CN106053728A - Anti-thunder power distribution cabinet based on gas detection function - Google Patents
Anti-thunder power distribution cabinet based on gas detection function Download PDFInfo
- Publication number
- CN106053728A CN106053728A CN201610408786.XA CN201610408786A CN106053728A CN 106053728 A CN106053728 A CN 106053728A CN 201610408786 A CN201610408786 A CN 201610408786A CN 106053728 A CN106053728 A CN 106053728A
- Authority
- CN
- China
- Prior art keywords
- passage
- sensitive thin
- gas
- film material
- saw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009826 distribution Methods 0.000 title claims abstract description 50
- 238000001514 detection method Methods 0.000 title claims abstract description 34
- 239000000463 material Substances 0.000 claims abstract description 134
- 239000010409 thin film Substances 0.000 claims abstract description 119
- 238000012360 testing method Methods 0.000 claims abstract description 71
- 238000012544 monitoring process Methods 0.000 claims abstract description 8
- 230000001235 sensitizing effect Effects 0.000 claims description 51
- 239000010408 film Substances 0.000 claims description 49
- 238000000034 method Methods 0.000 claims description 29
- 238000003756 stirring Methods 0.000 claims description 28
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 18
- 230000008569 process Effects 0.000 claims description 17
- 239000011248 coating agent Substances 0.000 claims description 15
- 238000000576 coating method Methods 0.000 claims description 15
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 14
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 claims description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 14
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 claims description 14
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 14
- 230000010355 oscillation Effects 0.000 claims description 14
- 239000011253 protective coating Substances 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 12
- 238000007789 sealing Methods 0.000 claims description 12
- 239000004697 Polyetherimide Substances 0.000 claims description 10
- 229920001601 polyetherimide Polymers 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 229920000767 polyaniline Polymers 0.000 claims description 9
- 229920000123 polythiophene Polymers 0.000 claims description 9
- WNKMTAQXMLAYHX-UHFFFAOYSA-N barium(2+);dioxido(oxo)titanium Chemical compound [Ba+2].[O-][Ti]([O-])=O WNKMTAQXMLAYHX-UHFFFAOYSA-N 0.000 claims description 8
- 239000002048 multi walled nanotube Substances 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 7
- GTUNMKRGRHOANR-UHFFFAOYSA-N [B].[Ca] Chemical compound [B].[Ca] GTUNMKRGRHOANR-UHFFFAOYSA-N 0.000 claims description 7
- 230000001680 brushing effect Effects 0.000 claims description 7
- 239000000356 contaminant Substances 0.000 claims description 7
- 239000008367 deionised water Substances 0.000 claims description 7
- 229910021641 deionized water Inorganic materials 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 7
- FUJCRWPEOMXPAD-UHFFFAOYSA-N lithium oxide Chemical group [Li+].[Li+].[O-2] FUJCRWPEOMXPAD-UHFFFAOYSA-N 0.000 claims description 7
- 238000002360 preparation method Methods 0.000 claims description 7
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 claims description 7
- 238000001291 vacuum drying Methods 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052799 carbon Inorganic materials 0.000 claims description 2
- 229910003978 SiClx Inorganic materials 0.000 claims 1
- 239000012467 final product Substances 0.000 claims 1
- 238000010422 painting Methods 0.000 claims 1
- 239000000843 powder Substances 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 21
- 238000010897 surface acoustic wave method Methods 0.000 description 132
- 239000007789 gas Substances 0.000 description 114
- 229910002092 carbon dioxide Inorganic materials 0.000 description 40
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 34
- JCXJVPUVTGWSNB-UHFFFAOYSA-N Nitrogen dioxide Chemical compound O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 30
- 230000004044 response Effects 0.000 description 21
- 238000011084 recovery Methods 0.000 description 20
- 230000008859 change Effects 0.000 description 17
- 239000012528 membrane Substances 0.000 description 12
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 7
- 239000001569 carbon dioxide Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 229910001947 lithium oxide Inorganic materials 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 229910010271 silicon carbide Inorganic materials 0.000 description 6
- 229910021642 ultra pure water Inorganic materials 0.000 description 6
- 239000012498 ultrapure water Substances 0.000 description 6
- 241000209094 Oryza Species 0.000 description 5
- 235000007164 Oryza sativa Nutrition 0.000 description 5
- 235000013312 flour Nutrition 0.000 description 5
- 238000007689 inspection Methods 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 235000009566 rice Nutrition 0.000 description 5
- 238000012956 testing procedure Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000011858 nanopowder Substances 0.000 description 3
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000003916 acid precipitation Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- 230000002146 bilateral effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 241000790917 Dioxys <bee> Species 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001548 drop coating Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000012851 eutrophication Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000000855 fermentation Methods 0.000 description 1
- 230000004151 fermentation Effects 0.000 description 1
- 239000002803 fossil fuel Substances 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000009965 odorless effect Effects 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000002352 surface water Substances 0.000 description 1
- 239000003053 toxin Substances 0.000 description 1
- 231100000765 toxin Toxicity 0.000 description 1
- 108700012359 toxins Proteins 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/004—CO or CO2
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0037—NOx
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02B—BOARDS, SUBSTATIONS OR SWITCHING ARRANGEMENTS FOR THE SUPPLY OR DISTRIBUTION OF ELECTRIC POWER
- H02B1/00—Frameworks, boards, panels, desks, casings; Details of substations or switching arrangements
- H02B1/26—Casings; Parts thereof or accessories therefor
- H02B1/30—Cabinet-type casings; Parts thereof or accessories therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Combustion & Propulsion (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Power Engineering (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The invention relates to an anti-thunder power distribution cabinet based on a gas detection function. The anti-thunder power distribution cabinet comprises an anti-thunder power distribution cabinet body and an SAW sensor installed outside the anti-thunder power distribution cabinet and used for monitoring gas concentration of CO2 and NO2. The SAW sensor is based on an SAW device and is provided with a five-channel structure, wherein the third channel serves as a reference channel; sensitive areas of both the first channel and the second channel are coated with first sensitive thin-film materials, so as to detect CO2 gas; and sensitive areas of both the fourth channel and the fifth channel are coated with second sensitive thin-film materials, so as to detect NO2 gas. Double channels are adopted to simultaneously detect each gas, the gas detection stability is greatly improved, data reading credibility of the sensor is guaranteed, and the power distribution cabinet is high in gas detection sensitivity and good in repeatability and testing stability under high temperature.
