CN106003998A - Process specification method for forming stripping device - Google Patents

Abstract

The invention relates to a method for forming a stripping device for stripping two plate-shaped members in close contact with each other. The plurality of strippers are separated from a first plate-like body by separating movement in a direction away from the first plate-like body while holding a second plate-like body, so that the first plate-like body is stripped off. With the stripper at the most downstream side in the stripping direction in the strippers as the main stripping main body, the method comprises: a first step (steps S205 to S207) of determining, for each stripper, a period during which the stripper is a main stripping main body and determining a moving speed of the stripper in the separating direction during the period; in a second step (steps S209 to S215), for each stripper, based on the moving speed of the other strippers after the stripper is not the main stripping main body, the moving speed of the stripper not being the main stripping main body in the separating direction during the period is calculated.

Description

The technological procedure creating method of stripping off device

Technical field

The present invention relates to the process technological procedure of a kind of stripping off device being made and making two plate bodys being mutually close to peel off (recipe) method.

Background technology

As forming pattern or the technology of thin film on the plate body such as glass substrate or semiconductor substrate, there is a kind of skill Pattern or thin film (hereinafter referred to as " pattern etc. ") that other plate body is supported by art are transferred to substrate.With regard to this technology Speech, make two plate bodys be close to by pattern etc. after one is transferred to another one, need in the feelings not damaging pattern etc. Under condition, two plate bodys are peeled off.

Such as, patent documentation 1 has been recorded a kind of technology applied to realize this purpose.For this technology, It is close to body by what the first plate body being mutually close to and the second plate body were constituted, is held in load by the first plate body is adsorbed On thing platform, it is retained as flat-hand position.And, the multiple detachers being arranged in the second tabular side support with the second plate body successively Connecing, keeping the second plate body, while moving to the direction away from the first plate body, thus the first plate body and the second tabular The peeling direction to regulation of peeling off between body is carried out.Now, abutting member abuts with the surface of the second plate body, on one side Move to peeling direction, thus peel off with certain speed.

Patent documentation 1:JP JP 2014-189350 publication

In the case of being supported with pattern etc. between maximization and/or two plate bodys of the size of plate body, root sometimes The quantity of the detacher that the increase and decrease such as the difference according to clinging force is arranged and/or interval.It addition, in order to make stripping carry out well, have Shi Bixu will peel off after plate body between interarea between angulation maintain appropriate value.In order to reach these purposes, need Multiple detacher is made to be properly reconciled action.In the above prior art, detacher negligible amounts is set, their interval The biggest.Therefore, it is easier to use and such as makes device learn each detacher beforehand through teaching (teaching) work The method etc. on mobile opportunity adjusts action.But, when detacher arrange quantity become many time, such adjustment work becomes non- The most complicated.

Therefore, although seek, according to using material and purpose etc., to be made simply for making multiple detacher coordination The method of process technological procedure, but such method is not the most established.

Summary of the invention

The present invention proposes in view of the above problems, its object is to, it is provided that a kind of technological procedure creating method, the party Method is in the stripping off device that two plate bodys making mutually to be close to are peeled off, it is possible to optimize the action of each detacher simply.

One technical scheme of the present invention is a kind of the first plate body making mutually to be close to and the stripping of the second plate body stripping From the technological procedure creating method of device, in order to reach described purpose, described stripping off device has multiple detacher, multiple strippings Device is respectively provided with and abuts the function keeping described second plate body with described second plate body local, and multiple detacher edge The peeling direction arrangement of regulation, the plurality of detacher keeps described second according to the order along described peeling direction Plate body, carries out separate mobile to the detaching direction away from described first plate body, thus make described second plate body from Described first plate body is peeled off, the described detacher that described second plate body will be kept to move to described detaching direction In the described detacher of the most downstream side being positioned in described peeling direction be defined as main stripping main body, this technological procedure side of being made Method includes: the first operation, for detacher each described, determines this detacher period as described main stripping main body, obtains During this period, this detacher is to the translational speed of described detaching direction, the second operation, for detacher each described, based on This detacher becomes the shifting not being the period after described main stripping main body as other described detachers of described main stripping main body Dynamic speed, obtain become be not this detacher of described main stripping main body during this period to the translational speed of described detaching direction.

In the technical scheme so constituted, multiple detacher co-ordinations, the most multiple detachers are according to along stripping Order from direction moves to detaching direction successively, is thus peeled off from the first plate body by the second plate body.Now, multiple strippings Device keeps the second plate body while moving to detaching direction simultaneously.These detachers are close to the of state for being in The detacher that the stripping of one plate body and the second plate body plays a major role is positioned at the most downstream side in peeling direction, is i.e. positioned at Position near the unstripped region of the first plate body and the second plate body.This detacher is referred to as " main stripping master herein Body ".Along with the advance of peeling action, as the role of main stripping main body to the detacher transition in the downstream of peeling direction.

According to the opinion of present inventor, the first plate body that the quality of stripping is mutually close to and the second plate body Relative velocity during separation and angulation impact between the first plate body at that time and the interarea of the second plate body.Cause This, need to control above-mentioned speed and angle rightly while peeling off.The representation of concept of the quality peeled off in addition, When peeling off the first plate body and the second plate body, or it is supported with the situation of pattern etc. on these plate bodys between the two Under, it is possible to which kind of degree the damage or the stress that cause this pattern etc. are suppressed to.

It is main that determine above-mentioned speed and angle is the detacher becoming main stripping main body.In this sense, for Action at this detacher of the period as main stripping main body, it is possible in the range of the condition that satisfied stripping is advanced well Set, and do not affected by the action of other detacher.Therefore, in first operation of the present invention, it is first determined each detacher Play the period of the function of main stripping main body, obtain at this detacher during this period to the translational speed of detaching direction.So, energy The advance of the stripping of the period of enough functions managed rightly in each detacher main stripping main body of performance, before making stripping well Enter.

On the other hand, become playing the merit of main stripping main body when other the detacher being positioned at further downstream in peeling direction Can time, in order to utilize this main stripping main body to peel off well, it is desirable to have finished on as the work of main stripping main body Detacher plays the second plate body making to peel away from the first plate body and keeps the function of appropriate posture.In this sense, Need the action making the action of such detacher be set as being subordinated to main stripping main body.Therefore, in second operation of the present invention In, the translational speed of detacher based on the function playing main stripping main body, determine the translational speed of each detacher.So, energy The detacher enough utilizing other assists the detacher of the function playing main stripping main body to peel off effectively.

The effect of invention

As it has been described above, in the present invention, the first operation is obtained the function playing main stripping main body at each detacher The translational speed of this detacher of period.Then, in the second operation, based on the function not playing main stripping main body at each detacher Period play the translational speed of detacher of function of main stripping main body, obtain each stripping of the function not playing main stripping main body From device in translational speed during this period.According to the invention it is thus possible to be made the action optimization making each detacher simply Process technological procedure.

Accompanying drawing explanation

Fig. 1 is the axonometric chart of an embodiment of the stripping off device illustrating the present invention.

Fig. 2 is the axonometric chart of the primary structure illustrating this stripping off device.

Fig. 3 is the side view of the position relationship illustrating the initial structure peeling off unit and each several part.

Fig. 4 is the block diagram of the electrical structure illustrating this stripping off device.

Fig. 5 A, Fig. 5 B, Fig. 5 C, Fig. 5 D are to be shown in the figure of the action of each several part during peeling action.

Fig. 6 A, Fig. 6 B, Fig. 6 C are the figures configuring the different example of pattern illustrating absorbing unit.

Fig. 7 A, Fig. 7 B are the figures illustrating roller unit with the position relationship of absorbing unit.

Fig. 8 is the flow chart of the sequence of movement illustrating each absorbing unit.

Fig. 9 A, Fig. 9 B, Fig. 9 C, Fig. 9 D, Fig. 9 E are the figures illustrating stripper roll with the position relationship of absorbing unit.

Figure 10 is the sequential chart of the action illustrating stripper roll and absorbing unit.

Figure 11 A, Figure 11 B, Figure 11 C are the figures of the peeling action schematically illustrating multiple absorbing unit.

Figure 12 is the sequential chart of the action of the multiple absorption layers illustrating linkage.

Figure 13 is the figure illustrating an example by processing the visual detail list of technological procedure.

Figure 14 is the flow chart being made process illustrating and processing technological procedure.

Figure 15 is the figure schematically illustrating a stage in peeling action.

Figure 16 is the figure of the action decision order illustrating absorption layer.

Figure 17 A, Figure 17 B, Figure 17 C, Figure 17 D be illustrate the configuration example of the stripping off device being not provided with stripper roll and its move The figure made.

Figure 18 is the figure of the structure illustrating the control program for performing peeling action.

Figure 19 is the flow chart of the process content illustrating proving program.

Figure 20 A, Figure 20 B, Figure 20 C are the figures of the example illustrating display picture.

Figure 21 A, Figure 21 B, Figure 21 C are the figures illustrating absorption layer with the position relationship of substrate.

Wherein, description of reference numerals is as follows:

1 stripping off device

51～5N absorbing units (detacher)

70 control units

340 stripper roll (roller component)

517～5N7 absorption layers (detacher)

701 CPU

721 proving programs

BL blanket (the first plate body)

SB substrate (the second plate body)

Detailed description of the invention

Fig. 1 is the axonometric chart of an embodiment of the stripping off device illustrating the present invention.In order to illustrate uniformly in each figure Direction, as shown in Fig. 1 right lower quadrant, set XYZ orthogonal axis.Here, X/Y plane represents horizontal plane.It addition, Z axis represents Vertical axle, in further detail,-Z direction represents vertical downwardly direction.

This stripping off device 1 is the device for making two plate bodys moved into when interarea is mutually close to peel off. Such as, it is applied to be formed the pattern forming technology of the pattern of regulation on the surface of the substrate such as glass substrate or semiconductor substrate (process) in a part.More specifically, in this pattern forming technology, at the blanket as carrying body (blanket) uniformly application pattern forms material, as temporarily supporting by should on the blanket of carrying body It is transferred to the pattern (working procedure of coating) of the substrate as transfer printing body.Then, add by surface will have been carried out according to pattern form The version of work is urged to the overlay on blanket, carrys out pattern-forming overlay (pattern-forming operation).Thus, make to define pattern Blanket and substrate be close to (transfer printing process), thus final pattern is transferred to substrate from blanket.

Now, in order to reach make the version being close in pattern-forming operation and blanket separated from one another or make clamper The purpose that the substrate being close in sequence is separated from one another with blanket, it is possible to preferably apply this device.Can of course be used for both Situation, it is also possible to for purposes in addition.Can also apply to such as when film transfer carrying body supported is to base Stripping technology during plate.The technique peeling off other two plate bodys abutting directly on or being close to across thin layers such as thin film can Apply this device.

Object stage functional device 3 and the top adsorption function block 5 of this stripping off device 1 are individually fixed on main frame 11, should Main frame 11 is installed on casing.In FIG, in order to represent the internal structure of device, omit the diagram of casing.It addition, except upper Beyond each functional device stated, this stripping off device 1 has control unit 70 (Fig. 4) described later.

Object stage functional device 3 has is close to body for load that version and blanket or substrate and blanket be close to The object stage 30 of (hereinafter referred to as " workpiece ").Object stage 30 has horizontal moving load part 31 He that upper surface is approximate horizontal plane Upper surface is for respect to the horizontal plane having the taper moving load part 32 of the plane of the inclination in several years (such as about 2 degree).At object stage Taper moving load part 32 side of 30, i.e. be provided with initial stripping unit 33 near the end of-Y side.It addition, to stride across horizontal moving load part 31 Mode be provided with roller unit 34.

