CN106124617A - A kind of based on high reliability NO2the server cabinet of detection - Google Patents
A kind of based on high reliability NO2the server cabinet of detection Download PDFInfo
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- CN106124617A CN106124617A CN201610408738.0A CN201610408738A CN106124617A CN 106124617 A CN106124617 A CN 106124617A CN 201610408738 A CN201610408738 A CN 201610408738A CN 106124617 A CN106124617 A CN 106124617A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/02—Details
- H05K5/0247—Electrical details of casings, e.g. terminals, passages for cables or wiring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/021—Gases
- G01N2291/0215—Mixtures of three or more gases, e.g. air
Abstract
The application relates to a kind of server cabinet based on the detection of high reliability NO2, including server cabinet body and be installed on the monitoring CO outside server cabinet2、NO2The SAW sensor of gas concentration, described SAW sensor, based on SAW device, has Five-channel structure, and wherein passage three is as reference channel, passage one and the sensitizing range coating sensitive thin-film material one of passage two, carries out CO2The detection of gas, passage four and the sensitizing range coating sensitive thin-film material two of passage five, carry out NO2The detection of gas；All using the dual pathways to detect every kind of gas simultaneously, considerably increase the stability to detection of gas, it is ensured that the credibility of sensor readings, and repeatability is good, under high temperature, measuring stability is good.
Description
Technical field
The application relates to server cabinet field, particularly relates to a kind of server cabinet based on the detection of high reliability NO2.
Background technology
Server cabinet is used to combination and installs panel, plug-in unit, electronic component and parts so that it is constitute one overall
Case is installed.Server cabinet is made up of framework and correcting, generally rectangle, lands placement.
Along with the complexity day by day of server cabinet application, its local environment inevitably runs into the gas such as CO2, NO2
Body accumulation region, but these gases are very big to harm.
Summary of the invention
For overcoming problem present in correlation technique, the application provides a kind of server based on the detection of high reliability NO2
Rack, including server cabinet body and be installed on the monitoring CO outside server cabinet2、NO2The SAW sensor of gas concentration,
Described SAW sensor has Five-channel structure, and wherein passage three is coated with the sensitizing range of passage two as reference channel, passage one
Cover sensitive thin-film material one, carry out CO2The detection of gas, passage four coats sensitive thin-film material with the sensitizing range of passage five
Two, carry out NO2The detection of gas；Described passage sensitive thin-film material one, two is three layers, described sensitive thin film and SAW device
Between go back magnetron sputtering layer of Ni film, described Ni film thickness is 150nm.
Preferably, the preparation method of described SAW sensor comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation；
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 2:3:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one: the polyetherimide material of the purchase taking 85mg adds in beaker, adds 20ml
Ultra-pure water, stir, be subsequently adding the polythiophene of 30mg, stir, add the 27g Ni nano powder of purchase subsequently
End, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed sensitivity thin
Membrane material one；
B () prepares sensitive thin-film material two: take the pure polyaniline of 14mg molecule and be dissolved in the chloroform soln of 50ml,
Then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, addition 9g barium titanate nano powder, supersound process 1h,
Obtain finely dispersed sensitive thin-film material two；
C () prepares sensitive thin-film material three: by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2In the ratio of 1:2
Add dissolved with in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, low temperature stirring 1h, i.e. obtain sensitive thin film material
Material three；
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered；Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, the surface, sensitizing range making passage one, passage two, passage four and passage five is equal
Form three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
The technical scheme that embodiments herein provides can include following beneficial effect:
1. configuration aspects, uses Five-channel SAW device, and wherein passage three is as reference channel, passage one and passage two
Sensitizing range coating sensitive thin-film material one, carries out CO2The detection of gas, passage four is sensitive with the sensitizing range coating of passage five
Thin-film material two, carries out NO2The detection of gas；All use the dual pathways to detect every kind of gas simultaneously, considerably increase gas
The stability of detection, it is ensured that the credibility of sensor readings；
2. sensitive thin-film material one is made up of Polyetherimide (PEI) material, polythiophene material and Ni nano-powder material,
The particle diameter of the nanoscale of Ni nano-powder material ensure that the dispersibility of Organic substance PEI and polythiophene, substantially increases sensitivity
Material is to CO2Sensitivity；
3. sensitive thin-film material two is made up of polyaniline material, multi-wall carbon nano-tube tube material and barium-titanate material, wherein, poly-
Aniline major part is compounded in carbon nano tube surface, due to hollow structure and the great specific surface area of CNT, ties from physics
Structure aspect considerably increases polyaniline to NO2The absorbability of gas；
4, the sensitive thin-film material three of the application is by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2Composition, enters one
Step enhances fermentation tank to CO2Sensing capability.
