CN107305241B - Magnetic sensing device and real-time self-checking method thereof - Google Patents
Magnetic sensing device and real-time self-checking method thereof Download PDFInfo
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- CN107305241B CN107305241B CN201710492907.8A CN201710492907A CN107305241B CN 107305241 B CN107305241 B CN 107305241B CN 201710492907 A CN201710492907 A CN 201710492907A CN 107305241 B CN107305241 B CN 107305241B
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/07—Hall effect devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
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Abstract
The invention relates to a magnetic sensing device and a real-time self-checking method thereof. The magnetic sensing device comprises a self-checking coil, a magnetic sensor and a signal processing circuit. Loading high-frequency self-checking current in the self-checking coil to generate a high-frequency self-checking magnetic field; the magnetic sensor simultaneously detects the high-frequency self-detection magnetic field and the low-frequency external magnetic field to obtain a magnetic field induction signal; the signal processing circuit separates the magnetic field induction signal to obtain a high-frequency self-detection signal and a low-frequency external field signal. And judging whether the magnetic sensor is saturated or not based on the amplitude of the high-frequency self-detection signal, and carrying out sensitivity calibration. The invention relates to a real-time self-detection method of a magnetic sensor device, which can obtain a self-detection signal and an external field signal of a magnetic sensor in real time, wherein the detection of the external field signal cannot be influenced by the self-detection signal.
Description
Technical Field
The invention relates to a self-checking method of a magnetic sensing device, in particular to a magnetic sensing device and a real-time self-checking method thereof.
Background
None of the existing solutions relate to real-time self-testing of magnetic sensing devices in high frequency applications. In particular, saturation detection and sensitivity calibration of sensors based on AMR, GMR, TMR, etc. techniques. Taking the AMR magnetic sensing device as an example, when the external magnetic field exceeds a certain range, the magnetic sensing device outputs a zero signal, and at this time, it is impossible to determine whether the magnetic sensor is saturated or not from the output of the magnetic sensing device.
In addition, in the magnetic sensor device of the related art, magnetic field detection and self-inspection are generally performed separately, which results in that the magnetic field detection cannot be performed at the time of self-inspection.
Therefore, it is necessary to provide a solution to the above problems.
Disclosure of Invention
The invention provides a magnetic sensing device and a self-checking method thereof, which can obtain a self-checking signal and an external field signal of the magnetic sensing device in real time, wherein the detection of the normal external field signal cannot be influenced by the self-checking signal.
In order to solve the above problem, according to an aspect of the present invention, there is provided a real-time self-test method for a magnetic sensor device, the magnetic sensor device including a self-test coil, a magnetic sensor, and a signal processing circuit, the real-time self-test method including: applying a high-frequency self-checking current to the self-checking coil to generate a high-frequency self-checking magnetic field with a first frequency; the external magnetic field is a low-frequency external magnetic field of a second frequency, wherein the first frequency is higher than the second frequency; the magnetic sensor simultaneously induces a high-frequency self-checking magnetic field and a low-frequency external magnetic field to obtain a magnetic field induction signal, the magnetic field induction signal is transmitted to the signal processing circuit, the signal processing circuit obtains the high-frequency self-checking signal and the low-frequency external field signal based on the magnetic field induction signal, and the magnetic sensor is subjected to self-checking calibration based on the high-frequency self-checking signal.
Further, the frequency of the high-frequency self-test current is fixed, adjustable, or a combination of multiple frequencies, and the low-frequency external magnetic field is a direct-current or sine-wave low-frequency magnetic field.
According to another aspect of the present invention, the present invention provides a real-time self-test method for a magnetic sensing device, the magnetic sensing device comprising a self-test coil, a magnetic sensor and a signal processing circuit. The real-time self-checking method comprises the following steps: applying a self-checking current to the self-checking coil to generate a self-checking magnetic field, and setting the direction of the self-checking magnetic field of each sensor unit of the magnetic sensor so that a common-mode signal output by the magnetic sensor can reflect the self-checking magnetic field; the external magnetic field is a low-frequency external magnetic field, the low-frequency external magnetic field is loaded at the differential mode output end of the magnetic sensor, and a differential mode signal output by the magnetic sensor can reflect the external magnetic field; the magnetic sensor simultaneously induces a self-checking magnetic field and an external magnetic field to obtain a magnetic field induction signal, the magnetic field induction signal is transmitted to the signal processing circuit, the signal processing circuit obtains a common mode self-checking signal and a differential mode external field signal based on the magnetic field induction signal, and the magnetic sensor is subjected to self-checking calibration through the common mode self-checking signal.
