CN106024704A - Flexible display panel and manufacturing method thereof and flexible display device - Google Patents
Flexible display panel and manufacturing method thereof and flexible display device Download PDFInfo
- Publication number
- CN106024704A CN106024704A CN201610364506.XA CN201610364506A CN106024704A CN 106024704 A CN106024704 A CN 106024704A CN 201610364506 A CN201610364506 A CN 201610364506A CN 106024704 A CN106024704 A CN 106024704A
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- flexible display
- display panels
- line
- bearing basement
- rigidity bearing
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention provides a flexible display panel and a manufacturing method thereof and a flexible display device. The manufacturing method comprises the steps as follows: a rigid bearing base is provided; cutting line structures are formed on the rigid bearing base; a closed region is enclosed by each cutting line structure and is provided with at least one sub-panel; a flexible substrate is formed on the rigid bearing base; a display device film layer and a protective film layer are formed on the flexible substrate; the cutting line structures can converge parallel light from one side of the rigid bearing base into a region, corresponding to the cutting line structures, of the flexible substrate; and when the flexible substrate is stripped from the rigid bearing base in a laser light irradiation manner, the energy at the corresponding positions of the cutting line structures is higher than that of the other positions due to the convergence effects of the cutting line structures on laser light, so that the flexible display panel can be simultaneously cut into a plurality of sub-panels, namely the stripping technology and the cutting technology are finished in one procedure; the production cost is reduced; and the production efficiency is improved.
Description
Technical field
The present invention relates to Display Technique field, particularly relate to a kind of flexible display panels and preparation method thereof with soft
Property display device.
Background technology
Flexible Displays is the important development direction of Display Technique of future generation, flexible display device have flexible,
Ultra-thin, low-power consumption non-friable, ultralight, the feature such as portable, e-book, mobile communication equipment, notebook,
The field such as TV, public information display has broad application prospects and good development expection.
The preparation method of flexible display device is typically to be attached to just flexible substrates by certain mode at present
In property bearing basement, such as: by binding agent, sacrifice layer, coating (coating) etc., then in flexibility
Prepare display device (OLED/LCD/PLED) and protecting film layer in substrate, irradiated by laser after completing
Method flexible display panels is separated with rigidity bearing basement, finally to separate after flexible display panels enter
Row cutter cuts, and back segment module group assembling forms final display device.
It is with the laser of specific wavelength that laser irradiates the principle of (Laser Lift-Off) stripping flexible display panels
Irradiating the separating surface of flexible substrates and rigidity bearing substrate, the flexible substrates molecule absorption on its separating surface swashs
Light energy, produces molecular scission, separates with rigidity bearing basement afterwards.The flexible display panels stripped down
Cutting technique to be carried out, will cut into small panel by panel greatly, then carry out back segment module group assembling.Owing to swashing
Flexible display panels after photospallation becomes soft, easily bends, and is being transported to cut or cutter
During cutting equipment, specific carrier can only be used to carry, this adds production cost undoubtedly.And
And, when using cutter cutting, the protecting film layer (such as inorganic barrier film layer) in flexible display panels exists
In cutter cutting process, can rupture because the high incision pressure of cutter, impact afterwards is final flexible
The characteristic of display element.
Summary of the invention
In view of this, the present invention provides a kind of flexible display panels and preparation method thereof and cutting method, is used for
Solving existing flexible display panels in manufacturing process, stripping technology and cutting technique separately carry out and cause
Cost high, the problem that production efficiency is low.
For solving above-mentioned technical problem, the present invention provides the manufacture method of a kind of flexible display panels, including:
One rigidity bearing basement is provided；
Forming line of cut structure in described rigidity bearing basement, each described line of cut structure surrounds a Guan Bi
Region, is used in described enclosed region arranging at least one sub-panel；
Described rigidity bearing basement is formed flexible substrates；
Described flexible substrates is formed display device film layer and protecting film layer；
Wherein, described line of cut structure can will come from the directional light congruence of described rigidity bearing basement side
Gather on the region corresponding with described line of cut structure of described flexible substrates.
Preferably, the manufacture method of described flexible display panels also includes:
Laser is used to irradiate described flexible display panels from described rigidity bearing basement side so that described flexibility
Substrate is peeled off from described rigidity bearing substrate, and meanwhile, the line of cut structure in described rigidity bearing basement will
The laser of corresponding position converges to, on the region corresponding with described line of cut structure of described flexible substrates, make
Obtain described flexible display panels and be cut into multiple sub-panel along described line of cut structure.
