CN106018549A - Environment monitoring device capable of detecting gas at high reliability - Google Patents
Environment monitoring device capable of detecting gas at high reliability Download PDFInfo
- Publication number
- CN106018549A CN106018549A CN201610409648.3A CN201610409648A CN106018549A CN 106018549 A CN106018549 A CN 106018549A CN 201610409648 A CN201610409648 A CN 201610409648A CN 106018549 A CN106018549 A CN 106018549A
- Authority
- CN
- China
- Prior art keywords
- passage
- film material
- sensitive thin
- gas
- saw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
- C23C14/205—Metallic material, boron or silicon on organic substrates by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/011—Velocity or travel time
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/021—Gases
- G01N2291/0212—Binary gases
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/10—Number of transducers
- G01N2291/101—Number of transducers one transducer
Abstract
The invention relates to an environment monitoring device capable of detecting gas at high reliability. The environment monitoring device is provided with an SAW sensor capable of monitoring the concentration of CO2 and NO2 gas, the SAW sensor is provided with a five-channel structure based on an SAW device, the third channel serves as a reference cannel, a sensitive area of the first channel and a sensitive area of the second channel are coated with a first sensitive thin-film material for CO2 gas detection, and a sensitive area of the fourth channel and a sensitive area of the fifth channel are coated with a second sensitive thin-film material for NO2 gas detection. Double channels are adopted for detecting each kind of gas at the same time, so that the gas detection stability is greatly improved, and the reliability of reading data of the sensor is guaranteed; good repeatability is achieved, and testing stability is good at high temperature, so that the environment monitoring device can read the gas concentration value through the sensor, and high reliability is achieved.
Description
Technical field
The application relates to environmental monitoring field, particularly relate to a kind of can the ring of high credibility detected gas
Border monitoring device.
Background technology
Environment monitoring device is that one can monitor dusty gas concentration in surrounding enviroment, pollute particulate matter
The monitoring device of concentration etc., it can be applicable to outdoor environment or indoor environment, is a kind of comprehensive
Monitoring device.
But, existing environment monitoring device has function singleness, and detectable gas kind is less, simultaneously
There is the shortcomings such as sensitivity is the highest.
Summary of the invention
For overcoming problem present in correlation technique, the application provides the one can high credibility detection gas
The environment monitoring device of body, including environment monitoring device body and being installed within environment monitoring device
Monitoring CO2、NO2The SAW sensor of gas concentration, described SAW sensor has Five-channel knot
Structure, wherein passage three coats sensitive thin film as reference channel, passage one with the sensitizing range of passage two
Material one, carries out CO2The detection of gas, passage four coats sensitive thin film with the sensitizing range of passage five
Material two, carries out NO2The detection of gas；Described passage sensitive thin-film material one, two is three layers,
Going back magnetron sputtering layer of Ni film between described sensitive thin film and SAW device, described Ni film thickness is
120nm。
Preferably, the preparation method of described SAW sensor comprises the following steps:
Step one, cleans SAW device: SAW device is sequentially placed into acetone, ethanol, deionization
In water, supersound process 20min respectively, remove SAW device surface contaminant, then device is put
Enter in baking oven and dry, and test its frequency of oscillation；
Step 2, reinforces SAW device: brush one layer of protective coating on the surface of SAW device,
Described protective coating mainly by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide with 2:3:5:1
Proportions form；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one: the polyetherimide material of the purchase taking 85mg adds burns
In Bei, add the ultra-pure water of 20ml, stir, be subsequently adding the polythiophene of 30mg, stirring
Uniformly, add the 27g Ni nanometer powder of purchase subsequently, beaker put in ultrasonator,
In the case of heating in water bath 70 DEG C, sonic oscillation 4h, obtain finely dispersed sensitive thin-film material one；
B () prepares sensitive thin-film material two: the polyaniline taking 14mg molecule pure is dissolved in 50ml's
In chloroform soln, then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring,
Add 9g barium titanate nano powder, supersound process 1h, obtain finely dispersed sensitive thin-film material two；
C () prepares sensitive thin-film material three: by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2Add dissolved with in the 40ml tetrahydrofuran solution of PVC in the ratio of 1:2, sealing shading
Under the conditions of, low temperature stirring 1h, i.e. obtain sensitive thin-film material three；
Step 4, prepares SAW sensor:
A the SAW device cleaned through step one is dried by () after, magnetron sputtering is utilized to combine template
Layer of metal Ni film is plated respectively in the sensitizing range of passage one, passage two, passage four, passage five,
Then utilize quantitative liquid shifter take sensitive thin-film material three be coated in passage one, passage two, passage four,
The sensitizing range of passage five, is as the criterion so that Ni film is completely covered；Profit is the most respectively at passage
One and the sensitizing range of passage two, passage four and passage five coat sensitive thin-film material one and sensitivity successively
Thin-film material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, make passage one, passage two, passage four and passage five
Surface, sensitizing range be respectively formed three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, corresponding each logical on lid
There is reserved air inlet directly over the sensitizing range in road, constitute SAW sensor.
The technical scheme that embodiments herein provides can include following beneficial effect:
1. configuration aspects, uses Five-channel SAW device, and wherein passage three is as reference channel, logical
Road one and the sensitizing range coating sensitive thin-film material one of passage two, carry out CO2The detection of gas, logical
Road four and the sensitizing range coating sensitive thin-film material two of passage five, carry out NO2The detection of gas；Right
Every kind of gas all uses the dual pathways to detect simultaneously, considerably increases the stability to detection of gas, it is ensured that
The credibility of sensor readings；
2. sensitive thin-film material one is by Polyetherimide (PEI) material, polythiophene material and Ni nanometer
Dusty material forms, and the particle diameter of the nanoscale of Ni nano-powder material ensure that Organic substance PEI and gathers
The dispersibility of thiophene, substantially increases sensitive material to CO2Sensitivity；
3. sensitive thin-film material two is by polyaniline material, multi-wall carbon nano-tube tube material and barium-titanate material group
Becoming, wherein, polyaniline major part is compounded in carbon nano tube surface, due to the hollow structure of CNT
With great specific surface area, in terms of physical arrangement, considerably increase polyaniline to NO2The absorption of gas
Ability；
4, the sensitive thin-film material three of the application is by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2Composition, further enhancing fermentation tank to CO2Sensing capability.