On the other hand, top adsorption function block 5 has support frame 50, this support frame 50 erect from main frame 11 and Cover the top of object stage functional device 3.Support frame 50 is provided with N group (N is natural number) absorbing unit 51,52, 53、……、5N.These absorbing units 51～5N are arranged in order to +Y direction.Hereinafter, needing to distinguish the situation of each absorbing unit Under, " the i-th absorbing unit " will be referred to as to i-th (i is natural number) the absorbing unit 5i of +Y direction number.

Fig. 2 is the axonometric chart of the primary structure illustrating this stripping off device.More specifically, Fig. 2 illustrates each of stripping off device 1 Object stage 30, roller unit 34 and the structure of the i-th absorbing unit 5i in structure.Object stage 30 has upper surface 310 for substantially The horizontal moving load part 31 of horizontal plane and the taper moving load part that upper surface 320 is the taper surface being inclined relative to horizontal the several years 32.The upper surface 310 of horizontal moving load part 31 has the planar dimension more bigger than the planar dimension of placed workpiece.

-Y the side end of taper moving load part 32 and horizontal moving load part 31 is close to arrange.The upper surface of this taper moving load part 32 320 parts being connected with horizontal moving load part 31 are positioned at the height identical with the upper surface 310 of horizontal moving load part 31 (in Z-direction Position).On the other hand, along with to-Y direction away from horizontal moving load part 31, upper surface 320 downwards, i.e. to-Z direction retreat.Cause This, with regard to object stage 30 generally speaking, the horizontal plane of the upper surface 310 of horizontal moving load part 31 and the upper surface of taper moving load part 32 The taper surface of 320 is continuous print, and ridge line section E that both connect is in the linearity extended in the X direction.

It addition, the upper surface 310 at horizontal moving load part 31 is provided with tessellated groove quarter.More specifically, carry in level The central part of the upper surface 310 in thing portion 31 arranges tessellated groove 311.It addition, at the upper surface 310 weeks of horizontal moving load part 31 Edge is provided with groove 312, and this groove 312 surrounds and is formed with the region of groove 311, and also be formed as removing in rectangle by taper loading The shape on one limit of side, portion 32.These grooves 311,312 are connected with negative pressure feeding portion 704 (Fig. 4) described later via control valve, and Have, by supply negative pressure, the workpiece of mounting on object stage 30 is carried out the function as adsorption tank that absorption keeps.Two kinds Groove 311,312 is not connected on object stage, is additionally connected with negative pressure feeding portion 704 via separate control valve.Therefore, remove Use beyond two kinds of grooves adsorb, it is also possible to only use a kind of groove to adsorb.

Roller unit 34 is arranged in the way of striding across the object stage 30 so constituted.Specifically, along the X of horizontal moving load part 31 The both ends in direction are provided with the pair of guide rails 351,352 extended along the Y direction, and these guide rails 351,352 are fixed on main frame 11.And, roller unit 34 by can relative to guide rail 351,352 slidably in the way of be installed on guide rail 351,352.

Roller unit 34 have respectively by can slidably in the way of the slide block 341,342 that engages with guide rail 351,352.With Connect the mode of these slide blocks 341,342, be provided with the bottom angle section 343 striding across on object stage 30 top and extending along the X direction. Bottom angle section 343 is provided with top angle section 345 via elevating mechanism 344, and this top angle section 345 can be freely lifted. And, top angle section 345 is provided with using X-direction as axial columned stripper roll 340, and this stripper roll 340 energy Enough rotate freely.

When top angle section 345 passes through elevating mechanism 344 downwards, i.e. when-Z direction declines, the lower surface of stripper roll 340 Abut with the upper surface of the workpiece of mounting on object stage 30.On the other hand, fixed by elevating mechanism 344 at top angle section 345 Above, under the state of the position being i.e. positioned +Z direction, stripper roll 340 is in the top shape away from the upper surface of workpiece State.On top angle section 345, the back support roller 346 for suppressing stripper roll 340 to bend and this back support roller are installed 346 can rotate freely, and are suitably provided with the rib for preventing top angle section 345 flexure itself.Stripper roll 340 and the back of the body Portion supports roller 346 and does not drive source, and they rotate freely.

Roller unit 34 can be moved in the Y direction by the motor 353 installed on main frame 11.More specifically, bottom Angle section 343 and the such as ball screw framework 354 as the shifter that the rotary motion of motor 353 is converted to linear motion Connect.When motor 353 rotates, bottom angle section 343 moves in the Y direction along guide rail 351,352, and thus roller unit 34 is at Y Side moves up.Stripper roll 340, along with the movement of roller unit 34 and the movable range of movement, arrives horizontal moving load part in the-y direction Till the neighbouring position of-Y side end of 31, in +Y direction to horizontal moving load part 31+Y side end near position.

Hereinafter, for the i-th absorbing unit 5i (i=1,2 ..., N) structure illustrate.Additionally, the 1st～N absorption Unit 51～5N all has identical structure.I-th absorbing unit 5i has the most extended and is fixed on support frame The beam 5i1 of 50.Beam 5i1 is provided with in the way of position is different from each other in the X direction a coupled columns component 5i2, 5i3, and coupled columns component 5i2, a 5i3 is vertical the most i.e. to-Z direction extension.By going in the drawings on post component 5i2,5i3 Guide rails assembling have board member 5i4, and this board member 5i4 can be freely lifted.Board member 5i4 is by by motor and shifter The elevating mechanism 5i5 that (such as ball screw framework) is constituted drives and lifts.

The pad supporting member 5i6 of the square bar shape extended along the X direction is installed in the bottom of board member 5i4.Support in advance expenditure The lower surface of component 5i6, is the most equally spaced arranged with multiple absorption layer (pad) 5i7.Figure 2 illustrates and make the i-th suction Coupon unit 5i is moved to the state of the top of the position of reality, but when board member 5i4 is moved downwards by elevating mechanism 5i5 Time dynamic, absorption layer 5i7 can drop to extremely close to the position of upper surface 310 of horizontal moving load part 31.Upload at object stage 30 Under the state being equipped with workpiece, absorption layer 5i7 abuts with the upper surface of workpiece.Give from negative pressure described later to each absorption layer 5i7 The negative pressure of supply unit 704, this each absorption layer 5i7 absorption keeps the upper surface of workpiece.

Fig. 3 is the side view of the position relationship illustrating the initial structure peeling off unit and each several part.First, reference Fig. 1 and Fig. 3 is while the structure of unit 33 is initially peeled off in explanation.Initial unit 33 of peeling off has above taper moving load part 32 The most extended bar-shaped pressing member 331, pressing member 331 is supported by support arm 332.Support arm 332 passes through The guide rail 333 extended along vertical direction can be installed on post component 334 with being freely lifted.By elevating mechanism 335 Action, support arm 332 moves up and down relative to post component 334.Post component 334 is by the base portion 336 installed on main frame 11 Support, the Y-direction position of post component 334 can be carried out by the range of the position adjusting mechanism 337 regulation in base portion 336 Adjust.

It is placed in the loading being made up of horizontal moving load part 31 and taper moving load part 32 as the workpiece WK peeling off object Platform 30.The above-mentioned workpiece in pattern-forming operation be version with blanket across the thin film of pattern forming material be close to tight Fit.On the other hand, the workpiece in transfer printing process is substrate with blanket across being close to that the pattern of pattern-forming is close to Body.Hereinafter, for being close to body as the stripping in the case of workpiece WK using the substrate SB in transfer printing process and blanket BL The peeling action of device 1 illustrates.Be close to body as in the case of workpiece formed using version and blanket, it is possible to by with The method of sample is peeled off.

For workpiece WK, blanket BL has the planar dimension bigger than substrate SB.Substrate SB is close to blanket BL's Substantially central portion.Workpiece WK by blanket BL in lower section substrate SB up in the way of be placed on object stage 30.Now, as Shown in Fig. 3, it is positioned at the rib of horizontal moving load part 31 and the border of taper moving load part 32 with the-Y side end of the substrate SB in workpiece WK The mode generally above of line portion E, in further detail, is positioned at the mode of the position of-Y side somewhat partially of ridge line section E, by workpiece WK It is placed on object stage 30.Therefore, in the-y direction, the blanket BL in the outside being positioned at substrate SB is configured to be projected into taper and carries The top in thing portion 32, produces gap between the lower surface and the upper surface 320 of taper moving load part 32 of blanket BL.Blanket BL Lower surface and taper moving load part 32 upper surface 320 formed by the bevel angle of angle θ and taper moving load part 32 be the identical several years (being 2 degree in this embodiment) left and right.

Being provided with adsorption tank 311,312 on horizontal moving load part 31, absorption keeps the lower surface of blanket BL.Absorption therein Groove 311 adsorbs the lower surface of the suitable part in the bottom with substrate SB of blanket BL, and on the other hand, adsorption tank 312 adsorbs rubber The lower surface of the part that the outside with substrate SB of skin cloth BL is suitable.Adsorption tank 311,312 can adsorb independently of each other With stopping absorption, it is possible to be used together two kinds of adsorption tanks 311,312 and strongly adsorb blanket BL.On the other hand, only use The adsorption tank 312 in outside adsorbs, and the central part for the blanket BL that effectively form pattern does not adsorbs, thus It is prevented from the damage of the pattern caused because absorption causes blanket BL to bend.So, the independently controlled suction to central part The negative pressure feeding of the adsorption tank 312 of attached groove 311 and circumference, it is possible to the absorption holding side according to purpose switching blanket BL Formula.

By the way of as such, adsorbed at object stage 30 and above the workpiece WK kept, configured the 1st～N absorption list Unit 51～5N and the stripper roll 340 of roller unit 34.As it has been described above, in the bottom of the i-th absorbing unit 5i, arrangement sets along the X direction There is multiple absorption layer 5i7.In further detail, absorption layer 5i7 is such as had flexibility and elasticity by rubber or silicones etc. Material formed, and there is lower surface abut to adsorb work with the upper surface of workpiece WK (upper surface of more specific grade slab SB) The function of part.Hereinafter, by the absorption layer being located at each absorbing unit 51,52 ..., 5N respectively labelling reference 517, 527 ..., 5N7 is distinguished from each other.

1st absorbing unit 51 is located at the top of-Y side end of horizontal moving load part 31 ,-the Y of sorbing substrate SB when declining The upper surface of side end.On the other hand, N absorbing unit 5N is located at+Y side end upper being placed in object stage 30 upper substrate SB Side, the upper surface of+Y side end of sorbing substrate SB when declining.Configure the 2nd absorbing unit 52 between which the most dispersedly ～(N-1) absorbing unit 5 (N-1), such as absorption layer 517～5N7 can be formed the most in the Y direction.Additionally, such as Described hereinafter, the interval of absorption layer 517～5N7 can also be set as desired as uneven.These absorbing units 51～ Can the most vertically move and carry out or not adsorb between 5N.

Stripper roll 340 is mobile next close to or away from substrate SB in the vertical direction, and moves along the Y direction, thus edge Substrate SB to move horizontally.When stripper roll 340 declines, abut and rotate water on one side with the upper surface of substrate SB Translation is dynamic.When the mobile position to the stripper roll 340 during by-Y side is the+Y of the absorption layer 517 of adjacent 1st absorbing unit 51 The position of side.In order to make stripper roll 340 be configured at such approximated position, although the 1st absorbing unit 51 be with shown in Fig. 2 The i-th structure identical for absorbing unit 5i, but with towards contrary with other the 2nd～N absorbing unit 52～5N shown in Fig. 1 Mode be installed on support frame 50.