Aspect and advantage that the application adds will part be given in the following description, and part will become from the following description
Obtain substantially, or recognized by the practice of the application.It should be appreciated that above general description and details hereinafter only describe
It is exemplary and explanatory, the application can not be limited.
Accompanying drawing explanation
Accompanying drawing herein is merged in description and constitutes the part of this specification, it is shown that meet the enforcement of the present invention
Example, and for explaining the principle of the present invention together with description.
Fig. 1 is SAW sensor structural representation of the present invention.
Fig. 2 is Ni film and sensitive thin-film material coating order in the passage one of the SAW sensor in Fig. 1 or passage two region
Sectional view, wherein, complete order should be circulation three times.
Fig. 3 is Ni film and sensitive thin-film material coating order in the passage four of the SAW sensor in Fig. 1 or passage five region
Sectional view, wherein, complete order should be circulation three times.
Fig. 4 is according to the method flow diagram making sensor Five-channel structure shown in embodiment.
Wherein: 01-sensitive thin-film material one, 02-sensitive thin-film material two, 03-Ni film, 04-sensitive thin-film material three.
Detailed description of the invention
Here will illustrate exemplary embodiment in detail, its example represents in the accompanying drawings.Explained below relates to
During accompanying drawing, unless otherwise indicated, the same numbers in different accompanying drawings represents same or analogous key element.Following exemplary embodiment
Described in embodiment do not represent all embodiments consistent with the present invention.On the contrary, they are only with the most appended
The example of the apparatus and method that some aspects that described in detail in claims, the present invention are consistent.
Following disclosure provides many different embodiments or example for realizing the different structure of the application.For letter
Changing disclosure herein, hereinafter parts and setting to specific examples are described.Certainly, they are the most merely illustrative, and
It is not intended to limit the application.Additionally, the application can in different examples repeat reference numerals and/or letter.This heavy
It is for purposes of simplicity and clarity again, itself is more than the relation between various embodiment being discussed and/or arranging.This
Outward, the various specific technique that this application provides and the example of material, but those of ordinary skill in the art it can be appreciated that
The applicability of other techniques and/or the use of other materials.It addition, fisrt feature described below Second Eigenvalue " on "
Structure can include that the first and second features are formed as the embodiment directly contacted, it is also possible to include that other feature is formed at
Embodiment between first and second features, such first and second features are not likely to be directly contact.
In the description of the present application, it should be noted that unless otherwise prescribed and limit, term " is installed ", " being connected ",
" connect " and should be interpreted broadly, for example, it may be mechanically connected or electrical connection, it is also possible to be the connection of two element internals, can
Being to be joined directly together, it is also possible to be indirectly connected to by intermediary, for the ordinary skill in the art, can basis
Concrete condition understands the concrete meaning of above-mentioned term.
Along with the continuous progress of social production life, mankind's combustion of fossil fuels gets more and more, causes carbon dioxide, dioxy
The discharge changing nitrogen etc. alreadys more than the scope that environment can bear, and owing to carbon dioxide can produce greenhouse effect, nitrogen dioxide is
Form one of principal element of acid rain and photochemical pollution, badly influence the productive life of the mankind, it is therefore necessary to right
Carbon dioxide, the discharge of nitrogen dioxide are monitored.
Carbon dioxide, is inorganic compound common in a kind of air, and molecular formula is CO2, between oxygen atom and carbon atom
Being that covalent bond combines, form nonpolar linear structure, stable chemical nature, under room temperature, carbon dioxide is colorless and odorless
, water soluble, and generate carbonic acid with water.Owing to carbon dioxide has insulation effect, it discharges in a large number and result in temperature of the earth
Rising day by day, there is data to suggest that, since the nearly century, Global Temperature increases 0.6 degree Celsius, and if things go on like this, it is to sea
The rising of plane and the impact of environment will be continuously increased.
