CN106018339B - Adaptive reflective infrared laser industrial hazard gas leakage monitoring device - Google Patents
Adaptive reflective infrared laser industrial hazard gas leakage monitoring device Download PDFInfo
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- CN106018339B CN106018339B CN201610535412.4A CN201610535412A CN106018339B CN 106018339 B CN106018339 B CN 106018339B CN 201610535412 A CN201610535412 A CN 201610535412A CN 106018339 B CN106018339 B CN 106018339B
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Abstract
A kind of adaptive reflective infrared laser industrial hazard gas leakage monitoring device, it includes shell and the visual sight mirror being arranged above shell, it is characterized in that there is the probe for integrating laser red light beam and laser infrared detection light beam transmitting-receiving being set in shell, further include electrical servo holder and control cabinet, shell is set on electrical servo holder, and probe and electrical servo holder and control cabinet are electrically connected；Further include corner reflector, corner reflector is respectively placed in the both ends of detection light path with probe；Corner reflector is coaxial with the chief ray of the first off-axis parabolic mirror outgoing beam in the chamber of shell upper layer.
Description
Technical field
This programme is related to industrial hazard gas leakage online, Field Monitoring Technique field more particularly to a kind of adaptive anti-
Penetrate formula infrared laser industrial hazard gas leakage monitoring device.
Background technology
Currently, with the fast development of industry, wherein chemical industry, mineral products and oil-gas mining industry etc. is difficult in process of production
Exempt to generate inflammable and explosive, toxic dangerous gas, such as methane, carbon monoxide（CO）Deng.Hazardous gas is once a leak occurs, cause
Explosion and poisoning, can lead to serious accident, cause the massive losses of personnel and property.
Semiconductor laser with tunable absorption spectroscopy techniques based on open light path（TDLAS）It is currently to be widely used in work
The effective means of industry dangerous leakage gas-monitoring（Such as oil-gas mining and chemical engineering industry）, the technology is by infrared laser beam by waiting for
It surveys region and collects detection and pass through obtained infrared signature light using under test gas to the sink effect of specific wavelength or wave band
Spectrum may determine that the presence or absence of target under test gas and calculate its concentration.However, since monitoring region is larger, light path is longer
（Up to 100m）And real time monitoring is required, there are relevant light paths system debug centering difficulty for above-mentioned technological means greatly, light path
The defects of big, device false alarm rate height affected by environment, stability and poor reliability.Such as in petrol resources exploitation industry
On offshore oil and gas production platform, related equipment is difficult to overcome the environmental factors such as platform irregular oscillation, sea level strong wind
It influences, monitoring result reliability, stability are poor, and false alarm rate is high.Existing above-mentioned domestic and international detection device is also difficult in complexity
Long-term, reliable use is obtained under environment and installation and debugging difficulty is big.Therefore, currently still lack based on TDLAS technologies and can be with
Effectively overcome the industrial hazard gas leakage scene prison for the defects of light path debugging centering difficulty is big, stability is poor, false alarm rate is high
Survey device.
Invention content
This programme provides a kind of adaptive reflective infrared laser industrial hazard gas leakage monitoring device, in order to overcome
When carrying out gas field monitoring, device light path installation and debugging centering difficulty is big, measurement result Stability and dependability is poor, false alarm
The defects of rate is high, introduce in the device it is adaptive aim at tracking system, and by rational Optical System Design, will adaptively take aim at
Mutatis mutandis laser red light beam transmitting-receiving optical system is received and dispatched optical system with laser infrared light beam with detection of gas and is integrated, and realizes
Device probe is to the adaptive aiming of target corner reflector and tracking and obtains low-loss infrared acquisition beam energy simultaneously,
Finally obtain the under test gas laser infrared absorption spectrum of high quality.Device effectively overcomes shadow of the environmental factor to testing result
It rings（Such as irregular oscillation, strong wind）, false alarm rate is reduced, and extend the artificial maintenance period of device, effectively improved
The Stability and dependability of dangerous leakage gas-monitoring.
A kind of adaptive reflective infrared laser industrial hazard gas leakage monitoring device, it includes that shell and setting exist
Visual sight mirror above shell is set in shell and integrates laser red light beam and laser infrared detection light beam transmitting-receiving
Probe, further includes electrical servo holder and control cabinet, and shell is set on electrical servo holder, probe and electrical servo holder
And control cabinet electrical connection；Further include corner reflector, corner reflector is respectively placed in the both ends of detection light path with probe；Corner reflector
It is coaxial with the chief ray of the first off-axis parabolic mirror outgoing beam in the chamber of shell upper layer.
The specific feature of this programme in addition, probe in the control line and control cabinet in electrical servo cradle head control cable
Related circuit modular assembly connects.Electrical servo holder uses Worm Wheel System mode, is driven, is possessed by two axis servo motors
Horizontal and vertical two, direction degree of freedom.By the level that the control of servo motor in electrical servo holder may be implemented holder
Rotation and pitch rotation, to realize that the orientation to the probe being fixed thereon is adjusted.