Adjust the initial Y-direction position peeling off unit 33, so that this pressing member 331 initially peeling off unit 33 is positioned at prominent Go out the top of the blanket BL of the top to taper moving load part 32.And, support arm 332 declines, thus pressing member 331 times End declines the upper surface pressing blanket BL.Now in order to not make pressing member 331 damage blanket BL, pressing member 331 Top formed by elastic component.

Fig. 4 is the block diagram of the electrical structure illustrating this stripping off device.Device each several part is controlled by control unit 70.Control single Unit 70 has: CPU701, motor control part 702, valve control portion 703, negative pressure feeding portion 704, user interface (UI) portion 705 and figure As process portion 706.The action that CPU701 domination device is overall.Motor control part 702 controls to be located at the Motor component of each several part. Valve control portion 703 controls to be located at the valve class A of geometric unitA of each several part.Negative pressure feeding portion 704 produces the negative pressure to each several part supply.UI portion 705 have the operation accepted from user inputs, to the function of the state of user report device.Image processing part 706 is based on figure Image signal carries out the image procossing specified.Additionally, bearing from external equipment supplies such as factory's Negative pressure supply devices can utilized In the case of pressure, control unit 70 can not also have negative pressure feeding portion.

Motor control part 702 drive control to be located at the motor 353 of object stage functional device 3 and elevating mechanism 335,344, point It is not located at the groups of motors of the elevating mechanism 515～5N5 etc. of each absorbing unit 51～5N of top adsorption function block 5.Valve control portion 703 control valve groups V3 and valve group V5 etc., wherein, this valve group V3 is located at and is connected to be located at horizontal moving load part from negative pressure feeding portion 704 On the pipeline path of the adsorption tank 311,312 of 31, for separately supplying the negative pressure of regulation to these adsorption tanks, valve group V5 is located at From the pipeline path that negative pressure feeding portion 704 is connected to each absorption layer 517～5N7, for supplying to each absorption layer 517～5N7 The negative pressure of regulation.

Hereinafter, the action for the upper described stripping off device 1 constituted illustrates.Carried out by this stripping off device 1 Peeling action is moved with the stripping at the stripping off device described in above-mentioned patent documentation 1 (TOHKEMY 2014-189350 publication) Make the most identical.Therefore, it is omitted for the detailed description of the peeling action of this stripping off device 1, simplys illustrate herein The action of each several part in peeling action.

When will move into this stripping off device 1 and be placed in the regulation of object stage 30 as the workpiece WK peeling off object from outside During position, device each several part is positioned the original state shown in Fig. 3.In an initial condition, workpiece WK is by adsorption tank 311,312 One or both adsorb holding.It addition, initially peel off the pressing member 331 of unit 33, the stripper roll 340 of roller unit 34, 1st～the absorption layer 517～5N7 of N absorbing unit 51～5N all away from workpiece WK.Each absorbing unit 5i in order to not with in Y side The roller unit 34 travelled upwardly is interfered, the gap being sufficiently spaced-apart between absorption layer 5i7 and substrate SB.It addition, stripper roll 340 is in Than the absorption layer 517 position slightly by+Y side of the 1st absorbing unit 51 and the state away from workpiece WK.From such original state Proceed by peeling action.

Fig. 5 A～Fig. 5 D is to illustrate the figure of the action of each several part during peeling action.First, the 1st absorbing unit 51 times Fall, absorption layer 517 abuts with-Y side end the upper surface of substrate SB, adsorbs holding substrate SB by negative pressure.It addition, stripper roll 340 declines abut with the upper surface of substrate SB.As shown in Figure 5A, from the beginning of this state, pressing member 331 decline presses rubber The end of cloth BL.The end of blanket BL is projected into the top of taper moving load part 32, at the lower surface of the end of this blanket BL And there is gap between the upper surface 320 of taper object stage 32.Therefore, pressing member 331 presses downwards the end of blanket BL Portion, thus the end of blanket BL bends downwards along the taper surface of taper moving load part 32.Therefore, will be by the 1st absorbing unit Separate between end and the blanket BL of the substrate SB that 51 absorption keep and proceed by stripping.

It follows that as shown in Figure 5 B, the 1st absorbing unit 51 is made to begin to ramp up, and stripper roll 340 and substrate SB table Face abuts and rotates, and moves to +Y direction.So, the stripping between substrate SB and blanket BL is advanced to +Y direction.By In making stripper roll 340 abut, so the region abutted with substrate SB without departing from stripper roll 340 makes stripping advance.Make stripper roll 340, while abutting with substrate SB, move to +Y direction with constant speed, it is possible to maintain the pace peeled off permanent Fixed.

Hereinafter, by the limit of the most stripped for substrate SB and blanket BL stripping area with the unstripped region not yet peeled off Boundary line is referred to as " stripping borderline line ".Stripper roll 340 is the roller component extended along the X direction, this stripper roll 340 and substrate SB Abut while moving to +Y direction.Therefore, stripping borderline line maintains the straight line shape along the i.e. X-direction of roller bearing of trend, and And advance to +Y direction with constant speed.In such manner, it is possible to be reliably prevented the pace because peeling off to change the stress collection caused In and the damage of pattern that causes.

For stripper roll 340 by substrate SB afterwards, absorbing unit 52,53 ... decline successively with just from rubber The substrate SB that cloth BL peels off abuts, and keeps this substrate SB.Specifically, as shown in Figure 5 B, when stripper roll 340 is by the 2nd absorption During the position directly below of unit 52, the 2nd absorbing unit 52 starts to decline to substrate SB.When absorption layer 527 and substrate SB upper surface During abutting, by the negative pressure supplied from negative pressure feeding portion 704, start with the 2nd absorbing unit 52 and adsorb holding substrate SB.

As shown in Figure 5 C, the 2nd absorbing unit 52 is just changed into rising when starting absorption holding substrate SB.After this, base Plate SB is kept by the 1st absorbing unit the 51 and the 2nd absorbing unit 52.So, more reliably keep peeling off from blanket BL Substrate SB, prevent substrate SB from bending downwards and again contacting with blanket BL, or come off such asking from absorption layer 517 Topic.It addition, keep the angle of substrate SB and the blanket BL near stripping borderline line suitably, the most also obtain making stripping well The effect advanced.

Other absorbing unit 53,54 ..., 5N too, when stripper roll 340 is by the lower section of this absorbing unit, Begin to decline, at the time point that absorption layer abuts with substrate SB, start absorption and keep and rise, promote substrate the most upward SB.Each absorbing unit is rising to and the time point stopping of object stage 30 height of regulation apart.

Peeling off the most downstream side of direction of advance, the absorbing unit 5N by+Y side keeps substrate SB to rise to predetermined bits Putting, the most as shown in Figure 5 D, substrate SB is kept completely separate with blanket BL, and stripping completes.Stripper roll 340 and pressing member 331 Keep out of the way away from substrate SB and the position of blanket BL, it is possible to take out of substrate SB and the blanket BL being separated from each other.Thus Complete peeling action.

In peeling action as above, for configuration quantity and the configuration of absorbing unit, preferably according to substrate SB's The pattern formed between kind and/or thickness, substrate SB and blanket BL or the kind of thin film change.

Fig. 6 A～Fig. 6 C is the figure configuring the different example of pattern illustrating absorbing unit.Such as because of substrate SB and rubber The material of the pattern supported between cloth BL or in the case of being shaped such that clinging force between the two is more weak, it is preferable that as Shown in Fig. 6 A, angle θ formed by substrate SB and the blanket BL after peeling off is maintained at smaller value and peels off.So Purpose under, owing to the lifting force required for peeling off is smaller, as long as in the Y direction with the configuration absorption of bigger interval singly Unit.

On the other hand, such as in the case of substrate SB is stronger with the clinging force of blanket BL, preferably such as Fig. 6 B institute Showing, angle θ formed by substrate SB and the blanket BL after peeling off maintains bigger value and peels off.In addition, it is necessary to make to carry The power rising substrate SB is bigger.Accordingly, it would be desirable to make between the absorbing unit in Y-direction is interval smaller, need according to circumstances to increase suction The configuration quantity of coupon unit.

It addition, the rigidity of such as substrate SB higher and in the case of being difficult to bend, need both to reduce substrate SB and rubber Angle θ formed by cloth BL, promotes substrate SB with stronger lifting force again.In this case, it is also desirable to increase absorbing unit Quantity.In order to tackle the most such situation, as shown in Figure 6 C, it is also considered that the interval making absorbing unit is uneven, such as exist To configure absorbing unit etc. close to mode near the end of substrate SB.

So, for configuration quantity and their configuration of absorbing unit, if can change according to purpose, then fill The scope that utilizes put easily becomes wide.But, in order to make it feasible, following problem may be produced.

Fig. 7 A and Fig. 7 B is the figure illustrating roller unit with the position relationship of absorbing unit.As shown in Figure 7 A, dynamic in stripping In work, roller unit 34 is advanced to +Y direction with constant speed.On the other hand, absorbing unit 5i makes bottom be provided with absorption layer 5i7 Board member 5i4 lift in z-direction, thus keep and promote substrate SB.Therefore, if setting their movement irrelevantly On opportunity, just there is the danger of both interference contacts.

As shown in Figure 7 B, in principle, if after roller unit 34 has passed through position directly below, under board member 5i4 just starts Fall, then will not interfere.But, make stripping stably in order to angle θ formed by substrate SB and blanket BL is maintained constant Advancing, the substrate SB after preferably utilizing absorption layer 5i7 to pass through stripper roll 340 as soon as possible keeps.That is, in absorption Interval W when pad 5i7 begins to decline is the least, and this interval W is pad supporting member 5i6+Y side end face 5i6y and stripper roll 340 are connected to interval in the Y direction, the position of substrate SB, are 0 by this interval W in the ideal case.

In the past, in order to realize the mobile opportunity of each several part of such action, such as, it is to set by carrying out teaching Fixed, this teaching refers to that the timing signals that operator makes periodically to export is associated with the mobile opportunity of each several part and deposits It is stored in device.But, as it has been described above, in the more situation of the configuration number of absorbing unit or configure uneven situation Under, teaching also becomes complicated, if the inching of the even fluctuation of reply installation site is included, then workload becomes huge Greatly.

Therefore, for the process technological procedure making peeling action advance well, clear stipulaties device is i.e. needed each The sequence of movement of part and the regulation on opportunity thereof.Particularly, need to be appropriately setting for each absorbing unit 51～5N and stripping The movement of roller 340 collaborates ordinatedly to promote substrate SB and makes its order peeled off from blanket BL.

In stripping off device 1 preferably, use a kind of technological procedure creating method, the method no matter absorbing unit Configuration quantity and position how, the process Process Planning of the action moment optimizing device each several part can be made simply Journey.This technological procedure is made and processes is that the control program that the CPU701 by being located in control unit 70 performs to prestore is come real Existing.When user gives basic processing parameter, based on principle shown below, CPU701 uses the parameter being endowed to carry out Calculate, be thus made process technological procedure.

Fig. 8 is the flow chart illustrating each sequence of movement of absorbing unit.It addition, Fig. 9 A～Fig. 9 E is to illustrate stripper roll and suction The figure of the position relationship of coupon unit.It addition, Figure 10 is the sequential chart of the action illustrating stripper roll and absorbing unit.Reference on one side These figures, are explained in more detail how stripper roll 340 links with absorption layer 5i.

