CN106024677B - The system for preventing process cavity gas exhaust piping adverse current - Google Patents
The system for preventing process cavity gas exhaust piping adverse current Download PDFInfo
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- CN106024677B CN106024677B CN201610370165.7A CN201610370165A CN106024677B CN 106024677 B CN106024677 B CN 106024677B CN 201610370165 A CN201610370165 A CN 201610370165A CN 106024677 B CN106024677 B CN 106024677B
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- process cavity
- exhaust piping
- gas exhaust
- return valve
- gas
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Pipeline Systems (AREA)
Abstract
The present invention provides a kind of systems for preventing process cavity gas exhaust piping adverse current, including process cavity and the gas exhaust piping that the gas in process cavity is discharged, gas exhaust piping has non-return valve, when gas is discharged from process cavity, non-return valve is in open state, when gas is from gas exhaust piping to process cavity adverse current, non-return valve is closed.The invention avoids the exhaust gas recirculations in gas exhaust piping containing impurity particle to enter in process cavity, causes the pollution of wafer in process cavity, avoids scrapping for wafer, improves technology stability.
Description
Technical field
The present invention relates to semiconductor process technique fields, and in particular to it is a kind of prevent process cavity gas exhaust piping adverse current be
System.
Background technique
In semiconductor fabrication process, usually wafer is placed in process cavity and is handled, such as formed a film, etched,
Cleaning etc..Process cavity is connected with air inlet pipeline and gas exhaust piping, and air inlet pipeline is for will be passed through gas, gas exhaust piping in process cavity
For the exhaust gas in process cavity to be discharged；Isolating valve and throttle valve are installed on gas exhaust piping, and at the end of gas exhaust piping
End is connected with aspiration pump, and aspiration pump, which is used to form low pressure, is discharged discarded be drawn into gas exhaust piping in process cavity in turn；
Isolating valve is used to control the on or off of gas exhaust piping, and throttle valve is used to control the air flow rate and gas pressure in gas exhaust piping
Power.In actual process, in order to realize the pressure in process cavity within the set range, the same of gas is being passed through into process cavity
When, aspiration pump is opened, and adjust the aperture of throttle valve, to realize the dynamic equilibrium of the pressure in process cavity.
Stop however, aspiration pump will lead to entire technical process in the event of a failure, throttle valve, which is closed, at this time needs centainly
Reaction time, the sealing effect of isolating valve be not it is very strong, the gas pressure in gas exhaust piping could possibly be higher than in process cavity
Pressure causes the exhaust gas adverse current of gas exhaust piping to enter in process cavity；Also, any part of gas exhaust piping breaks down, and all can
Aspiration pump is caused to be automatically stopped work, such as throttle, the exhaust gas in gas exhaust piping also can countercurrently enter in process cavity at this time；
In addition, any exception such as wafer occurs in process cavity and is displaced, can all cause in process cavity when carrying out process operation
Entire technique stop process, aspiration pump are automatically closed, and the exhaust gas in gas exhaust piping can countercurrently enter in process cavity at this time；Thus it sees
Come, any exception occurs for process cavity and gas exhaust piping, can all aspiration pump be caused to be automatically closed, make exhaust gas adverse current in exhaust pipe into
Enter in process cavity；In addition, there is also some other factors to cause the pressure of gas exhaust piping greater than the pressure in process cavity, make to be vented
Exhaust gas adverse current in pipeline enters in process cavity；It is discarded as discharged in gas exhaust piping to contain a large amount of impurities particle, these
Impurity particle adverse current, which enters process cavity, will cause the pollution of wafer in process cavity or even scraps.
Summary of the invention
In order to overcome the above problems, the present invention is intended to provide a kind of system for preventing process cavity gas exhaust piping adverse current, leads to
It crosses and non-return valve is installed on gas exhaust piping, to avoid the exhaust gas of gas exhaust piping from generating backflow phenomena.
