CN105922466A - Multi-line cutting material swinging device - Google Patents
Multi-line cutting material swinging device Download PDFInfo
- Publication number
- CN105922466A CN105922466A CN201610273164.0A CN201610273164A CN105922466A CN 105922466 A CN105922466 A CN 105922466A CN 201610273164 A CN201610273164 A CN 201610273164A CN 105922466 A CN105922466 A CN 105922466A
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- CN
- China
- Prior art keywords
- plate
- pendulum device
- lower plate
- cutting material
- upper plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention discloses a multi-line cutting material swinging device. The multi-line cutting material swinging device comprises an upper plate and a lower plate. The upper plate is fixed to a base of a multi-line cutting device. A workpiece to be machined is fixed to the lower portion of the lower plate. Side plates are arranged on the two sides of the upper plate. A front plate is arranged in the front of the upper plate, and a rear plate is arranged on the back of the upper plate. Bosses are arranged at the upper portion of the lower plate in parallel. A guide rail mechanism and a drive mechanism are arranged between the upper plate and the lower plate. The guide rail mechanism comprises sliding blocks and sliding rails. The sliding blocks on the side plates are arranged in the sliding rails on the bosses. The drive mechanism comprises a speed reducer, a servo motor, a small gear and a large gear. Under driving of the servo motor, the speed reducer drives the small gear to rotate, the large gear engaged with the small gear rotates, and therefore the lower plate is driven to swing in the sliding rails. The multi-line cutting material swinging device is applied to the technical field of superhard wafer machining and is reasonable in structure and compact in layout, the workpiece to be machined is driven to stably swing, the problems that the cutting force of a wafer is insufficient, and the cutting force is not stable are effectively solved, and the cutting capability of the multi-line cutting device is improved.
Description
Technical field
The present invention relates to multi-wire saw apparatus field, particularly relate to a kind of multi-wire cutting material cutting pendulum device.
Background technology
Multi-wire saw technology is the most more advanced Wafer Machining, its principle is to drive the cutting blade material being attached on steel wire to rub the hard brittle materials such as wafer by the steel wire of a high-speed motion, thus reach cutting effect, its feed can cut multi-disc, and multi-wire saw work efficiency is high.
When using the superhard materials such as multi-wire saw equipment cutting sapphire, carborundum, it may appear that problems with:
(1) high due to material hardness to be cut, cutting force is not enough, and clipping time is long, and cutting efficiency is low；
(2) when superhard material cuts, cutting force poor stability, and without impact mitigation measure, affect the service life of cutting equipment.
Summary of the invention
For problem above, wafer manufacture field is proposed swing cutting, i.e. when cutting, allows line of cut and workpiece swing back and forth by certain angle, makes the contact of line of cut and workpiece be become point cantact from linear contact lay, to improve the cutting power of equipment.
The application is exactly according to swinging a kind of multi-wire cutting material cutting pendulum device that incision principle proposes, it is rational in infrastructure, compact in design, drives workpiece stable oscillation to be added, effectively solve the problem that wafer cutting force is not enough, cutting force is unstable, promote the cutting power of multi-wire saw equipment.
Technical scheme:
For solving above-mentioned technical problem, the present invention provides a kind of multi-wire cutting material cutting pendulum device, and including upper plate, lower plate, upper plate is fixed on the pedestal of multi-wire saw equipment, and the bottom of lower plate is fixed with workpiece to be processed.
The both sides of upper plate are provided with side plate, and the forward and backward side of upper plate is provided with header board, back plate, and the upper parallel of lower plate is provided with boss；Guide rail mechanism, drive mechanism it is provided with between upper plate and lower plate；Guide rail mechanism includes slide block, slide rail, and slide block is arranged on the inner side of side plate, and slide rail is arranged on the outside of boss, and the slide block on side plate is arranged in the slide rail on boss；Drive mechanism includes decelerator, servomotor, little gear and gear wheel, and decelerator is arranged on the fixing seat hinged with back plate, and little gear is fixed on the output shaft of decelerator, and gear wheel is fixed on the top of lower plate, and little gear engages each other with gear wheel；Under the driving of servomotor, decelerator drives pinion rotation, the bull gear drive engaged with little gear, thus drives lower plate to swing in slide rail.
Further, described slide rail is arc-shaped rail, and the center of circle line of its center of circle line and gear wheel at grade, to ensure the slide block smooth sliding in the slide rail on boss on side plate, thus drives lower plate to swing steadily.
Further, described gear wheel is partial gear, to limit the pendulum angle of connected lower plate.
Further, described fixing seat is hinged with back plate by bearing pin, and fixing seat is connected with back plate by two support shafts, and fixing seat is connected with header board by a support shaft.