This sequence of movement is to being general from the point of view of each absorbing unit 52～5N, though the configuration quantity of other absorbing unit And/or configuration changes also the most identical.Additionally, for the 1st absorbing unit 51, although basic action is logical , but some is different, will be described later for this part, and the 1st absorbing unit 51 is in stripper roll 340 Top trip side with-Y side end of substrate SB in opposite directions it is positioned on moving direction.

I-th absorbing unit 5i (i=2～N) is positioned the initial position (step S101) of regulation the most in the height direction. Such as shown in Fig. 3, Fig. 7 A and Fig. 9 A, initial position refers to, the pad supporting member 5i6 of absorbing unit 5i is raised, absorption layer 5i7 retreats to top, the position do not interfered with roller unit 34.With reference Za represent absorption layer 5i7 lower surface now with Substrate SB upper surface distance in z-direction, the height of absorption layer 5i7 lower surface time i.e. on the basis of the upper surface of substrate SB Degree.Hereinafter, if not otherwise stated, when mentioning " highly " of absorption layer 5i7, refer to the unstripped position in substrate SB The height of the absorption layer 5i7 lower surface on the basis of upper surface.

As shown in Figure 9 B, by mobile roller unit 34, when at the moment Ti1 shown in Figure 10, stripper roll 340 is in position, underface Put by time (step S102), absorbing unit 5i make absorption layer 5i7 to substrate SB decline.Decrease speed now is for predetermining Ratio the first decrease speed faster, with the substrate SB (step S103) after promptly maintaining roller passes through.

The most can be passed through by various methods detection stripper roll 340.Such as, if by top adsorption function The configuration quantity of the absorbing unit of block 5 and position prestore as device information, then according to the roller unit represented in Y-direction The positional information of the position of 34 and above-mentioned device information, it is possible to know the relative position of each absorbing unit 5i and roller unit 34. Positional information as roller unit 34, it is possible to according to position sensor or the coding of the position from direct measuring roll unit 34 The output signal of device etc. obtains.Such as can be according to the image of the roller unit 34 of photographing unit this shooting instrument shooting and imparting horse Reaching the count value etc. of the driving pulse of 353, obtain positional information, this motor 353 makes roller unit 34 move.It addition, also be able to It is provided in one in absorbing unit 5i or roller unit 34 detecting the sensor of the position of another one or shooting work Tool, grasps relative position between the two according to the output of this sensor or shooting instrument.

As shown in Figure 10, absorption layer 5i7 drops to the attraction starting position of regulation with the first decrease speed from initial position. When absorption layer 5i7 arrives attraction starting position (step S104), from the beginning of this moment Ti2, supply from the negative pressure of control unit 70 Supply negative pressure to portion 704 to this absorption layer 5i7, utilize absorption layer 5i7 to carry out attraction action.It addition, the lower reduction of speed of absorption layer 5i7 Degree is changed to second decrease speed (step S105) slower than the first decrease speed.

Attracting starting position is that the absorption layer 5i7 declined will be with the position of the upper surface of substrate SB.If absorption layer 5i7 remain more constant than the first decrease speed faster just with the upper table of the substrate SB promoted by adjacent absorption layer 5 (i-1) 7 Face contacts, then exist because of collision, cause substrate SB to come off from other the absorption layer that remain substrate SB, wounded substrate SB Danger.Attracting starting position, decrease speed is changed to the second decrease speed, and thus absorption layer 5i7 can be will be with base The front reduction gear of the upper surface of plate SB, reduces collision when absorption layer 5i7 contacts with substrate SB.Further, since inhale arriving Before drawing starting position, absorption layer 5i7 does not contacts with substrate SB, as long as so attracting the rear to absorption layer of starting position arriving 5i7 supplies negative pressure.

In order to make the absorption layer 5i7 not keeping substrate SB move rapidly into attraction starting position, the first decrease speed is It is well the fastest speed being capable of in mechanism.On the other hand, the second decrease speed is preferably at this absorption layer 5i7 and base During plate SB contact, do not make other absorption layer that the holding of substrate SB is released from, the most not low speed of wounded substrate SB.For these Speed can predetermine according to the restriction of the mechanical aspects of device.

The advance that stripper roll 340 is peeled off by limiting the position of stripping borderline line to control, on the other hand, absorption layer 5i7 Begin to decline after stripper roll 340 is passed through.Therefore, when absorption layer 5i7 contacts with substrate SB, on the position of this contact, base Plate SB is in the state separated with blanket BL.The substrate SB of such state is kept in order to reliably catch absorption, Supply under the state giving negative pressure to absorption layer 5i7, make absorption layer 5i7 decline with the second slow decrease speed.

As shown in Figure 9 C, the moment Ti2 arriving attraction starting position at absorption layer 5i7, absorption are represented by reference Zb The height of pad 5i7.The height Zb of absorption layer 5i7 now is higher than the height Zc of the substrate SB upper surface of specific location, should Ad-hoc location is, the position corresponding with absorption layer 5i7 in the Y direction in substrate SB upper surface.In other words, it is necessary to meet this The mode of the relation of sample sets attraction starting position.

It addition, for attracting starting position, need to be set according to the posture of substrate SB.From promptly to having peeled off From the viewpoint of substrate SB carries out absorption holding, seek to decline with the first decrease speed faster to last till extremely close to substrate SB Upper surface position till, shorten the period declined with slower second decrease speed as much as possible.Therefore, it is intended that attract to open Beginning position is actually to contact position when catching substrate SB (hereinafter referred to as with substrate SB close to absorption layer 5i7 " catching position ").But, such as, shown in Fig. 5 C, the substrate SB that absorption layer 5i7 should catch is in and separates with blanket BL And elevated state.Accordingly, it would be desirable to prediction based on the position to the substrate SB improved determines to attract starting position.

Attracting after starting position arriving, absorption layer 5i7 declines further with the second slower decrease speed, with Substrate SB upper surface is in the catching position of identical height and contacts with substrate SB.So, start with absorption layer 5i7 absorption to protect Hold substrate SB.As long as rightly set attract starting position, it becomes possible to shorten from absorption layer 5i7 arrive attract starting position to Catching position proceeds by the time till absorption keeps.In such manner, it is possible to ensure to decline with low speed at short notice, seek to shorten The process time.

(the step when the upper surface of absorption layer 5i7 and substrate SB being detected and starting absorption holding substrate SB S106), as shown in fig. 9d, absorption layer 5i7 is changed into rising.Various detection method can be applied to check whether, and starting absorption protects Hold.For instance, it is possible to detect according to the change of the pressure produced because absorption layer 5i7 contacts with substrate SB, this pressure Change is the pressure change on from negative pressure feeding portion 704 to the feed path of the negative pressure of absorption layer 5i7.

Detecting that the moment Ti3, absorption layer 5i7 that proceed by absorption holding start in first rate of climb with regulation Rise, rise and last till (step from rising the first displacement starting to displacement in z-direction to reach regulation S107a).Absorption layer 5i7 rises when absorption maintains substrate SB, is thus torn from blanket BL by substrate SB, stripping From advancing further.

In order to collaborate with other absorption layer, the rate of climb for absorption layer 5i7 and the movement with this speed Distance can be set as multiple stage.That is, absorption layer 5i7 can with first rate of climb move the first displacement it After, then rise mobile second displacement (step S107b) with second rate of climb, rise the mobile 3rd with the 3rd rate of climb Displacement (step S107c) ....Move for the rising which stage to realize absorption layer 5i7 in, also have in each stage The rate of climb and the setting value of displacement, need according to absorption layer 5i7 configuration and should be transferred on substrate SB The physical property values of pattern determines.

As shown in Figure 10, the moment Ti4 of the first displacement is risen at absorption layer 5i7, by the rate of climb from first Lifting speed is changed to second rate of climb.Rise the moment Ti5 of the second displacement at absorption layer 5i7, the rate of climb enters one Being changed to the 3rd rate of climb to step, absorption layer 5i7 rises the 3rd displacement.

As shown in fig. 9e, at the moment Ti6 of the end position arriving regulation, the movement (step of absorption layer 5i7 is stopped S108).So, absorption layer 5i7 remains the substrate SB peeled off from blanket BL and is positioned the height of regulation.When whole suctions When attached pad 5i7 is positioned identical height, as shown in Figure 5 D, the substrate SB being completely exfoliated from blanket BL is away from blanket BL, is retained as approximate horizontal posture.

Figure 10 illustrates speed and progressively increase to the example of the 3rd rate of climb from first rate of climb, but can also The rate of climb is made to reduce.It addition, the rate of climb is divided into 3 phase change herein, but the stage quantity of velocity variations can be appointed Meaning ground sets.It addition, in Fig. 10, in order to easily observe accompanying drawing, and make initial position different from end position, but these positions Relation of putting also is not limited to this example but arbitrary.Such as initial position and end position can also be identical.

Additionally, on the moving direction of stripper roll 340, be configured at the 1st absorbing unit 51 of top trip side to realize With collaborating of the initial stripping unit 33 shown in Fig. 5 A, a part is changed in above-mentioned action as explained below.First, early than stripping Starting to advance from roller 340 and move, on the regulation opportunity that CPU701 determines, absorption layer 517 starts to decline from initial position.That is, exist In step S102, it is not based on passing through of stripper roll 340, but under the control signal given based on CPU701 judges to start Fall.

It addition, the absorption layer 517 of the 1st absorbing unit 51 and the base in the state being close to blanket BL on object stage 30 Plate SB abuts and keeps substrate SB.Therefore, corresponding with absorption layer 517 starting position that attracts is that the absorption layer 517 declined will The position abutted with the substrate SB upper surface do not peeled off from blanket BL, it is possible to come according to the thickness of substrate SB and blanket BL Predetermine.

So, for other absorbing unit 52～5N, need configuration, substrate SB according to absorbing unit and turned The conditions such as the physical attribute of print thing, dynamically set the opportunity begun to decline and attract starting position.On the other hand, the 1st inhales These parameters of coupon unit 51 predetermine.Except this put in addition to, the action of the 1st absorbing unit 51 with the above-mentioned the 2nd～ The action of N absorbing unit 52～5N is as broad as long.Set according to each condition in first rate of climb and the first displacement etc. This respect be also identical.

As previously discussed, in order to make an absorbing unit 5i assist rightly with other absorbing unit and stripper roll 340 Dynamic, set rightly the attraction starting position of this absorbing unit 5i and n-th rate of climb and the n-th displacement (n=1, 2 ...) these parameters.Further, for actual peeling action, due to the action simultaneously of multiple absorbing units, so it Need between to take consistent action.

Figure 11 A～Figure 11 C is the figure schematically illustrating the peeling action carried out by multiple absorbing units.As shown in Figure 11 A, Consider to carry out peeling action with two absorbing unit 5i, 5 (i+1) of interval G configuration in the Y direction.In order to well from rubber Cloth BL peels off angle formed by substrate SB, substrate SB lower surface the most separated from one another and blanket BL upper surface (hereinafter referred to as For " peel angle ") θ maintains constant in peeling action.

Consider peeling action whole during make peel angle θ substantially maintain constant condition.At the shape shown in Figure 11 A Under state, the place in impact maximum, stripper roll 340 and holding the absorption layer promoting substrate SB is formed for peel angle θ Absorption layer 5i7 in the position closest to stripper roll 340.Peel angle θ is determined by the translational speed of these components.So, in stripping In direction of advance, the upstream side of stripper roll 340, being in closest to stripper roll in the absorption layer of substrate SB is i.e. kept in-Y side The good and bad impact of the absorption layer 5i7 of the position of 340 quality on peeling off is big.In other words, keep substrate SB to separation The absorption layer of the most downstream side of the direction of advance being positioned at stripping in the absorption layer of direction (top) movement produces peeling off quality Big impact.Therefore, will be located in the absorption layer 5i7 of such position herein and there is the absorbing unit 5i of this absorption layer 5i7 It is referred to as " main stripping main body ".It addition, the action as main stripping main body is referred to as " main peeling action ".Along with the advance peeled off, Function as main stripping main body becomes the absorption layer in downstream successively.

