CN106024561A - 大气电子束加工设备用电子枪 - Google Patents
大气电子束加工设备用电子枪 Download PDFInfo
- Publication number
- CN106024561A CN106024561A CN201610632479.XA CN201610632479A CN106024561A CN 106024561 A CN106024561 A CN 106024561A CN 201610632479 A CN201610632479 A CN 201610632479A CN 106024561 A CN106024561 A CN 106024561A
- Authority
- CN
- China
- Prior art keywords
- plasma
- chamber
- electron beam
- window
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 51
- 238000003754 machining Methods 0.000 title abstract description 6
- 239000000919 ceramic Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 18
- 238000001816 cooling Methods 0.000 claims description 13
- 230000001939 inductive effect Effects 0.000 claims description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 3
- 239000000498 cooling water Substances 0.000 claims description 2
- 239000000571 coke Substances 0.000 claims 1
- 238000009434 installation Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Plasma Technology (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610632479.XA CN106024561B (zh) | 2016-08-04 | 2016-08-04 | 大气电子束加工设备用电子枪 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610632479.XA CN106024561B (zh) | 2016-08-04 | 2016-08-04 | 大气电子束加工设备用电子枪 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106024561A true CN106024561A (zh) | 2016-10-12 |
CN106024561B CN106024561B (zh) | 2018-01-05 |
Family
ID=57133743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610632479.XA Active CN106024561B (zh) | 2016-08-04 | 2016-08-04 | 大气电子束加工设备用电子枪 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106024561B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106847660A (zh) * | 2017-04-05 | 2017-06-13 | 中国科学技术大学 | 一种中高能电子枪 |
CN107195519A (zh) * | 2017-07-07 | 2017-09-22 | 桂林电子科技大学 | 一种高能带电粒子束从真空到大气的引出窗口 |
CN111199856A (zh) * | 2018-11-16 | 2020-05-26 | Emcrafts有限公司 | 配备有自动光束对准的电子显微镜 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN85100826A (zh) * | 1985-04-01 | 1986-03-10 | 华中工学院 | 气动窗口 |
US4665297A (en) * | 1985-05-31 | 1987-05-12 | Bakish Materials Corporation | High power electron gun |
US5578831A (en) * | 1995-03-23 | 1996-11-26 | Associated Universities, Inc. | Method and apparatus for charged particle propagation |
JPH09223474A (ja) * | 1996-02-16 | 1997-08-26 | Sumitomo Heavy Ind Ltd | 加速型プラズマ銃 |
CN101582367A (zh) * | 2009-06-15 | 2009-11-18 | 大连理工大学 | 一种脉冲型大束斑电子束发生装置 |
CN201813579U (zh) * | 2009-12-14 | 2011-04-27 | 北京有色金属研究总院 | 电子束熔炼炉用电子枪 |
CN102523673A (zh) * | 2011-12-19 | 2012-06-27 | 北京大学 | 一种采用磁镜场约束的等离子体密封窗及其密封方法 |
CN205944028U (zh) * | 2016-08-04 | 2017-02-08 | 桂林狮达机电技术工程有限公司 | 大气电子束加工设备用电子枪 |
-
2016
- 2016-08-04 CN CN201610632479.XA patent/CN106024561B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN85100826A (zh) * | 1985-04-01 | 1986-03-10 | 华中工学院 | 气动窗口 |
US4665297A (en) * | 1985-05-31 | 1987-05-12 | Bakish Materials Corporation | High power electron gun |