Description
Technical field
The application relates to power distribution cabinet field, particularly relates to a kind of lightning protection power distribution cabinet based on gas detection function.
Background technology
Power distribution cabinet is the final stage device of distribution system, is used primarily in power system, in order to place power-equipment, luminaire
Deng.Lightning protection power distribution cabinet refers in particular to the power distribution cabinet possessing anti-lightning strike function, is the one of power distribution cabinet.
But, along with the complication of use environment, lightning protection power distribution cabinet applied environment becomes more diversified, and such as surrounding enviroment exist
The gas such as hazardous gas, CO2, NO2, and all personal safety can be impacted during these gas concentration excess, severe patient crisis
Life, existing lightning protection power distribution cabinet function is more single, it is impossible to meet bigger demand.
Summary of the invention
For overcoming problem present in correlation technique, the application provides a kind of lightning protection distribution based on gas detection function
Cabinet, including lightning protection power distribution cabinet body and be installed on the monitoring CO outside lightning protection power distribution cabinet2、NO2The SAW sensor of gas concentration, institute
Stating SAW sensor and have Five-channel structure, wherein passage three coats with the sensitizing range of passage two as reference channel, passage one
Sensitive thin-film material one, carries out CO2The detection of gas, passage four coats sensitive thin-film material two with the sensitizing range of passage five,
Carry out NO2The detection of gas;Described passage sensitive thin-film material one, two is three layers, between described sensitive thin film and SAW device
Also magnetron sputtering layer of Ni film, described Ni film thickness is 200nm.
Preferably, in described lightning protection power distribution cabinet, the preparation method of SAW sensor comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation;
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 2:3:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide;
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one: the polyetherimide material of the purchase taking 85mg adds in beaker, adds 20ml
Ultra-pure water, stir, be subsequently adding the polythiophene of 30mg, stir, add the 27g Ni nano powder of purchase subsequently
End, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed sensitivity thin
Membrane material one;
B () prepares sensitive thin-film material two: take the pure polyaniline of 14mg molecule and be dissolved in the chloroform soln of 50ml,
Then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, addition 9g barium titanate nano powder, supersound process 1h,
Obtain finely dispersed sensitive thin-film material two;
C () prepares sensitive thin-film material three: by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2In the ratio of 1:2
Add dissolved with in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, low temperature stirring 1h, i.e. obtain sensitive thin film material
Material three;
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered;Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two;
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ();
C () circulation (a), (b) operate twice, the surface, sensitizing range making passage one, passage two, passage four and passage five is equal
Form three layers of Ni film and six layers of sensitive thin film;
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
The technical scheme that embodiments herein provides can include following beneficial effect:
1. configuration aspects, uses Five-channel SAW device, and wherein passage three is as reference channel, passage one and passage two
Sensitizing range coating sensitive thin-film material one, carries out CO2The detection of gas, passage four is sensitive with the sensitizing range coating of passage five
Thin-film material two, carries out NO2The detection of gas;All use the dual pathways to detect every kind of gas simultaneously, considerably increase gas
The stability of detection, it is ensured that the credibility of sensor readings;
2. sensitive thin-film material one is made up of Polyetherimide (PEI) material, polythiophene material and Ni nano-powder material,
The particle diameter of the nanoscale of Ni nano-powder material ensure that the dispersibility of Organic substance PEI and polythiophene, substantially increases sensitivity
Material is to CO2Sensitivity;
3. sensitive thin-film material two is made up of polyaniline material, multi-wall carbon nano-tube tube material and barium-titanate material, wherein, poly-
Aniline major part is compounded in carbon nano tube surface, due to hollow structure and the great specific surface area of CNT, ties from physics
Structure aspect considerably increases polyaniline to NO2The absorbability of gas;
4, the sensitive thin-film material three of the application is by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2Composition, enters one
Step enhances fermentation tank to CO2Sensing capability.
Aspect and advantage that the application adds will part be given in the following description, and part will become from the following description
Obtain substantially, or recognized by the practice of the application.It should be appreciated that above general description and details hereinafter only describe
It is exemplary and explanatory, the application can not be limited.
Accompanying drawing explanation
Accompanying drawing herein is merged in description and constitutes the part of this specification, it is shown that meet the enforcement of the present invention
Example, and for explaining the principle of the present invention together with description.
Fig. 1 is the outside SAW sensor structural representation installed of lightning protection power distribution cabinet of the present invention.
Fig. 2 is Ni film and sensitive thin-film material coating order in the passage one of the SAW sensor in Fig. 1 or passage two region
Sectional view, wherein, complete order should be circulation three times.
Fig. 3 is Ni film and sensitive thin-film material coating order in the passage four of the SAW sensor in Fig. 1 or passage five region
Sectional view, wherein, complete order should be circulation three times.
Fig. 4 is according to the method flow diagram making sensor Five-channel structure shown in embodiment.
