CN105988442A - Wafer storage recording method, device and system - Google Patents
Wafer storage recording method, device and system Download PDFInfo
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- CN105988442A CN105988442A CN201510087487.6A CN201510087487A CN105988442A CN 105988442 A CN105988442 A CN 105988442A CN 201510087487 A CN201510087487 A CN 201510087487A CN 105988442 A CN105988442 A CN 105988442A
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- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000003860 storage Methods 0.000 title abstract description 12
- GOLXNESZZPUPJE-UHFFFAOYSA-N spiromesifen Chemical compound CC1=CC(C)=CC(C)=C1C(C(O1)=O)=C(OC(=O)CC(C)(C)C)C11CCCC1 GOLXNESZZPUPJE-UHFFFAOYSA-N 0.000 claims description 13
- 210000000707 wrist Anatomy 0.000 claims description 12
- 210000003414 extremity Anatomy 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 230000003993 interaction Effects 0.000 description 3
- 208000012260 Accidental injury Diseases 0.000 description 2
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 210000004247 hand Anatomy 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 208000014674 injury Diseases 0.000 description 2
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- General Factory Administration (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Quality & Reliability (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
Abstract
The invention discloses a wafer storage recording method, device and system. The method comprises that an operation request for implementing a wafer storage operation is received, and the operation request carries identification information of an operator who implements the wafer storage operation; whether the identification information belongs to a preset personnel identification set is determined, and the preset personnel identification set includes present identification information of operators who are allowed to implement the wafer storage operation; if it is determined that the identification information belongs to the preset personnel identification set, the operator is allowed to implement the wafer storage operation, and operation information of the operator is recorded after the wafer storage operation is completed; and if it is determined that the identification information does not belong to the preset personnel identification set, the operator is forbidden to implement the wafer storage operation. Thus, operation information of the operator who implements wafer storage is recorded accurately.
Description
Technical field
The present invention relates to wafer manufacture field, deposit recording method, equipment and system in particular to a kind of wafer.
Background technology
At present, in the wafer production factory of semiconductor applications, in order to avoid wafer is polluted in carrying and manufacture process,
Operator need under the dustfree environment of high-grade cleanliness factor, a number of wafer is positioned over one entitled
In the box of " Lot " (i.e. batch), and " Lot " is installed on the SMIF (Standard of wafer processing
Mechanical Interface, standard mechanical interface) in.But, no matter it is at 200 millimeters or 300 millimeters of crystalline substances
Circle factory, do not know who carry from storage shelf, storage bin or floor truck " Lot " and install to wafer process set
Time standby, the workload of operator and work quality are difficult to define, in some instances it may even be possible to underproof operator can occur
Member by " Lot " carrying and installation to work hidden danger such in wafer processing.Therefore, in order to improve operator's
Workload improvement quality, accurate recording and obtain OSM (Operator Step Move) work instruction message
It is all very important for operator and management personnel.
Prior art is by EAP (the Equipment Automation in operator's beaching accommodation
Programming, equipment automatization programs) automatic mode solves the problems referred to above.First, operator need to step on
Land system, then system can record and store certain time period and be mounted in wafer processing the quantity of " Lot "
Etc. information and this information is corresponding with the employee identification information of these operator, final all information can be at MES
The historical database information of (Manufacturing Execution System, manufacturing execution system) is inquired about.But it is real
On border, in the case of wafer processing is in and is logged in advance by a certain operator, any operator can
Carrying Lot is also installed on the SMIF of wafer processing, thus there are the data under EAP automatic mode
The problem of misregister.
For above-mentioned problem, effective solution is the most not yet proposed.
Summary of the invention
Embodiments provide a kind of wafer and deposit recording method, equipment and system, perform wafer with accurate recording
The operation information of the operator deposited.
According to an aspect of the invention, it is provided a kind of wafer deposits recording method, the method includes:
Receive the operation requests performing wafer deposit operation, wherein, described operation requests carries execution wafer and deposits
The identification information of the operator of operation；Judge whether described identification information belongs to default giver identification and gather, wherein,
Described default giver identification set includes the mark allowing to perform the operator of described wafer deposit operation pre-set
Information；If judging, described identification information belongs to described default giver identification set, then allow described operator to perform
Described wafer deposit operation, and after described operator complete described wafer deposit operation, record described operator
Perform the operation information of described wafer deposit operation；If judging, described identification information is not belonging to described default giver identification
Set, then forbid that described operator perform described wafer deposit operation.
