CN106024677A - System for preventing reverse flow in exhaust pipe and process chamber - Google Patents
System for preventing reverse flow in exhaust pipe and process chamber Download PDFInfo
- Publication number
- CN106024677A CN106024677A CN201610370165.7A CN201610370165A CN106024677A CN 106024677 A CN106024677 A CN 106024677A CN 201610370165 A CN201610370165 A CN 201610370165A CN 106024677 A CN106024677 A CN 106024677A
- Authority
- CN
- China
- Prior art keywords
- return valve
- exhaust piping
- gas exhaust
- process cavity
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Pipeline Systems (AREA)
- Drying Of Semiconductors (AREA)
Abstract
The invention provides a system for preventing a reverse flow in an exhaust pipe and a process chamber. The system comprises the process chamber and the exhaust pipe for discharging a gas in the process chamber, wherein the exhaust pipe is provided with a check valve; when the gas is discharged outside from the process chamber, the check valve is in an open state; and when the gas reversely flows to the process chamber from the exhaust pipe, the check valve is closed. The pollution to a wafer in the process chamber since an exhaust gas containing foreign particles in the exhaust pipe flows back to the process chamber is avoided; scraping of the wafer is avoided; and the process stability is improved.
Description
Technical field
The present invention relates to semiconductor process technique field, be specifically related to one and prevent process cavity gas exhaust piping inverse
The system of stream.
Background technology
In semiconductor fabrication process, generally wafer is placed in process cavity and processes, such as carry out film forming,
Etching, cleaning etc..Process cavity connects air inlet pipeline and gas exhaust piping, and air inlet pipeline is for by process cavity
Being passed through gas, gas exhaust piping is for discharging the waste gas in process cavity；Gas exhaust piping is provided with isolating valve
And choke valve, and connect at the end of gas exhaust piping and have air pump, air pump to be used for forming low pressure to make work
Discarded in skill chamber is drawn in gas exhaust piping and then discharges；Isolating valve for control gas exhaust piping conducting or
Turning off, choke valve is for controlling the air flow rate in gas exhaust piping and gas pressure.In actual process, for
Realizing the pressure in process cavity in set point, while being passed through gas in process cavity, unlatching is taken out
Air pump, and regulate the aperture of choke valve, thus realize the dynamic equilibrium of the pressure in process cavity.
But, air pump can cause whole technical process to stop when breaking down, and now choke valve cuts out needs
Wanting certain response time, the sealing effectiveness of isolating valve is not very strong, and the gas pressure in gas exhaust piping can
The exhaust contra-flow of gas exhaust piping higher than the pressure in process cavity, can be caused to enter in process cavity；Further, aerofluxus
Any component malfunction of pipeline, all can cause air pump to be automatically stopped work, such as throttle, this
Time gas exhaust piping in waste gas also can countercurrently enter in process cavity；Additionally, process cavity is carrying out process operation
Time, process cavity occurs any exception such as wafer be shifted over, all can cause whole technique stop process,
Air pump is automatically switched off, and now the waste gas in gas exhaust piping can adverse current enter in process cavity；From this, work
There is any exception in skill chamber and gas exhaust piping, air pump all can be caused to be automatically switched off, make the waste gas in exhaustor
Adverse current enters in process cavity；Cause the pressure of gas exhaust piping more than technique additionally, there is also some other factor
Pressure in chamber, makes the exhaust contra-flow in gas exhaust piping enter in process cavity；Discharged in gas exhaust piping
Discarded containing a large amount of impurity particles, these impurity particles adverse currents enter process cavity and can cause wafer in process cavity
Pollution even scrap.
Summary of the invention
In order to overcome problem above, it is desirable to provide a kind of prevent process cavity gas exhaust piping adverse current be
System, by installing non-return valve on gas exhaust piping, avoids the waste gas of gas exhaust piping to produce backflow phenomena.
In order to achieve the above object, the invention provides a kind of system preventing process cavity gas exhaust piping adverse current,
Including process cavity with by the gas exhaust piping of the gas discharge in process cavity, gas exhaust piping has non-return valve, gas
When process cavity discharges, non-return valve is opening, gas from gas exhaust piping to process cavity adverse current time,
Non-return valve is closed.
Preferably, described non-return valve includes pressure monitoring module, comparison module and alarm module, pressure monitoring
Module monitors the air pressure at non-return valve two ends, and sends a signal to comparison module, and comparison module compares non-return valve
The size of the air pressure at two ends, when the non-return valve air pressure near one end of process cavity more than or equal to non-return valve another
During the air pressure held, comparison module sends normal signal to control module；When non-return valve is near one end of process cavity
Air pressure less than the air pressure of the non-return valve other end time, comparison module sends abnormal signal to alarm module；Report to the police
Module sends alarm.
