CN105911490A - Magnetic field sensor with self-check set lead - Google Patents
Magnetic field sensor with self-check set lead Download PDFInfo
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- CN105911490A CN105911490A CN201610315860.3A CN201610315860A CN105911490A CN 105911490 A CN105911490 A CN 105911490A CN 201610315860 A CN201610315860 A CN 201610315860A CN 105911490 A CN105911490 A CN 105911490A
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- magnetic field
- sensing cell
- field sensing
- magnetic
- rake
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/091—Constructional adaptation of the sensor to specific applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Measuring Magnetic Variables (AREA)
Abstract
The invention provides a magnetic field sensor, comprising a substrate possessing a first surface; a first bridge circuit comprising a plurality of first magnetic field sensing units; a second bridge circuit comprising a plurality of second magnetic field sensing units, wherein the magnetosensitive axes of all the first magnetic field sensing unit are parallel with each other and form first preset angles with the first surface, and the magnetosensitive axes of all the second magnetic field sensing unit are parallel with each other and form second preset angles with the first surface; and a self-check set lead which comprises first inclined parts located above or under the first magnetic field sensing units and parallel with the magnetosensitive axes of the first magnetic field sensing units, and seconds located above or under the second magnetic field sensing units and parallel with the magnetosensitive axes of the second magnetic field sensing units. Compared with the prior art, the magnetic field sensor can generate a magnetic field perpendicular to the Z-axis direction on a chip surface to be used for self-check based on a self-check set lead, and also generate a magnetic field along the magnetic easy axis direction of a magnetic field sensing unit to be used for set / reset.
Description
[technical field]
The present invention relates to magnetic field sensor, be capable of magnetic induction layer reset and self-inspection particularly to a kind of
Magnetic field sensor.
[background technology]
The magnetic field sensor being currently based on magnetoresistance has been applied very common, such as anisotropic magnetoresistive
(AMR) magnetic field sensor, giant magnetoresistance (GMR) magnetic field sensor and tunnel magneto (TMR) magnetic field pass
Sensor.
In general, magnetic field sensor based on magnetoresistance is when magnetic direction and size change, and device is electric
Resistance can change therewith.The structure of magnetic field sensor generally includes one layer of soft magnetic materials, such as iron, cobalt, nickel,
Ferro-cobalt boron alloy or dilval (permalloy) etc..When magnetic direction and size change, soft magnetic materials
The direction of magnetization of layer changes therewith, thus causes the change of resistance.
In order to obtain the exact value in magnetic field, before magnetic field sensor is measured, described soft magnetosphere needs to be reset.
Usual way is that logical super-high-current is strong to produce in the wire of the basic sensing unit of next-door neighbour's magnetic field sensor
Magnetic field, so that all of magnetic domain of basic sensing unit is all magnetized and arranges along magnetic easy axis direction, and
The direction of magnetic easy axis is determined by the anisotropy of the basic sensing unit of magnetic field sensor.Lead described in controlling
The sense of current flow through on line, the direction of magnetic domain can arrange along two contrary directions that magnetic easy axis is parallel.
Generally this operation is referred to as resetting (SET) and resetting (RESET) again.Except can be to the magnetic of soft magnetosphere
Changing and initialize, SET/RESET may also help in the magnetization recovering soft magnetosphere.If residing magnetic field sensing
Device is disturbed by extraneous high-intensity magnetic field, and interference magnetic field removes the magnetic domain of rear described soft magnetosphere and may not recover to initially
State, thus cause measure error.By reset/resetting, the arrangement of magnetic domain can be resumed again.
Along with the cost continuous decrease of magnetic field sensor chip, production test cost becomes at whole magnetic field sensor
Proportion in Ben is more and more higher.The especially production test of magnetic field sensor, except needs are used for testing common
Outside the equipment of electric property, in addition it is also necessary to the equipment in test magnetic field, such as Helmholtz coil can be produced
(Helmholtz coil), so can dramatically increase cost.