Alternatively, also include: described record the operation information that described operator perform described wafer deposit operation after,
Described method also includes: record the corresponding relation between the identification information of described operator and described operation information.
Alternatively, after the corresponding relation recorded between the identification information of described operator and described operation information, institute
Method of stating also includes: identification information and described corresponding relation by described operator are inquired about described operator and performed
The operation information of described wafer deposit operation.
Alternatively, the described identification information by described operator and the described corresponding relation described operator of inquiry hold
The operation information of the described wafer deposit operation of row includes: receiving query statement, wherein, described query statement includes institute
State the identification information of operator；Identification information according to described operator obtains described behaviour by described corresponding relation
Make the operation information of the described wafer deposit operation that personnel perform, and show described operation information.
According to an aspect of the invention, it is provided a kind of wafer deposits recording equipment, this equipment includes: receive unit,
For receiving the operation requests performing wafer deposit operation, wherein, described operation requests carries execution wafer to deposit
The identification information of the operator of operation；Judging unit, for judging the described identification information that described reception unit receives
Whether belonging to default giver identification set, wherein, described default giver identification set includes that the permission pre-set performs
The identification information of the operator of described wafer deposit operation；First processing unit, if judging for described judging unit
Go out described identification information and belong to described default giver identification set, then allow described operator to perform described wafer and deposit
Operation, and after described operator complete described wafer deposit operation, record described operator and perform described wafer
The operation information of deposit operation；For described judging unit, second processing unit, if judging that described identification information does not belongs to
Gather in described default giver identification, then forbid that described operator perform described wafer deposit operation.
Alternatively, this equipment also includes: record unit, for operator described in described first processing unit record
After performing the operation information of described wafer deposit operation, record the identification information of described operator and described operation information
Between corresponding relation.
Alternatively, this equipment also includes: query unit, at the mark of operator described in described recording unit records
After corresponding relation between knowledge information and described operation information, by identification information and the described correspondence of described operator
The operation information of the described wafer deposit operation that operator described in relational query perform.
Alternatively, described query unit includes: receives subelement, is used for receiving query statement, wherein, and described inquiry
Instruction includes the identification information of described operator；Process subelement, for the behaviour received according to described reception subelement
The identification information making personnel obtains the behaviour of the described wafer deposit operation that described operator perform by described corresponding relation
Make information, and show described operation information.
According to an aspect of the invention, it is provided a kind of wafer deposits record system, this system includes: radio frequency electric
Label, for sending the operation requests performing wafer deposit operation；Wafer deposits recording equipment, with described radio frequency electric
Tag Radio Frequency connects, and deposits recording equipment including above-mentioned wafer.
Alternatively, described electronic tag is wrist strap type electronic tag, and described wrist strap type electronic tag is worn on operator
Limbs on.
In embodiments of the present invention, by receiving the operation requests performing wafer deposit operation, and this operation requests is judged
In identification information whether belong to default giver identification set, if judging, this identification information belongs to this default giver identification
Set, then allow these operator to perform this wafer deposit operation, and complete this wafer deposit operation these operator
After, record these operator and perform the operation information of this wafer deposit operation；If judging, this operator's information does not belongs to
Gather in this default giver identification, then forbid that described operator perform described wafer deposit operation, so, due to behaviour
Make personnel and carrying out needing first to be identified during wafer is deposited the judgement of information, and just allowed by rear judging
Perform wafer deposit operation, and recording operation information, therefore, it is possible to accurately obtain the operator performing wafer operation
Operation information, thus ensure the accuracy of operation information.
Accompanying drawing explanation
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, this
Bright schematic description and description is used for explaining the present invention, is not intended that inappropriate limitation of the present invention.At accompanying drawing
In:
Fig. 1 is the schematic flow sheet that a kind of wafer according to embodiments of the present invention deposits recording method；
Fig. 2 is the schematic flow sheet that another kind of wafer according to embodiments of the present invention deposits recording method；
Fig. 3 is the structural representation that a kind of wafer according to embodiments of the present invention deposits recording equipment；
Fig. 4 is the structural representation that another kind of wafer according to embodiments of the present invention deposits recording equipment；
Fig. 5 is the structural representation that the third wafer according to embodiments of the present invention deposits recording equipment；
Fig. 6 is the structural representation that the 4th kind of wafer according to embodiments of the present invention deposits recording equipment；
Fig. 7 is the structural representation that a kind of wafer according to embodiments of the present invention deposits record system.