Wherein: 01-sensitive thin-film material one, 02-sensitive thin-film material two, 03-Ni film, 04-sensitive thin-film material three.
Detailed description of the invention
Here will illustrate exemplary embodiment in detail, its example represents in the accompanying drawings.Explained below relates to
During accompanying drawing, unless otherwise indicated, the same numbers in different accompanying drawings represents same or analogous key element.Following exemplary embodiment
Described in embodiment do not represent all embodiments consistent with the present invention.On the contrary, they are only with the most appended
The example of the apparatus and method that some aspects that described in detail in claims, the present invention are consistent.
Following disclosure provides many different embodiments or example for realizing the different structure of the application.For letter
Changing disclosure herein, hereinafter parts and setting to specific examples are described.Certainly, they are the most merely illustrative, and
It is not intended to limit the application.Additionally, the application can in different examples repeat reference numerals and/or letter.This heavy
It is for purposes of simplicity and clarity again, itself is more than the relation between various embodiment being discussed and/or arranging.This
Outward, the various specific technique that this application provides and the example of material, but those of ordinary skill in the art it can be appreciated that
The applicability of other techniques and/or the use of other materials.It addition, fisrt feature described below Second Eigenvalue " on "
Structure can include that the first and second features are formed as the embodiment directly contacted, it is also possible to include that other feature is formed at
Embodiment between first and second features, such first and second features are not likely to be directly contact.
In the description of the present application, it should be noted that unless otherwise prescribed and limit, term " is installed ", " being connected ",
" connect " and should be interpreted broadly, for example, it may be mechanically connected or electrical connection, it is also possible to be the connection of two element internals, can
Being to be joined directly together, it is also possible to be indirectly connected to by intermediary, for the ordinary skill in the art, can basis
Concrete condition understands the concrete meaning of above-mentioned term.
Along with the continuous progress of social production life, mankind's combustion of fossil fuels gets more and more, causes carbon dioxide, dioxy
The discharge changing nitrogen etc. alreadys more than the scope that environment can bear, and owing to carbon dioxide can produce greenhouse effect, nitrogen dioxide is
Form one of principal element of acid rain and photochemical pollution, badly influence the productive life of the mankind, it is therefore necessary to right
Carbon dioxide, the discharge of nitrogen dioxide are monitored.
Carbon dioxide, is inorganic compound common in a kind of air, and molecular formula is CO2, between oxygen atom and carbon atom
Being that covalent bond combines, form nonpolar linear structure, stable chemical nature, under room temperature, carbon dioxide is colorless and odorless
, water soluble, and generate carbonic acid with water.Owing to carbon dioxide has insulation effect, it discharges in a large number and result in temperature of the earth
Rising day by day, there is data to suggest that, since the nearly century, Global Temperature increases 0.6 degree Celsius, and if things go on like this, it is to sea
The rising of plane and the impact of environment will be continuously increased.
Nitrogen dioxide is the gaseous material of a kind of brownish red, high activity.Nitrogen dioxide rises in the forming process of ozone
Important function.The artificial nitrogen dioxide produced is essentially from the release of high-temp combustion process, and such as motor-vehicle tail-gas, boiler are useless
The discharge etc. of gas.One of nitrogen dioxide or the origin cause of formation of acid rain, the environmental effect brought is varied, such as to wetland and land
Compete between raw plant species and the impact forming change, the reduction of atmospheric visibility, the acidifying of surface water, eutrophication and
Increase and water body is harmful to Fish and other hydrobiological content of toxins.
Gas sensor, is a kind of change that can experience ambient atmos concentration, kind etc., and by this change transitions is
Measurable signal (the such as signal such as voltage, electric current), thus realize the device of the detection to object gas.General gas flow senses
Device includes the parts such as gas sensitive, circuit for signal conditioning, delicate substrates and accessory power supply.According to sensitivity principle to gas sensor
Classification, can be divided into semiconductor-type gas sensor, electrochemical gas sensor, infrared gas sensor, high score minor gas
Sensor etc..
Wherein, sensitive thin film gas sensor is the emphasis of research now, it is generally the case that utilize drop coating, spin coating, evaporation plating
The methods such as film, prepare sensitive thin film on the devices such as QCM (QCM), surface acoustic wave (SAW), owing to gas is inhaled
It is attached on sensitive thin film, causes the qualitative change of sensitive thin film, and then cause the output signal of telecommunication of sensor to produce change, thus
Detected type and the kind of object gas.
The principle of SAW sensor is sensor owing to piezoelectric effect can send acoustic signals, and this signal is tested owing to being in
Surveying in gas, its frequency, sound wave, amplitude etc. can change, thus reach the purpose of detected gas.Surface acoustic wave excite and
Detection is realized by interdigital transducer, and interdigital transducer (IDT) is two, shape picture of formation on piezoelectric substrate surface
The metal pattern of the finger cross-like of hands, its effect is to realize sound-electric transducing.
For in productive life for carbon dioxide, nitrogen dioxide gas detection importance, and existing sensor
Not enough (such as sensitivity is relatively low, response time length, specific aim are the highest), this programme, based on SAW device, is prepared for Five-channel CO2
And NO2Gas sensor.
The processing technology of SAW device is more ripe, and this programme uses Five-channel structure SAW that mid frequency is 525MHz
Delay line type device, choice of the substrates is quartz material, and the electrode of interdigital transducer is Cr metal.Each passage is interdigital by a pair
Transducer forms, and respectively as input and output transducer, in input transducer, the signal of telecommunication of input produces alternating electric field, due to
Piezoelectric effect excites elastic vibration in substrate, produces surface acoustic wave, and output transducer receives surface acoustic wave signal and is converted to
The signal of telecommunication, detects the signal of telecommunication.