Further, the self-checking current is direct current, square wave or sine wave current, the frequency of the self-checking current is fixed, adjustable or a combination of multiple frequencies, and the external magnetic field is a direct current or sine wave low-frequency magnetic field.
Furthermore, the magnetic sensor comprises a first sensor unit connected between a power supply end and a first output end V +, a second sensor unit connected between the first output end V + and a ground end, a sensor unit connected between the power supply end and a second output end V-, and a sensor unit connected between the second output end V-and the ground end, wherein the directions of the self-detection magnetic fields of the first sensor unit and the second sensor unit are the same, the directions of the self-detection magnetic fields of the third sensor unit and the fourth sensor unit are the same, the directions of the self-detection magnetic fields of the first sensor unit and the third sensor unit are opposite, and the directions of the external magnetic fields of the four sensor units are the same.
According to still another aspect of the present invention, there is provided a magnetic sensing device comprising a self-checking coil in which a high-frequency self-checking current is applied to generate a high-frequency self-checking magnetic field of a first frequency; the external magnetic field is a low-frequency external magnetic field of a second frequency, wherein the first frequency is higher than the second frequency; the magnetic sensor simultaneously induces a high-frequency self-checking magnetic field and a low-frequency external magnetic field to obtain a magnetic field induction signal, the magnetic field induction signal is transmitted to the signal processing circuit, the signal processing circuit obtains the high-frequency self-checking signal and the low-frequency external field signal based on the magnetic field induction signal, and the magnetic sensor is subjected to self-checking calibration based on the high-frequency self-checking signal.
Further, the frequency of the high-frequency self-checking current is fixed and adjustable, or the frequency of the high-frequency self-checking current is a combination of multiple frequencies, the low-frequency external magnetic field is direct-current or sine-wave low-frequency magnetic field, and the signal processing circuit judges whether the magnetic sensor is saturated or not based on the amplitude or phase information of the high-frequency self-checking signal and performs self-checking calibration on the magnetic sensor.
According to still another aspect of the present invention, there is provided a magnetic sensor device including a self-checking coil, a magnetic sensor, and a signal processing circuit. Applying a self-checking current to the self-checking coil to generate a self-checking magnetic field, and setting the direction of the self-checking magnetic field of each sensor unit of the magnetic sensor so that a common-mode signal output by the magnetic sensor can reflect the self-checking magnetic field; the external magnetic field is a low-frequency external magnetic field, the low-frequency external magnetic field is loaded at the differential mode output end of the magnetic sensor, and a differential mode signal output by the magnetic sensor can reflect the external magnetic field; the magnetic sensor simultaneously induces a self-checking magnetic field and an external magnetic field to obtain a magnetic field induction signal, the magnetic field induction signal is transmitted to the signal processing circuit, the signal processing circuit obtains a common mode self-checking signal and a differential mode external field signal based on the magnetic field induction signal, and the magnetic sensor is subjected to self-checking calibration through the common mode self-checking signal.
Furthermore, the magnetic sensor comprises a first sensor unit connected between a power supply end and a first output end V +, a second sensor unit connected between the first output end V + and a ground end, a sensor unit connected between the power supply end and a second output end V-, and a sensor unit connected between the second output end V-and the ground end, wherein the directions of the self-detection magnetic fields of the first sensor unit and the second sensor unit are the same, the directions of the self-detection magnetic fields of the third sensor unit and the fourth sensor unit are the same, the directions of the self-detection magnetic fields of the first sensor unit and the third sensor unit are opposite, and the directions of the external magnetic fields of the four sensor units are the same.
Compared with the prior art, the magnetic sensing device can simultaneously sense the self-checking magnetic field and the external magnetic field so as to obtain the self-checking signal and the external field signal, so that the detection of the normal external field signal cannot be influenced by the self-checking signal.
Drawings
Fig. 1 is a schematic structural diagram of a real-time self-test method for a magnetic sensing device according to a first embodiment of a first scheme according to the present invention, where a self-test current is a high-frequency sinusoidal signal, and an external magnetic field is a direct-current signal.
Fig. 2 is a schematic structural diagram of a real-time self-test method for a magnetic sensing device according to a second embodiment of the first aspect, where a self-test current is a high-frequency sine wave signal and an external magnetic field is a low-frequency sine wave signal.
Fig. 3 is a schematic structural diagram of a real-time self-test method for a magnetic sensing device according to a first embodiment of a second aspect of the present invention. The self-checking current is a direct current signal, and the external magnetic field is a direct current signal.
