CN105973323A - Automatic detecting device for preventing water and fertilizer drip irrigation system from being blocked and detecting method thereof - Google Patents

Automatic detecting device for preventing water and fertilizer drip irrigation system from being blocked and detecting method thereof Download PDF

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Publication number
CN105973323A
CN105973323A CN201610425902.9A CN201610425902A CN105973323A CN 105973323 A CN105973323 A CN 105973323A CN 201610425902 A CN201610425902 A CN 201610425902A CN 105973323 A CN105973323 A CN 105973323A
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Prior art keywords
drip irrigation
flow
flow sensor
blocking
module
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Chinese (zh)
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龙博
徐永
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Fujian Agriculture and Forestry University
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Fujian Agriculture and Forestry University
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Priority to CN201610425902.9A priority Critical patent/CN105973323A/en
Publication of CN105973323A publication Critical patent/CN105973323A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/52Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring the height of the fluid level due to the lifting power of the fluid flow

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)

Abstract

The invention relates to an automatic detecting device for preventing a water and fertilizer drip irrigation system from being blocked and a detecting method thereof. The automatic detecting device comprises a first flow sensor and a second flow sensor which are arranged at the two ends of a drip irrigation main pipeline of the water and fertilizer drip irrigation system respectively. The first flow sensor and the second flow sensor are electrically connected with a flow measuring module through a flow signal conversion module. The flow measuring module is electrically connected with a control unit. The control unit is further electrically connected with a display module, a keyboard input module and an alarm module. The flow difference between the two ends of the drip irrigation main pipeline is detected through the first flow sensor and the second flow sensor in real time and transmitted to the control unit for analysis and judgment, fast alarming is carried out, and the automatic detecting device and the detecting method thereof are suitable for recognizing, locating and processing the blocking situation of a farmland water and fertilizer drip irrigation network and have the advantages of being low in cost, high in recognition precision, easy to operate and the like.

