CN105990181A - Ejector pin mechanism and degassing cavity - Google Patents
Ejector pin mechanism and degassing cavity Download PDFInfo
- Publication number
- CN105990181A CN105990181A CN201510045397.0A CN201510045397A CN105990181A CN 105990181 A CN105990181 A CN 105990181A CN 201510045397 A CN201510045397 A CN 201510045397A CN 105990181 A CN105990181 A CN 105990181A
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- CN
- China
- Prior art keywords
- ejector pin
- pin mechanism
- thimble
- installing plate
- shears
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Treatment Of Steel In Its Molten State (AREA)
Abstract
An ejector pin mechanism provided by the present invention comprises a plurality of ejector pins, an elevating bracket and an elevating device, the plurality of ejector pins are arranged on the elevating bracket at intervals, and an output shaft of the elevating device is connected with the elevating bracket, wherein each ejector pin comprises a supporting part extending towards the middle part of the elevating bracket and a limiting part extending upwards. The present invention also provides a degassing cavity. The ejector pins comprise the limiting parts, when the ejector pins eject a substrate arranged on a heating member, the substrate is limited in an area jointly limited by the limiting parts of the plurality of ejector pins and is supported jointly by the supporting parts of the plurality of ejector pins, so that the substrate does not slide off from the plurality of ejector pins, and also does not displace, and accordingly, the risk that the substrate is crushed by a manipulator is avoided.
Description
Technical field
The present invention relates to semiconductor processing equipment field, in particular it relates to a kind of ejector pin mechanism
With a kind of degasification chamber including this ejector pin mechanism.
Background technology
Substrate being performed etching or during the processing technique such as deposition, need first substrate to be removed
Gas disposal (degas).Specifically, substrate is arranged in degasification chamber, then by substrate
Be heated to predetermined temperature (typically 350 DEG C), with remove the water vapour on substrate and
Other volatile impurity.After carrying out degassing processing, it is possible to use mechanical hand is by semiconductor substrate
Take out from degasification chamber.
Shown in Fig. 1 is a kind of common degasification chamber schematic diagram, as shown in fig. 1,
Degasification chamber includes heating member 100 and ejector pin mechanism.As shown in FIG., ejector pin mechanism includes rising
Falling unit 201, shears 202 and the thimble 203 being arranged on shears.Lifting torr
Frame 202 is connected with the drive shaft of lowering or hoisting gear 201, and can driving at lowering or hoisting gear 201
Dynamic lower rise or landing.The drive shaft of lowering or hoisting gear 201 stretches into institute through the diapire of degasification chamber
State degasification chamber interior.It is provided with on heating member 100 and vertically runs through this heating member 100
Through hole, thimble 203 can through the through hole on heating member 100 do vertically reciprocal
Mobile.
When heating substrate 300, thimble 203 is at shears 202 and lifting dress
Put the lower section that the band catharsis of 201 is down to the upper surface of heating member 100, be arranged on through substrate 300
On the upper surface of heating member.
After heating, utilize lowering or hoisting gear 201 by shears 202 and thimble 203
Rise, so that the upper end of thimble 203 is through the through hole on heating member 100, and protrude from
The upper surface of heating member 100, thus by substrate 300 jack-up from heating member 100.
As shown in Figures 2 and 3, between adjacent thimble 203, there is interval, therefore, flat
Platform mechanical hand 400 can insert the substrate 300 risen in the interval between adjacent thimble 203
Lower section, and substrate 300 is taken out from degasification chamber.
As shown in Figures 2 and 3, the top of thimble 203 and the contact area of substrate 300
Less, when jack-up substrate 300, substrate 300 is susceptible to skew, and a top from which
Landing on pin 203.If substrate 300 offsets, when platform mechanical arm enters degasification chamber
Easily collide with substrate 300, and it is possible to substrate 300 can be broken up.
Therefore, how to prevent by substrate from heating member during jack-up from thimble landing become this
The technical problem that field is urgently to be resolved hurrily.
Summary of the invention
It is an object of the invention to provide a kind of ejector pin mechanism and a kind of this ejector pin mechanism that includes
Degasification chamber, is utilizing the described ejector pin mechanism can be by substrate stably jack-up from heating member.