Fig. 4 is a schematic structural diagram of a real-time self-test method for a magnetic sensing device according to a second embodiment of a second aspect of the present invention. The self-checking current is a positive square wave signal and a negative square wave signal, and the external magnetic field is a direct current signal.
Fig. 5 is a schematic structural diagram of a real-time self-test method for a magnetic sensing device according to a third embodiment of the second aspect. The self-checking current is a sine wave signal, and the external magnetic field is a direct current signal.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings.
Referring to fig. 1, a first embodiment of the present invention based on a first scheme discloses a real-time self-test method for a magnetic sensor device. The magnetic sensing device 100 comprises a self-test coil 101a, a magnetic sensor 103 and a signal processing circuit 104. Loading high-frequency self-test current in the self-test coil 101a to generate a high-frequency self-test magnetic field 101 b; the external magnetic field 102a is a magnetic field 102b of a direct current type. The magnetic sensor 103 detects the self-test magnetic field 101b and the external magnetic field 102b simultaneously to obtain a magnetic field sensing signal. The signal processing circuit 104 separates the high and low frequency signals from the magnetic field induced signal and obtains a high frequency self test signal 105 and a direct current external field signal 106. Whether the magnetic sensor is saturated or not is judged based on the information such as the amplitude, the phase and the like of the high-frequency self-test signal 105, and the sensitivity calibration of the magnetic sensor is performed. The magnetic sensor 103 is a Hall sensor, an amr (anisotropic magnetic resistance) sensor, a gmr (giant magnetic resistance) sensor, or a tmr (tunneling magnetic resistance) sensor. The real-time self-detection method of the magnetic sensing device obtains the self-detection signal and the external field signal (namely the induction signal of the external magnetic field) of the magnetic sensor in real time, and the detection of the normal external field signal cannot be influenced by the self-detection signal.
Referring to fig. 2, a second embodiment of the present invention based on the first scheme discloses a real-time self-testing method for a magnetic sensor device. The magnetic sensor device 200 comprises a self-test coil 201a, a magnetic sensor 203 and a signal processing circuit 204. Loading high-frequency self-test current into the self-test coil 201a to generate a high-frequency self-test magnetic field 201 b; the external magnetic field 202a is a magnetic field 202b in the form of a sine wave. The magnetic sensor 203 detects the self-test magnetic field 201b and the external magnetic field 202b simultaneously to obtain a magnetic field induction signal. The signal processing circuit 204 separates the high-frequency and low-frequency signals from the magnetic field induction signal, and obtains a high-frequency self-test signal 205 and a harmonic external field signal 206. Whether the magnetic sensor is saturated or not is judged based on information such as the amplitude, the phase and the like of the high-frequency self-test signal 205, and sensitivity calibration of the magnetic sensor is performed. The magnetic sensor 203 is a Hall sensor, an AMR sensor, a GMR sensor, or a TMR sensor. The real-time self-checking method 200 of the magnetic sensing device obtains the self-checking signal and the external field signal of the magnetic sensor in real time, and the detection of the normal external field signal cannot be influenced by the self-checking signal.
The self-checking coil based on the first scheme, wherein the frequency of the applied high-frequency self-checking current can be fixed, adjustable, or a combination of multiple frequencies, and can generate a high-frequency self-checking magnetic field of the first frequency; the external magnetic field may be a direct current, a sinusoidal wave, or any form of low frequency magnetic field, and the frequency of the external magnetic field may be a second frequency, with the first frequency being higher than the second frequency.