Description

For preventing automatic detection device and the detection method thereof that liquid manure drip irrigation system blocks
Technical field
The present invention relates to agricultural equipment field, particularly relate to a kind of automatic detection for preventing liquid manure drip irrigation system from blocking Device and detection method thereof.
Background technology
Liquid manure drip irrigation is according to crop water requirement, by low pressure pipeline system and the douche installed on the capillary, Nutrient water and crop needed uniformly and lentamente instills the irrigation method in the soil of crop root zone.Drip irrigation does not destroy soil Structure, soil internal water, fertilizer, air and heat often keep the good condition being suitable for plant growth, and evaporation loss is little, does not produces ground Face diameter stream, almost without deep percolation, is a kind of irrigation method saved water and energy.Drip irrigation to be mainly characterized by water consumption little, fill Hydrophone flow per hour is 2-12 liter, and therefore, duration of once pouring water is longer, and the cycle poured water is short, can accomplish that little water is diligent Fill;The operating pressure needed is low, it is possible to accurately Controlled irrigation amount, can reduce invalid Evaporation among plants, not result in water Waste;Drip irrigation can also carry out automated management, saves human cost.Therefore, drip irrigation is that current field of agricultural irrigation is the most energy-conservation Irrigation method, especially for the area that drought and water shortage and manpower are deficient, its advantage becomes apparent from.
But, drip irrigation system is less due to the water dropper bore of itself, irrigate liquid manure used contains impurity, silt with And microorganism all can make emitter clogging.Although irrigation system itself has purification filtering function, but due to screen Caliber size, can only filter out a certain size impurity, and the impurity of reduced size is not filtered, thus, long-term In work process, the impurity of these reduced sizes can constantly accumulate and be gathered at water dropper, thus causes the blocking of water dropper.
At present, for emitter clogging problem, scientific research personnel has been proposed for more solution.These achievements in research master If blocking angularly from emitter structure, fertilizer and antibiont, it is proposed that multiple water dropper clogging-preventing measures: Chinese patent ZL200910076834.X discloses a kind of device preventing underground drip irrigation system negative pressure and root system blocking, the main portion of this device Divide and be the flexible member being arranged on water dropper water outlet, eliminate the blockage problem caused due to water dropper negative pressure;In The emphasis that solves of state's patent ZL200510104225.2 is then to prepare a kind of nutritional solution existed without blocking material and solid fertilizer Material, solves the problem that fertilizer causes drip irrigation system to block;Chinese patent ZL 201110217752.X discloses a kind of drip irrigation Systemic antibiotic thing blocking device, containing an ozone generating-device in this device, starts ozonator when drip irrigation system is opened, Ozone and irrigation water are mixed to form " Ozone Water " of uniform gas-liquid distribution and enter drip irrigation system, kill the microorganism in runner, with Time, in underground drip irrigation system, due to the existence of pressure differential, crop root also can be suppressed raw to drip emitter outlet direction Long, reach the purpose of drip irrigation system antibiont blocking.Although the advantage that these schemes are in respective design object is the brightest Aobvious, but there is also common deficiency, it is i.e. due in actual drip irrigation operation, the environment residing for water dropper, source quality, mistake The filter diversity such as effect, fertilizer formula is the biggest, causes these schemes can only reduce the probability of emitter clogging or extend water dropper The nonclogging time, emitter clogging can not be avoided completely, can not be when clogging occurs and alarm.
Summary of the invention
It is an object of the invention to for above weak point, it is provided that a kind of for prevent that liquid manure drip irrigation system from blocking from Motion detection device and detection method thereof, can pinpoint detection in real time to stopping state, it is also possible to reaches to use at stopping state Carry out automatic alarm during the setting value of family, notify that user takes corresponding measure in time, reduce the harm that blockage problem is brought.
It is a kind of automatic inspection for preventing liquid manure drip irrigation system from blocking that the present invention solves the scheme that technical problem used Survey device, it is characterised in that: include the first flow sensor being respectively arranged at the drip irrigation main pipeline two ends of liquid manure drip irrigation system With second flow sensor, described first flow sensor and second flow sensor through a flow signal conversion module with first-class Measurement module is electrically connected, and described flow measurement module and a control unit are electrically connected, and described control unit is also powered with a display mould Block, input through keyboard module and alarm module.
Further, described liquid manure drip irrigation system includes a water circle device, the drip irrigation main pipeline of connection water circle device With more than the one group drip irrigation branch pipe(tube) being connected with drip irrigation main pipeline two ends;Each drip irrigation branch pipe(tube) be respectively arranged at two ends with one Electromagnetic valve, described electromagnetic valve is electrically connected with described control unit through solenoid valve driving module;Set the most respectively on each drip irrigation branch pipe(tube) There is more than one shower nozzle.
Further, described flow measurement module is also powered with one for the temperature-compensation circuit of compensates.
