CN105158710A - Magnetic field sensor provided with spiral reset coils - Google Patents
Magnetic field sensor provided with spiral reset coils Download PDFInfo
- Publication number
- CN105158710A CN105158710A CN201510700943.XA CN201510700943A CN105158710A CN 105158710 A CN105158710 A CN 105158710A CN 201510700943 A CN201510700943 A CN 201510700943A CN 105158710 A CN105158710 A CN 105158710A
- Authority
- CN
- China
- Prior art keywords
- magnetic field
- sensing cell
- field sensing
- spiral
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Magnetic Variables (AREA)
Abstract
The invention provides a magnetic field sensor. The magnetic field sensor comprises at least one magnetic field sensing unit and at least one spiral reset coil spirally surrounding the corresponding magnetic field sensing unit, wherein each magnetic field sensing unit is provided with an easy magnetization shaft and a magnetic sensitive shaft perpendicular to the easy magnetization shaft, each spiral reset coil comprises a first lead portion located above the corresponding magnetic field sensing unit, a second lead portion located under the corresponding magnetic field sensing unit and a third lead portion for connecting the first lead portion with the second lead portion and penetrating through the plane where the corresponding magnetic field sensing unit is located. The spiral reset coils spirally surrounding the corresponding magnetic field sensing units are arranged in the magnetic field sensor, the area utilization rate can be high, and a stronger reset/re-reset magnetic field can be produced.
Description
[technical field]
The present invention relates to magnetic field sensor, particularly a kind of have the magnetic field sensor that spiral resets coil.
[background technology]
Apply very common based on the magnetic field sensor of magnetoresistance at present, such as anisotropic magnetoresistive (AMR) magnetic field sensor, giant magnetoresistance (GMR) magnetic field sensor and tunnel magneto (TMR) magnetic field sensor.In general, based on the magnetic field sensor of magnetoresistance when magnetic direction and size change, device resistance can change thereupon.The structure of magnetic field sensor generally includes one deck soft magnetic material, such as iron, cobalt, nickel, ferro-cobalt boron alloy or Rhometal (permalloy) etc.When magnetic direction and size change, the direction of magnetization of layer of soft magnetic material changes thereupon, thus causes the change of resistance.
In order to obtain the exact value in magnetic field, before magnetic field sensor is measured, described soft magnetosphere needs by remagnetize.Usual way be next-door neighbour magnetic field sensor basic sensing unit wire in by big current to produce high-intensity magnetic field, thus make all magnetic domains of basic sensing unit all along the arrangement of magnetic easy axis direction, and the direction of the easy axle of magnetic is determined by the anisotropy of the basic sensing unit of magnetic field sensor.By controlling the sense of current that described wire flows through, the direction of magnetic domain can along the contrary direction arrangement of parallel two of the easy axle of magnetic.Usually this operation is called as replacement (SET) and resets (RESET) again.Except carrying out initialization to the magnetization of soft magnetosphere, SET/RESET can also help the magnetization recovering soft magnetosphere.If residing magnetic field sensor is disturbed by extraneous high-intensity magnetic field, the magnetic domain that disturbing magnetic field removes rear described soft magnetosphere may not return to original state, thus causes measuring error.By reset/resetting, the arrangement of magnetic domain can be resumed again.
Fig. 1 shows the structural representation of existing magnetic field sensor 100.Described magnetic field sensor 100 includes the first power end 131, second source end 133, first output terminal 133, second output terminal 134, first magnetic field sensing cell 111, second magnetic field sensing cell 112, the 3rd magnetic field sensing cell 113, the 4th magnetic field sensing cell 114, is positioned at replacement coil 120 above or below each magnetic field sensing cell.
Reset/reset pattern again time, a heavy current is flow through in described replacement coil 120, this heavy current produces magnetic field by the plane of this replacement coil 120 at each magnetic field sensing cell 111,112,113,114 place, and this magnetic field can reset/reset each magnetic field sensing cell 211,212,213,214 and make the magnetic domain direction of each magnetic field sensing cell 111,112,113,114 get back to the direction of the easy axle of described magnetic.
Each magnetic field sensing cell in Fig. 1 constitutes wheatstone bridge configuration.Fig. 2 shows the circuit diagram of the wheatstone bridge configuration in Fig. 1.Wherein, the first power end 231 can be power voltage terminal, and second source end 232 can be earth terminal.When applying, if have magnetic field at magnetosensitive direction of principal axis, this magnetic field can change the resistance of the first magnetic field sensing cell 111, second magnetic field sensing cell 112, the 3rd magnetic field sensing cell 113 and the 4th magnetic field sensing cell 114, thus cause the pressure reduction between the first output terminal 133 and the second output terminal 134 to change, and then realize magnetic field detection.
This replacement coil 120 is arranged in same metal level, and it can reset/resetting the magnetic field needed for each magnetic field sensing cell in order to produce, and need larger electric current or needs to take larger area, its area utilization is low, and under same current, magnetic field is little.
Therefore need a kind of magnetic field sensor of improvement to overcome the problems referred to above.
[summary of the invention]
An object of the present invention is the magnetic field sensor and the manufacture method thereof that provide a kind of improvement, and its area utilization is high, when same current, can produce stronger replacement/reset magnetic field again.
