CN105970141A - Aluminum nitride spraying device and method - Google Patents
Aluminum nitride spraying device and method Download PDFInfo
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- CN105970141A CN105970141A CN201610610851.7A CN201610610851A CN105970141A CN 105970141 A CN105970141 A CN 105970141A CN 201610610851 A CN201610610851 A CN 201610610851A CN 105970141 A CN105970141 A CN 105970141A
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- Prior art keywords
- aluminium
- aluminium nitride
- spray equipment
- electrode
- wire electrode
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
Abstract
The invention provides an aluminum nitride spraying device and method. The device comprises a shell provided with a reaction chamber. The shell is provided with a jet orifice and a nitrogen inlet connected with the reaction chamber. An aluminum wire electrode and an aluminum block electrode which are connected with an external power source to achieve approximate discharge are arranged in the reaction chamber. The aluminum block electrode is arranged on the jet orifice. When the aluminum nitride spraying device works, nitrogen is continuously introduced into the reaction chamber through the nitrogen inlet, the front end of the aluminum wire electrode abuts against the aluminum block electrode, discharge is carried out under the effect of the external power source, then, a high-temperature aluminum nitride plasma is produced, the aluminum nitride plasma is jetted out through the jet orifice, and a layer of aluminum nitride film is formed on the corresponding surface. The aluminum nitride spraying device is simple in structure, low in manufacturing cost and capable of efficiently producing the aluminum nitride film, aluminum nitride produced through the device is sprayed to the surfaces of various workpieces, the application range is wide, the aluminum nitride film spraying thickness can be adjusted through the device, and therefore various production requirements are met.
Description
Technical field
The present invention relates to the preparation field of high heat conduction base plate for packaging, particularly relate to a kind of aluminium nitride spray equipment and spraying method thereof.
Background technology
Existing aluminium nitride composite base plate manufacture method mainly has two kinds: one is directly to coat one layer of aln layer on base plate, Chinese patent application such as Publication No. CN103555195A, open a kind of Aluminum nitride heat radiation paint, but, due to simply simple physical adhesion between Aluminum nitride heat radiation paint and base plate, during LED operation, colded and heat succeed each other impact, there is heat radiation coating and peels off hidden danger.Another kind is that the mode using vacuum sputtering forms aln layer on base plate, such as a Publication No. CN102969437A Chinese patent application, disclose a kind of LED emitting components, including LED chip, glass substrate, LED chip and metallic conduction circuit is fixed above glass substrate, scribbling aluminium nitride coating on glass substrate and LED chip joint face, described aluminium nitride coating is grown on the glass substrate by the thin film-forming method of magnetron sputtering.But, use the mode of magnetron sputtering to generate the speed of aluminium nitride very slowly, production efficiency is low, and manufacturing cost is high, and current the method is in the experimental stage, it is difficult to carry out commercial application.
The present inventor devises a kind of method generating aluminium nitride film on aluminium sheet, sees the Chinese invention patent of Publication No. CN104617213.That application discloses a kind of high temperature utilizing electric spark to produce in a nitrogen environment makes the aluminum of surface of aluminum plate react with nitrogen, and then the method generating aluminium nitride film layer in surface of aluminum plate.The preparation technology of the method is simple, and working (machining) efficiency is high, and aluminium nitride film layer is difficult to peel off.But, the method is simply possible to use on aluminium sheet generation aluminium nitride film, and range of application is very restricted.
Therefore, prior art needs to improve further.
Summary of the invention
In view of the deficiencies in the prior art, the invention reside in offer a kind of efficiency height, the aluminium nitride spray equipment of applied range and spraying method thereof, it is intended to solve the problem that existing aluminium nitride composite base plate manufacture method efficiency is low, cost is high, range is narrow.
Technical scheme is as follows:
A kind of aluminium nitride spray equipment, wherein, described device includes the housing being provided with reative cell, jet and nitrogen inlet coupled reaction room it is respectively arranged with on described housing, wherein, it is provided with in described reative cell and connects external power source realization close to the aluminium wire electrode discharged and aluminium block electrode, described aluminium block electrode is arranged at jet, during the work of aluminium nitride spray equipment, nitrogen is continually fed in reative cell by nitrogen inlet, described aluminium wire electrode front end approaches aluminium block electrode and discharges under external power source effect and then produce the aluminium nitride plasma of high temperature, described aluminium nitride plasma sprays from jet, make corresponding to forming one layer of aluminium nitride film on the surface of jet.
Described aluminium nitride spray equipment, wherein, described aluminium block electrode is arranged around jet, and wherein, described aluminium block electrode forms bellmouth around jet, and described aluminium wire electrode has the tapered front end coincideing with aluminium block electrode bellmouth pass.