Shell includes shell upper layer chamber and shell lower chamber.Wavelength division multiplexer, red is set in shell lower chamber
Light indicates light source, fiber optic splitter, reference gas chamber, infrared photoelectric detector and semiconductor laser with tunable.On shell
First off-axis parabolic mirror, the second off-axis parabolic mirror, third off-axis parabolic mirror, anti-is set in layer chamber
Penetrate grating, infrared acquisition light reflection mirror, infrared photoelectric detector and four-quadrant photo detector.Infrared photoelectric detector, four
Quadrant photodetector, laser controlling cable by probe draw and connect with the related circuit modular assembly in control cabinet.
The light beam that semiconductor laser with tunable is emitted in shell lower chamber is divided into three tunnels through fiber optic splitter, wherein one
The emergent light of road luminous energy and feux rouges instruction light source is coupled into same optical fiber by wavelength division multiplexer, and by FC/APC connectors with
Numerical aperture is that the light beam incidence of 0.14 size enters in the chamber of shell upper layer, and it is anti-that FC/APC connectors are located at the first off axis paraboloid mirror
The near focal point of mirror is penetrated, after light beam is turned back and collimated via the reflection of the first off-axis parabolic mirror in the chamber of shell upper layer
Outgoing is propagated towards corner reflector.All the way by being irradiated on the photosurface of infrared photoelectric detector and causing after reference gas chamber
Photo-signal, the road photosignal reference quantitative as gas sorption features linewidth parameters, gas concentration；Another way is direct
It is irradiated on the photosurface of infrared photoelectric detector and causes photo-signal, as the detection normalized reference of photosignal.
The surface of reflecting grating in the chamber light channel structure of shell upper layer is incident on by the reflected luminous energy of corner reflector.It is tunable partly to lead
The infrared acquisition light of body laser outgoing is detached with the instruction feux rouges of feux rouges instruction light source outgoing through reflecting grating；Indicate feux rouges
It is focused on after the reflection of the second off-axis parabolic mirror on the test surface of four-quadrant photo detector and causes photoelectric current
Signal；Infrared acquisition light focuses on infrared after two secondary reflections of the infrared acquisition light reflection mirror with third off-axis parabolic mirror
On the test surface of photodetector and cause photo-signal.
Corner reflector clear aperture is 100 millimeters.First off-axis parabolic mirror clear aperture is 19.8 millimeters, is inclined
It tiltedly places, normal direction is 45 ° with probe primary optical axis angular separation, the projection in the plane perpendicular to probe primary optical axis
For a diameter of 14 millimeters of border circular areas, blocked less than 2.5% to what reflecting grating generated.
As shown in Fig. 2, reflecting grating center is located at 53 millimeters of the first off-axis parabolic mirror central right, reflected light
The clear aperature of grid is 100 millimeters, and indentation density is 0.2 line/micron, reflecting grating with 52 ° of acute angle folded by x-axis direction
Orientation is placed, and the grating indentation of reflecting grating is facing towards positive direction of the y-axis.
Wherein the clear aperture of the second off-axis parabolic mirror is 88.1 millimeters, and center is located at reflecting grating center x
At 10.2 millimeters of axis negative direction, 178.8 millimeters of positive direction of the y-axis, focus be located at 104.6 millimeters of reflecting grating center positive direction of the x-axis,
At 54.4 millimeters of positive direction of the y-axis.
Four-quadrant photo detector is placed in before infrared beam converging focal point, and center is located at the reflection of the second off axis paraboloid mirror
At 103.2 millimeters of mirror positive direction of the x-axis, 112.1 millimeters of negative direction of the y-axis so that indicate the spot size and four-quadrant photoelectricity of feux rouges
The photosurface of detector is in the same size.
The clear aperture of infrared acquisition light reflection mirror is 41.4 millimeters, and center is located at reflecting grating center positive direction of the x-axis
101 ° of 75.5 millimeters, 217.4 millimeters of positive direction of the y-axis, normal direction and positive direction of the x-axis angle.Third off-axis parabolic mirror
Clear aperture be 42.5 millimeters, center is located at 62.5 millimeters of reflecting grating center positive direction of the x-axis, and negative direction of the y-axis 45.1 is in the least
At rice, focus is located at 92.1 millimeters of reflecting grating center positive direction of the x-axis, at 0.3 millimeter of negative direction of the y-axis.
Semiconductor laser with tunable driving circuit, semiconductor laser with tunable temperature control electricity are provided in control cabinet
Road, temperature sensing chip, pressure sensing chip, microcontroller, electrical servo cradle head control circuit, the acquisition of photodetector data
Circuit and display alarm module.Power supply provides supply of electric power for whole device.