Aspect and advantage that the application adds will part be given in the following description, and part will be from following
Description in become obvious, or recognized by the practice of the application.It should be appreciated that above
It is only exemplary and explanatory that general description and details hereinafter describe, and can not limit the application.
Accompanying drawing explanation
Accompanying drawing herein is merged in description and constitutes the part of this specification, it is shown that meet this
Inventive embodiment, and for explaining the principle of the present invention together with description.
Fig. 1 is SAW sensor structural representation in environment monitoring device of the present invention.
Fig. 2 is that in the passage one of the SAW sensor in Fig. 1 or passage two region, Ni film and sensitivity are thin
The sectional view of membrane material coating order, wherein, complete order should be circulation three times.
Fig. 3 is that in the passage four of the SAW sensor in Fig. 1 or passage five region, Ni film and sensitivity are thin
The sectional view of membrane material coating order, wherein, complete order should be circulation three times.
Fig. 4 is according to the method flow diagram making sensor Five-channel structure shown in embodiment.
Wherein: 01-sensitive thin-film material one, 02-sensitive thin-film material two, 03-Ni film, 04-is sensitive
Thin-film material three.
Detailed description of the invention
Here will illustrate exemplary embodiment in detail, its example represents in the accompanying drawings.Below
Description when relating to accompanying drawing, unless otherwise indicated, the same numbers in different accompanying drawings represents identical or phase
As key element.Embodiment described in following exemplary embodiment does not represent and present invention phase one
The all embodiments caused.On the contrary, they only with as appended claims describes in detail, this
The example of the consistent apparatus and method of some aspects of invention.
Following disclosure provides many different embodiments or example for realizing the difference of the application
Structure.In order to simplify disclosure herein, hereinafter parts and setting to specific examples are described.
Certainly, they are the most merely illustrative, and are not intended to limit the application.Additionally, the application is permissible
Repeat reference numerals and/or letter in different examples.This repetition is to simplify and clearly mesh
, itself it is more than the relation between various embodiment being discussed and/or arranging.Additionally, the application
The various specific technique provided and the example of material, but those of ordinary skill in the art can anticipate
Know the applicability to other techniques and/or the use of other materials.It addition, described below first is special
Levy Second Eigenvalue " on " structure can include what the first and second features were formed as directly contacting
Embodiment, it is also possible to include the embodiment that other feature is formed between the first and second features, this
Sample the first and second feature is not likely to be directly contact.
In the description of the present application, it should be noted that unless otherwise prescribed and limit, term " peace
Dress ", should be interpreted broadly " being connected ", " connection ", for example, it may be mechanical connection or electrically connect, also
Can be the connection of two element internals, can be to be joined directly together, it is also possible to indirect by intermediary
It is connected, for the ordinary skill in the art, above-mentioned term can be understood as the case may be
Concrete meaning.
Along with the continuous progress of social production life, mankind's combustion of fossil fuels gets more and more, causes two
The discharge of carbonoxide, nitrogen dioxide etc. alreadys more than the scope that environment can bear, due to carbon dioxide
Can produce greenhouse effect, nitrogen dioxide is one of principal element forming acid rain and photochemical pollution,
Through badly influencing the productive life of the mankind, it is therefore necessary to carbon dioxide, the discharge of nitrogen dioxide
It is monitored.
Carbon dioxide, is inorganic compound common in a kind of air, and molecular formula is CO2, oxygen atom
It is that covalent bond is combined between carbon atom, forms nonpolar linear structure, stable chemical nature, often
Under temperature, carbon dioxide is colorless and odorless, water soluble, and generates carbonic acid with water.Due to two
Carbonoxide has insulation effect, and it discharges the rising day by day that result in temperature of the earth in a large number, has tables of data
Bright, since the nearly century, Global Temperature increases 0.6 degree Celsius, and if things go on like this, it is to Hai Ping
The rising in face and the impact of environment will be continuously increased.
Nitrogen dioxide is the gaseous material of a kind of brownish red, high activity.Nitrogen dioxide is in the shape of ozone
Play an important role during one-tenth.Artificial nitrogen dioxide the releasing essentially from high-temp combustion process produced
Put, such as the discharge etc. of motor-vehicle tail-gas, boiler waste gas.One of nitrogen dioxide or the origin cause of formation of acid rain,
The environmental effect brought is varied, such as to competing between wetland and terrestrial plant species and forming
The impact of change, the reduction of atmospheric visibility, the acidifying of surface water, eutrophication and increase water body
In be harmful to Fish and other hydrobiological content of toxins.
Gas sensor, is a kind of change that can experience ambient atmos concentration, kind etc., and by this
Planting change transitions is measurable signal (the such as signal such as voltage, electric current), thus realizes target
The device of the detection of gas.General gas flow sensor includes gas sensitive, circuit for signal conditioning, sensitivity
The part such as substrate and accessory power supply.According to sensitivity principle, gas sensor is classified, quasiconductor can be divided into
Formula gas sensor, electrochemical gas sensor, infrared gas sensor, high score minor gas pass
Sensor etc..
Wherein, sensitive thin film gas sensor is the emphasis of now research, it is generally the case that utilize drop coating,
The method such as spin coating, evaporation coating, prepares sensitive thin film at QCM (QCM), sound
On the devices such as surface wave (SAW), owing to gas absorption is on sensitive thin film, cause sensitive thin film
Qualitative change, and then cause the output signal of telecommunication of sensor to produce change, thus detected target gas
The type of body and kind.
The principle of SAW sensor is sensor owing to piezoelectric effect can send acoustic signals, this signal
Owing to being in detected gas, its frequency, sound wave, amplitude etc. can change, thus reach inspection
Survey the purpose of gas.Exciting and detecting of surface acoustic wave is realized by interdigital transducer, interdigital
Transducer (IDT) is the gold of the finger cross-like forming two handss of shape picture on piezoelectric substrate surface
Metal patterns, its effect is to realize sound-electric transducing.
For the importance detected for carbon dioxide, nitrogen dioxide gas in productive life, Yi Jixian
There are the deficiency (such as sensitivity is relatively low, response time length, specific aim are the highest) of sensor, this programme
Based on SAW device, it is prepared for Five-channel CO2And NO2Gas sensor.