Can be on magnetic field sensor by externally-applied magnetic field generation device if corresponding test can need not
Complete, cost so can be greatly reduced.Such as, magnetic field sensor is made to be exposed to the magnetic of a known dimensions
In Chang, the reading of magnetic field sensor can compare with known magnetic field size to calibrate sensitivity, error and its
Its parameter.This known magnetic field can be produced by another wire of next-door neighbour's magnetic field sensor.Because generally
Additional test magnetic field is along sensitive axis direction and vertical with magnetic easy axis direction, it is therefore desirable to next-door neighbour's magnetic field sensing
Device places two independent set wires to complete SET/RESET and self-inspection.This needs to add in production technology
Double layer of metal, extra metal deposit and photoetching process can increase production cost.
Additionally, for the three-axis sensor of Single-Chip Integration, how magnetic susceptibility axle is perpendicular to the Z of chip plane
Axle sensing unit carries out the difficult problem that self-inspection on chip becomes bigger.
Therefore, it is necessary to provide the technical scheme of a kind of improvement to solve the problems referred to above.
[summary of the invention]
An object of the present invention is to provide the magnetic field sensor of a kind of improvement, and it resets based on same self-inspection
Wire just can produce along being perpendicular to the magnetic field of Z-direction of chip surface for self-inspection, it is also possible to produces edge
The magnetic field in the magnetic easy axis direction of magnetic field sensing cell is used for resetting/resetting.
In order to solve the problems referred to above, the present invention provides a kind of magnetic field sensor, comprising: substrate, it has
First surface；First bridge circuit, it includes multiple first magnetic field sensing cell；Second bridge circuit, its
Including multiple second magnetic field sensing cell, wherein said magnetic field sensing cell be respectively provided with magnetic easy axis and with described magnetic
The magnetosensitive axle that easily axle is vertical, the magnetic easy axis of each magnetic field sensing cell is parallel to each other, each first magnetic field sensing
The magnetosensitive axle of unit is parallel to each other and becomes the first predetermined angular with first surface, each second magnetic field sensing cell
Magnetosensitive axle be parallel to each other and become the second predetermined angular with first surface；Self-inspection resets wire, and it includes being positioned at
On or below first magnetic field sensing cell and parallel with the magnetosensitive axle of described first magnetic field sensing cell first
Rake, be positioned on or below the second magnetic field sensing cell and with the magnetosensitive of described second magnetic field sensing cell
Parallel the second rake of axle, be positioned on the first surface of described substrate and with the first surface of described substrate
Parallel par, wherein the first predetermined angular and the second predetermined angular are all higher than 0 degree less than 90 degree.
Further, described magnetic field sensor also includes: be positioned on the first surface of described substrate is multiple convex
Block, each projection includes the first relative inclined surface and the second inclined surface, the first inclined surface relative to
First surface becomes the first predetermined angular, and the second inclined surface becomes the second predetermined angular, institute relative to first surface
Stating projection is lengthwise bar shaped, and its bearing of trend is all parallel with described magnetic easy axis direction, the first magnetic field sensing cell
Being positioned on the first inclined surface of described projection with the first rake, the second magnetic field sensing cell and second inclines
Tiltedly portion is positioned on the second inclined surface of described projection.
Further, described protuberance is trapezoidal cross-section, and it has end face, and described self-inspection resets wire and also wraps
Include and be positioned on the end face of the plurality of projection and the connecting portion parallel with described end face, described connecting portion
Between the top of the first rake and the second rake, between the bottom of the first rake and the second rake
There is par.
Further, each protuberance is triangular cross section, described self-inspection reset wire the first rake with
The top of the second rake is connected, and has par between the bottom of the first rake and the second rake.
Further, the first magnetic field sensing cell between the first inclined surface and the first rake, second
Magnetic field sensing cell between the second inclined surface and the second rake, or, the first rake is positioned at
Between one magnetic field sensing cell and the first inclined surface, the second rake is positioned at the second magnetic field sensing cell and is positioned at
Between second inclined surface.
Further, described magnetic field sensor also includes: be arranged at the first magnetic field sensing cell, the second magnetic field
Sensing unit and described self-inspection reset the insulating barrier between wire.
Further, the extension of described self-inspection replacement wire is formed spiral-shaped, across multiple first magnetic field sensings
Unit and multiple second magnetic field sensing cell, it has the first connection end and second and connects end.