Nitrogen dioxide is the gaseous material of a kind of brownish red, high activity.Nitrogen dioxide rises in the forming process of ozone
Important function.The artificial nitrogen dioxide produced is essentially from the release of high-temp combustion process, and such as motor-vehicle tail-gas, boiler are useless
The discharge etc. of gas.One of nitrogen dioxide or the origin cause of formation of acid rain, the environmental effect brought is varied, such as to wetland and
Compete between terrestrial plant species and form the impact of change, the reduction of atmospheric visibility, the acidifying of surface water, eutrophication with
And increase water body is harmful to Fish and other hydrobiological content of toxins.
Gas sensor, is a kind of change that can experience ambient atmos concentration, kind etc., and by this change transitions is
Measurable signal (the such as signal such as voltage, electric current), thus realize the device of the detection to object gas.General gas flow senses
Device includes the parts such as gas sensitive, circuit for signal conditioning, delicate substrates and accessory power supply.According to sensitivity principle to gas sensor
Classification, can be divided into semiconductor-type gas sensor, electrochemical gas sensor, infrared gas sensor, high score minor gas
Sensor etc..
Wherein, sensitive thin film gas sensor is the emphasis of research now, it is generally the case that utilize drop coating, spin coating, evaporation plating
The methods such as film, prepare sensitive thin film on the devices such as QCM (QCM), surface acoustic wave (SAW), owing to gas is inhaled
It is attached on sensitive thin film, causes the qualitative change of sensitive thin film, and then cause the output signal of telecommunication of sensor to produce change, thus
Detected type and the kind of object gas.
The principle of SAW sensor is sensor owing to piezoelectric effect can send acoustic signals, and this signal is tested owing to being in
Surveying in gas, its frequency, sound wave, amplitude etc. can change, thus reach the purpose of detected gas.Surface acoustic wave excite and
Detection is realized by interdigital transducer, and interdigital transducer (IDT) is two, shape picture of formation on piezoelectric substrate surface
The metal pattern of the finger cross-like of hands, its effect is to realize sound-electric transducing.
For in productive life for carbon dioxide, nitrogen dioxide gas detection importance, and existing sensor
Not enough (such as sensitivity is relatively low, response time length, specific aim are the highest), this programme, based on SAW device, is prepared for Five-channel CO2
And NO2Gas sensor.
The processing technology of SAW device is more ripe, and this programme uses Five-channel structure SAW that mid frequency is 525MHz
Delay line type device, choice of the substrates is quartz material, and the electrode of interdigital transducer is Cr metal.Each passage is interdigital by a pair
Transducer forms, and respectively as input and output transducer, in input transducer, the signal of telecommunication of input produces alternating electric field, due to
Piezoelectric effect excites elastic vibration in substrate, produces surface acoustic wave, and output transducer receives surface acoustic wave signal and is converted to
The signal of telecommunication, detects the signal of telecommunication.
Passage one, passage two are used as CO2The Measurement channel of gas, passage three is used as reference channel, passage four,
Passage five is used as NO2The Measurement channel of gas.When gaseous environment changes, then reference channel and other passage
Frequency drift is the same, can eliminate, by the difference frequency between agitator, the interference that environmental change causes.
Embodiment 1
The application provides a kind of server cabinet based on the detection of high reliability NO2, including server cabinet body and peace
It is loaded on the monitoring CO outside server cabinet2、NO2The SAW sensor of gas concentration；SAW sensor structural representation as shown in Figure 1
Figure, described SAW sensor has Five-channel structure, and wherein passage three is as reference channel, passage one and the sensitizing range of passage two
Territory coating sensitive thin-film material one (01), carries out CO2The detection of gas；Passage four is sensitive with the coating of the sensitizing range of passage five thin
Membrane material two (02), carries out NO2The detection of gas；Described passage sensitive thin-film material one, two is three layers, described sensitive thin film
And going back magnetron sputtering layer of Ni film (03) between SAW device, described Ni film thickness is 150nm；Fig. 2 shows that the SAW in Fig. 1 passes
Ni film and the sectional view of sensitive thin-film material coating order in the passage one of sensor or passage two region, wherein, complete order
Should be circulation three times, Fig. 3 is that in the passage four of the SAW sensor in Fig. 1 or passage five region, Ni film and sensitive thin-film material are coated with
Covering the sectional view of order, wherein, complete order should be circulation three times.
