CN105967532B - The devices and methods therefor of processing micro structure is rotated in a kind of capillary glass tube - Google Patents
The devices and methods therefor of processing micro structure is rotated in a kind of capillary glass tube Download PDFInfo
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- CN105967532B CN105967532B CN201610395801.1A CN201610395801A CN105967532B CN 105967532 B CN105967532 B CN 105967532B CN 201610395801 A CN201610395801 A CN 201610395801A CN 105967532 B CN105967532 B CN 105967532B
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- glass tube
- capillary
- capillary glass
- syringe
- photoresist
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Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0075—Cleaning of glass
Abstract
The devices and methods therefor of processing micro structure is rotated in a kind of capillary glass tube, including femto-second laser, it is characterized by also including the fixation devices for the positioning capillary glass tube being set on micro Process workbench, it drives capillary glass tube to rotate and then carries out the rotating device of rotation processing, and for will suck photoresist in capillary glass tube and remove the cleaning device of photoresist.Present apparatus manufacturing process is simple to operation, it is at low cost, application method is simple and clear, capillary glass tube accurately can be easily set to achieve the effect that rotate photoetching, and fast and effeciently dehydrated alcohol can be filled in capillary glass tube, the remaining photoresist of photoetching in capillary glass tube is cleaned, then carries out ultraviolet lighting, and then effectively the micro-structure in capillary glass tube is formed.
Description
Technical field
The present invention relates to a kind of processing micro structure devices and methods therefors.
Background technique
Fs laser double photon micro-processing technology has machining accuracy high, and fuel factor is small, maskless, and flexibility is high, and energy
It really realizes the advantages that three-dimensional micro Process and becomes one of the micro-processing technology means most welcome at present, and obtained quickly
Develop and is widely applied.With Capillary Electrophoresis and mass spectrum, the rapid development of the joint technology such as laser-Induced Fluorescence Detection, capillary
Pipe is used widely in life science, environmental protection, the fields such as food inspection.The general inner hollow of common capillary glass tube
And inner wall smooth, thus it is limited in the use of special dimension.It needs that array of figure is arranged inside glass capillary sometimes
Case studies its optical characteristics, and with either physically or chemically carrying out coating modified improving capillary to capillary tube inner wall
Electrophoretic characteristic etc., these applications require to prepare the micro-structure with specific distribution in capillary glass tube inner wall different location.
However capillary glass tube inner wall is arc-shaped, Fs laser double photon micro-processing technology can only be in time processing
The bottommost of capillary glass tube and the arc-shaped concave of micro Process platform plane contact, which is accurately focused, carries out photoetching, not revolvably
In capillary tube inner wall any position photoetching micro-structure.And in capillary glass tube after the good micro-structure of photoetching, due to glass fiber
Capillary inside diameter all only between 0.1mm to 1mm, it is uncured by being further filled in the capillary glass tube of femtosecond laser parallel micromachining
Photoresist, cohesive force and adhesive force of the uncured photoresist in capillary glass tube are larger to be not easy to discharge it, for cleaning
The dehydrated alcohol of photoresist, which is also not easily accessible in capillary, cleans photoresist.Therefore the micro- knot of photoetching is rotated in capillary glass tube inner wall
Structure is simultaneously very big by the difficulty of cleaning photoresist sizing micro-structure, needs to invent a kind of simple and feasible, maneuverable device
And the micro-structure that method is used to rotate photoetching and be formed in capillary glass tube.
Summary of the invention
Simple, strong operability that technical problem to be solved by the invention is to provide a kind of production methods, performance are stable
For rotating the device of micro-structure and corresponding method in processing capillary glass tube.
The technical scheme of the invention to solve the technical problem is: micro- knot is processed in rotation in a kind of capillary glass tube
The device of structure, including femto-second laser, it is characterised in that: further include the positioning capillary glass tube on micro Process workbench
Device is fixed, capillary glass tube is driven to rotate and then carries out the rotating device of rotation processing, and being used for will be in capillary glass tube
It sucks photoresist and removes the cleaning device of photoresist.