Further, described first flow sensor and second flow sensor are float-type flowmeter;Described float Formula effusion meter includes the cylinder-like shell of the upper and lower flange of a upper flange, lower flange and connection;It is provided with in described cylinder-like shell The Taper Pipe of one bottom-up expansion, is provided with a float moved up and down along Taper Pipe central shaft, outside described cylindrical shape in described Taper Pipe The upper backstop being connected with described float and lower backstop is further respectively had up and down in shell.
Further, also include the pre-upper cable being embedded in soil and subjacent cable, described first flow sensor and Second flow sensor is electrically connected with flow measurement module through upper cable and subjacent cable.
Further, described alarm module includes LED and a voice module of several different colours, described voice module with Described control unit is electrically connected, and described LED is electrically connected with described control unit through LED lamp drive circuit.
Further, described display module is LCDs.
The invention also discloses a kind of as described above for the automatic detection device preventing liquid manure drip irrigation system from blocking Detection method, comprise the following steps:
Step S1: first flow sensor and second flow sensor are respectively arranged at drip irrigation main pipeline two ends;For gathering Flow QA1 and QA2 at drip irrigation main pipeline two ends;
Step S2: first flow sensor and second flow sensor acquisition are obtained the flow value input at drip irrigation main pipeline two ends To flow measurement module, be calculated the difference in flow △ Q at drip irrigation main pipeline two ends, wherein △ Q=QA1-QA2,0≤△ Q≤ Qmax, QmaxFor not occurring maximum stream flow during blocking poor;
Step S3: detected the difference in flow △ Q at drip irrigation main pipeline two ends by control unit in real time, if 0≤△ is Q < Qmax, by control Unit processed shows " pipeline blocks, and processes the most in time " at display module, and carries out sound and light alarm;Investigate simultaneously Find the drip irrigation branch pipe(tube) of blocking;Otherwise proceed work, show current difference in flow △ Q.
Further, in described step S3, investigation is found the drip irrigation branch pipe(tube) of blocking and is comprised the following steps:
Step S30: close the electromagnetic valve on the drip irrigation branch pipe(tube) at connection drip irrigation main pipeline two ends successively;
Step S31: detect the difference in flow △ Q during closed electromagnetic valve on each group of drip irrigation branch pipe(tube) by control unit;
Step S32: compare the difference in flow during closed electromagnetic valve on each group of drip irrigation branch pipe(tube), draw the drip irrigation arm of blocking Road.
Compared with prior art, the present invention has a following beneficial effect:
1) automatic detection device of the present invention is with low cost, assembles simple, the directly drip irrigation main pipeline in liquid manure drip irrigation system Two ends are respectively mounted first flow sensor and second flow sensor.
2) automatic detection device of the present invention is highly sensitive, and testing accuracy is high, controls to examine in real time by control unit Survey, blockage problem can be found quickly and process in time;
3) the automatic detection device automaticity of the present invention is high, less demanding to operator's technology, convenient operation.
Accompanying drawing explanation
Below in conjunction with the accompanying drawings patent of the present invention is further illustrated.
Fig. 1 is the circuit structure block diagram of the automatic detection device of the embodiment of the present invention.
Fig. 2 is the structural representation of the liquid manure drip irrigation system of the embodiment of the present invention.
Fig. 3 is the structural representation of the float-type flowmeter of the embodiment of the present invention.
In figure: 1-first flow sensor;2-second flow sensor;3-drip irrigation main pipeline;4-drip irrigation branch pipe(tube);5-electricity Magnet valve;6-water circle device;7-upper flange;The upper backstop of 8-;9-cylinder-like shell;10-float;11-Taper Pipe;Backstop under 12-; 13-lower flange.
Detailed description of the invention
The present invention is further described with detailed description of the invention below in conjunction with the accompanying drawings.
As shown in Figures 1 to 3, the embodiment of the present invention provides a kind of for preventing what liquid manure drip irrigation system from blocking automatically to detect dress Put, it is characterised in that: include first flow sensor 1 He being respectively arranged at drip irrigation main pipeline 3 two ends of liquid manure drip irrigation system Second flow sensor 2, described first flow sensor 1 and second flow sensor 2 are through a flow signal conversion module and Flow measurement module is electrically connected, and described flow measurement module and a control unit are electrically connected, and described control unit is also powered with a display Module, input through keyboard module and alarm module.
From the foregoing, the beneficial effects of the present invention is: during the work of liquid manure drip irrigation system, by first flow sensor 1 and second flow sensor 2 be respectively arranged at drip irrigation main pipeline 3 two ends;For gathering the flow at drip irrigation main pipeline 3 two ends Difference.When shower nozzle does not occurs blocking, the difference in flow at drip irrigation main pipeline 3 two ends is relatively big, when there is blocking in shower nozzle, and drip irrigation main pipeline The difference in flow at 3 two ends is less, completely plugged in the case of, the difference in flow at drip irrigation main pipeline 3 two ends is zero.Therefore, according to drip irrigation The difference in flow at main pipeline 3 two ends may determine that whether shower nozzle blocking occurs, and difference in flow when closing different drip irrigation branch pipe(tube) 4 Change may determine which group drip irrigation branch pipe(tube) 4 block.Judged by control unit, Real-time Collection drip irrigation main pipeline The difference in flow at 3 two ends, shows in display module, when there is blocking, carries out sound and light alarm by alarm module, controls single Unit can be single-chip microcomputer or PLC.