Preferably, described laser is excimer laser.
Preferably, the wavelength of described laser is 308nm, and energy is 300～700MJ, and frequency is
200～300HZ.
Preferably, the described line of cut structure that formed in described rigidity bearing basement includes:
Form groove structure on the surface of described rigidity bearing basement, each described groove structure surrounds a Guan Bi
Region, is used for arranging at least one sub-panel in described enclosed region, the inwall of described groove structure is cambered surface；
Forming interstitital texture in described groove structure, the refractive index of described interstitital texture is held more than described rigidity
Carrying the refractive index of substrate, described groove structure constitutes described line of cut structure with described interstitital texture.
Preferably, photoetching process is used to form described groove structure on the surface of described rigidity bearing basement.
Preferably, the radius of the cambered surface of described groove structure meets following condition:Wherein, r
For the radius of the cambered surface of described groove structure, f is the described cambered surface light collection apart from described line of cut structure
The distance of point, n1For the refractive index of described interstitital texture, n2The refractive index adopted for described rigidity bearing basement.
Preferably, described interstitital texture is optical anti-reflective film.
Preferably, described interstitital texture uses the nitride of silicon and/or the oxide of silicon to be formed.
The present invention also provides for a kind of flexible display panels, uses said method to prepare.
The present invention also provides for a kind of flexible display apparatus, including above-mentioned flexible display panels.
Having the beneficial effect that of the technique scheme of the present invention:
Rigidity bearing basement is formed the line of cut structure with light collection effect, irradiates when using laser
When flexible substrates is peeled off from rigidity bearing substrate by mode, owing to the convergence of laser is made by line of cut structure
With, the energy of line of cut structure corresponding position to be far above other positions, thus can be simultaneously by Flexible Displays face
Plate cuts into multiple sub-panel, i.e. stripping technology and cutting technique complete in an operation, reduce life
Produce cost, improve production efficiency.
Accompanying drawing explanation
Fig. 1-Fig. 5 is the manufacture method schematic flow sheet of the flexible display panels of the embodiment of the present invention；
Fig. 6 is the top view of the flexible display panels in Fig. 2；
Fig. 7 is the close-up schematic view of the flexible display panels in Fig. 5.
Detailed description of the invention
Below in conjunction with drawings and Examples, the detailed description of the invention of the present invention is described in further detail.
Following example are used for illustrating the present invention, but are not limited to the scope of the present invention.
Refer to Fig. 1-Fig. 6, the embodiment of the present invention provides the manufacture method of a kind of flexible display panels, including
Following steps:
Step S11: refer to Fig. 1, it is provided that a rigidity bearing basement 101；
Described rigidity bearing basement 101 can be substrate of glass, ceramic bases or other kinds of rigidity base
The end.
Step S12: please also refer to Fig. 2 and Fig. 6, forms cutting in described rigidity bearing basement 101
Line structure 1011, each described line of cut structure 1011 surrounds an enclosed region, uses in described enclosed region
In arranging at least one sub-panel；Wherein, described line of cut structure 1011 can will come from described rigidity
The parallel rays of bearing basement 101 side converge to the flexible substrates of described flexible display panels with described
On the region of line of cut structure 1011 correspondence.
Under normal circumstances, the enclosed region that each line of cut structure 1011 surrounds arranges a sub-face
Plate.
Step S13: refer to Fig. 3, forms flexible substrates 102 in described rigidity bearing basement 101；
Step S14: refer to Fig. 4, forms display device film layer 103 He in described flexible substrates 102
Protecting film layer 104.
The flexible display panels not carrying out stripping technology and cutting technique can be prepared by said method.
In subsequent manufacturing processes, in addition it is also necessary to flexible display panels is peeled off from rigidity bearing substrate, and will
Flexible display panels cuts into multiple sub-panel, thus, refer to Fig. 5, the flexibility of the embodiment of the present invention shows
Show that the manufacture method of panel can also include:
Step S15: use laser 200 to irradiate described Flexible Displays from described rigidity bearing basement 101 side
Panel so that described flexible substrates 102 is peeled off from described rigidity bearing substrate 101, meanwhile, described just
Property bearing basement 101 on line of cut structure 1011 laser of corresponding position is converged to described flexible base
On the region corresponding with described line of cut structure 1011 at the end 102 so that described flexible display panels is along institute
State line of cut structure 1011 and be cut into multiple sub-panel.