Described aluminium nitride spray equipment, wherein, described housing includes housing body and is connected and arranges the connection seat of jet with housing body, and described aluminium block electrode is arranged in connecting seat and makes bellmouth correspondence jet, wherein, described connection seat is connected in housing body.
Described aluminium nitride spray equipment, wherein, a diameter of 0.3-3mm of described aluminium wire electrode.
Described aluminium nitride spray equipment, wherein, described aluminium wire electrode realizes continuing feeding by the feed mechanism being arranged on housing, wherein, the feeding passage of aluminium wire electrode it is provided with on described housing, in described aluminium wire electrode enters into reative cell by feeding passage and control feed speed by feed mechanism, it is achieved continuous discharge is reacted.
Described aluminium nitride spray equipment, wherein, described feed mechanism is the roll shaft being arranged on feeding channel side, and described roll shaft is set to two and is correspondingly arranged at feeding passage both sides, and described roll shaft clamping aluminium wire electrode also advances aluminium wire electrode to move to aluminium block electrode direction by own rotation.
Described aluminium nitride spray equipment, wherein, when described feed mechanism makes aluminium nitride spray equipment work, aluminium wire electrode and aluminium block electrode are in arcing distance all the time, and wherein, described arcing distance is 0.1 mm-5mm.
Described aluminium nitride spray equipment, wherein, described reative cell connects feeder by nitrogen inlet, and during the work of aluminium nitride spray equipment, described feeder continues nitrogen injection to reative cell, and in making described reative cell, nitrogen pressure is maintained at 0.2-1MPa.
Described aluminium nitride spray equipment, wherein, described external power source is DC source, and its power is 5-20KW.
A kind of spraying method of aluminium nitride spray equipment as above, wherein, described method is: after being passed through nitrogen by nitrogen inlet in reative cell, described aluminium wire electrode remains arcing distance with aluminium block electrode under feed mechanism control, external power source controls aluminium wire electrode and aluminium block electrode and produces aluminium nitride in reative cell by electric discharge, and make the aluminium nitride of generation be ejected into corresponding surface with nitrogen by jet, form aluminium nitride film.
Beneficial effect: the present invention provides a kind of aluminium nitride spray equipment and spraying method thereof, described aluminium nitride spray equipment simple in construction, low cost of manufacture, and can efficiently produce aluminium nitride film, the aluminium nitride that device produces is sprayed on various surface of the work, applied range, and the service life of described device is long, in addition, the thickness of described device adjustable aluminium nitride film spraying, to meet various Production requirement, has good market prospect.
Accompanying drawing explanation
Fig. 1 is the structural representation of aluminium nitride spray equipment in the embodiment of the present invention.
Detailed description of the invention
The present invention provides a kind of aluminium nitride spray equipment and spraying method thereof, and for making the purpose of the present invention, technical scheme and effect clearer, clear and definite, the present invention is described in more detail below.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
nullThe present invention provides a kind of aluminium nitride spray equipment，As shown in Figure 1，Described device includes the housing 100 being provided with reative cell 110，Jet 120 and nitrogen inlet 130 coupled reaction room it is respectively arranged with on described housing 100，Wherein，It is provided with in described reative cell 110 and connects external power source realization close to the aluminium wire electrode 200 discharged and aluminium block electrode 300，Described aluminium block electrode 300 is arranged at jet 130，During the work of aluminium nitride spray equipment，Nitrogen is continually fed in reative cell 110 by nitrogen inlet 130，Described aluminium wire electrode 200 front end approaches aluminium block electrode 300 and discharges under external power source effect and then produce the aluminium nitride plasma of high temperature，Described aluminium nitride plasma sprays from jet 120 with nitrogen，Make corresponding to forming one layer of aluminium nitride film on the surface of jet.The surface of described correspondence and jet can be the surface of the work of various material.Described aluminium nitride spray equipment simple in construction, can be widely applied to carry out various workpieces surface the plated film processing of aluminium nitride film.
Preferably, described aluminium block electrode 300 is arranged around jet 130, and described aluminium block electrode 300 forms bellmouth 310 around jet, and described aluminium wire electrode 200 has the tapered front end coincideing with aluminium block electrode bellmouth 310 pass.The bellmouth of above-mentioned aluminium block electrode and the matching design of aluminium wire electrode tapered front end expand the machining area that aluminium wire front end is formed with aluminium block bellmouth inner surface, improve the production efficiency of aluminium nitride.