In the present embodiment, described liquid manure drip irrigation system includes a water circle device 6, the drip irrigation of connection water circle device 6 Main pipeline 3 and more than the one group drip irrigation branch pipe(tube) 4 being connected with drip irrigation main pipeline 3 two ends;The two ends of each drip irrigation branch pipe(tube) 4 are divided Not being provided with an electromagnetic valve 5, described electromagnetic valve 5 drives module to be electrically connected with described control unit through electromagnetic valve 5;Each drip irrigation branch pipe(tube) More than one shower nozzle is further respectively had on 4.As in figure 2 it is shown, drip irrigation main pipeline 3L two ends are connected with water circle device 6 respectively Logical, some groups of drip irrigation branch pipe(tube)sExtremely, wherein n is the positive integer more than 1.Often organize the two ends of drip irrigation branch pipe(tube) 4 It is respectively equipped with electromagnetic valve 5, wherein drip irrigation branch pipe(tube)WithThe electromagnetic valve 5 at two ends is respectively B1 and B2, C1 and C2, D1 With D2, E1 and E2, F1 and F2.
In the present embodiment, described flow measurement module be also powered with one for compensates temperature-compensating electricity Road.The different impact that float height change value size is produced of temperature can be compensated by temperature supplementary circuitry, improve flow and survey The amount module flow measurement precision to suspended body flowmeter.
In the present embodiment, described first flow sensor 1 and second flow sensor 2 are suspended body flowmeter;Described Suspended body flowmeter includes a upper flange 7, lower flange 13 and connects the cylinder-like shell 9 of upper and lower flange;Described cylinder-like shell 9 Inside it is provided with the Taper Pipe 11 of a bottom-up expansion, in described Taper Pipe 11, is provided with a float moved up and down along Taper Pipe 11 central shaft 10, further respectively have the upper backstop 8 being connected with described float 10 and lower backstop 12 in described cylinder-like shell 9 up and down. Suspended body flowmeter operation principle is as it is shown on figure 3, detected fluid is from bottom to top through Taper Pipe 11 and the annular space of float 10 formation, floating Son 10 upper and lower side produces differential pressure and forms the power that float 10 rises, when climbing power suffered by float 10 is more than soaking float 10 weight in a fluid During amount, float 10 just rises, and annular space area increases therewith, and at annular space, rate of flow of fluid declines therewith, and float 10 upper and lower side differential pressure drops Low, act on the climbing power of float 10 also along with minimizing, until climbing power equal to soak in a fluid float 10 weight time, float 10 Just stable at a certain height.Float 10 has corresponding relation at Taper Pipe 11 camber and the flow passed through.Float 10 effusion meter with drip Fill main pipeline 3 two ends to be connected, by flow signal modular converter, the height change of float 10 is converted into level and changes thus defeated Go out corresponding signal waveform, and then carried out the detection of flow by flow measurement module.
In the present embodiment, also including the pre-upper cable being embedded in soil and subjacent cable, described first flow senses Device 1 and second flow sensor 2 are electrically connected with flow measurement module through upper cable and subjacent cable.
In the present embodiment, described alarm module includes LED and a voice module of several different colours, described voice mould Block is electrically connected with described control unit, and described LED is electrically connected with described control unit through LED lamp drive circuit.
In the present embodiment, described display module is LCDs.
The invention also discloses a kind of as described above for the automatic detection device preventing liquid manure drip irrigation system from blocking Detection method, comprise the following steps:
Step S1: first flow sensor 1 and second flow sensor 2 are respectively arranged at drip irrigation main pipeline 3 two ends;For adopting Flow QA1 and QA2 at collection drip irrigation main pipeline 3 two ends;
Step S2: first flow sensor 1 and second flow sensor 2 are collected the flow value at drip irrigation main pipeline 3 two ends Input, to flow measurement module, is calculated the difference in flow △ Q at drip irrigation main pipeline 3 two ends, wherein △ Q=QA1-QA2,0≤△ Q≤Qmax, QmaxFor not occurring maximum stream flow during blocking poor;
Step S3: detected the difference in flow △ Q at drip irrigation main pipeline 3 two ends by control unit in real time, if 0≤△ is Q < Qmax, pass through Control unit shows " pipeline blocks, and processes the most in time " at display module, and carries out sound and light alarm;Investigate simultaneously Find the drip irrigation branch pipe(tube) 4 of blocking;Otherwise proceed work, show current difference in flow △ Q.
In the present embodiment, in described step S3, investigation is found the drip irrigation branch pipe(tube) 4 of blocking and is comprised the following steps:
Step S30: close the electromagnetic valve 5 on the drip irrigation branch pipe(tube) at connection drip irrigation main pipeline 3 two ends successively;
Step S31: the difference in flow △ Q when electromagnetic valve 5 detected on each group of drip irrigation branch pipe(tube) 4 by control unit cuts out;
Step S32: compare the difference in flow during closed electromagnetic valve on each group of drip irrigation branch pipe(tube) 4, draw the drip irrigation arm of blocking Road 4.
In sum, the present invention provides a kind of automatic detection device for preventing liquid manure drip irrigation system from blocking and inspection thereof Survey method, simple in construction, it is easy to operation, it is adaptable to the identification of field water fertilizer drip irrigation network stopping state, position and process, have With low cost, accuracy of identification is high, the advantage such as easily operated.
The object, technical solutions and advantages of the present invention have been carried out further by the above-listed preferred embodiment that the present invention provides Describe in detail, be it should be understood that and the foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, All within the spirit and principles in the present invention, any modification, equivalent substitution and improvement etc. made, should be included in the present invention's Within protection domain.