In order to achieve the above object, the present invention provides a kind of systems for preventing process cavity gas exhaust piping adverse current, including
Process cavity and by the gas exhaust piping of the gas discharge in process cavity, gas exhaust piping has non-return valve, and gas is from process cavity to outlet
When out, non-return valve is in open state, and when gas is from gas exhaust piping to process cavity adverse current, non-return valve is closed.
Preferably, the non-return valve includes pressure monitoring module, comparison module and alarm module, and pressure monitoring module is supervised
The air pressure at non-return valve both ends to be surveyed, and sends a signal to comparison module, comparison module compares the size of the air pressure at non-return valve both ends, when
When air pressure of the non-return valve close to one end of process cavity is greater than or equal to the air pressure of the non-return valve other end, comparison module sends normal letter
Number give control module；When air pressure of the non-return valve close to one end of process cavity is less than the air pressure of the non-return valve other end, comparison module
Abnormal signal is sent to alarm module；Alarm module sounds an alarm.
Preferably, the gas exhaust piping along from process cavity outwardly direction also successively have isolating valve, throttle valve and
Aspiration pump positioned at gas exhaust piping end.
Preferably, the non-return valve is set between the throttle valve and the aspiration pump.
Preferably, it uses and is threadedly coupled between the non-return valve and the gas exhaust piping.
Preferably, the non-return valve includes outlet valve body and import valve body, exports and uses spiral shell between valve body and import valve body
Line connection.
Preferably, there is the channel of connection gas exhaust piping, the outlet between the outlet valve body and the import valve body
There is elastomeric element and removable block between valve body and the import valve body, the removable block and the elastomeric element it
Between be connected, the movement of the removable block is realized by the movement of elastomeric element, thus make removable block block or
Open the channel.
Preferably, one end of the outlet valve body has O-ring and support ring, and the removable block opens the channel
Mode are as follows: the removable block elasticity of compression component；When occurring adverse current in exhaust pipe, spring pushes removable block to squeeze
It is pressed on import valve body and blocks the channel.
Preferably, the shape of the removable block is identical as the shape of the support ring.
System of the invention is provided with non-return valve, when inverted draft occurs in gas exhaust piping, non-return valve on gas exhaust piping
It closes, avoids the exhaust gas recirculation in gas exhaust piping containing impurity particle and enter in process cavity, cause the dirt of wafer in process cavity
Dye, avoids scrapping for wafer, improves technology stability.
Detailed description of the invention
Fig. 1 is the block diagram of the system for preventing process cavity gas exhaust piping adverse current of a preferred embodiment of the invention
Fig. 2 is the fractionation relation schematic diagram of each component of the non-return valve of a preferred embodiment of the invention
Specific embodiment
To keep the contents of the present invention more clear and easy to understand, below in conjunction with Figure of description, the contents of the present invention are made into one
Walk explanation.Certainly the invention is not limited to the specific embodiment, general replacement known to those skilled in the art
It is included within the scope of protection of the present invention.
Below in conjunction with attached drawing 1-2 and specific embodiment, invention is further described in detail.It should be noted that attached drawing is equal
The present embodiment is aided in illustrating to facilitate, clearly reach using very simplified form, using non-accurate ratio, and only
Purpose.
Referring to Fig. 1, the system for preventing process cavity gas exhaust piping adverse current of the present embodiment, including process cavity, to technique
The intracavitary air inlet pipeline 1 for being passed through gas and the gas exhaust piping 2 that the gas in process cavity is discharged；There is wafer support in process cavity
Platform, process cavity top have illuminace component, and illuminace component is connected with heat extraction pipeline 3, for discharging illuminace component generation
Heat；Gas exhaust piping is located at process cavity bottom, is disposed with isolating valve, throttle valve from process cavity outwardly direction and is located at
The aspiration pump of gas exhaust piping end；Gas exhaust piping also has non-return valve.