The photic-energy transfer situation that four-quadrant photo detector is emitted onto its surface is converted into electric signal, before its inside
It sets and final gained digital signal is sent to microcontroller after amplifying circuit, filter circuit, second amplifying circuit and A/D converter
Device.After microcontroller handles information, the action of two axis servo motors in electrical servo holder is controlled first, with 5 degree/step
Precision to probe location carry out coarse adjustment.Then, this adjusting is based on as a result, infrared photoelectric detector obtains infrared acquisition light simultaneously
Infrared electro signal is generated into, photodetector data acquisition circuit is translated into the number that microcontroller can receive, identify
Signal simultaneously sends microcontroller to.Microcontroller combination hill-climbing algorithm, using characteristic absorption peak signal-to-noise ratio, spectral line line style etc. as mesh
Evaluation function is marked, probe is fine-tuned with the precision of 0.2 degree/step, it is until objective appraisal function reaches maximum value, i.e., complete
The adjusting popped one's head in pairs, at this time gained spectral signal be up to most preferably.
Semiconductor laser with tunable drive circuit module output driving sweep current under the control of the micro-controller, driving
Semiconductor laser with tunable outgoing laser beam.Semiconductor laser with tunable temperature-control circuit is under the control of the micro-controller
The operating temperature of real-time perception semiconductor laser with tunable simultaneously exports feedback current, stablizes the work of semiconductor laser with tunable
Make temperature.Temperature sensing chip and pressure sensing chip real-time perception environment temperature and pressure, and feedback signal is transmitted to micro-
Controller quantitatively calculates Temperature and Pressure Correction for gas concentration.Microcontroller will be measured in real time by display, alarm module
Obtained environmental pressure, temperature and under test gas concentration shown, and in gas concentration past due alarm value alarm.
Adaptively the advantageous effect of reflective infrared laser industrial hazard gas leakage local supervising and measuring equipment is：
（1）Adaptive reflective detecting devices in device places corner reflector in one end of light path, as transmitting light beam
Reflectance target, the light path other end be light beam sending and receiving one detection probe.Device is not only not necessarily to wireless telecommunications, is easily installed
And maintenance, so that absorption light path is expanded 1 times, improves the detectivity of device, gas concentration detection limit can reach 50ppm；
（2）Adaptive control system is introduced in device, ensure that probe aims at the real-time tracking of corner reflector, Ke Yiyou
Effect overcomes various unfavorable factors in site environment（Such as strong wind, vibration）Influence to device monitoring performance substantially increases dress
The applicability under severe site environment is set, application of the monitoring device under different industrial production environments is conducive to；
（3）Traditional optical tracking aiming control method is combined by adaptive control system with spectroscopic analysis methods, will
Tracking aiming control process is divided into coarse adjustment and fine-tunes two processes.Coarse adjustment passes through traditional four-quadrant photo detector
Feedback signal to probe horizontally rotate and pitch rotation carry out coarse adjustment；The spectrum based on acquisition is fine-tuned, extraction waits for
The characteristic absorpting spectruming line for surveying gas, using parameters such as the signal-to-noise ratio of spectral line, spectral line line styles as the evaluation function adjusted.This control
Regulative mode realizes the quickly calibrated of probe by coarse adjustment, and the response time is less than 3s, while fully taking into account acquired in probe
The quality of detecting light spectrum, and reached most preferably by fine-tuning, while quickly being adjusted to probe, effectively avoid
The distortion of acquired spectroscopic data ensure that the stability of gasmetry result, 5% of fluctuation less than full scale of measured value；
（4）It is integrated with feux rouges instruction light source in probe, and is entered together by wavelength division multiplexer and infrared acquisition light beam coupling
A piece optical fiber turns back via off-axis parabolic mirror, collimates outgoing.The light beam of two kinds of wave bands along identical paths, and
Aberration is not generated during outgoing so that indicates that the space propagation distribution character of red light beam can characterize infrared acquisition completely
The space propagation distribution character of light beam.Based on this effect, the reference beam that instruction feux rouges aims at centering as device may be used,
The shortcomings that overcoming infrared beam that can not be identified by people's naked eyes.For example, being provided with visual sight mirror on probe, instruction feux rouges passes through light
The road other end corner reflector reflection after received by visual sight mirror, operator by observe gun sight in feux rouges brightness,
The Shaft alignment state of probe and corner reflector can be judged roughly.On the one hand this design method facilitates appliance arrangement installation personnel to exist
When first device adjustment, complete that the preliminary centering for detecting light path is installed；On the other hand it in device normal use, maintains easily
Inspection of the personnel to device Shaft alignment state improves the maintenance efficiency to device；
（5）Device probe light channel structure is detached infrared acquisition light beam with instruction feux rouges using reflecting grating, due to
For reflecting grating using first-order diffraction as main light splitting means, light splitting while, effectively reduces the loss of signal light energy so that
Signal light loss of energy is less than 12dB；
（6）Off-axis parabolic mirror in upper layer module also acts converging action while turning back to light beam,
This kind design effectively reduces the component number in light path, while making optical path arrangement compact, makes full use of space, effectively subtracts
Small structural volume so that device probe is long to be less than 300 millimeters, and wide to be less than 250 millimeters, height is less than 200 millimeters, probe size
Small, light weight, can be with dexterous actions under the control of stepper motor；
（7）Reference gas chamber, pressure sensing chip and temperature sensing chip are integrated in probe, filled with certain in reference gas chamber
The standard under test gas of known concentration, device are identified using the spectral signal of reference gas chamber as to gas characteristic absorption line to be measured
The reference calculated with gas concentration, meanwhile, pressure sensing chip obtains the live atmospheric pressure of detection in real time with temperature sensing chip
With temperature, and be fed back to microcontroller, pressure when being calculated as gas concentration, temperature-compensating reference frame.This setting,
Adaptability of the device to environmental change is effectively increased, ensure that the accuracy that gas concentration calculates.It is dense that gas has been effectively ensured
Degree calculates 5% that error is less than full scale；
（8）Device ensures that the centering of detection light path aims at by adaptive tracing sighting system, by reference to gas chamber and temperature
Degree, pressure sensing chip eliminate interference of the environmental change to gas result of calculation.Through these means, false alarm rate is dropped for device
Low 30%, the strong guarantee validity of its real time monitoring realizes the low cost that installation is forgotten to a certain extent
Maintenance mode.