Claims (9)

1. one kind is used for the automatic detection device preventing liquid manure drip irrigation system from blocking, it is characterised in that: include being respectively arranged at water The first flow sensor at the drip irrigation main pipeline two ends of fertile drip irrigation system and second flow sensor, described first flow sensor It is electrically connected with a flow measurement module through a flow signal conversion module with second flow sensor, described flow measurement module and one Control unit is electrically connected, and described control unit is also powered with a display module, input through keyboard module and alarm module.
Automatic detection device for preventing liquid manure drip irrigation system from blocking the most according to claim 1, it is characterised in that: institute State liquid manure drip irrigation system and include that a water circle device, the drip irrigation main pipeline of connection water circle device and more than one group are responsible for drip irrigation The drip irrigation branch pipe(tube) that two ends, road are connected;Each drip irrigation branch pipe(tube) be respectively arranged at two ends with an electromagnetic valve, described electromagnetic valve warp Solenoid valve driving module is electrically connected with described control unit;More than one shower nozzle is further respectively had on each drip irrigation branch pipe(tube).
Automatic detection device for preventing liquid manure drip irrigation system from blocking the most according to claim 1, it is characterised in that: institute State flow measurement module and be also powered with one for the temperature-compensation circuit of compensates.
Automatic detection device for preventing liquid manure drip irrigation system from blocking the most according to claim 1, it is characterised in that: institute State first flow sensor and second flow sensor is float-type flowmeter;Described float-type flowmeter includes method on Orchid, lower flange and the cylinder-like shell of the upper and lower flange of connection;The cone of a bottom-up expansion it is provided with in described cylinder-like shell Pipe, is provided with a float moved up and down along Taper Pipe central shaft, further respectively has up and down in described cylinder-like shell in described Taper Pipe The one upper backstop being connected with described float and lower backstop.
Automatic detection device for preventing liquid manure drip irrigation system from blocking the most according to claim 1, it is characterised in that: also Including the pre-upper cable being embedded in soil and subjacent cable, described first flow sensor and second flow sensor are through top Cable and subjacent cable are electrically connected with flow measurement module.
Automatic detection device for preventing liquid manure drip irrigation system from blocking the most according to claim 1, it is characterised in that: institute State alarm module and include LED and a voice module of several different colours, described voice module and described control unit electricity Even, described LED is electrically connected with described control unit through LED lamp drive circuit.
Automatic detection device for preventing liquid manure drip irrigation system from blocking the most according to claim 1, it is characterised in that: institute Stating display module is LCDs.
8. the inspection of the automatic detection device for preventing liquid manure drip irrigation system from blocking as described in any one of claim 1-7 Survey method, it is characterised in that comprise the following steps:
Step S1: first flow sensor and second flow sensor are respectively arranged at drip irrigation main pipeline two ends;For gathering Flow QA1 and QA2 at drip irrigation main pipeline two ends;
Step S2: first flow sensor and second flow sensor acquisition are obtained the flow value input at drip irrigation main pipeline two ends To flow measurement module, be calculated the difference in flow △ Q at drip irrigation main pipeline two ends, wherein △ Q=QA1-QA2,0≤△ Q≤ Qmax, QmaxFor not occurring maximum stream flow during blocking poor;
Step S3: detected the difference in flow △ Q at drip irrigation main pipeline two ends by control unit in real time, if 0≤△ is Q < Qmax, by control Unit processed shows " pipeline blocks, and processes the most in time " at display module, and carries out sound and light alarm;Investigate simultaneously Find the drip irrigation branch pipe(tube) of blocking;Otherwise proceed work, show current difference in flow △ Q.
The detection side of a kind of automatic detection device for preventing liquid manure drip irrigation system from blocking the most according to claim 1 Method, it is characterised in that: in described step S3, investigation is found the drip irrigation branch pipe(tube) of blocking and is comprised the following steps:
Step S30: close the electromagnetic valve on the drip irrigation branch pipe(tube) at connection drip irrigation main pipeline two ends successively;
Step S31: detect the difference in flow △ Q during closed electromagnetic valve on each group of drip irrigation branch pipe(tube) by control unit;
Step S32: compare the difference in flow during closed electromagnetic valve on each group of drip irrigation branch pipe(tube), draw the drip irrigation arm of blocking Road.
CN201610425902.9A 2016-06-16 2016-06-16 Automatic detecting device for preventing water and fertilizer drip irrigation system from being blocked and detecting method thereof Pending CN105973323A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107278820A (en) * 2017-07-28 2017-10-24 内蒙古自治区水利科学研究院 A kind of drip irrigation is poured water detecting system and suitable for crop field drip irrigation water adding system
CN108168629A (en) * 2017-12-08 2018-06-15 北京农业智能装备技术研究中心 A kind of monitoring device of liquid fertilization pipeline, system and method
CN108633427A (en) * 2018-04-19 2018-10-12 温州大学激光与光电智能制造研究院 Intelligent irrigation system
CN111271607A (en) * 2020-01-19 2020-06-12 北京北方华创微电子装备有限公司 Overvoltage protection device and method for semiconductor equipment and abnormality detection method

