CN105948523A - Glass sputtering mechanism - Google Patents
Glass sputtering mechanism Download PDFInfo
- Publication number
- CN105948523A CN105948523A CN201610266416.7A CN201610266416A CN105948523A CN 105948523 A CN105948523 A CN 105948523A CN 201610266416 A CN201610266416 A CN 201610266416A CN 105948523 A CN105948523 A CN 105948523A
- Authority
- CN
- China
- Prior art keywords
- slide plate
- glass
- sputters
- baffle plate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a glass sputtering mechanism, wherein the glass sputtering mechanism comprises a housing; the upper end of the interior of the housing is fixedly provided with a target material mechanism; a baffle plate is arranged below the target material mechanism; the periphery of the baffle plate is connected with the inner wall of the housing; the baffle plate is provided with a throughout groove; the throughout groove is located just below the target material mechanism; the surface, close to the target material mechanism, of the baffle plate is movably provided with a first slide plate and a second slide plate; through sliding the first slide plate and the second slide plate, the throughout groove can be shielded. The problem that debugging of the target material mechanism is not facilitated because a baffle plate is not arranged between a transportation mechanism and a target material mechanism in a traditional sputtering device is solved.
Description
Technical field
The present invention relates to glass coating equipment, in particular it relates to glass sputters mechanism.
Background technology
Sputtering equipment be designed for being coated with on flat board building glass low-radiation film, Low emissivity solar film with
And solar control film, glass plate is sent to coating chamber by horizontal feed system and processes, coating chamber top
It is provided with target mechanism, is not provided with between its transport establishment of traditional sputtering equipment and target mechanism
Baffle plate, target mechanism needs the sputtering carrying out trying sputtering to regulate sputtering parameter, during examination sputtering before use
Beating in transport establishment between particle meeting, the collection not only bad for particle recycles, transport establishment simultaneously
Can be corroded after long-term sputtering, be affected its service life.
Summary of the invention
It is an object of the invention to provide a kind of glass and sputter mechanism, solve its transport of traditional sputtering equipment
It is not provided with baffle plate between mechanism and target mechanism, is unfavorable for the problem that target mechanism debugs.
To achieve these goals, the invention provides a kind of glass and sputter mechanism, wherein, described glass
Sputtering mechanism includes that housing, the upper end of described enclosure interior are fixed with target mechanism, under described target mechanism
Side is provided with baffle plate, and the periphery of described baffle plate is connected with described inner walls, and described baffle plate is provided with and runs through
Groove, described in run through groove and be positioned at the underface of described target mechanism, near described target mechanism in described baffle plate
Surface on be provided with the first slide plate and the second slide plate movably, by described first slide plate and described of sliding
The described groove that runs through can be covered by the second slide plate.
Preferably, the inwall that described housing is relative is fixed with the first cylinder and the second cylinder, described first
Cylinder one end is fixed in described inner walls, and the other end connects described first slide plate, described second cylinder
One end is fixed in described inner walls, and the other end connects described second slide plate so that described first slide plate
The described groove that runs through can be covered with during described second slide plate relative motion.
Preferably, in described baffle plate, the surface near described target mechanism is provided with slideway, and described first is sliding
Plate and described second slide plate are slidingly disposed on described slideway.
Preferably, below described baffle plate, the most sequentially it is provided with multiple roller, multiple rollers are placed
There is glass substrate so that described glass substrate can slide along described first direction on described roller.
Preferably, described roller being socketed with multiple rubber sleeve, multiple described rubber sleeves are along described roller
Axial direction is equally spaced.
Preferably, quantity 4-8 of described rubber sleeve.
Preferably, described first slide plate and/or the second slide plate overlap flexible collection set.
According to technique scheme, the invention provides a kind of glass and sputter mechanism, wherein, described glass
Sputtering mechanism includes that housing, the upper end of described enclosure interior are fixed with target mechanism, under described target mechanism
Side is provided with baffle plate, and the periphery of described baffle plate is connected with described inner walls, and described baffle plate is provided with and runs through
Groove, described in run through groove and be positioned at the underface of described target mechanism, near described target mechanism in described baffle plate
Surface on be provided with the first slide plate and the second slide plate movably, by described first slide plate and described of sliding
The described groove that runs through can be covered by the second slide plate.The first slide plate and the can be utilized during the examination sputtering of target mechanism
Two slide plates will pass through groove and cover, and sputtering particle can be attached to the first slide plate and the second sled surface, is also beneficial to
The recovery of particle, can utilize the first slide plate and the second slide plate to control to run through the size of groove simultaneously, thus
Regulation sputtering particle attachment size on a glass substrate so that what particle was more concentrated is attached to glass base
Sheet surface, improves coating quality.
Other features and advantages of the present invention will be described in detail in detailed description of the invention part subsequently.
Accompanying drawing explanation
Accompanying drawing is used to provide a further understanding of the present invention, and constitutes the part of description, with
Detailed description below is used for explaining the present invention together, but is not intended that limitation of the present invention.?
In accompanying drawing:
Fig. 1 is the structural representation that the glass that the present invention provides sputters mechanism；
Fig. 2 is the structural representation that the glass that the present invention provides sputters the baffle plate of mechanism.
Description of reference numerals
1-housing 2-baffle plate
51-the first slide plate 52-the second slide plate
6-roller 7-glass substrate
8-target mechanism
Detailed description of the invention
Below in conjunction with accompanying drawing, the detailed description of the invention of the present invention is described in detail.It should be appreciated that
Detailed description of the invention described herein is merely to illustrate and explains the present invention, is not limited to this
Bright.
As depicted in figs. 1 and 2: the invention provides a kind of glass and sputter mechanism, wherein, described glass
Sputtering mechanism includes that housing 1, the upper end within described housing 1 are fixed with target mechanism 8, described target
Being provided with baffle plate 2 below mechanism 8, the periphery of described baffle plate 2 is connected with described housing 1 inwall, described
Baffle plate 2 is provided with and runs through groove, described in run through groove and be positioned at the underface of described target mechanism 8, described baffle plate
On the surface of described target mechanism 8, the first slide plate 51 and the second slide plate 52 it is provided with movably in 2,
The described groove that runs through can be covered by described first slide plate 51 of slip and described second slide plate 52.Target
The first slide plate 51 and the second slide plate 52 can be utilized to will pass through groove and cover during mechanism 8 examination sputtering, sputter grain
Son can be attached to the first slide plate 51 and the second slide plate 52 surface, and the most beneficially the recovery of particle, the most permissible
Utilize the first slide plate 51 and the second slide plate 52 to control to run through the size of groove, thus it is attached to regulate sputtering particle
Size on a glass substrate so that what particle was more concentrated is attached to glass substrate surface, improve plating
Film quality.
The present invention one preferred embodiment in, in order to more convenient to the first slide plate 51 He
Second slide plate 52 is controlled, and the inwall that described housing 1 is relative is fixed with the first cylinder and the second gas
Cylinder, described first cylinder one end is fixed on described housing 1 inwall, and the other end connects described first slide plate
51, described second cylinder one end is fixed on described housing 1 inwall, and the other end connects described second slide plate
52 so that when described first slide plate 51 and described second slide plate 52 relative motion, groove can be run through by described
Cover.
The present invention one preferred embodiment in, in order to reduce by the first slide plate 51 and the second slide plate
52 frictional force when sliding on baffle plate 2 surface, reduce the abrasion on baffle plate 2 surface, lean in described baffle plate 2
The surface of nearly described target mechanism 8 is provided with slideway, described first slide plate 51 and described second slide plate 52
It is slidingly disposed on described slideway.
The present invention one preferred embodiment in, the most sequentially set below described baffle plate 2
There is multiple roller 6, multiple rollers 6 are placed with glass substrate 7 so that described glass substrate 7 is permissible
Described roller 6 slides along described first direction.
In a kind of embodiment being more highly preferred to of the present invention, so that glass substrate 7 and roller 6
The softest contact, produces cut, described roller 6 when preventing glass substrate 7 from sliding on roller 6
On be socketed with multiple rubber sleeve, multiple described rubber sleeves are equally spaced along the axial direction of described roller 6,
Preferably, quantity 4-8 of described rubber sleeve.
The present invention one preferred embodiment in, in order to more convenient to the first slide plate 51 He
The particle on the second slide plate 52 surface reclaims, and described first slide plate 51 and/or the second slide plate 52 overlap
Flexible set of collecting, only need to collect set by elasticity during collection particle and take off.
The preferred embodiment of the present invention is described in detail above in association with accompanying drawing, but, the present invention does not limit
Detail in above-mentioned embodiment, in the technology concept of the present invention, can be to the present invention
Technical scheme carry out multiple simple variant, these simple variant belong to protection scope of the present invention.
It is further to note that each the concrete technology described in above-mentioned detailed description of the invention is special
Levy, in the case of reconcilable, can be combined by any suitable means, in order to avoid need not
The repetition wanted, various possible compound modes are illustrated by the present invention the most separately.
Additionally, combination in any can also be carried out between the various different embodiment of the present invention, as long as its
Without prejudice to the thought of the present invention, it should be considered as content disclosed in this invention equally.
Claims (7)
1. a glass sputters mechanism, it is characterised in that described glass sputters mechanism and includes housing (1),
The upper end of described housing (1) inside is fixed with target mechanism (8), and described target mechanism (8) lower section sets
Baffle plate (2), the periphery of described baffle plate (2) is had to be connected with described housing (1) inwall, described baffle plate
(2) be provided with and run through groove, described in run through groove and be positioned at the underface of described target mechanism (8), described gear
In plate (2) near described target mechanism (8) surface on be provided with movably the first slide plate (51) and
Second slide plate (52), permissible by described first slide plate (51) of slip and described second slide plate (52)
The described groove that runs through is covered.
Glass the most according to claim 1 sputters mechanism, it is characterised in that described housing (1)
Being fixed with the first cylinder and the second cylinder on relative inwall, described first cylinder one end is fixed on described shell
On body (1) inwall, the other end connects described first slide plate (51), and described second cylinder one end is fixed on
On described housing (1) inwall, the other end connects described second slide plate (52) so that described first slide plate
(51) and the described groove that runs through can be covered during described second slide plate (52) relative motion.
Glass the most according to claim 2 sputters mechanism, it is characterised in that described baffle plate (2)
In be provided with slideway near the surface of described target mechanism (8), described first slide plate (51) and described
Second slide plate (52) is slidingly disposed on described slideway.
Glass the most according to claim 1 sputters mechanism, it is characterised in that described baffle plate (2)
Lower section is the most sequentially provided with multiple roller (6), and multiple rollers are placed with glass substrate on (6)
(7) so that described glass substrate (7) can slide along described first direction on described roller (6).
Glass the most according to claim 4 sputters mechanism, it is characterised in that described roller (6)
On be socketed with multiple rubber sleeve, multiple described rubber sleeves equidistantly divide along the axial direction of described roller (6)
Cloth.
Glass the most according to claim 5 sputters mechanism, it is characterised in that described rubber sleeve
Quantity 4-8.
Glass the most according to claim 1 sputters mechanism, it is characterised in that described first slide plate
(51) and/or overlap flexible collection on the second slide plate (52) to overlap.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610266416.7A CN105948523A (en) | 2016-04-27 | 2016-04-27 | Glass sputtering mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610266416.7A CN105948523A (en) | 2016-04-27 | 2016-04-27 | Glass sputtering mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105948523A true CN105948523A (en) | 2016-09-21 |
Family
ID=56915298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610266416.7A Pending CN105948523A (en) | 2016-04-27 | 2016-04-27 | Glass sputtering mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105948523A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111455343A (en) * | 2019-01-18 | 2020-07-28 | 北京铂阳顶荣光伏科技有限公司 | Film coating machine and film coating control method |
| CN112144025A (en) * | 2019-06-26 | 2020-12-29 | 东泰高科装备科技有限公司 | Shielding device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11350126A (en) * | 1998-06-05 | 1999-12-21 | Hitachi Ltd | Sputtering apparatus |
| CN201809434U (en) * | 2010-09-29 | 2011-04-27 | 吴江南玻华东工程玻璃有限公司 | NiCr cathode sputtering baffle plate |
| CN202401123U (en) * | 2011-12-15 | 2012-08-29 | 佛山市中南罗森玻璃有限公司 | Target sputtering chamber provided with baffles |
| CN104944793A (en) * | 2015-06-30 | 2015-09-30 | 中山市格兰特实业有限公司 | Magnetron sputtering glass coating device with adjustable sputtering range |
-
2016
- 2016-04-27 CN CN201610266416.7A patent/CN105948523A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11350126A (en) * | 1998-06-05 | 1999-12-21 | Hitachi Ltd | Sputtering apparatus |
| CN201809434U (en) * | 2010-09-29 | 2011-04-27 | 吴江南玻华东工程玻璃有限公司 | NiCr cathode sputtering baffle plate |
| CN202401123U (en) * | 2011-12-15 | 2012-08-29 | 佛山市中南罗森玻璃有限公司 | Target sputtering chamber provided with baffles |
| CN104944793A (en) * | 2015-06-30 | 2015-09-30 | 中山市格兰特实业有限公司 | Magnetron sputtering glass coating device with adjustable sputtering range |
Non-Patent Citations (1)
| Title |
|---|
| 吕在国: "《浮法玻璃冷端生产操作》", 31 March 2015, 武汉理工大学出版社 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111455343A (en) * | 2019-01-18 | 2020-07-28 | 北京铂阳顶荣光伏科技有限公司 | Film coating machine and film coating control method |
| CN112144025A (en) * | 2019-06-26 | 2020-12-29 | 东泰高科装备科技有限公司 | Shielding device |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160921 |
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| WD01 | Invention patent application deemed withdrawn after publication |