The processing technology of SAW device is more ripe, and it is 525MHz that this programme uses mid frequency
Five-channel structure SAW delay line type device, choice of the substrates is quartz material, interdigital transducer
Electrode be Cr metal.Each passage is made up of a pair interdigital transducer, respectively as input with defeated
Going out transducer, in input transducer, the signal of telecommunication of input produces alternating electric field, owing to piezoelectric effect is at base
Exciting elastic vibration at the end, produce surface acoustic wave, output transducer receives surface acoustic wave signal and changes
For the signal of telecommunication, the signal of telecommunication is detected.
Passage one, passage two are used as CO2The Measurement channel of gas, passage three is used as reference
Passage, passage four, passage five are used as NO2The Measurement channel of gas.When gaseous environment becomes
Change, then reference channel is the same with the frequency drift of other passage, by the difference between agitator
Frequency can eliminate the interference that environmental change causes.
Embodiment 1
The application provide a kind of can the environment monitoring device of high credibility detected gas, supervise including environment
Survey device body and be installed on the monitoring CO within environment monitoring device2、NO2The SAW of gas concentration
Sensor；SAW sensor structural representation as shown in Figure 1, described SAW sensor has five-way
Road structure, wherein passage three is as reference channel, and passage one is sensitive with the sensitizing range coating of passage two
Thin-film material one (01), carries out CO2The detection of gas；Passage four is coated with the sensitizing range of passage five
Cover sensitive thin-film material two (02), carry out NO2The detection of gas；Described passage sensitive thin-film material
One, two it is three layers, between described sensitive thin film and SAW device, goes back magnetron sputtering layer of Ni film
(03), described Ni film thickness is 120nm；Fig. 2 shows the logical of the SAW sensor in Fig. 1
In road one or passage two region, Ni film and the sectional view of sensitive thin-film material coating order, wherein, complete
Whole order should be circulation three times, and Fig. 3 is passage four or the passage five of the SAW sensor in Fig. 1
Ni film and the sectional view of sensitive thin-film material coating order in region, wherein, complete order should be
Circulate three times.
Fig. 4 is according to the system of SAW sensor in the environment monitoring device shown in an exemplary embodiment
Preparation Method, comprises the following steps:
Step one, cleans SAW device: SAW device is sequentially placed into acetone, ethanol, deionization
In water, supersound process 20min respectively, remove SAW device surface contaminant, then device is put
Enter in baking oven and dry, and test its frequency of oscillation；
Step 2, reinforces SAW device: brush one layer of protective coating on the surface of SAW device,
Described protective coating mainly by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide with 2:3:5:1
Proportions form；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): take the polyetherimide material of the purchase of 85mg
Add in beaker, add the ultra-pure water of 20ml, stir, be subsequently adding the polythiophene of 30mg,
Stir, add the 27g Ni nanometer powder of purchase subsequently, beaker is put into ultrasonator
In, in the case of heating in water bath 70 DEG C, sonic oscillation 4h, obtain finely dispersed sensitive thin-film material
One；
B () prepares sensitive thin-film material two (02): the polyaniline taking 14mg molecule pure is dissolved in 50
In the chloroform soln of ml, then take 10mg multi-walled carbon nano-tubes and add in solution, stir
After, add 9g barium titanate nano powder, supersound process 1h, obtain finely dispersed sensitive thin film material
Material two；
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2And Ru
(dpp)3Cl2Add dissolved with in the 40ml tetrahydrofuran solution of PVC in the ratio of 1:2, close
Under envelope dark conditions, low temperature stirring 1h, i.e. obtain sensitive thin-film material three；
Step 4, prepares SAW sensor:
A the SAW device cleaned through step one is dried by () after, magnetron sputtering is utilized to combine template
Layer of metal Ni film is plated respectively in the sensitizing range of passage one, passage two, passage four, passage five,
Then utilize quantitative liquid shifter take sensitive thin-film material three be coated in passage one, passage two, passage four,
The sensitizing range of passage five, is as the criterion so that Ni film is completely covered；Profit is the most respectively at passage
One and the sensitizing range of passage two, passage four and passage five coat sensitive thin-film material one and sensitivity successively
Thin-film material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, make passage one, passage two, passage four and passage five
Surface, sensitizing range be respectively formed three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, corresponding each logical on lid
There is reserved air inlet directly over the sensitizing range in road, constitute SAW sensor.
Preferably, the test system of SAW gas sensor by test chamber and is tested circuit, is dynamically joined
Device of air and frequency counter composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations also
Control the flow of gas；Test circuit is used for applying alternating voltage in SAW device；Frequency counting
Device is used for being recorded in real time at the frequency change of sensor in object gas.Wherein, definition sensitivity is for passing
The variable quantity of sensor frequency and the ratio of original frequency；Response time is that sensor contacts with gas and starts
To the time used by 90% that sensor frequency variable quantity is peak change amount；Recovery time is sensor
Contact stopping to start to sensor frequency recovery value to obtain the time used by 90% with gas.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens distribution
System, is passed through N in test chamber2, air-out, by the time after the frequency stable of sensor.Start
CO it is passed through in test chamber2, after sensor frequency stable, close CO2, the most again it is passed through
N2, treat that sensor frequency is again stable.Use the method, test 500ppm, 2500ppm successively
CO2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 7min and 4min, and passage one and passage
The difference of two pairs of each readings is less than 4%；
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests successively
The NO of 50ppm, 250ppm2Response results, by passage four and passage five obtain frequency change
Amount is respectively 3.1KHz, 5.5KHz, response time and recovery time is respectively 5min and 2min,
And passage four and passage five are less than 4% to the difference of each reading.By test result it can be seen that
This Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and to every kind
Gas all uses the dual pathways to test, and the data reliability obtained is greatly improved.It it is 80 DEG C in operating temperature
Under, the undulating value of test result, ± 3%, shows preferable high temperature stability performance.
About the device in above-described embodiment, the concrete mode that wherein modules performs to operate exists
About the embodiment of the method has been described in detail, explanation will be not set forth in detail herein.
