CN107305241A - A kind of magnetic sensing device and its real-time self checking method - Google Patents
A kind of magnetic sensing device and its real-time self checking method Download PDFInfo
- Publication number
- CN107305241A CN107305241A CN201710492907.8A CN201710492907A CN107305241A CN 107305241 A CN107305241 A CN 107305241A CN 201710492907 A CN201710492907 A CN 201710492907A CN 107305241 A CN107305241 A CN 107305241A
- Authority
- CN
- China
- Prior art keywords
- self
- magnetic field
- inspection
- magnetic
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/07—Hall effect devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
Abstract
The present invention relates to a kind of magnetic sensing device and its real-time self checking method.The magnetic sensing device includes self-inspection coil, Magnetic Sensor and signal processing circuit.High frequency self-inspection electric current is loaded in self-inspection coil to produce high frequency self-inspection magnetic field；Magnetic Sensor detects that high frequency self-inspection magnetic field and lower frequency external magnetic field obtain magnetic field induction signal simultaneously；Signal processing circuit field signal outside isolated high frequency self-test signal and low frequency from magnetic field induction signal.Amplitude based on high frequency self-test signal judge Magnetic Sensor whether saturation, sensitivity calibration can also be done.The real-time self checking method of magnetic sensing device of the present invention, obtains the self-test signal and outer field signal of Magnetic Sensor in real time, and self-test signal does not interfere with the detection of outer field signal.
Description
Technical field
The present invention relates to a kind of self checking method of magnetic sensing device, more particularly to a kind of magnetic sensing device and its real-time self-inspection
Method.
Background technology
Currently existing scheme all without reference to magnetic sensing device frequency applications occasion real-time self-inspection.It is based particularly on AMR,
The saturation detection of the sensor of the technologies such as GMR, TMR and sensitivity calibration.By taking AMR magnetic sensing devices as an example, work as external magnetic field
After certain limit, magnetic sensing device output zero-signal now can not judge Magnetic Sensor by the output of magnetic sensing device
Whether saturation.
In addition, the magnetic field detection of magnetic sensing device and self-inspection are generally all performed respectively in the prior art, this causes
During self-inspection, it is impossible to carry out magnetic field detection.
Therefore, it is necessary to propose a kind of scheme to solve the above problems.
The content of the invention
The present invention proposes a kind of magnetic sensing device and its self checking method, and it can obtain the self-inspection letter of magnetic sensing device in real time
Number and outer field signal, self-test signal do not interfere with the detection of normal outer field signal.
To solve the above problems, according to an aspect of the present invention, the present invention propose a kind of magnetic sensing device in real time from
Detecting method, the magnetic sensing device includes self-inspection coil, Magnetic Sensor and signal processing circuit, the real-time self checking method bag
Include：Apply the high frequency self-inspection magnetic field that high frequency self-inspection electric current produces first frequency in the self-inspection coil；External magnetic field is second
The lower frequency external magnetic field of frequency, wherein first frequency are higher than second frequency；Magnetic Sensor induction of high frequency self-inspection magnetic field and low simultaneously
Frequency external magnetic field obtains magnetic field induction signal, and sends magnetic field induction signal to signal processing circuit, signal processing circuit base
Field signal outside high frequency self-test signal and low frequency is obtained in magnetic field induction signal, the Magnetic Sensor is entered based on high frequency self-test signal
Row self-inspection is calibrated.
Further, the frequency of high frequency self-inspection electric current be it is fixed, adjustable, or multi-frequency combination, outside low frequency
Portion magnetic field is the low frequency magnetic field of direct current or string ripple.
According to another aspect of the present invention, the present invention proposes a kind of real-time self checking method of magnetic sensing device, the magnetic
Sensing device includes self-inspection coil, Magnetic Sensor and signal processing circuit.The real-time self checking method includes：In the self-inspection line
Apply self-inspection electric current in circle and produce self-inspection magnetic field, the direction in the self-inspection magnetic field of each sensor unit of Magnetic Sensor is set, made
The self-inspection magnetic field can be reflected by obtaining the common-mode signal of Magnetic Sensor output；External magnetic field is lower frequency external magnetic field, by outside low frequency
Portion magnetic field is carried in the differential mode output end of Magnetic Sensor, and the difference mode signal of the Magnetic Sensor output can reflect the outside magnetic
；Magnetic Sensor senses self-inspection magnetic field simultaneously and external magnetic field obtains magnetic field induction signal, and magnetic field induction signal is sent to
Signal processing circuit, signal processing circuit obtains common mode self-test signal and the outer field signal of differential mode based on magnetic field induction signal, passes through
Common mode self-test signal carries out self-inspection calibration to the Magnetic Sensor.
Further, self-inspection electric current be direct current, square wave or string ripple electric current, the frequency of self-inspection electric current be it is fixed,
It is adjustable, or multi-frequency combination, external magnetic field is the low frequency magnetic field of direct current or string ripple.