Preferably, the fixed device includes the glass slide being fixed on micro Process workbench, and is located at glass slide one end
For positioning first coverslip of one end of capillary glass tube, and positioned at the glass slide other end for positioning the another of capillary glass tube
Second coverslip of one end.
Preferably, first coverslip includes six, wherein four are lined up two rows of one end for being attached to glass slide, and two
There are spacing to form strip slit between row, and in addition the first coverslip of two panels, which is covered on above strip slit, makes the
The slit of accommodating positioning capillary glass tube is formed between one coverslip and glass slide；
Second coverslip be it is a piece of, half is attached on the other end of glass slide, the other half other end in glass slide
Outside is hanging.
Preferably, the rotating device includes the syringe needle being connected with one end of capillary glass tube.
Preferably, which is connected by plastic capillary with one end of capillary glass tube, and syringe needle
It is close that junction, plastic capillary between head and plastic capillary and the junction between capillary glass tube pass through sealant
Envelope.
For the ease of rotational positioning, circumferentially uniformly portrayed quarter on one end outer wall of the hollow cylinder of syringe needle along it
Degree.
Preferably, the cleaning device includes the syringe that can be connect and dismantle with syringe needle.
The processing method of the device of processing micro structure is rotated in above-mentioned capillary glass tube, including, 1) by rotating device and glass
The connection of glass capillary；
2) fixed device is installed on micro Process workbench；
3) cleaning device is connect with rotating device and capillary glass tube, and photoresist is sucked in capillary glass tube,
Then disassembly, cleaning device places the capillary glass tube for sucking photoresist on the securing means；
4) femto-second laser and micro Process workbench are opened, carries out photoetching, and rotate rotating device, drives glass capillary
After pipe rotates in same direction, then the photoetching of other positions is carried out, and then realizes rotation photoetching；
5) the good capillary glass tube of photoetching is removed together with rotating device, extracts dehydrated alcohol with cleaning device, and will
The cleaning device for being injected with dehydrated alcohol is connect with rotating device, will be cleaned in dehydrated alcohol implantation glass capillary, then
The dehydrated alcohol after cleaning is all sucked out with cleaning device；
6) capillary glass tube after cleaning irradiation in the UV lamp is placed to be formed；
Wherein step 1), 2) can be interchanged.
Preferably, above-mentioned steps 3) in one end of capillary glass tube be located in slit, other end top to the second coverslip.
Preferably, above-mentioned steps 5) in, dehydrated alcohol first is extracted with syringe, then connects syringe and syringe needle
Connect, by dehydrated alcohol all implantation glass capillary so that dehydrated alcohol with uncured photoresist from capillary glass tube not
One end outflow connecting with syringe needle, then separates syringe and syringe needle, the core bar of syringe is drawn to
At maximum range, then syringe connect with syringe needle, core bar is pushed again, by the photoresist and nothing in capillary glass tube
Water-ethanol is completely exhausted out.
Compared with the prior art, the advantages of the present invention are as follows the production letters of the devices and methods therefor of the rotation processing micro structure
It is single, it is easy to operate, it is at low cost, solve can only the concave surface that capillary glass tube is contacted with glass slide lowermost end photoetching and cannot
The technical problem of photoetching on tube wall any position, can be accurately in capillary glass tube by convenient accurate rotation
Rotatably make multiple micro-structures or parallel multiple rows of micro structure array on wall any position by lithography, and the device can be by photoetching
Remaining photoresist in capillary glass tube is cleaned in glue sucking capillary glass tube and fast and effeciently, is solved due to glass capillary
Photoresist cannot will be remained by, which managing caused by the adsorption capacity of itself capillary phenomenon, cleans up technology hardly possible with carved micro-structure of being formed
Topic.
Detailed description of the invention
Fig. 1 is the schematic device that processing micro structure is rotated in the capillary glass tube of the embodiment of the present invention.
Fig. 2 is the stereoscopic schematic diagram that the device of processing micro structure is rotated in the capillary glass tube of the embodiment of the present invention.
Fig. 3 is the schematic diagram of the syringe needle of the embodiment of the present invention.