To achieve these goals, as one aspect of the present invention, it is provided that a kind of thimble machine
Structure, this ejector pin mechanism includes multiple thimble, shears and lowering or hoisting gear, multiple described thimbles
It is spaced apart and arranged on described shears, the output shaft of described lowering or hoisting gear and described lifting torr
Frame is connected, and wherein, described thimble includes the supporting part that the middle part towards described shears extends
With upwardly extending limiting section.
Preferably, described thimble also includes installation portion and connecting portion, and described installation portion is with described
Shears is fixing to be connected, described connecting portion be connected to described installation portion and described supporting part it
Between.
Preferably, described ejector pin mechanism includes thimble described at least three.
Preferably, multiple described thimbles are evenly distributed on described shears.
Preferably, described supporting part includes supporting part body and is formed at described supporting part body
On support pin, the upper end of described support pin is less than the upper surface of described limiting section.
Preferably, described lowering or hoisting gear includes going back piston cylinder and piston rod, described output shaft with
Described piston rod is connected.
Preferably, described lowering or hoisting gear also includes the first installing plate and spacer pin, described first
Installing plate is fixedly linked with described piston rod, and described piston cylinder is positioned at the one of described first installing plate
Side, described spacer pin is arranged on described first installing plate, and is positioned at described first installing plate
Opposite side.
Preferably, described lowering or hoisting gear also includes that the second installing plate, described second installing plate are used
On the outer wall being fixed on degasification chamber, described output shaft passes described second installing plate, described
The outer cover of output shaft is provided with corrugated tube, and one end of described corrugated tube is fixed on described first and installs
On plate, the other end is fixed on described second installing plate.
As another aspect of the present invention, it is provided that a kind of degasification chamber, described degasification chamber
Including heating member and ejector pin mechanism for heating substrate, described heating member includes heating part and sets
Putting the installation portion below described heating part, wherein, described ejector pin mechanism is provided by the present invention
Above-mentioned ejector pin mechanism, described lowering or hoisting gear is positioned at outside the process cavity of described degasification chamber, institute
State shears and described thimble is positioned at inside the process cavity of described degasification chamber, described heating member
Installation portion extend to the process cavity of described degasification chamber through the hollow bulb of described shears
Outside.
Preferably, the edge of described heating part is formed with breach, the quantity of described breach and institute
The quantity stating thimble is identical, and the described supporting part of described thimble and described limiting section can pass institute
State breach.
Owing to thimble includes limiting section, therefore, the substrate on heating member will be arranged at thimble
During jack-up, substrate is limited in the region that the limiting section of multiple thimble limits jointly, and by
The supporting part of multiple thimbles supports jointly, therefore, substrate will not landing from multiple thimbles, position
Put and also will not offset, thus avoid the risk that substrate is broken up by mechanical hand.
Accompanying drawing explanation
Accompanying drawing is used to provide a further understanding of the present invention, and constitutes the one of description
Part, is used for explaining the present invention together with detailed description below, but is not intended that this
The restriction of invention.In the accompanying drawings:
Fig. 1 is the schematic diagram of degasification chamber of the prior art；
Fig. 2 is the schematic diagram of the ejector pin mechanism in the degasification chamber shown in Fig. 1；
Fig. 3 is the top view of the ejector pin mechanism shown in Fig. 2；
Fig. 4 is the top view of ejector pin mechanism provided by the present invention；
Fig. 5 is the top view of the thimble in the ejector pin mechanism shown in Fig. 4；
Fig. 6 is the sectional view of the ejector pin mechanism shown in Fig. 5；
Fig. 7 is that the master of the ejector pin mechanism shown in Fig. 4 cuts open schematic diagram；
Fig. 8 is the schematic diagram of degasification chamber provided by the present invention；
Fig. 9 is the top view of the heating member in the degasification chamber shown in Fig. 8.
Description of reference numerals
100: heating member 201: lowering or hoisting gear
201a: output shaft 201b: piston cylinder
201c: piston rod the 201d: the first installing plate
201e: spacer pin 201f: corrugated tube
201g: the second installing plate 202: shears
203: thimble 203a: limiting section
203b: supporting part 203b1: supporting part body
203b2: support pin 300: substrate
400: platform mechanical arm 100a: breach
Detailed description of the invention
Below in conjunction with accompanying drawing, the detailed description of the invention of the present invention is described in detail.Should manage
Solving, detailed description of the invention described herein is merely to illustrate and explains the present invention, not
For limiting the present invention.