Preferably, described gas exhaust piping has isolating valve, throttling the most successively along from process cavity outwardly direction
Valve and be positioned at the air pump of gas exhaust piping end.
Preferably, described non-return valve is arranged between described choke valve and described air pump.
Preferably, use between described non-return valve with described gas exhaust piping and threaded.
Preferably, described non-return valve includes exporting valve body and import valve body, between outlet valve body and import valve body
Use threaded.
Preferably, there is the passage of connection gas exhaust piping, institute between described outlet valve body and described import valve body
State, between outlet valve body and described import valve body, there is elastomeric element and removable block, described removable block
It is connected with between described elastomeric element, is realized the shifting of described removable block by the movement of elastomeric element
Dynamic, so that described passage is blocked or opened to removable block.
Preferably, one end of described outlet valve body has O and support ring, and described removable block is opened
The mode of described passage is: described removable block elasticity of compression parts；When exhaustor occurs adverse current,
Spring promotes removable block to be squeezed on import valve body and is blocked by described passage.
Preferably, the shape of described removable block is identical with the shape of described support ring.
The system of the present invention, is provided with non-return valve on gas exhaust piping, when there is inverted draft in gas exhaust piping,
Non-return valve is closed, it is to avoid in gas exhaust piping, the exhaust gas recirculation containing impurity particle enters in process cavity, causes
The pollution of wafer in process cavity, it is to avoid scrapping of wafer, improves technology stability.
Accompanying drawing explanation
Fig. 1 is the side of the system preventing process cavity gas exhaust piping adverse current of a preferred embodiment of the present invention
Block figure
Fig. 2 is the fractionation relation schematic diagram of each parts of the non-return valve of a preferred embodiment of the present invention
Detailed description of the invention
For making present disclosure more clear understandable, below in conjunction with Figure of description, to present disclosure
It is described further.Certainly the invention is not limited in this specific embodiment, those skilled in the art institute
Known to general replacement be also covered by within the scope of the present invention.
Below in conjunction with accompanying drawing 1-2 and specific embodiment, the present invention is described in further detail.It should be noted that,
Accompanying drawing all uses the form simplified very much, uses non-ratio accurately, and only in order to facilitate, clearly to reach
Aid in illustrating the purpose of the present embodiment.
Refer to Fig. 1, the present embodiment prevent process cavity gas exhaust piping adverse current system, including process cavity,
The air inlet pipeline 1 being passed through gas in process cavity and the gas exhaust piping 2 that the gas in process cavity is discharged；Technique
Intracavity has wafer support stage, and process cavity top has illuminace component, and illuminace component connects heat extraction pipeline 3,
For discharging the heat that illuminace component produces；Gas exhaust piping is positioned at bottom process cavity, outside from process cavity
Direction be disposed with isolating valve, choke valve and be positioned at the air pump of gas exhaust piping end；Gas exhaust piping
Also there is non-return valve.
It is also preferred that the left refer to Fig. 1 and Fig. 2, non-return valve is arranged between choke valve and air pump；Non-return valve with
Use threaded between gas exhaust piping；Non-return valve includes exporting valve body 202 and import valve body 201, outlet valve
Use threaded between body 202 and import valve body 201, between outlet valve body 202 and import valve body 201
There is the passage of connection gas exhaust piping, between outlet valve body 202 and import valve body 201, there is elastomeric element
205 (being spring here) and removable blocks, the removable block used here include circular stopper 203 and with
The annular block 204 being connected, removable be connected between block with elastomeric element 205, by elasticity
The movement of parts 205 realizes the movement of removable block, so that removable block is blocked or opens passage；
One end of outlet valve body 202 has O 206 and support ring 207, and removable block opens the side of passage
Formula is: removable block elasticity of compression parts 205；When occurring adverse current in exhaustor 2, spring 205 promotes
Removable block is squeezed on import valve body 201 and is blocked by passage；The shape of removable block and support ring 207
The identical annular that is of shape, rounded stops 204 is connected with spring 205.