Further, described magnetic field sensor has replacement/reset pattern and Auto-Sensing Mode again, reset/is weighing again
When putting pattern, make described self-inspection reset on wire and flow through the first electric current, produce the first magnetic field, this first magnetic field
Reset/reset this first magnetic field sensing cell again and the second magnetic field sensing cell makes this first magnetic field sensing cell
With the direction that the magnetic domain direction of the second magnetic field sensing cell returns to described magnetic easy axis；When Auto-Sensing Mode, make institute
Stating self-inspection and reset the second electric current flowing through precognition on wire, produce the second magnetic field of precognition, this second magnetic field makes
The magnetic resistance obtaining the first magnetic field sensing cell and the second magnetic field sensing cell changes, thus realizes Z axis magnetic field
The self-inspection of sensing, Z axis is the axle being perpendicular to first surface, and this second electric current is less than the first electric current.
Further, described magnetic field sensing cell includes extending lengthwise magnetoresistive strip and formation along its magnetic easy axis direction
With on described magnetoresistive strip and become several bus being parallel to each other of predetermined angle with described magnetoresistive strip, its
Described in magnetoresistive strip be made up of iron, cobalt, nickel, ferro-cobalt boron alloy or dilval.
Further, described magnetic field sensor also includes: the 3rd bridge circuit, and it includes multiple 3rd magnetic field
Sensing unit, wherein the 3rd magnetic field sensing cell has magnetic easy axis and the magnetosensitive axle vertical with described magnetic easy axis,
The magnetic easy axis of each the 3rd magnetic field sensing cell magnetic easy axis parallel to each other and with the first magnetic field sensing cell is hung down
Directly, the magnetosensitive axle of each the 3rd magnetic field sensing cell is parallel to each other and parallel with first surface.
Further, the first predetermined angular and the second predetermined angular are all higher than 30 degree less than 50 degree.
Compared with prior art, oneself the most adjacent with the magnetic field sensing cell of Y/Z axle is set in the present invention
Wire is put in check weighing, and it can produce along being perpendicular to the magnetic field of Z-direction of chip surface for self-inspection, also may be used
It is used for resetting/resetting again along the magnetic field in the magnetic easy axis direction of magnetic field sensing cell with generation.
[accompanying drawing explanation]
In order to be illustrated more clearly that the technical scheme of the embodiment of the present invention, required in embodiment being described below
Accompanying drawing to be used is briefly described, it should be apparent that, the accompanying drawing in describing below is only the present invention's
Some embodiments, for those of ordinary skill in the art, on the premise of not paying creative work,
Other accompanying drawing can also be obtained according to these accompanying drawings.Wherein:
Fig. 1 shows the structure principle chart of a kind of triaxial magnetic field sensor in the present invention；
Fig. 2 show the Y/Z axle magnetic field sensor in the triaxial magnetic field sensor in Fig. 1 along hatching A-A
Cross-sectional schematic；
Fig. 3 shows that the Y/Z axle magnetic field sensor in the triaxial magnetic field sensor in the present invention is an enforcement
Structural principle schematic diagram in example；
Fig. 4 show the Y/Z axle magnetic field sensor in the triaxial magnetic field sensor in Fig. 3 along hatching B-B
Cross-sectional schematic.
[detailed description of the invention]
Understandable for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from, below in conjunction with the accompanying drawings and
The present invention is further detailed explanation for detailed description of the invention.
" embodiment " or " embodiment " referred to herein refers to may be included at least one realization side of the present invention
Special characteristic, structure or characteristic in formula.Different in this manual local " in one embodiment " occurred
Not refer both to same embodiment, be not single or the most mutually exclusive with other embodiments reality
Execute example.Unless stated otherwise, connection herein, be connected, connect represent that the word being electrically connected with all represents
Directly or indirectly it is electrical connected, is indirectly electrical connected and refers to be electrical connected via another one device or circuit.
Refer to shown in Fig. 1, it is that the principle in the single-chip tri-axis magnetic field sensor 100 in the present invention is shown
It is intended to.Refer to shown in Fig. 2, it illustrates the Y/Z axle magnetic field in the triaxial magnetic field sensor in Fig. 1 and pass
The cross-sectional schematic along hatching A-A of sensor.
