CN105925389A - Cleaning agent special for rare-earth grinding fluid - Google Patents

Cleaning agent special for rare-earth grinding fluid Download PDF

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Publication number
CN105925389A
CN105925389A CN201610339931.3A CN201610339931A CN105925389A CN 105925389 A CN105925389 A CN 105925389A CN 201610339931 A CN201610339931 A CN 201610339931A CN 105925389 A CN105925389 A CN 105925389A
Authority
CN
China
Prior art keywords
cleaning agent
cleaning
surfactant
agent
grinding fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201610339931.3A
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Chinese (zh)
Inventor
顾健元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KUNSHAN JINCHENG REAGENT CO Ltd
Original Assignee
KUNSHAN JINCHENG REAGENT CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KUNSHAN JINCHENG REAGENT CO Ltd filed Critical KUNSHAN JINCHENG REAGENT CO Ltd
Priority to CN201610339931.3A priority Critical patent/CN105925389A/en
Publication of CN105925389A publication Critical patent/CN105925389A/en
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66Non-ionic compounds
    • C11D1/825Mixtures of compounds all of which are non-ionic
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/02Inorganic compounds ; Elemental compounds
    • C11D3/04Water-soluble compounds
    • C11D3/046Salts
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/02Inorganic compounds ; Elemental compounds
    • C11D3/04Water-soluble compounds
    • C11D3/10Carbonates ; Bicarbonates
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16Organic compounds
    • C11D3/26Organic compounds containing nitrogen
    • C11D3/33Amino carboxylic acids
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66Non-ionic compounds
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66Non-ionic compounds
    • C11D1/667Neutral esters, e.g. sorbitan esters
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66Non-ionic compounds
    • C11D1/72Ethers of polyoxyalkylene glycols
    • C11D1/721End blocked ethers
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/66Non-ionic compounds
    • C11D1/74Carboxylates or sulfonates esters of polyoxyalkylene glycols

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The invention relates to a cleaning agent special for a rare-earth grinding fluid. The cleaning agent is mainly prepared from, by weight, a complexing agent 1%-5%, a surfactant 10%-30%, a buffering agent 0.1%-2 % and the balance water. The cleaning agent special for the rare-earth grinding fluid produced by adopting the technical scheme is simple in production process, has high dispersity and adsorbability and is remarkable in cleaning effect, and no obvious grinding fluid residue exists on the surface of a workpiece after cleaning is completed. In addition, the oil cleaning rate is improved by compounding the surfactant, the treatment speed is high, and the roughness of the workpiece is not obviously affected. The buffering agent can make PH of the cleaning agent in a weakly alkaline state while effect initiating, formation of cleaning agent micelles is promoted, the critical micelle concentration is lowered, and the service life of the cleaning agent is prolonged.

Description

Rare earth lapping liquid scavenger specially
Technical field
The present invention relates to field of surface treatment, specifically rare earth lapping liquid scavenger specially.
Background technology
The mankind are very close with the relation of chemical industry, in the modern life, the most all be unable to do without chemical products, from material lifes such as clothing, food, shelter, row to the cultural life such as culture and arts, amusement, are required for chemical products and service for it.Some chemical products, in human development history, plays epoch-making important function.Their production and application, even represent certain historical stage of human civilization.
Ultra-precision Turning is the production technology that modern sophisticated industry is important, and it does not require nothing more than high accuracy, high-quality, and requires low cost and high repeatability.And ultraprecision grinding polishing is owing to having the process principle of uniqueness and to features such as process equipment, environmental factor are less demanding, the nanoscale even processing of atom level can be realized, become a pith in Ultraprecision Machining, it is achieved the critical material of ultraprecision grinding polishing is precise finiss goods.At present, the removal unit removing material with abrasive particle has reached the even sub-nanometer scale of nanometer, reach the highest surface smoothness, the lapping liquid containing abrasive material can be used, or use the polished film that abrasive material is fixed on film, point corase grind, middle mill, refine, several steps such as polishing are carried out, it is also possible to lapping liquid and polished film are combined cross-reference.
Polishing refers to utilize machinery, chemistry or the effect of electrochemistry, makes workpiece surface roughness reduce, to obtain light, the processing method of flat surface.It is the modification processing utilizing flexible polishing instrument and abrasive grain or other polishing mediums that surface of the work is carried out.Loading steel ball and fur fragment when essence is thrown in wooden barrel, rotation a few hours can get the surface of dazzling light continuously.Finished surface is immersed in polishing fluid and carries out by the polishing of precision scale, and polishing fluid is mixed by the chromium oxide micro mist that granularity is W5~W0.5 and emulsion.In addition with methods such as electrobrightenings.Tradition polishing powder complex manufacturing, easily impacts environment, and the production cycle is long.
There is presently no a kind of production technology simple, environment will not be impacted can mass production be specifically designed to the rare earth lapping liquid scavenger specially that rare earth lapping liquid cleans.
Summary of the invention
The present invention is just for above technical problem, it is provided that a kind of production technology is simple, environment will not be impacted can mass production be specifically designed to the rare earth lapping liquid scavenger specially that rare earth lapping liquid cleans.
The present invention is achieved through the following technical solutions.
Rare earth lapping liquid scavenger specially, is mainly made up of complexing agent, surfactant, buffer, and each Ingredients Weight percentage composition is: complexing agent 1%~5%;Surfactant 10%~30%;Buffer 0.1%~2%, surplus is water.Complexing agent is NTA or EDTA.Surfactant is the mixture of the two or more in APES, high-carbon fatty alcohol polyoxyethylene ether, polyoxyethylene carboxylate, fatty acid methyl ester ethyl oxide, sorbitan ester.Buffer is that sodium carbonate forms by weight the proportions of 1:1 with sodium acid carbonate.
The rare earth lapping liquid Special cleaning agent producing process using technical scheme of the present invention to produce is simple, there is higher dispersiveness and adsorptivity, cleaning performance is notable, after cleaning, surface of the work remains without obvious lapping liquid, simultaneously, the present invention improves the cleaning rate to grease by the compounding of surfactant, and processing speed is fast and will not significantly affect workpiece roughness.Buffer can make cleaning agent keep PH in alkalescent state onset when, promotes the formation of cleaning agent micella, reduces critical micelle concentration, extends cleaning fluid service life.
Detailed description of the invention
Below in conjunction with specific embodiment, the invention will be further described.
Embodiment 1:
First sorbitan ester 60g, fatty acid methyl ester ethyl oxide 60g being added in 500g water, be sufficiently stirred for and be heated to 80 DEG C, add EDTA15g, be sufficiently stirred for, add sodium carbonate and each 5g of sodium acid carbonate, be sufficiently stirred for, the polishing that then adds water is to 1L.
Embodiment 2:
First APES 30g, polyoxyethylene carboxylate 30g being added in 500g water, be sufficiently stirred for and be heated to 80 DEG C, add EDTA15g, be sufficiently stirred for, add sodium carbonate and each 5g of sodium acid carbonate, be sufficiently stirred for, the polishing that then adds water is to 1L.
The rare earth lapping liquid Special cleaning agent producing process using technical scheme of the present invention to produce is simple, there is higher dispersiveness and adsorptivity, cleaning performance is notable, after cleaning, surface of the work remains without obvious lapping liquid, simultaneously, the present invention improves the cleaning rate to grease by the compounding of surfactant, and processing speed is fast and will not significantly affect workpiece roughness.Buffer can make cleaning agent keep PH in alkalescent state onset when, promotes the formation of cleaning agent micella, reduces critical micelle concentration, extends cleaning fluid service life.
Above-described embodiment only for technology design and the feature of the present invention are described, its object is to allow person skilled in the art will appreciate that present disclosure and to implement according to this, can not limit the scope of the invention with this.All equivalence changes made according to spirit of the invention or modification, all should contain within protection scope of the present invention.