Further, the Magnetic Sensor includes the first sensor being connected between power end and the first output end V+
Unit, is connected to the first output end V+ and earth terminal second sensor unit, is connected between power end and the second output end V-
Sensor unit, be connected to the sensor unit between the second output end V- and earth terminal, first sensor unit and second
The direction in the self-inspection magnetic field of sensor unit is identical, the direction in the self-inspection magnetic field of 3rd sensor unit and the 4th sensor unit
It is identical, the self-inspection magnetic field of first sensor unit and 3rd sensor unit it is in opposite direction, external magnetic field is in four sensors
The direction of unit is identical.
According to a further aspect of the invention, the present invention provides a kind of magnetic sensing device, and the magnetic sensing device is included certainly
Coil, Magnetic Sensor and signal processing circuit are examined, applies high frequency self-inspection electric current in the self-inspection coil and produces first frequency
High frequency self-inspection magnetic field；External magnetic field is the lower frequency external magnetic field of second frequency, and wherein first frequency is higher than second frequency；Magnetic is sensed
Induction of high frequency self-inspection magnetic field and lower frequency external magnetic field obtain magnetic field induction signal to device simultaneously, and send magnetic field induction signal to letter
Number process circuit, signal processing circuit obtains high frequency self-test signal and the outer field signal of low frequency based on magnetic field induction signal, based on height
Frequency self-test signal carries out self-inspection calibration to the Magnetic Sensor.
Further, the frequency of high frequency self-inspection electric current be it is fixed, adjustable, or multi-frequency combination, outside low frequency
Portion magnetic field is the low-frequency magnetic of direct current or string ripple, and amplitude or phase information of the signal processing circuit based on high frequency self-test signal judge
Magnetic Sensor whether saturation, and carry out Magnetic Sensor self-inspection calibration.
According to a further aspect of the invention, the present invention provides a kind of magnetic sensing device, and the magnetic sensing device is included certainly
Examine coil, Magnetic Sensor and signal processing circuit.Apply self-inspection electric current in the self-inspection coil and produce self-inspection magnetic field, magnetic is set
The direction in the self-inspection magnetic field of each sensor unit of sensor so that the common-mode signal of Magnetic Sensor output can reflect described
Self-inspection magnetic field；External magnetic field is lower frequency external magnetic field, and lower frequency external magnetic field is carried in the differential mode output end of Magnetic Sensor, described
The difference mode signal of Magnetic Sensor output can reflect the external magnetic field；Magnetic Sensor senses self-inspection magnetic field and external magnetic field simultaneously
Magnetic field induction signal is obtained, and sends magnetic field induction signal to signal processing circuit, signal processing circuit is based on magnetic field induction
Signal obtains common mode self-test signal and the outer field signal of differential mode, and self calibration is carried out to the Magnetic Sensor by common mode self-test signal
It is accurate.
Further, the Magnetic Sensor includes the first sensor being connected between power end and the first output end V+
Unit, is connected to the first output end V+ and earth terminal second sensor unit, is connected between power end and the second output end V-
Sensor unit, be connected to the sensor unit between the second output end V- and earth terminal, first sensor unit and second
The direction in the self-inspection magnetic field of sensor unit is identical, the direction in the self-inspection magnetic field of 3rd sensor unit and the 4th sensor unit
It is identical, the self-inspection magnetic field of first sensor unit and 3rd sensor unit it is in opposite direction, external magnetic field is in four sensors
The direction of unit is identical.
Compared with prior art, the magnetic sensing device in the present invention can sense self-inspection magnetic field and external magnetic field simultaneously, from
And self-test signal and outer field signal are obtained, it can so cause self-test signal not interfere with the detection of normal outer field signal.
Brief description of the drawings
The magnetic sensing device that Fig. 1 provides for the first embodiment of the present invention based on first scheme it is real-time from procuratorial organ
The structural representation of method, wherein self-inspection electric current are high frequency string ripple signal, and external magnetic field is direct current signal.
The real-time self-inspection for the magnetic sensing device that Fig. 2 provides for second embodiment of the present invention based on first scheme
The structural representation of method, wherein self-inspection electric current are high frequency string ripple signal, and external magnetic field is low frequency string ripple signal.
The magnetic sensing device that Fig. 3 provides for the first embodiment of the present invention based on alternative plan it is real-time from procuratorial organ
The structural representation of method.Wherein self-inspection electric current is direct current signal, and external magnetic field is direct current signal.
The magnetic sensing device that Fig. 4 provides for the second embodiment of the present invention based on alternative plan it is real-time from procuratorial organ
The structural representation of method.Wherein self-inspection electric current is positive and negative square-wave signal, and external magnetic field is direct current signal.
The magnetic sensing device that Fig. 5 provides for the 3rd embodiment of the present invention based on alternative plan it is real-time from procuratorial organ
The structural representation of method.Wherein self-inspection electric current is string ripple signal, and external magnetic field is direct current signal.