Detailed description of the invention
In order to make those skilled in the art be more fully understood that the present invention program, below in conjunction with in the embodiment of the present invention
Accompanying drawing, is clearly and completely described the technical scheme in the embodiment of the present invention, it is clear that described embodiment
It is only the embodiment of a present invention part rather than whole embodiments.Based on the embodiment in the present invention, ability
The every other embodiment that territory those of ordinary skill is obtained under not making creative work premise, all should belong to
The scope of protection of the invention.
It should be noted that term " first " in description and claims of this specification and above-mentioned accompanying drawing, "
Two " it is etc. for distinguishing similar object, without being used for describing specific order or precedence.Should be appreciated that this
Sample use data can exchange in the appropriate case, in order to embodiments of the invention described herein can with except
Here the order beyond those illustrating or describing is implemented.Additionally, term " includes " and " having " and they
Any deformation, it is intended that cover non-exclusive comprising, such as, contain series of steps or the process of unit, side
Method, system, product or equipment are not necessarily limited to those steps or the unit clearly listed, but can include the clearest
List or for intrinsic other step of these processes, method, product or equipment or unit.
According to embodiments of the present invention, it is provided that a kind of wafer deposits recording method, as it is shown in figure 1, the embodiment of the present invention
Executive agent can be that wafer deposits recording equipment, the method may include steps of:
Step S102, receives the operation requests performing wafer deposit operation.
Wherein, this operation requests carries the identification information of the operator performing wafer deposit operation.
In a kind of possible implementation of the present invention, operator can wear radio electronic label and (such as be worn on
In wrist), when operator carry out wafer deposit operation, receive the operation requests that this radio electronic label sends, by
In this operation requests, carry the identification information of the operator performing wafer deposit operation, therefore, it can know and work as
The identity of the operator of front execution wafer deposit operation.
It should be noted that this identification information can be the identification information (such as the employee number etc. of operator) of operator,
This is not construed as limiting by the present invention, and other can uniquely identify that the identification information of these operator also should fall into the guarantor of the present invention
Within the scope of protecting.
Step S104, it is judged that whether this identification information belongs to default giver identification set.
Wherein, this default giver identification set includes the operator allowing to perform this wafer deposit operation pre-set
Identification information.
It should be noted that this default giver identification set can arrange different operator's marks in the different time periods
Knowledge information, such as, in the morning 8 o'clock to 12 o'clock can not to 6 default giver identification set arranged with 2 pm
With, thus facilitate in wafer manufacturing process the management to operator.
Step S106, if judging, this identification information belongs to this default giver identification set, then allow these operator to hold
This wafer deposit operation of row, and after these operator complete this wafer deposit operation, record these operator and perform this
The operation information of wafer deposit operation.
Wherein, determine this identification information belong to this default giver identification gather time, then it represents that current allow this operator
Member performs wafer deposit operation, and in a kind of possible implementation of the present invention, this wafer processing is used for depositing Lot
The entrance of cavity include movable gate, the wrist of operator can be worn radio electronic label (such as wrist carried electricity
Subtab), move to movable gate reach the first predeterminable range when operator will be equipped with the Lot of wafer by both hands
Time, then can receive the operation requests that this radio electronic label sends, at the mark letter determining that this operation requests is carried
Breath belongs to this default giver identification when gathering, and this movable gate is opened, and now, operator will be equipped with the Lot of wafer
Put in wafer processing by the entrance of cavity, when detection (as detected by sensor) is placed to Lot
Time on the position that this wafer processing is corresponding, it is determined that these operator complete this wafer deposit operation, and record
These operator perform the operation information of this wafer deposit operation, certainly, above-mentioned are merely illustrative, and the present invention does not makees
Limit.
It should be noted that aforesaid operations information can include that operator start to perform the time of wafer deposit operation,
Quantity (the number of the Lot as deposited in three hours of the Lot that operator deposit in preset time period can also be included
The quantity of the Lot that amount or order of classes or grades at school are deposited), it is also possible to include that these operator perform other of wafer deposit operation
Information, this is not construed as limiting by the present invention.