Specific embodiment
The present invention will be described in further detail below with reference to the embodiments of the drawings.
The device of processing micro structure is rotated in a kind of capillary glass tube of the embodiment of the present invention, including is set to micro Process work
Make the fixation device for being used to fix capillary glass tube 1 on platform, and carry out the femto-second laser of photoetching, and further includes driving
Capillary glass tube rotates and then carries out the rotating device of rotation processing micro structure, and for will suck light in capillary glass tube 1
The cleaning device of photoresist and removal photoresist.
Rotating device therein includes the syringe needle 2 being connected with capillary glass tube 1, above-mentioned cleaning device, packet
The syringe 3 for sucking and cleaning photoresist is included, syringe 3 includes injector syringe 31 and core bar 32.The glass capillary
The first end 11 of pipe 1 is connect by a bit of plastic capillary 8 with syringe needle 2 and is sealed with sealant and fixed, and sucking is worked as
When with cleaning photoresist, as shown in Figure 1, capillary glass tube 1 is connected by syringe needle 2 with syringe 3.By the glass fiber
When the connection of tubule 1 and syringe needle 2, the syringe needle 2 of new asepsis injector is first inserted into the plastics capillary of 6mm long
About 3mm in one end of pipe 8；The first end 11 of capillary glass tube 1 is inserted into the other end of plastic capillary 8 of above-mentioned 6mm long
About 3mm dips sealant with thin stick, is uniformly applied to junction and the capillary glass tube of syringe needle 2 and plastic capillary 8
1 with the junction of plastic capillary 8, surround two junctions sufficiently by sealant and reach sealing state, then will be coated with close
A period of time is vacantly placed in the syringe needle 2 of sealing and the junction of 1 one end of capillary glass tube, and sealant is made to reach sufficiently solidifying
Gu.Then as shown in figure 3, one end 21 of the plastic hollow cylinder in syringe needle 2, the edge in the cylindrical outer wall of the end port
It circumferentially equably depicts 12 scales.
As shown in Fig. 2, above-mentioned fixation device, including for capillary glass tube 1 to be fixed on micro Process workbench
Glass slide 4, and be pasted on glass slide 4 for position capillary glass tube 1 can accurate convenient rotation the first lid glass
Piece 5 and the second coverslip 6.First coverslip 5 and the second coverslip 6 are provided separately.When carrying out lithography process, such as Fig. 2,
The capillary glass tube 1 being connected with syringe needle 2 is stuck in glass slide 4 and the first coverslip 5, the second coverslip 6 formed it is narrow
In slot 7.First coverslip 5 is used for one end in the fixed capillary glass tube 1 in one end of glass slide 4, and the second coverslip 6 is for carrying
The other end of the fixed capillary glass tube 1 of the other end of slide 4.The capillary glass tube 1 can be commercially available biological point sample capillary, interior
Diameter is 0.3mm, length 10cm.The internal diameter and length parameter of capillary glass tube can also be selected according to practical use and needs.
The plastic capillary 8 can be commercially available use for laboratory PC material transparent capillary, internal diameter 0.5mm, length 15cm.It can also be with
According to syringe needle and the corresponding outer diameter of capillary glass tube, the internal diameter and length parameter of plastic capillary are selected.The aseptic injection
Device 3 can be commercially available disposable medical asepsis injector, and capacity 2ml, syringe needle is No. five syringe needles, and syringe needle outer diameter is 0.5mm.?
The model of syringe needle can be selected according to the corresponding internal diameter of corresponding plastic capillary.The syringe being connected with capillary glass tube 1
Syringe needle 2 can be used not only for sucking photoresist and clean photoresist, and is able to drive capillary glass tube 1 and rotates and then carry out
The processing of different location.
First coverslip 5 includes six, respectively 51,52,53,54,55,56, and the second coverslip 6 is a piece of, difference
Smear micro ultraviolet glue on seven coverslips, and be affixed on glass slide 4, as shown in Figure 2 wherein four first lid
Slide 51,52,53,54 lines up two rows of one end for being attached to glass slide 4, and there are the strips of about 300um one wide between two rows
Shape slit, and in the overcentre of this four coverslips posted, i.e. the top of strip slit covers two panels the first lid glass again
Piece 55,56, forming the arranged distribution of Fig. 2 such as makes to be formed one between the first coverslip and glass slide for positioning capillary glass tube
1 slit 7, the size of the slit 7 is only inserted into for capillary glass tube and capillary glass tube 1 will not be moved arbitrarily in slit 7.
The second coverslip 6 is pasted in the other end of glass slide 4 again, is attached to its half on glass slide 4, half is in glass slide 4
Outer hanging, taking to irradiate 15 minutes under ultraviolet light is fully cured ultraviolet glue, completes the fixation device for placing the capillary glass tube 1
Production.The fixation device is fixed on micro Process workbench.First, second coverslip can be used for laboratory microscope
Coverslip, specification are 20 × 20mm thickness 300um, can also be selected according to the outer diameter of capillary glass tube 1 and the size of glass slide 4
The size and thickness of coverslip, the size of slit should be with the outer diameter size phase of capillary glass tube between pasted coverslip on glass slide
Match.
When in use, the capillary glass tube 1 being connected with syringe needle 2 and syringe 3 is cleaned up, by its
Two ends 12 are immersed in the ampoule equipped with photoresist, and slowly twitching syringe core rod 32 makes photoresist slowly be inhaled into glass capillary
In pipe 1, capillary glass tube 1 taken from the bottle of photoresist when about 2/3rds are charged photoresist in capillary glass tube 1
Out, and syringe 3 and syringe needle 2 it separates, is wiped on 1 outer wall of capillary glass tube with the lens wiping paper for being moistened with dehydrated alcohol
Photoresist.Then the capillary glass tube 1 being connected with syringe needle 2 is inserted perpendicularly into the glass slide 4 made and the first lid glass
Piece 5 is formed by strip slit 7, and the second end 12 until capillary glass tube 1 is pushed up until the second coverslip 6.
Femto-second laser and micro Process workbench are opened, the glass capillary between glass slide 4 and the first coverslip 5 will be stuck in
Pipe 1 is fastened transversely in the three-dimensional mobile platform of micro Process workbench, and carrying out focusing makes the focus of femto-second laser fall in glass
The intersection of bottom wall and photoresist that capillary 1 is contacted with glass slide 4；Utilize the movement of control software control micro Process workbench
And at the same time carrying out the photoetching of micro-structure with femto-second laser.After current micro-structure photoetching, with hand according to syringe needle
One lattice of a lattice that graduate on 2 one end 21 rotate the syringe needle 2 being connected with capillary glass tube 1 slightly, drive glass
Capillary 1 rotates by a certain angle in the slit 7 of coverslip: and then focusing carries out photoetching again.Can repeatedly it turn in the same direction
Dynamic syringe needle 2, focusing carries out photoetching again after rotation every time, thus can be in the same transversal of capillary glass tube 1
Face is circumferentially to make multiple micro-structures or parallel multiple rows of micro structure array on the inner wall originated by lithography.
Finally, by being formed by the good micro-structure of femto-second laser two-photon micro-processing technology photoetching.By the good glass of photoetching
Glass capillary 1 is slowly taken off from femto-second laser micro Process platform together with glass slide 4；Take out that photoetching is good and syringe needle
2 connected capillary glass tubies 1.A small beaker is taken, appropriate GR grades of dehydrated alcohol is added, extracts dehydrated alcohol about extremely with syringe 3
At the 0.3ml of syringe 31, the syringe 3 filled with dehydrated alcohol is connected with syringe needle 2, slowly injects emitter with hand
Core bar 32 enters the dehydrated alcohol in syringe 31 in capillary glass tube 1 by syringe needle 2 up to the bottom of syringe 31, and with
Uncured photoresist is flowed out from 12 end of capillary glass tube in capillary glass tube 1.Then syringe 3 and syringe needle 2 are separated, note
The core bar 32 of emitter is drawn at the maximum range of syringe 31, and syringe 3 and syringe needle 2 are connected again, is slowly injected with hand
The core bar 32 of emitter keeps remaining uncured photoresist and dehydrated alcohol in capillary glass tube complete up to the bottom of syringe 31
Full discharge takes capillary glass tube 4 and irradiates 15 minutes under ultraviolet light to complete sizing.