Fig. 4 is the preparation method according to the SAW sensor shown in an exemplary embodiment, comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation；
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 2:3:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): the polyetherimide material of the purchase taking 85mg adds in beaker, adds
The ultra-pure water of 20ml, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and the 27g Ni adding purchase subsequently receives
Rice flour end, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed quick
Sense thin-film material one；
B () prepares sensitive thin-film material two (02): taking the pure polyaniline of 14mg molecule, to be dissolved in the chloroform of 50ml molten
In liquid, then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, ultrasonic place
Reason 1h, obtains finely dispersed sensitive thin-film material two；
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2By 1:2's
Ratio adds dissolved with in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, and low temperature stirring 1h, i.e. obtain sensitive thin
Membrane material three；
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered；Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, the surface, sensitizing range making passage one, passage two, passage four and passage five is equal
Form three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
Preferably, the test system of SAW gas sensor is by test chamber and test circuit, dynamic air-distributing device and cymometer
Number device composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations and controlling the flow of gas；Test circuit is used for
SAW device applies alternating voltage；Frequency counter is used for being recorded in real time at the frequency change of sensor in object gas.Its
In, definition sensitivity is the variable quantity ratio with original frequency of sensor frequency；Response time is that sensor contacts with gas
Start to the time used by 90% that sensor frequency variable quantity is peak change amount；Recovery time is that sensor contacts with gas
Stop starting to sensor frequency recovery value to obtain the time used by 90%.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens air distribution system, to test
Chamber is passed through N2, air-out, by the time after the frequency stable of sensor.Start in test chamber, be passed through CO2, treat sensor frequency
After rate is stable, close CO2, the most again it is passed through N2, treat that sensor frequency is again stable.Use the method, test successively
The CO of 500ppm, 2500ppm2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 6min and 3min, and passage one and the passage two difference to each reading
Less than 4%；
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests the NO of 50ppm, 250ppm successively2
Response results, obtain frequency variation by passage four and passage five and be respectively 3.1KHz, 5.5KHz, response time and recovery
Time is respectively 5min and 2min, and passage four and passage five are less than 7% to the difference of each reading.Can by test result
To find out, this Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and every kind of gas is all used bilateral
Road is tested, and the data reliability obtained is greatly improved.At operating temperature is 80 DEG C, the undulating value of test result ± 3%, table
Now preferable high temperature stability performance.
About the device in above-described embodiment, wherein modules performs the concrete mode of operation in relevant the method
Embodiment in be described in detail, explanation will be not set forth in detail herein.
Embodiment 2
The application provides a kind of server cabinet based on the detection of high reliability NO2, including server cabinet body and peace
It is loaded on the monitoring CO outside server cabinet2、NO2The SAW sensor of gas concentration；SAW sensor structural representation as shown in Figure 1
Figure, described SAW sensor has Five-channel structure, and wherein passage three is as reference channel, passage one and the sensitizing range of passage two
Territory coating sensitive thin-film material one (01), carries out CO2The detection of gas；Passage four is sensitive with the coating of the sensitizing range of passage five thin
Membrane material two (02), carries out NO2The detection of gas；Described passage sensitive thin-film material one, two is three layers, described sensitive thin film
And going back magnetron sputtering layer of Ni film (03) between SAW device, described Ni film thickness is 170nm；Fig. 2 shows that the SAW in Fig. 1 passes
Ni film and the sectional view of sensitive thin-film material coating order in the passage one of sensor or passage two region, wherein, complete order
Should be circulation three times, Fig. 3 is that in the passage four of the SAW sensor in Fig. 1 or passage five region, Ni film and sensitive thin-film material are coated with
Covering the sectional view of order, wherein, complete order should be circulation three times.