Referring to fig. 3, a first embodiment based on a second aspect of the present invention discloses a real-time self-test method for a magnetic sensor apparatus, where the magnetic sensor apparatus 300a includes a self-test coil 301a, a magnetic sensor 303, and a signal processing circuit 304. A self-checking magnetic field 301b in a direct current form is generated by loading a self-checking current in a direct current form into a self-checking coil 301a, and the direction of the self-checking magnetic field 301b of each sensor unit of the magnetic sensor 303 is set, so that a common-mode signal output by the magnetic sensor 303 can reflect the self-checking magnetic field; the external magnetic field (also sometimes referred to as an external field) 302a is a magnetic field 302b in the form of a direct current, and the differential mode signal output by the magnetic sensor 303 is capable of reflecting the external magnetic field. The magnetic sensor 303 may be a Hall sensor, an AMR sensor, a GMR sensor or a TMR sensor. 300b discloses a detailed structure of the magnetic sensor 303, the magnetic sensor 303 includes a sensor unit S1 indicated by 307a connected between a power supply terminal and a first output terminal V +, a sensor unit S2 indicated by 307b connected between the first output terminal V + and a ground terminal, a sensor unit S3 indicated by 307c connected between a power supply terminal and a second output terminal V-, and a sensor unit S4 indicated by 307d connected between the second output terminal V-and the ground terminal. The left half-bridge 310a of the magnetic sensor 303 is comprised of S1 and S2, and the right half-bridge 310b of the magnetic sensor 303 is comprised of S3 and S4, and the full- bridge 310a and 310b of the magnetic sensor 303 is comprised of S2. The directions of the self-checking magnetic field 301b at the sensor cells S1, S2, S3, and S4 are 309a, 309b, 309c, and 309d, respectively, wherein the directions 309a and 309b of the self-checking magnetic field of the sensor cell of the left half-bridge are in the same direction, the directions 309c and 309d of the self-checking magnetic field of the sensor cell of the right half-bridge are in the same direction, and the direction 309a of the self-checking magnetic field of the sensor cell of the left half-bridge and the direction 309c of the self-checking magnetic field of the sensor cell of the right half-bridge are opposite; the external magnetic field 302b is directed at sensor cells S1, S2, S3, and S4 as 308a, 308b, 308c, and 308d, respectively, wherein 308a, 308b, 308c, and 308d are co-directional. The magnetic sensor 303 simultaneously senses the self-detection magnetic field and the external magnetic field to obtain a magnetic field sensing signal, and transmits the magnetic field sensing signal to the signal processing circuit 304. The signal processing circuit 304 derives a common mode self-test signal 305 and a differential mode external field signal 306 based on the magnetic field induced signal. Whether the magnetic sensor is saturated or not and the sensitivity calibration of the magnetic sensor are performed are determined based on the information such as the amplitude or the phase of the common mode self-test signal 305. The real-time self-checking method 300 of the magnetic sensing device obtains the self-checking signal and the external field signal of the sensor in real time, and the detection of the normal external field signal cannot be influenced by the self-checking signal.
Referring to fig. 4, a second embodiment based on a second aspect of the present invention discloses a real-time self-test method for a magnetic sensor device, where the magnetic sensor device 400a includes a self-test coil 401a, a magnetic sensor 403, and a signal processing circuit 404. Generating a self-checking magnetic field 401b in the form of a positive square wave and a negative square wave by loading a self-checking current in the form of a positive square wave and a negative square wave in a self-checking coil 401a, and setting the direction of the self-checking magnetic field 401b of each sensor unit of the magnetic sensor 403 so that a common-mode signal output by the magnetic sensor 403 can reflect the self-checking magnetic field; the external magnetic field 402a is a dc magnetic field 402b, and the differential mode signal output by the magnetic sensor 403 reflects the external magnetic field. The magnetic sensor 403 may be a Hall sensor, an AMR sensor, a GMR sensor, or a TMR sensor. 400b discloses a detailed structure of the magnetic sensor 403, including sensor cells S2, 407c, S3, 407d, S4, indicated by sensor cells S1, 407b, 407a, 407b, 407 d. The left half-bridge 410a of the magnetic sensor 403 composed of S1 and S2, the right half-bridge 410b of the magnetic sensor 403 composed of S3 and S4, and the full-bridge 410a and 410b of the magnetic sensor 403. The directions of the self-checking magnetic field 401b at the sensor cells S1, S2, S3, and S4 are 409a, 409b, 409c, and 409d, respectively, wherein the directions 409a and 409b of the self-checking magnetic field of the sensor cell of the left half-bridge are the same direction, the directions 409c and 409d of the self-checking magnetic field of the sensor cell of the right half-bridge are the same direction, and the direction 409a of the self-checking magnetic field of the sensor cell of the left half-bridge and the direction 409c of the self-checking magnetic field of the sensor cell of the right half-bridge are opposite; the external magnetic field 402b is in the directions 408a, 408b, 408c, and 408d at the sensor cells S1, S2, S3, and S4, respectively, wherein 408a, 408b, 408c, and 408d are in the same direction. The magnetic sensor 403 simultaneously senses the self-detection magnetic field and the external magnetic field to obtain a magnetic field sensing signal, and transmits the magnetic field sensing signal to the signal processing circuit 404. The signal processing circuit 404 separates the common mode signal and the differential mode signal, and obtains a common mode self-test signal 405 and a differential mode external field signal 406. Whether the magnetic sensor is saturated or not is judged based on the amplitude, the phase and other information of the common mode self-test signal 405, and the sensitivity calibration of the magnetic sensor is carried out. The real-time self-checking method 400 of the magnetic sensing device obtains the self-checking signal and the external field signal of the sensor in real time, and the detection of the normal signal cannot be influenced by the self-checking signal.