Description of the drawings
Fig. 1 is device-adaptive reflection type optical path schematic diagram.Fig. 2 is device probing shell upper layer chamber schematic top plan view.
In figure：1- visual sight mirrors；2- shells；3- shells upper layer chamber；4- shell lower chambers；5- optical fiber FC/APC connectors；6- waves
Division multiplexer；7- feux rouges indicates light source；8- beam splitters；9- reference gas chambers；10- infrared photoelectric detectors；11- tunable semiconductors
Laser；12- shell lower chamber signal cables；13- electrical servo cradle head control cables；14- shells upper layer chamber signal wire
Cable；15- electrical servo holders；16- corner reflectors.Wherein, optical fiber FC/APC connectors 5, wavelength division multiplexer 6, feux rouges indicate light source
7, beam splitter 8, reference gas chamber 9, infrared photoelectric detector 10 and semiconductor laser with tunable 11 are located at shell lower chamber 4
In.Infrared acquisition light in shell lower chamber 4 is incident on shell upper layer chamber with instruction feux rouges by optical fiber FC/APC connectors 5
3.The first off-axis parabolic mirrors of 18-；19- the first off-axis parabolic mirror fixing brackets；20- reflecting gratings；21- second
Off-axis parabolic mirror；22- infrared acquisition light reflection mirrors；23- third off-axis parabolic mirrors；24- infrared electros detect
Device；25- four-quadrant photo detectors.
Fig. 3 is device control cabinet schematic diagram.Wherein have display alarm module, power supply, photodetector data acquisition circuit,
Electrical servo cradle head control circuit, microcontroller, laser driving circuit, laser temperature control circuit, temperature sensing chip
And pressure sensing chip.
Fig. 4 is that coarse adjustment schematic diagram is installed in the initial centering of device-adaptive reflection type optical path.Operator first pacifies probe
Dress is fixed on electrical servo holder 15, is then observed by the reflected instruction feux rouges of corner reflector in visual sight mirror 1
And change 2 orientation of shell, and when the feux rouges that operator observes reaches most bright, fixed electrical servo holder 15 and 2 orientation of shell,
In this, as the Initial Azimuth for carrying out automatic adjusument to shell 2, that is, complete the initial installation and adjustment of light path.
Fig. 5 is device probe self adaptive control schematic diagram.Wherein instruction red signal light and infrared acquisition signal through collecting, meeting
It is respectively radiated on the photosurface of four-quadrant photo detector and infrared photoelectric detector after poly-；The light that two photodetectors generate
Current signal after pre-amplification circuit, filter circuit, second amplifying circuit and A/D conversion circuits respectively by being converted into number
Word signal simultaneously sends microcontroller to；Microcontroller to the control of servo motor in electrical servo holder by may be implemented holder
Horizontally rotate and pitch rotation, to realize to fix the probe in its carriage interface orientation adjust.
Specific implementation mode
As shown in FIG. 1 to 3, a kind of adaptive reflective infrared laser industrial hazard gas leakage monitoring device, it is wrapped
It includes：Visual sight mirror 1, shell 2, be set in shell 2 integrate laser red light beam and laser infrared detection light beam transmitting-receiving
Probe, electrical servo holder 15 and control cabinet.Probe is mounted on electrical servo holder 15.Probe is watched with electronic
Take the related circuit modular assembly connection in the control line and control cabinet in 15 controlling cable of holder.Electrical servo holder 15 uses
Worm Wheel System mode is driven, own water two degree of freedom of gentle vertical direction by two axis servo motors.By being watched to electronic
Take servo motor in holder 15 control may be implemented electrical servo holder 15 horizontally rotate and pitch rotation, to realize pair
The orientation for the shell 2 being fixed thereon is adjusted.