Fig. 4 is the preparation method according to the SAW sensor shown in an exemplary embodiment, comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation；
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 1:3:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): the polyetherimide material of the purchase taking 85mg adds in beaker, adds
The ultra-pure water of 20ml, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and the 27g Ni adding purchase subsequently receives
Rice flour end, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed quick
Sense thin-film material one；
B () prepares sensitive thin-film material two (02): taking the pure polyaniline of 14mg molecule, to be dissolved in the chloroform of 50ml molten
In liquid, then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, ultrasonic place
Reason 1h, obtains finely dispersed sensitive thin-film material two；
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2By 1:2's
Ratio adds dissolved with in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, and low temperature stirring 1h, i.e. obtain sensitive thin
Membrane material three；
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered；Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, the surface, sensitizing range making passage one, passage two, passage four and passage five is equal
Form three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
Preferably, the test system of SAW gas sensor is by test chamber and test circuit, dynamic air-distributing device and cymometer
Number device composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations and controlling the flow of gas；Test circuit is used for
SAW device applies alternating voltage；Frequency counter is used for being recorded in real time at the frequency change of sensor in object gas.Its
In, definition sensitivity is the variable quantity ratio with original frequency of sensor frequency；Response time is that sensor contacts with gas
Start to the time used by 90% that sensor frequency variable quantity is peak change amount；Recovery time is that sensor contacts with gas
Stop starting to sensor frequency recovery value to obtain the time used by 90%.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens air distribution system, to test
Chamber is passed through N2, air-out, by the time after the frequency stable of sensor.Start in test chamber, be passed through CO2, treat sensor frequency
After rate is stable, close CO2, the most again it is passed through N2, treat that sensor frequency is again stable.Use the method, test successively
The CO of 500ppm, 2500ppm2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 8min and 4min, and passage one and the passage two difference to each reading
Less than 4%；
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests the NO of 50ppm, 250ppm successively2
Response results, obtain frequency variation by passage four and passage five and be respectively 3.1KHz, 5.5KHz, response time and recovery
Time is respectively 5min and 2min, and passage four and passage five are less than 7% to the difference of each reading.Can by test result
To find out, this Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and every kind of gas is all used bilateral
Road is tested, and the data reliability obtained is greatly improved.At operating temperature is 80 DEG C, the undulating value of test result ± 4%, table
Now preferable high temperature stability performance.
Embodiment 3
The application provides a kind of server cabinet based on the detection of high reliability NO2, including server cabinet body and peace
It is loaded on the monitoring CO outside server cabinet2、NO2The SAW sensor of gas concentration；SAW sensor structural representation as shown in Figure 1
Figure, described SAW sensor has Five-channel structure, and wherein passage three is as reference channel, passage one and the sensitizing range of passage two
Territory coating sensitive thin-film material one (01), carries out CO2The detection of gas；Passage four is sensitive with the coating of the sensitizing range of passage five thin
Membrane material two (02), carries out NO2The detection of gas；Described passage sensitive thin-film material one, two is three layers, described sensitive thin film
And going back magnetron sputtering layer of Ni film (03) between SAW device, described Ni film thickness is 190nm；Fig. 2 shows that the SAW in Fig. 1 passes
Ni film and the sectional view of sensitive thin-film material coating order in the passage one of sensor or passage two region, wherein, complete order
Should be circulation three times, Fig. 3 is that in the passage four of the SAW sensor in Fig. 1 or passage five region, Ni film and sensitive thin-film material are coated with
Covering the sectional view of order, wherein, complete order should be circulation three times.
Fig. 4 is the preparation method according to the SAW sensor shown in an exemplary embodiment, comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation；
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 2:3:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): the polyetherimide material of the purchase taking 85mg adds in beaker, adds
The ultra-pure water of 20ml, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and the 27g Ni adding purchase subsequently receives
Rice flour end, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed quick
Sense thin-film material one；
B () prepares sensitive thin-film material two (02): taking the pure polyaniline of 13mg molecule, to be dissolved in the chloroform of 50ml molten
In liquid, then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, ultrasonic place
Reason 1h, obtains finely dispersed sensitive thin-film material two；
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2By 1:2's
Ratio adds dissolved with in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, and low temperature stirring 1h, i.e. obtain sensitive thin
Membrane material three；
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered；Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, make the surface, sensitizing range of passage one, passage two, passage four and passage five
It is respectively formed three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
Preferably, the test system of SAW gas sensor is by test chamber and test circuit, dynamic air-distributing device and cymometer
Number device composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations and controlling the flow of gas；Test circuit is used for
SAW device applies alternating voltage；Frequency counter is used for being recorded in real time at the frequency change of sensor in object gas.Its
In, definition sensitivity is the variable quantity ratio with original frequency of sensor frequency；Response time is that sensor contacts with gas
Start to the time used by 90% that sensor frequency variable quantity is peak change amount；Recovery time is that sensor contacts with gas
Stop starting to sensor frequency recovery value to obtain the time used by 90%.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens air distribution system, to test
Chamber is passed through N2, air-out, by the time after the frequency stable of sensor.Start in test chamber, be passed through CO2, treat sensor frequency
After rate is stable, close CO2, the most again it is passed through N2, treat that sensor frequency is again stable.Use the method, test successively
The CO of 500ppm, 2500ppm2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 6min and 3min, and passage one and the passage two difference to each reading
Less than 4%；
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests the NO of 50ppm, 250ppm successively2
Response results, obtain frequency variation by passage four and passage five and be respectively 3.1KHz, 5.5KHz, response time and recovery
Time is respectively 15min and 21min, and passage four and passage five are less than 7% to the difference of each reading.Pass through test result
It can be seen that this Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and all uses every kind of gas double
Lane testing, the data reliability obtained is greatly improved.At operating temperature is 80 DEG C, the undulating value of test result ± 5%,
Show preferable high temperature stability performance.