Referring to fig. 5, a third embodiment based on the second aspect of the present invention discloses a real-time self-test method for a magnetic sensor device, where the magnetic sensor device 500a includes a self-test coil 501a, a magnetic sensor 503 and a signal processing circuit 504. Generating a self-checking magnetic field 501b in the form of a sine wave by loading a self-checking current in the form of a sine wave in a self-checking coil 501a, and loading the self-checking magnetic field 501b at a common-mode output end of the magnetic sensor 503 (i.e., setting the direction of the self-checking magnetic field 501b of each sensor unit of the magnetic sensor 503 so that a common-mode signal output by the magnetic sensor 503 can reflect the self-checking magnetic field); the external magnetic field 502a is a dc magnetic field 502b, and the magnetic field 502b is applied to the differential mode output end of the magnetic sensor 503 (the differential mode signal output by the magnetic sensor 503 can reflect the external magnetic field). The magnetic sensor 503 may be a Hall sensor, an AMR sensor, a GMR sensor, or a TMR sensor. 500b discloses a detailed structure of the magnetic sensor 503, including sensor cells S1 indicated by 507a, sensor cells S2 indicated by 507b, sensor cells S3 indicated by 507c, and sensor cells S4 indicated by 507 d. The left half-bridge 510a of the magnetic sensor 503 is composed of S1 and S2, and the right half-bridge 510b of the magnetic sensor 503 is composed of S3 and S4, and the full-bridge 510a and 510b of the magnetic sensor 503 is composed of S1 and S4. The directions of the self-detection magnetic field 501b at the sensor units S1, S2, S3, and S4 are 509a, 509b, 509c, and 509d, respectively, wherein 509a and 509b are the same, 509c and 509d are the same, and 509a and 509c are opposite; the external magnetic field 502b is in the directions 508a, 508b, 508c, and 508d at the sensor cells S1, S2, S3, and S4, respectively, wherein 508a, 508b, 508c, and 508d are in the same direction. The magnetic sensor 503 senses the self-detection magnetic field and the external magnetic field at the same time to obtain a magnetic field sensing signal, and transmits the magnetic field sensing signal to the signal processing circuit 504. The signal processing circuit 504 separates the common mode signal and the differential mode signal, and obtains a common mode self-test signal 505 and a differential mode external field signal 506. And judging whether the magnetic sensor is saturated or not based on the amplitude, the phase and other information of the common mode self-detection signal 505, and carrying out sensitivity calibration on the magnetic sensor. The real-time self-checking method 500 of the magnetic sensing device obtains the self-checking signal and the external field signal of the sensor in real time, and the detection of the normal signal is not influenced by the self-checking signal.
The self-checking coil based on the second scheme is described above, wherein the loaded self-checking current may be direct current, square wave, or sine wave, and the frequency may be fixed or adjustable, or a combination of multiple frequency signals; the external magnetic field may be direct current, sinusoidal, or any form of low frequency magnetic field signal.
In the second scheme, the left half-bridge outputs V without self-checking magnetic field and external magnetic field0Right half bridge output V0(ii) a When an external magnetic field is loaded, the left half-bridge outputs V0+dV1Right half bridge output V0-dV1(ii) a When loading the self-checking magnetic field, the left half-bridge outputs V0+dV2Right half bridge output V0+dV2(ii) a All in oneWhen the self-checking magnetic field and the external magnetic field are loaded in time, the left half-bridge outputs V0+dV1+dV2Right half bridge output V0-dV1+dV2The full bridge differential mode output is 2dV1The common mode output of the full bridge is V0+dV2. The signal processing circuit separates the common mode self-checking signal and the differential mode external field signal.
The above description is only a preferred embodiment of the present invention, and the scope of the present invention is not limited to the above embodiment, but equivalent modifications or changes made by those skilled in the art according to the present disclosure should be included in the scope of the present invention as set forth in the appended claims.