As shown in Figure 1, adaptive reflective infrared laser industrial hazard gas leakage monitoring device further includes corner reflector
16, corner reflector 16 is respectively placed in the both ends of detection light path with probe, and the two is at a distance of 100 meters.Shell 2 includes shell upper layer chamber
3 with shell lower chamber 4.Shell lower chamber 4 includes wavelength division multiplexer 6, feux rouges instruction light source 7, beam splitter 8, reference gas
Room 9, infrared photoelectric detector 10 and semiconductor laser with tunable 11.Shell lower chamber 4 includes the first off axis paraboloid mirror
Speculum 18, the second off-axis parabolic mirror 21, third off-axis parabolic mirror 23, reflecting grating 20, infrared acquisition light
Speculum 22, infrared photoelectric detector 24 and four-quadrant photo detector 25.
As shown in Figure 1, for the ease of the initial installation of probe, feux rouges instruction is integrated in the shell lower chamber 4 of device
Light source 7, and its red light beam is coupled into the light path in shell upper layer chamber 3 by wavelength division multiplexer 6.Tail optical fiber end face is logical
Optical fiber FC/APC connectors 5 are crossed fixed in shell upper layer chamber 3.Operator opens the installation's power source in control cabinet, opens feux rouges
Indicate that light source 7, red light beam are emitted through tail optical fiber end face with 0.14 numerical aperture.As shown in Fig. 2, optical fiber FC/APC connectors 5
Tail optical fiber end face is placed in the near focal point of the first off-axis parabolic mirror 18, and the red light beam of outgoing passes through the first off axis paraboloid mirror
Speculum 18 turns back, collimate after continue towards corner reflector 16 in Fig. 1 of the light path other end and propagate.Due to beam exit end face with
The focus of first off-axis parabolic mirror 18 is not completely superposed, and the light beam of corner reflector 16 will remain with micro- in directive Fig. 1
The small angle of divergence, when indicating that red light beam reaches corner reflector 16 in Fig. 1, spot size and 16 mouthfuls of corner reflector in Fig. 1
Diameter is equal in magnitude.Incident beam is emitted after the reflection of corner reflector in Fig. 1 16 with identical small divergence angle, reflected
When light beam reaches probe, spot diameter size is more than the sum of Transmit-Receive Unit bore and 1 bore of visual sight mirror in Fig. 1.This is red
Light light beam most of luminous energy after the reflection of corner reflector in Fig. 1 16 is collected by probing shell upper layer chamber 3, and fraction luminous energy enters
Visual sight mirror 1 in Fig. 1.
As shown in figure 4, the installation of shell 2 is fixed on electrical servo holder 15 by operator first, then in visual sight
Observation by 16 reflected instruction feux rouges of corner reflector and changes probe location in mirror 1, when the feux rouges that operator observes reaches
To it is most bright when, the orientation of fixed electrical servo holder 15 and shell 2, in this, as the starting for carrying out automatic adjusument to shell 2
The initial installation and adjustment of light path are completed in orientation.
As shown in Figure 1, operator opens in semiconductor laser with tunable 11, electrical servo holder 15 and control cabinet respectively
Circuit module component.The infrared acquisition light beam that semiconductor laser with tunable 11 in shell lower chamber 4 exports passes through
Its tail optical fiber reaches beam splitter 8, and is divided into three tunnels.It shines directly into all the way 10 on infrared photoelectric detector；Enter reference all the way
Gas chamber 9；The red light beam exported all the way through wavelength division multiplexer 6 and feux rouges instruction light source 7 is coupled into same root optical fiber, and through solid
It is scheduled on 5 end face of FC/APC connectors on shell upper layer chamber 3, is emitted with 0.14 numerical aperture.As shown in Fig. 2, red with instruction
Light light beam is the same, and infrared acquisition light is after the first off-axis parabolic mirror 18 is turned back, collimated in directive light path other end Fig. 1
Corner reflector 16, reach 16 back reflection of corner reflector in Fig. 1 and return and enter in the shell upper layer chamber 3 popped one's head in Fig. 1.
As shown in Fig. 2, being irradiated with infrared acquisition light beam by the 16 reflected instruction red light beam of corner reflector in Fig. 1
To 20 surface of reflecting grating, due to the spectroscopic property of reflecting grating 20, the light beam quilt of both used different wave lengths of device
It separates.Instruction red light beam directive the second off-axis parabolic mirror 21 and be collimated, assemble after be irradiated to four-quadrant light
25 surface of electric explorer generates photo-signal.Infrared acquisition light beam elder generation directive infrared acquisition light reflection mirror 22, directive after turning back
Third off-axis parabolic mirror 23, and be collimated, assemble after be irradiated to 24 surface of infrared photoelectric detector, generate photoelectric current letter
Number.
As shown in Fig. 2, 20 center of reflecting grating is located at 53 millimeters of 18 center positive direction of the x-axis of the first off-axis parabolic mirror
Place, the clear aperature of reflecting grating 20 are 100 millimeters, and indentation density is 0.2 line/micron, reflecting grating 20 with x-axis direction
The orientation that 52 ° of folded acute angle is placed, and the grating indentation of reflecting grating 20 is facing towards positive direction of the y-axis.First off axis paraboloid mirror reflects
Mirror clear aperture is 19.8 millimeters, and slant setting, reflecting surface normal direction and negative direction of the x-axis angle are 45 °, vertical
In being projected as a diameter of 14 millimeters of border circular areas in the plane of x-axis, blocked less than 2.5% to what reflecting grating 20 generated.