Claims (4)

1. rare earth lapping liquid scavenger specially, is mainly made up of complexing agent, surfactant, buffer, and each Ingredients Weight percentage composition is: complexing agent 1%~5%;Surfactant 10%~30%;Buffer 0.1%~2%, surplus is water.
Rare earth lapping liquid scavenger specially the most according to claim 1, it is characterised in that complexing agent is NTA or EDTA.
Rare earth lapping liquid scavenger specially the most according to claim 1, it is characterised in that surfactant is the mixture of the two or more in APES, high-carbon fatty alcohol polyoxyethylene ether, polyoxyethylene carboxylate, fatty acid methyl ester ethyl oxide, sorbitan ester.
Rare earth lapping liquid scavenger specially the most according to claim 1, it is characterised in that buffer is that sodium carbonate forms by weight the proportions of 1:1 with sodium acid carbonate.
CN201610339931.3A 2016-05-23 2016-05-23 Cleaning agent special for rare-earth grinding fluid Pending CN105925389A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610339931.3A CN105925389A (en) 2016-05-23 2016-05-23 Cleaning agent special for rare-earth grinding fluid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610339931.3A CN105925389A (en) 2016-05-23 2016-05-23 Cleaning agent special for rare-earth grinding fluid

Publications (1)

Publication Number Publication Date
CN105925389A true CN105925389A (en) 2016-09-07

Family

ID=56840841

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610339931.3A Pending CN105925389A (en) 2016-05-23 2016-05-23 Cleaning agent special for rare-earth grinding fluid

Country Status (1)

Country Link
CN (1) CN105925389A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106479700A (en) * 2016-10-12 2017-03-08 佛山迅拓奥科技有限公司 A kind of semiconductor silicon material lapping liquid abluent and preparation method thereof
CN110129813A (en) * 2019-05-08 2019-08-16 东莞市杰川电子材料科技有限公司 Cleaning agent and preparation method thereof for cleaning rare earth

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101092541A (en) * 2006-06-23 2007-12-26 天津晶岭电子材料科技有限公司 Finishing polish liquid in use for silicon wafer
CN101289641A (en) * 2008-06-05 2008-10-22 大连三达奥克化学股份有限公司 Cleaning agent for polishing wafer
CN101972755A (en) * 2010-07-21 2011-02-16 河北工业大学 Surface cleaning method of polished ULSI (Ultra Large Scale Integration) copper material

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101092541A (en) * 2006-06-23 2007-12-26 天津晶岭电子材料科技有限公司 Finishing polish liquid in use for silicon wafer
CN101289641A (en) * 2008-06-05 2008-10-22 大连三达奥克化学股份有限公司 Cleaning agent for polishing wafer
CN101972755A (en) * 2010-07-21 2011-02-16 河北工业大学 Surface cleaning method of polished ULSI (Ultra Large Scale Integration) copper material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106479700A (en) * 2016-10-12 2017-03-08 佛山迅拓奥科技有限公司 A kind of semiconductor silicon material lapping liquid abluent and preparation method thereof
CN110129813A (en) * 2019-05-08 2019-08-16 东莞市杰川电子材料科技有限公司 Cleaning agent and preparation method thereof for cleaning rare earth
CN110129813B (en) * 2019-05-08 2023-09-12 东莞市杰川电子材料科技有限公司 Cleaning agent for cleaning rare earth and preparation method thereof

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Application publication date: 20160907

RJ01 Rejection of invention patent application after publication