As one aspect of the present invention, as shown in figs. 4 and 7, it is provided that a kind of thimble machine
Structure, this ejector pin mechanism includes multiple thimble 203, shears 202 and lowering or hoisting gear 201,
Multiple thimbles 203 are spaced apart and arranged on shears 202, the output shaft of lowering or hoisting gear 201
201a is connected with shears 202, and wherein, thimble 203 includes towards shears 202
Middle part extend supporting part 203b and upwardly extending limiting section 203a.
As shown in Figure 8, when described ejector pin mechanism is assembled in degasification chamber, lifting torr
Frame 202 and described thimble are positioned at inside the process cavity of described degasification chamber, lowering or hoisting gear 201
It is positioned at outside the process cavity of described degasification chamber.
As shown in Figures 7 and 8, when the described thimble of described ejector pin mechanism is by substrate 300
During jack-up, substrate 300 is limited by upwardly extending limiting section 203a, therefore, and Bu Huicong
Landing on supporting part 203b.When the platform mechanical arm 400 gap between adjacent two thimbles
When extending into the lower section of substrate 300, there is not the risk broken up by substrate 300.
In the present invention, the concrete structure of shears 202 is not had special restriction,
As shown in Figure 4, shears 202 is cirque structure, a part for shears 202
It is connected with the output shaft of lowering or hoisting gear 201.Lowering or hoisting gear 201 can include piston cylinder 201b,
Piston rod 201c and output shaft 201a, this piston rod 201c and the output of lowering or hoisting gear 201
Axle 201a is connected.Piston cylinder 201b can be cylinder, it is also possible to be hydraulic cylinder.
For the ease of controlling the height that thimble 203 rises, it is preferable that lowering or hoisting gear 201 is also
Can include that the first installing plate 201d and spacer pin 201e, piston rod 201c and first install
Plate 201d is connected, and piston cylinder 201b is arranged on the side of the first installing plate 201d, spacer pin
201e is arranged on the first installing plate 201d, and is positioned at the opposite side of the first installing plate 201d.
First installing plate 201d can move with piston rod 201c.As piston rod 201c
When rising to a certain degree, spacer pin 201e will withstand outer wall or the degasification of degasification chamber
Other structures on the outer wall of chamber, thus the continuation limiting piston rod 201c rises.
Preferably, lowering or hoisting gear 201 can also include the second installing plate 201g, and second installs
Plate 201g is for being fixed on the outer wall of degasification chamber, and output shaft 201a passes the second installing plate
201g, the outer cover of output shaft 201a is provided with corrugated tube 201f, one end of this corrugated tube 201f
Being fixed on the first installing plate 201d, the other end is fixed on the second installing plate 201g.
When output shaft 201a moves up under the drive of piston rod 201c, corrugated tube 201f
To be compressed.And the advantage arranging corrugated tube 201f is, so that output shaft 201a
Uphill process is more steady, and can protect output shaft 201a.In this enforcement
In mode, when piston rod 201c rises to predetermined altitude, spacer pin 201e will withstand on second
On installing plate 201g.
As a kind of detailed description of the invention of the present invention, as shown in Figure 5 and Figure 6, described top
Pin also includes installation portion 203d and connecting portion 203e, installation portion 203d and shears 202
Fixing connection, connecting portion 203e is connected between installation portion 203d and supporting part 203b.
Owing to being provided with connecting portion 203e, therefore, it can to do the size of limiting section 203a
Less.
In the present invention, to the particular number of described thimble and be not specifically limited, as long as can
To guarantee substrate jack-up and to prevent substrate from sliding.Preferably, described ejector pin mechanism bag
Include thimble described at least three.The quantity of described thimble is the most, the most more can stably jack-up and
Support described substrate.Certainly, the quantity of described thimble is also unsuitable too much.Reality shown in the diagram
Executing in mode, described ejector pin mechanism includes four thimbles 203.
In order to stably by described substrate jack-up, it is preferable that multiple thimbles 203 divide equably
Cloth is on shears 202.
As a kind of preferred implementation of the present invention, supporting part 203b includes supporting part body
203b1Be formed at this supporting part body 203b1On support pin 203b2, this support pin 203b2
Upper end less than the upper surface of limiting section 203a.During by substrate jack-up, substrate only with support
Pin 203b2Tip contact, such that it is able to reduce the contact area of supporting part and substrate, prevent
Substrate is contaminated.