Embodiment
The embodiment that the invention will now be described in detail with reference to the accompanying drawings.
Refer to shown in Fig. 1, the first embodiment of the invention based on first scheme discloses a kind of magnetic sensing device
Real-time self checking method.The magnetic sensing device 100 includes self-inspection coil 101a, Magnetic Sensor 103 and signal processing circuit
104.High frequency self-inspection electric current is loaded in self-inspection coil 101a, high frequency self-inspection magnetic field 101b is produced；External magnetic field 102a is direct current
The magnetic field 102b of form.Magnetic Sensor 103 detects self-inspection magnetic field 101b and external magnetic field 102b and obtains magnetic field induction letter simultaneously
Number.Signal processing circuit 104 separates low-and high-frequency signal from magnetic field induction signal, while obtaining high frequency self-test signal 105 and straight
The outer field signal 106 of stream.The information such as amplitude, phase based on high frequency self-test signal 105 judge Magnetic Sensor whether saturation, Yi Jijin
The sensitivity calibration of row Magnetic Sensor.The Magnetic Sensor 103 is Hall (Hall) sensor, AMR (Anisotropic
Magneto Resistance) sensor, GMR (Giant Magneto Resistance) sensor, or TMR
(Tunneling Magneto Resistance) sensor.The real-time self checking method of the magnetic sensing device, obtains magnetic in real time
The self-test signal of sensor and outer field signal (i.e. the induced signal of external magnetic field), self-test signal do not interfere with normal outer field signal
Detection.
Refer to shown in Fig. 2, the second embodiment of the invention based on first scheme discloses a kind of magnetic sensing device
Real-time self checking method.The magnetic sensing device 200 includes self-inspection coil 201a, Magnetic Sensor 203 and signal processing circuit
204.High frequency self-inspection electric current is loaded in self-inspection coil 201a, high frequency self-inspection magnetic field 201b is produced；External magnetic field 202a is string ripple
The magnetic field 202b of form.Magnetic Sensor 203 detects self-inspection magnetic field 201b and external magnetic field 202b and obtains magnetic field induction letter simultaneously
Number.Signal processing circuit 204 separates low-and high-frequency signal from magnetic field induction signal, while obtaining the chord of high frequency self-test signal 205
The outer field signal 206 of ripple.The information such as amplitude, phase based on high frequency self-test signal 205 judge Magnetic Sensor whether saturation, Yi Jijin
The sensitivity calibration of row Magnetic Sensor.Magnetic Sensor 203 is Hall (Hall) sensor, AMR sensor, GMR, or
TMR sensor.The real-time self checking method 200 of the magnetic sensing device, obtains the self-test signal and outfield letter of Magnetic Sensor in real time
Number, self-test signal does not interfere with the detection of normal outer field signal.
The above-described self-inspection coil based on first scheme, wherein the frequency of the high frequency self-inspection electric current loaded can be solid
It is fixed or adjustable, or multi-frequency combination, it can produce the high frequency self-inspection magnetic field of first frequency；It is outside
Magnetic field can be direct current, string ripple, or any form of low frequency magnetic field, and the frequency of its external magnetic field can be the second frequency
Rate, and first frequency is higher than second frequency.
Refer to shown in Fig. 3, the first embodiment of the invention based on alternative plan discloses a kind of magnetic sensing device
Real-time self checking method, the magnetic sensing device 300a includes self-inspection coil 301a, Magnetic Sensor 303 and signal processing circuit
304.By loading the self-inspection electric current of DC form in self-inspection coil 301a, the self-inspection magnetic field 301b of DC form is produced, if
Put the self-inspection magnetic field 301b of each sensor unit of Magnetic Sensor 303 direction so that the common mode letter that Magnetic Sensor 303 is exported
Number it can reflect the self-inspection magnetic field；External magnetic field (also sometimes referred to as outfield) 302a is the magnetic field 302b of DC form, institute
The external magnetic field can be reflected by stating the difference mode signal of the output of Magnetic Sensor 303.Magnetic Sensor 303 can be Hall sensor,
AMR sensor, GMR or TMR sensor.300b discloses the detailed construction of Magnetic Sensor 303, the Magnetic Sensor
303 include the sensor unit S1 of 307a instructions, and it is connected between power end and the first output end V+, the biography that 307b is indicated
Sensor cell S2, it is connected between the first output end V+ and earth terminal, the sensor unit S3 that 307c is indicated, it is connected to electricity
Between source and the second output end V-, the sensor unit S4 that 307d is indicated, its be connected to the second output end V- and earth terminal it
Between.S1 and S2 composition Magnetic Sensor 303 left half-bridge 310a, S3 and S4 constitute Magnetic Sensor 303 right half-bridge 310b, 310a and
310b constitutes the full-bridge of Magnetic Sensor 303.Self-inspection magnetic field 301b is respectively in sensor unit S1, S2, S3, and S4 direction
309a, 309b, 309c, and 309d, wherein the direction 309a and 309b in the self-inspection magnetic field of the sensor unit of left half-bridge are in the same direction, it is right
The direction 309c and 309d in the self-inspection magnetic field of the sensor unit of half-bridge are in the same direction, the self-inspection magnetic field of the sensor unit of left half-bridge
The direction 309c in the self-inspection magnetic field of the sensor unit of direction 309a and right half-bridge is reverse；External magnetic field 302b is in sensor unit
S1, S2, S3, and S4 direction are respectively 308a, 308b, 308c, and 308d, and wherein 308a, 308b, 308c, and 308d is in the same direction.
