CN105947970A - Ordered large-area single-layer microspheres/nanospheres assisted by template and preparation method thereof - Google Patents
Ordered large-area single-layer microspheres/nanospheres assisted by template and preparation method thereof Download PDFInfo
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- CN105947970A CN105947970A CN201610327497.7A CN201610327497A CN105947970A CN 105947970 A CN105947970 A CN 105947970A CN 201610327497 A CN201610327497 A CN 201610327497A CN 105947970 A CN105947970 A CN 105947970A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00103—Structures having a predefined profile, e.g. sloped or rounded grooves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
Abstract
The invention discloses ordered large-area single-layer microspheres/nanospheres assisted by a template and a preparation method thereof, and belongs to the technical field of preparation of a semiconductor material. According to the method, a structure with a certain size is produced on a substrate, and an obtained product is used as the template; and single-layer microspheres are deposited on the template, and after liquid is evaporated, an ordered large-area single-layer microsphere/nanosphere structure assisted by the template is obtained. The ordered large-area single-layer microspheres/nanospheres obtained by the invention have few defects, are high in orientation orderness, and nearly have no multi-layer phenomenon; and when the microspheres/nanospheres are visually observed from a scanning electron microscope photograph, excellent orderness of the ordered large-area single-layer microspheres/nanospheres can be seen.
Description
Technical field
The invention belongs to technical field of semiconductor material preparation, be specifically related to a kind of utilize that template assists orderly
Large area monolayer micro-/ nano ball and preparation method thereof.
Background technology
Nanostructured refers to the size one-dimensional, two-dimentional, three-dimensional manometer object between molecule and micro-meter scale
The structure constituted.The nanostructured of long-range order, owing to having good spectral response in optical band, therefore exists
The numerous areas such as optic communication device, photo-sensing device, surface Raman enhancement technology have important using value.
The preparation method of long-range order nanostructured mainly have conventional semiconductors process technology (electron-beam direct writing,
Focused-ion-beam lithography etc.), nano impression, self-assembly for nanosphere etc..Wherein prepared by self-assembly for nanosphere method
Two-dimension single layer long-range order nanosphere structure has that process is short and sweet, equipment price is low, space enrironment requirement
The most high many advantages.
Self-assembly for nanosphere method mainly by various supplementary meanss by diameter tens of to hundreds of nanometers (also
Can be to more than a few micrometers) flock together as required, to form two dimension solid matter or three-dimensional stacked orderly
Nanostructured.Two dimension micro/nano structure has a lot of application in photoelectron device, utilizes self assembly legal system
Standby monolayer ordered nano spherical structure has important using value.Although the method has a plurality of advantages, but its
The monolayer nanosphere structure prepared always is inevitably present and moves towards changeable, multilamellar frequency is existing, lattice lacks
The problem such as falling into, severely impacted its long-range order, thus derivative spectomstry response is unstable, batch repeats
Property the problem such as difference, and then limit its performance in actual applications.So, prepare by simple method
Large range of, order good, reproducible two-dimension single layer nanosphere structure has great importance.
Summary of the invention
In order to overcome the shortcoming of prior art with not enough, it is an object of the invention to provide one and utilize template auxiliary
The preparation method of the orderly large area monolayer micro-/ nano ball helped.This preparation method utilizes template to arrange micro-/ nano
Ball, prepares defect less, the monolayer micro-/ nano spherical structure that order is high.
Another object of the present invention is to provide by utilizing of preparing of said method that template assists is orderly
Large area monolayer micro-/ nano spherical structure.
The purpose of the present invention is achieved through the following technical solutions:
In below scheme description as a example by PS (polystyrene) micro-/ nano ball, but being not limited only to this, it is permissible
Be by physics, chemical method prepare by various single or compound substance (such as polystyrene, two
Silicon oxide, various metal) all types of micro-/ nano balls that formed, and all types of micro-/ nanos thus extended
The micro-/ nano granule etc. of spherical shell structure or other shapes.
The preparation method of a kind of orderly large area monolayer micro-/ nano ball utilizing template to assist, including in detail below
Step:
(1) on substrate, produce the structure of certain size, and using this as template；
(2) by monolayer depositing them to template, after liquid evaporates, it is obtained by the orderly of template auxiliary
Large area monolayer micro-/ nano spherical structure.
