CN201236994Y - Reflow-stopping reaction valve - Google Patents
Reflow-stopping reaction valve Download PDFInfo
- Publication number
- CN201236994Y CN201236994Y CNU2008201519913U CN200820151991U CN201236994Y CN 201236994 Y CN201236994 Y CN 201236994Y CN U2008201519913 U CNU2008201519913 U CN U2008201519913U CN 200820151991 U CN200820151991 U CN 200820151991U CN 201236994 Y CN201236994 Y CN 201236994Y
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- Prior art keywords
- valve
- backflow
- cylinder
- pipeline
- vent
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
The utility model relates to a backflow-preventing response valve, which comprises a valve pipeline, an electromagnetic valve, an air cylinder, a piston and a ventilating baffle plate, and is characterized in that the ventilating baffle plate is installed on the valve pipeline; the electromagnetic valve is connected with the air cylinder; and one end of the piston is arranged in the air cylinder, and the other end aligned with a venthole of the ventilating baffle plate. When vacuum equipment operates abnormally and gas backflow may occur in the pipeline, the electromagnetic valve receives a backflow signal and then inflates to the air cylinder, thereby pushing the piston to rapidly prop the ventilating baffle plate, plugging up the venthole, and realizing the closure of the backflow-preventing response valve. The backflow-preventing response valve has simple structure as well as quick and rapid response, and avoids the accidents caused by the gas backflow in the pipeline.
Description
[technical field]
The utility model relates to pipeline valve control field, relates in particular to a kind of backflow reactive valve.
[background technique]
In semiconductor chip manufacturing process, the pipeline that a lot of vacuum environments are arranged, as shown in Figure 1, this is the work system of a low pressure boiler tube board, be placed with a lot of silicon chips to be processed in the boiler tube board 1, board has admission line and outlet pipe 3, outlet pipe 3 connects vacuum pump 2, when proper functioning, it is the low-voltage vacuum state that vacuum pump keeps the working environment in the whole boiler tube board, only allow working gas to enter boiler tube and the abundant haptoreaction of silicon chip surface, discharge from outlet pipe 3 again by admission line.
When improper outage takes place in board, vacuum pump 2 will quit work, because the destruction of vacuum environment, air-flow will be easy to pour in down a chimney into boiler tube board 1 by outlet pipe 3 backflows, and influence the normal operation of product and board, will cause scrapping of silicon chip in the board when serious.
So just pressing for a kind of check mechanism deals with contingent boiler tube board gas and pours in down a chimney accident.
[model utility content]
The technical problems to be solved in the utility model provides a kind of backflow reactive valve, and the board of work is because improper outage down to solve the low-voltage vacuum environment, and vacuum is destroyed and the problem that airflow reflux is poured in down a chimney takes place.
Backflow reactive valve described in the utility model is installed on vacuum pump and the breather line of work between the board, comprises valve pipeline, solenoid valve, cylinder, piston and vent baffle; Wherein valve pipeline in a tubular form, two ends connect breathing pipe, described vent baffle is installed on the valve pipeline, cylinder is connected with the valve pipeline inwall by support, is fixedly mounted in the valve pipeline; Described solenoid valve connects cylinder, and is provided with a backflow signal input part; Described piston comprises cylinder plug, connecting rod, valve plug; The cylinder plug is arranged in the cylinder, and valve plug is fixedlyed connected with the cylinder plug by connecting rod, and aims at the vent of vent baffle, also is provided with a pressure spring on the piston, and spring one end connects valve plug, and the other end connects the cylinder body of cylinder.
When vacuum pump outage, vacuum is destroyed in the pipeline, and during concurrent angry body backflow phenomenon, solenoid valve is received the power-off signal of pipe-line system, opens cylinder at once, inflation in the cylinder.The interior draught head that produces of the interior valve pipeline of cylinder this moment with Check valve, promote the cylinder plug thus, thereby whole piston is moved outward, and this moment the piston the other end valve plug under the draught head double action inside and outside pressure spring and the cylinder, the vent of vent baffle will be withstood rapidly, thereby make whole valve pipeline sealing, realize the backflow self-closing function of backflow reactive valve.
In order to improve the sealability of backflow reactive valve when closing, can around the vent of vent baffle, establish a rubber seal.
Backflow reactive valve described in the utility model, it is simple in structure, be quick on the draw, and is unusual at vacuum equipment, when backflow phenomenon may take place, under the double action by draught head inside and outside the cylinder and pressure spring, can close rapidly, thereby stop the accident generation that gas pours in down a chimney.