By said method, irradiate described Flexible Displays from the side of rigidity bearing basement 101 when using laser
During panel, can flexible display panels be peeled off from rigidity bearing substrate 101, meanwhile, described rigidity is held
Carry that laser can converge to described flexible substrates 102 by the line of cut structure 1011 in substrate 101 with institute
State on the region of line of cut structure 1011 correspondence, so that the energy at line of cut structure 1011 position
Amount is far above other positions, and flexible display panels is under high-octane effect, it may occur that decompose, such that it is able to
Flexible display panels is cut into multiple sub-panel, i.e. in the embodiment of the present invention, by stripping technology and cutting
Technique merges, and completes, thus is greatly saved the process time, reduce production cost in an operation,
Improve production efficiency.Simultaneously as use light wire cutting technology cutting flexible display panels, it is also possible to keep away
Exempt from, because cutter cuts the breakage of the flexible display panels caused, to improve the making yield of flexible display panels.
In the preferred embodiment of the present invention, the laser of employing can be excimer laser.
It is further preferred that the wavelength of described laser is 308nm, energy is 300～700MJ, and frequency is
200～300HZ.
The line of cut structure 1011 mentioned in above-described embodiment in rigidity bearing basement 101 has convergence light
Effect, its structure can be polytype, as long as rigidity bearing basement 101 side can will be come from
Parallel rays converges on the region corresponding with described line of cut structure 1011 of flexible substrates 102.
Concrete structure to line of cut structure 1011 and preparation method thereof of illustrating below illustrates.
Refer to Fig. 7, the line of cut structure 1011 of the embodiment of the present invention includes: be opened in described line of cut
Groove structure 301 in structure 101 and the interstitital texture 302 being filled in described groove structure 301.
Described groove structure 301 surrounds an enclosed region, is used for arranging at least one son in described enclosed region
Panel, the inwall of described groove structure 301 is cambered surface.Described cambered surface can be a spherical part, it is possible to
Think the cambered surface of the types such as parabola cambered surface.In the preferred embodiment of the present invention, described cambered surface is spherical
A part, described spherical radius can be λ/4, and λ is the ripple of laser used in laser beam processes
Long.
The refractive index of described interstitital texture 302 is more than the refractive index of described rigidity bearing basement 101.Preferably,
Described interstitital texture 302 is optical anti-reflective film, and its material requires the laser tool used in laser beam processes
There is preferable transmission effects, and it is less than predetermined threshold value to light absorption coefficient, it is preferable that described filling is tied
Structure 302 uses the nitride of silicon and/or the oxide of silicon to be formed.
This interstitital texture 302 can be single layer structure, it is also possible to for multiple structure, it is preferable that thickness is just
Fill up described groove structure 301.
The radius of the cambered surface of described groove structure meets following condition:Wherein, r is described
The radius of the cambered surface of groove structure, f be described cambered surface apart from the light collection point of described line of cut structure away from
From, n1For the refractive index of described interstitital texture, n2The refractive index adopted for described rigidity bearing basement.
Refractive index due to described interstitital texture 302 is more than the refractive index of described rigidity bearing basement 101, because of
And, light is injected into optically denser medium (interstitital texture 302) from optically thinner medium (rigidity bearing basement 101)
Time, it may occur that refraction, change the direction of propagation, fit structure 301, so that directional light converges
Poly-phenomenon.
Said structure is so that tie on the cambered surface surface (upper surface) of line of cut structure 1011 and line of cut
The odd-multiple that laser light path difference is optical maser wavelength half on the surface (lower surface) that structure contacts with flexible substrates,
Thus the reflection light of upper and lower surface interferes to cancel out each other and laser energy all focuses on central spot, reaches
Purpose to cutting flexible display panels.
The forming step of above-mentioned line of cut structure 1011 may include that
Step S121: form groove structure 301 on the surface of described rigidity bearing basement 101,
Concrete, can be described by using photoetching process to be formed on the surface of described rigidity bearing basement 101
Groove structure 301.
When rigidity bearing basement 101 is substrate of glass, exposure, development and dry etching can be passed through
Technique makes described groove structure 301.
Step S122: form interstitital texture 302 in described groove structure 301.
The embodiment of the present invention also provides for a kind of flexible display panels, adopts and is prepared from the aforedescribed process.
The embodiment of the present invention also provides for a kind of flexible display apparatus, including above-mentioned flexible display panels.