The structure of the certain size described in step (1), its size range can be from several microns to millimeter amount
Level, described structure can be corner grid, triangular lattice, and various paracycle, parting structure are even
Not having periodically arrangement, in its unit, shape of template can be random geometry, the most square, circle
Shape, hexagon or other irregular shapes etc..
The method of the making described in step (1), for any micro-nano knot that can etch certain depth
The lithographic method of structure, such as wet method anisotropic etching, Optical Electro-Chemistry etching, metal catalytic chemical etching,
Nano impression or reactive ion etching etc..
Substrate described in step (1), (includes various containing many for any surface forming formwork structure
The surface of layer material composite construction) can serve as substrate use, the most various inorganic material (silicon chip, glass
Glass, quartz etc.), various polymeric material (plane etc. formed such as lucite, various photoresist), each
The composite substrate etc. planting metal material (such as gold, silver, aluminum etc.) and one or more materials above-mentioned formation is done
Substrate.
Monolayer depositing them described in step (2), to the method for template, can prepare two-dimensional colloidal for any
The method of crystal, such as gas-liquid interface construction from part, evaporation revulsion or electrophoretic deposition etc..
Microsphere described in step (2) includes PS (polystyrene) microsphere, SiO2Microsphere isocolloid microparticle.
A kind of orderly large area monolayer micro-/ nano spherical structure utilizing template to assist, by above-mentioned preparation method system
For obtaining.
The described orderly large area monolayer micro-/ nano spherical structure utilizing template to assist is in optic communication device, sensing
The numerous areas such as device, surface Raman enhancement technology, heliotechnics, absorbing material there is important application
It is worth.
The present invention, relative to prior art, has such advantages as and effect:
Template silicon chip used by the present invention, can be micro-to the colloid in the range of about in structured region
Ball applies the effect of power, so that colloid micro ball is during self assembly, by from formwork structure
The power in one or more direction, and be closely aligned mutually with the effect puted forth effort, and be more than faint
Capillary force action under arbitrarily arrange.The effect of do so is exactly the crystalline substance that can effectively reduce in colloidal crystal
Lattice defect, improves the trend of its confusion, and reduces zonal double-deck phenomenon.Therefore, the present invention obtains
Orderly large area monolayer micro-/ nano segment fall into less, to move towards order high, almost without multi-Layer Phenomenon, from sweeping
Retouch Electronic Speculum figure intuitively to observe, it can be seen that its good order.
Accompanying drawing explanation
Fig. 1 is to provide the top view schematic diagram of monolayer micro-/ nano ball in experiment flow figure and template in embodiment；
Wherein, A is experiment flow figure；B is the top view schematic diagram of monolayer micro-/ nano ball.
Fig. 2 is the template scanning electron microscope (SEM) photograph of preparation in embodiment.
Fig. 3 is the sweeping of the orderly large area monolayer micro-/ nano spherical structure utilizing template to assist of preparation in embodiment
Retouch Electronic Speculum figure.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the present invention is described in further detail, but embodiments of the present invention
It is not limited to this.
Elaborate a lot of detail in the following description so that fully understanding the present invention, but the present invention is also
Can implement to use other to be different from these other modes described, those skilled in the art can be without prejudice to this
Doing similar popularization in the case of invention intension, therefore the present invention is not limited by following public specific embodiment.
Embodiment 1
(1) N-type<100>silicon chip by 5 cun is cut to the small size silicon chip of multiple 3cm*3cm, by microscope slide
Cut into small pieces.
(2) silicon chip after cutting is divided respectively with microscope slide in acetone, isopropanol, ethanol, deionized water
The most ultrasonic 10 minutes, and soak in 5% Fluohydric acid., rinse well with deionized water afterwards, to remove table
The greasy dirt in face, metal impurities；
(3) HMDS pretreatment system is used to process cleaned silicon chip so that it is surface is hydrophobic state；
(4) get out the mask plate that ultraviolet photolithographic needs to use, wherein comprise the different chis of 4 μm～60 μm
The periodic structure of the shapes such as very little square, circular, hexagon, irregular shape.