Magnetic Sensor 303 senses self-inspection magnetic field simultaneously and external magnetic field obtains magnetic field induction signal, and magnetic field induction signal is sent to
Signal processing circuit 304.Signal processing circuit 304 obtains common mode self-test signal 305 and differential mode outfield based on magnetic field induction signal
Signal 306.The information such as amplitude or phase based on common mode self-test signal 305 judge Magnetic Sensor whether saturation and carry out magnetic biography
The sensitivity calibration of sensor.The real-time self checking method 300 of the magnetic sensing device, obtains the self-test signal of sensor and outer in real time
Field signal, self-test signal does not interfere with the detection of normal outer field signal.
Refer to shown in Fig. 4, the second embodiment of the invention based on alternative plan discloses a kind of magnetic sensing device
Real-time self checking method, the magnetic sensing device 400a includes self-inspection coil 401a, Magnetic Sensor 403 and signal processing circuit
404.By loading the self-inspection electric current of positive and negative square in self-inspection coil 401a, the self-inspection magnetic field of positive and negative square is produced
401b, sets the self-inspection magnetic field 401b of each sensor unit of Magnetic Sensor 403 direction so that Magnetic Sensor 403 is exported
Common-mode signal can reflect the self-inspection magnetic field；External magnetic field 402a is the magnetic field 402b of DC form, the Magnetic Sensor
The difference mode signal of 403 outputs can reflect the external magnetic field.Magnetic Sensor 403 can be Hall sensor, AMR sensor,
GMR, or TMR sensor.400b discloses the detailed construction of Magnetic Sensor 403, includes the sensing of 407a instructions
Sensor unit S2, the sensor unit S3 that 407c is indicated, the sensor unit that 407d is indicated that device cell S Isosorbide-5-Nitrae 07b is indicated
S4.S1 and S2 composition Magnetic Sensor 403 left half-bridge 410a, S3 and S4 constitute Magnetic Sensor 403 right half-bridge 410b, 410a and
410b constitutes the full-bridge of Magnetic Sensor 403.Self-inspection magnetic field 401b is respectively in sensor unit S1, S2, S3, and S4 direction
409a, 409b, 409c, and 409d, wherein the direction 409a and 409b in the self-inspection magnetic field of the sensor unit of left half-bridge are in the same direction, it is right
The direction 409c and 409d in the self-inspection magnetic field of the sensor unit of half-bridge are in the same direction, the self-inspection magnetic field of the sensor unit of left half-bridge
The direction 409c in the self-inspection magnetic field of the sensor unit of direction 409a and right half-bridge is reverse；External magnetic field 402b is in sensor unit
S1, S2, S3, and S4 direction are respectively 408a, 408b, 408c, and 408d, and wherein 408a, 408b, 408c, and 408d is in the same direction.
Magnetic Sensor 403 senses self-inspection magnetic field simultaneously and external magnetic field obtains magnetic field induction signal, and magnetic field induction signal is sent to
Signal processing circuit 404.Signal processing circuit 404 separates common-mode signal and difference mode signal, while obtaining common mode self-test signal 405
With field signal 406 outside differential mode.Based on the amplitude of common mode self-test signal 405, the information such as phase judge Magnetic Sensor whether saturation, with
And carry out the sensitivity calibration of Magnetic Sensor.The real-time self checking method 400 of the magnetic sensing device, obtain in real time sensor from
Signal and outer field signal are examined, self-test signal does not interfere with the detection of normal signal.