Further, the external diameter of described bearing pin is 0-0.02mm with the bore clearance coordinated in back plate, the external diameter of support shaft is 3-5mm with the bore clearance coordinated in header board, back plate, so, the little gear being arranged on fixing seat has the swing gap of 0-3, and the flank of tooth of little gear and gear wheel can be made to tightly engage all the time, eliminates the impulsive force in cutting process, reduce the abrasion of gear teeth face, improve gear life.
Further, described multi-wire cutting material cutting pendulum device also includes guiding mechanism, and it is made up of adjustment block, compression leg, butterfly spring and jackscrew, and adjustment block is arranged on fixing seat, and butterfly spring, compression leg are successively set in the blind hole in adjustment block；Upper plate is provided with screwed hole with the blind hole in adjustment block relative to position, and jackscrew fixes the compression leg being positioned at butterfly spring top by screwed hole；Jackscrew withstands compression leg makes disk spring deform, and makes little gearing have certain rigidity.
Further, described little gear is fixed on the output shaft of decelerator by exempting from key axle bush.
Further, the angle that described lower plate swings in slide rail is 0-7 °.
Further, described multi-wire cutting material cutting pendulum device also includes position-limit mechanism, and it is made up of proximity switch and block；Position-limit mechanism is arranged in header board, back plate, is provided with gap between proximity switch and baffle plate, when effectively preventing lower plate amplitude of fluctuation excessive, and slide block abjection slide rail.
The method have the benefit that
The multi-wire cutting material cutting pendulum device that the present invention provides is applied to superhard Wafer Machining field, it is rational in infrastructure, compact in design, drives workpiece stable oscillation to be added, effectively solve the problem that wafer cutting force is not enough, cutting force is unstable, promote the cutting power of multi-wire saw equipment.
Accompanying drawing explanation
Fig. 1 is present configuration transverse sectional view；
Fig. 2 is present configuration top view (without upper plate)；
Fig. 3 is present configuration longitudinal sectional view；
Fig. 4 is the fixing seat connection diagram with back plate of the present invention；
Fig. 5 is the guiding mechanism schematic diagram of the present invention.
Wherein:
1. upper plate；2. side plate；3. slide block；4. slide rail；5. lower plate；6. header board；7. back plate；8. decelerator；9. fix seat；10. bearing pin；11. support shafts；12. little gears；13. exempt from key axle bush；14. gear wheels；15. adjustment blocks；16. compression legs；17. butterfly springs；18. servomotors；19. jackscrews；20. boss；21. proximity switches；22. blocks.
Detailed description of the invention
Below in conjunction with specific embodiments and the drawings, a kind of multi-wire cutting material cutting pendulum device of the present invention is described in detail:
Fig. 1 show the transverse sectional view of multi-wire cutting material cutting pendulum device, and it includes upper plate 1, lower plate 5, and upper plate 1 is fixed on the pedestal of multi-wire saw equipment, and the bottom of lower plate 5 is fixed with workpiece to be processed；The both sides of upper plate 1 are provided with side plate 2, and the forward and backward side of upper plate 1 is provided with header board 6, back plate 7, and the upper parallel of lower plate 5 is provided with boss 20；Guide rail mechanism, drive mechanism it is provided with between upper plate 1 and lower plate 5.
Guide rail mechanism includes slide block 3, slide rail 4, and slide block 3 is arranged on the inner side of side plate 2, and slide rail 4 is arranged on the outside of boss 20, and the slide block 3 on side plate 2 is arranged in the slide rail 4 on boss 20.
Fig. 2 is present configuration top view (without upper plate), Fig. 3 is present configuration longitudinal sectional view, the drive mechanism of multi-wire cutting material cutting pendulum device includes decelerator 8, servomotor 18, little gear 12 and gear wheel 14, decelerator 8 is arranged on the fixing seat 9 hinged with back plate 7, little gear 12 is fixed on the output shaft of decelerator 8, gear wheel 14 is fixed on the top of lower plate 5, and little gear 12 engages each other with gear wheel 14；Under the driving of servomotor 18, decelerator 8 drives little gear 12 to rotate, and the gear wheel 14 engaged with little gear 12 rotates, thus drives lower plate 5 to swing in slide rail 4.
Slide rail 4 described herein is arc-shaped rail, and the center of circle line of its center of circle line and gear wheel 14 at grade, to ensure slide block 3 smooth sliding in the slide rail 4 on boss 20 on side plate 2, thus drives lower plate 5 to swing steadily.
Described gear wheel 14 is partial gear, to limit the pendulum angle of connected lower plate 5；Servomotor 18 drives little gear 12 reciprocating rotation by decelerator 8, and little gear 12 drives gear wheel 14 reciprocating rotary, and gear wheel 14 drives lower plate 5 along slide rail 4 reciprocally swinging；The angle that described lower plate 5 swings in slide rail 4 is 0-7 °, and the hunting frequency of lower plate 5 and servomotor 18 control parameter and arrange relevant.
