CN105990512A - Polystyrene colloidal sphere and niobium film composite heterogeneous structure superconducting material and preparation method - Google Patents

Polystyrene colloidal sphere and niobium film composite heterogeneous structure superconducting material and preparation method Download PDF

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CN105990512A
CN105990512A CN201610466968.2A CN201610466968A CN105990512A CN 105990512 A CN105990512 A CN 105990512A CN 201610466968 A CN201610466968 A CN 201610466968A CN 105990512 A CN105990512 A CN 105990512A
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polystyrene
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李志刚
冯尚申
王天乐
南浩善
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Taizhou University
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Abstract

本发明公开了一种聚苯乙烯胶体球与铌膜复合异质结构超导材料,包括衬底、铌膜和聚苯乙烯胶体六角阵列膜,铌膜位于衬底之上,聚苯乙烯六角阵列膜覆盖于铌膜之上;聚苯乙烯六角阵列膜包括多个聚苯乙烯胶体微球,各聚苯乙烯胶体微球以单层紧密排列为六角状阵列。本发明还公开了所述超导材料的制备方法。本发明将聚苯乙烯胶体微球和铌超导薄膜材料构筑为异质结构纳米结构材料,通过改变胶体球和铌衬底的接触面积,调控超导转变的临界温度,从而提高铌薄膜的超导转变温度Tconset,材料制备工艺简单,所需的设备较少,大大降低超导材料的制备成本,有利于推广应用。

The invention discloses a composite heterostructure superconducting material of polystyrene colloidal spheres and niobium films, comprising a substrate, a niobium film and a polystyrene colloid hexagonal array film, the niobium film is located on the substrate, and the polystyrene hexagonal array film The film is covered on the niobium film; the polystyrene hexagonal array film includes a plurality of polystyrene colloidal microspheres, and each polystyrene colloidal microsphere is closely arranged in a single layer to form a hexagonal array. The invention also discloses a preparation method of the superconducting material. In the present invention, polystyrene colloidal microspheres and niobium superconducting thin film materials are constructed as heterostructure nanostructure materials, and the critical temperature of superconducting transition is regulated by changing the contact area of colloidal spheres and niobium substrates, thereby improving the superconductivity of niobium thin films. The conduction transition temperature Tc onset , the material preparation process is simple, less equipment is required, the preparation cost of the superconducting material is greatly reduced, and it is beneficial to popularization and application.

Description

聚苯乙烯胶体球与铌膜复合异质结构超导材料及制备方法Polystyrene colloidal sphere and niobium film composite heterostructure superconducting material and preparation method

技术领域technical field

本发明涉及一种聚苯乙烯胶体球与铌膜复合异质结构超导材料及制备方法。The invention relates to a composite heterostructure superconducting material of polystyrene colloidal spheres and niobium films and a preparation method thereof.

背景技术Background technique

超导态是大量电子发生配对凝聚的宏观量子相干现象,它不仅有重要的应用价值,同时又涉及固体系统电子多体效应的重大基础科学问题。超导由于其特有的零电阻载流和超导凝聚的量子相干效应,自从发现以来便向人们展示出其广阔的应用前景。但目前超导材料在实用化道路上仍有许多障碍存在,对于一个超导材料而言,它的超导电性取决于三个临界参量:临界温度、临界磁场和临界电流密度,当温度、磁场和电流密度大于临界参量时,超导电性即被破坏。因此超导材料的实用化一方面取决于能否对超导电性实现有效控制,另一方面依赖于如何实现超导临界参量的优化和提高。The superconducting state is a macroscopic quantum coherence phenomenon in which a large number of electrons are paired and condensed. It not only has important application value, but also involves a major basic scientific problem of the many-body effect of electrons in solid systems. Due to its unique zero-resistance current carrying and the quantum coherence effect of superconducting condensation, superconductivity has shown people its broad application prospects since its discovery. However, there are still many obstacles in the practical application of superconducting materials. For a superconducting material, its superconductivity depends on three critical parameters: critical temperature, critical magnetic field and critical current density. When the temperature, magnetic field When the current density is greater than the critical parameter, the superconductivity is destroyed. Therefore, the practical application of superconducting materials depends on whether the superconductivity can be effectively controlled on the one hand, and on how to optimize and improve the critical parameters of superconductivity on the other hand.