It addition, after these operator complete this wafer deposit operation, this movable gate then can cut out, to prevent other
The operator being prohibited to perform wafer deposit operation perform wafer deposit operation, a kind of possible implementation, and this is lived
Dynamic gate can be closed after these operator complete this wafer deposit operation and reach the second Preset Time, to prevent from closing
Close and too fast operator are caused accidental injury, alternatively possible implementation, it is also possible to current operation cannot received
The operation requests (such as operator away from this movable gate to predeterminable range) of the radio electronic label that personnel wear is closed afterwards
Close, to prevent during operator perform wafer deposit operation for a long time, due to the frequent unlatching of movable gate
With the loss closed movable gate.Above-mentioned it is merely illustrative, is not construed as limiting.
Step S108, if judging, this identification information is not belonging to this default giver identification set, then forbid these operator
Perform this wafer deposit operation.
Wherein, determine this identification information be not belonging to this default giver identification gather time, then this movable gate will not be opened,
Thus forbid that these operator perform wafer deposit operation, in the preferred implementation of one, if forbidding this operator
Member performs this wafer deposit operation, then send information, as sent chimes of doom by alarm or passing through alarm lamp
The brightest or flicker point out.
In embodiments of the present invention, by receiving the operation requests performing wafer deposit operation, and this operation requests is judged
In identification information whether belong to default giver identification set, if judging, this identification information belongs to this default giver identification
Set, then allow these operator to perform this wafer deposit operation, and complete this wafer deposit operation these operator
After, record these operator and perform the operation information of this wafer deposit operation；If judging, this operator's information does not belongs to
Gather in this default giver identification, then forbid that these operator perform this wafer deposit operation, so, due to operator
Member is carrying out needing first to be identified during wafer is deposited the judgement of information, and is judging by rear just permission execution
Wafer deposit operation, and recording operation information, therefore, it is possible to accurately obtain the behaviour of the operator performing wafer operation
Make information, thus ensure the accuracy of operation information.
Alternatively, after recording these operator and perform the operation information of this wafer deposit operation, this operator are recorded
Identification information and this operation information between corresponding relation, so, by setting up corresponding relation, thus by operation believe
Breath is associated with operator, and then gets the operation information of operator more accurately, convenient to operation
The management of personnel.
Alternatively, after the corresponding relation recorded between the identification information of these operator and this operation information, by this
The identification information of operator and this corresponding relation inquire about the operation letter of this wafer deposit operation that these operator perform
Breath, in such manner, it is possible to the operation information that convenient inquiry operator are corresponding, improves the experience of user.
In a kind of possible implementation of the present invention, above by identification information and this corresponding relation of these operator
The operation information inquiring about this wafer deposit operation that these operator perform includes implementations below: receive query statement,
Wherein, this query statement includes the identification information of these operator, and passes through to be somebody's turn to do according to the identification information of these operator
Corresponding relation obtains the operation information of this wafer deposit operation that these operator perform, and shows this operation information.
Wherein it is possible to operation information is showed personnel query, to facilitate inquirer by the human-computer interaction interface arranged
Member understands the operation information of associative operation personnel.
In embodiments of the present invention, by receiving the operation requests performing wafer deposit operation, and this operation requests is judged
In identification information whether belong to default giver identification set, if judging, this identification information belongs to this default giver identification
Set, then allow these operator to perform this wafer deposit operation, and complete this wafer deposit operation these operator
After, record these operator and perform the operation information of this wafer deposit operation；If judging, this operator's information does not belongs to
Gather in this default giver identification, then forbid that these operator perform this wafer deposit operation, so, due to operator
Member is carrying out needing first to be identified during wafer is deposited the judgement of information, and is judging by rear just permission execution
Wafer deposit operation, and recording operation information, therefore, it is possible to accurately obtain the behaviour of the operator performing wafer operation
Make information, thus ensure the accuracy of operation information.
According to embodiments of the present invention, it is provided that a kind of wafer deposits recording method, as in figure 2 it is shown, the method includes:
Step S201, wafer is deposited recording equipment and is received the operation requests that radio electronic label sends.
Wherein, this operation requests carries the identification information of the operator performing wafer deposit operation.
In a kind of possible implementation of the present invention, operator can wear radio electronic label and (such as be worn on
In wrist), when operator carry out wafer deposit operation, wafer storage equipment receives what this radio electronic label sent
Operation requests, owing to this operation requests carrying the identification information of the operator performing wafer deposit operation, therefore,
The identity of the current operator performing wafer deposit operation can be known.