The instruction feux rouges that the infrared acquisition light that semiconductor laser with tunable 11 is emitted in Fig. 1 is emitted with feux rouges instruction light source is through reflected light
Grid 20 are detached, and instruction feux rouges focuses on four-quadrant photo detector 25 after the reflection of the second off-axis parabolic mirror 21
Test surface on and cause photo-signal, wherein the clear aperture of the second off-axis parabolic mirror 21 is 88.1 millimeters,
Center is located at 10.2 millimeters of 20 center negative direction of the x-axis of reflecting grating, at 178.8 millimeters of positive direction of the y-axis, and focus is located at reflecting grating
At 20 104.6 millimeters of center positive direction of the x-axis, 54.4 millimeters of positive direction of the y-axis.Four-quadrant photo detector 25 is placed in infrared beam meeting
Before focus point, center is located at 103.2 millimeters of 21 center positive direction of the x-axis of the second off-axis parabolic mirror, negative direction of the y-axis
At 112.1 millimeters so that indicate that the photosurface of the spot size and four-quadrant photo detector 25 of feux rouges is in the same size.Infrared spy
Light is surveyed through focusing on infrared light electrical resistivity survey after two secondary reflections of infrared acquisition light reflection mirror 22 and third off-axis parabolic mirror 23
Photo-signal is surveyed on the test surface of device 24 and causes, the wherein clear aperture of infrared acquisition light reflection mirror 22 is 41.4 millimeters,
Its center is located at 75.5 millimeters of reflecting grating center positive direction of the x-axis, 217.4 millimeters of positive direction of the y-axis, and normal direction is square with x-axis
To 101 ° of angle.The clear aperture of third off-axis parabolic mirror 23 is 42.5 millimeters, and center is located in reflecting grating 20
62.5 millimeters of heart positive direction of the x-axis, at 45.1 millimeters of negative direction of the y-axis, focus is located at 20 center positive direction of the x-axis of reflecting grating, 92.1 milli
At rice, 0.3 millimeter of negative direction of the y-axis.
Using the direction represented by the reference axis in Fig. 2 as referring to direction, and by chief ray incident point in reflecting grating 20
As origin, unit is millimeter, on the second off-axis parabolic mirror 21 coordinate of chief ray incident point be (- 10.2,
178.8), the direction vector of outgoing chief ray is represented by（0.68,-0.73）；Chief ray on infrared acquisition light reflection mirror 22
The coordinate of incidence point is（75.5,217.4）, outgoing chief ray direction vector be represented by（0.05,0.999）；Third from
The coordinate of chief ray incident point is on axis parabolic mirror 23（62.5,-45.1）, the direction vector of outgoing chief ray can table
It is shown as（0.55,0.83）；25 center of four-quadrant photo detector and the coordinate at 24 center of infrared photoelectric detector are respectively（93,
66.7）With（92,-0.3）, two detector photosurface normal directions are off-axis with the second off-axis parabolic mirror 21 and third respectively
The chief ray direction of 23 outgoing beam of parabolic mirror is consistent.
Semiconductor laser with tunable 11 in Fig. 2 mid-infrared lights electric explorer 24, four-quadrant photo detector 25, Fig. 1
Controlling cable is drawn by probe and is connect with the related circuit modular assembly in Fig. 3 in control cabinet.
If there are under test gas, the portion of energy of infrared acquisition light beam to be absorbed in the light path in open path, most
Corresponding characteristic absorption peak, and the original spectral data calculated as gas concentration are shown eventually.As shown in Figure 1, direct irradiation
Normalization of the photo-signal as under test gas absorption spectrum caused by light beam all the way on to infrared photoelectric detector 10
With reference to being influenced caused by the shake of 11 light energy output of semiconductor laser with tunable for eliminating.By reference to the one of gas chamber 9
The reference standard that photo-signal is calculated as under test gas concentration caused by the light source of road, for the concentration of under test gas into
Row exact inversion calculates.
As shown in figure 3, the pressure sensing chip in control cabinet obtains the air of monitoring field with temperature sensing chip in real time
Pressure and environment temperature, and data measured is real-time transmitted to microcontroller, pressure, temperature-compensating when being calculated as gas concentration
Modified reference frame.Under test gas concentration is finally calculated in microcontroller, and is shown by display, alarm module.
When under test gas concentration is more than default early warning value, then show, alarm module will be carried out to dangerous situation and alarm.