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CN102564747A (en) * 2011-12-13 2012-07-11 中国农业大学 Comprehensive evaluation method and test system for clogging characteristics of emitters of drip irrigation system
CN103076055A (en) * 2012-12-31 2013-05-01 江苏大学 Method for evaluating clogging conditions of drip irrigation system
US20150051743A1 (en) * 2013-08-14 2015-02-19 Richard Alan Darnold Device for monitoring and controlling water flow
CN205691175U (en) * 2016-06-16 2016-11-16 福建农林大学 For the automatic detection device preventing liquid manure drip irrigation system from blocking

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CN201888137U (en) * 2010-10-19 2011-07-06 西安扩力机电科技有限公司 Automatic constant flow control system for farmland irrigation equipment
CN102564747A (en) * 2011-12-13 2012-07-11 中国农业大学 Comprehensive evaluation method and test system for clogging characteristics of emitters of drip irrigation system
CN103076055A (en) * 2012-12-31 2013-05-01 江苏大学 Method for evaluating clogging conditions of drip irrigation system
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107278820A (en) * 2017-07-28 2017-10-24 内蒙古自治区水利科学研究院 A kind of drip irrigation is poured water detecting system and suitable for crop field drip irrigation water adding system
CN108168629A (en) * 2017-12-08 2018-06-15 北京农业智能装备技术研究中心 A kind of monitoring device of liquid fertilization pipeline, system and method
CN108633427A (en) * 2018-04-19 2018-10-12 温州大学激光与光电智能制造研究院 Intelligent irrigation system
CN111271607A (en) * 2020-01-19 2020-06-12 北京北方华创微电子装备有限公司 Overvoltage protection device and method for semiconductor equipment and abnormality detection method

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