Claims (8)
1. A real-time self-checking method of a magnetic sensing device, wherein the magnetic sensing device comprises a self-checking coil, a magnetic sensor and a signal processing circuit, and the real-time self-checking method comprises the following steps:
applying a self-checking current to the self-checking coil to generate a self-checking magnetic field, and setting the direction of the self-checking magnetic field of each sensor unit of the magnetic sensor so that a common-mode signal output by the magnetic sensor can reflect the self-checking magnetic field;
the external magnetic field is a low-frequency external magnetic field, and the differential mode signal output by the magnetic sensor can reflect the external magnetic field;
the magnetic sensor simultaneously senses the self-checking magnetic field and the external magnetic field to obtain a magnetic field sensing signal and transmits the magnetic field sensing signal to the signal processing circuit,
the signal processing circuit obtains a common mode self-checking signal and a differential mode external field signal based on the magnetic field induction signal, and self-checking calibration is carried out on the magnetic sensor through the common mode self-checking signal.
2. A method for real-time self-testing of a magnetic sensing device according to claim 1,
the self-test current is a square wave or a sine wave current, the frequency of the self-test current is fixed, adjustable, or a combination of multiple frequencies,
the external magnetic field is a low frequency magnetic field of direct current or sinusoidal waves.
3. A method for real-time self-testing of a magnetic sensing device according to claim 1,
the magnetic sensor is a Hall sensor, an AMR sensor, a GMR sensor, or a TMR sensor.
4. The real-time self-test method for the magnetic sensor device according to claim 1, wherein the signal processing circuit determines whether the magnetic sensor is saturated or not according to the amplitude or phase information of the common mode self-test signal, and performs the self-test calibration of the magnetic sensor.
5. A method for real-time self-testing of a magnetic sensing device according to claim 1,
the magnetic sensor comprises a first sensor unit connected between a power supply end and a first output end V +, a second sensor unit connected between the first output end V + and a grounding end, a third sensor unit connected between the power supply end and a second output end V-, and a fourth sensor unit connected between the second output end V-and the grounding end, wherein the directions of self-detection magnetic fields of the first sensor unit and the second sensor unit are the same, the directions of the self-detection magnetic fields of the third sensor unit and the fourth sensor unit are the same, the directions of the self-detection magnetic fields of the first sensor unit and the third sensor unit are opposite, and the directions of external magnetic fields of the four sensor units are the same.
6. A magnetic sensing device, characterized in that the magnetic sensing device comprises a self-checking coil, a magnetic sensor and a signal processing circuit,
applying a self-checking current to the self-checking coil to generate a self-checking magnetic field, and setting the direction of the self-checking magnetic field of each sensor unit of the magnetic sensor so that a common-mode signal output by the magnetic sensor can reflect the self-checking magnetic field;
the external magnetic field is a low-frequency external magnetic field, and the differential mode signal output by the magnetic sensor can reflect the external magnetic field;
the magnetic sensor simultaneously senses the self-checking magnetic field and the external magnetic field to obtain a magnetic field sensing signal and transmits the magnetic field sensing signal to the signal processing circuit,
the signal processing circuit obtains a common mode self-checking signal and a differential mode external field signal based on the magnetic field induction signal, and self-checking calibration is carried out on the magnetic sensor through the common mode self-checking signal.
7. The magnetic sensing device according to claim 6,
the self-checking current is direct current, square wave or sine wave, the frequency of the self-checking current is fixed, adjustable, or the combination of multiple frequencies,
the external magnetic field is a direct-current or sine-wave low-frequency magnetic field, and the signal processing circuit judges whether the magnetic sensor is saturated or not according to the amplitude or phase information of the common-mode signal and performs self-checking calibration on the magnetic sensor.
8. The magnetic sensing device according to claim 6, wherein the magnetic sensor comprises a first sensor unit connected between the power supply terminal and the first output terminal V +, a second sensor unit connected between the first output terminal V + and the ground terminal, a third sensor unit connected between the power supply terminal and the second output terminal V-, and a fourth sensor unit connected between the second output terminal V-and the ground terminal, the first sensor unit and the second sensor unit have the same direction of the self-test magnetic field, the third sensor unit and the fourth sensor unit have the same direction of the self-test magnetic field, the first sensor unit and the third sensor unit have the opposite direction of the self-test magnetic field, and the external magnetic field has the same direction in the four sensor units.
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| CN105182258A (en) * | 2015-10-21 | 2015-12-23 | 美新半导体（无锡）有限公司 | Magnetic field sensor capable of realizing resetting and self-inspection |
| CN105911490B (en) * | 2016-05-12 | 2018-06-15 | 美新半导体（无锡）有限公司 | Magnetic field sensor with self-test resetting conducting wire |
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