As shown in figure 5, the photic-energy transfer situation that four-quadrant photo detector is emitted onto its surface is converted into electric signal,
It will final gained digital signal after its internal pre-amplification circuit, filter circuit, second amplifying circuit and A/D converter
It is sent to microcontroller.After microcontroller handles information, two axis servo motors in electrical servo holder are controlled first
Action carries out coarse adjustment with the precision of 5 degree/step to probe location.Then, based on this adjusting as a result, infrared photoelectric detector obtains
It takes infrared acquisition light and generates into infrared electro signal, photodetector data acquisition circuit is translated into microcontroller and can connect
Receipts, the digital signal of identification simultaneously send microcontroller to.Microcontroller combination hill-climbing algorithm, with characteristic absorption peak signal-to-noise ratio, spectrum
Line line style etc. is used as objective appraisal function, is fine-tuned to probe with the precision of 0.2 degree/step, until objective appraisal function
Reach maximum value, that is, complete the adjusting to probe, gained spectral signal is up to most preferably at this time.
The principle prototype of the adaptive reflective infrared laser industrial hazard gas leakage monitoring device, which passes through, is up to half a year
Test run show this kind of device effectively overcome monitoring field various environmental factors interference, in real time keep detection light path
Centering aim at, and obtain the spectroscopic data of high quality.Device is to live under test gas（Such as methane, acetylene）Concentration calculates inclined
Difference is below the 5% of full scale with fluctuation, false alarm rate and similar open type infrared laser industrial hazard gas leakage monitoring device
It compares, reduces 30%.
Claims (7)
1. a kind of adaptive reflective infrared laser industrial hazard gas leakage monitoring device, it includes shell and is arranged in shell
Visual sight mirror above body, it is characterized in that there is the collection laser red light beam being set in shell to be received with laser infrared detection light beam
It sends out in the probe of one, further includes electrical servo holder and control cabinet, shell is set on electrical servo holder, probe and electricity
Dynamic servo console and control cabinet electrical connection；Further include corner reflector, corner reflector is respectively placed in the two of detection light path with probe
End；Corner reflector is coaxial with the chief ray of the first off-axis parabolic mirror outgoing beam in the chamber of shell upper layer；Corner reflector
Clear aperture is 100 millimeters；Shell includes shell upper layer chamber and shell lower chamber；Wavelength-division is set in shell lower chamber
Multiplexer, feux rouges instruction light source, fiber optic splitter, reference gas chamber, infrared photoelectric detector and semiconductor laser with tunable；
First off-axis parabolic mirror, the second off-axis parabolic mirror, third off axis paraboloid mirror are set in the chamber of shell upper layer
Speculum, reflecting grating, infrared acquisition light reflection mirror, infrared photoelectric detector and four-quadrant photo detector；Infrared electro
Detector, four-quadrant photo detector, laser controlling cable by probe draw and with the related circuit module in control cabinet
Component connects.
2. adaptive reflective infrared laser industrial hazard gas leakage monitoring device according to claim 1, feature
It is that the light beam that semiconductor laser with tunable is emitted in shell lower chamber is divided into three tunnels through fiber optic splitter, wherein luminous energy all the way
It indicates that the emergent light of light source is coupled into same optical fiber by wavelength division multiplexer with feux rouges, and is entered by FC/APC connector incidences
In the chamber of shell upper layer, FC/APC connectors are located at the near focal point of the first off-axis parabolic mirror, and light beam is via shell upper layer
The reflection of the first off-axis parabolic mirror in chamber is turned back and is emitted after collimating, and is propagated towards corner reflector；Another way is logical
It is irradiated on the photosurface of infrared photoelectric detector and causes photo-signal after crossing reference gas chamber, the road photosignal is as gas
The quantitative reference of body Absorption Characteristics linewidth parameters, gas concentration；The photosensitive of infrared photoelectric detector is also shone directly into all the way
On face and cause photo-signal, as the detection normalized reference of photosignal；Entered by the reflected luminous energy of corner reflector
It is mapped to the surface of reflecting grating in the chamber light channel structure of shell upper layer；Semiconductor laser with tunable outgoing infrared acquisition light with
The instruction feux rouges of feux rouges instruction light source outgoing is detached through reflecting grating；Indicate feux rouges by the second off-axis parabolic mirror
It is focused on after reflection on the test surface of four-quadrant photo detector and causes photo-signal；Infrared acquisition light is through infrared acquisition light
It focuses on the test surface of infrared photoelectric detector and causes after speculum and two secondary reflections of third off-axis parabolic mirror
Photo-signal.
3. adaptive reflective infrared laser industrial hazard gas leakage monitoring device according to claim 1, feature
The clear aperture for being the first off-axis parabolic mirror is 19.8 millimeters；First off-axis parabolic mirror slant setting, it is anti-
It is 45 ° that face normal direction, which is penetrated, with probe primary optical axis angular separation, and one is projected as in the plane perpendicular to probe primary optical axis
A diameter of 14 millimeters of border circular areas is blocked to what reflecting grating generated less than 2.5%.
4. adaptive reflective infrared laser industrial hazard gas leakage monitoring device according to claim 1, feature
It is that reflecting grating center is located at 53 millimeters of the first off-axis parabolic mirror central right, the clear aperature of reflecting grating is
100 millimeters, indentation density is 0.2 line/micron, 52 ° of placements of grating planar and x-axis direction angle of reflecting grating.