Embodiment 4
The application provides a kind of server cabinet based on the detection of high reliability NO2, including server cabinet body and peace
It is loaded on the monitoring CO outside server cabinet2、NO2The SAW sensor of gas concentration；SAW sensor structural representation as shown in Figure 1
Figure, described SAW sensor has Five-channel structure, and wherein passage three is as reference channel, passage one and the sensitizing range of passage two
Territory coating sensitive thin-film material one (01), carries out CO2The detection of gas；Passage four is sensitive with the sensitizing range coating of passage five
Thin-film material two (02), carries out NO2The detection of gas；Described passage sensitive thin-film material one, two is three layers, and described sensitivity is thin
Going back magnetron sputtering layer of Ni film (03) between film and SAW device, described Ni film thickness is 210nm；Fig. 2 shows the SAW in Fig. 1
Ni film and the sectional view of sensitive thin-film material coating order in the passage one of sensor or passage two region, wherein, complete is suitable
Sequence should be circulation three times, and Fig. 3 is Ni film and sensitive thin-film material in the passage four of the SAW sensor in Fig. 1 or passage five region
The sectional view of coating order, wherein, complete order should be circulation three times.
Fig. 4 is the preparation method according to the SAW sensor shown in an exemplary embodiment, comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation；
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 2:5:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): the polyetherimide material of the purchase taking 85mg adds in beaker, adds
The ultra-pure water of 20ml, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and the 27g Ni adding purchase subsequently receives
Rice flour end, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed quick
Sense thin-film material one；
B () prepares sensitive thin-film material two (02): taking the pure polyaniline of 14mg molecule, to be dissolved in the chloroform of 50ml molten
In liquid, then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, ultrasonic place
Reason 1h, obtains finely dispersed sensitive thin-film material two；
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2By 1:2's
Ratio adds dissolved with in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, and low temperature stirring 1h, i.e. obtain sensitive thin
Membrane material three；
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered；Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, the surface, sensitizing range making passage one, passage two, passage four and passage five is equal
Form three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
Preferably, the test system of SAW gas sensor is by test chamber and test circuit, dynamic air-distributing device and cymometer
Number device composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations and controlling the flow of gas；Test circuit is used for
SAW device applies alternating voltage；Frequency counter is used for being recorded in real time at the frequency change of sensor in object gas.Its
In, definition sensitivity is the variable quantity ratio with original frequency of sensor frequency；Response time is that sensor contacts with gas
Start to the time used by 90% that sensor frequency variable quantity is peak change amount；Recovery time is that sensor contacts with gas
Stop starting to sensor frequency recovery value to obtain the time used by 90%.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens air distribution system, to test
Chamber is passed through N2, air-out, by the time after the frequency stable of sensor.Start in test chamber, be passed through CO2, treat sensor frequency
After rate is stable, close CO2, the most again it is passed through N2, treat that sensor frequency is again stable.Use the method, test successively
The CO of 500ppm, 2500ppm2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 6min and 3min, and passage one and the passage two difference to each reading
Less than 7%；
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests the NO of 50ppm, 250ppm successively2
Response results, obtain frequency variation by passage four and passage five and be respectively 3.1KHz, 5.5KHz, response time and recovery
Time is respectively 5min and 2min, and passage four and passage five are less than 7% to the difference of each reading.Can by test result
To find out, this Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and every kind of gas is all used bilateral
Road is tested, and the data reliability obtained is greatly improved.At operating temperature is 80 DEG C, the undulating value of test result ± 9%,
Show preferable high temperature stability performance.