Preferably, please referring to Fig. 1 and Fig. 2, non-return valve is set between throttle valve and aspiration pump；Non-return valve and gas exhaust piping
Between using be threadedly coupled；Non-return valve includes outlet valve body 202 and import valve body 201, exports valve body 202 and import valve body 201
Between using being threadedly coupled, export the channel between valve body 202 and import valve body 201 with connection gas exhaust piping, export valve body
There is elastomeric element 205 (being here spring) and removable block, what is used here is removable between 202 and import valve body 201
Block includes round stopper 203 and connected circular ring shape block 204, moves phase between block and elastomeric element 205
Connection, the movement of removable block is realized by the movement of elastomeric element 205, is led to so that removable block be made to block or open
Road；The one end for exporting valve body 202 has O-ring 206 and support ring 207, moves the mode that block opens channel are as follows: removable
Block elasticity of compression component 205；When there is adverse current in exhaust pipe 2, spring 205 pushes removable block to be extruded in import valve body
Channel is blocked on 201；The shape of removable block identical as the shape of support ring 207 is annular, rounded stops 204 and bullet
Spring 205 is connected.
When gas is discharged from process cavity, non-return valve is in open state, gas from gas exhaust piping to process cavity adverse current
When, non-return valve is closed；It may be provided for the connecting line for being connected to the two, connecting tube between gas exhaust piping and heat extraction pipeline
The position that road is connect with gas exhaust piping is in non-return valve close to aspiration pump side or in isolating valve close to the side of process cavity；Even
Adapter tube road is provided with valve, has pressure detector between gas exhaust piping and heat extraction pipeline, and pressure detector monitors one end
It is connect with gas exhaust piping, the other end and heat extraction piping connection；To realize the pressure monitor to gas exhaust piping and heat extraction pipeline, when
When the pressure of heat extraction pipeline is greater than the pressure of gas exhaust piping, pressure detector sends abnormal signal to the valve on connecting line,
Valve is opened, in the gas flow gas exhaust piping in heat extraction pipeline
Non-return valve in the present embodiment further includes pressure monitoring module, comparison module and alarm module, pressure monitoring module
The air pressure at non-return valve both ends is monitored, and sends a signal to comparison module, comparison module compares the big of the air pressure at non-return valve both ends
Small, when air pressure of the non-return valve close to one end of process cavity is greater than or equal to the air pressure of the non-return valve other end, comparison module is sent
Normal signal is to control module；When air pressure of the non-return valve close to one end of process cavity is less than the air pressure of the non-return valve other end, than
Abnormal signal is sent to alarm module compared with module；Alarm module sounds an alarm.
Although the present invention is disclosed as above with preferred embodiment, the right embodiment illustrate only for the purposes of explanation and
, it is not intended to limit the invention, if those skilled in the art can make without departing from the spirit and scope of the present invention
Dry changes and retouches, and the protection scope that the present invention is advocated should be subject to described in claims.
Claims (7)
1. a kind of system for preventing process cavity gas exhaust piping adverse current, including process cavity and the row that the gas in process cavity is discharged
Air pipe, which is characterized in that gas exhaust piping has non-return valve, and when gas is discharged from process cavity, non-return valve is in open state,
When gas is from gas exhaust piping to process cavity adverse current, non-return valve is closed, wherein the non-return valve includes outlet valve body and inlet valve
Body, it is described outlet valve body and the import valve body between have connection gas exhaust piping channel, the outlet valve body and it is described into
There is elastomeric element and removable block between mouth valve body, be connected between the removable block and the elastomeric element, lead to
The movement of elastomeric element is crossed to realize the movement of the removable block, so that removable block be made to block or open described lead to
Road；Wherein, the non-return valve includes pressure monitoring module, comparison module and alarm module, and pressure monitoring module monitors check
The air pressure at valve both ends, and comparison module is sent a signal to, comparison module compares the size of the air pressure at non-return valve both ends, works as non-return valve
When air pressure close to one end of process cavity is greater than or equal to the air pressure of the non-return valve other end, comparison module sends normal signal to control
Molding block；When air pressure of the non-return valve close to one end of process cavity is less than the air pressure of the non-return valve other end, comparison module sends different
Regular signal is to alarm module；Alarm module sounds an alarm；Wherein, there is illuminace component, illuminace component connection in the process cavity
Heat extraction pipeline, the heat extraction pipeline are used to discharge the heat of illuminace component generation；The gas exhaust piping and heat extraction pipeline it
Between include connecting line for the two to be connected to.
