CN106017303B - 校正白光相移干涉仪中的条纹级次的误差的方法 - Google Patents

校正白光相移干涉仪中的条纹级次的误差的方法 Download PDF

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CN106017303B
CN106017303B CN201610179390.2A CN201610179390A CN106017303B CN 106017303 B CN106017303 B CN 106017303B CN 201610179390 A CN201610179390 A CN 201610179390A CN 106017303 B CN106017303 B CN 106017303B
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interference signal
zero level
phase
white light
location index
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CN106017303A (zh
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玄昌洪
金星龙
朴喜载
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SNU Precision Co Ltd
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SNU Precision Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
CN201610179390.2A 2015-03-26 2016-03-25 校正白光相移干涉仪中的条纹级次的误差的方法 Active CN106017303B (zh)

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KR10-2015-0042176 2015-03-26
KR1020150042176A KR101637252B1 (ko) 2015-03-26 2015-03-26 백색광 위상천이 간섭계의 간섭신호 차수 오차 보정방법

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CN106017303A CN106017303A (zh) 2016-10-12
CN106017303B true CN106017303B (zh) 2019-04-19

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KR (1) KR101637252B1 (ko)
CN (1) CN106017303B (ko)
TW (1) TWI598568B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106767497B (zh) * 2016-11-24 2018-11-27 中国民航大学 一种白光干涉轮廓仪空间扫描范围自适应规划方法
CN108662992B (zh) * 2017-03-31 2020-10-16 均豪精密工业股份有限公司 表面量测方法及表面量测系统
CN110530287B (zh) * 2019-08-26 2021-01-19 西安交通大学 基于条纹级数不准度的解包裹相位误差检测与校正方法
CN113029366B (zh) * 2021-03-11 2022-09-23 深圳中科飞测科技股份有限公司 零相位差位置寻找方法、扫描系统及存储介质

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101087991A (zh) * 2004-12-22 2007-12-12 国立大学法人电气通信大学 三维形状测量装置
CN103791853A (zh) * 2014-01-20 2014-05-14 天津大学 基于彩色条纹信息处理的微结构测量系统及测量方法
TW201502472A (zh) * 2013-02-12 2015-01-16 Zygo Corp 採用表面顏色之表面形貌干涉儀

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4132365B2 (ja) * 1999-03-15 2008-08-13 フジノン株式会社 複数波長を用いた干渉縞測定における解析的縞補正方法
KR101239409B1 (ko) 2012-07-12 2013-03-05 주식회사 엠엠티 ２ｄ 형상 정보와 ３ｄ 형상 정보의 동시 획득이 가능하며 레이저와 백색광을 광원으로 한 위상천이기반 형상측정장치 및 형상측정방법

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101087991A (zh) * 2004-12-22 2007-12-12 国立大学法人电气通信大学 三维形状测量装置
TW201502472A (zh) * 2013-02-12 2015-01-16 Zygo Corp 採用表面顏色之表面形貌干涉儀
CN103791853A (zh) * 2014-01-20 2014-05-14 天津大学 基于彩色条纹信息处理的微结构测量系统及测量方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
基于白光干涉彩色图像的微结构表面形貌测量;郭彤 等;《光学学报》;20140228;第34卷(第2期);第0212003-1页第1段至第0212003-3页最后一段、第0212003-5页第6段至第0212003-6页最后一段及附图1-3、6-8
微表面形貌大视场检测相移显微干涉仪研制;张红霞 等;《光电子 激光》;20060831;第17卷(第8期);第934-936页

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KR101637252B1 (ko) 2016-07-07
TWI598568B (zh) 2017-09-11
CN106017303A (zh) 2016-10-12
TW201634900A (zh) 2016-10-01

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