It should be noted that this identification information can be the identification information (such as the employee number etc. of operator) of operator,
This is not construed as limiting by the present invention, and other can uniquely identify that the identification information of these operator also should fall into the guarantor of the present invention
Within the scope of protecting.
Step S202, whether wafer deposits the identification information of the operator that recording equipment judges to carry in this operation requests
Belong to default giver identification set.
Wherein, this default giver identification set includes the operator allowing to perform this wafer deposit operation pre-set
Identification information.
It should be noted that this default giver identification set can arrange different operator's marks in the different time periods
Knowledge information, such as, in the morning 8 o'clock to 12 o'clock can not to 6 default giver identification set arranged with 2 pm
With, thus facilitate in wafer manufacturing process the management to operator.
When judged result is for being, perform step S203 to step S207；When judged result is no, perform step
S208。
Step S203, wafer is deposited recording equipment and is allowed operator to perform wafer deposit operation.
Step S204, after determining that these operator complete this wafer deposit operation, wafer deposits recording equipment record should
Operator perform the operation information of this wafer deposit operation.
Wherein, determine this identification information belong to this default giver identification gather time, then it represents that current allow this operator
Member performs wafer deposit operation, and in a kind of possible implementation of the present invention, this wafer processing is used for depositing Lot
The entrance of cavity include movable gate, the wrist of operator can be worn radio electronic label (such as wrist carried electricity
Subtab), move to movable gate reach the first predeterminable range when operator will be equipped with the Lot of wafer by both hands
Time, then wafer is deposited recording equipment and can be received the operation requests that this radio electronic label sends, and is determining this operation
The identification information that carries of request belongs to this default giver identification when gathering, and this wafer is deposited recording equipment and controlled this movable gate
Door is opened, and now, operator will be equipped with the Lot of wafer and put in wafer processing by the entrance of cavity, when
Detection (as detected by sensor) to Lot have been placed on the position that this wafer processing is corresponding time, then brilliant
Circle is deposited recording equipment and is determined that these operator complete this wafer deposit operation, and records these operator and perform this wafer
The operation information of deposit operation, certainly, above-mentioned is merely illustrative, and the present invention is not construed as limiting.
It should be noted that aforesaid operations information can include that operator start to perform the time of wafer deposit operation,
Quantity (the number of the Lot as deposited in three hours of the Lot that operator deposit in preset time period can also be included
The quantity of the Lot that amount or order of classes or grades at school are deposited), it is also possible to include that these operator perform other of wafer deposit operation
Information, this is not construed as limiting by the present invention.
It addition, after these operator complete this wafer deposit operation, this wafer is deposited recording equipment and is controlled this movable gate
Door is closed, and the operator performing wafer deposit operation to prevent other to be prohibited perform wafer deposit operation, Yi Zhongke
Can implementation, this movable gate can these operator complete this wafer deposit operation and reach second preset time
Close after between, to prevent from closing too fast accidental injury, alternatively possible implementation that operator are caused, it is also possible to
The operation requests of the radio electronic label that current operation personnel wear cannot be received (if operator are away from this movable gate
Door is to predeterminable range) close afterwards, to prevent during operator perform wafer deposit operation for a long time, due to
The frequently opening and closing loss to movable gate of movable gate.Above-mentioned it is merely illustrative, is not construed as limiting.
Step S205, this wafer is deposited between the identification information of recording equipment these operator of record and this operation information
Corresponding relation.
Step S206, wafer is deposited recording equipment and is received query statement.
Wherein it is possible to operation information is showed personnel query, to facilitate inquirer by the human-computer interaction interface arranged
Member understands the operation information of associative operation personnel.
Step S207, it is right by this that wafer deposits the recording equipment identification information according to the operator in this query statement
The operation information obtaining this wafer deposit operation that these operator perform should be related to, and show this operation information.
Wherein it is possible to operation information is showed personnel query, to facilitate inquirer by the human-computer interaction interface arranged
Member understands the operation information of associative operation personnel.
Step S208, wafer is deposited recording equipment and is forbidden that these operator perform this wafer deposit operation.
Wherein, determine this identification information be not belonging to this default giver identification gather time, then this movable gate will not be opened,
Thus forbid that these operator perform wafer deposit operation, in the preferred implementation of one, if forbidding this operator
Member performs this wafer deposit operation, then send information, as sent chimes of doom by alarm or passing through alarm lamp
The brightest or flicker point out.