The above is the preferred embodiment of the present invention, it is noted that for the common skill of the art
For art personnel, on the premise of without departing from principle of the present invention, it is also possible to make some improvements and modifications,
These improvements and modifications also should be regarded as protection scope of the present invention.
Claims (11)
1. the manufacture method of a flexible display panels, it is characterised in that including:
One rigidity bearing basement is provided；
Forming line of cut structure in described rigidity bearing basement, each described line of cut structure surrounds a Guan Bi
Region, is used in described enclosed region arranging at least one sub-panel；
Described rigidity bearing basement is formed flexible substrates；
Described flexible substrates is formed display device film layer and protecting film layer；
Wherein, described line of cut structure can will come from the directional light congruence of described rigidity bearing basement side
Gather on the region corresponding with described line of cut structure of described flexible substrates.
The manufacture method of flexible display panels the most according to claim 1, it is characterised in that also wrap
Include:
Laser is used to irradiate described flexible display panels from described rigidity bearing basement side so that described flexibility
Substrate is peeled off from described rigidity bearing substrate, and meanwhile, the line of cut structure in described rigidity bearing basement will
The laser of corresponding position converges to, on the region corresponding with described line of cut structure of described flexible substrates, make
Obtain described flexible display panels and be cut into multiple sub-panel along described line of cut structure.
The manufacture method of flexible display panels the most according to claim 2, it is characterised in that described
Laser is excimer laser.
The manufacture method of flexible display panels the most according to claim 3, it is characterised in that described
The wavelength of laser is 308nm, and energy is 300～700MJ, and frequency is 200～300HZ.
The manufacture method of flexible display panels the most according to claim 1, it is characterised in that described
Described rigidity bearing basement is formed line of cut structure include:
Form groove structure on the surface of described rigidity bearing basement, each described groove structure surrounds a Guan Bi
Region, is used for arranging at least one sub-panel in described enclosed region, the inwall of described groove structure is cambered surface；
Forming interstitital texture in described groove structure, the refractive index of described interstitital texture is held more than described rigidity
Carrying the refractive index of substrate, described groove structure constitutes described line of cut structure with described interstitital texture.
The manufacture method of flexible display panels the most according to claim 5, it is characterised in that use
Photoetching process forms described groove structure on the surface of described rigidity bearing basement.
The manufacture method of flexible display panels the most according to claim 5, it is characterised in that described
The radius of the cambered surface of groove structure meets following condition:Wherein, r is described groove structure
The radius of cambered surface, f is the described cambered surface distance apart from the light collection point of described line of cut structure, n1For
The refractive index of described interstitital texture, n2The refractive index adopted for described rigidity bearing basement.
The manufacture method of flexible display panels the most according to claim 5, it is characterised in that described
Interstitital texture is optical anti-reflective film.
The manufacture method of flexible display panels the most according to claim 8, it is characterised in that described
Interstitital texture uses the nitride of silicon and/or the oxide of silicon to be formed.
10. a flexible display panels, it is characterised in that use as described in any one of claim 1-9
Prepared by method.
11. 1 kinds of flexible display apparatus, it is characterised in that include as claimed in claim 10 flexible aobvious
Show panel.