Due in the work process of described aluminium nitride spray equipment, aluminium wire electrode and aluminium block electrode are all sacrificial electrodes, the prolongation of described working time, the bellmouth aperture of aluminium block electrode can be increasing, finally affect the properly functioning of aluminium nitride spray equipment, therefore, periodic replacement for convenience of aluminium block electrode, housing 100 is designed as the connection seat 150 including housing body 140 and being connected and arrange jet with housing body, described aluminium block electrode 300 is arranged in connecting seat 150 and makes the corresponding jet 130 of bellmouth 310, wherein, described connection seat is connected in housing body.In maintenance at ordinary times, can carry out the replacing of aluminium block electrode by being disassembled from housing body 140 by connection seat 150.Above-mentioned design extends the service life of aluminium nitride spray equipment effectively.
Preferably, a diameter of 0.3-3mm of described aluminium wire electrode 200.
Owing in aluminium nitride spray equipment work process, aluminium wire electrode is also sacrificial electrode, and depletion rate is very fast, and along with the consumption of aluminium wire electrode, aluminium wire electrode is more than arcing distance with the distance of aluminium block electrode, causes aluminium nitride spray equipment to quit work.In order to make aluminium nitride spray equipment continuous firing, described aluminium wire electrode will be continuously to the direction feeding of aluminium block electrode.In the present embodiment, described aluminium wire electrode 200 realizes continuing feeding by the feed mechanism being arranged on housing, wherein, the feeding passage of aluminium wire electrode it is provided with on described housing 100, in described aluminium wire electrode 200 enters into reative cell 110 by feeding passage and control feed speed by feed mechanism, it is achieved continuous discharge reaction produces aluminium nitride.
Preferably, described feed mechanism is the roll shaft 400 being arranged on feeding channel side, described roll shaft 400 is set to two and is correspondingly arranged at feeding passage both sides, and described roll shaft 400 clamps aluminium wire electrode 200 and advances aluminium wire electrode to move to aluminium block electrode direction by own rotation.
When described feed mechanism makes aluminium nitride spray equipment work, aluminium wire electrode 200 and aluminium block electrode 300 are in arcing distance all the time, make device can persistently produce aluminium nitride.Wherein, described arcing distance is 0.1 mm-5mm.
Described reative cell 110 connects feeder by nitrogen inlet 130, and during the work of aluminium nitride spray equipment, described feeder continues nitrogen injection to reative cell, and in making described reative cell, nitrogen pressure is maintained at 0.2-1MPa.
Preferably, described external power source is DC source, and its power is 5-20KW.The DC source of described power ensures that aluminium nitride spray equipment produces aluminium nitride film expeditiously further.
The present invention also provides for the spraying method of a kind of aluminium nitride spray equipment as above, described method is: after being passed through nitrogen by nitrogen inlet 130 in reative cell 110, described aluminium wire electrode 200 remains arcing distance with aluminium block electrode 300 under feed mechanism control, external power source controls aluminium wire electrode and aluminium block electrode and produces aluminium nitride in reative cell 110 by electric discharge, and make the aluminium nitride of generation be ejected into corresponding surface with nitrogen by jet, form aluminium nitride film.
Described feed mechanism connects external control system, the change regulation and control feed mechanism feeding to aluminium wire electrode by monitoring aluminium wire electrode and aluminium block inter-electrode voltage or electric current of the described control system, makes aluminium wire electrode 200 and aluminium block electrode 300 be in all the time in arcing distance.Specifically, when control system monitors the voltage of feedback or electric current reaches preset value, control system can send feeding signal to feed mechanism, and feed mechanism control aluminium wire electrode, to aluminium block electrode direction feeding certain distance, makes magnitude of voltage or current value in preset range.Aluminium nitride spray equipment makes in device aluminium wire electrode and aluminium block electrode distance in arcing distance by this control method, it is ensured that aluminium nitride spray equipment continuous firing, improves production efficiency.
It should be appreciated that the application of the present invention is not limited to above-mentioned citing, for those of ordinary skills, can be improved according to the above description or convert, all these modifications and variations all should belong to the protection domain of claims of the present invention.
Claims (10)
1. an aluminium nitride spray equipment, it is characterized in that, described device includes the housing being provided with reative cell, jet and nitrogen inlet coupled reaction room it is respectively arranged with on described housing, wherein, it is provided with in described reative cell and connects external power source realization close to the aluminium wire electrode discharged and aluminium block electrode, described aluminium block electrode is arranged at jet, during the work of aluminium nitride spray equipment, nitrogen is continually fed in reative cell by nitrogen inlet, described aluminium wire electrode front end approaches aluminium block electrode and discharges under external power source effect and then produce the aluminium nitride plasma of high temperature, described aluminium nitride plasma sprays from jet, make corresponding to forming one layer of aluminium nitride film on the surface of jet.