Embodiment 2
The application provide a kind of can the environment monitoring device of high credibility detected gas, supervise including environment
Survey device body and be installed on the monitoring CO within environment monitoring device2、NO2The SAW of gas concentration
Sensor；SAW sensor structural representation as shown in Figure 1, described SAW sensor has five-way
Road structure, wherein passage three is as reference channel, and passage one is sensitive with the sensitizing range coating of passage two
Thin-film material one (01), carries out CO2The detection of gas；Passage four is coated with the sensitizing range of passage five
Cover sensitive thin-film material two (02), carry out NO2The detection of gas；Described passage sensitive thin-film material
One, two it is three layers, between described sensitive thin film and SAW device, goes back magnetron sputtering layer of Ni film
(03), described Ni film thickness is 130nm；Fig. 2 shows the logical of the SAW sensor in Fig. 1
In road one or passage two region, Ni film and the sectional view of sensitive thin-film material coating order, wherein, complete
Whole order should be circulation three times, and Fig. 3 is passage four or the passage five of the SAW sensor in Fig. 1
Ni film and the sectional view of sensitive thin-film material coating order in region, wherein, complete order should be
Circulate three times.
Fig. 4 is according to the system of SAW sensor in the environment monitoring device shown in an exemplary embodiment
Preparation Method, comprises the following steps:
Step one, cleans SAW device: SAW device is sequentially placed into acetone, ethanol, deionization
In water, supersound process 20min respectively, remove SAW device surface contaminant, then device is put
Enter in baking oven and dry, and test its frequency of oscillation；
Step 2, reinforces SAW device: brush one layer of protective coating on the surface of SAW device,
Described protective coating mainly by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide with 1:1:5:1
Proportions form；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): take the polyetherimide material of the purchase of 85mg
Add in beaker, add the ultra-pure water of 20ml, stir, be subsequently adding the polythiophene of 30mg,
Stir, add the 27g Ni nanometer powder of purchase subsequently, beaker is put into ultrasonator
In, in the case of heating in water bath 70 DEG C, sonic oscillation 4h, obtain finely dispersed sensitive thin-film material
One；
B () prepares sensitive thin-film material two (02): the polyaniline taking 14mg molecule pure is dissolved in 50
In the chloroform soln of ml, then take 20mg multi-walled carbon nano-tubes and add in solution, stir
After, add 9g barium titanate nano powder, supersound process 1h, obtain finely dispersed sensitive thin film material
Material two；
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2And Ru
(dpp)3Cl2Add dissolved with in the 40ml tetrahydrofuran solution of PVC in the ratio of 1:2, close
Under envelope dark conditions, low temperature stirring 1h, i.e. obtain sensitive thin-film material three；
Step 4, prepares SAW sensor:
A the SAW device cleaned through step one is dried by () after, magnetron sputtering is utilized to combine template
Layer of metal Ni film is plated respectively in the sensitizing range of passage one, passage two, passage four, passage five,
Then utilize quantitative liquid shifter take sensitive thin-film material three be coated in passage one, passage two, passage four,
The sensitizing range of passage five, is as the criterion so that Ni film is completely covered；Profit is the most respectively at passage
One and the sensitizing range of passage two, passage four and passage five coat sensitive thin-film material one and sensitivity successively
Thin-film material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, make passage one, passage two, passage four and passage five
Surface, sensitizing range be respectively formed three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, corresponding each logical on lid
There is reserved air inlet directly over the sensitizing range in road, constitute SAW sensor.
Preferably, the test system of SAW gas sensor by test chamber and is tested circuit, is dynamically joined
Device of air and frequency counter composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations also
Control the flow of gas；Test circuit is used for applying alternating voltage in SAW device；Frequency counting
Device is used for being recorded in real time at the frequency change of sensor in object gas.Wherein, definition sensitivity is for passing
The variable quantity of sensor frequency and the ratio of original frequency；Response time is that sensor contacts with gas and starts
To the time used by 90% that sensor frequency variable quantity is peak change amount；Recovery time is sensor
Contact stopping to start to sensor frequency recovery value to obtain the time used by 90% with gas.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens distribution
System, is passed through N in test chamber2, air-out, by the time after the frequency stable of sensor.Start
CO it is passed through in test chamber2, after sensor frequency stable, close CO2, the most again it is passed through
N2, treat that sensor frequency is again stable.Use the method, test 500ppm, 2500ppm successively
CO2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 8min and 4min, and passage one and passage
The difference of two pairs of each readings is less than 4%；
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests successively
The NO of 50ppm, 250ppm2Response results, by passage four and passage five obtain frequency change
Amount is respectively 3.1KHz, 5.5KHz, response time and recovery time is respectively 8min and 2min,
And passage four and passage five are less than 7% to the difference of each reading.By test result it can be seen that
This Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and to every kind
Gas all uses the dual pathways to test, and the data reliability obtained is greatly improved.It it is 80 DEG C in operating temperature
Under, the undulating value of test result, ± 5%, shows preferable high temperature stability performance.
Embodiment 3
The application provide a kind of can the environment monitoring device of high credibility detected gas, supervise including environment
Survey device body and be installed on the monitoring CO within environment monitoring device2、NO2The SAW of gas concentration
Sensor；SAW sensor structural representation as shown in Figure 1, described SAW sensor has five-way
Road structure, wherein passage three is as reference channel, and passage one is sensitive with the sensitizing range coating of passage two
Thin-film material one (01), carries out CO2The detection of gas；Passage four is coated with the sensitizing range of passage five
Cover sensitive thin-film material two (02), carry out NO2The detection of gas；Described passage sensitive thin-film material
One, two it is three layers, between described sensitive thin film and SAW device, goes back magnetron sputtering layer of Ni film
(03), described Ni film thickness is 140nm；Fig. 2 shows the logical of the SAW sensor in Fig. 1
In road one or passage two region, Ni film and the sectional view of sensitive thin-film material coating order, wherein, complete
Whole order should be circulation three times, and Fig. 3 is passage four or the passage five of the SAW sensor in Fig. 1
Ni film and the sectional view of sensitive thin-film material coating order in region, wherein, complete order should be
Circulate three times.