In order to maintain peel angle θ while making stripping advance, the most as shown in Figure 11 B, relative to as main stripping The absorption layer 5i7 of main body is in absorption layer 5 (i+1) 7 of the adjacent position, downstream peeling off direction of advance and abuts also with substrate SB Starting to keep the moment of this substrate SB, the substrate SB that adsorbed pad 5i7 promotes upward becomes peel angle θ with blanket BL.So, Acting under the state maintaining peel angle θ from absorption layer 5i7 succession to absorption layer 5 (i+1) 7 as main stripping main body.

Although finishing the absorption layer 5i7 of the function as main stripping main body not play main body for the formation of peel angle θ and make With, but have and assist the absorption layer 5 (i+1) 7 newly becoming main stripping main body to carry out the function peeled off.As absorption layer now The action of 5i7, considers 3 patterns as shown in Figure 11 C.With in the situation of the 1st shown in solid line A kind, adsorbed pad 5i7 promotes Substrate SB has the gradient identical with the gradient of the substrate SB promoted by the absorption layer 5 (i+1) 7 as main stripping main body. When the rate of climb of absorption layer 5i7,5 (i+1) 7 is set to identical, it is achieved such situation.

It addition, with in the second situation shown in dotted line B, the gradient of the substrate SB that adsorbed pad 5i7 promotes is more than The gradient of the substrate SB promoted by the absorption layer 5 (i+1) 7 as main stripping main body.When the rate of climb making absorption layer 5i7 is big When the rate of climb of absorption layer 5 (i+1) 7, it is achieved such situation.In this case, absorption layer 5i7 plays and more promotes The effect of substrate SB is peeled off by absorption layer 5 (i+1) 7.Particularly as at the higher situation of the rigidity of substrate SB or pattern The situation that clinging force is stronger is such, when promoting the condition that substrate SB needs bigger power, so utilizes absorption layer 5i7 to assist It is effective that absorption layer 5 (i+1) 7 carries out stripping.Hereinafter, this action is referred to as " up-stripping action ".

Further, with in the third situation shown in dotted line C, it is adsorbed the gradient of the substrate SB that pad 5i7 promotes Gradient less than the substrate SB promoted by the absorption layer 5 (i+1) 7 as main stripping main body.When the upper raising speed making absorption layer 5i7 When degree is less than the rate of climb of absorption layer 5 (i+1) 7, it is achieved such situation.

In the case of illustrating with solid line A and dotted line C, for by absorption layer 5 (i+1) 7 as main stripping main body The stripping of the substrate SB carried out, absorption layer 5i7 does not make the positive contribution promoting this stripping.Shown in such cases The action of absorption layer 5i7, maintains its posture, while rising to the action of the height of regulation as the substrate SB after peeling off It is effective.Particularly, it is used as to reduce the gradient of substrate SB close to action during flat-hand position.Hereinafter, this action is referred to as " enhancing action ".

By appropriately combined to main peeling action, up-stripping action and the enhancing action of each absorption layer 5i7 (i=1～N), Thus enable that absorbing unit cooperates with stripper roll 340 and carry out peeling action rightly.As it has been described above, determine the quality peeled off Mainly by stripper roll 340 and the absorbing unit of main stripping main body.Therefore, when setting multiple absorption layer 5i7 (i=1～N) Action time, first determine as the specification required by the action of the absorption layer of main stripping main body according to therein, with this The mode that action links rightly is to determine the action of other absorption layer.

The Main Differences of main peeling action, up-stripping action and enhancing action is the rate of climb of absorption layer.That is, make For the absorption layer in addition to main stripping main body, the suction risen with the speed faster than the rate of climb of the absorption layer of main peeling action Attached pad carries out up-stripping action.It addition, the absorption layer that the rate of climb is below the rate of climb of main peeling action promotes Action.Therefore, for the absorption layer in addition to main stripping main body, it is possible to by carrying out the absorption of action as main stripping main body The rate of climb of pad is multiplied by the coefficient of regulation, sets its action.In this manual, this coefficient is referred to as " sampling factor ". If sampling factor is more than 1, then the action of this absorption layer is up-stripping action, if below 1, is then an up action.

Figure 12 is the sequential chart of the action of the multiple absorption layers illustrating linkage.By a series of peeling action according to an absorption Pad is divided into multiple stage (phase) during carrying out each of action as main stripping main body, it is considered to each absorption layer in each stage Action.The period that i-th absorbing unit 5i carries out action as main stripping main body is referred to as " stage i ".Moving of each absorbing unit Make according to the sequence of movement previously illustrated.

In the stage 1, play main stripping in the side, most upstream peeling off direction of advance, the 1st absorbing unit 51 by-Y side The function of main body.From the beginning of the original state shown in Fig. 5 A, abut with the upper surface of substrate SB and adsorb the 1st of holding substrate SB Absorption layer 517 starts when being the beginning in stage 1 with the moment T0 that first rate of climb rises.Now stripper roll 340 is also to stripping Direction of advance starts mobile.During stage 1, at the stripper roll 340 moment T21 by the underface of the 2nd absorption layer 527, the 2nd inhales Attached pad 527 starts to decline to attraction starting position with the first decrease speed from initial position.Arrive through the 2nd absorption layer 527 and inhale Draw the moment T22 of starting position, start absorption at moment T23 the 2nd absorption layer 527 at catching position and keep substrate SB.From the moment T0 is equivalent to the stage 1 to moment T23.

The function of main stripping main body is played at stage the 2, the 2nd absorption layer 527.When capturing substrate SB at moment T23, the 2 absorption layers 527 start to rise with first rate of climb.So, substrate SB is mainly promoted upward by the 2nd absorption layer 527, enters One step stripping is made to advance.First rate of climb now can be identical with first rate of climb of the 1st absorption layer 517, the most also Can be different.The rate of climb of the 1st absorption layer 517 in stage 2 is set to second rate of climb.As it has been described above, by now The setting of the rate of climb, the function that the 1st absorption layer 517 plays is any one in up-stripping action or enhancing action.

Similarly, at the stripper roll 340 moment T31 by position directly below, the 3rd absorption layer 537 begins to decline, and passes through Reach the moment T32 attracting starting position, start absorption at moment T33 and keep substrate SB.Terminating in this stage in moment 2, the stage 3 opens Begin.It addition, at moment T41, the 4th absorption layer 547 begins to decline, pass through to attract the moment T42 of starting position, in the moment T43 starts absorption and keeps substrate SB.Here, the stage 3 terminates, the stage 4 starts.So, the absorption layer edge of main stripping main body is become Stripping direction of advance to migrate successively, the most all switch steps.Peeling action for workpiece WK includes by initially peeling off list The initial peeling action that carry out of unit 33 and the stage 1 carried out by stripper roll 340 and N group absorbing unit 51～5N～stage N's Action.

For an absorption layer, separately set the rate of climb and displacement in each stage.So, respectively Regulation mainly arranges the action of an absorption layer of stripping and the dynamic of its other absorption layer of auxiliary as main stripping main body Make.So that it is determined that the entirety of the process technological procedure of peeling action.

Figure 13 is the figure illustrating an example by processing the visual detail list of technological procedure.Blank column at detail list The numerical value that middle filling is appropriate, thus completes to process technological procedure.The pace peeled off and the preferred value of the size of peel angle θ Physical attribute according to transferred object such as substrate SB and/or the patterns between substrate SB from blanket BL and different.It addition, For determining to carry out the expansion of the gradient of the substrate SB in the quantity of the absorption layer of up-stripping action and up-stripping action Big coefficient (hereinafter referred to as " up-stripping sampling factor "), needs to become according to physical attributes such as substrate SB and patterns More.Further, for sampling factor (hereinafter referred to as " the liftings expansion of gradient of the substrate SB determined in enhancing action Coefficient ", need mainly to set according to the rigidity of substrate SB.

Therefore, for these values, operator gives via UI portion 705 and is used as initial information.On the other hand, if giving this A little initial informations, then for other action parameter, i.e. for speed when attracting starting position and rise of each absorbing unit 5i Degree and displacement, automatically calculate.It is made the operator processing technological procedure in such manner, it is possible to alleviate significantly Work load, prevents the malfunction caused because of inappropriate setting.Hereinafter, for speed when rising and displacement One example of concrete computational methods illustrates.

Figure 14 is the flow chart being made process illustrating and processing technological procedure.This process is that CPU701 performs by as in advance First process that technological procedure is made purposes and the control program for preparing realizes.First acquisition device information (step S201).Dress Confidence breath is quantity N and the information of their position representing the absorption layer installed in device.CPU701 believes based on this device Breath grasps the distance between each absorption layer, and determines the stage quantity that should prepare in peeling action.

It follows that accept the input (step S202) of the above-mentioned initial information relevant with the content of peeling action.Initially The acceptance of information can also be carried out before acquisition device information.It addition, initial information can directly input stripping off device 1, also Stripping off device 1 can be given via communication line by the initial information of the termination outside input.Alternatively, it is also possible to be behaviour Author sets initial information by selection from the numerical value pre-registered.

Then, parameter I being used for internal arithmetic is set as initial value 1 (step S203).In this place in reason, inhale from the 1st Attached pad 517 is set to the operation condition of N absorption layer 5N7 successively by circular treatment, and parameter I is denoted as currently calculating object Absorption layer be which.In fig. 14, by I absorption layer 5I7 referred to as " pad I ".

Parameter I is compared (step S204) with pad quantity (total quantity of absorption layer) N, if exceeding pad quantity N (in step Rapid S204 is no (NO)), then owing to all terminating for the calculating of whole absorption layers, so end processes.In step S204 In if yes (YES), then residue have as calculate object absorption layer, now carry out step S205 below step.

In step S205, determine that I absorption layer 5I7 plays period of function of main stripping main body, i.e. determine stage I from Start to finish duration.The start time of stage I is that this absorption layer 5I7 starts to remain substrate SB while rising Moment TI3.It addition, absorption layer 5 (I+1) 7 that the finish time of stage I is adjacent with this absorption layer 5I7 starts to keep substrate The moment T (I+1) 3 of SB.

Figure 15 is the figure schematically illustrating a stage in peeling action.As shown in figure 15, in the start time of stage I TI3, absorption layer 5I7 keep substrate SB to start with first rate of climb Vu1 promoting this substrate SB.Through before stripping Enter the moment T (I+1) 1 that the adjacent absorption layer 5 (I+1) 7 in the downstream in direction starts to decline with the first decrease speed Vd1, inhaling The moment T (I+1) 3 that attached pad 5 (I+1) 7 abuts with substrate SB upper surface, is transferred to the stage (I+1) from stage I.That is, stage I's Finish time T (I+1) 3 is also the start time of stage (I+1).

Additionally, as shown in the sequential chart of Figure 15 the latter half, decline with the first decrease speed Vd1 at absorption layer 5 (I+1) 7 After attracting starting position, decline further with the second decrease speed Vd2 and catch sorbing substrate SB.When substrate SB is in Time up away from the state of blanket BL, it is not easy to prediction absorption layer 5 (I+1) 7 captures the moment of substrate SB scrupulously Moment T (I+1) 3.I.e., it is difficult to determine the finish time of stage I scrupulously.