Passage one, passage two are used as CO2The Measurement channel of gas, passage three is used as reference channel, passage four,
Passage five is used as NO2The Measurement channel of gas.When gaseous environment changes, then reference channel and the frequency of other passage
Rate drift is the same, can eliminate, by the difference frequency between agitator, the interference that environmental change causes.
Embodiment 1
The application provides a kind of lightning protection power distribution cabinet based on gas detection function, including lightning protection power distribution cabinet body and being installed on
Monitoring CO outside lightning protection power distribution cabinet2、NO2The SAW sensor of gas concentration;SAW sensor structural representation as shown in Figure 1, institute
Stating SAW sensor and have Five-channel structure, wherein passage three coats with the sensitizing range of passage two as reference channel, passage one
Sensitive thin-film material one (01), carries out CO2The detection of gas;Passage four coats sensitive thin-film material with the sensitizing range of passage five
Two (02), carry out NO2The detection of gas;Described passage sensitive thin-film material one, two is three layers, described sensitive thin film and SAW
Going back magnetron sputtering layer of Ni film (03) between device, described Ni film thickness is 200nm;Fig. 2 shows the SAW sensor in Fig. 1
Passage one or passage two region in Ni film and sensitive thin-film material coating order sectional view, wherein, complete order should be
Circulating three times, Fig. 3 is that in the passage four of the SAW sensor in Fig. 1 or passage five region, Ni film and sensitive thin-film material coating are suitable
The sectional view of sequence, wherein, complete order should be circulation three times.
Fig. 4 is the preparation method according to the SAW sensor shown in an exemplary embodiment, comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation;
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 2:3:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide;
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): the polyetherimide material of the purchase taking 85mg adds in beaker, adds
The ultra-pure water of 20ml, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and the 27g Ni adding purchase subsequently receives
Rice flour end, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed quick
Sense thin-film material one;
B () prepares sensitive thin-film material two (02): taking the pure polyaniline of 14mg molecule, to be dissolved in the chloroform of 50ml molten
In liquid, then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, ultrasonic place
Reason 1h, obtains finely dispersed sensitive thin-film material two;
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2By 1:2's
Ratio adds dissolved with in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, and low temperature stirring 1h, i.e. obtain sensitive thin
Membrane material three;
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered;Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two;
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ();
C () circulation (a), (b) operate twice, the surface, sensitizing range making passage one, passage two, passage four and passage five is equal
Form three layers of Ni film and six layers of sensitive thin film;
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
Preferably, the test system of SAW gas sensor is by test chamber and test circuit, dynamic air-distributing device and cymometer
Number device composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations and controlling the flow of gas;Test circuit is used for
SAW device applies alternating voltage;Frequency counter is used for being recorded in real time at the frequency change of sensor in object gas.Its
In, definition sensitivity is the variable quantity ratio with original frequency of sensor frequency;Response time is that sensor contacts with gas
Start to the time used by 90% that sensor frequency variable quantity is peak change amount;Recovery time is that sensor contacts with gas
Stop starting to sensor frequency recovery value to obtain the time used by 90%.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens air distribution system, to test
Chamber is passed through N2, air-out, by the time after the frequency stable of sensor.Start in test chamber, be passed through CO2, treat sensor frequency
After rate is stable, close CO2, the most again it is passed through N2, treat that sensor frequency is again stable.Use the method, test successively
The CO of 500ppm, 2500ppm2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 6min and 3min, and passage one and the passage two difference to each reading
Less than 4%;
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests the NO of 50ppm, 250ppm successively2
Response results, obtain frequency variation by passage four and passage five and be respectively 3.1KHz, 5.5KHz, response time and recovery
Time is respectively 5min and 12min, and passage four and passage five are less than 7% to the difference of each reading.Pass through test result
It can be seen that this Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and all uses every kind of gas double
Lane testing, the data reliability obtained is greatly improved.At operating temperature is 80 DEG C, the undulating value of test result ± 5%,
Show preferable high temperature stability performance.
Test specification, lightning protection power distribution cabinet of the present invention is provided with SAW sensor, it is possible to realize the highly sensitive inspection to object gas
Survey, and high temperatures is good.
About the device in above-described embodiment, wherein modules performs the concrete mode of operation in relevant the method
Embodiment in be described in detail, explanation will be not set forth in detail herein.
Embodiment 2
The application provides a kind of lightning protection power distribution cabinet based on gas detection function, including lightning protection power distribution cabinet body and being installed on
Monitoring CO outside lightning protection power distribution cabinet2、NO2The SAW sensor of gas concentration;SAW sensor structural representation as shown in Figure 1, institute
Stating SAW sensor and have Five-channel structure, wherein passage three coats with the sensitizing range of passage two as reference channel, passage one
Sensitive thin-film material one (01), carries out CO2The detection of gas;Passage four coats sensitive thin-film material with the sensitizing range of passage five
Two (02), carry out NO2The detection of gas;Described passage sensitive thin-film material one, two is three layers, described sensitive thin film and SAW
Going back magnetron sputtering layer of Ni film (03) between device, described Ni film thickness is 210nm;Fig. 2 shows the SAW sensor in Fig. 1
Passage one or passage two region in Ni film and sensitive thin-film material coating order sectional view, wherein, complete order should be
Circulating three times, Fig. 3 is that in the passage four of the SAW sensor in Fig. 1 or passage five region, Ni film and sensitive thin-film material coating are suitable
The sectional view of sequence, wherein, complete order should be circulation three times.