Fig. 4 is according to the system of SAW sensor in the environment monitoring device shown in an exemplary embodiment
Preparation Method, comprises the following steps:
Step one, cleans SAW device: SAW device is sequentially placed into acetone, ethanol, deionization
In water, supersound process 20min respectively, remove SAW device surface contaminant, then device is put
Enter in baking oven and dry, and test its frequency of oscillation；
Step 2, reinforces SAW device: brush one layer of protective coating on the surface of SAW device,
Described protective coating mainly by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide with 2:3:4:1
Proportions form；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): take the polyetherimide material of the purchase of 85mg
Add in beaker, add the ultra-pure water of 20ml, stir, be subsequently adding the polythiophene of 30mg,
Stir, add the 27g Ni nanometer powder of purchase subsequently, beaker is put into ultrasonator
In, in the case of heating in water bath 70 DEG C, sonic oscillation 4h, obtain finely dispersed sensitive thin-film material
One；
B () prepares sensitive thin-film material two (02): the polyaniline taking 17mg molecule pure is dissolved in 100
In the chloroform soln of ml, then take 10mg multi-walled carbon nano-tubes and add in solution, stir
After, add 9g barium titanate nano powder, supersound process 1h, obtain finely dispersed sensitive thin film material
Material two；
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2And Ru
(dpp)3Cl2Add dissolved with in the 40ml tetrahydrofuran solution of PVC in the ratio of 1:2, close
Under envelope dark conditions, low temperature stirring 1h, i.e. obtain sensitive thin-film material three；
Step 4, prepares SAW sensor:
A the SAW device cleaned through step one is dried by () after, magnetron sputtering is utilized to combine template
Layer of metal Ni film is plated respectively in the sensitizing range of passage one, passage two, passage four, passage five,
Then utilize quantitative liquid shifter take sensitive thin-film material three be coated in passage one, passage two, passage four,
The sensitizing range of passage five, is as the criterion so that Ni film is completely covered；Profit is the most respectively at passage
One and the sensitizing range of passage two, passage four and passage five coat sensitive thin-film material one and sensitivity successively
Thin-film material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, make passage one, passage two, passage four and passage five
Surface, sensitizing range be respectively formed three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, corresponding each logical on lid
There is reserved air inlet directly over the sensitizing range in road, constitute SAW sensor.
Preferably, the test system of SAW gas sensor by test chamber and is tested circuit, is dynamically joined
Device of air and frequency counter composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations also
Control the flow of gas；Test circuit is used for applying alternating voltage in SAW device；Frequency counting
Device is used for being recorded in real time at the frequency change of sensor in object gas.Wherein, definition sensitivity is for passing
The variable quantity of sensor frequency and the ratio of original frequency；Response time is that sensor contacts with gas and starts
To the time used by 90% that sensor frequency variable quantity is peak change amount；Recovery time is sensor
Contact stopping to start to sensor frequency recovery value to obtain the time used by 90% with gas.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens distribution
System, is passed through N in test chamber2, air-out, by the time after the frequency stable of sensor.Start
CO it is passed through in test chamber2, after sensor frequency stable, close CO2, the most again it is passed through
N2, treat that sensor frequency is again stable.Use the method, test 500ppm, 2500ppm successively
CO2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 6min and 3min, and passage one and passage
The difference of two pairs of each readings is less than 4%；
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests successively
The NO of 50ppm, 250ppm2Response results, by passage four and passage five obtain frequency change
Amount is respectively 3.1KHz, 5.5KHz, response time and recovery time is respectively 19min and 21min,
And passage four and passage five are less than 7% to the difference of each reading.By test result it can be seen that
This Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and to every kind
Gas all uses the dual pathways to test, and the data reliability obtained is greatly improved.It it is 80 DEG C in operating temperature
Under, the undulating value of test result, ± 5%, shows preferable high temperature stability performance.
Embodiment 4
The application provide a kind of can the environment monitoring device of high credibility detected gas, supervise including environment
Survey device body and be installed on the monitoring CO within environment monitoring device2、NO2The SAW of gas concentration
Sensor；SAW sensor structural representation as shown in Figure 1, described SAW sensor has five-way
Road structure, wherein passage three is as reference channel, and passage one is sensitive with the sensitizing range coating of passage two
Thin-film material one (01), carries out CO2The detection of gas；Passage four is coated with the sensitizing range of passage five
Cover sensitive thin-film material two (02), carry out NO2The detection of gas；Described passage sensitive thin-film material
One, two it is three layers, between described sensitive thin film and SAW device, goes back magnetron sputtering layer of Ni film
(03), described Ni film thickness is 150nm；Fig. 2 shows the logical of the SAW sensor in Fig. 1
In road one or passage two region, Ni film and the sectional view of sensitive thin-film material coating order, wherein, complete
Whole order should be circulation three times, and Fig. 3 is passage four or the passage five of the SAW sensor in Fig. 1
Ni film and the sectional view of sensitive thin-film material coating order in region, wherein, complete order should be
Circulate three times.
Fig. 4 is according to the system of SAW sensor in the environment monitoring device shown in an exemplary embodiment
Preparation Method, comprises the following steps:
Step one, cleans SAW device: SAW device is sequentially placed into acetone, ethanol, deionization
In water, supersound process 20min respectively, remove SAW device surface contaminant, then device is put
Enter in baking oven and dry, and test its frequency of oscillation；
Step 2, reinforces SAW device: brush one layer of protective coating on the surface of SAW device,
Described protective coating mainly by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide with 2:5:3:1
Proportions form；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): take the polyetherimide material of the purchase of 85mg
Add in beaker, add the ultra-pure water of 20ml, stir, be subsequently adding the polythiophene of 30mg,
Stir, add the 27g Ni nanometer powder of purchase subsequently, beaker is put into ultrasonator
In, in the case of heating in water bath 70 DEG C, sonic oscillation 4h, obtain finely dispersed sensitive thin-film material
One；
B () prepares sensitive thin-film material two (02): the polyaniline taking 20mg molecule pure is dissolved in 50
In the chloroform soln of ml, then take 10mg multi-walled carbon nano-tubes and add in solution, stir
After, add 9g barium titanate nano powder, supersound process 1h, obtain finely dispersed sensitive thin film material
Material two；
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2And Ru
(dpp)3Cl2Add dissolved with in the 40ml tetrahydrofuran solution of PVC in the ratio of 1:3, close
Under envelope dark conditions, low temperature stirring 1h, i.e. obtain sensitive thin-film material three；
Step 4, prepares SAW sensor:
A the SAW device cleaned through step one is dried by () after, magnetron sputtering is utilized to combine template
Layer of metal Ni film is plated respectively in the sensitizing range of passage one, passage two, passage four, passage five,
Then utilize quantitative liquid shifter take sensitive thin-film material three be coated in passage one, passage two, passage four,
The sensitizing range of passage five, is as the criterion so that Ni film is completely covered；Profit is the most respectively at passage
One and the sensitizing range of passage two, passage four and passage five coat sensitive thin-film material one and sensitivity successively
Thin-film material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, make passage one, passage two, passage four and passage five
Surface, sensitizing range be respectively formed three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, corresponding each logical on lid
There is reserved air inlet directly over the sensitizing range in road, constitute SAW sensor.