[description of drawings]
Fig. 1 is existing boiler tube board schematic piping diagram;
Fig. 2 is a kind of backflow reactive valve structural representation described in the utility model.
[embodiment]
Below in conjunction with Figure of description a specific embodiment of the present utility model is elaborated.
As shown in Figure 2, backflow reaction valve described in the utility model comprises valve pipeline 4, solenoid valve 5, cylinder 6, piston and vent baffle 8, and vent baffle 8 is installed on the valve pipeline 4, cylinder 6 is connected with the inwall of valve pipeline by support 9, is fixedly mounted in the valve pipeline; Solenoid valve 5 connects cylinder 6, is provided with a backflow signal input part; Described piston comprises cylinder plug 7-1, connecting rod 7-2, valve plug 7-3; Cylinder plug 7-1 is arranged in the cylinder 6, and valve plug 7-3 is fixedlyed connected with cylinder plug 7-1 by connecting rod 7-2, and aims at the vent 10 of vent baffle 8, also is provided with a pressure spring 7-4 on the piston, and spring 7-4 one end connects valve plug 7-3, and the other end connects the cylinder body of cylinder 6.
When vacuum pump cut off the power supply, vacuum was destroyed in the pipeline, and backflow phenomenon may take place the gas in the valve pipeline 4, and gas will be recalled by the vent on the vent baffle 8 10.Because the vacuum pump outage, the solenoid valve 5 that connects cylinder 6 can be received power-off signal, and this moment, solenoid valve 5 was inflated cylinder 6 rapidly.Cylinder 6 will produce draught head with valve pipeline 4 this moment, air pressure can promote cylinder plug 7-1, thereby promote whole piston, and the valve plug 7-3 of the piston the other end moves to vent 10 at this moment, pressure spring 7-4's recovers the motion that elastic force also can promote valve plug 7-3 certainly on the other hand, under the double action of draught head and pressure spring, valve plug 7-3 will withstand vent baffle 8 rapidly, stop up vent 10, thereby make whole valve pipeline sealing, realize the backflow self-closing function of backflow reactive valve, in order to improve sealability, can also a rubber seal 11 be set around vent 10, when valve plug 7-3 stops up vent 10 like this, stop to take place the situation of gas leakage because of the out-of-flatness of surface of contact.
Above embodiment is the unrestricted the technical solution of the utility model in order to explanation only.Any modification or partial replacement that does not break away from the utility model spirit and scope all should be encompassed in the middle of the claim scope of the present utility model.
Claims (7)
1, a kind of backflow reactive valve comprises valve pipeline, solenoid valve, cylinder, piston and vent baffle; It is characterized in that described valve pipeline in a tubular form, two ends connect breathing pipe, and described vent baffle is installed on the valve pipeline, and solenoid valve connects cylinder, and piston one end is arranged in the cylinder, and the other end is aimed at the vent of vent baffle.
2, backflow reactive valve as claimed in claim 1 is characterized in that described piston comprises cylinder plug, connecting rod, valve plug; The cylinder plug is arranged in the cylinder, and valve plug is fixedlyed connected with the cylinder plug by connecting rod, and aims at the vent of vent baffle.
3, backflow reactive valve as claimed in claim 2 is characterized in that described piston comprises pressure spring, and spring one end connects valve plug, and the other end connects the cylinder body of cylinder.
4, backflow reactive valve as claimed in claim 1 is characterized in that described solenoid valve is provided with the backflow signal input part.
5, backflow reactive valve as claimed in claim 1 is characterized in that described cylinder is installed in the valve pipeline, fixedlys connected with the valve pipeline inwall by support.
6, backflow reactive valve as claimed in claim 1 is characterized in that described vent baffle also is provided with rubber seal around vent.