When gas discharges from process cavity, non-return valve is opening, gas from gas exhaust piping to technique
During the adverse current of chamber, non-return valve is closed；May be provided between gas exhaust piping and heat extraction pipeline connecting the two
Connecting line, the position that connecting line is connected with gas exhaust piping non-return valve near air pump side or
Isolating valve is near the side of process cavity；Connecting line is provided with valve, at gas exhaust piping and heat extraction pipeline
Between there is pressure detector, pressure detector is monitored one end and is connected with gas exhaust piping, the other end and heat exhausting pipe
Road connects；Thus realize gas exhaust piping and the pressure monitor of heat extraction pipeline, when the pressure of heat extraction pipeline is more than
During the pressure of gas exhaust piping, pressure detector sends abnormal signal and opens to the valve on connecting line, valve,
In gas flow gas exhaust piping in heat extraction pipeline
Non-return valve in the present embodiment also includes pressure monitoring module, comparison module and alarm module, and pressure is supervised
Surveying module and monitor the air pressure at non-return valve two ends, and send a signal to comparison module, comparison module compares check
The size of the air pressure at valve two ends, when the non-return valve air pressure near one end of process cavity is another more than or equal to non-return valve
During the air pressure of one end, comparison module sends normal signal to control module；When non-return valve is near the one of process cavity
When the air pressure of end is less than the air pressure of the non-return valve other end, comparison module sends abnormal signal to alarm module；Report
Alert module sends alarm.
Although the present invention discloses as above with preferred embodiment, right described embodiment is lifted only for the purposes of explanation
Example, is not limited to the present invention, and those skilled in the art is without departing from spirit and scope of the invention
On the premise of can make some changes and retouching, the protection domain that the present invention is advocated should be with claims institute
State and be as the criterion.
Claims (9)
1. prevent a system for process cavity gas exhaust piping adverse current, including process cavity with by the gas in process cavity
The gas exhaust piping that body is discharged, it is characterised in that gas exhaust piping has non-return valve, and gas is outwards arranged from process cavity
When going out, non-return valve is opening, gas from gas exhaust piping to process cavity adverse current time, non-return valve close.
System the most according to claim 1, it is characterised in that described non-return valve includes pressure monitoring mould
Block, comparison module and alarm module, pressure monitoring module is monitored the air pressure at non-return valve two ends, is concurrently delivered letters
Number give comparison module, comparison module compares the size of the air pressure at non-return valve two ends, when non-return valve is near process cavity
The air pressure of one end more than or equal to the air pressure of the non-return valve other end time, comparison module sends normal signal to control
Molding block；When the non-return valve air pressure near one end of process cavity is less than the air pressure of the non-return valve other end, compare
Module sends abnormal signal to alarm module；Alarm module sends alarm.
System the most according to claim 1, it is characterised in that described gas exhaust piping is along from process cavity
Outwardly direction has isolating valve, choke valve the most successively and is positioned at the air pump of gas exhaust piping end.
System the most according to claim 3, it is characterised in that described non-return valve is arranged at described throttling
Between valve and described air pump.
System the most according to claim 1, it is characterised in that described non-return valve and described gas exhaust piping
Between use threaded.
System the most according to claim 1, it is characterised in that described non-return valve include export valve body and
Import valve body, uses threaded between outlet valve body and import valve body.
System the most according to claim 6, it is characterised in that described outlet valve body and described inlet valve
There is between body the passage of connection gas exhaust piping, between described outlet valve body and described import valve body, there is elasticity
Parts and removable block, described removable block is connected between described elastomeric element, passes through elastic
The movement of part realizes the movement of described removable block, so that removable block is blocked or open described logical
Road.
System the most according to claim 7, it is characterised in that one end of described outlet valve body has O
Type circle and support ring, described removable block opens the mode of described passage and is: described removable block compresses
Elastomeric element；When occurring adverse current in exhaustor, spring promotes removable block to be squeezed on import valve body will
Described passage is blocked.
System the most according to claim 8, it is characterised in that the shape of described removable block and institute