As another aspect of the present invention, as shown in Figure 8, it is provided that a kind of degasification chamber,
Described degasification chamber includes the heating member 100 for heating substrate and ejector pin mechanism, heating member
100 include heating part and are arranged on the installation portion below described heating part, wherein, described thimble
Mechanism is above-mentioned ejector pin mechanism provided by the present invention, and lowering or hoisting gear 201 is positioned at described degasification chamber
Outside the process cavity of room, the technique that shears 202 and described thimble are positioned at described degasification chamber
Intracavity portion, the installation portion of heating member 100 extends to described through the hollow bulb of shears 202
Outside the process cavity of degasification chamber.
When the drive shaft that lowering or hoisting gear 201 drives this lowering or hoisting gear moves up, lifting torr
Frame 202 drives thimble 203 to move up, such that it is able to the heating that heating member 100 will be arranged on
Substrate 300 jack-up on the upper surface in portion, and, substrate 300 is limited at limiting section 203a
In the space limited, landing or skew will not occur.When platform mechanical arm 400 is from adjacent two
When between individual thimble 203, gap extend into the lower section of substrate 300, do not exist substrate 300
The risk broken up.
It will be apparent to a skilled person that the upper end of thimble (includes supporting part and limit
Position portion) should be from the lower section movement of the upper surface of heating member to the upper surface of heating member
Side, thus by substrate 300 jack-up on the upper surface being arranged on heating member.
For the ease of the upper end of thimble from the lower section movement of the upper surface of heating member to heating member
The top of upper surface, it is preferable that as it is shown in figure 9, the edge of described heating part is formed with breach
100a, the quantity of breach 100a is identical with the quantity of described thimble, described of described thimble
Support part and described limiting section can pass breach 100a.
When utilizing heating member 100 that substrate 300 is heated, the limiting section 203a of thimble
Under the drive of lowering or hoisting gear 201, heating member is dropped to along breach 100a with supporting part 203b
The lower section of the upper surface of 100.After having heated, lowering or hoisting gear 201 drives thimble upwards, makes
Obtain limiting section 203a and supporting part 203b and pass breach 100a, and by substrate 300 jack-up.
It is understood that the principle that is intended to be merely illustrative of the present of embodiment of above and use
Illustrative embodiments, but the invention is not limited in this.For the ordinary skill in this area
For personnel, without departing from the spirit and substance in the present invention, can make various modification and
Improving, these modification and improvement are also considered as protection scope of the present invention.
Claims (10)
1. an ejector pin mechanism, this ejector pin mechanism includes multiple thimble, shears and lifting
Device, multiple described thimbles are spaced apart and arranged on described shears, described lowering or hoisting gear
Output shaft is connected with described shears, it is characterised in that described thimble includes towards described liter
The supporting part of the middle part extension of fall bracket and upwardly extending limiting section.
Ejector pin mechanism the most according to claim 1, it is characterised in that described thimble is also
Including installation portion and connecting portion, described installation portion is fixing with described shears to be connected, described company
The portion of connecing is connected between described installation portion and described supporting part.
Ejector pin mechanism the most according to claim 1 and 2, it is characterised in that described top
Pin mechanism includes thimble described at least three.
Ejector pin mechanism the most according to claim 1 and 2, it is characterised in that Duo Gesuo
State thimble to be evenly distributed on described shears.
Ejector pin mechanism the most according to claim 1 and 2, it is characterised in that described
Support part includes supporting part body and the support pin being formed on described supporting part body, described support
The upper end of pin is less than the upper surface of described limiting section.
Ejector pin mechanism the most according to claim 1 and 2, it is characterised in that described liter
Falling unit includes going back piston cylinder and piston rod, and described output shaft is connected with described piston rod.
Ejector pin mechanism the most according to claim 6, it is characterised in that described lifting fills
Putting and also include the first installing plate and spacer pin, described first installing plate fixes phase with described piston rod
Even, described piston cylinder is positioned at the side of described first installing plate, and described spacer pin is arranged on described
On first installing plate, and it is positioned at the opposite side of described first installing plate.