US5578831A (en) * | 1995-03-23 | 1996-11-26 | Associated Universities, Inc. | Method and apparatus for charged particle propagation |
JPH09223474A (ja) * | 1996-02-16 | 1997-08-26 | Sumitomo Heavy Ind Ltd | 加速型プラズマ銃 |
CN101582367A (zh) * | 2009-06-15 | 2009-11-18 | 大连理工大学 | 一种脉冲型大束斑电子束发生装置 |
CN201813579U (zh) * | 2009-12-14 | 2011-04-27 | 北京有色金属研究总院 | 电子束熔炼炉用电子枪 |
CN102523673A (zh) * | 2011-12-19 | 2012-06-27 | 北京大学 | 一种采用磁镜场约束的等离子体密封窗及其密封方法 |
CN205944028U (zh) * | 2016-08-04 | 2017-02-08 | 桂林狮达机电技术工程有限公司 | 大气电子束加工设备用电子枪 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106847660A (zh) * | 2017-04-05 | 2017-06-13 | 中国科学技术大学 | 一种中高能电子枪 |
CN107195519A (zh) * | 2017-07-07 | 2017-09-22 | 桂林电子科技大学 | 一种高能带电粒子束从真空到大气的引出窗口 |
CN111199856A (zh) * | 2018-11-16 | 2020-05-26 | Emcrafts有限公司 | 配备有自动光束对准的电子显微镜 |
Also Published As
Publication number | Publication date |
---|---|
CN106024561B (zh) | 2018-01-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN106024561A (zh) | 大气电子束加工设备用电子枪 | |
CN108701842B (zh) | 具有不对称的密封部分的双极板以及具有这种双极板的燃料电池堆 | |
CN104454418B (zh) | 一种可提高运行稳定性的电弧加热发动机 | |
CN103882412B (zh) | 采用等离子体射流制备高阻隔薄膜的方法 | |
PE20091302A1 (es) | Metodo y dispositivo para el tratamiento de superficies | |
CN101381005A (zh) | 多级式离子射流装置与方法 | |
CN104632567A (zh) | 一种可产生超高速气流的电弧加热装置 | |
CN108811289A (zh) | 一种动压式等离子体合成射流发生器 | |
CN109618481A (zh) | 低雷诺数条件的等离子体合成射流激励器 | |
CN205944028U (zh) | 大气电子束加工设备用电子枪 | |
CN207021231U (zh) | 一种高能带电粒子束从真空到大气的引出窗口 | |
CN105764227A (zh) | 一种高束流直流空心阴极等离子体源 | |
CN206438178U (zh) | 一种长距离直流伸展电弧等离子体放电的新型结构 | |
CN207558737U (zh) | 一种六硼化镧冷阴极潘宁离子源装置 | |
CN109743832B (zh) | 一种大功率长寿命等离子体炬复合冷却装置及设计方法 | |
CN103561535A (zh) | 一种阵列式微洞阴极气体放电等离子体射流装置 | |
CN106531596A (zh) | 一种产生辉光放电条纹的装置及方法 | |
CN211387335U (zh) | 一种非真空电子束钢轨焊接电子枪 | |
CN103811264B (zh) | 用于加速染污硅橡胶材料表面憎水性迁移速率的放电装置 | |
CN103747607A (zh) | 一种远区等离子体喷枪装置 | |
CN209412089U (zh) | 一种降低光纤冷却氦气用量的系统 | |
CN107195519B (zh) | 一种高能带电粒子束从真空到大气的引出窗口 | |
CN100500926C (zh) | 真空内镀膜机 | |
CN210098906U (zh) | 一种真空吸附装置及铸片系统 | |
CN206422037U (zh) | 一种高功率强流离子源四电极支撑座组件 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address |
Address after: 541004 Qixing District, Guilin City, Guangxi Zhuang Autonomous Region Patentee after: Guilin Shida Technology Co., Ltd. Address before: No. 5-1 Pioneer Industrial Park, Kungming West Road, Guilin City, Guangxi Zhuang Autonomous Region, 541004 Patentee before: Guilin Shida Electrical and Mechanical Technology Engineering Co., Ltd. |
|
CP03 | Change of name, title or address | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Electronic fun for atmospheric electron beam machining equipment Effective date of registration: 20190708 Granted publication date: 20180105 Pledgee: Bank of China Limited by Share Ltd Guilin branch Pledgor: Guilin Shida Technology Co., Ltd. Registration number: 2019450000028 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right |