Embodiment 5
The application provides a kind of server cabinet based on the detection of high reliability NO2, including server cabinet body and peace
It is loaded on the monitoring CO outside server cabinet2、NO2The SAW sensor of gas concentration；SAW sensor structural representation as shown in Figure 1
Figure, described SAW sensor has Five-channel structure, and wherein passage three is as reference channel, passage one and the sensitizing range of passage two
Territory coating sensitive thin-film material one (01), carries out CO2The detection of gas；Passage four is sensitive with the coating of the sensitizing range of passage five thin
Membrane material two (02), carries out NO2The detection of gas；Described passage sensitive thin-film material one, two is three layers, described sensitive thin film
And going back magnetron sputtering layer of Ni film (03) between SAW device, described Ni film thickness is 230nm；Fig. 2 shows that the SAW in Fig. 1 passes
Ni film and the sectional view of sensitive thin-film material coating order in the passage one of sensor or passage two region, wherein, complete order
Should be circulation three times, Fig. 3 is that in the passage four of the SAW sensor in Fig. 1 or passage five region, Ni film and sensitive thin-film material are coated with
Covering the sectional view of order, wherein, complete order should be circulation three times.
Fig. 4 is the preparation method according to the SAW sensor shown in an exemplary embodiment, comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation；
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is main
Formed with the proportions of 2:3:5:1 by carborundum, stannum oxide, high boron Calcium pyroborate and lithium oxide；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one (01): the polyetherimide material of the purchase taking 85mg adds in beaker, adds
The ultra-pure water of 20ml, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and the 27g Ni adding purchase subsequently receives
Rice flour end, puts into beaker in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed quick
Sense thin-film material one；
B () prepares sensitive thin-film material two (02): taking the pure polyaniline of 14mg molecule, to be dissolved in the chloroform of 50ml molten
In liquid, then take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, ultrasonic place
Reason 1h, obtains finely dispersed sensitive thin-film material two；
C () prepares sensitive thin-film material three (04): by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2By 1:2's
Ratio adds dissolved with in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, and low temperature stirring 1h, i.e. obtain sensitive thin
Membrane material three；
Step 4, prepares SAW sensor:
(a) will after SAW device that clean through step one dries, utilize magnetron sputtering combine template respectively passage one,
Passage two, passage four, the sensitizing range plating layer of metal Ni film of passage five, then utilize quantitative liquid shifter to take sensitive thin-film material
Three are coated in passage one, passage two, passage four, the sensitizing range of passage five, are as the criterion so that Ni film is completely covered；Utilize identical side
Formula coats sensitive thin-film material one successively in the sensitizing range of passage one and passage two, passage four and passage five respectively and sensitivity is thin
Membrane material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, the surface, sensitizing range making passage one, passage two, passage four and passage five is equal
Form three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid, the sensitizing range of corresponding each passage is just
There is reserved air inlet top, constitutes SAW sensor.
Preferably, the test system of SAW gas sensor is by test chamber and test circuit, dynamic air-distributing device and cymometer
Number device composition.Dynamic air-distributing device is used for mixing the gas to be measured of variable concentrations and controlling the flow of gas；Test circuit is used for
SAW device applies alternating voltage；Frequency counter is used for being recorded in real time at the frequency change of sensor in object gas.Its
In, definition sensitivity is the variable quantity ratio with original frequency of sensor frequency；Response time is that sensor contacts with gas
Start to the time used by 90% that sensor frequency variable quantity is peak change amount；Recovery time is that sensor contacts with gas
Stop starting to sensor frequency recovery value to obtain the time used by 90%.
First, the sonic surface wave gas sensors made is put in sealing test chamber, opens air distribution system, to test
Chamber is passed through N2, air-out, by the time after the frequency stable of sensor.Start in test chamber, be passed through CO2, treat sensor frequency
After rate is stable, close CO2, the most again it is passed through N2, treat that sensor frequency is again stable.Use the method, test successively
The CO of 500ppm, 2500ppm2Response results, by passage one and passage two obtain frequency variation be respectively 2.6KHz,
Are respectively 4.7KHz, response time and recovery time 6min and 3min, and passage one and the passage two difference to each reading
Less than 7%；
Then, identical testing procedure is utilized, by CO2Gas changes NO into2Gas, tests the NO of 50ppm, 250ppm successively2
Response results, obtain frequency variation by passage four and passage five and be respectively 3.1KHz, 5.5KHz, response time and recovery
Time is respectively 5min and 2min, and passage four and passage five are less than 7% to the difference of each reading.Can by test result
To find out, this Five-channel SAW structure sensor is to CO2、NO2The sensitivity of gas is preferable, and every kind of gas is all used bilateral
Road is tested, and the data reliability obtained is greatly improved.At operating temperature is 80 DEG C, the undulating value of test result ± 9%, table
Now preferable high temperature stability performance.