The shape stating support ring is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610370165.7A CN106024677B (en) | 2016-05-30 | 2016-05-30 | The system for preventing process cavity gas exhaust piping adverse current |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610370165.7A CN106024677B (en) | 2016-05-30 | 2016-05-30 | The system for preventing process cavity gas exhaust piping adverse current |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106024677A true CN106024677A (en) | 2016-10-12 |
| CN106024677B CN106024677B (en) | 2019-07-19 |
Family
ID=57092253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610370165.7A Active CN106024677B (en) | 2016-05-30 | 2016-05-30 | The system for preventing process cavity gas exhaust piping adverse current |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106024677B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108109896A (en) * | 2017-12-15 | 2018-06-01 | 上海华力微电子有限公司 | Reduce the method and device of high current implanter particle contamination |
| CN114156151A (en) * | 2021-11-10 | 2022-03-08 | 长江存储科技有限责任公司 | Vacuum system of etching equipment and anti-recoil method |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2087336U (en) * | 1990-03-03 | 1991-10-23 | 高尔发 | Range-limited pressure gauge |
| US20060162466A1 (en) * | 2002-07-19 | 2006-07-27 | Christopher Wargo | Fluid flow measuring and proportional fluid flow control device |
| CN101191564A (en) * | 2006-11-27 | 2008-06-04 | 上海华虹Nec电子有限公司 | Control valve for exhaust apparatus, exhaust apparatus and exhaust method |
| CN201236994Y (en) * | 2008-08-15 | 2009-05-13 | 中芯国际集成电路制造(上海)有限公司 | Reflow-stopping reaction valve |
| CN102129256A (en) * | 2010-01-15 | 2011-07-20 | Ckd株式会社 | Vacuum control system and vacuum control method |
| CN102374315A (en) * | 2010-08-23 | 2012-03-14 | 无锡华润上华半导体有限公司 | One-way control valve, vacuum device for chip manufacture procedure and gas recoil preventing method |
| CN203494225U (en) * | 2013-06-25 | 2014-03-26 | 京东方科技集团股份有限公司 | Vacuum defoaming machine |
| CN203963154U (en) * | 2014-06-22 | 2014-11-26 | 龚永青 | One-way valve |
| CN205207793U (en) * | 2015-10-26 | 2016-05-04 | 德阳九鼎智远知识产权运营有限公司 | One -way automatic valve |
-
2016
- 2016-05-30 CN CN201610370165.7A patent/CN106024677B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2087336U (en) * | 1990-03-03 | 1991-10-23 | 高尔发 | Range-limited pressure gauge |
| US20060162466A1 (en) * | 2002-07-19 | 2006-07-27 | Christopher Wargo | Fluid flow measuring and proportional fluid flow control device |
| CN101191564A (en) * | 2006-11-27 | 2008-06-04 | 上海华虹Nec电子有限公司 | Control valve for exhaust apparatus, exhaust apparatus and exhaust method |
| CN201236994Y (en) * | 2008-08-15 | 2009-05-13 | 中芯国际集成电路制造(上海)有限公司 | Reflow-stopping reaction valve |
| CN102129256A (en) * | 2010-01-15 | 2011-07-20 | Ckd株式会社 | Vacuum control system and vacuum control method |
| CN102374315A (en) * | 2010-08-23 | 2012-03-14 | 无锡华润上华半导体有限公司 | One-way control valve, vacuum device for chip manufacture procedure and gas recoil preventing method |
| CN203494225U (en) * | 2013-06-25 | 2014-03-26 | 京东方科技集团股份有限公司 | Vacuum defoaming machine |
| CN203963154U (en) * | 2014-06-22 | 2014-11-26 | 龚永青 | One-way valve |
| CN205207793U (en) * | 2015-10-26 | 2016-05-04 | 德阳九鼎智远知识产权运营有限公司 | One -way automatic valve |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108109896A (en) * | 2017-12-15 | 2018-06-01 | 上海华力微电子有限公司 | Reduce the method and device of high current implanter particle contamination |
| CN114156151A (en) * | 2021-11-10 | 2022-03-08 | 长江存储科技有限责任公司 | Vacuum system of etching equipment and anti-recoil method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106024677B (en) | 2019-07-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101589040B1 (en) | Pump system and its controling method for cleaning strainer | |
| CN204841151U (en) | Filter backpurge system | |
| CN106024677A (en) | System for preventing reverse flow in exhaust pipe and process chamber | |
| CN204254008U (en) | Early warning type backflow preventer | |
| CN107381719A (en) | A kind of film water outlet is without back pressure water purifier | |
| CN104006005B (en) | Turbocompressor on-line cleaning device and turbocompressor on-line cleaning method | |
| CN104571168B (en) | The water feeding pressure control method of water cleaning systems and water purifier therein | |
| CN105042136A (en) | Novel steam reducing valve | |
| CN207227077U (en) | A kind of industrial water reverse osmosis filtration system | |
| CN210180514U (en) | Water level alarm device | |
| JPWO2018181299A1 (en) | Liquid gas compressor | |
| CN208898622U (en) | A kind of ultrafiltration membrane decoloration component | |
| CN202144891U (en) | Backflow prevention device and exhaust device | |
| CN215508255U (en) | Two-fluid cleaning system | |
| CN220677046U (en) | Basket filter for direct sewage discharge | |
| CN104373341A (en) | Overpressure protection device of positive displacement pump | |
| CN215174182U (en) | Gas circuit and system of emergency water valve of fluorine plug cock valve of bulk polymerization kettle | |
| CN207539441U (en) | A kind of blowdown valve anti-clogging interface | |
| CN215763525U (en) | Solenoid valve with filtering capability | |
| CN211864313U (en) | Air generator capable of automatically draining water | |
| CN207864771U (en) | A kind of valve member with filtering function | |
| CN220082849U (en) | Intelligent supervision device for sewage pipeline | |
| CN218379003U (en) | Wafer processing device | |
| CN210814326U (en) | Air source processing device | |
| CN209674249U (en) | Pressure control device and voltage-regulating system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |