JP5483815B2 - Wrapping agent composition - Google Patents

Description

  The present invention relates to a lapping agent composition used during polishing of brittle materials (sapphire, silicon carbide, silicon, quartz, cemented carbide, glass, etc.) and metals (stainless steel, iron, copper, etc.).

  Brittle materials (sapphire, silicon carbide, silicon, quartz, cemented carbide, glass, etc.) are widely used in the field of electronic materials, etc., and technology development for cost reduction and quality improvement is always continued to meet market demands. ing. In particular, in the cutting-edge field of supplying high value-added products, competition is fierce, and there is a demand for technology that achieves higher productivity.

  Moreover, high surface accuracy has been required year after year for metals such as stainless steel, iron, and copper.

  Many members used in these fields should achieve a certain shape and finished surface by processing. In particular, in a field where high-precision finishing quality is required, a case where rough and finish polishing is performed with a diamond slurry as in the present invention is common.

  However, such a polishing process generally requires a polishing composition having a low processing rate and a low processing rate and a high processing rate.

  The easiest way to increase the processing rate is to increase the primary average particle diameter of diamond. However, since this method tends to deteriorate the surface accuracy, there is a demand for a method for increasing the processing rate without changing the average particle diameter of diamond.

  Patent Document 1 discloses that a dispersion medium formed by mixing one or two or more of dihydric alcohol having 2 to 5 carbon atoms of propylene glycol, ethylene glycol polymer or propylene glycol polymer, diamond, silicon carbide or A polishing composition for texturing of a magnetic disk substrate, in which aluminum oxide abrasive grains are dispersed, is described.

  However, since Patent Document 1 does not contain water, there is a flash point and there is a problem in terms of work hygiene and safety.

  Further, Patent Document 1 only describes texturing, and does not disclose any wrap processing. Texture processing is vertical polishing using an abrasive tape, and the characteristics required for the polishing liquid differ from those in the case of processing on a horizontal surface such as lapping of the present invention. In other words, in texture processing, the ability to hold the diamond on the tape contributes to workability, while in lapping, the wetness of the working fluid on the surface plate and lubricity become important factors. The required characteristics are quite different.

  On the other hand, the polishing composition containing water is described in Patent Documents 2 to 8.

  Patent Document 2 discloses an aqueous polishing composition containing 0.1 to 5% by weight of diamond abrasive grains, 0.05 to 3% by weight of hectorite and 1 to 80% by weight of a glycol solvent. However, the composition described in Patent Document 2 has a problem in polishing properties because a sufficient polishing rate cannot be obtained.

  Patent Documents 3 to 8 each include a polishing liquid (Patent Document 3) characterized by containing polyethylene glycol, water, and diamond abrasive grains, and a thickener in a polishing liquid used for subsurface mirror polishing. (Patent Document 4), Patent Document 5 (Floating Magnetic Head Manufacturing Method) characterized in that water added with (glycerin) and abrasive grains (magnesium oxide powder) are mixed. A slurry, 0.1 to 10% by weight of an abrasive, 0.1 to 10% by weight of a lubricant, and 3 to 40% by weight of a lubricant adjusting agent are dispersed and mixed in water or an oil and fat agent. Polishing liquid (Patent Document 6), a) 0.05 to 0.4% by weight of polycrystalline diamond particles having an average particle diameter of 0.05 to 0.5 μm, b) 0.05 to 3% by weight of an anionic surfactant C) Aqueous dispersion medium 85. ˜99 wt%, d) metal soap 0-10 wt%, e) abrasive slurry containing 0 to 3 wt% polishing aid (Patent Document 7), one selected from water and polyhydric alcohols or A polishing oil for glass processing (Patent Document 8) characterized by containing a benzotriazole or aminocarboxylic acid-based chelating agent based on a mixture of two or more kinds is disclosed. However, all of the abrasive compositions described in Patent Documents 3 to 8 have a problem in polishing properties because a sufficient polishing rate cannot be obtained.

Further, ethylene glycol is the most common solvent used in conventional lapping abrasives (hereinafter, those used for lapping among abrasives are also referred to as lapping abrasives, lapping agents, etc.). An abrasive compounded with this solvent is widely used in the world, but the polishing rate was not fully satisfied.
JP-A-6-033042 JP 2000-17251 A JP 61-207479 A Japanese Patent Laid-Open No. 55-139479 JP-A-6-139512 Japanese Patent Laid-Open No. 11-181408 Japanese Patent Laid-Open No. 2000-1666 JP-A-1-287190

  The problem to be solved by the present invention is to provide a lapping agent composition having no problem in occupational health, no flash point, and improved polishing rate.

  As a result of intensive studies for solving the above problems, the present inventor has found that a wrapping agent composition containing alkanediol having 3 to 8 carbon atoms, diamond abrasive grains, and water in a specific blending ratio has a flash point. Furthermore, it has been found that both a high processing rate and a high dispersibility of diamond can be achieved.

  Accordingly, the present invention provides the wrapping composition shown in the following section.