(5) silicon chip processed is put into sol evenning machine carries out spin coating, used AZ5214e type photoetching
Glue, spin coating parameter is the first stage 500 revs/min, rotates 5 seconds, second stage 6000 revs/min, rotation
Turning 40 seconds, the thickness of photoresist layer is about 1 μm；90 DEG C of front bakings 5min afterwards, carry out uv-exposure, expose
Optical density is 3.47mJ/s, and time of exposure is 23 seconds, and total exposure amount is 80mJ；At AZ300MIF after exposure
Developer solution develops 30～40 seconds；
(6) by the PS suspension of 30%300nm particle diameter and deionized water, ethanol according to the ratio of 1:1:1
Carry out proportioning, be placed in ultrasonic machine carrying out ultrasonic, PS microsphere is suspended in solvent equably；
(7) small pieces microscope slide and template silicon chip are put into cleaning 15min in plasma cleaner so that it is obtain
Good hydrophilic, so that PS suspension effectively can contact with silicon chip surface so that PS is micro-
Ball is the most stably aligned on silicon chip；
(8) being put into by the silicon chip handled well in homemade row's bead container, pour deionized water into, liquid level is slightly higher
In silicon chip surface, homemade row's bead container general configuration is as follows: container entirety is a cuboid box,
Cartridge top is opening, above has lid, and near cartridge bottom is a circular open, may be inserted into band
Having the flexible pipe of switch, remainder is airtight.Cassette interior has an independent little cuboid box, upper opening,
The least opening is arranged at bottom, supplies water and flows out.Material used by whole device is lucite.Experiment behaviour
During work, pad two blocks of sheet glass by below internal little cuboid box, make the water energy in little cuboid box
Flowing out smoothly, silicon chip is positioned in little cuboid box；
(9) after liquid level stabilizing, the switch of row's bead lower vessel portion is opened, water is slowly discharged, treats silicon
After sheet surface moisture is evaporated completely, can be drawn off, the orderly large area list that template assists must be utilized
Layer micro-/ nano spherical structure.
Experiment flow figure is as shown in Figure 1A.
The vertical view diagram utilizing orderly large area monolayer micro-/ nano spherical structure that template assists of the present embodiment gained
It is intended to, as shown in Figure 1B.
The template scanning electron microscope (SEM) photograph of preparation in embodiment, as shown in Figure 2.
The scanning electricity of the orderly large area monolayer micro-/ nano spherical structure utilizing template to assist prepared in embodiment
Mirror figure, as shown in Figure 3.
From the scanning electron microscope (SEM) photograph shown in Fig. 3 it can be seen that utilize template to assist the orderly large area list arranged out
Layer micro-/ nano segment falls into less, moves towards order high, and almost without multi-Layer Phenomenon.Result shows, utilizes mould
The auxiliary of plate, the preparation of monolayer orderly large area micro-/ nano ball is the most simple.
In this specification, various piece uses the mode gone forward one by one to describe, and what each some importance illustrated is and it
The difference of his part, between various piece, identical similar portion sees mutually.To disclosed reality
Execute the described above of example, make professional and technical personnel in the field be capable of or use the present invention.These are implemented
The multiple amendment of example is apparent from for those skilled in the art, and as defined herein one
As principle can realize in other embodiments without departing from the spirit or scope of the present invention.Cause
This, it is embodiment that the present invention is not intended to be limited to shown in this article, and is to fit to disclosed herein
Principle and the consistent widest range of features of novelty.
Above-described embodiment is the present invention preferably embodiment, but embodiments of the present invention are not by above-mentioned enforcement
The restriction of example, the change made, modifies, replaces under other any spirit without departing from the present invention and principle
In generation, combine, simplify, all should be the substitute mode of equivalence, within being included in protection scope of the present invention.
Claims (10)
1. the preparation method of the orderly large area monolayer micro-/ nano ball utilizing template to assist, it is characterised in that
Including step in detail below:
(1) on substrate, produce the structure of certain size, and using this as template；
(2) by monolayer depositing them to template, after liquid evaporates, it is obtained by the orderly of template auxiliary
Large area monolayer micro-/ nano spherical structure.