Refer to shown in Fig. 5, the 3rd embodiment of the invention based on alternative plan discloses a kind of magnetic sensing device
Real-time self checking method, the magnetic sensing device 500a includes self-inspection coil 501a, Magnetic Sensor 503 and signal processing circuit
504.By loading the self-inspection electric current of string waveshape in self-inspection coil 501a, the self-inspection magnetic field 501b of string waveshape is produced, will
The common-mode output that self-inspection magnetic field 501b is carried in magnetic sensing 503 (that is, sets each sensor unit of Magnetic Sensor 503
Self-inspection magnetic field 501b direction so that the common-mode signal that Magnetic Sensor 503 is exported can reflect the self-inspection magnetic field)；Outside magnetic
Field 502a is the magnetic field 502b of DC form, and magnetic field 502b is carried in the differential mode output end (Magnetic Sensor of magnetic sensing 503
The difference mode signal of 503 outputs can reflect the external magnetic field).Magnetic Sensor 503 can be Hall sensor, AMR sensor,
GMR, or TMR sensor.500b discloses the detailed construction of Magnetic Sensor 503, includes the sensing of 507a instructions
Device cell S 1, sensor unit S2, the sensor unit S3 that 507c is indicated, the sensor unit that 507d is indicated that 507b is indicated
S4.S1 and S2 composition Magnetic Sensor 503 left half-bridge 510a, S3 and S4 constitute Magnetic Sensor 503 right half-bridge 510b, 510a and
510b constitutes the full-bridge of Magnetic Sensor 503.Self-inspection magnetic field 501b is respectively in sensor unit S1, S2, S3, and S4 direction
In the same direction, in the same direction, 509a and 509c are reverse by 509c and 509d by 509a, 509b, 509c, and 509d, wherein 509a and 509b；Outside magnetic
502b is respectively 508a, 508b, 508c, and 508d, wherein 508a in sensor unit S1, S2, S3, and S4 direction,
508b, 508c, and 508d are in the same direction.Magnetic Sensor 503 senses self-inspection magnetic field simultaneously and external magnetic field obtains magnetic field induction signal, and
Send magnetic field induction signal to signal processing circuit 504.Signal processing circuit 504 separates common-mode signal and difference mode signal, together
When obtain the outer field signal 506 of common mode self-test signal 505 and differential mode.Based on the amplitude of common mode self-test signal 505, the information such as phase is sentenced
Disconnected Magnetic Sensor whether saturation, and carry out Magnetic Sensor sensitivity calibration.The real-time self checking method of the magnetic sensing device
500, the self-test signal and outer field signal of sensor are obtained in real time, and self-test signal does not interfere with the detection of normal signal.
The above-described self-inspection coil based on alternative plan, wherein the self-inspection electric current loaded can be direct current, square wave
Or string ripple, frequency can be it is fixed or adjustable, or multi-frequency signal combination；It is outside
Magnetic field can be direct current, string ripple, or any form of low-frequency magnetic field signal.
In alternative plan, when no self-inspection magnetic field and external magnetic field, left half-bridge exports V0, right half-bridge output V0；Loading is outside
During magnetic field, left half-bridge exports V0+dV1, right half-bridge output V0-dV1；When loading self-inspection magnetic field, left half-bridge exports V0+dV2, right half-bridge
Export V0+dV2；When loading self-inspection magnetic field and external magnetic field simultaneously, left half-bridge exports V0+dV1+dV2, right half-bridge output V0-dV1+
dV2, full-bridge differential mode is output as 2dV1, full-bridge common mode is output as V0+dV2.Signal processing circuit separates common mode self-test signal and differential mode
Outer field signal.
The foregoing is only the present invention better embodiment, protection scope of the present invention not using above-mentioned embodiment as
Limit, as long as equivalent modification that those of ordinary skill in the art are made according to disclosure of the present invention or change, should all include right
In protection domain described in claim.
Claims (14)
1. a kind of real-time self checking method of magnetic sensing device, the magnetic sensing device includes self-inspection coil, Magnetic Sensor and signal
Process circuit, it is characterised in that the real-time self checking method includes：
Apply the high frequency self-inspection magnetic field that high frequency self-inspection electric current produces first frequency in the self-inspection coil；
External magnetic field is the lower frequency external magnetic field of second frequency, and wherein first frequency is higher than second frequency；
Induction of high frequency self-inspection magnetic field and lower frequency external magnetic field obtain magnetic field induction signal to Magnetic Sensor simultaneously, and magnetic field induction is believed
Number send signal processing circuit to,
Signal processing circuit obtains high frequency self-test signal and the outer field signal of low frequency based on magnetic field induction signal, based on high frequency self-inspection letter
Number to the Magnetic Sensor carry out self-inspection calibration.
2. the real-time self checking method of magnetic sensing device as claimed in claim 1, it is characterised in that the frequency of high frequency self-inspection electric current
Be it is fixed, adjustable, or multi-frequency combination,
Lower frequency external magnetic field is the low frequency magnetic field of direct current or string ripple.
3. the real-time self checking method of magnetic sensing device as claimed in claim 1, it is characterised in that Magnetic Sensor is Hall sensings
Device, AMR sensor, GMR, or TMR sensor.
4. the real-time self checking method of magnetic sensing device as claimed in claim 1, it is characterised in that signal processing circuit is based on height
The amplitude or phase information of frequency self-test signal judge Magnetic Sensor whether saturation, and carry out Magnetic Sensor self-inspection calibration.