Shown in Fig. 1 and Fig. 2, described triaxial magnetic field sensor 100 includes: have first surface 211
Substrate 210, multiple projections the 111, first favour of being formed on the first surface 211 of described substrate 210 this
Energising bridge circuit, the second wheatstone bridge circuits and the 3rd wheatstone bridge circuits 120.
Described substrate 210 can be silicon substrate, and it can also be referred to as substrate.
Each projection 111 includes the first relative inclined surface 1111 and the second inclined surface 1112.First inclines
Skewed surface 1111 becomes the first predetermined angular relative to first surface 211, the second inclined surface 1112 relative to
First surface 211 becomes the second predetermined angular, described projection to be lengthwise bar shaped, and their bearing of trend is the most flat
OK.
First wheatstone bridge circuits includes being formed on the first inclined surface 1111 of described projection 111 many
Individual first magnetic field sensing cell 112, the first inclined surface 1111 of the most each projection 111 is provided with one
Individual first magnetic field sensing cell 112.First magnetic field sensing cell 112 has magnetic easy axis and hangs down with described magnetic easy axis
Straight magnetosensitive axle, the magnetic easy axis of each the first magnetic field sensing cell 112 parallel to each other and with described projection 111
Bearing of trend parallel, as shown in Figure 1, the magnetic easy axis of the first magnetic field sensing cell 112 is parallel with X-axis.
The magnetosensitive axle of each the first magnetic field sensing cell 112 is parallel to each other and becomes the first predetermined angle with first surface 211
Degree.
Second wheatstone bridge circuits includes being formed on the second inclined surface 1112 of described projection 111 many
Individual second magnetic field sensing cell 113.Second magnetic field sensing cell 113 has magnetic easy axis and hangs down with described magnetic easy axis
Straight magnetosensitive axle, the magnetic easy axis of each the second magnetic field sensing cell 113 parallel to each other and with described projection 111
Bearing of trend parallel, as shown in Figure 1, the magnetic easy axis of the second magnetic field sensing cell 113 is parallel with X-axis.
The magnetosensitive axle of each the second magnetic field sensing cell 113 is parallel to each other and becomes the second predetermined angle with first surface 211
Degree.
First predetermined angular and the second predetermined angular are all higher than 0 degree less than 90 degree.Preferably, the first predetermined angle
Degree and the second predetermined angular are all higher than 30 degree and are less than 50 degree, such as 30 degree, 40 degree, 50 degree.
3rd wheatstone bridge circuits 120 includes multiple 3rd magnetic field sensing cell 121, and wherein the 3rd magnetic field passes
Sense unit 121 has magnetic easy axis and the magnetosensitive axle vertical with described magnetic easy axis, each the 3rd magnetic field sensing cell
The magnetic easy axis of 121 is parallel to each other and vertical with the magnetic easy axis of the first magnetic field sensing cell 112, each the 3rd magnetic field
The magnetosensitive axle of sensing unit 121 is parallel to each other and parallel with first surface 211.As shown in Figure 1, described
The magnetic easy axis of the 3rd magnetic field sensing cell 121 is parallel with Y-axis, and magnetosensitive axle is parallel with X-axis.
As shown in Figure 2, described triaxial magnetic field sensor 100 also includes and is formed at each magnetic field sensing list
Insulating barrier 220 in unit 112,113 and 121.
Each magnetic field sensing cell (includes each first magnetic field sensing cell 112, each second magnetic field sensing list
Unit 113 and each 3rd magnetic field sensing cell 121) include extending lengthwise magnetoresistive strip and shape along its magnetic easy axis direction
Become with on described magnetoresistive strip and become several bus being parallel to each other of predetermined angle with described magnetoresistive strip,
Wherein said magnetoresistive strip is made up of iron, cobalt, nickel, ferro-cobalt boron alloy or dilval.
As shown in Figure 1, described first wheatstone bridge circuits also include power end U1, earth terminal GND,
First output VO1+, the second output VO1-, each first magnetic field sensing cell 112 is connected to power supply
End is between U1, earth terminal GND, the first output VO1+, the second output VO1-.Described second favour
Stone bridge circuit also includes power end U2, earth terminal GND, the first output VO2+, the second output
End VO2-, each second magnetic field sensing cell 113 is connected to power end U2, earth terminal GND, first defeated
Go out to hold between VO2+, the second output VO2-.Described 3rd wheatstone bridge circuits also includes power end
U3, earth terminal GND, the first output VOX+, the second output VOX-, each the 3rd magnetic field sensing
Unit 121 is connected to power end U3, earth terminal GND, the first output VOX+, the second output VOX-
Between.