The preparation of the orderly large area monolayer micro-/ nano ball utilizing template to assist the most according to claim 1
Method, it is characterised in that: the structure of the certain size described in step (1), its size range is from several micro-
Rice is to millimeter magnitude.
The preparation of the orderly large area monolayer micro-/ nano ball utilizing template to assist the most according to claim 1
Method, it is characterised in that: described structure is corner grid, triangular lattice, and various paracycle, point
Type structure does not even have periodically arrangement, and in its unit, shape of template is random geometry, the most just
Shape, circle, hexagon or irregular shape.
The preparation of the orderly large area monolayer micro-/ nano ball utilizing template to assist the most according to claim 1
Method, it is characterised in that: the method for the making described in step (1), a depthkeeping can be etched for any
The lithographic method of the micro nano structure of degree, such as wet method anisotropic etching, Optical Electro-Chemistry etching, metal are urged
Change chemical etching, nano impression or reactive ion etching.
The preparation of the orderly large area monolayer micro-/ nano ball utilizing template to assist the most according to claim 1
Method, it is characterised in that: the substrate described in step (1), is any to form the surface of formwork structure all
Can use as substrate, such as with various inorganic material, various polymeric material, various metal material, with
And the composite substrate that above-mentioned one or more materials are formed cooks substrate.
The preparation of the orderly large area monolayer micro-/ nano ball utilizing template to assist the most according to claim 5
Method, it is characterised in that: described inorganic material is silicon chip, glass or quartz；
Described polymeric material is lucite or the plane of various photoresist formation；
Described metal material is gold, silver or aluminum.
The preparation of the orderly large area monolayer micro-/ nano ball utilizing template to assist the most according to claim 1
Method, it is characterised in that: the method for the monolayer depositing them described in step (2) to template, for any energy
The method preparing two-dimensional colloidal crystal, such as gas-liquid interface construction from part, evaporation revulsion or electrophoretic deposition.
The preparation of the orderly large area monolayer micro-/ nano ball utilizing template to assist the most according to claim 1
Method, it is characterised in that: the microsphere described in step (2) includes PS microsphere or SiO2Microsphere.
9. the orderly large area monolayer micro-/ nano spherical structure utilizing template to assist, it is characterised in that: pass through
The preparation method of any one of claim 1～8 prepares.
10. utilize orderly large area monolayer micro-/ nano spherical structure that template assists at light described in claim 9
Answering in communication device, senser element, surface Raman enhancement technology, heliotechnics, absorbing material field
With.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610327497.7A CN105947970A (en) | 2016-05-16 | 2016-05-16 | Ordered large-area single-layer microspheres/nanospheres assisted by template and preparation method thereof |
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| CN201610327497.7A CN105947970A (en) | 2016-05-16 | 2016-05-16 | Ordered large-area single-layer microspheres/nanospheres assisted by template and preparation method thereof |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108796604A (en) * | 2017-05-03 | 2018-11-13 | 中国科学院化学研究所 | A kind of colloidal photon crystal and preparation method thereof with curved-surface structure |
| CN109856116A (en) * | 2019-02-28 | 2019-06-07 | 吉林大学 | A kind of classifying nano cone array and preparation method thereof using the chemical reaction of Surface enhanced Raman scattering in-situ monitoring |
| CN112723303A (en) * | 2020-12-14 | 2021-04-30 | 苏州拉索生物芯片科技有限公司 | Microbead chip and spin coating preparation method thereof |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108796604A (en) * | 2017-05-03 | 2018-11-13 | 中国科学院化学研究所 | A kind of colloidal photon crystal and preparation method thereof with curved-surface structure |
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| CN109856116B (en) * | 2019-02-28 | 2021-06-29 | 吉林大学 | Hierarchical nanocone array for in-situ monitoring of chemical reaction by using surface enhanced Raman scattering and preparation method thereof |
| CN112723303A (en) * | 2020-12-14 | 2021-04-30 | 苏州拉索生物芯片科技有限公司 | Microbead chip and spin coating preparation method thereof |
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