Fig. 4 is the preparation method according to the SAW sensor shown in an exemplary embodiment, comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation;
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 2:3:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide;
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): the polyetherimide material of the purchase taking 85mg adds in beaker, adds
The ultra-pure water of 20ml, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and the 27g Ni adding purchase subsequently receives
Rice flour end, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed quick
Sense thin-film material one;
B () prepares sensitive thin-film material two (02): taking the pure polyaniline of 13mg molecule, to be dissolved in the chloroform of 50ml molten
In liquid, then take 15mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, ultrasonic place
Reason 1h, obtains finely dispersed sensitive thin-film material two;
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2By 1:2's
Ratio adds dissolved with in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, and low temperature stirring 1h, i.e. obtain sensitive thin
Membrane material three;
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered;Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two;
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ();
C () circulation (a), (b) operate twice, the surface, sensitizing range making passage one, passage two, passage four and passage five is equal
Form three layers of Ni film and six layers of sensitive thin film;
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
Preferably, the test system of SAW gas sensor is by test chamber and test circuit, dynamic air-distributing device and cymometer
Number device composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations and controlling the flow of gas;Test circuit is used for
SAW device applies alternating voltage;Frequency counter is used for being recorded in real time at the frequency change of sensor in object gas.Its
In, definition sensitivity is the variable quantity ratio with original frequency of sensor frequency;Response time is that sensor contacts with gas
Start to the time used by 90% that sensor frequency variable quantity is peak change amount;Recovery time is that sensor contacts with gas
Stop starting to sensor frequency recovery value to obtain the time used by 90%.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens air distribution system, to test
Chamber is passed through N2, air-out, by the time after the frequency stable of sensor.Start in test chamber, be passed through CO2, treat sensor frequency
After rate is stable, close CO2, the most again it is passed through N2, treat that sensor frequency is again stable.Use the method, test successively
The CO of 500ppm, 2500ppm2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 8min and 4min, and passage one and the passage two difference to each reading
Less than 4%;
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests the NO of 50ppm, 250ppm successively2
Response results, obtain frequency variation by passage four and passage five and be respectively 3.1KHz, 5.5KHz, response time and recovery
Time is respectively 5min and 2min, and passage four and passage five are less than 7% to the difference of each reading.Can by test result
To find out, this Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and every kind of gas is all used bilateral
Road is tested, and the data reliability obtained is greatly improved.At operating temperature is 80 DEG C, the undulating value of test result ± 6%, table
Now preferable high temperature stability performance.
Test specification, lightning protection power distribution cabinet of the present invention is provided with SAW sensor, it is possible to realize the highly sensitive inspection to object gas
Survey, and high temperatures is good.
Embodiment 3
The application provides a kind of lightning protection power distribution cabinet based on gas detection function, including lightning protection power distribution cabinet body and being installed on
Monitoring CO outside lightning protection power distribution cabinet2、NO2The SAW sensor of gas concentration;SAW sensor structural representation as shown in Figure 1, institute
Stating SAW sensor and have Five-channel structure, wherein passage three coats with the sensitizing range of passage two as reference channel, passage one
Sensitive thin-film material one (01), carries out CO2The detection of gas;Passage four coats sensitive thin-film material with the sensitizing range of passage five
Two (02), carry out NO2The detection of gas;Described passage sensitive thin-film material one, two is three layers, described sensitive thin film and SAW
Going back magnetron sputtering layer of Ni film (03) between device, described Ni film thickness is 220nm;Fig. 2 shows the SAW sensor in Fig. 1
Passage one or passage two region in Ni film and sensitive thin-film material coating order sectional view, wherein, complete order should be
Circulating three times, Fig. 3 is that in the passage four of the SAW sensor in Fig. 1 or passage five region, Ni film and sensitive thin-film material coating are suitable
The sectional view of sequence, wherein, complete order should be circulation three times.
Fig. 4 is the preparation method according to the SAW sensor shown in an exemplary embodiment, comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation;
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 2:2:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide;
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): the polyetherimide material of the purchase taking 85mg adds in beaker, adds
The ultra-pure water of 20ml, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and the 27g Ni adding purchase subsequently receives
Rice flour end, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed quick
Sense thin-film material one;
B () prepares sensitive thin-film material two (02): taking the pure polyaniline of 13mg molecule, to be dissolved in the chloroform of 50ml molten
In liquid, then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, ultrasonic place
Reason 1h, obtains finely dispersed sensitive thin-film material two;
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2By 1:2's
Ratio adds dissolved with in the 60ml tetrahydrofuran solution of PVC, under sealing dark conditions, and low temperature stirring 1h, i.e. obtain sensitive thin
Membrane material three;
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered;Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two;
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ();
C () circulation (a), (b) operate twice, the surface, sensitizing range making passage one, passage two, passage four and passage five is equal
Form three layers of Ni film and six layers of sensitive thin film;
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
Preferably, the test system of SAW gas sensor is by test chamber and test circuit, dynamic air-distributing device and cymometer
Number device composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations and controlling the flow of gas;Test circuit is used for
SAW device applies alternating voltage;Frequency counter is used for being recorded in real time at the frequency change of sensor in object gas.Its
In, definition sensitivity is the variable quantity ratio with original frequency of sensor frequency;Response time is that sensor contacts with gas
Start to the time used by 90% that sensor frequency variable quantity is peak change amount;Recovery time is that sensor contacts with gas
Stop starting to sensor frequency recovery value to obtain the time used by 90%.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens air distribution system, to test
Chamber is passed through N2, air-out, by the time after the frequency stable of sensor.Start in test chamber, be passed through CO2, treat sensor frequency
After rate is stable, close CO2, the most again it is passed through N2, treat that sensor frequency is again stable.Use the method, test successively
The CO of 500ppm, 2500ppm2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 6min and 13min, and passage one and the passage two difference to each reading
Less than 4%;
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests the NO of 50ppm, 250ppm successively2
Response results, obtain frequency variation by passage four and passage five and be respectively 3.1KHz, 5.5KHz, response time and recovery
Time is respectively 15min and 18min, and passage four and passage five are less than 7% to the difference of each reading.Pass through test result
It can be seen that this Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and all uses every kind of gas double
Lane testing, the data reliability obtained is greatly improved.At operating temperature is 80 DEG C, the undulating value of test result ± 5%,
Show preferable high temperature stability performance.