3rd wheatstone bridge circuits 120 can sense the magnetic field of X-direction, and therefore it can also be referred to as
X-axis magnetic field sensor.Assume that its output signal is Sx, have:
[Sx]=[VOX+] [VOX-].
It is assumed that the output signal of described first wheatstone bridge circuits is S1, then have:
[S1]=[VO1+] [VO1-].
It is assumed that the output signal of described second wheatstone bridge circuits is S2, then have:
[S2]=[VO2+]-[VO2-].
First wheatstone bridge circuits and the second wheatstone bridge circuits can sense the magnetic field of Y direction jointly
Can pass through S1's and S2 with magnetic field intensity signal Sy and the Sz of the magnetic field of Z-direction, Y-axis and Z axis
Being calculated, therefore the first wheatstone bridge circuits and the second wheatstone bridge circuits may be collectively termed as Y/Z
Axle magnetic field sensor.Here the embodiment of a kind of computational methods is provided: identical at U1 with U2 supply voltage
Under the conditions of, and the condition that the magnetic field sensing cell sensitivity of described first and second wheatstone bridge circuits is identical
Under have:
[Sy]=[S1]-[S2]；
[Sz]=[S1]+[S2].
In FIG, Y/Z axle magnetic field sensor and X-axis magnetic field sensor are integrated in same chip.
Fig. 3 shows that the Y/Z axle magnetic field sensor 110 ' in the triaxial magnetic field sensor in the present invention is one
Structural principle schematic diagram in individual embodiment；Fig. 4 shows the Y/Z in the triaxial magnetic field sensor in Fig. 3
The cross-sectional schematic along hatching B-B of axle sensor.
Triaxial magnetic field sensor in Fig. 3 structurally can phase basic with the triaxial magnetic field sensor in Fig. 1
With, the first surface also include the substrate 210 with first surface 211, being formed at described substrate 210
Multiple projections the 111, first wheatstone bridge circuits, the second wheatstone bridge circuits and the 3rd favour on 211 this
Energising bridge circuit (not shown).First wheatstone bridge circuits also include power end U1, earth terminal GND,
First output VO1+, the second output VO1-and connection multiple first magnetic field sensings between which
Unit 112, described second wheatstone bridge circuits also includes power end U2, earth terminal GND, first defeated
Go out to hold VO2+, the second output VO2-and connect multiple second magnetic field sensing cell between which
113。
Triaxial magnetic field sensor in Fig. 3 is with the difference of the triaxial magnetic field sensor in Fig. 1: figure
Triaxial magnetic field sensor in 3 also includes leap the first wheatstone bridge circuits and the second Wheatstone bridge electricity
The self-inspection on road resets wire 310.
Described self-inspection resets wire 310 and includes being positioned on the first magnetic field sensing cell 112 and with described first
Parallel the first rake 311 of the magnetosensitive axle of magnetic field sensing cell 112, it is positioned at the second magnetic field sensing cell 112
On and second rake 312 parallel with the magnetosensitive axle of described second magnetic field sensing cell 112, be positioned at described
On the first surface 211 of the substrate 210 and par parallel with the first surface 211 of described substrate 210
313.Wherein insulating barrier 220 is arranged at first magnetic field sensing cell the 112, second magnetic field sensing cell 113 and
Described self-inspection resets between wire 310.So, the first magnetic field sensing cell 112 and the first rake 311
It is formed on the first inclined surface 1111 of described projection 111, the second magnetic field sensing cell 113 and second
Rake 312 is formed on the second inclined surface 1111 of described projection 111.
As shown in Figure 3, described protuberance 111 is trapezoidal cross-section, and it has end face.Described self-inspection resets
Wire 310 also includes on the end face being positioned at the plurality of projection 111 and the connection parallel with described end face
Portion 314, described connecting portion 314 between the first rake 311 and the top of the second rake 312,
Between one rake 311 and the bottom of the second rake 312, there is par 313.In another embodiment,
Described protuberance is triangular cross section, and the most described self-inspection resets first rake 311 and the of wire 310
The top of two rakes 312 is joined directly together, between the first rake 311 and the bottom of the second rake 312
There is par 313.