5. a kind of real-time self checking method of magnetic sensing device, the magnetic sensing device includes self-inspection coil, Magnetic Sensor and signal
Process circuit, it is characterised in that the real-time self checking method includes：
Apply self-inspection electric current in the self-inspection coil and produce self-inspection magnetic field, each sensor unit of Magnetic Sensor oneself is set
Examine the direction in magnetic field so that the common-mode signal of Magnetic Sensor output can reflect the self-inspection magnetic field；
External magnetic field is lower frequency external magnetic field, and lower frequency external magnetic field is carried in the differential mode output end of Magnetic Sensor, and the magnetic is passed
The difference mode signal of sensor output can reflect the external magnetic field；
Magnetic Sensor senses self-inspection magnetic field simultaneously and external magnetic field obtains magnetic field induction signal, and magnetic field induction signal is sent to
Signal processing circuit,
Signal processing circuit obtains common mode self-test signal and the outer field signal of differential mode based on magnetic field induction signal, is believed by common mode self-inspection
Number to the Magnetic Sensor carry out self-inspection calibration.
6. the real-time self checking method of magnetic sensing device as claimed in claim 1, it is characterised in that
Self-inspection electric current be direct current, square wave or string ripple electric current, the frequency of self-inspection electric current is fixed, adjustable, Huo Zheduo
The combination of frequency is planted,
External magnetic field is the low frequency magnetic field of direct current or string ripple.
7. a kind of real-time self checking method of magnetic sensing device as claimed in claim 1, it is characterised in that
Magnetic Sensor is Hall sensor, AMR sensor, GMR, or TMR sensor.
8. the real-time self checking method of a kind of magnetic sensing device as claimed in claim 1, it is characterised in that signal processing circuit is led to
Cross common-mode signal amplitude or phase information judge Magnetic Sensor whether saturation, and carry out Magnetic Sensor self-inspection calibration.
9. a kind of real-time self checking method of magnetic sensing device as claimed in claim 1, it is characterised in that
The Magnetic Sensor includes the first sensor unit being connected between power end and the first output end V+, is connected to
One output end V+ and earth terminal second sensor unit, are connected to the sensor unit between power end and the second output end V-,
Be connected to the sensor unit between the second output end V- and earth terminal, first sensor unit and second sensor unit from
The direction for examining magnetic field is identical, and the direction in the self-inspection magnetic field of 3rd sensor unit and the 4th sensor unit is identical, the first sensing
In opposite direction, the direction phase of the external magnetic field in four sensor units in the self-inspection magnetic field of device unit and 3rd sensor unit
Together.
10. a kind of magnetic sensing device, it is characterised in that the magnetic sensing device is included at self-inspection coil, Magnetic Sensor and signal
Manage circuit,
Apply the high frequency self-inspection magnetic field that high frequency self-inspection electric current produces first frequency in the self-inspection coil；
External magnetic field is the lower frequency external magnetic field of second frequency, and wherein first frequency is higher than second frequency；
Induction of high frequency self-inspection magnetic field and lower frequency external magnetic field obtain magnetic field induction signal to Magnetic Sensor simultaneously, and magnetic field induction is believed
Number send signal processing circuit to,
Signal processing circuit obtains high frequency self-test signal and the outer field signal of low frequency based on magnetic field induction signal, based on high frequency self-inspection letter
Number to the Magnetic Sensor carry out self-inspection calibration.
11. the real-time self checking method of magnetic sensing device as claimed in claim 10, it is characterised in that the frequency of high frequency self-inspection electric current
Rate be it is fixed, adjustable, or multi-frequency combination,
Lower frequency external magnetic field is the low-frequency magnetic of direct current or string ripple,
Amplitude or phase information of the signal processing circuit based on high frequency self-test signal judge Magnetic Sensor whether saturation, and carry out
The self-inspection calibration of Magnetic Sensor.
12. a kind of magnetic sensing device, it is characterised in that the magnetic sensing device is included at self-inspection coil, Magnetic Sensor and signal
Manage circuit,
Apply self-inspection electric current in the self-inspection coil and produce self-inspection magnetic field, each sensor unit of Magnetic Sensor oneself is set
Examine the direction in magnetic field so that the common-mode signal of Magnetic Sensor output can reflect the self-inspection magnetic field；
External magnetic field is lower frequency external magnetic field, and lower frequency external magnetic field is carried in the differential mode output end of Magnetic Sensor, and the magnetic is passed
The difference mode signal of sensor output can reflect the external magnetic field；
Magnetic Sensor senses self-inspection magnetic field simultaneously and external magnetic field obtains magnetic field induction signal, and magnetic field induction signal is sent to
Signal processing circuit,
Signal processing circuit obtains common mode self-test signal and the outer field signal of differential mode based on magnetic field induction signal, is believed by common mode self-inspection
Number to the Magnetic Sensor carry out self-inspection calibration.
13. magnetic sensing device as claimed in claim 12, it is characterised in that
Self-inspection electric current be direct current, square wave or string ripple electric current, the frequency of self-inspection electric current is fixed, adjustable, Huo Zheduo
The combination of frequency is planted,
External magnetic field is the low frequency magnetic field of direct current or string ripple, amplitude or phase information that signal processing circuit passes through common-mode signal
Judge Magnetic Sensor whether saturation, and carry out Magnetic Sensor self-inspection calibration.