A wrapping agent composition comprising (a) an alkanediol having 3 to 8 carbon atoms, (b) diamond abrasive grains and (c) water,
The wrapping agent composition in which the content ratios X, Y and Z of the component (a), the component (b) and the component (c) in the composition satisfy all the following formulas:
80 <X ≦ 96.999
0.001 ≦ Y ≦ 5
3 ≦ Z <19.999
[In formula, X shows the content rate (weight%) of (a) component in a composition.
Y shows the content rate (weight%) of (b) component in a composition.
Z shows the content rate (weight%) of (c) component in a composition. ]

  In the polishing process of brittle materials (sapphire, silicon carbide, silicon, quartz, cemented carbide, glass, etc.) and metals (stainless steel, iron, copper, etc.), the polishing efficiency is increased and high productivity is achieved. The lapping agent composition of the present invention is excellent in safety because it has no flash point, and can achieve both a high processing rate and high diamond dispersibility.

  Below, the detail of this invention is demonstrated in more detail based on embodiment.

  Examples of the alkane of the alkanediol having 3 to 8 carbon atoms include saturated linear, branched or alicyclic hydrocarbon groups.

  Examples of the alkanediol having 3 to 8 carbon atoms include 1,2-propanediol, 1,3-propanediol, 1,2-butanediol, 1,3-butanediol, 1,4-butanediol, 2,3- Butanediol, 1,2-pentanediol, 1,3-pentanediol, 1,4-pentanediol, 1,5-pentanediol, 2,3-pentanediol, 2,4-pentanediol, hexylene glycol, cyclohexane -1,2-diol, cyclohexane-1,3-diol, cyclohexane-1,4-diol, 1,8-octanediol and the like.

  Alkanediols preferably have 3 to 6 carbon atoms, and among the above-mentioned alkanediols, 1,2-propanediol, 1,4-butanediol, and hexylene glycol are particularly preferable.

  By using an alkanediol having 3 to 8 carbon atoms, a very high polishing rate was obtained. Alkanediols having more than 8 carbon atoms are not compatible with water, and a uniform wrapping agent composition cannot be obtained.

  The blending ratio of the alkanediol having 3 to 8 carbon atoms is more than 80% by weight and 96.999% by weight or less, preferably 81 to 96.999% by weight or less. The composition of the present invention containing alkanediol within this range can provide a very high polishing rate and does not generate a flash point.

  As the diamond abrasive grains, natural or artificial industrial diamond abrasive grains conventionally used in the field may be used as appropriate, and the average grain diameter of the abrasive grains is not particularly limited. The thickness is preferably 0.1 μm to 10 μm from scratch reduction.

  The blending ratio of the diamond abrasive grains is 0.001 to 5% by weight, preferably 0.005 to 3% by weight, and more preferably 0.01 to 2% by weight. The higher the diamond concentration, the higher the polishing rate, but the higher the price of diamond and the higher the cost of the polishing liquid. Therefore, it should be determined in consideration of the required surface accuracy and the allowable use cost.

  The mixing ratio of water is 3% by weight or more and less than 19.999% by weight. The composition of the present invention containing water within this range provides a very high polishing rate and does not generate a flash point. The quality of the water used is not particularly limited, such as ultrapure water, pure water, distilled water, ion exchange water, or tap water.

  The wrapping agent composition according to the present invention may contain various additives as desired in addition to the above-described blending components. Examples of additives include rust inhibitors (ethanolamine, propanolamine, carboxylic acid, nitrite, boron, etc.), preservatives (1,2-benzisothiazolin-3-one, sodium pyrithione, etc. ), Antifoaming agents (silicon-based, alcohol-based, etc.), lubricity improvers (fatty acid ester-based, fatty acid amide-based, etc.), extreme pressure additives (sulfur-based, chlorine-based, phosphorus-based, etc.), and surfactants ( Nonionic, anionic, cationic, and composite systems thereof may be used as appropriate.

  The lapping agent composition of the present invention can be prepared by, for example, a method of uniformly mixing water and alkanediol, and then uniformly dispersing diamond abrasive grains while oscillating ultrasonic waves, but is not limited thereto.

Lapping method The method of using the lapping agent composition of the present invention, that is, the lapping method, includes a method of pouring from the outside to the contact portion between the lapping apparatus and the surface to be processed, a spraying method, a liquid passing method, etc. be able to.

  The lapping method is usually performed in a clean room at room temperature and normal pressure.

The addition amount of the lapping composition of the present invention to the non-treated surface at the time of lapping is usually 50 to 100 cc / hr per 500 cm ² .

  The lapping processing time is usually 1 to 200 minutes, but is not limited thereto.

  The lapping method of the present invention can be used for general polishing precision finishing of metals in general, but is particularly effective for polishing of iron, steel, aluminum alloy and the like.