Those skilled in the art, after considering description and putting into practice invention disclosed herein, will readily occur to its of the present invention
Its embodiment.The application is intended to any modification, purposes or the adaptations of the present invention, these modification, purposes or
Person's adaptations is followed the general principle of the present invention and includes the undocumented common knowledge in the art of the application
Or conventional techniques means.Description and embodiments is considered only as exemplary, and true scope and spirit of the invention are by following
Claim is pointed out.
It should be appreciated that the invention is not limited in precision architecture described above and illustrated in the accompanying drawings, and
And various modifications and changes can carried out without departing from the scope.The scope of the present invention is only limited by appended claim.
Claims (2)
1. a server cabinet based on the detection of high reliability NO2, including server cabinet body and be installed on server machine
Monitoring CO outside cabinet2、NO2The SAW sensor of gas concentration, described SAW sensor has Five-channel structure, wherein passage three
As reference channel, passage one and the sensitizing range coating sensitive thin-film material one of passage two, carry out CO2The detection of gas, logical
Road four and the sensitizing range coating sensitive thin-film material two of passage five, carry out NO2The detection of gas；Described passage sensitive thin film material
Material one, two is three layers, goes back magnetron sputtering layer of Ni film between described sensitive thin film and SAW device, and described Ni film thickness is
150nm。
A kind of server cabinet based on the detection of high reliability NO2 the most according to claim 1, it is characterised in that: described
The preparation method of SAW sensor comprises the following steps:
Step one, cleans SAW device: SAW device be sequentially placed in acetone, ethanol, deionized water, respectively supersound process
20min, removes SAW device surface contaminant, is then put into by device in baking oven and dries, and tests its frequency of oscillation；
Step 2, reinforces SAW device: brushing one layer of protective coating on the surface of SAW device, described protective coating is mainly by carbon
SiClx, stannum oxide, high boron Calcium pyroborate and lithium oxide form with the proportions of 2:3:5:1；
Step 3, prepares sensitive thin-film material:
A () prepares sensitive thin-film material one: the polyetherimide material of the purchase taking 85mg adds in beaker, adds the super of 20ml
Pure water, stirs, and is subsequently adding the polythiophene of 30mg, stirs, and adds the 27g Ni nanometer powder of purchase subsequently, will
Beaker is put in ultrasonator, in the case of heating in water bath 70 DEG C, and sonic oscillation 4h, obtain finely dispersed sensitive thin-film material
One；
B () prepares sensitive thin-film material two: take the pure polyaniline of 14mg molecule and be dissolved in the chloroform soln of 50ml, then
Take 10mg multi-walled carbon nano-tubes and add in solution, after stirring, add 9g barium titanate nano powder, supersound process 1h, to obtain final product
Finely dispersed sensitive thin-film material two；
C () prepares sensitive thin-film material three: by fluorescence indicator Ru (bpy)3Cl2With Ru (dpp)3Cl2Add molten in the ratio of 1:2
Have in the 40ml tetrahydrofuran solution of PVC, under sealing dark conditions, low temperature stirring 1h, i.e. obtain sensitive thin-film material three；
Step 4, prepares SAW sensor:
A the SAW device cleaned through step one is dried by () after, magnetron sputtering is utilized to combine template respectively at passage one, passage
Two, the sensitizing range plating layer of metal Ni film of passage four, passage five, then utilizes quantitative liquid shifter to take sensitive thin-film material three painting
Overlay on passage one, passage two, passage four, the sensitizing range of passage five, be as the criterion so that Ni film is completely covered；Profit is divided in a like fashion
Do not coat sensitive thin-film material one and sensitive thin film material successively in the sensitizing range of passage one and passage two, passage four and passage five
Material two；
B SAW device is put into and is dried 20h in vacuum drying oven at 95 DEG C by ()；
C () circulation (a), (b) operate twice, make the surface, sensitizing range of passage one, passage two, passage four and passage five be respectively formed
Three layers of Ni film and six layers of sensitive thin film；
D SAW device is added a cover and is connect wire and processes by (), wherein, on lid directly over the sensitizing range of corresponding each passage
There is reserved air inlet, constitute SAW sensor.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106353380A (en) * | 2016-11-01 | 2017-01-25 | 深圳大图科创技术开发有限公司 | Server cabinet |
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