14. magnetic sensing device as claimed in claim 12, it is characterised in that the Magnetic Sensor, which includes, is connected to power end
And the first first sensor unit between output end V+, the first output end V+ and earth terminal second sensor unit are connected to,
The sensor unit between power end and the second output end V- is connected to, the biography between the second output end V- and earth terminal is connected to
The direction in the self-inspection magnetic field of sensor cell, first sensor unit and second sensor unit is identical, 3rd sensor unit and
The direction in the self-inspection magnetic field of the 4th sensor unit is identical, the self-inspection magnetic field of first sensor unit and 3rd sensor unit
In the opposite direction, external magnetic field is identical in the direction of four sensor units.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710492907.8A CN107305241B (en) | 2017-06-26 | 2017-06-26 | Magnetic sensing device and real-time self-checking method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710492907.8A CN107305241B (en) | 2017-06-26 | 2017-06-26 | Magnetic sensing device and real-time self-checking method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107305241A true CN107305241A (en) | 2017-10-31 |
| CN107305241B CN107305241B (en) | 2021-01-29 |
Family
ID=60150863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710492907.8A Active CN107305241B (en) | 2017-06-26 | 2017-06-26 | Magnetic sensing device and real-time self-checking method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107305241B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108548980A (en) * | 2018-06-28 | 2018-09-18 | 中国海洋石油集团有限公司 | A kind of Hall element screening plant and method |
| CN111562525A (en) * | 2019-02-13 | 2020-08-21 | Tdk株式会社 | Magnetic sensor system |
| US10955493B2 (en) | 2018-05-02 | 2021-03-23 | Analog Devices Global Unlimited Company | Magnetic sensor systems |
| CN113484579A (en) * | 2021-06-16 | 2021-10-08 | 深圳供电局有限公司 | Magnetic saturation characteristic determination method and device, computer equipment and storage medium |
| CN114353852A (en) * | 2021-12-24 | 2022-04-15 | 中国船舶重工集团公司七五0试验场 | Self-checking method and device for electromagnetic sensor |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1570661A (en) * | 2003-07-16 | 2005-01-26 | 张奔牛 | Method for measuring micro magnetic field and high sensor thereof |
| US20100211347A1 (en) * | 2009-02-17 | 2010-08-19 | Allegro Microsystems, Inc. | Circuits and Methods for Generating a Self-Test of a Magnetic Field Sensor |
| US20110018533A1 (en) * | 2009-07-22 | 2011-01-27 | Allegro Microsystems, Inc. | Circuits and Methods for Generating a Diagnostic Mode of Operation in a Magnetic Field Sensor |
| CN102540113A (en) * | 2011-11-11 | 2012-07-04 | 江苏多维科技有限公司 | Magnetic field sensing device |
| CN102762951A (en) * | 2010-01-08 | 2012-10-31 | 艾沃思宾技术公司 | Method and structure for testing and calibrating magnetic field sensing device |
| CN103884859A (en) * | 2014-02-27 | 2014-06-25 | 宁波南车时代传感技术有限公司 | Magnetoelectric velocity transducer with self-checking function |
| CN103954799A (en) * | 2014-05-22 | 2014-07-30 | 湖南湘依铁路机车电器股份有限公司 | Magnetic rotation speed sensor self-checking device and system and method thereof |
| CN204422634U (en) * | 2015-02-27 | 2015-06-24 | 北京柏艾斯科技有限公司 | A kind of DC/AC leakage current sensor with self-checking function |
| CN105022005A (en) * | 2014-04-23 | 2015-11-04 | 中国科学院上海微系统与信息技术研究所 | SQUID magnetic sensor measuring sensitivity enhancement method, device and system |
| CN105182258A (en) * | 2015-10-21 | 2015-12-23 | 美新半导体（无锡）有限公司 | Magnetic field sensor capable of realizing resetting and self-inspection |
| CN105911490A (en) * | 2016-05-12 | 2016-08-31 | 美新半导体（无锡）有限公司 | Magnetic field sensor with self-check set lead |
-
2017
- 2017-06-26 CN CN201710492907.8A patent/CN107305241B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1570661A (en) * | 2003-07-16 | 2005-01-26 | 张奔牛 | Method for measuring micro magnetic field and high sensor thereof |
| US20100211347A1 (en) * | 2009-02-17 | 2010-08-19 | Allegro Microsystems, Inc. | Circuits and Methods for Generating a Self-Test of a Magnetic Field Sensor |
| US20110018533A1 (en) * | 2009-07-22 | 2011-01-27 | Allegro Microsystems, Inc. | Circuits and Methods for Generating a Diagnostic Mode of Operation in a Magnetic Field Sensor |
| CN102762951A (en) * | 2010-01-08 | 2012-10-31 | 艾沃思宾技术公司 | Method and structure for testing and calibrating magnetic field sensing device |