众所周知,在不同的压力下,超导薄膜的超导转变温度会发生变化,一般来讲,压强越大,材料的超导转变温度提升越明显。然而,从经济和实用的角度来讲,目前采用的通过高压提升材料超导转变温度的同时也限制了超导器件的应用。如何通过简便、经济的途径提升超导材料的临界温度,成为超导器件实用化的一个重要因素。It is well known that under different pressures, the superconducting transition temperature of superconducting thin films will change. Generally speaking, the higher the pressure, the more obvious the increase in the superconducting transition temperature of the material. However, from an economic and practical point of view, the current method of increasing the superconducting transition temperature of materials through high pressure also limits the application of superconducting devices. How to increase the critical temperature of superconducting materials in a simple and economical way has become an important factor for the practical application of superconducting devices.

发明内容Contents of the invention

本发明的目的是解决目前超导材料一般通过高压提升超导转变温度,从而改善其超导电性,但巨大的压强对设备要求高,导致其应用困难,成本高的技术问题。The purpose of the present invention is to solve the technical problem that the superconducting transition temperature of current superconducting materials is generally increased by high pressure, thereby improving their superconductivity, but the huge pressure requires high equipment, resulting in difficult application and high cost.

为实现以上发明目的,一方面,本发明提供一种聚苯乙烯胶体球与铌膜复合异质结构超导材料,包括衬底、铌膜和聚苯乙烯六角阵列膜,所述铌膜位于所述衬底之上,所述聚苯乙烯六角阵列膜覆盖于所述铌膜之上;In order to achieve the purpose of the above invention, on the one hand, the present invention provides a polystyrene colloidal sphere and niobium film composite heterostructure superconducting material, including a substrate, a niobium film and a polystyrene hexagonal array film, and the niobium film is located at the On the substrate, the polystyrene hexagonal array film is covered on the niobium film;

所述聚苯乙烯六角阵列膜包括多个聚苯乙烯胶体微球,各所述聚苯乙烯胶体微球以单层紧密排列为六角状阵列。The polystyrene hexagonal array film includes a plurality of polystyrene colloidal microspheres, and each polystyrene colloidal microsphere is closely arranged as a hexagonal array in a single layer.

进一步地,所述衬底为高阻硅衬底。Further, the substrate is a high resistance silicon substrate.

进一步地,所述铌膜的厚度为70nm~200nm。Further, the thickness of the niobium film is 70nm-200nm.

进一步地,所述聚苯乙烯胶体微球的直径为100nm~2000nm。Further, the polystyrene colloidal microspheres have a diameter of 100nm-2000nm.

另一方面,本发明提供一种聚苯乙烯胶体球与铌膜复合异质结构超导材料的制备方法,包括以下步骤:In another aspect, the present invention provides a method for preparing a polystyrene colloidal sphere and niobium film composite heterostructure superconducting material, comprising the following steps:

(1)清洗衬底;(1) Clean the substrate;

(2)合成铌膜:将所述衬底放入真空磁控溅射镀膜机中,将铌靶放置于磁控溅射靶位,抽真空,进行溅射镀膜,合成铌膜;(2) Synthesis of niobium film: put the substrate into a vacuum magnetron sputtering coating machine, place the niobium target on the magnetron sputtering target position, vacuumize, perform sputter coating, and synthesize the niobium film;

(3)在所述衬底上镀上所述铌膜;(3) coating the niobium film on the substrate;

(4)采用气-液界面合成法,将聚苯乙烯胶体微球附于镀有铌膜的所述衬底表面,形成聚苯乙烯胶体球与铌膜复合异质结构超导材料。(4) Using a gas-liquid interface synthesis method, attaching polystyrene colloidal microspheres to the surface of the substrate coated with niobium film to form a composite heterostructure superconducting material of polystyrene colloidal spheres and niobium film.

