CN106019859A - 一种用于激光直写曝光机的高功率紫外半导体激光器 - Google Patents
一种用于激光直写曝光机的高功率紫外半导体激光器 Download PDFInfo
- Publication number
- CN106019859A CN106019859A CN201610586075.1A CN201610586075A CN106019859A CN 106019859 A CN106019859 A CN 106019859A CN 201610586075 A CN201610586075 A CN 201610586075A CN 106019859 A CN106019859 A CN 106019859A
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- Prior art keywords
- optical fiber
- diode
- fiber
- emitting
- semiconductor light
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 112
- 230000008878 coupling Effects 0.000 claims abstract description 66
- 238000010168 coupling process Methods 0.000 claims abstract description 66
- 238000005859 coupling reaction Methods 0.000 claims abstract description 66
- 239000013307 optical fiber Substances 0.000 claims abstract description 64
- 239000000835 fiber Substances 0.000 claims description 77
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 46
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 42
- 229910052802 copper Inorganic materials 0.000 claims description 42
- 239000010949 copper Substances 0.000 claims description 42
- 239000000919 ceramic Substances 0.000 claims description 15
- 239000000498 cooling water Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 238000003491 array Methods 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 230000027455 binding Effects 0.000 description 2
- 238000009739 binding Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70025—Production of exposure light, i.e. light sources by lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610586075.1A CN106019859B (zh) | 2016-07-22 | 2016-07-22 | 一种用于激光直写曝光机的高功率紫外半导体激光器 |
Applications Claiming Priority (1)
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CN201610586075.1A CN106019859B (zh) | 2016-07-22 | 2016-07-22 | 一种用于激光直写曝光机的高功率紫外半导体激光器 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106019859A true CN106019859A (zh) | 2016-10-12 |
CN106019859B CN106019859B (zh) | 2017-11-28 |
Family
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CN201610586075.1A Active CN106019859B (zh) | 2016-07-22 | 2016-07-22 | 一种用于激光直写曝光机的高功率紫外半导体激光器 |
Country Status (1)
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CN (1) | CN106019859B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113126449A (zh) * | 2021-03-16 | 2021-07-16 | 合肥众群光电科技有限公司 | 一种用于绿油光刻的激光直写光刻系统及方法 |
CN116088281A (zh) * | 2023-03-11 | 2023-05-09 | 广东科视光学技术股份有限公司 | 一种曝光机的光纤导光uvled光源机构 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003044913A2 (en) * | 2001-11-06 | 2003-05-30 | Infinera Corporation | Optical communication module with photonic integrated circuit chip (pic) and external booster optical amplifier |
US20060251144A1 (en) * | 2005-03-31 | 2006-11-09 | Fuji Photo Film Co., Ltd. | Laser module having detachable transparent member covering light-output window |
CN204205281U (zh) * | 2012-05-08 | 2015-03-11 | 古河电气工业株式会社 | 半导体激光器模块 |
WO2015087983A1 (ja) * | 2013-12-11 | 2015-06-18 | 古河電気工業株式会社 | レーザ装置、および、光ファイバレーザ |
CN205141362U (zh) * | 2015-11-17 | 2016-04-06 | 山东圣达激光科技有限公司 | 一种采用双端光纤耦合输出的半导体激光器的激光系统 |
CN205507157U (zh) * | 2013-05-30 | 2016-08-24 | 古河电气工业株式会社 | 半导体激光模块 |
CN205910495U (zh) * | 2016-07-22 | 2017-01-25 | 合肥芯碁微电子装备有限公司 | 一种用于激光直写曝光机的高功率紫外半导体激光器 |
-
2016
- 2016-07-22 CN CN201610586075.1A patent/CN106019859B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003044913A2 (en) * | 2001-11-06 | 2003-05-30 | Infinera Corporation | Optical communication module with photonic integrated circuit chip (pic) and external booster optical amplifier |
US20060251144A1 (en) * | 2005-03-31 | 2006-11-09 | Fuji Photo Film Co., Ltd. | Laser module having detachable transparent member covering light-output window |
CN204205281U (zh) * | 2012-05-08 | 2015-03-11 | 古河电气工业株式会社 | 半导体激光器模块 |
CN205507157U (zh) * | 2013-05-30 | 2016-08-24 | 古河电气工业株式会社 | 半导体激光模块 |
WO2015087983A1 (ja) * | 2013-12-11 | 2015-06-18 | 古河電気工業株式会社 | レーザ装置、および、光ファイバレーザ |
CN205141362U (zh) * | 2015-11-17 | 2016-04-06 | 山东圣达激光科技有限公司 | 一种采用双端光纤耦合输出的半导体激光器的激光系统 |
CN205910495U (zh) * | 2016-07-22 | 2017-01-25 | 合肥芯碁微电子装备有限公司 | 一种用于激光直写曝光机的高功率紫外半导体激光器 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113126449A (zh) * | 2021-03-16 | 2021-07-16 | 合肥众群光电科技有限公司 | 一种用于绿油光刻的激光直写光刻系统及方法 |
CN113126449B (zh) * | 2021-03-16 | 2023-03-03 | 合肥众群光电科技有限公司 | 一种用于绿油光刻的激光直写光刻系统及方法 |
CN116088281A (zh) * | 2023-03-11 | 2023-05-09 | 广东科视光学技术股份有限公司 | 一种曝光机的光纤导光uvled光源机构 |
CN116088281B (zh) * | 2023-03-11 | 2023-10-10 | 广东科视光学技术股份有限公司 | 一种曝光机的光纤导光uvled光源机构 |
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Publication number | Publication date |
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CN106019859B (zh) | 2017-11-28 |
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Address after: 230088 the 11 level of F3 two, two innovation industrial park, No. 2800, innovation Avenue, Hi-tech Zone, Hefei, Anhui. Patentee after: Hefei Xinqi microelectronics equipment Co.,Ltd. Address before: Two, H2 building, No. 2800, Wangjiang Industrial Park, 230088 Wangjiang West Road, hi tech Zone, Anhui, Hefei, 533 Patentee before: HEFEI XINQI MICROELECTRONIC EQUIPMENT Co.,Ltd. |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A high-power ultraviolet semiconductor laser for laser direct writing exposure machine Effective date of registration: 20231218 Granted publication date: 20171128 Pledgee: China Construction Bank Co.,Ltd. Hefei government culture new area sub branch Pledgor: Hefei Xinqi microelectronics equipment Co.,Ltd. Registration number: Y2023980072089 |
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