Therefore, here for easily calculating, following approximate calculation is imported.That is, such as the dotted line institute in the sequential chart of Figure 15 Show, it is assumed that absorption layer 5 (I+1) 7 also continues to decline with the first decrease speed Vd1 after arriving attraction starting position.Then, will inhale The moment of attached pad 5 (I+1) 7 arrival substrate SB upper surface is considered as capturing the moment T (I+1) 3 of substrate SB, and is set to stage I Finish time.Effectiveness for this approximate calculation, it is possible to carry out as described below.

Owing to absorption layer 5 (I+1) 7 the most only drops to catching position, so the dropping distance in above-mentioned approximate calculation Longer than actual dropping distance.It is therefore contemplated that the finish time ratio of the stage I obtained by approximate calculation is actually subjected to late.But, Owing to absorption layer 5 (I+1) 7 is with the second decrease speed slower than the first decrease speed from attracting starting position to catching position Fall, so spending the longer time than in the situation keeping the first decrease speed to decline.Therefore, by under in approximate calculation The increase of fall distance compensates the impact that the speed of reality reduces to a certain extent, and result is the mistake that suppression causes because of approximate calculation Difference.

Decline beginning opportunity it addition, set rightly and attract starting position, with absorption layer 5 (I+1) 7 from initial position Drop to attract starting position time dropping distance compare, it is possible to reduce fully from attract starting position to catching position away from From and distance from catching position to upper surface of base plate.Therefore, it is possible to suppression is because supposing that absorption layer 5 (I+1) 7 is from initial position The error dropping to upper surface of base plate and cause.Because these reasons, above-mentioned when solving the finish time T (I+1) 3 of stage I Approximate calculation is highly effective.

Based on above-mentioned approximate calculation, concrete computational methods are described.As shown in figure 15, respectively with reference Y1, Y3 table Show absorption layer 5I7,5 (I+1) 7 position in the Y direction.It addition, represent the start time TI3 at stage I by reference Y2 The Y-direction position of stripper roll 340.It addition, represent at the moment T (I+ that absorption layer 5 (I+1) 7 begins to decline by reference Y4 1) the Y-direction position of the stripper roll 340 of 1.It addition, represent in the finish time of stage I by reference Y5, i.e. at stage (I+ 1) the Y-direction position of the stripper roll 340 of start time T (I+1) 3.Stripper roll 340 moves to Y-direction with constant speed, with attached Figure labelling Vr represents its translational speed.

It addition, represent the absorption layer 5I7 distance upper surface of base plate of start time TI3 at stage I by reference Zc Highly, additionally with reference Za represent initial position absorption layer 5 (I+1) 7 distance upper surface of base plate height (Figure 10). It addition, with reference Zd represent this stage I finish time T (I+1) 3 absorption layer 5I7 distance upper surface of base plate height Degree.

Stage I duration, i.e. the time Δ T from the start time of stage I to finish time is that stripper roll 340 is from rank Position Y2 during the beginning of section I moves to time of position Y5 of finish time.This time Δ T passes through stripper roll 340 from position Movement and absorption layer 5 (I+1) 7 movement from initial position to catching position of Y2 to position Y4 control.According to this mode And above-mentioned approximate calculation, the relation of following formula is set up.

Δ T=(Y4-Y2)/Vr+Za/Vd1 ... (formula 1)

When considering the situation in stage 1, i.e. I=1, the position Y1 of the absorption layer 517 when action starts and stripper roll 340 The distance (Y2-Y1) of position Y2, and the distance (Y3-Y1) of the position Y1 of the absorption layer 517 and position Y3 of absorption layer 527 is all Known.It addition, the position Y4 of the stripper roll 340 when absorption layer 527 begins to decline also predetermines.And, peel off Translational speed Vr of roller 340, the height Za of initial position of absorption layer 527 and the first decrease speed Vd1 also predetermine 's.Obtain these values in advance and be used as above-mentioned device information.Therefore, it is possible to use they known values, determine according to formula 1 Obtain the duration Δ T in stage 1.

It addition, according to the position relationship shown in Figure 15, the relation of following formula is set up.

Δ T=(Y5-Y2)/Vr ... (formula 2)

And, according to formula 1 and formula 2, draw the relation of following formula.

Y5=Y4+Za Vr/Vd1 ... (formula 3)

Understand, the position of the stripper roll 340 when position Y5 is to start in the stage 2, also be able to according to known for this position Y5 Numerical value obtain.Therefore, for the stage 2 duration also be able to similarly obtain according to known value.Then, for the stage 3, the duration Δ T in a stage is also obtained in 4 ..., obtains the position of stripper roll 340 when the next stage starts, root According to this value obtain the next stage duration.It is thus possible to determine successively whole stage duration.

Return Figure 14, when obtain in step S205 stage I duration time, then calculate I in stage I and inhale The rate of climb (first rate of climb) of attached pad 5I7 and displacement (the first displacement) (step S206).Herein, necessary Condition is, at the end of stage I, peel angle formed by the substrate SB peeled off and blanket BL is setting θ.

According to the position relationship shown in Figure 15, draw the relation of following formula.

Zd=(Y5-Y1) tan θ ... (formula 4)

Due to value Y1 and Y5 be it has been determined that, peel angle θ also predetermines, it is possible to determine that stage I terminates Time the height Zd of absorption layer 5I7.The height Zd of the absorption layer 5I7 at the end of stage I is deducted height Zc during beginning, by This determines in the first displacement that stage I absorption layer 5I7 should rise.It addition, by the first displacement divided by stage I's Duration Δ T obtain first rate of climb.

In the stage 1, owing to absorption layer 517 abuts with the substrate SB being close to blanket BL, so Zc=0.On the other hand, After the stage 2, the height Zc of absorption layer 5 (I+1) 7 when starting for the stage, according to shown in Figure 15 at moment T (I+1) 3 Absorption layer 5 (I+1) 7 position understand, it is possible to obtained by following formula.

Zc=(Y5-Y3) tan θ ... (formula 5)

Attraction starting position for target location when declining as absorption layer 5 (I+1) 7, it is possible to obtain and above-mentioned (formula 5) position suitable for height Zb (step S207) that the height Zc be given in obtains plus the offset value specified.

So, in step S205～S207, according to known value obtain stage I duration, play in this stage First rate of climb of the absorption layer 5I7 of the function of main stripping main body and the first displacement and at next stage (I+1) Become the attraction starting position of absorption layer 5 (I+1) 7 of main stripping main body.As shown in step S210, the value of parameter I is made to depend on Secondary increase while carry out above-mentioned calculating, so can determine that become in each stage I main stripping main body I absorption layer move Make.

In the flow process shown in Figure 14, for the absorption layer in addition to the absorption layer of the function except playing main stripping main body also It is attached with the process for determining its action.That is, in step S208～S215, moving of the 1st absorption layer in the stage 2 is determined Make, the action of the 1st and the 2nd absorption layer in the stage 3, moving of the 1st, the 2nd and the 3rd absorption layer in the stage 4 Make ....

Specifically, if determining the I absorption layer 5I7's of the main stripping main body as stage I in step S205～S207 Action, then in step S211～S215, determine successively J absorption layer 5J7 in stage I (J=1,2 ..., I-1) Action.In order to the action of the up-stripping number set in advance in them is determined as up-stripping action, moving other Make decision as enhancing action, new inner parameter K will be imported.

In step S208, the value of inner parameter K is set as 1, in step S209, parameter K is compared with I.If The value of parameter K is less than parameter I (for being (YES) in step S209), then carry out the step that step S211 is later.If parameter K The value of parameter I more than parameter I (being no (NO) in step S209), then plus 1 and is back to step in step S210 by value Rapid S204, determines the action of each absorption layer in the next stage.

In step S211, the value of parameter J is set as (I-K).Parameter J is for determining that finishing main stripping leads successively The parameter of the absorption layer of the function of body.If the value of parameter K (is below up-stripping number set in advance in step S212 It is (YES)), then make the absorption layer 5J7 determined by parameter J carry out up-stripping action at stage I, set the rising in stage I Speed and displacement (step S213).On the other hand, if the value of parameter K more than up-stripping number (in step S212 is No (NO)), then the action of the absorption layer of up-stripping number has decided to.Therefore, remaining absorption layer 5J7 is made to carry Rise action, set their rate of climb and displacement (step S214).

By such process, for the absorption layer of the position from the absorption layer 5I7 being located adjacent to as main stripping main body Count the absorption layer 5J7 of up-stripping number successively, set the operation condition as up-stripping action.On the other hand, for it His absorption layer sets the operation condition as enhancing action.

For the rate of climb of the absorption layer 5J7 carrying out up-stripping action or enhancing action at stage I, by by phase The rate of climb (first rate of climb) of the absorption layer 5I7 as main stripping main body in same stage is multiplied by the auxiliary predetermined Peel off with or lifting sampling factor obtain.It addition, the displacement of absorption layer 5J7 is by by the above-mentioned rising obtained Speed be multiplied by this stage duration length obtain.Wherein, at absorption layer 5J7 by moving to reach in this stage In the case of end position, the distance to end position is set to climb.It addition, for having arrived at end position Absorption layer, is both configured to 0 by the rate of climb and displacement.

Thus, when an absorption layer 5J7 being set the operation condition as up-stripping action or enhancing action, make The value of parameter K increases by 1 (step S215), is back to step S209.So, also its action is determined as remaining absorption layer Up-stripping action or enhancing action.

Rate of climb absorption layer 5i7 set at stage i and displacement respectively with " the of this absorption layer 5i7 One rate of climb " and " the first displacement " (Figure 10) correspondence.It addition, set for this absorption layer 5i7 in the stage (i+1) The rate of climb and displacement are corresponding with " second rate of climb " and " the second displacement " respectively.Similarly, in the stage (i+2) for this absorption layer 5i7 set the rate of climb and displacement respectively with " the 3rd rate of climb " and " the 3rd move Dynamic distance " corresponding.

Such as absorption layer 517, the rate of climb corresponding with the stage 1 and displacement are first rate of climb respectively And first displacement.It addition, the rate of climb corresponding with the stage 2 and displacement be respectively second rate of climb and Second displacement.Then, corresponding with the stage 3 rate of climb and displacement are the 3rd rate of climb and the 3rd respectively Displacement.First rate of climb and the first displacement separately can set for each absorption layer, setting value Might not be identical.For being also same after second rate of climb and the second displacement.

Figure 16 is the figure of the order of the action decision illustrating absorption layer.Numeral plus bracket represents decision action in the drawings The order of parameter (rate of climb and displacement).When carrying out when being made process of process technological procedure shown in Figure 14, as Shown in reference (1), first it is decided to become the action parameter of the absorption layer 517 (pad 1) of main stripping main body the stage 1.Connect , determine in the stage 2 action parameter of the absorption layer 527 (pad 2) as main stripping main body successively and carry out in this stage The action parameter of the absorption layer 517 (pad 1) of auxiliary movement.Then, the absorption as main stripping main body in the stage 3 is determined successively Pad the action parameter of 537 (pads 3) and carry out absorption layer 517 (pad 1) and the action of 527 (pads 2) of auxiliary movement in this stage Parameter.

Similarly in the following, based on numerical value that is that predetermine or that determine during calculation process, determine each successively The operation condition of absorption layer.Until represent stage quantity parameter I reach pad number, the most above-mentioned process (step S204), Be thus directed towards whole absorption layers, whole stages determines action.The example of absorption layer number N=8 is shown herein.So, Decision should be filled into the numerical value in each hurdle of Figure 13, determines process technological procedure.