Test specification, lightning protection power distribution cabinet of the present invention is provided with SAW sensor, it is possible to realize the highly sensitive inspection to object gas
Survey, and high temperatures is good.
Embodiment 4
The application provides a kind of lightning protection power distribution cabinet based on gas detection function, including lightning protection power distribution cabinet body and being installed on
Monitoring CO outside lightning protection power distribution cabinet2、NO2The SAW sensor of gas concentration;SAW sensor structural representation as shown in Figure 1, institute
Stating SAW sensor and have Five-channel structure, wherein passage three coats with the sensitizing range of passage two as reference channel, passage one
Sensitive thin-film material one (01), carries out CO2The detection of gas;Passage four coats sensitive thin-film material with the sensitizing range of passage five
Two (02), carry out NO2The detection of gas;Described passage sensitive thin-film material one, two is three layers, described sensitive thin film and SAW
Going back magnetron sputtering layer of Ni film (03) between device, described Ni film thickness is 230nm;Fig. 2 shows the SAW sensor in Fig. 1
Passage one or passage two region in Ni film and sensitive thin-film material coating order sectional view, wherein, complete order should be
Circulating three times, Fig. 3 is that in the passage four of the SAW sensor in Fig. 1 or passage five region, Ni film and sensitive thin-film material coating are suitable
The sectional view of sequence, wherein, complete order should be circulation three times.
Fig. 4 is the preparation method according to the SAW sensor shown in an exemplary embodiment, comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation;
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 2:8:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide;
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): the polyetherimide material of the purchase taking 85mg adds in beaker, adds
The ultra-pure water of 20ml, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and the 27g Ni adding purchase subsequently receives
Rice flour end, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed quick
Sense thin-film material one;
B () prepares sensitive thin-film material two (02): taking the pure polyaniline of 14mg molecule, to be dissolved in the chloroform of 50ml molten
In liquid, then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, ultrasonic place
Reason 1h, obtains finely dispersed sensitive thin-film material two;
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2By 1:2's
Ratio adds dissolved with in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, and low temperature stirring 1h, i.e. obtain sensitive thin
Membrane material three;
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered;Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two;
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ();
C () circulation (a), (b) operate twice, the surface, sensitizing range making passage one, passage two, passage four and passage five is equal
Form three layers of Ni film and six layers of sensitive thin film;
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
Preferably, the test system of SAW gas sensor is by test chamber and test circuit, dynamic air-distributing device and cymometer
Number device composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations and controlling the flow of gas;Test circuit is used for
SAW device applies alternating voltage;Frequency counter is used for being recorded in real time at the frequency change of sensor in object gas.Its
In, definition sensitivity is the variable quantity ratio with original frequency of sensor frequency;Response time is that sensor contacts with gas
Start to the time used by 90% that sensor frequency variable quantity is peak change amount;Recovery time is that sensor contacts with gas
Stop starting to sensor frequency recovery value to obtain the time used by 90%.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens air distribution system, to test
Chamber is passed through N2, air-out, by the time after the frequency stable of sensor.Start in test chamber, be passed through CO2, treat sensor frequency
After rate is stable, close CO2, the most again it is passed through N2, treat that sensor frequency is again stable.Use the method, test successively
The CO of 500ppm, 2500ppm2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 6min and 9min, and passage one and the passage two difference to each reading
Less than 7%;
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests the NO of 50ppm, 250ppm successively2
Response results, obtain frequency variation by passage four and passage five and be respectively 3.1KHz, 5.5KHz, response time and recovery
Time is respectively 5min and 2min, and passage four and passage five are less than 7% to the difference of each reading.Can by test result
To find out, this Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and every kind of gas is all used bilateral
Road is tested, and the data reliability obtained is greatly improved.At operating temperature is 80 DEG C, the undulating value of test result ± 10%,
Show preferable high temperature stability performance.
Test specification, lightning protection power distribution cabinet of the present invention is provided with SAW sensor, it is possible to realize the highly sensitive inspection to object gas
Survey, and high temperatures is good.
Embodiment 5
The application provides a kind of lightning protection power distribution cabinet based on gas detection function, including lightning protection power distribution cabinet body and being installed on
Monitoring CO outside lightning protection power distribution cabinet2、NO2The SAW sensor of gas concentration;SAW sensor structural representation as shown in Figure 1, institute
Stating SAW sensor and have Five-channel structure, wherein passage three coats with the sensitizing range of passage two as reference channel, passage one
Sensitive thin-film material one (01), carries out CO2The detection of gas;Passage four coats sensitive thin-film material with the sensitizing range of passage five
Two (02), carry out NO2The detection of gas;Described passage sensitive thin-film material one, two is three layers, described sensitive thin film and SAW
Going back magnetron sputtering layer of Ni film (03) between device, described Ni film thickness is 240nm;Fig. 2 shows the SAW sensor in Fig. 1
Passage one or passage two region in Ni film and sensitive thin-film material coating order sectional view, wherein, complete order should be
Circulating three times, Fig. 3 is that in the passage four of the SAW sensor in Fig. 1 or passage five region, Ni film and sensitive thin-film material coating are suitable
The sectional view of sequence, wherein, complete order should be circulation three times.