Fig. 4 is the fixing seat connection diagram with back plate of the present invention, and described fixing seat 9 is hinged with back plate 7 by bearing pin 10, and fixing seat 9 is connected with back plate 7 by two support shafts 11, and fixing seat 9 is connected with header board 6 by a support shaft 11；The external diameter of described bearing pin 10 is 0-0.02mm with the bore clearance coordinated on header board 6, and the external diameter of support shaft 11 is 3-5mm with the bore clearance coordinated in header board 6, back plate 7.So, the little gear 12 being arranged on fixing seat 9 has the swing gap of 0-3, and the flank of tooth of little gear 12 and gear wheel 14 can be made to tightly engage all the time, eliminates the impulsive force in cutting process, reduces the abrasion of gear 12 flank of tooth, improves gear life.
Fig. 5 is the guiding mechanism schematic diagram of the present invention, and it is made up of adjustment block 15, compression leg 16, butterfly spring 17 and jackscrew 19, and adjustment block 15 is arranged on fixing seat 9, and butterfly spring 17, compression leg 16 are successively set in the blind hole in adjustment block 15；Upper plate 1 is provided with screwed hole with the blind hole in adjustment block 15 relative to position, and jackscrew 19 fixes the compression leg 16 being positioned at butterfly spring 17 top by screwed hole.Guiding mechanism can make the flank of tooth of little gear and gear wheel tightly engage all the time, eliminates the impulsive force in cutting process, improves the service life of gear；Jackscrew 19 withstands compression leg 16 makes disk spring 17 deform, and makes little gear 12 swing and has certain rigidity.
Described little gear 12 is fixed on the output shaft of decelerator 8 by exempting from key axle bush 13.In the present embodiment, the speed reducing ratio of decelerator 8 is at 1:80, and gear wheel 14 is 1:5 with the gear ratio of little gear 12, and double reduction ratio for 1:400, so, the exportable enough moments of torsion of servomotor 18, effectively overcomes Cutting Drag, it is ensured that the cutting force of multi-wire saw equipment.
Described multi-wire cutting material cutting pendulum device also includes position-limit mechanism, and it is made up of proximity switch 21 and block 22；Position-limit mechanism is arranged in header board 6, back plate 7, is provided with gap between proximity switch 21 and baffle plate 22；Position-limit mechanism is arranged on the both sides of slide rail 4, and when effectively preventing lower plate 5 amplitude of fluctuation excessive, slide block 3 deviates from slide rail 4.
When using multi-wire cutting material cutting pendulum device of the present invention to cut superhard wafer, concrete operation step is as follows:
First, superhard wafer being fixed on the bottom of lower plate 5, detection all parts connects the most normal；
Then, the anglec of rotation of servomotor 18 and reciprocating frequency are set；
Then, starting the material pendulum device of multi-wire saw equipment, servomotor 18 drives little gear 12 reciprocating rotary by decelerator 8, and little gear 12 drives gear wheel 14 reciprocating rotary, and gear wheel 14 drives lower plate 5 along circular arc slide rail 4 reciprocally swinging.
The multi-wire cutting material cutting pendulum device that the present invention provides is applied to superhard Wafer Machining field, it is rational in infrastructure, compact in design, drives workpiece stable oscillation to be added, effectively solve the problem that wafer cutting force is not enough, cutting force is unstable, promote the cutting power of multi-wire saw equipment.
The present invention is not limited to above-mentioned embodiment; anyone can draw other various forms of products under the enlightenment of the present invention; though but in its shape or structure, make any change, every have same as the present application or akin technical scheme, within all falling within protection scope of the present invention.
Claims (9)
1. a multi-wire cutting material cutting pendulum device, including upper plate (1), lower plate (5), upper plate (1) is fixed on the pedestal of multi-wire saw equipment, and the bottom of lower plate (5) is fixed with workpiece to be processed；It is characterized in that, the both sides of upper plate (1) are provided with side plate (2), and the forward and backward side of upper plate (1) is provided with header board (6), back plate (7), and the upper parallel of lower plate (5) is provided with boss (20)；It is provided with guide rail mechanism, drive mechanism between upper plate (1) and lower plate (5)；Guide rail mechanism includes slide block (3), slide rail (4), and slide block (3) is arranged on the inner side of side plate (2), and slide rail (4) is arranged on the outside of boss (20), and the slide block (3) on side plate (2) is arranged on the slide rail (4) on boss (20) Nei；Drive mechanism includes decelerator (8), servomotor (18), little gear (12) and gear wheel (14), decelerator (8) is arranged on the fixing seat (9) hinged with back plate (7), little gear (12) is fixed on the output shaft of decelerator (8), gear wheel (14) is fixed on the top of lower plate (5), and little gear (12) engages each other with gear wheel (14)；Under the driving of servomotor (18), decelerator (8) drives little gear (12) to rotate, and the gear wheel (14) engaged with little gear (12) rotates, thus drives lower plate (5) to swing in slide rail (4).