As previously discussed, the technological procedure of peeling action preferably is made in process, according to providing stripping dress Device information that the configuration state of each several part putting 1 determines and operator's input as the basic ginseng making action have feature The initial information of number.Based on these information, stripping off device 1 determine in peeling action each other and with stripper roll 340 it Between the action of absorption layer 517～5N7 that collaborates complete to process technological procedure.

Therefore, there is no need to the work that operator sets the details of technological procedure, be greatly reduced the burden of operator.Separately Outward, it is possible to prevent the mistakes such as breakage because setting mistake and cause cooperating smoothly, peel off bad or component.Thus, it is possible to it is sharp Peel off well with stripping off device 1.

Additionally, as it has been described above, as stripping off device, the advance peeled off except passing through stripper roll 340 to control, while carrying Rise beyond substrate SB, as shown below, the most do not use stripper roll, make the multiple absorption layers abutted with substrate SB in advance go up successively Rise, thus control the advance peeled off.

Figure 17 A～Figure 17 D is the figure of configuration example and its action illustrating the stripping off device being not provided with stripper roll.This stripping It is similar to that the structure after removing stripper roll 340 from above-mentioned stripping off device 1 from device 2.Therefore, fill for peeling off Putting 1 identical or suitable structure, reference that labelling is identical also omits the detailed description of structure, in main explanation action Difference.

As shown in Figure 17 A, in this stripping off device 2, the absorption layer of whole absorbing units 51～5N in advance with substrate SB Upper surface abut, respectively absorption keep substrate SB.From this state, as shown in Fig. 7 B and Fig. 7 C, by make absorbing unit 51, 52,53 ... rise successively and promote substrate SB, thus peel off advance.Under this form, abut with unstripped substrate SB Rising before absorbing unit play the effect of advance out of order limiting stripping borderline line in the same manner as stripper roll.Particularly, Configure substantial amounts of absorbing unit with narrow interval in the Y direction, it is possible to more be advantageously controlled the advance of stripping.

Owing to there is no stripper roll under this form, so need not set roller speed and determine absorption starting position. However, it is desirable to be set in after absorption layer proceeds by main peeling action, becoming main stripping main body to next absorption layer Waiting time Tw.Waiting time Tw is corresponding with the duration of Δ T in each stage having in the case of stripper roll.In above-mentioned enforcement For the lifting opportunity by adjusting absorption layer in mode, before the stripping obtaining and being controlled by the translational speed of stripper roll 340 Enter the stripping pace that speed is equal.It also is able to suppose that imaginary stripper roll moves with constant speed, it is considered to this stripper roll exists Traveling time when moving between absorption layer.As shown in figure 17d, in concrete calculating, the substrate promoted with adsorbed pad 5i7 The underface of SB absorption layer 5 (i+1) 7 before rising and blanket BL angulation (peel angle) θ reach the side of setting Formula, determines the rate of climb and the displacement of absorbing unit 5i.

That is, according to the relation shown in Figure 17 D, for first displacement Z1 of absorption layer 5i7, following formula represent.

Z1=G tan θ ... (formula 6)

Herein, reference G is arrangement pitches in the Y direction between absorption layer 5i7 and 5 (i+1) 7, believes according to device Breath is known.

Further, the rate of climb of absorption layer 5i7 can be obtained according to Vu1 following formula.

Vu1=Z1/Tw ... (formula 7)

Action for the absorption layer carrying out up-stripping action or enhancing action, it is possible to by having stripping with above-mentioned Situation same consideration method from roller is obtained.

So, in the stripping off device 2 being not provided with stripper roll, although stage i duration, enter as main stripping main body First rate of climb of the absorption layer 5i7 that action is made and the calculating formula of the first displacement are different, the most also have and need not Attract the such difference of concept of starting position, but the technological procedure shown in Figure 14 can be applied to be made the order of process.

Hereinafter, the method for the technological procedure of the peeling action being made for checking illustrates.Just by above-mentioned work For the process technological procedure that one-tenth method is made, stripper roll and absorbing unit collaborate rightly, and stripping should be able to be well Advance.But, the process technological procedure that is just made by other method or operated again after being made by said method For the process technological procedure that person changes partly, just may not can ensure that such effect.It addition, sometimes because of irrelevantly Setting input device information or initial information, it is not optimum for causing the process technological procedure being made by above-mentioned process.

Because of these reasons may cause based on process technological procedure and the peeling action that carries out cause substrate SB damage or Person's pattern damages etc. are peeled off bad.In order to prevent such problem, this stripping off device 1 can be for the process technological procedure be given Carry out following technological procedure verification process.Additionally, the process technological procedure of technique for applying code verification process is not limited to Said method, but the process technological procedure being made in any method can.

In order to the concept of technological procedure verification process is described, the first control program to the peeling action of this stripping off device 1 Overall structure illustrate.Peeling action is to perform pre-prepd control program by CPU701 to realize following each function Block, controls device each several part and carries out.

Figure 18 is the figure of the structure illustrating the control program for carrying out peeling action.In further detail, it is to illustrate by this The functional device that control program realizes and the block diagram of the connection between them.In actual peeling action, use figure is used a little Each functional device that line surrounds.

The functional device realized by control program has: master control part 711, GUI (Graphical User Interface, Graphic user interface) portion 712, physical device DLL (Dynamic Link Library, dynamic link library) 713 and currency Preserve file 714.Master control part 711 performs the main actions of peeling action, such as, perform the action of the absorbing unit shown in Fig. 8 Sequentially.GUI portion 712 has as accepting the various user interfaces setting input and report result from user Function.Action from operator indicates and describes the file 720 being made complete technological procedure and gives via GUI portion 712 main Control portion 711.

Physical device DLL713 has control module, and this control module is for based on the control from master control part 711 Instruction, makes motor and the sensor etc. as the detector of the state detecting this motor carry out action, and this motor is to play to peel off The mechanism part of the function of the executive agent of action.Prepare to meet motor and each spy of sensor that stripping off device 1 comprises Property mode carried out specialization control module.By using structure as such, it is not necessary to consider further that in master control part 711 The characteristic of each mechanism part.

It is for representing various motors, valve and sensor (hereinafter referred to as " motor etc. ") etc. that currency preserves file 714 The data of state of device each several part carry out the file that preserves, and carry out according to the data given at any time from master control part 711 Update.Can preserve, according to currency, the data preserved in file 714, each several part grasping stripping off device 1 at any time is currently at Which kind of state.

In order to carry out processing the checking of technological procedure, prepare proving program 721 and imagination device DLL722, should The checking processing technological procedure uses the control program so constituted, and device need not be made to carry out action practically.Work as operation When person's instruction carries out technological procedure verification process to stripping off device 1, imagination device DLL722 replaces physical device DLL713 Include in control program.Then, control program is performed based on the process technological procedure as identifying object.

Imagination device DLL722 is optionally to include the DLL of master control part 711 in physical device DLL713, and has Have and realize imagination motor for each action of various motors etc. installed in stripping off device 1 being emulated (emulate) Control module with imagination sensor.

Imagination device DLL722, for the control instruction from master control part 711, returns and makes mechanism part enter with actual The response that the response that returned of physical device DLL713 that action is made is same.Therefore, in master control part 711, via reality Border equipment DLL713 makes the device each several part such as motor and sensor carry out the situation of action practically and use via imagination device In the case of DLL722 makes imagination motor and imagination sensor carry out action, carry out identical process.So, it is possible to make replacement real Border equipment DLL713 and incorporate imagination device DLL722 control program as imagination device carry out action, thus need not The movable part making device practically carries out action, it becomes possible to carry out processing the checking of technological procedure.

Proving program 721 is for simulating the dynamic of (simulation) display imagination device with the observable form of operator Make.Proving program 721 is in carrying out the course of action of imaginary device of the process technological procedure as identifying object, with suitable Sampling interval preserves file 714 from currency and reads data, simulates the state of the device each several part of this time point.Now, not only The position of each movable part arranged in analog and state, also simulate the posture of the substrate realized by their action. Display (not shown) such as the such as liquid crystal display that arranges in UI portion 705 of result of simulation or be connected with UI portion 705 Outside display device on show output.

Figure 19 is the flow chart of the process content illustrating proving program.Proving program repeated with the sampling interval of regulation Step S301 shown in Figure 19～each process of S312, carry out verification process technological procedure.

First, preserve file from currency and read in data (step S301).So, the motor etc. of stripping off device 1 will be constituted It is taken into proving program in the data such as the running-active status of current point in time and position.Then, according to represent drive stripper roll 340 and The motor of each absorption layer 517～5N7 lifting or detect they state sensor the currency of data, calculate and peel off The current location (step S302) of roller 340 and each absorption layer 517～5N7.The position of each several part is except according to detecting theirs Beyond the output of sensor is directly obtained, additionally it is possible to indirectly obtain according to giving the umber of pulse driving motor.Based on calculating As a result, display output stripper roll 340 and the current location (step S303) of each absorption layer 517～5N7.

Figure 20 A～Figure 20 C is the figure of the example illustrating display picture.Figure 20 A be show the stripper roll 340 calculated and The example (N=6 in this example embodiment) of the position of absorption layer 517～5N7.By the shape simplification of each absorption layer 517～5N7 it is herein Simple rectangle, but display form is not limited to this, can be arbitrary.At the round dot table shown in the bottom of each absorption layer Show the position of the lower end of this absorption layer.Bullet (●) therein represents that this absorption layer positive absorption remains substrate SB, white round dot (zero) this absorption layer unadsorbed holding substrate SB is represented.It addition, the bullet (●) of stripper roll 340 bottom represents at physical device In the lower end position of stripper roll 340 that abuts with substrate SB.Additionally, these marks are for illustrating display picture just labelling, It is not meant to show these marks on actual picture.

Then, the position (step of several sample points of the posture determining substrate whether is adsorbed according to absorption layer S304).The sample point of substrate be in the substrate representing and carrying out peeling action by device component keep and position is restrained The point of position.In this stripping off device 1, substrate suffers restraints in two following positions, and the two position is and absorption layer 517 ～in 5N7 absorption keep substrate absorption layer abut abutted position, and be connected to the stripping of unstripped substrate surface The abutted position abutted from roller 340.

Bullet shown in Figure 20 A is respectively equivalent to the most so-called sample point.On the other hand, each with shown in white round dot Point represents the lower end of the absorption layer of unadsorbed substrate, owing to these absorption layers the most do not affect the posture of substrate, so these Point is not equivalent to the sample point at this time point.

The posture of analog baseplate, display output analog result is come by suitably carrying out interpolation between these sample points (step S305).In the example of Figure 20 B, between sample point, carry out linear interpolation, by the posture of broken line display base plate SB, but It is can also be by suitable smoothing forming curves interpolation.Wherein, the invariant position of preferred sample point.Such by carrying out Analog information, operator can confirm the posture of the substrate SB changed to the moment in peeling action on picture.

Such as shown in Figure 20 C, at the substrate SB of display, there is the situation of bigger fluctuating or there is bending greatly In the case of, exist and substrate SB or the pattern that is transferred are caused damage, or keep unsuccessfully causing substrate SB with absorption layer The danger fallen.Occur that the process technological procedure of situation as such can be described as inappropriate.

Additionally, in physical device, although may sometimes contact with substrate by absorption layer, but absorption is the most failed.Very Difficulty speculates that on imagination device such substrate keeps the most successful, but is carrying out such analog information, can be considered as In the case of absorption layer and substrate for giving the state of negative pressure contacts, begin to carry out absorption and keep.