The ultraviolet glue is i.e. ultraviolet curing UV glue, light-sensitive emulsion, shadowless glue.It is absorbed under ultraviolet irradiation ultraviolet
Solid-state is converted by liquid within the several seconds after light.
The femto-second laser of the relevant companies market in the optional U.S. of the femto-second laser, model Mari-f900, out
Ejected wave length is set as 780nm.The commercially available femto-second laser of other models can also be used, 780nm wavelength can be emitted by only requiring
Infrared laser simultaneously can mode locking.
The photoresist is commercially available negative photoresist, has there is resolution ratio higher, dissolves in ethyl alcohol etc. when having unexposed
The characteristics of after organic reagent, exposure insoluble in organic reagents such as ethyl alcohol.
The foregoing is merely the particular embodiment of the present invention, can also use other specifications that can be well connected and fix
The coverslip that the capillary glass tube of size, plastic capillary and syringe and thickness and capillary glass tube outer diameter match.
The device and method that processing micro structure is rotated in the capillary glass tube, utilizes Fs laser double photon micro Process skill
Art, process velocity is fast, and precision is high, and strong flexibility can prepare various micro-structures in capillary glass tube, and it is double to solve femtosecond laser
Photon micro-processing technology prepares the rotation photoetching encountered in micro-structure and photoresist sizing problem in capillary glass tube.The present apparatus
Manufacturing process is simple to operation, at low cost, and method is simple and clear, so that capillary glass tube is reached rotation photoetching
Effect, and fast and effeciently dehydrated alcohol can be filled in capillary glass tube, clean photoetching residual in capillary glass tube
Photoresist, then carry out ultraviolet lighting, and then effectively the micro-structure in capillary glass tube is formed.
Claims (6)
1. rotating the device of processing micro structure, including femto-second laser in a kind of capillary glass tube, it is characterised in that: further include setting
In the fixation device of the positioning capillary glass tube (1) on micro Process workbench, drives capillary glass tube (1) to rotate and then revolved
Turn the rotating device of processing, and for photoresist will be sucked in capillary glass tube (1) and remove the cleaning device of photoresist；
The fixed device includes the glass slide (4) being fixed on micro Process workbench, and is located at glass slide (4) one end for fixed
First coverslip (5) of one end of position capillary glass tube (1), and it is located at glass slide (4) other end for positioning capillary glass tube
(1) the second coverslip (6) of the other end；
The rotating device includes the syringe needle (2) being connected with one end of capillary glass tube (1)；
The cleaning device includes the syringe (3) that can be connect and dismantle with syringe needle (2)；
First coverslip (5) includes six, wherein four are lined up one end that two rows are attached to glass slide (4), and two rows
Between there are spacing to form strip slit, in addition the first coverslip (5) of two panels, which is covered on above strip slit, makes the
The slit (7) of accommodating positioning capillary glass tube (1) is formed between one coverslip (5) and glass slide (4)；
Second coverslip (6) be it is a piece of, half is attached on the other end of glass slide (5), the other half is another glass slide (5)
It is hanging on the outside of one end.
2. rotating the device of processing micro structure in capillary glass tube as described in claim 1, it is characterised in that: the syringe needle
Head (2) is connected by plastic capillary (8) with one end of capillary glass tube (1), and syringe needle (2) and plastic capillary
(8) junction between junction, plastic capillary (8) between and capillary glass tube (1) is sealed by sealant.
3. rotating the device of processing micro structure in capillary glass tube as claimed in claim 2, it is characterised in that: syringe needle
(2) scale has circumferentially uniformly been portrayed along it on one end (21) outer wall of hollow cylinder.