Described self-inspection resets wire 310 extension and is formed spiral-shaped, across multiple first magnetic field sensing cell 112
With multiple second magnetic field sensing cell 113, it has the first connection end UC+ and second and connects end UC-.
Described triaxial magnetic field sensor has replacement/reset pattern and Auto-Sensing Mode again.Reset/reset pattern again
Time, make described self-inspection reset on wire 310 and flow through the first electric current, now produce the first magnetic field, this first magnetic
The X-axis component of field reset/resets this first magnetic field sensing cell 112 again and the second magnetic field sensing cell 113 makes
Obtaining the magnetic domain direction of this first magnetic field sensing cell 112 and the second magnetic field sensing cell 113, to return to described magnetic easy
The direction of axle.When Auto-Sensing Mode, described self-inspection is made to reset the second electric current flowing through precognition on wire 310,
Now producing the second magnetic field of precognition, the z-component in this second magnetic field makes the first magnetic field sensing cell and
The magnetic resistance of two magnetic field sensing cell changes, thus realizes the self-inspection of Z axis, and this second electric current is less than first
Electric current.
Described self-inspection resets wire 310 and may be located on insulating barrier 220, by semiconductor technology such as film
Deposition or electroplating technology are formed.In another embodiment, it is also possible to described in first being formed on projection 110 certainly
Wire 310 is put in check weighing, resets to be formed on wire 310 in described self-inspection afterwards and insulate into 220, is formed
First magnetic field sensor unit 112 and the second magnetic field sensor unit 113.
So, reset wire 310 by arranging one layer of self-inspection, both can realize the first magnetic field sensing cell 112
Replacement with the second magnetic field sensing cell 113/reset again, can realize again the Z axis of Y/Z axle magnetic field sensor
Self-inspection, simplifies design, reduces cost.
It is pointed out that what the detailed description of the invention of the present invention done by one skilled in the art appoints
What changes the scope all without departing from claims of the present invention.Correspondingly, the model of the claim of the present invention
Enclose and be also not limited only to previous embodiment.
Claims (11)
1. a magnetic field sensor, it is characterised in that comprising:
Substrate, it has first surface；
First bridge circuit, it includes multiple first magnetic field sensing cell；
Second bridge circuit, it includes multiple second magnetic field sensing cell, and wherein said magnetic field sensing cell is equal
Having magnetic easy axis and the magnetosensitive axle vertical with described magnetic easy axis, the magnetic easy axis of each magnetic field sensing cell is the most equal
OK, the magnetosensitive axle of each the first magnetic field sensing cell is parallel to each other and becomes the first predetermined angular with first surface,
The magnetosensitive axle of each the second magnetic field sensing cell is parallel to each other and becomes the second predetermined angular with first surface；
Self-inspection resets wire, it include being positioned on or below the first magnetic field sensing cell and with described first magnetic
Parallel the first rake of the magnetosensitive axle of sensing unit, be positioned on or below the second magnetic field sensing cell and
Second rake parallel with the magnetosensitive axle of described second magnetic field sensing cell, it is positioned at the first table of described substrate
On face and the par parallel with the first surface of described substrate,
Wherein the first predetermined angular and the second predetermined angular are all higher than 0 degree less than 90 degree.
Magnetic field sensor the most according to claim 1, it is characterised in that it also includes: be positioned at described
Multiple projections on the first surface of substrate,
Each projection includes the first relative inclined surface and the second inclined surface, the first inclined surface relative to
First surface becomes the first predetermined angular, and the second inclined surface becomes the second predetermined angular, institute relative to first surface
Stating projection is lengthwise bar shaped, and its bearing of trend is all parallel with described magnetic easy axis direction,
First magnetic field sensing cell and the first rake are positioned on the first inclined surface of described projection,
Second magnetic field sensing cell and the second rake are positioned on the second inclined surface of described projection.