  The lapping agent composition in the present invention has high dispersibility of diamond and its sedimentation is suppressed. Therefore, even if lapping is performed without stirring or ultrasonicating the lapping agent composition, lapping can be performed without causing problems such as clogging due to sedimentation of diamond. However, it is desirable to use a method in which the precipitate is redispersed by stirring or ultrasonic treatment or a composite method thereof, depending on the particle diameter and content of diamond.

  The lapping method of the present invention has the advantage that it is excellent in safety due to the low flammability of the lapping agent composition, and has good workability due to high diamond dispersibility. By using the lapping method of the present invention, lapping at a high polishing rate can be performed while satisfying such excellent safety and workability.

  Hereinafter, it demonstrates still in detail according to an Example.

  EXAMPLES The present invention will be described in detail below using examples, but the present invention is not limited to the following examples.

1. Measurement of flash point The flash point of a composition containing 1,2-propanediol, water and diamond in various proportions was measured as follows.

The flash point was measured using a Cleveland open flash point measuring instrument.
The results are shown in Table 1 below.

  As shown in Table 1 above, when the water content in the composition containing 1,2-propanediol and diamond is increased, the flash point disappears only when 3% by weight of water is contained. did.

  Therefore, a composition containing only less than 3% by weight of water has a flash point and is unsuitable for lapping from the viewpoint of safety. On the contrary, it can be seen that a composition containing 3% by weight or more of water is excellent in safety.

  Below, an Example and a comparative example evaluated polishing rate etc. about the lapping agent composition which does not have flash point.

2. Polishing rate measurement About Examples 1-4 and Comparative Examples 1-6, the polishing rate was measured. The polishing rate was measured by the following polishing test method.
[Polishing test method]
Processing machine: Single-sided lapping machine Target: Sapphire (Φ30mm × 3)
Load: 400g / cm2
Surface plate: Iron (Φ300mm)
Plate rotation speed: 60rpm
Slurry supply: intermittent spraying (20 seconds interval, 10 seconds spraying)
Diamond particle diameter: Median diameter 8.0μm

  As is clear from the comparison between Examples 1 and 2 and Comparative Example 2, the composition containing 1,2-propanediol in an amount of more than 80% by weight is a composition having a 1,2-propanediol content of 80% by weight or less. The polishing rate is remarkably higher than that of the product.

  Moreover, as is clear from the comparison between Examples 1 to 3 and Comparative Examples 1 and 3 to 6, the alkanediol having 3 to 8 carbon atoms exhibits a significantly higher polishing rate than other compounds.

  Further, the wrapping was performed in the same manner as in Example 2 except that the diamond content was increased from 0.2% by weight to 2% by weight and the water was reduced correspondingly from 18.8% by weight to 17% by weight. When an agent composition was prepared and the polishing rate was measured, it showed a very high value of 36.0 μm / hour.

3. Verification of dispersibility Using the composition of Example 2 above, lapping was performed in the working environment described below.
[Polishing test method]
Processing machine: Single-sided lapping machine Target: Sapphire (Φ30mm × 3)
Load: 400g / cm2
Surface plate: Iron (Φ300mm)
Plate rotation speed: 60rpm
Slurry supply: intermittent spraying (20-second intervals, 10-second spraying)
Diamond particle diameter: Median diameter 8.0μm
Processing time: 10 minutes However, lapping was performed in a state where the lapping agent composition was not subjected to dispersion treatment such as stirring and ultrasonic treatment.

  In general, when abrasive grains are dispersed in a dispersion medium having a high viscosity, the settling of the abrasive grains is slow and the dispersion state tends to be kept long. Here, water has a lower viscosity than 1,2-propanediol. Therefore, in the composition of Example 2 containing 18.8% by weight of water and 81% by weight of 1,2-propanediol, it is predicted that the abrasive grains will settle quickly.

  However, contrary to this expectation, in the lapping process using the lapping composition of Example 2, the lapping process does not cause problems such as clogging due to sedimentation of particles without stirring and ultrasonic treatment. I was able to.

  From the above, it can be seen that a lapping agent composition containing at least 80% by weight of 1,2-propanediol is excellent in dispersibility.

  From the above, the alkanediol having 3 to 8 carbon atoms is more than 80% by weight and less than 96.999% by weight, the diamond abrasive grains are 0.001 to 5% by weight, the water is 3% by weight or more and 19.999% by weight. A lapping agent composition containing less than 1% does not have a flash point, has high abrasiveness and dispersibility, and exhibits excellent performance as a lapping agent.

Claims (1)

A wrapping agent composition comprising (a) an alkanediol having 3 to 8 carbon atoms, (b) diamond abrasive grains and (c) water,
The wrapping agent composition in which the content ratios X, Y and Z of the component (a), the component (b) and the component (c) in the composition satisfy all the following formulas:
80 <X ≦ 96.999
0.001 ≦ Y ≦ 5
3 ≦ Z <19.999
[In formula, X shows the content rate (weight%) of (a) component in a composition.
Y shows the content rate (weight%) of (b) component in a composition.
Z shows the content rate (weight%) of (c) component in a composition. ]