进一步地,所述步骤(1)中,清洗所述衬底的工序包括:Further, in the step (1), the process of cleaning the substrate includes:

(101)将所述衬底置于丙酮中超声清洗40分钟,然后用去离子水清洗多次;(101) ultrasonically cleaning the substrate in acetone for 40 minutes, and then cleaning with deionized water for several times;

(102)将所述衬底置于无水乙醇中超声清洗40分钟,然后用去离子水清洗多次;(102) ultrasonically cleaning the substrate in absolute ethanol for 40 minutes, and then cleaning with deionized water for several times;

(103)将所述衬底置于蒸馏水中超声清洗30分钟后,置于无水乙醇中待用。(103) The substrate was ultrasonically cleaned in distilled water for 30 minutes, and then placed in absolute ethanol for use.

进一步地,所述步骤(2)中,溅射镀膜时,将所述衬底的温度保持在400 oC,抽真空至10-7托,然后充入氩气进行溅射镀膜,溅射功率为70瓦,预溅射时间为3000秒,溅射沉积时间为1500秒~5000秒。Further, in the step (2), during sputter coating, the temperature of the substrate is kept at 400 o C, vacuumed to 10 -7 Torr, and then filled with argon gas for sputter coating, the sputter power The power is 70 watts, the pre-sputtering time is 3000 seconds, and the sputtering deposition time is 1500 seconds to 5000 seconds.

进一步地,步骤(2)中所述Nb靶纯度为99.99%。Further, the purity of the Nb target in step (2) is 99.99%.

进一步地,步骤(4)中所述聚苯乙烯胶体微球阵列的直径误差≤8%。Further, the diameter error of the polystyrene colloidal microsphere array in step (4) is ≤8%.

进一步地,所述步骤(4)的工序如下:Further, the procedure of step (4) is as follows:

(401)将聚苯乙烯胶体球溶液按照一定的体积比与无水乙醇和去离子水混合,再将混合液注入到注射器中;(401) Mix the polystyrene colloidal sphere solution with absolute ethanol and deionized water according to a certain volume ratio, and then inject the mixed solution into the syringe;

(402)用所述注射器将所述混合液滴到所述衬底表面,所述混合液在衬底边缘与去离子水发生界面作用,在表面张力的作用下,使聚苯乙烯胶体球浮于液体表面,形成规则的纳米结构膜;然后,用镀有铌膜的衬底将所述纳米结构膜捞起,用滤纸将所述纳米结构膜上多余的去离子水吸走,得到聚苯乙烯胶体球与铌膜复合异质结构超导材料。(402) Use the syringe to drop the mixed liquid onto the surface of the substrate, and the mixed liquid will interact with deionized water at the edge of the substrate, and under the action of surface tension, the polystyrene colloidal balls will float On the surface of the liquid, a regular nanostructure film is formed; then, the nanostructure film is picked up with a substrate coated with a niobium film, and the excess deionized water on the nanostructure film is sucked away with filter paper to obtain polyphenylene Ethylene colloidal spheres and niobium films composite heterostructure superconducting materials.

进一步地,通过热处理改变所述聚苯乙烯胶体微球和所述铌膜之间的接触面积,热处理的温度范围为70 oC ~100 oC,热处理时间为0~120分钟。Further, the contact area between the polystyrene colloidal microspheres and the niobium film is changed by heat treatment, the heat treatment temperature ranges from 70 o C to 100 o C, and the heat treatment time is 0 to 120 minutes.

与现有技术相比,本发明的有益效果是:Compared with prior art, the beneficial effect of the present invention is:

本发明将聚苯乙烯胶体微球和铌超导薄膜材料构筑为异质结构纳米结构材料,通过改变胶体球和铌衬底的接触面积,调控超导转变的临界温度,从而提高铌薄膜的超导转变温度Tconset,材料制备工艺简单,所需的设备较少,大大降低超导材料的制备成本,有利于推广应用。In the present invention, polystyrene colloidal microspheres and niobium superconducting thin film materials are constructed as heterostructure nanostructure materials, and the critical temperature of superconducting transition is regulated by changing the contact area of colloidal spheres and niobium substrates, thereby improving the superconductivity of niobium thin films. The conduction transition temperature Tc onset , the material preparation process is simple, less equipment is required, the preparation cost of the superconducting material is greatly reduced, and it is beneficial to popularization and application.