Preferably, the test system of SAW gas sensor by test chamber and is tested circuit, is dynamically joined
Device of air and frequency counter composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations also
Control the flow of gas；Test circuit is used for applying alternating voltage in SAW device；Frequency counting
Device is used for being recorded in real time at the frequency change of sensor in object gas.Wherein, definition sensitivity is for passing
The variable quantity of sensor frequency and the ratio of original frequency；Response time is that sensor contacts with gas and starts
To the time used by 90% that sensor frequency variable quantity is peak change amount；Recovery time is sensor
Contact stopping to start to sensor frequency recovery value to obtain the time used by 90% with gas.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens distribution
System, is passed through N in test chamber2, air-out, by the time after the frequency stable of sensor.Start
CO it is passed through in test chamber2, after sensor frequency stable, close CO2, the most again it is passed through
N2, treat that sensor frequency is again stable.Use the method, test 500ppm, 2500ppm successively
CO2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 8min and 10min, and passage one and passage
The difference of two pairs of each readings is less than 7%；
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests successively
The NO of 50ppm, 250ppm2Response results, by passage four and passage five obtain frequency change
Amount is respectively 3.1KHz, 5.5KHz, response time and recovery time is respectively 5min and 2min,
And passage four and passage five are less than 7% to the difference of each reading.By test result it can be seen that
This Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and to every kind
Gas all uses the dual pathways to test, and the data reliability obtained is greatly improved.It it is 80 DEG C in operating temperature
Under, the undulating value of test result, ± 9%, shows preferable high temperature stability performance.
Embodiment 5
The application provide a kind of can the environment monitoring device of high credibility detected gas, supervise including environment
Survey device body and be installed on the monitoring CO within environment monitoring device2、NO2The SAW of gas concentration
Sensor；SAW sensor structural representation as shown in Figure 1, described SAW sensor has five-way
Road structure, wherein passage three is as reference channel, and passage one is sensitive with the sensitizing range coating of passage two
Thin-film material one (01), carries out CO2The detection of gas；Passage four is coated with the sensitizing range of passage five
Cover sensitive thin-film material two (02), carry out NO2The detection of gas；Described passage sensitive thin-film material
One, two it is three layers, between described sensitive thin film and SAW device, goes back magnetron sputtering layer of Ni film
(03), described Ni film thickness is 160nm；Fig. 2 shows the logical of the SAW sensor in Fig. 1
In road one or passage two region, Ni film and the sectional view of sensitive thin-film material coating order, wherein, complete
Whole order should be circulation three times, and Fig. 3 is passage four or the passage five of the SAW sensor in Fig. 1
Ni film and the sectional view of sensitive thin-film material coating order in region, wherein, complete order should be
Circulate three times.
Fig. 4 is according to the system of SAW sensor in the environment monitoring device shown in an exemplary embodiment
Preparation Method, comprises the following steps:
Step one, cleans SAW device: SAW device is sequentially placed into acetone, ethanol, deionization
In water, supersound process 20min respectively, remove SAW device surface contaminant, then device is put
Enter in baking oven and dry, and test its frequency of oscillation；
Step 2, reinforces SAW device: brush one layer of protective coating on the surface of SAW device,
Described protective coating mainly by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide with 1:3:5:1
Proportions form；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): take the polyetherimide material of the purchase of 68mg
Add in beaker, add the ultra-pure water of 20ml, stir, be subsequently adding the polythiophene of 30mg,
Stir, add the 27g Ni nanometer powder of purchase subsequently, beaker is put into ultrasonator
In, in the case of heating in water bath 70 DEG C, sonic oscillation 4h, obtain finely dispersed sensitive thin-film material
One；
B () prepares sensitive thin-film material two (02): the polyaniline taking 14mg molecule pure is dissolved in 50
In the chloroform soln of ml, then take 10mg multi-walled carbon nano-tubes and add in solution, stir
After, add 9g barium titanate nano powder, supersound process 1h, obtain finely dispersed sensitive thin film material
Material two；
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2And Ru
(dpp)3Cl2Add dissolved with in the 40ml tetrahydrofuran solution of PVC in the ratio of 1:2, close
Under envelope dark conditions, low temperature stirring 1h, i.e. obtain sensitive thin-film material three；
Step 4, prepares SAW sensor:
A the SAW device cleaned through step one is dried by () after, magnetron sputtering is utilized to combine template
Layer of metal Ni film is plated respectively in the sensitizing range of passage one, passage two, passage four, passage five,
Then utilize quantitative liquid shifter take sensitive thin-film material three be coated in passage one, passage two, passage four,
The sensitizing range of passage five, is as the criterion so that Ni film is completely covered；Profit is the most respectively at passage
One and the sensitizing range of passage two, passage four and passage five coat sensitive thin-film material one and sensitivity successively
Thin-film material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, make passage one, passage two, passage four and passage five
Surface, sensitizing range be respectively formed three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, corresponding each logical on lid
There is reserved air inlet directly over the sensitizing range in road, constitute SAW sensor.