7, backflow reactive valve as claimed in claim 4 is characterized in that the signal that described backflow signal input part receives is the power-off signal of pipe-line system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201519913U CN201236994Y (en) | 2008-08-15 | 2008-08-15 | Reflow-stopping reaction valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008201519913U CN201236994Y (en) | 2008-08-15 | 2008-08-15 | Reflow-stopping reaction valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201236994Y true CN201236994Y (en) | 2009-05-13 |
Family
ID=40649725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008201519913U Expired - Lifetime CN201236994Y (en) | 2008-08-15 | 2008-08-15 | Reflow-stopping reaction valve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201236994Y (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101813213A (en) * | 2010-04-30 | 2010-08-25 | 重庆华林自控仪表股份有限公司 | Self-cleaning type baiting valve |
| CN102374315A (en) * | 2010-08-23 | 2012-03-14 | 无锡华润上华半导体有限公司 | One-way control valve, vacuum device for chip manufacture procedure and gas recoil preventing method |
| CN102788190A (en) * | 2012-08-24 | 2012-11-21 | 中冶长天国际工程有限责任公司 | Draw bar cutting system for ignition furnace |
| CN104197053A (en) * | 2014-09-24 | 2014-12-10 | 江苏诚功阀门科技有限公司 | Axial-flow type self-reliance pressure stabilizing valve |
| CN106024677A (en) * | 2016-05-30 | 2016-10-12 | 上海华力微电子有限公司 | System for preventing reverse flow in exhaust pipe and process chamber |
| CN106195357A (en) * | 2016-08-31 | 2016-12-07 | 苏州科迪流体控制设备有限公司 | Lifting/lowering type check-valves |
| CN106949265A (en) * | 2017-05-05 | 2017-07-14 | 珠海格力电器股份有限公司 | Air-conditioning equipment, handpiece Water Chilling Units, non-return structure and its control method |
| CN108518491A (en) * | 2018-04-13 | 2018-09-11 | 山西平阳重工机械有限责任公司 | A kind of two-way pneumatic control valve |
| CN110172707A (en) * | 2018-02-20 | 2019-08-27 | 高明开 | A kind of small-sized production hydrogen is flushed with hydrogen the device of balloon |
| CN110514484A (en) * | 2019-08-23 | 2019-11-29 | 浙江杭康检测技术有限公司 | Applied to the air sampling folder in uncertainty evaluation |
| CN114156151A (en) * | 2021-11-10 | 2022-03-08 | 长江存储科技有限责任公司 | Vacuum system of etching equipment and anti-recoil method |
-
2008
- 2008-08-15 CN CNU2008201519913U patent/CN201236994Y/en not_active Expired - Lifetime
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101813213A (en) * | 2010-04-30 | 2010-08-25 | 重庆华林自控仪表股份有限公司 | Self-cleaning type baiting valve |
| CN101813213B (en) * | 2010-04-30 | 2012-05-23 | 重庆华林自控仪表股份有限公司 | Self-cleaning type baiting valve |
| CN102374315A (en) * | 2010-08-23 | 2012-03-14 | 无锡华润上华半导体有限公司 | One-way control valve, vacuum device for chip manufacture procedure and gas recoil preventing method |
| CN102788190A (en) * | 2012-08-24 | 2012-11-21 | 中冶长天国际工程有限责任公司 | Draw bar cutting system for ignition furnace |
| CN104197053A (en) * | 2014-09-24 | 2014-12-10 | 江苏诚功阀门科技有限公司 | Axial-flow type self-reliance pressure stabilizing valve |
| CN106024677B (en) * | 2016-05-30 | 2019-07-19 | 上海华力微电子有限公司 | The system for preventing process cavity gas exhaust piping adverse current |
| CN106024677A (en) * | 2016-05-30 | 2016-10-12 | 上海华力微电子有限公司 | System for preventing reverse flow in exhaust pipe and process chamber |
| CN106195357A (en) * | 2016-08-31 | 2016-12-07 | 苏州科迪流体控制设备有限公司 | Lifting/lowering type check-valves |
| CN106949265A (en) * | 2017-05-05 | 2017-07-14 | 珠海格力电器股份有限公司 | Air-conditioning equipment, handpiece Water Chilling Units, non-return structure and its control method |
| CN110172707A (en) * | 2018-02-20 | 2019-08-27 | 高明开 | A kind of small-sized production hydrogen is flushed with hydrogen the device of balloon |
| CN108518491A (en) * | 2018-04-13 | 2018-09-11 | 山西平阳重工机械有限责任公司 | A kind of two-way pneumatic control valve |
| CN110514484A (en) * | 2019-08-23 | 2019-11-29 | 浙江杭康检测技术有限公司 | Applied to the air sampling folder in uncertainty evaluation |
| CN110514484B (en) * | 2019-08-23 | 2022-02-01 | 浙江杭康检测技术有限公司 | Air sampling clamp applied to uncertainty evaluation |
| CN114156151A (en) * | 2021-11-10 | 2022-03-08 | 长江存储科技有限责任公司 | Vacuum system of etching equipment and anti-recoil method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Free format text: FORMER OWNER: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION Effective date: 20130114 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 201203 PUDONG NEW AREA, SHANGHAI TO: 100176 DAXING, BEIJING |
|
| TR01 | Transfer of patent right |
Effective date of registration: 20130114 Address after: 100176 No. 18 Wenchang Avenue, Beijing economic and Technological Development Zone Patentee after: Semiconductor Manufacturing International (Beijing) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20090513 |