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| CN201610364506.XA CN106024704B (en) | 2016-05-27 | 2016-05-27 | A kind of flexible display panels and preparation method thereof and flexible display apparatus |
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| CN201610364506.XA CN106024704B (en) | 2016-05-27 | 2016-05-27 | A kind of flexible display panels and preparation method thereof and flexible display apparatus |
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| CN106024704A true CN106024704A (en) | 2016-10-12 |
| CN106024704B CN106024704B (en) | 2019-03-12 |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107482134A (en) * | 2017-08-09 | 2017-12-15 | 武汉华星光电半导体显示技术有限公司 | Flexible display and its manufacture method |
| CN107931845A (en) * | 2017-11-20 | 2018-04-20 | 武汉华星光电半导体显示技术有限公司 | Cutting method |
| CN107933062A (en) * | 2017-11-20 | 2018-04-20 | 京东方科技集团股份有限公司 | The cutting stripping means and device of a kind of film assembly |
| CN108665806A (en) * | 2018-05-14 | 2018-10-16 | 武汉华星光电半导体显示技术有限公司 | The manufacturing method and manufacturing device of flexible display apparatus, base plate separation method |
| CN109244111A (en) * | 2018-08-31 | 2019-01-18 | 武汉华星光电半导体显示技术有限公司 | OLED display panel and preparation method thereof |
| CN109427251A (en) * | 2017-08-31 | 2019-03-05 | 昆山国显光电有限公司 | A kind of cover film and flexible display apparatus |
| CN109449114A (en) * | 2018-10-15 | 2019-03-08 | 上海天马有机发光显示技术有限公司 | A kind of preparation method of display panel and display device |
| WO2019080241A1 (en) * | 2017-10-27 | 2019-05-02 | 武汉华星光电半导体显示技术有限公司 | Display panel motherboard and method for cutting display panel motherboard |
| WO2019104691A1 (en) * | 2017-11-30 | 2019-06-06 | 深圳市柔宇科技有限公司 | Flexible part and manufacturing method for flexible display panel |
| CN109979318A (en) * | 2019-04-09 | 2019-07-05 | 京东方科技集团股份有限公司 | Display master blank and its manufacture and cutting method, display base plate and device |
| WO2019215831A1 (en) * | 2018-05-09 | 2019-11-14 | 堺ディスプレイプロダクト株式会社 | Method and device for manufacturing flexible light emission device |
| JP6674591B1 (en) * | 2018-05-09 | 2020-04-01 | 堺ディスプレイプロダクト株式会社 | Method and apparatus for manufacturing flexible light emitting device |
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| CN107482134A (en) * | 2017-08-09 | 2017-12-15 | 武汉华星光电半导体显示技术有限公司 | Flexible display and its manufacture method |
| US10957224B2 (en) | 2017-08-31 | 2021-03-23 | Kunshan Go-Visionox Opto-Electronics Co., Ltd. | Cover film and flexible display device |
| CN109427251A (en) * | 2017-08-31 | 2019-03-05 | 昆山国显光电有限公司 | A kind of cover film and flexible display apparatus |
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| WO2019104691A1 (en) * | 2017-11-30 | 2019-06-06 | 深圳市柔宇科技有限公司 | Flexible part and manufacturing method for flexible display panel |
| US11101438B2 (en) | 2018-05-09 | 2021-08-24 | Sakai Display Products Corporation | Method and apparatus for manufacturing flexible light-emitting device |
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| WO2019215831A1 (en) * | 2018-05-09 | 2019-11-14 | 堺ディスプレイプロダクト株式会社 | Method and device for manufacturing flexible light emission device |
| JP6670425B1 (en) * | 2018-05-09 | 2020-03-18 | 堺ディスプレイプロダクト株式会社 | Method and apparatus for manufacturing flexible light emitting device |
| JP6674591B1 (en) * | 2018-05-09 | 2020-04-01 | 堺ディスプレイプロダクト株式会社 | Method and apparatus for manufacturing flexible light emitting device |
| CN108665806B (en) * | 2018-05-14 | 2019-11-26 | 武汉华星光电半导体显示技术有限公司 | The manufacturing method and manufacturing device of flexible display apparatus, base plate separation method |
| CN108665806A (en) * | 2018-05-14 | 2018-10-16 | 武汉华星光电半导体显示技术有限公司 | The manufacturing method and manufacturing device of flexible display apparatus, base plate separation method |
| WO2020042259A1 (en) * | 2018-08-31 | 2020-03-05 | 武汉华星光电半导体显示技术有限公司 | Display panel and manufacturing method therefor |
| CN109244111A (en) * | 2018-08-31 | 2019-01-18 | 武汉华星光电半导体显示技术有限公司 | OLED display panel and preparation method thereof |
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| CN109979318A (en) * | 2019-04-09 | 2019-07-05 | 京东方科技集团股份有限公司 | Display master blank and its manufacture and cutting method, display base plate and device |
| US11416043B2 (en) | 2019-04-09 | 2022-08-16 | Chengdu Boe Optoelectronics Technology Co., Ltd. | Display motherboard, manufacturing and cutting methods thereof |
| CN113826235A (en) * | 2019-05-13 | 2021-12-21 | Lpkf激光电子股份公司 | Method for producing a display having a carrier substrate, carrier substrate produced according to said method and cover glass intended for flexible displays |
| CN113826235B (en) * | 2019-05-13 | 2024-04-30 | Lpkf激光电子股份公司 | Method for producing a display with a carrier substrate, carrier substrate produced according to the method and cover glass for a flexible display |
| CN112967601A (en) * | 2021-02-04 | 2021-06-15 | 武汉华星光电半导体显示技术有限公司 | Manufacturing method of protective film and display panel |
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