Ejector pin mechanism the most according to claim 7, it is characterised in that described lifting fills
Putting and also include the second installing plate, described second installing plate is for being fixed on the outer wall of degasification chamber
On, described output shaft passes described second installing plate, and the outer cover of described output shaft is provided with ripple
Pipe, one end of described corrugated tube is fixed on described first installing plate, and the other end is fixed on described
On second installing plate.
9. a degasification chamber, described degasification chamber include heating member for heating substrate and
Ejector pin mechanism, described heating member includes heating part and is arranged on the installation below described heating part
Portion, it is characterised in that described ejector pin mechanism is in claim 1 to 8 described in any one
Ejector pin mechanism, described lowering or hoisting gear is positioned at outside the process cavity of described degasification chamber, described lifting
Bracket and described thimble are positioned at inside the process cavity of described degasification chamber, the installation of described heating member
Portion extends to outside the process cavity of described degasification chamber through the hollow bulb of described shears.
Degasification chamber the most according to claim 9, it is characterised in that described heating
The edge in portion is formed with breach, and the quantity of described breach is identical with the quantity of described thimble, described
The described supporting part of thimble and described limiting section can pass described breach.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510045397.0A CN105990181A (en) | 2015-01-28 | 2015-01-28 | Ejector pin mechanism and degassing cavity |
| CN202110433321.0A CN113161280B (en) | 2015-01-28 | 2015-01-28 | Thimble mechanism and degassing chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510045397.0A CN105990181A (en) | 2015-01-28 | 2015-01-28 | Ejector pin mechanism and degassing cavity |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110433321.0A Division CN113161280B (en) | 2015-01-28 | 2015-01-28 | Thimble mechanism and degassing chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105990181A true CN105990181A (en) | 2016-10-05 |
Family
ID=57035034
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110433321.0A Active CN113161280B (en) | 2015-01-28 | 2015-01-28 | Thimble mechanism and degassing chamber |
| CN201510045397.0A Pending CN105990181A (en) | 2015-01-28 | 2015-01-28 | Ejector pin mechanism and degassing cavity |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110433321.0A Active CN113161280B (en) | 2015-01-28 | 2015-01-28 | Thimble mechanism and degassing chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN113161280B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11111821A (en) * | 1997-10-03 | 1999-04-23 | Kokusai Electric Co Ltd | Substrate-supporting device |
| KR20070060305A (en) * | 2005-12-08 | 2007-06-13 | 삼성전자주식회사 | Member for supporting substrates and semiconductor manufacturing apparatus with it |
| CN101501833A (en) * | 2006-08-08 | 2009-08-05 | 无尽电子株式会社 | Device for supporting substrate |
| JP2010056217A (en) * | 2008-08-27 | 2010-03-11 | Dainippon Screen Mfg Co Ltd | Substrate lifting apparatus and substrate processing apparatus |
| CN104233191A (en) * | 2013-06-08 | 2014-12-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Heating chamber and plasma processing apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104103549B (en) * | 2013-04-07 | 2018-05-18 | 盛美半导体设备（上海）有限公司 | Semiconductor processing chamber |
-
2015
- 2015-01-28 CN CN202110433321.0A patent/CN113161280B/en active Active
- 2015-01-28 CN CN201510045397.0A patent/CN105990181A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11111821A (en) * | 1997-10-03 | 1999-04-23 | Kokusai Electric Co Ltd | Substrate-supporting device |
| KR20070060305A (en) * | 2005-12-08 | 2007-06-13 | 삼성전자주식회사 | Member for supporting substrates and semiconductor manufacturing apparatus with it |
| CN101501833A (en) * | 2006-08-08 | 2009-08-05 | 无尽电子株式会社 | Device for supporting substrate |
| JP2010056217A (en) * | 2008-08-27 | 2010-03-11 | Dainippon Screen Mfg Co Ltd | Substrate lifting apparatus and substrate processing apparatus |
| CN104233191A (en) * | 2013-06-08 | 2014-12-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Heating chamber and plasma processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113161280A (en) | 2021-07-23 |
| CN113161280B (en) | 2024-05-17 |
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Address after: 100176 No. 8 Wenchang Avenue, Beijing economic and Technological Development Zone Applicant after: Beijing North China microelectronics equipment Co Ltd Address before: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Applicant before: Beifang Microelectronic Base Equipment Proces Research Center Co., Ltd., Beijing |
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