Fig. 4 is the preparation method according to the SAW sensor shown in an exemplary embodiment, comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation;
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 2:3:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide;
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): the polyetherimide material of the purchase taking 66mg adds in beaker, adds
The ultra-pure water of 20ml, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and the 27g Ni adding purchase subsequently receives
Rice flour end, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed quick
Sense thin-film material one;
B () prepares sensitive thin-film material two (02): taking the pure polyaniline of 14mg molecule, to be dissolved in the chloroform of 50ml molten
In liquid, then take 14mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, ultrasonic place
Reason 1h, obtains finely dispersed sensitive thin-film material two;
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2By 1:2's
Ratio adds dissolved with in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, and low temperature stirring 1h, i.e. obtain sensitive thin
Membrane material three;
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered;Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two;
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ();
C () circulation (a), (b) operate twice, the surface, sensitizing range making passage one, passage two, passage four and passage five is equal
Form three layers of Ni film and six layers of sensitive thin film;
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
Preferably, the test system of SAW gas sensor is by test chamber and test circuit, dynamic air-distributing device and cymometer
Number device composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations and controlling the flow of gas;Test circuit is used for
SAW device applies alternating voltage;Frequency counter is used for being recorded in real time at the frequency change of sensor in object gas.Its
In, definition sensitivity is the variable quantity ratio with original frequency of sensor frequency;Response time is that sensor contacts with gas
Start to the time used by 90% that sensor frequency variable quantity is peak change amount;Recovery time is that sensor contacts with gas
Stop starting to sensor frequency recovery value to obtain the time used by 90%.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens air distribution system, to test
Chamber is passed through N2, air-out, by the time after the frequency stable of sensor.Start in test chamber, be passed through CO2, treat sensor frequency
After rate is stable, close CO2, the most again it is passed through N2, treat that sensor frequency is again stable.Use the method, test successively
The CO of 500ppm, 2500ppm2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 6min and 3min, and passage one and the passage two difference to each reading
Less than 7%;
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests the NO of 50ppm, 250ppm successively2
Response results, obtain frequency variation by passage four and passage five and be respectively 3.1KHz, 5.5KHz, response time and recovery
Time is respectively 15min and 16min, and passage four and passage five are less than 7% to the difference of each reading.Pass through test result
It can be seen that this Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and all uses every kind of gas double
Lane testing, the data reliability obtained is greatly improved.At operating temperature is 80 DEG C, the undulating value of test result ± 9%,
Show preferable high temperature stability performance.
Test specification, lightning protection power distribution cabinet of the present invention is provided with SAW sensor, it is possible to realize the highly sensitive inspection to object gas
Survey, and high temperatures is good.
Those skilled in the art, after considering description and putting into practice invention disclosed herein, will readily occur to its of the present invention
Its embodiment.The application is intended to any modification, purposes or the adaptations of the present invention, these modification, purposes or
Person's adaptations is followed the general principle of the present invention and includes the undocumented common knowledge in the art of the application
Or conventional techniques means.Description and embodiments is considered only as exemplary, and true scope and spirit of the invention are by following
Claim is pointed out.
It should be appreciated that the invention is not limited in precision architecture described above and illustrated in the accompanying drawings, and
And various modifications and changes can carried out without departing from the scope.The scope of the present invention is only limited by appended claim.
Claims (2)
1. a lightning protection power distribution cabinet based on gas detection function, including lightning protection power distribution cabinet body and being installed on outside lightning protection power distribution cabinet
The monitoring CO in portion2、NO2The SAW sensor of gas concentration, described SAW sensor has Five-channel structure, wherein passage three conduct
Reference channel, passage one and the sensitizing range coating sensitive thin-film material one of passage two, carry out CO2The detection of gas, passage four
Coat sensitive thin-film material two with the sensitizing range of passage five, carry out NO2The detection of gas;Described passage sensitive thin-film material
One, two being three layers, go back magnetron sputtering layer of Ni film between described sensitive thin film and SAW device, described Ni film thickness is
200nm。
A kind of lightning protection power distribution cabinet based on gas detection function the most according to claim 1, it is characterised in that: described SAW
The preparation method of sensor comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation;
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is mainly by carbon
SiClx, stannum oxide, high boron Calcium pyroborate and lithium oxide form with the proportions of 2:3:5:1;
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one: the polyetherimide material of the purchase taking 85mg adds in beaker, adds the super of 20ml
Pure water, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and adds the 27g Ni nanometer powder of purchase subsequently, will
Beaker is put in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed sensitive thin-film material
One;
B () prepares sensitive thin-film material two: take the pure polyaniline of 14mg molecule and be dissolved in the chloroform soln of 50ml, then
Take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, supersound process 1h, to obtain final product
Finely dispersed sensitive thin-film material two;