附图说明Description of drawings

图1是利用场发射扫描电镜得到的铌膜SEM(扫描电镜)图,其中颗粒的尺寸为40纳米左右;Figure 1 is the SEM (scanning electron microscope) picture of niobium film obtained by field emission scanning electron microscope, in which the particle size is about 40 nanometers;

图2是在铌膜上合成的聚苯乙烯球纳米结构阵列的SEM图,聚苯乙烯球直径为1微米;Figure 2 is an SEM image of a polystyrene sphere nanostructure array synthesized on a niobium film, and the diameter of the polystyrene sphere is 1 micron;

图3 为去掉一半聚苯乙烯球后的铌膜异质结构SEM图,聚苯乙烯球的下面为铌膜;Figure 3 is the SEM image of the niobium film heterostructure after removing half of the polystyrene ball, and the niobium film is under the polystyrene ball;

图4为本发明聚苯乙烯球铌膜异质结构超导材料,未进行热处理时,聚苯乙烯球和铌膜接触情况SEM图,接触面直径约为200 nm;Figure 4 is the SEM image of the polystyrene spherical niobium film heterostructure superconducting material of the present invention without heat treatment, the contact situation between the polystyrene ball and the niobium film, and the diameter of the contact surface is about 200 nm;

图5为本发明聚苯乙烯球与铌膜异质结构超导材料,100 oC下热处理20分钟,聚苯乙烯球和铌膜接触情况的SEM图,接触面直径约为300 nm;Fig. 5 is the SEM image of the polystyrene ball and the niobium film heterostructure superconducting material of the present invention, heat treatment at 100 o C for 20 minutes, the contact situation of the polystyrene ball and the niobium film, the diameter of the contact surface is about 300 nm;

图6为本发明聚苯乙烯球与铌膜异质结构超导材料,100 oC下不同热处理时间所得到的R-T曲线。Fig. 6 is the RT curves of the polystyrene sphere and niobium film heterostructure superconducting material of the present invention obtained under different heat treatment times at 100 o C.

具体实施方式detailed description

下面结合附图和具体实施例对本发明作进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

如图1-6所示,本发明的聚苯乙烯胶体球与铌膜复合异质结构超导材料,包括衬底、铌膜和聚苯乙烯六角阵列膜,所述铌膜位于所述衬底之上,所述聚苯乙烯六角阵列膜覆盖于所述铌膜之上;As shown in Figures 1-6, the polystyrene colloidal sphere and niobium film composite heterostructure superconducting material of the present invention includes a substrate, a niobium film and a polystyrene hexagonal array film, and the niobium film is located on the substrate Above, the polystyrene hexagonal array film is covered on the niobium film;

所述聚苯乙烯六角阵列膜包括多个聚苯乙烯胶体微球,各所述聚苯乙烯胶体微球以单层紧密排列为六角状阵列。The polystyrene hexagonal array film includes a plurality of polystyrene colloidal microspheres, and each polystyrene colloidal microsphere is closely arranged as a hexagonal array in a single layer.

优选地,所述衬底为高阻硅衬底。Preferably, the substrate is a high resistance silicon substrate.

优选地,所述铌膜的厚度为70nm~200nm。Preferably, the thickness of the niobium film is 70nm-200nm.

优选地,所述聚苯乙烯胶体微球的直径为100nm~2000nm。Preferably, the polystyrene colloidal microspheres have a diameter of 100nm-2000nm.