Preferably, the test system of SAW gas sensor by test chamber and is tested circuit, is dynamically joined
Device of air and frequency counter composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations also
Control the flow of gas；Test circuit is used for applying alternating voltage in SAW device；Frequency counting
Device is used for being recorded in real time at the frequency change of sensor in object gas.Wherein, definition sensitivity is for passing
The variable quantity of sensor frequency and the ratio of original frequency；Response time is that sensor contacts with gas and starts
To the time used by 90% that sensor frequency variable quantity is peak change amount；Recovery time is sensor
Contact stopping to start to sensor frequency recovery value to obtain the time used by 90% with gas.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens distribution
System, is passed through N in test chamber2, air-out, by the time after the frequency stable of sensor.Start
CO it is passed through in test chamber2, after sensor frequency stable, close CO2, the most again it is passed through
N2, treat that sensor frequency is again stable.Use the method, test 500ppm, 2500ppm successively
CO2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 14min and 13min, and passage one is with logical
Road two is less than 7% to the difference of each reading；
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests successively
The NO of 50ppm, 250ppm2Response results, by passage four and passage five obtain frequency change
Amount is respectively 3.1KHz, 5.5KHz, response time and recovery time is respectively 5min and 2min,
And passage four and passage five are less than 7% to the difference of each reading.By test result it can be seen that
This Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and to every kind
Gas all uses the dual pathways to test, and the data reliability obtained is greatly improved.It it is 80 DEG C in operating temperature
Under, the undulating value of test result, ± 9%, shows preferable high temperature stability performance.
Those skilled in the art, after considering description and putting into practice invention disclosed herein, will readily occur to
Other embodiments of the present invention.The application is intended to any modification of the present invention, purposes or fits
Answering property changes, and these modification, purposes or adaptations are followed the general principle of the present invention and wrap
Include the undocumented common knowledge in the art of the application or conventional techniques means.Description and reality
Executing example and be considered only as exemplary, true scope and spirit of the invention are referred to by claim below
Go out.
It should be appreciated that the invention is not limited in essence described above and illustrated in the accompanying drawings
Really structure, and various modifications and changes can carried out without departing from the scope.The scope of the present invention is only
Limited by appended claim.
Claims (2)
1. can the environment monitoring device of high credibility detected gas, including environment monitoring device
Body and be installed on the monitoring CO within this environment monitoring device2、NO2The SAW of gas concentration passes
Sensor, described SAW sensor has Five-channel structure, and wherein passage three is as reference channel, logical
Road one and the sensitizing range coating sensitive thin-film material one of passage two, carry out CO2The detection of gas, logical
Road four and the sensitizing range coating sensitive thin-film material two of passage five, carry out NO2The detection of gas；Institute
State passage sensitive thin-film material one, two and be three layers, between described sensitive thin film and SAW device also
Magnetron sputtering layer of Ni film, described Ni film thickness is 120nm.
The most according to claim 1 a kind of can high credibility detected gas environmental monitoring dress
Put, it is characterised in that: the preparation method of described SAW sensor comprises the following steps:
Step one, cleans SAW device: SAW device is sequentially placed into acetone, ethanol, deionization
In water, supersound process 20min respectively, remove SAW device surface contaminant, then device is put
Enter in baking oven and dry, and test its frequency of oscillation；
Step 2, reinforces SAW device: brush one layer of protective coating on the surface of SAW device,
Described protective coating mainly by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide with 2:3:5:1
Proportions form；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one: the polyetherimide material of the purchase taking 85mg adds
In beaker, add the ultra-pure water of 20ml, stir, be subsequently adding the polythiophene of 30mg, stir
Mix uniformly, add the 27g Ni nanometer powder of purchase subsequently, beaker is put in ultrasonator,
In the case of heating in water bath 70 DEG C, sonic oscillation 4h, obtain finely dispersed sensitive thin-film material one；
B () prepares sensitive thin-film material two: the polyaniline taking 14mg molecule pure is dissolved in 50ml
Chloroform soln in, then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring,
Add 9g barium titanate nano powder, supersound process 1h, obtain finely dispersed sensitive thin-film material two；
C () prepares sensitive thin-film material three: by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2Add dissolved with in the 40ml tetrahydrofuran solution of PVC in the ratio of 1:2, sealing shading
Under the conditions of, low temperature stirring 1h, i.e. obtain sensitive thin-film material three；
Step 4, prepares SAW sensor:
A the SAW device cleaned through step one is dried by () after, magnetron sputtering is utilized to combine template
Layer of metal Ni film is plated respectively in the sensitizing range of passage one, passage two, passage four, passage five,
Then utilize quantitative liquid shifter take sensitive thin-film material three be coated in passage one, passage two, passage four,
The sensitizing range of passage five, is as the criterion so that Ni film is completely covered；Profit is the most respectively at passage
One and the sensitizing range of passage two, passage four and passage five coat sensitive thin-film material one and sensitivity successively
Thin-film material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, make passage one, passage two, passage four and passage
The surface, sensitizing range of five is respectively formed three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, corresponding each logical on lid
There is reserved air inlet directly over the sensitizing range in road, constitute SAW sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610409648.3A CN106018549A (en) | 2016-06-12 | 2016-06-12 | Environment monitoring device capable of detecting gas at high reliability |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610409648.3A CN106018549A (en) | 2016-06-12 | 2016-06-12 | Environment monitoring device capable of detecting gas at high reliability |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106018549A true CN106018549A (en) | 2016-10-12 |
Family