5. adaptive reflective infrared laser industrial hazard gas leakage monitoring device according to claim 1, feature
The clear aperture for being wherein the second off-axis parabolic mirror is 88.1 millimeters, and center is located at reflecting grating center x-axis losing side
To at 10.2 millimeters, 178.8 millimeters of positive direction of the y-axis, focus is being located at 104.6 millimeters of reflecting grating center positive direction of the x-axis, y-axis just
At 54.4 millimeters of direction；The clear aperture of third off-axis parabolic mirror is 42.5 millimeters, and center is located in reflecting grating
62.5 millimeters of heart positive direction of the x-axis, at 45.1 millimeters of negative direction of the y-axis, focus is located at 92.1 milli of reflecting grating center positive direction of the x-axis
At rice, 0.3 millimeter of negative direction of the y-axis.
6. adaptive reflective infrared laser industrial hazard gas leakage monitoring device according to claim 1, feature
It is that four-quadrant photo detector is placed in before feux rouges instruction light source converging focal point, center is located at the reflection of the second off axis paraboloid mirror
At 103.2 millimeters of mirror positive direction of the x-axis, 112.1 millimeters of negative direction of the y-axis so that indicate the spot size and four-quadrant photoelectricity of feux rouges
The photosurface of detector is in the same size.
7. adaptive reflective infrared laser industrial hazard gas leakage monitoring device according to claim 1, feature
The clear aperture for being infrared acquisition light reflection mirror is 41.4 millimeters, and center is located at 75.5 milli of reflecting grating center positive direction of the x-axis
101 ° of rice, 217.4 millimeters of positive direction of the y-axis, normal direction and positive direction of the x-axis angle.
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| CN107860741A (en) * | 2017-09-19 | 2018-03-30 | 中国科学院紫金山天文台 | The integrating device and method of thermoelectron frequency mixer and Terahertz quantum cascaded laser |
| CN107727584A (en) * | 2017-09-25 | 2018-02-23 | 国网重庆市电力公司电力科学研究院 | Gas on-line monitoring method in a kind of high-voltage switch gear |
| CN107727585A (en) * | 2017-09-25 | 2018-02-23 | 国网重庆市电力公司电力科学研究院 | A kind of gas controlling device applied to high-voltage switch gear |
| CN108982399B (en) * | 2018-07-09 | 2021-04-06 | 安徽建筑大学 | Flue ammonia concentration laser on-line measuring system |
| CN110161041A (en) * | 2019-05-05 | 2019-08-23 | 长春理工大学 | A kind of test device for monitoring the damage from laser moment on-line |
| CN112902028B (en) * | 2019-12-03 | 2022-05-10 | 中国石油天然气股份有限公司 | Leak detection system |
| CN111122499B (en) * | 2019-12-27 | 2021-09-17 | 山东大学 | Radial plume multi-component gas measurement remote sensing system |
| US11674894B2 (en) * | 2020-04-24 | 2023-06-13 | Honeywell International Inc. | Methods, apparatuses, and systems for diagnosing misalignment in gas detecting devices |
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| JPS5664646A (en) * | 1979-10-31 | 1981-06-01 | Fujitsu Ltd | Gas concentration detection method |
| CN101694460B (en) * | 2009-10-16 | 2011-02-09 | 东南大学 | Self-adaptive differential absorption spectrum measuring method of concentration of flue gas pollutants and device |
| US20120170043A1 (en) * | 2010-09-09 | 2012-07-05 | Adelphi University | Sensitive and Compact Sensor Employing a Visible Diode Laser and A High Finesse Optical Cavity for Trace Gas Detection (NO2) |
| CN104007069B (en) * | 2014-05-20 | 2017-04-19 | 中国科学院合肥物质科学研究院 | Differential optical absorption spectroscopy measurement system based on off-axis paraboloid mirror |
| CN104132911B (en) * | 2014-08-04 | 2017-01-11 | 中国科学院合肥物质科学研究院 | Open type long optical distance CO and CH4 online testing instrument |
| CN104596987A (en) * | 2015-02-03 | 2015-05-06 | 中国科学院合肥物质科学研究院 | Mid-infrared spectroscopy-based trace gas detection method and device combining long-optical-path open light path with wavelength modulation technique |
| CN105510275B (en) * | 2015-12-01 | 2018-06-15 | 山东省科学院激光研究所 | Portable more gas remote measurement devices |
| CN205958454U (en) * | 2016-07-08 | 2017-02-15 | 山东微感光电子有限公司 | Dangerous gas monitoring device that leaks of reflective infrared laser industry of self -adaptation |
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Denomination of invention: Adaptive reflective infrared laser industrial hazardous gas leakage monitoring device Effective date of registration: 20230329 Granted publication date: 20180907 Pledgee: Branches of Jinan Rural Commercial Bank Co.,Ltd. Pledgor: SHANDONG MICRO PHOTOGRAPHIC ELECTRONIC Co.,Ltd. Registration number: Y2023980036744 |