本发明的聚苯乙烯胶体球与铌膜复合异质结构超导材料的制备方法,包括以下步骤:The preparation method of polystyrene colloidal sphere and niobium film composite heterostructure superconducting material of the present invention comprises the following steps:

(1)清洗衬底;(1) Clean the substrate;

(2)合成铌膜:将所述衬底放入真空磁控溅射镀膜机中,将铌靶放置于磁控溅射靶位,抽真空,进行溅射镀膜,合成铌膜,如图1所示;(2) Synthesis of niobium film: put the substrate into a vacuum magnetron sputtering coating machine, place the niobium target on the magnetron sputtering target position, vacuumize, perform sputter coating, and synthesize the niobium film, as shown in Figure 1 shown;

(3)在所述衬底上镀上所述铌膜;(3) coating the niobium film on the substrate;

(4)采用气-液界面合成法,将聚苯乙烯胶体微球附于镀有铌膜的所述衬底表面,形成聚苯乙烯胶体球与铌膜复合异质结构超导材料,如图2和3所示。(4) Using the gas-liquid interface synthesis method, polystyrene colloidal microspheres are attached to the surface of the substrate coated with niobium film to form a composite heterostructure superconducting material of polystyrene colloidal spheres and niobium film, as shown in the figure 2 and 3 are shown.

优选地,所述步骤(1)中,清洗所述衬底的工序包括:Preferably, in the step (1), the process of cleaning the substrate includes:

(101)将所述衬底置于丙酮中超声清洗40分钟,然后用去离子水清洗多次;(101) ultrasonically cleaning the substrate in acetone for 40 minutes, and then cleaning with deionized water for several times;

(102)将所述衬底置于无水乙醇中超声清洗40分钟,然后用去离子水清洗多次;(102) ultrasonically cleaning the substrate in absolute ethanol for 40 minutes, and then cleaning with deionized water for several times;

(103)将所述衬底置于蒸馏水中超声清洗30分钟后,置于无水乙醇中待用。(103) The substrate was ultrasonically cleaned in distilled water for 30 minutes, and then placed in absolute ethanol for use.

优选地,所述步骤(2)中,溅射镀膜时,将所述衬底的温度保持在400 oC,抽真空至10-7托,然后充入氩气进行溅射镀膜,溅射功率为70瓦,预溅射时间为3000秒,溅射沉积时间为1500秒~5000秒。Preferably, in the step (2), during sputter coating, the temperature of the substrate is kept at 400 o C, vacuumed to 10 -7 Torr, and then filled with argon for sputter coating, and the sputter power The power is 70 watts, the pre-sputtering time is 3000 seconds, and the sputtering deposition time is 1500 seconds to 5000 seconds.

优选地,步骤(2)中所述Nb靶纯度为99.99%。Preferably, the purity of the Nb target in step (2) is 99.99%.

优选地,步骤(4)中所述聚苯乙烯胶体微球阵列的直径误差≤8%。Preferably, the diameter error of the polystyrene colloidal microsphere array in step (4) is ≤8%.

优选地,所述步骤(4)的工序如下:Preferably, the procedure of step (4) is as follows:

(401)将聚苯乙烯胶体球溶液按照一定的体积比与无水乙醇和去离子水混合,再将混合液注入到注射器中;(401) Mix the polystyrene colloidal sphere solution with absolute ethanol and deionized water according to a certain volume ratio, and then inject the mixed solution into the syringe;

根据胶体微球的不同尺寸,选择胶体球溶液与无水乙醇和去离子水的体积比:According to the different sizes of the colloidal microspheres, select the volume ratio of the colloidal sphere solution to absolute ethanol and deionized water:

直径为2微米胶体微球,胶体球溶液:无水乙醇为1:1;Colloidal microspheres with a diameter of 2 microns, colloidal ball solution: absolute ethanol ratio of 1:1;

直径为1微米胶体微球,胶体球溶液:去离子水:无水乙醇为1:1:2;Colloidal microspheres with a diameter of 1 micron, colloidal ball solution: deionized water: absolute ethanol is 1:1:2;

直径为500nm胶体微球,胶体球溶液:去离子水:无水乙醇为1:3:4;Colloidal microspheres with a diameter of 500nm, colloidal ball solution: deionized water: absolute ethanol is 1:3:4;

直径为100 nm的胶体微球,胶体球溶液:去离子水:无水乙醇为1:9:10;Colloidal microspheres with a diameter of 100 nm, colloidal sphere solution: deionized water: absolute ethanol is 1:9:10;