ID=57090406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610409648.3A Pending CN106018549A (en) | 2016-06-12 | 2016-06-12 | Environment monitoring device capable of detecting gas at high reliability |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106018549A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370793A (en) * | 2016-10-25 | 2017-02-01 | 中国工程物理研究院激光聚变研究中心 | Volatilizable organic pollutant detecting device |
| CN109164024A (en) * | 2018-08-27 | 2019-01-08 | 中节能天融科技有限公司 | A kind of Atmospheric particulates measuring device and method based on surface acoustic wave techniques |
| CN109187737A (en) * | 2018-08-03 | 2019-01-11 | 郑州智谷工业技术有限公司 | A kind of carbon monoxide transducer and its density calculating method based on SAW device |
| CN111579599A (en) * | 2019-12-17 | 2020-08-25 | 杭州超钜科技有限公司 | CO distributed in network2Online continuous detection system and detection method |
| CN114355433A (en) * | 2022-03-18 | 2022-04-15 | 中创智科(绵阳)科技有限公司 | Method for measuring response time of air tritium concentration rapid detector |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07294135A (en) * | 1994-04-25 | 1995-11-10 | Matsushita Electric Ind Co Ltd | Garbage treating apparatus |
| JPH09315509A (en) * | 1996-05-24 | 1997-12-09 | Matsushita Electric Works Ltd | Garbage disposer |
| CN103994939A (en) * | 2014-05-23 | 2014-08-20 | 天津理工大学 | Manufacturing method of all-printed electronic carbon dioxide thin-film SAW (Surface Acoustic Wave) sensor |
| CN105353016A (en) * | 2015-12-10 | 2016-02-24 | 河南工程学院 | Methane gas thin-layer medium electrochemical biosensor and preparing method thereof |
| CN205157200U (en) * | 2015-10-23 | 2016-04-13 | 河南柴油机重工有限责任公司 | Quick -witted monitoring devices of landfill gas body |
-
2016
- 2016-06-12 CN CN201610409648.3A patent/CN106018549A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07294135A (en) * | 1994-04-25 | 1995-11-10 | Matsushita Electric Ind Co Ltd | Garbage treating apparatus |
| JPH09315509A (en) * | 1996-05-24 | 1997-12-09 | Matsushita Electric Works Ltd | Garbage disposer |
| CN103994939A (en) * | 2014-05-23 | 2014-08-20 | 天津理工大学 | Manufacturing method of all-printed electronic carbon dioxide thin-film SAW (Surface Acoustic Wave) sensor |
| CN205157200U (en) * | 2015-10-23 | 2016-04-13 | 河南柴油机重工有限责任公司 | Quick -witted monitoring devices of landfill gas body |
| CN105353016A (en) * | 2015-12-10 | 2016-02-24 | 河南工程学院 | Methane gas thin-layer medium electrochemical biosensor and preparing method thereof |
Non-Patent Citations (4)
| Title |
|---|
| ANTONIO J. RICCO ，ET AL: "Multiple Frequency Surface Acoustic Wave Devices as Sensors", 《IEEE》 * |
| 周文: "声表面波二氧化氮气体传感器的研究", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
| 李淑红: "基于声表面波技术的新型气体传感器的研究", 《中国博士学位论文全文数据库 信息科技辑》 * |
| 高小康: "溶胶-凝胶固定Ru(bpy)2(dpp)Cl2的溶解氧传感器的研究", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370793A (en) * | 2016-10-25 | 2017-02-01 | 中国工程物理研究院激光聚变研究中心 | Volatilizable organic pollutant detecting device |
| CN109187737A (en) * | 2018-08-03 | 2019-01-11 | 郑州智谷工业技术有限公司 | A kind of carbon monoxide transducer and its density calculating method based on SAW device |
| CN109187737B (en) * | 2018-08-03 | 2023-09-01 | 山东鑫利达安防科技有限公司 | Carbon monoxide sensor based on SAW device and concentration calculation method thereof |
| CN109164024A (en) * | 2018-08-27 | 2019-01-08 | 中节能天融科技有限公司 | A kind of Atmospheric particulates measuring device and method based on surface acoustic wave techniques |
| CN109164024B (en) * | 2018-08-27 | 2021-03-19 | 中节能天融科技有限公司 | Atmospheric particulate measurement device and method based on surface acoustic wave technology |
| CN111579599A (en) * | 2019-12-17 | 2020-08-25 | 杭州超钜科技有限公司 | CO distributed in network2Online continuous detection system and detection method |
| CN111579599B (en) * | 2019-12-17 | 2023-03-14 | 杭州超钜科技有限公司 | CO distributed in network 2 Online continuous detection system and detection method |
| CN114355433A (en) * | 2022-03-18 | 2022-04-15 | 中创智科(绵阳)科技有限公司 | Method for measuring response time of air tritium concentration rapid detector |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106018549A (en) | Environment monitoring device capable of detecting gas at high reliability | |
| Penza et al. | Metalloporphyrins-modified carbon nanotubes networked films-based chemical sensors for enhanced gas sensitivity | |
| Kanan et al. | Semiconducting metal oxide based sensors for selective gas pollutant detection | |
| Tai et al. | Facile development of high performance QCM humidity sensor based on protonated polyethylenimine-graphene oxide nanocomposite thin film | |
| Bouvet et al. | Phthalocyanine-based hybrid materials for chemosensing | |
| Akhter et al. | Graphene oxide (GO) coated impedimetric gas sensor for selective detection of carbon dioxide (CO 2) with temperature and humidity compensation | |
| Hoyt et al. | SAW sensors for the room-temperature measurement of CO2 and relative humidity | |
| Nieuwenhuizen et al. | Surface acoustic wave gas sensor for nitrogen dioxide using phthalocyanines as chemical interfaces. Effects of nitric oxide, halogen gases, and prolonged heat treatment | |
| Ellern et al. | HKUST‐1 coated piezoresistive microcantilever array for volatile organic compound sensing | |
| Vanotti et al. | Influence of interfering gases on a carbon monoxide differential sensor based on SAW devices functionalized with cobalt and copper corroles | |
| Wang et al. | Nitric oxide sensing properties of a surface acoustic wave sensor with copper-ion-doped polyaniline/tungsten oxide nanocomposite film | |
| Deng et al. | Fabrication of a sensor array based on quartz crystal microbalance and the application in egg shelf life evaluation | |
| Wang et al. | The detection of formaldehyde using microelectromechanical acoustic resonator with multiwalled carbon nanotubes-polyethyleneimine composite coating | |
| CN101871904B (en) | Gas detecting device, gas detecting system and manufacturing method of gas detecting device | |
| Latino et al. | Chemoresistive metal oxide gas sensor: working principles and applications | |
| Shang et al. | A rapid detection of pesticide residue based on piezoelectric biosensor | |
| Liu et al. | Repeatability and sensitivity of quartz crystal microbalance (QCM) sensor array modified with four sensitive materials | |
| Ji et al. | Interference suppression strategies for trace minor component of semiconductor gas sensor based on temperature modulation mode | |
| CN106124616A (en) | A kind of novel microbial fertilizer detection device | |
| CN106053728A (en) | Anti-thunder power distribution cabinet based on gas detection function | |
| CN105866244A (en) | Sewage filtering treatment device based on gas detection function | |
| CN105866245A (en) | High-speed fermentation organic garbage disposal unit based on two-channel gas detection | |
| Serban et al. | Selection of gas sensing materials using the Hard Soft Acid Base theory; application to Surface Acoustic Wave CO 2 detection | |
| CN106124617A (en) | A kind of based on high reliability NO2the server cabinet of detection | |
| CN105823824A (en) | Organic garbage treatment machine based on gas self-detection function |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161012 |
|
| RJ01 | Rejection of invention patent application after publication |