In embodiments of the present invention, by receiving the operation requests performing wafer deposit operation, and this operation requests is judged
In identification information whether belong to default giver identification set, if judging, this identification information belongs to this default giver identification
Set, then allow these operator to perform this wafer deposit operation, and complete this wafer deposit operation these operator
After, record these operator and perform the operation information of this wafer deposit operation；If judging, this operator's information does not belongs to
Gather in this default giver identification, then forbid that these operator perform this wafer deposit operation, so, due to operator
Member is carrying out needing first to be identified during wafer is deposited the judgement of information, and is judging by rear just permission execution
Wafer deposit operation, and recording operation information, therefore, it is possible to accurately obtain the behaviour of the operator performing wafer operation
Make information, thus ensure the accuracy of operation information.
It should be noted that for said method embodiment, in order to be briefly described, therefore it is all expressed as a series of
Combination of actions, but those skilled in the art should know, and the present invention is not limited by described sequence of movement,
Because according to the present invention, some step can use other orders or carry out simultaneously.Secondly, those skilled in the art
Also should know, embodiment described in this description belongs to preferred embodiment, and involved action and module are not
Must be necessary to the present invention.
According to embodiments of the present invention, it is provided that a kind of wafer deposits recording equipment 30, as it is shown on figure 3, this equipment 30 can
To include:
Receive unit 31, for receiving the operation requests performing wafer deposit operation, wherein, this operation requests is carried
There is the identification information of the operator performing wafer deposit operation；
Judging unit 32, for judging whether the identification information that this reception unit 31 receives belongs to default giver identification collection
Closing, wherein, this default giver identification set includes the operator allowing to perform this wafer deposit operation pre-set
Identification information；
For this judging unit 32, first processing unit 33, if judging that this identification information belongs to this default giver identification
Set, then allow these operator to perform this wafer deposit operation, and complete this wafer deposit operation these operator
After, record these operator and perform the operation information of this wafer deposit operation；
For this judging unit 32, second processing unit 34, if judging that this identification information is not belonging to these default personnel mark
Know set, then forbid that these operator perform this wafer deposit operation.
Alternatively, as shown in Figure 4, this equipment 30 can also include:
Record unit 35, performs this wafer deposit operation for recording these operator at this first processing unit 33
After operation information, record the corresponding relation between the identification information of these operator and this operation information.
Alternatively, as it is shown in figure 5, this equipment 30 can also include:
Query unit 36, for this record unit 35 record the identification information of these operator and this operation information it
Between corresponding relation after, by the identification information of these operator and this corresponding relation inquire about that these operator perform should
The operation information of wafer deposit operation.
Alternatively, as shown in Figure 6, this query unit 36 may include that
Receiving subelement 361, be used for receiving query statement, wherein, this query statement includes the mark of these operator
Information；
Processing subelement 362, the identification information of the operator for receiving according to this reception subelement 361 passes through should
Corresponding relation obtains the operation information of this wafer deposit operation that these operator perform, and shows this operation information.
It should be noted that affiliated those skilled in the art is it can be understood that arrive, for convenience and simplicity of description,
The wafer of foregoing description deposits specific works process and the description of recording equipment, is referred in preceding method embodiment
Corresponding process, does not repeats them here.
According to embodiments of the present invention, it is provided that a kind of wafer deposits record system, as it is shown in fig. 7, this system includes:
Radio electronic label 71, for sending the operation requests performing wafer deposit operation；
Wafer deposits recording equipment 72, is connected with this radio electronic label radio frequency 71, including in above-mentioned Fig. 3 to Fig. 6
The wafer of arbitrary description deposits recording equipment.
Alternatively, this electronic tag is wrist strap type electronic tag, and this wrist strap type electronic tag is worn on the limb of operator
On body.
Use above-mentioned wafer to deposit record system, deposit recording equipment by wafer and receive the behaviour of execution wafer deposit operation
Ask, and judge whether the identification information in this operation requests belongs to default giver identification set, if judging this mark
Knowledge information belongs to this default giver identification set, then allow these operator to perform this wafer deposit operation, and this behaviour
After personnel complete this wafer deposit operation, record these operator and perform the operation information of this wafer deposit operation；If
Judge that this operator's information is not belonging to this default giver identification set, then forbid that these operator perform this wafer and deposit
Put operation, so, owing to operator are carrying out needing first to be identified during wafer is deposited the judgement of information,
And judging by the rear execution wafer deposit operation that just allows, and recording operation information, hold therefore, it is possible to accurately obtain
The operation information of the operator of row wafer operation, thus ensure the accuracy of operation information.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For Yuan, under the premise without departing from the principles of the invention, it is also possible to make some improvements and modifications, these improve and profit
Decorations also should be regarded as protection scope of the present invention.