2. system according to claim 1, which is characterized in that the gas exhaust piping along from process cavity outwardly direction also
Successively there is isolating valve, throttle valve and the aspiration pump positioned at gas exhaust piping end.
3. system according to claim 2, which is characterized in that the non-return valve is set to the throttle valve and the pumping
Between pump.
4. system according to claim 1, which is characterized in that use screw thread between the non-return valve and the gas exhaust piping
Connection.
5. system according to claim 1, which is characterized in that adopted between the non-return valve middle outlet valve body and import valve body
It is threadedly coupled.
6. system according to claim 1, which is characterized in that one end of the outlet valve body has O-ring and support ring,
The removable block opens the mode in the channel are as follows: the removable block elasticity of compression component；When occurring in exhaust pipe
When adverse current, spring pushes removable block to be extruded on import valve body and blocks the channel.
7. system according to claim 6, which is characterized in that the shape of the removable block and the shape of the support ring
Shape is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610370165.7A CN106024677B (en) | 2016-05-30 | 2016-05-30 | The system for preventing process cavity gas exhaust piping adverse current |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610370165.7A CN106024677B (en) | 2016-05-30 | 2016-05-30 | The system for preventing process cavity gas exhaust piping adverse current |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106024677A CN106024677A (en) | 2016-10-12 |
| CN106024677B true CN106024677B (en) | 2019-07-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610370165.7A Active CN106024677B (en) | 2016-05-30 | 2016-05-30 | The system for preventing process cavity gas exhaust piping adverse current |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108109896A (en) * | 2017-12-15 | 2018-06-01 | 上海华力微电子有限公司 | Reduce the method and device of high current implanter particle contamination |
| CN114156151A (en) * | 2021-11-10 | 2022-03-08 | 长江存储科技有限责任公司 | Vacuum system of etching equipment and anti-recoil method |
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| CN201236994Y (en) * | 2008-08-15 | 2009-05-13 | 中芯国际集成电路制造(上海)有限公司 | Reflow-stopping reaction valve |
| CN102129256A (en) * | 2010-01-15 | 2011-07-20 | Ckd株式会社 | Vacuum control system and vacuum control method |
| CN203494225U (en) * | 2013-06-25 | 2014-03-26 | 京东方科技集团股份有限公司 | Vacuum defoaming machine |
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| CN2087336U (en) * | 1990-03-03 | 1991-10-23 | 高尔发 | Range-limited pressure gauge |
| AU2003254011A1 (en) * | 2002-07-19 | 2004-02-09 | Mykrolis Corporation | Fluid flow measuring and proportional fluid flow control device |
| CN101191564A (en) * | 2006-11-27 | 2008-06-04 | 上海华虹Nec电子有限公司 | Control valve for exhaust apparatus, exhaust apparatus and exhaust method |
| CN102374315A (en) * | 2010-08-23 | 2012-03-14 | 无锡华润上华半导体有限公司 | One-way control valve, vacuum device for chip manufacture procedure and gas recoil preventing method |
| CN203963154U (en) * | 2014-06-22 | 2014-11-26 | 龚永青 | One-way valve |
| CN205207793U (en) * | 2015-10-26 | 2016-05-04 | 德阳九鼎智远知识产权运营有限公司 | One -way automatic valve |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201236994Y (en) * | 2008-08-15 | 2009-05-13 | 中芯国际集成电路制造(上海)有限公司 | Reflow-stopping reaction valve |
| CN102129256A (en) * | 2010-01-15 | 2011-07-20 | Ckd株式会社 | Vacuum control system and vacuum control method |
| CN203494225U (en) * | 2013-06-25 | 2014-03-26 | 京东方科技集团股份有限公司 | Vacuum defoaming machine |
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| CN106024677A (en) | 2016-10-12 |
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