C () prepares sensitive thin-film material three: by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2Add molten in the ratio of 1:2
Have in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, low temperature stirring 1h, i.e. obtain sensitive thin-film material three;
Step 4, prepares SAW sensor:
A the SAW device cleaned through step one is dried by () after, magnetron sputtering is utilized to combine template respectively at passage one, passage
Two, the sensitizing range plating layer of metal Ni film of passage four, passage five, then utilizes quantitative liquid shifter to take sensitive thin-film material three painting
Overlay on passage one, passage two, passage four, the sensitizing range of passage five, be as the criterion so that Ni film is completely covered;Profit is divided in a like fashion
Do not coat sensitive thin-film material one and sensitive thin film material successively in the sensitizing range of passage one and passage two, passage four and passage five
Material two;
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ();
C () circulation (a), (b) operate twice, make the surface, sensitizing range of passage one, passage two, passage four and passage five be respectively formed
Three layers of Ni film and six layers of sensitive thin film;
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid directly over the sensitizing range of corresponding each passage
There is reserved air inlet, constitute SAW sensor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610408786.XA CN106053728A (en) | 2016-06-12 | 2016-06-12 | Anti-thunder power distribution cabinet based on gas detection function |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610408786.XA CN106053728A (en) | 2016-06-12 | 2016-06-12 | Anti-thunder power distribution cabinet based on gas detection function |
Publications (1)
Publication Number | Publication Date |
---|---|
CN106053728A true CN106053728A (en) | 2016-10-26 |
Family
ID=57170856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610408786.XA Pending CN106053728A (en) | 2016-06-12 | 2016-06-12 | Anti-thunder power distribution cabinet based on gas detection function |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106053728A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106353380A (en) * | 2016-11-01 | 2017-01-25 | 深圳大图科创技术开发有限公司 | Server cabinet |
CN106770510A (en) * | 2016-11-01 | 2017-05-31 | 深圳大图科创技术开发有限公司 | A kind of power distribution cabinet with gas detection function |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101936937A (en) * | 2010-07-06 | 2011-01-05 | 电子科技大学 | Micro-cantilever gas sensor and manufacturing method thereof |
CN103994939A (en) * | 2014-05-23 | 2014-08-20 | 天津理工大学 | Manufacturing method of all-printed electronic carbon dioxide thin-film SAW (Surface Acoustic Wave) sensor |
CN105372317A (en) * | 2015-10-28 | 2016-03-02 | 肖小玉 | High-pressure vacuum power distribution cabinet and making method thereof |
-
2016
- 2016-06-12 CN CN201610408786.XA patent/CN106053728A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101936937A (en) * | 2010-07-06 | 2011-01-05 | 电子科技大学 | Micro-cantilever gas sensor and manufacturing method thereof |
CN103994939A (en) * | 2014-05-23 | 2014-08-20 | 天津理工大学 | Manufacturing method of all-printed electronic carbon dioxide thin-film SAW (Surface Acoustic Wave) sensor |
CN105372317A (en) * | 2015-10-28 | 2016-03-02 | 肖小玉 | High-pressure vacuum power distribution cabinet and making method thereof |
Non-Patent Citations (3)
Title |
---|
ANTONIO J. RICCO AND STEPHEN J.MARTIN: "Multiple Frequency Surface Acoustic Wave Devices as Sensors", 《IEEE》 * |
李淑红: "基于声表面波技术的新型气体传感器的研究", 《中国博士学位论文全文数据库 信息科技辑》 * |
高小康: "溶胶-凝胶固定Ru(bpy)2(dpp)Cl2的溶解氧传感器的研究", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106353380A (en) * | 2016-11-01 | 2017-01-25 | 深圳大图科创技术开发有限公司 | Server cabinet |
CN106770510A (en) * | 2016-11-01 | 2017-05-31 | 深圳大图科创技术开发有限公司 | A kind of power distribution cabinet with gas detection function |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Penza et al. | Metalloporphyrins-modified carbon nanotubes networked films-based chemical sensors for enhanced gas sensitivity | |
CN106018549A (en) | Environment monitoring device capable of detecting gas at high reliability | |
CN109406611A (en) | A kind of Technique of Nano Pd/carbon nanotube-MXene composite material and its application in nitro arene explosive substance detection | |
Deng et al. | Fabrication of a sensor array based on quartz crystal microbalance and the application in egg shelf life evaluation | |
Song et al. | Film bulk acoustic formaldehyde sensor with polyethyleneimine-modified single-wall carbon nanotubes as sensitive layer | |
Ellern et al. | HKUST‐1 coated piezoresistive microcantilever array for volatile organic compound sensing | |
Li et al. | Subsecond response of humidity sensor based on graphene oxide quantum dots | |
Mahmud et al. | A low-power wearable E-nose system based on a capacitive micromachined ultrasonic transducer (CMUT) array for indoor VOC monitoring | |
CN106053728A (en) | Anti-thunder power distribution cabinet based on gas detection function | |
Wang et al. | The detection of formaldehyde using microelectromechanical acoustic resonator with multiwalled carbon nanotubes-polyethyleneimine composite coating | |
Wang et al. | Nitric oxide sensing properties of a surface acoustic wave sensor with copper-ion-doped polyaniline/tungsten oxide nanocomposite film | |
CN101871904B (en) | Gas detecting device, gas detecting system and manufacturing method of gas detecting device | |
CN106124616A (en) | A kind of novel microbial fertilizer detection device | |
Zhang et al. | Langasite-based surface acoustic wave resonator for acetone vapor sensing | |
CN106124617A (en) | A kind of based on high reliability NO2the server cabinet of detection | |
Ziegler et al. | Highly selective ozone sensors based on functionalized carbon nanotubes | |
CN106093193A (en) | One can detect CO2the carbonic acid beverage maker of gas leakage | |
CN106119098A (en) | Based on CO2the fermentation tank of gas detection function | |
CN105823824A (en) | Organic garbage treatment machine based on gas self-detection function | |
CN105866245A (en) | High-speed fermentation organic garbage disposal unit based on two-channel gas detection | |
CN106094538A (en) | A kind of intelligent home control system based on gas detecting | |
CN106093188A (en) | A kind of based on CO2and NO2the mine alarming device of detection | |
Lin et al. | Surface acoustic wave gas sensor for monitoring low concentration ammonia | |
Bhaliya et al. | Fluoropolymer nanocomposites for volatile organic compounds and gas-sensing application | |
CN106124883A (en) | A kind of down-hole power equipment inspection system based on gas detecting |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
RJ01 | Rejection of invention patent application after publication | ||
RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161026 |