Magnetic field sensor the most according to claim 2, it is characterised in that
Described protuberance is trapezoidal cross-section, and it has end face,
Described self-inspection resets wire and also includes on the end face being positioned at the plurality of projection and put down with described end face
Row connecting portion, described connecting portion between the top of the first rake and the second rake,
Between the bottom of the first rake and the second rake, there is par.
Magnetic field sensor the most according to claim 2, it is characterised in that
Each protuberance is triangular cross section,
The top of the first rake and the second rake that described self-inspection resets wire is connected,
Between the bottom of the first rake and the second rake, there is par.
Magnetic field sensor the most according to claim 2, it is characterised in that
First magnetic field sensing cell between the first inclined surface and the first rake, the second magnetic field sensing list
First between the second inclined surface and the second rake, or,
First rake is between the first magnetic field sensing cell and the first inclined surface, and the second rake is positioned at
Second magnetic field sensing cell is between the second inclined surface.
Magnetic field sensor the most according to claim 1, it is characterised in that it also includes:
It is arranged at the first magnetic field sensing cell, the second magnetic field sensing cell and described self-inspection to reset between wire
Insulating barrier.
Magnetic field sensor the most according to claim 1, it is characterised in that described self-inspection resets wire and prolongs
Stretch formation spiral-shaped, across multiple first magnetic field sensing cell and multiple second magnetic field sensing cell, its tool
The first connection end and second is had to connect end.
Magnetic field sensor the most according to claim 1, it is characterised in that it has replacement/reset mould again
Formula and Auto-Sensing Mode,
Resetting/when resetting pattern again, make described self-inspection reset on wire and flow through the first electric current, produce the first magnetic
, this first magnetic field reset/resets this first magnetic field sensing cell again and the second magnetic field sensing cell make this
The magnetic domain direction of one magnetic field sensing cell and the second magnetic field sensing cell returns to the direction of described magnetic easy axis；
When Auto-Sensing Mode, make described self-inspection reset the second electric current flowing through precognition on wire, produce precognition
Second magnetic field, this second magnetic field makes the magnetic resistance of the first magnetic field sensing cell and the second magnetic field sensing cell occur
Change, thus realize the self-inspection of Z axis magnetic field induction, Z axis is the axle being perpendicular to first surface,
This second electric current is less than the first electric current.
Magnetic field sensor the most according to claim 1, it is characterised in that described magnetic field sensing cell bag
Include and extend lengthwise magnetoresistive strip and formation along its magnetic easy axis direction with on described magnetoresistive strip and become with described magnetoresistive strip
Several bus being parallel to each other of predetermined angle, wherein said magnetoresistive strip is by iron, cobalt, nickel, ferro-cobalt boron
Alloy or dilval are made.
Magnetic field sensor the most according to claim 1, it is characterised in that it also includes:
3rd bridge circuit, it includes multiple 3rd magnetic field sensing cell, wherein the 3rd magnetic field sensing cell tool
Having magnetic easy axis and the magnetosensitive axle vertical with described magnetic easy axis, the magnetic easy axis of each the 3rd magnetic field sensing cell is mutual
Parallel and vertical with the magnetic easy axis of the first magnetic field sensing cell, the magnetosensitive axle phase of each the 3rd magnetic field sensing cell
The most parallel and parallel with first surface.
11. magnetic field sensors according to claim 1, it is characterised in that the first predetermined angular and
Two predetermined angulars are all higher than 30 degree less than 50 degree.
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| CN201610315860.3A CN105911490B (en) | 2016-05-12 | 2016-05-12 | Magnetic field sensor with self-test resetting conducting wire |
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|---|---|---|---|
| CN201610315860.3A CN105911490B (en) | 2016-05-12 | 2016-05-12 | Magnetic field sensor with self-test resetting conducting wire |
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| CN105911490B CN105911490B (en) | 2018-06-15 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107305241A (en) * | 2017-06-26 | 2017-10-31 | 美新微纳传感系统有限公司 | A kind of magnetic sensing device and its real-time self checking method |
| CN108318838A (en) * | 2018-03-06 | 2018-07-24 | 美新半导体（无锡）有限公司 | It is provided with the magnetic resistance sensor of self-test coil |
| CN108363025A (en) * | 2018-05-14 | 2018-08-03 | 美新半导体（无锡）有限公司 | Magnetic field sensor |
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