Claims (10)
1. a wafer deposits recording method, it is characterised in that including:
Receive the operation requests performing wafer deposit operation, wherein, described operation requests carries execution wafer
The identification information of the operator of deposit operation；
Judging whether described identification information belongs to default giver identification set, wherein, described default giver identification collects
Close the identification information allowing to perform the operator of described wafer deposit operation including pre-setting；
If judging, described identification information belongs to described default giver identification set, then allow described operator to hold
The described wafer deposit operation of row, and after described operator complete described wafer deposit operation, record described behaviour
The operation information of described wafer deposit operation is performed as personnel；
If judging, described identification information is not belonging to described default giver identification set, then forbid described operator
Perform described wafer deposit operation.
Method the most according to claim 1, it is characterised in that record described operator perform described crystalline substance described
After the operation information of circle deposit operation, described method also includes:
Record the corresponding relation between the identification information of described operator and described operation information.
Method the most according to claim 2, it is characterised in that recording identification information and the institute of described operator
After stating the corresponding relation between operation information, described method also includes:
Identification information and described corresponding relation by described operator are inquired about described in described operator execution
The operation information of wafer deposit operation.
Method the most according to claim 3, it is characterised in that the described identification information by described operator and
Described corresponding relation is inquired about the operation information of the described wafer deposit operation that described operator perform and is included:
Receiving query statement, wherein, described query statement includes the identification information of described operator；
Identification information according to described operator obtains, by described corresponding relation, the institute that described operator perform
State the operation information of wafer deposit operation, and show described operation information.
5. a wafer deposits recording equipment, it is characterised in that including:
Receive unit, for receiving the operation requests performing wafer deposit operation, wherein, in described operation requests
Carry the identification information of the operator performing wafer deposit operation；
Judging unit, for judging whether the described identification information that described reception unit receives belongs to default personnel mark
Knowing set, wherein, described default giver identification set includes that the permission pre-set performs described wafer and deposits behaviour
The identification information of the operator made；
For described judging unit, first processing unit, if judging that described identification information belongs to described default personnel
Logo collection, then allow described operator to perform described wafer deposit operation, and complete described operator
After described wafer deposit operation, record described operator and perform the operation information of described wafer deposit operation；
For described judging unit, second processing unit, if judging that described identification information is not belonging to described default people
Member's logo collection, then forbid that described operator perform described wafer deposit operation.
Equipment the most according to claim 5, it is characterised in that described equipment also includes:
Record unit, deposits behaviour for performing described wafer operator described in described first processing unit record
After the operation information made, record the corresponding relation between the identification information of described operator and described operation information.
Equipment the most according to claim 6, it is characterised in that described equipment also includes:
Query unit, at the identification information of operator described in described recording unit records and described operation letter
After corresponding relation between breath, identification information and described corresponding relation by described operator inquire about described behaviour
Make the operation information of the described wafer deposit operation that personnel perform.
Equipment the most according to claim 7, it is characterised in that described query unit includes:
Receiving subelement, be used for receiving query statement, wherein, described query statement includes described operator's
Identification information；
Processing subelement, the identification information of the operator for receiving according to described reception subelement passes through described
Corresponding relation obtains the operation information of the described wafer deposit operation that described operator perform, and shows described behaviour
Make information.
9. a wafer deposits record system, it is characterised in that including:
Radio electronic label, for sending the operation requests performing wafer deposit operation；
Wafer deposits recording equipment, is connected with described radio electronic label radio frequency, including in claim 5 to 8
Wafer described in any one deposits recording equipment.
System the most according to claim 9, it is characterised in that described electronic tag is wrist strap type electronic tag, institute
State wrist strap type electronic tag to be worn on the limbs of operator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510087487.6A CN105988442B (en) | 2015-02-25 | 2015-02-25 | Wafer stores recording method, equipment and system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510087487.6A CN105988442B (en) | 2015-02-25 | 2015-02-25 | Wafer stores recording method, equipment and system |
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| CN105988442A true CN105988442A (en) | 2016-10-05 |
| CN105988442B CN105988442B (en) | 2019-01-08 |
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| CN105988442B (en) | 2019-01-08 |
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