CN103561535A - 一种阵列式微洞阴极气体放电等离子体射流装置 - Google Patents
一种阵列式微洞阴极气体放电等离子体射流装置 Download PDFInfo
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- CN103561535A CN103561535A CN201310575385.XA CN201310575385A CN103561535A CN 103561535 A CN103561535 A CN 103561535A CN 201310575385 A CN201310575385 A CN 201310575385A CN 103561535 A CN103561535 A CN 103561535A
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CN201310575385.XA CN103561535B (zh) | 2013-11-18 | 2013-11-18 | 一种阵列式微洞阴极气体放电等离子体射流装置 |
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CN201310575385.XA CN103561535B (zh) | 2013-11-18 | 2013-11-18 | 一种阵列式微洞阴极气体放电等离子体射流装置 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104918399A (zh) * | 2015-05-26 | 2015-09-16 | 山东专利工程总公司 | 一种电容耦合型等离子体处理装置 |
CN105246241A (zh) * | 2015-10-30 | 2016-01-13 | 西安交通大学 | 一种产生大面积冷等离子体的装置 |
CN107343351A (zh) * | 2016-04-30 | 2017-11-10 | 波音公司 | 用于等离子体射流产生的半导体微空心阴极放电器件 |
CN110248458A (zh) * | 2019-06-19 | 2019-09-17 | 大连理工大学 | 一种射频多微束等离子体放电装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6433480B1 (en) * | 1999-05-28 | 2002-08-13 | Old Dominion University | Direct current high-pressure glow discharges |
US6624583B1 (en) * | 2002-06-28 | 2003-09-23 | Motorola, Inc. | Method and apparatus for plasma treating a chemical species |
CN1929078A (zh) * | 2005-09-07 | 2007-03-14 | 三星Sdi株式会社 | 微放电等离子体显示面板 |
US20070210709A1 (en) * | 2005-09-07 | 2007-09-13 | Samsung Sdi Co., Ltd | Micro discharge type plasma display device |
US7572998B2 (en) * | 2004-05-28 | 2009-08-11 | Mohamed Abdel-Aleam H | Method and device for creating a micro plasma jet |
US20090214402A1 (en) * | 2005-01-12 | 2009-08-27 | Forschungsverbund Berlin E.V. | Microplasma Array |
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2013
- 2013-11-18 CN CN201310575385.XA patent/CN103561535B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6433480B1 (en) * | 1999-05-28 | 2002-08-13 | Old Dominion University | Direct current high-pressure glow discharges |
US6624583B1 (en) * | 2002-06-28 | 2003-09-23 | Motorola, Inc. | Method and apparatus for plasma treating a chemical species |
US7572998B2 (en) * | 2004-05-28 | 2009-08-11 | Mohamed Abdel-Aleam H | Method and device for creating a micro plasma jet |
US20090214402A1 (en) * | 2005-01-12 | 2009-08-27 | Forschungsverbund Berlin E.V. | Microplasma Array |
CN1929078A (zh) * | 2005-09-07 | 2007-03-14 | 三星Sdi株式会社 | 微放电等离子体显示面板 |
US20070210709A1 (en) * | 2005-09-07 | 2007-09-13 | Samsung Sdi Co., Ltd | Micro discharge type plasma display device |
Non-Patent Citations (1)
Title |
---|
E.A. LENNON: "Operating modes and power considerations of microhollow cathode discharge devices with elongated trenches", 《CURRENT APPLIED PHYSICS》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104918399A (zh) * | 2015-05-26 | 2015-09-16 | 山东专利工程总公司 | 一种电容耦合型等离子体处理装置 |
CN105246241A (zh) * | 2015-10-30 | 2016-01-13 | 西安交通大学 | 一种产生大面积冷等离子体的装置 |
CN107343351A (zh) * | 2016-04-30 | 2017-11-10 | 波音公司 | 用于等离子体射流产生的半导体微空心阴极放电器件 |
CN110248458A (zh) * | 2019-06-19 | 2019-09-17 | 大连理工大学 | 一种射频多微束等离子体放电装置 |
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