(402)用所述注射器将所述混合液滴到所述衬底表面,所述混合液在衬底边缘与去离子水发生界面作用,在表面张力的作用下,使聚苯乙烯胶体球浮于液体表面,形成规则的纳米结构膜;然后,用镀有铌膜的衬底将所述纳米结构膜捞起,用滤纸将所述纳米结构膜上多余的去离子水吸走,得到聚苯乙烯胶体球与铌膜复合异质结构超导材料。(402) Use the syringe to drop the mixed liquid onto the surface of the substrate, and the mixed liquid will interact with deionized water at the edge of the substrate, and under the action of surface tension, the polystyrene colloidal balls will float On the surface of the liquid, a regular nanostructure film is formed; then, the nanostructure film is picked up with a substrate coated with a niobium film, and the excess deionized water on the nanostructure film is sucked away with filter paper to obtain polyphenylene Ethylene colloidal spheres and niobium films composite heterostructure superconducting materials.

优选地,通过热处理改变所述聚苯乙烯胶体微球和所述铌膜之间的接触面积,热处理的温度范围为70 oC ~100 oC,热处理时间为0~120分钟。Preferably, the contact area between the polystyrene colloidal microspheres and the niobium film is changed by heat treatment, the heat treatment temperature ranges from 70 o C to 100 o C, and the heat treatment time is 0 to 120 minutes.

本发明的聚苯乙烯胶体球与铌膜复合异质结构超导材料具有以下性能:The polystyrene colloidal sphere and niobium film composite heterostructure superconducting material of the present invention has the following properties:

1、其超导转变温度为:铌薄膜的超导转变温度Tconset为9.0 K,聚苯乙烯胶体球/铌膜异质结构的超导转变温度Tconset为9.03~9.05 K,如图6所示。1. Its superconducting transition temperature is: the superconducting transition temperature Tc onset of the niobium film is 9.0 K, and the superconducting transition temperature Tc onset of the polystyrene colloid sphere/niobium film heterostructure is 9.03~9.05 K, as shown in Figure 6 Show.

2、聚苯乙烯胶体球与铌膜异质结构接触面积随热处理时间和温度的变化,见图4和5。2. The contact area between the polystyrene colloidal sphere and the niobium film heterostructure varies with the heat treatment time and temperature, see Figures 4 and 5.

3、热处理时间对超导转变温度Tconset有明显的影响。3. The heat treatment time has obvious influence on the superconducting transition temperature Tc onset .

以上述依据本发明的理想实施例为启示,通过上述的说明内容,相关工作人员完全可以在不偏离本项发明技术思想的范围内,进行多样的变更以及修改。本项发明的技术性范围并不局限于说明书上的内容,必须要根据权利要求范围来确定其技术性范围。Inspired by the above-mentioned ideal embodiment according to the present invention, through the above-mentioned description content, relevant workers can make various changes and modifications within the scope of not departing from the technical idea of the present invention. The technical scope of the present invention is not limited to the content in the specification, but must be determined according to the scope of the claims.

Claims (11)