| CN102540113A (en) * | 2011-11-11 | 2012-07-04 | 江苏多维科技有限公司 | Magnetic field sensing device |
| CN103884859A (en) * | 2014-02-27 | 2014-06-25 | 宁波南车时代传感技术有限公司 | Magnetoelectric velocity transducer with self-checking function |
| CN105022005A (en) * | 2014-04-23 | 2015-11-04 | 中国科学院上海微系统与信息技术研究所 | SQUID magnetic sensor measuring sensitivity enhancement method, device and system |
| CN103954799A (en) * | 2014-05-22 | 2014-07-30 | 湖南湘依铁路机车电器股份有限公司 | Magnetic rotation speed sensor self-checking device and system and method thereof |
| CN204422634U (en) * | 2015-02-27 | 2015-06-24 | 北京柏艾斯科技有限公司 | A kind of DC/AC leakage current sensor with self-checking function |
| CN105182258A (en) * | 2015-10-21 | 2015-12-23 | 美新半导体（无锡）有限公司 | Magnetic field sensor capable of realizing resetting and self-inspection |
| CN105911490A (en) * | 2016-05-12 | 2016-08-31 | 美新半导体（无锡）有限公司 | Magnetic field sensor with self-check set lead |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10955493B2 (en) | 2018-05-02 | 2021-03-23 | Analog Devices Global Unlimited Company | Magnetic sensor systems |
| CN108548980A (en) * | 2018-06-28 | 2018-09-18 | 中国海洋石油集团有限公司 | A kind of Hall element screening plant and method |
| CN111562525A (en) * | 2019-02-13 | 2020-08-21 | Tdk株式会社 | Magnetic sensor system |
| CN113484579A (en) * | 2021-06-16 | 2021-10-08 | 深圳供电局有限公司 | Magnetic saturation characteristic determination method and device, computer equipment and storage medium |
| CN114353852A (en) * | 2021-12-24 | 2022-04-15 | 中国船舶重工集团公司七五0试验场 | Self-checking method and device for electromagnetic sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107305241B (en) | 2021-01-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107305241A (en) | A kind of magnetic sensing device and its real-time self checking method | |
| RU2394207C2 (en) | Device for determining position and method of determining position of packaging material with magnetic mark | |
| JP6914372B2 (en) | Load measurement method, load measurement device, and load measurement mechanism | |
| EP3290932B1 (en) | Integrated current sensor using z-axis magnetoresistive gradiometer and lead frame current | |
| JP5901768B2 (en) | Measuring device for measuring the magnetic properties of its surroundings | |
| CN101140263B (en) | Electric transverse currents detecting sensor based on strong magnetic resistance and method thereof | |
| US8432163B2 (en) | Method for low frequency noise cancellation in magneto-resistive mixed sensors | |
| US10036673B2 (en) | Compensation methods for active magnetic sensor systems | |
| CN107462758B (en) | Closed loop current sensor | |
| WO2006109382A1 (en) | Magnetic impedance measuring device | |
| CN109917309A (en) | The reluctive transducer offset with stray magnetic field and and there is the system of sensors with auxiliary electrode | |
| JP2009539098A (en) | Adaptive magnetic field compensation sensor device | |
| CN110927428B (en) | Wide-range wide-band high-precision magnetic balance type current measuring device | |
| JP5269564B2 (en) | Tubular Defect Evaluation Method and Tubular Defect Evaluation Apparatus | |
| CA2739898A1 (en) | Method and device for detecting short-circuits in the stator core of electric machines | |
| CN108663557A (en) | Current detecting is popped one's head in | |
| CN108919147A (en) | A kind of triaxial magnetic field sensor | |
| US10031106B2 (en) | Method and apparatus for measuring an amount of superparamagnetic material in an object | |
| US11796557B2 (en) | Twist insensitive mounting differential speed sensor with direction detection | |
| JPH11510906A (en) | Test method for connection part including conductor in integrated circuit | |
| CN104134269B (en) | A kind of Detecting of coin system | |
| JP2020118620A (en) | Magnetic body inspection device and magnetic body inspection method | |
| CN109387665B (en) | Speed detection device and speed detection method | |
| EP4350377A1 (en) | Magnetism measuring device | |
| CN116953335B (en) | Device and method for detecting direct current signal or magnetic field |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: 214000 Jiangsu city of Wuxi province Quxin Wu Hui new Ring Road No. 2 Applicant after: New sensing system Co., Ltd. Address before: 214101 Jiangsu city of Wuxi province Qingyuan new Wu District Road No. 18 Taihu International Science Park sensor network university science and Technology Park 530 Building No. A211 Applicant before: Memsic Transducer Systems Co., Ltd. |
|
| GR01 | Patent grant | ||
| GR01 | Patent grant |