sintering furnace the most according to claim 1, it is characterised in that described burning
Tower includes a burning casing, it is characterised in that: depend on from the bottom to top in the cavity of described burning casing
Secondary being provided with can increase the combustion cavity of burning time, for gathering the burning gases of burning gases
Collection cavity and the cooling cavity of the gas cooling after burning, before described burning casing
Side or rear side are provided with the control chamber of the temperature for controlling described burning casing, described burning casing
Cavity sidewalls be provided with heat-preservation cotton；Described combustion cavity is led to described burning gases collection cavity
Cross a dividing plate to separate, described dividing plate is interval with multiple air-vent.
Drying sintering furnace the most according to claim 7, it is characterised in that described burning
The many groups of electric heating burners for the Litter that burns it are interval with the most successively in cavity,
Every two groups of adjacent electric heating burners are all to be separated by a breathable membrane, form multiple burning
District, wherein one end of every piece of described breathable membrane is all interval with multiple through hole, adjacent two
Lead to the hole site on described breathable membrane is for shifting to install.
Drying sintering furnace the most according to claim 8, it is characterised in that described burning
The bottom of casing is provided with Litter and enters passage, and Litter enters passage from this Litter and enters
The combustion zone of bottom, the temperature of multiple described combustion zones raises the most successively, Litter warp
Cross the different temperatures burning of multiple combustion zone, after reaching fully to burn, flow to burning gases and concentrate
In cavity, discharge after cooling cavity cooling；
Described electric heating burner includes that one or more is transversely mounted on the pottery of described combustion zone
Porcelain tube, every described earthenware is all wound with heating wire；
Be provided with in described cooling cavity can with the water condenser of circulation temperature lowering, described water condenser
Cooling pipe is that multiple U-tube is formed by connecting, and each U-tube all connects, described cooling pipe
Outlet and water inlet all stretch out outside described cooling cavity；
Described control chamber is provided with on and off switch, heater switch, power supply indicator, ignition temperature
Display, furnace body temperature display, ceiling temperature display and outlet temperature display；
The trailing flank of described burning casing is provided with multiple thermoelectricity for sensing body of heater ignition temperature
Even, multiple described thermocouples are arranged in order from bottom to up, for testing the stove of each differing heights
Temperature.
10. the sintering method drying sintering furnace, it is characterised in that comprise the following steps:
A) solar silicon wafers is put into one can circulate on the conveyer belt of conveying, this conveyer belt
Being controlled two rod wheels by single-motor and drive transport, this conveyer belt has correction effect；
B) solar silicon wafers by tape transport once through silicon chip preheating zone, Litter burning
District, sintering zone and silicon chip cooling zone；In silicon chip preheating zone, interval arranges multiple drying preheating furnace,
The temperature of multiple drying preheating furnaces is gradually increasing, and arranges combustion tower in Litter combustion zone, sintering
Sintering furnace that is that be interval with multiple sealing in district and that can independently control temperature, multiple sintering
The temperature increase and decrease of stove raises, and in silicon chip cooling zone, interval arranges the blowing device of multiple downward blowing
Air intake device with multiple air draughts；
C) the preheating furnace temperature of silicon chip preheating zone is controlled at 200 DEG C～300 DEG C；Control sintering zone
The upper furnace temperature 350 DEG C～1000 DEG C of sintering furnace, the temperature of lower furnace 350 DEG C～1000
℃；The temperature of sintering furnace is regulated by the temperature difference of upper furnace and lower furnace, makes the upper of sintering furnace
The temperature difference of flue and lower furnace is held at less than 300 DEG C；
D) silicon chip enters into cooling zone behind sintering zone, the multiple downward blowing of cooling zone
Blowing device is to fall wind, and hot blast is detached by multiple air intake devices, makes the silicon chip transferred out
Temperature is below room temperature.
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| CN107062896A (en) * | 2017-03-31 | 2017-08-18 | 东莞市科隆威自动化设备有限公司 | A kind of single line dries sintering furnace |
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| CN107576202A (en) * | 2017-08-25 | 2018-01-12 | 苏州南北深科智能科技有限公司 | A kind of sintering furnace for being used to process solar silicon wafers |
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| CN108010872B (en) * | 2017-12-12 | 2023-11-28 | 深圳市佳思特光电设备有限公司 | Solid brilliant hardening oven machine with adjustable segmentation |
| CN109888029A (en) * | 2019-03-22 | 2019-06-14 | 韩华新能源（启东）有限公司 | It is a kind of for improving the sintering method in PERC battery aluminium cavity |
| CN109888029B (en) * | 2019-03-22 | 2022-04-12 | 韩华新能源（启东）有限公司 | Sintering method for improving aluminum cavity of PERC battery |
| CN111192839A (en) * | 2020-01-07 | 2020-05-22 | 贵州振华风光半导体有限公司 | Method for controlling water vapor content in integrated circuit with black ceramic low-melting glass shell |
| CN111192839B (en) * | 2020-01-07 | 2023-05-12 | 贵州振华风光半导体股份有限公司 | Method for controlling internal water vapor content of black ceramic low-melting glass shell integrated circuit |
| CN111554775A (en) * | 2020-04-29 | 2020-08-18 | 常州比太科技有限公司 | Automatic drying system for solar cell after silver paste printing |
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| CN117410216B (en) * | 2023-12-15 | 2024-02-27 | 江苏快克芯装备科技有限公司 | Chip packaging system |
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Address after: 523000 Building 2, 11 Jinfu West Road, Tangchun, Liaobu Town, Dongguan City, Guangdong Province Patentee after: Guangdong kelongwei Intelligent Equipment Co.,Ltd. Address before: Shi Bu Cun Shi Da Lu, Liaobu Town, Dongguan City, Guangdong Province Patentee before: FOLUNGWIN AUTOMATIC EQUIPMENT Co.,Ltd. |