1. polystyrene colloid ball and niobium film composite heterogenous junction structure superconductor, it is characterised in that include substrate, niobium film and polyphenyl Ethylene hexagonal array film, described niobium film is positioned at described substrate, and described polystyrene hexagonal array film is covered in described niobium film On;
Described polystyrene hexagonal array film includes multiple polystyrene colloid microsphere, and each described polystyrene colloid microsphere is with list Layer close-packed arrays is hexagonal shape array.
2. polystyrene colloid ball as claimed in claim 1 and niobium film composite heterogenous junction structure superconductor, it is characterised in that institute Stating substrate is HR-Si substrate.
3. polystyrene colloid ball as claimed in claim 1 and niobium film composite heterogenous junction structure superconductor, it is characterised in that institute The thickness stating niobium film is 70nm~200nm.
4. polystyrene colloid ball as claimed in claim 1 and niobium film composite heterogenous junction structure superconductor, it is characterised in that institute State a diameter of 100nm~2000nm of polystyrene colloid microsphere.
5. polystyrene colloid ball and the preparation method of niobium film composite heterogenous junction structure superconductor, it is characterised in that include following Step:
(1) substrate is cleaned;
(2) synthesis niobium film: described substrate is put in vacuum magnetron sputtering film plating machine, niobium target is positioned over magnetron sputtering target position, Evacuation, carries out sputter coating, synthesizes niobium film;
(3) described niobium film is plated over the substrate;
(4) use liquid-vapor interface synthetic method, polystyrene colloid microsphere is invested the described substrate surface being coated with niobium film, formed Polystyrene colloid ball and niobium film composite heterogenous junction structure superconductor.
Polystyrene colloid ball the most according to claim 5 and the preparation method of niobium film composite heterogenous junction structure superconductor, It is characterized in that, in described step (1), the operation cleaning described substrate includes:
(101) described substrate is placed in ultrasonic cleaning 40 minutes in acetone, then cleans repeatedly with deionized water;
(102) described substrate is placed in ultrasonic cleaning 40 minutes in dehydrated alcohol, then cleans repeatedly with deionized water;
(103), after described substrate being placed in distilled water ultrasonic cleaning 30 minutes, it is placed in dehydrated alcohol stand-by.
Polystyrene colloid ball the most according to claim 5 and the preparation method of niobium film composite heterogenous junction structure superconductor, It is characterized in that, in described step (2), during sputter coating, described substrate temperature is maintained at 400oC, is evacuated to 10-7 Torr, is then charged with argon and carries out sputter coating, and sputtering power is 70 watts, and the pre-sputtering time is 3000 seconds, and the sputtering sedimentation time is 1500 seconds~5000 seconds.
Polystyrene colloid ball the most according to claim 5 and the preparation method of niobium film composite heterogenous junction structure superconductor, It is characterized in that, described in step (2), Nb target purity is 99.99%.
Polystyrene colloid ball the most according to claim 5 and the preparation method of niobium film composite heterogenous junction structure superconductor, It is characterized in that, diameter error≤8% of polystyrene colloid micro-sphere array described in step (4).
Polystyrene colloid ball the most according to claim 5 and the preparation method of niobium film composite heterogenous junction structure superconductor, It is characterized in that, the operation of described step (4) is as follows:
(401) polystyrene colloid ball solution is mixed with dehydrated alcohol and deionized water according to certain volume ratio, then will be mixed Close liquid to be injected in syringe;
(402) with described syringe, described mixed liquor dripped to described substrate surface, described mixed liquor edges of substrate with go from Sub-water generation interface interaction, under capillary effect, makes polystyrene colloid ball float on liquid surface, receiving of formation rule Rice structural membrane;Then, with the substrate being coated with niobium film, described nano-structure film is picked up, with filter paper by many on described nano-structure film Remaining deionized water siphons away, and obtains polystyrene colloid ball and niobium film composite heterogenous junction structure superconductor.
11. according to the polystyrene colloid ball described in any one of claim 5-10 and niobium film composite heterogenous junction structure superconductor Preparation method, it is characterised in that change the contact surface between described polystyrene colloid microsphere and described niobium film by heat treatment Long-pending, the temperature range of heat treatment is 70 oC ~100 oC, heat treatment time is 0 ~ 120 minute.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102568694A (en) * 2010-12-23 2012-07-11 吴仕驹 High temperature superconductor and its preparation method
US20120264612A1 (en) * 2011-04-15 2012-10-18 Amit Goyal Buffer layers for rebco films for use in superconducting devices
CN103915215A (en) * 2014-04-16 2014-07-09 李志刚 Co ball Nb film heterostructure superconducting material and preparation method thereof
CN104630709A (en) * 2015-03-17 2015-05-20 南京大学 Method for preparing niobium-silicon film by utilizing magnetron co-sputtering method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102568694A (en) * 2010-12-23 2012-07-11 吴仕驹 High temperature superconductor and its preparation method
US20120264612A1 (en) * 2011-04-15 2012-10-18 Amit Goyal Buffer layers for rebco films for use in superconducting devices
CN103915215A (en) * 2014-04-16 2014-07-09 李志刚 Co ball Nb film heterostructure superconducting material and preparation method thereof
CN104630709A (en) * 2015-03-17 2015-05-20 南京大学 Method for preparing niobium-silicon film by utilizing magnetron co-sputtering method

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