The center of circle line of multi-wire cutting material cutting pendulum device the most according to claim 1, it is characterised in that described slide rail (4) is arc-shaped rail, its center of circle line and gear wheel (14) is at grade.
Multi-wire cutting material cutting pendulum device the most according to claim 1, it is characterised in that described gear wheel (14) is partial gear.
Multi-wire cutting material cutting pendulum device the most according to claim 1, it is characterized in that, described fixing seat (9) is hinged with back plate (7) by bearing pin (10), fixing seat (9) is connected with back plate (7) by two support shafts (11), and fixing seat (9) is connected with header board (6) by a support shaft (11).
Multi-wire cutting material cutting pendulum device the most according to claim 4, it is characterized in that, the external diameter of described bearing pin (10) is 0-0.02mm with the bore clearance coordinated in back plate (7), and the external diameter of support shaft (11) is 3-5mm with the bore clearance coordinated in header board (6), back plate (7).
Multi-wire cutting material cutting pendulum device the most according to claim 1, it is characterized in that, described multi-wire cutting material cutting pendulum device also includes guiding mechanism, it is made up of adjustment block (15), compression leg (16), butterfly spring (17) and jackscrew (19), adjustment block (15) is arranged on fixing seat (9), and butterfly spring (17), compression leg (16) are successively set in the blind hole in adjustment block (15)；Upper plate (1) is provided with screwed hole with the blind hole in adjustment block (15) relative to position, and jackscrew (19) is by the fixing compression leg (16) being positioned at butterfly spring (17) top of screwed hole.
Multi-wire cutting material cutting pendulum device the most according to claim 1, it is characterised in that described little gear (12) is fixed on the output shaft of decelerator (8) by exempting from key axle bush (13).
Multi-wire cutting material cutting pendulum device the most according to claim 1, it is characterised in that the angle that described lower plate (5) swings in slide rail (4) is 0-7 °.
Multi-wire cutting material cutting pendulum device the most according to claim 1, it is characterised in that described multi-wire cutting material cutting pendulum device also includes position-limit mechanism, it is made up of proximity switch (21) and block (22)；Position-limit mechanism is arranged in header board (6), back plate (7), is provided with gap between proximity switch (21) and baffle plate (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610273164.0A CN105922466A (en) | 2016-04-28 | 2016-04-28 | Multi-line cutting material swinging device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610273164.0A CN105922466A (en) | 2016-04-28 | 2016-04-28 | Multi-line cutting material swinging device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105922466A true CN105922466A (en) | 2016-09-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610273164.0A Pending CN105922466A (en) | 2016-04-28 | 2016-04-28 | Multi-line cutting material swinging device |
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| Country | Link |
|---|---|
| CN (1) | CN105922466A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109605592A (en) * | 2018-11-21 | 2019-04-12 | 烟台力凯数控科技有限公司 | A kind of sapphire rotary cutting apparatus |
| WO2024067755A1 (en) * | 2022-09-30 | 2024-04-04 | 青岛高测科技股份有限公司 | Wire cutting machine and control method therefor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0310760A (en) * | 1989-06-09 | 1991-01-18 | Nippon Spindle Mfg Co Ltd | Wire saw for cutting crystalline brittle material |
| CN203888047U (en) * | 2014-05-14 | 2014-10-22 | 无锡上机数控股份有限公司 | Swinging mechanism |
| CN104647622A (en) * | 2015-02-11 | 2015-05-27 | 苏州硅峰太阳能科技有限公司 | Oscillating efficient multi-thread squarer for silicon ingot |
-
2016
- 2016-04-28 CN CN201610273164.0A patent/CN105922466A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0310760A (en) * | 1989-06-09 | 1991-01-18 | Nippon Spindle Mfg Co Ltd | Wire saw for cutting crystalline brittle material |
| CN203888047U (en) * | 2014-05-14 | 2014-10-22 | 无锡上机数控股份有限公司 | Swinging mechanism |
| CN104647622A (en) * | 2015-02-11 | 2015-05-27 | 苏州硅峰太阳能科技有限公司 | Oscillating efficient multi-thread squarer for silicon ingot |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109605592A (en) * | 2018-11-21 | 2019-04-12 | 烟台力凯数控科技有限公司 | A kind of sapphire rotary cutting apparatus |
| CN109605592B (en) * | 2018-11-21 | 2023-08-29 | 烟台力凯数控科技有限公司 | Sapphire rotary cutting device |
| WO2024067755A1 (en) * | 2022-09-30 | 2024-04-04 | 青岛高测科技股份有限公司 | Wire cutting machine and control method therefor |
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| PB01 | Publication | ||
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160907 |