Aluminium nitride spray equipment the most according to claim 1, it is characterized in that, described aluminium block electrode is arranged around jet, wherein, described aluminium block electrode forms bellmouth around jet, and described aluminium wire electrode has the tapered front end coincideing with aluminium block electrode bellmouth pass.
Aluminium nitride spray equipment the most according to claim 2, it is characterized in that, described housing includes housing body and is connected and arranges the connection seat of jet with housing body, described aluminium block electrode is arranged in connecting seat and makes bellmouth correspondence jet, wherein, described connection seat is connected in housing body.
Aluminium nitride spray equipment the most according to claim 1, it is characterised in that a diameter of 0.3-3mm of described aluminium wire electrode.
Aluminium nitride spray equipment the most according to claim 1, it is characterized in that, described aluminium wire electrode realizes continuing feeding by the feed mechanism being arranged on housing, wherein, the feeding passage of aluminium wire electrode it is provided with on described housing, in described aluminium wire electrode enters into reative cell by feeding passage and control feed speed by feed mechanism, it is achieved continuous discharge is reacted.
Aluminium nitride spray equipment the most according to claim 5, it is characterized in that, described feed mechanism is the roll shaft being arranged on feeding channel side, described roll shaft is set to two and is correspondingly arranged at feeding passage both sides, and described roll shaft clamping aluminium wire electrode also advances aluminium wire electrode to move to aluminium block electrode direction by own rotation.
Aluminium nitride spray equipment the most according to claim 5, it is characterised in that when described feed mechanism makes aluminium nitride spray equipment work, aluminium wire electrode and aluminium block electrode are in arcing distance all the time, and wherein, described arcing distance is 0.1 mm-5mm.
Aluminium nitride spray equipment the most according to claim 1, it is characterized in that, described reative cell connects feeder by nitrogen inlet, during the work of aluminium nitride spray equipment, described feeder continues nitrogen injection to reative cell, and in making described reative cell, nitrogen pressure is maintained at 0.2-1MPa.
Aluminium nitride spraying method the most according to claim 1, it is characterised in that described external power source is DC source, its power is 5-20KW.
10. the spraying method of an aluminium nitride spray equipment as claimed in any one of claims 1-9 wherein, it is characterized in that, described method is: after being passed through nitrogen by nitrogen inlet in reative cell, described aluminium wire electrode remains arcing distance with aluminium block electrode under feed mechanism control, external power source controls aluminium wire electrode and aluminium block electrode and produces aluminium nitride in reative cell by electric discharge, and make the aluminium nitride of generation be ejected into corresponding surface with nitrogen by jet, form aluminium nitride film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610610851.7A CN105970141A (en) | 2016-07-29 | 2016-07-29 | Aluminum nitride spraying device and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610610851.7A CN105970141A (en) | 2016-07-29 | 2016-07-29 | Aluminum nitride spraying device and method |
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| CN105970141A true CN105970141A (en) | 2016-09-28 |
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| CN201610610851.7A Pending CN105970141A (en) | 2016-07-29 | 2016-07-29 | Aluminum nitride spraying device and method |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0282310A2 (en) * | 1987-03-11 | 1988-09-14 | James A. Browning | High power extended arc plasma spray method and apparatus |
| CN1053760A (en) * | 1990-01-30 | 1991-08-14 | 气体产品与化学公司 | The electric arc spraying of reactive metal |
| CN1055308A (en) * | 1990-02-06 | 1991-10-16 | 气体产品与化学公司 | Wear-resistant titanium nitride coating and spraying method thereof |
| CN104617213A (en) * | 2014-11-07 | 2015-05-13 | 佛山科学技术学院 | Method for generating aluminum nitride thin film on aluminum plate |
-
2016
- 2016-07-29 CN CN201610610851.7A patent/CN105970141A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0282310A2 (en) * | 1987-03-11 | 1988-09-14 | James A. Browning | High power extended arc plasma spray method and apparatus |
| CN1053760A (en) * | 1990-01-30 | 1991-08-14 | 气体产品与化学公司 | The electric arc spraying of reactive metal |
| CN1055308A (en) * | 1990-02-06 | 1991-10-16 | 气体产品与化学公司 | Wear-resistant titanium nitride coating and spraying method thereof |
| CN104617213A (en) * | 2014-11-07 | 2015-05-13 | 佛山科学技术学院 | Method for generating aluminum nitride thin film on aluminum plate |
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Application publication date: 20160928 |