Then, it is judged that when this is sampled, absorption layer newly proceeds by absorption (step S306).That is, adopted in last time It not that the absorption layer of adsorbed state is when becoming adsorbed state during sample, it is judged that proceed by absorption for absorption layer and open.

Figure 21 A～Figure 21 C is the figure illustrating absorption layer with the position relationship of substrate.When certain is sampled, such as Figure 21 A institute Showing, absorption layer 5 (i+1) 7 is in non-adsorbed state, if when sampling next time, as illustrated in fig. 21b, absorption layer 5 (i+1) 7 becomes inhaling Attached state, then be judged as newly carrying out adsorbing (for being (YES) in step S306).Now, obtain this absorption layer 5 (i+1) 7 and inhale Interval D a of attached pad 5i7, this absorption layer 5i7 is adjacent with this absorption layer 5 (i+1) 7 and sorbing substrate SB.

According to the position relationship shown in Figure 21 B, for the initial value Da at pad interval, it is possible to represented by following formula.

Da=(G²+ΔZ²) 1/2 ... (formula 8)

Herein, G is arrangement pitches in the Y direction between the absorption layer grasped according to device information.It addition, Δ Z is at this Two absorption layer 5i7 of time point and the difference in height of 5 (i+1) 7, the data according to preserving file 714 reading from currency are slapped Hold.The initial value that value Da obtained by formula 8 is spaced as pad is stored preservation (step S307).If do not have new absorption ( Step S306 is no (NO)), skip over step S307.

It follows that for the whole absorption layer at current point in time absorption holding substrate SB, obtain the suction being adjacent to Pad interval D b (step S308) between attached pad.Such as at absorption layer 517 and 527 sorbing substrate SB, other absorption layer is not inhaled In the case of attached substrate SB, obtain the interval between absorption layer 517 and 527.It addition, such as adsorb base at absorption layer 517～547 In the case of plate SB, the most one by one obtain the interval between the interval between absorption layer 517 and 527, absorption layer 527 and 537 And the interval between the 547 of absorption layer 537 is as pad interval D b.The method for solving of pad interval D b is same as described above, such as Figure 21 C Shown in, based on arrangement pitches G in the Y direction between two absorption layers and the height between two absorption layers of this time point Difference Δ Z calculates.

For pad interval D a between the two at the time point being started sorbing substrate SB by two absorption layers, due to it After the postural change of substrate SB and make it be not necessarily identical value with pad interval D b of current point in time.Such pad interval Change represents, the substrate SB kept by two absorption layers is along with before peeling off and then on the direction of the interarea along this substrate SB Compressed or extended.The flexible of such substrate SB is also likely to be the reason that substrate SB or pattern cause damage.

Therefore, the ratio C (step S309) of current pad interval D b and pad interval D a during absorption beginning is obtained, it is judged that should Whether value C is in the allowed band predetermined (step S310).If ratio C is 1, then substrate SB is non-telescope；If more than 1, then Substrate SB is stretched.If it addition, less than 1, then substrate SB is compressed.Value accordingly, as allowed band is set as comprising 1 About 1 value.

When ratio C is beyond allowed band (being no (NO) in step S310), show alert message, this alert message table Show to exist and substrate SB is applied excessive compression or the danger (step S311) of elongation.If ratio C in allowed band (in step For being (YES) in rapid S310), then skip over step S311.Other, such as can also be each according to the position calculation substrate SB of sample point The curvature of part, shows alert message when this value is beyond allowed band.

Until verification process terminates (step S312), above-mentioned process is repeated with certain sampling interval.Therefore, The position of the device each several part that picture shows and the posture of substrate SB along with before peeling action so that the moment change, by base Show as animation in the advance situation of peeling action of the process technological procedure be given and illustrate.Operator can observe this picture It is the most suitable that face judges to process technological procedure.Alternatively, it is also possible to according to whether meet the condition that show warning, automatically Judge to process the most suitable of technological procedure.Carry out processing the checking of technological procedure by such mode.

As described above, in this embodiment, blanket BL and substrate SB is respectively equivalent to the present invention's " the first plate body " and " the second plate body ".It addition, absorbing unit 51～5N, particularly absorption layer 517～5N7 play this The function of bright " detacher ".It addition, stripper roll 340 plays the function of " roller component " of the present invention.It addition, each absorbing unit First decrease speed Vd1 is equivalent to " close to the translational speed " of the present invention.It addition, in the above-described embodiment, +Y direction is suitable In " peeling direction " of the present invention, observing from the angle of certain component ,+Y side is equivalent in " downstream ", and-Y side is equivalent to " upstream Side ".

Additionally, the present invention is not limited to above-mentioned embodiment, without departing from its purport, in addition to the foregoing can also Enough carry out various change.Such as, the stripping off device 1 of above-mentioned embodiment has concurrently to carry out the workpiece WK moved into peeling off and moves Work energy, the function being made process technological procedure for carrying out this peeling action and the function of verification process technological procedure. But, these functions can also realize independently as other device.

Such as, process technological procedure is made function and authentication function can also be as at the meter with stripping off device 1 split Calculate the program performed on machine to realize.It addition, for example, it is also possible to by least one of the control unit 70 of stripping off device 1 Dividing the work station constituted with stripping off device 1 split, realization processes technological procedure and is made function and checking merit thereof on the work Energy.It addition, for example, it is also possible to process technological procedure is made the application present invention process technological procedure to seek optimization, to save Process the authentication function of technological procedure.

It addition, the stripping off device 1 of above-mentioned embodiment is as the process technological procedure that can preferably apply the present invention One example of the device of creating method is recorded, and apparatus structure is not limited to above-mentioned structure.

Above, as exemplified specific embodiment illustrates, in the first operation in the present invention, permissible The translational speed of each detacher in separate mobile is set to, in order to make the stripping pace in peeling direction reach Speed required for fixing speed.It addition, in the first operation, it is also possible to by the mobile speed of each detacher in separate mobile Degree is set to, in order to make at the end of this detacher is as the period of main stripping main body, the first plate body after just peeling off Angle formed by the interarea of interarea and the second plate body reaches the speed required for predetermined angular.

It addition, in the second operation, it is also possible to the translational speed of each detacher in separate mobile is set to, will be Translational speed as other detacher of main stripping main body is multiplied by the value that the coefficient of regulation obtains during this period.In this situation Under, it is also possible to one by one multiple periods that the detacher as main stripping main body is different from each other are separately set coefficient.

Alternatively, it is also possible to be, stripping off device has by abutting with the surface of the second plate body while to stripping side The roller component of the advance of stripping is limited to movement；Each detacher is after roller component passes through, from moving back away from the second plate body Keep away position to abut with the second plate body close to mobile to the second plate body；In the first operation, will be from the beginning of a detacher Carry out separate mobile, pass through to connect at the detacher that this detacher of the downstream and this of this detacher is adjacent in peeling direction Near mobile and period till abutting with the second plate body, it is set to this detacher period as main stripping main body.

In this case, roller component is constant to the translational speed of peeling direction, in the first operation, it is also possible to base In the translational speed of roller component, obtain each detacher period as main stripping main body.It is further possible to be, stripping From device proceed by close to movement close to beginning opportunity be to predetermine with the relative position of roller component based on this detacher , and when detacher is carried out close to predetermining close to translational speed time mobile；In the first operation, based on roller structure The translational speed of part, close to beginning opportunity with close to translational speed, obtain each detacher period as main stripping main body.

It addition, the present invention can also be, stripping off device is after a detacher proceeds by separate mobile, through regulation Stand-by time after, a detacher adjacent with this detacher in the downstream of this detacher in peeling direction start into Row separate mobile；In the first operation, obtain the translational speed of each detacher in separate mobile based on stand-by time.

Probability is utilized in industry

The present invention can be applied to be made the process technological procedure of the device making two plate bodys being mutually close to peel off, special It it not the technology that can be preferably applied to such as pattern or thin film etc. are transferred to another plate body from a plate body.

Claims (9)

1. a technological procedure creating method, is the stripping off device making the first plate body being mutually close to and the second plate body peel off Technological procedure creating method, it is characterised in that

Described stripping off device has multiple detacher, and multiple detachers are respectively provided with to abut with described second plate body local and protect Hold the function of described second plate body, and multiple detacher is along the peeling direction arrangement of regulation, the plurality of detacher one While keep described second plate body, to the separation away from described first plate body according to the order along described peeling direction Direction carries out separate mobile, thus makes described second plate body peel off from described first plate body,

Described second plate body will be kept while being positioned at described stripping in the described detacher that described detaching direction moves The described detacher of the most downstream side on direction is defined as main stripping main body,

This technological procedure creating method includes:

First operation, for detacher each described, determines this detacher period as described main stripping main body, obtains at this In period, this detacher is to the translational speed of described detaching direction,

Second operation, for detacher each described, becomes the period after not being described main stripping main body based at this detacher As the translational speed of other described detachers of described main stripping main body, obtain that to become be not this stripping of described main stripping main body From device during this period to the translational speed of described detaching direction.

2. technological procedure creating method as claimed in claim 1, it is characterised in that

In described first operation, the translational speed of each the described detacher in described separate mobile is to make described stripping The pace of the stripping on direction reaches the speed required for fixing speed.

3. technological procedure creating method as described in claim 1 or 2, it is characterised in that

In described first operation, the translational speed of each the described detacher in described separate mobile is to make in this stripping At the end of the device period as described main stripping main body, the interarea of described first plate body after just peeling off and described second tabular Angle formed by the interarea of body reaches the speed required for predetermined angular.

4. technological procedure creating method as described in claim 1 or 2, it is characterised in that

In described second operation, the translational speed of each the described detacher in described separate mobile is, in conduct this period The translational speed of other described detachers of described main stripping main body is multiplied by the value that the coefficient of regulation obtains.

5. technological procedure creating method as claimed in claim 4, it is characterised in that

In described second operation, for the difference of multiple periods that the described detacher as described main stripping main body is different from each other Set described coefficient individually.

6. technological procedure creating method as described in claim 1 or 2, it is characterised in that

Described stripping off device has by while abutting while moving to described peeling direction with the surface of described second plate body Limiting the roller component of the advance of stripping, each described detacher is after described roller component passes through, from away from described second tabular The retreating position of body, carries out abutting close to mobile with described second plate body to described second plate body,

In described first operation, from the beginning of a described detacher proceeds by described separate mobile, in described stripping side Upwards adjacent with this detacher in the downstream of this detacher described detacher is by described next with described close to moving Second plate body abut till period, for this detacher as period of described main stripping main body.

7. technological procedure creating method as claimed in claim 6, it is characterised in that

Described roller component is constant to the translational speed of described peeling direction,

In described first operation, translational speed based on described roller component, obtain each described detacher as described main stripping Period from main body.

8. technological procedure creating method as claimed in claim 7, it is characterised in that

Described detacher proceed by described close to movement close to beginning phase based on this detacher with described roller component on opportunity Position is predetermined, and, is to predetermine when described detacher carries out described close movement close to translational speed ,

In described first operation, translational speed based on described roller component, described close to beginning opportunity and described close to mobile Speed, obtains each described detacher period as described main stripping main body.

9. technological procedure creating method as described in claim 1 or 2, it is characterised in that

In described stripping off device, after a described detacher proceeds by described separate mobile, standby through specify After time, a described detacher adjacent with this detacher in the downstream of this detacher in described peeling direction start into The described separate mobile of row,

In described first operation, obtain each described detacher of carrying out in described separate mobile based on described stand-by time Translational speed.