4. the processing method of the device of processing micro structure is rotated in capillary glass tube as claimed in any one of claims 1-3,
Including 1) rotating device is connect with capillary glass tube；
2) fixed device is installed on micro Process workbench；
3) cleaning device is connect with rotating device and capillary glass tube, and photoresist is sucked in capillary glass tube, then
Disassembly, cleaning device places the capillary glass tube for sucking photoresist on the securing means；
4) femto-second laser and micro Process workbench are opened, carries out photoetching, and rotate rotating device, drives capillary glass tube same
To after rotation, then the photoetching of other positions is carried out, and then realizes rotation photoetching；
5) the good capillary glass tube of photoetching is removed together with rotating device, extracts dehydrated alcohol with cleaning device, and will injection
There is the cleaning device of dehydrated alcohol to connect with rotating device, will be cleaned in dehydrated alcohol implantation glass capillary, then with clearly
Dehydrated alcohol after cleaning is all sucked out cleaning device；
6) capillary glass tube after cleaning irradiation in the UV lamp is placed to be formed；
Wherein step 1), 2) can be interchanged.
5. processing method as claimed in claim 4, it is characterised in that: above-mentioned steps 3) in capillary glass tube one end be located at it is narrow
In slot (7), other end top to the second coverslip (6).
6. processing method as claimed in claim 4, it is characterised in that: above-mentioned steps 5) in, it is first extracted with syringe (3) anhydrous
Then syringe is connect by ethyl alcohol with syringe needle, by dehydrated alcohol all implantation glass capillary (1), so that anhydrous second
Alcohol is flowed out with uncured photoresist from one end that capillary glass tube (1) is not connect with syringe needle, then syringe
(3) it is separated with syringe needle (2), the core bar (32) of syringe is drawn at maximum range, then by syringe (3) and injected
Device syringe needle (2) connection, pushes core bar again, the photoresist in capillary glass tube (1) is completely exhausted out with dehydrated alcohol.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610395801.1A CN105967532B (en) | 2016-06-06 | 2016-06-06 | The devices and methods therefor of processing micro structure is rotated in a kind of capillary glass tube |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610395801.1A CN105967532B (en) | 2016-06-06 | 2016-06-06 | The devices and methods therefor of processing micro structure is rotated in a kind of capillary glass tube |
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| Publication Number | Publication Date |
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| CN105967532A CN105967532A (en) | 2016-09-28 |
| CN105967532B true CN105967532B (en) | 2018-12-18 |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108319113B (en) * | 2018-01-31 | 2021-01-08 | 宁波大学 | Deformation correction method for processing microstructure in glass capillary |
| CN108838546B (en) * | 2018-07-24 | 2021-01-15 | 长春理工大学 | Laser processing method for inner surface microstructure of thin-wall microtube |
| CN109336049B (en) * | 2018-10-11 | 2023-10-24 | 宁波大学 | Microstructure operation method and operation device |
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| GB1567281A (en) * | 1976-08-06 | 1980-05-14 | Perkin Elmer Corp | Gaseous discharge lamp |
| EP1990638A1 (en) * | 2007-05-11 | 2008-11-12 | Koninklijke Philips Electronics N.V. | Flow-through biosensor |
| US8449746B2 (en) * | 2010-07-16 | 2013-05-28 | Waters Technologies Corporation | Systems and methods for coupling molecule separation devices to analytical instruments |
| CN104609741A (en) * | 2015-02-15 | 2015-05-13 | 宁波大学 | Method for preparing microstructure in glass capillary tube |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6782746B1 (en) * | 2000-10-24 | 2004-08-31 | Sandia National Laboratories | Mobile monolithic polymer elements for flow control in microfluidic devices |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1567281A (en) * | 1976-08-06 | 1980-05-14 | Perkin Elmer Corp | Gaseous discharge lamp |
| EP1990638A1 (en) * | 2007-05-11 | 2008-11-12 | Koninklijke Philips Electronics N.V. | Flow-through biosensor |
| US8449746B2 (en) * | 2010-07-16 | 2013-05-28 | Waters Technologies Corporation | Systems and methods for coupling molecule separation devices to analytical instruments |
| CN104609741A (en) * | 2015-02-15 | 2015-05-13 | 宁波大学 | Method for preparing microstructure in glass capillary tube |
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