In order to solve the problem, according to an aspect of the present invention, the invention provides a kind of magnetic field sensor, it comprises: at least one magnetic field sensing cell, and it has the easy axle of magnetic and the magnetosensitive axle vertical with the easy axle of described magnetic; At least one spiral resets coil, its spiral magnetic field sensing cell around correspondence, it includes the privates part through corresponding magnetic field sensing cell place plane being positioned at the first conductor part above corresponding magnetic field sensing cell, being positioned at the second conductor part below corresponding magnetic field sensing cell and connecting the first conductor part and the second conductor part.
Further, described magnetic field sensor has replacement/reset pattern again, under replacement/replacement pattern again, described spiral is reset in coil and flows through electric current, described spiral resets the plane of coil at described magnetic field sensing cell place and produces the magnetic field being parallel to the easy axle of described magnetic, and the magnetic field sensing cell that this magnetic field can reset/reset this correspondence makes the magnetic domain direction of the magnetic field sensing cell of this correspondence get back to the direction of the easy axle of described magnetic.
Further, described magnetic field sensing cell is multiple, and the easy axle of magnetic of each magnetic field sensing cell is parallel to each other, and it is multiple that described spiral resets coil, and each spiral resets the corresponding magnetic field sensing cell of coil.
Further, described magnetic field sensor also includes the first power end, second source end, first output terminal and the second output terminal, described magnetic field sensing cell is four, be designated as the first magnetic field sensing cell respectively, second magnetic field sensing cell, 3rd magnetic field sensing cell and the 4th magnetic field sensing cell, it is four that described spiral resets coil, be designated as the first spiral respectively and reset coil, second spiral resets coil, 3rd spiral resets coil and the 4th spiral resets coil, they correspond respectively to the first magnetic field sensing cell, second magnetic field sensing cell, 3rd magnetic field sensing cell and the 4th magnetic field sensing cell, wherein, the first power end is connected with the first end of the second magnetic field sensing cell with the first end of the first magnetic field sensing cell, second source end is connected with the second end of the 4th magnetic field sensing cell with the second end of the 3rd magnetic field sensing cell, first output terminal is connected with the first end of the 3rd magnetic field sensing cell with the second end of the first magnetic field sensing cell, second output terminal is connected with the first end of the 4th magnetic field sensing cell with the second end of the second magnetic field sensing cell.
According to another aspect of the present invention, the invention provides a kind of manufacture method of magnetic field sensor, it comprises: in substrate, deposit forms the first conductive layer; Graphically described first conductive layer is to obtain the second conductor part; On patterned first conductive layer, deposit forms first medium layer; First medium layer forms multiple magnetic field sensing cell; Described magnetic field sensing cell forms second dielectric layer; Etching second dielectric layer and first medium layer form multiple through hole; Fill each through hole to form privates part in each through hole, deposit second conductive layer in second dielectric layer; Graphically described second conductive layer is to obtain the second conductor part.Wherein, the first conductor part, the second conductor part and privates part are connected to form multiple spirals replacement coils of the spiral magnetic field sensing cell around correspondence.
Compared with prior art, the spiral being provided with the spiral magnetic field sensing cell around correspondence in the present invention resets coil, its can area utilization high, when same current, stronger replacement/reset magnetic field again can be produced.
[accompanying drawing explanation]
In order to be illustrated more clearly in the technical scheme of the embodiment of the present invention, below the accompanying drawing used required in describing embodiment is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.Wherein:
Fig. 1 shows the structural principle schematic diagram of magnetic field sensor of the prior art;
Fig. 2 is the wheatstone bridge circuits principle schematic of the magnetic field sensor in Fig. 1;
Fig. 3 a is the magnetic field sensor structural principle schematic diagram in a first embodiment in the present invention;
Fig. 3 b is the cross-sectional schematic along the a-a profile line in Fig. 3 a;
Fig. 3 c is the cross-sectional schematic along the b-b profile line in Fig. 3 a;
Fig. 4 is the magnetic field sensor structural principle schematic diagram in a second embodiment in the present invention;
Fig. 5 is the manufacture method schematic flow sheet in one embodiment of the magnetic field sensor in the present invention.
Fig. 6 a-6f is the magnetic field sensor view in the fabrication process in the present invention.
[embodiment]
For enabling above-mentioned purpose of the present invention, feature and advantage become apparent more, and below in conjunction with the drawings and specific embodiments, the present invention is further detailed explanation.
Alleged herein " embodiment " or " embodiment " refers to special characteristic, structure or the characteristic that can be contained at least one implementation of the present invention.Different local in this manual " in one embodiment " occurred not all refers to same embodiment, neither be independent or optionally mutually exclusive with other embodiments embodiment.Unless stated otherwise, connection herein, be connected, word that the expression that connects is electrically connected all represents and is directly or indirectly electrical connected, be indirectly electrical connected to refer to and to be electrical connected via another one device or circuit.
Fig. 3 a is the structural principle schematic diagram of magnetic field sensor in the first embodiment 200 in the present invention; Fig. 3 b is the cross-sectional schematic along the a-a profile line in Fig. 3 a; Fig. 3 c is the cross-sectional schematic along the b-b profile line in Fig. 3 a.As shown in Fig. 3 a to 3c, described magnetic field sensor 200 comprises magnetic field sensing cell 210 and spiral resets coil 220.
Described magnetic field sensing cell 210 has the easy axle of magnetic and the magnetosensitive axle vertical with the easy axle of described magnetic.In order to introduce conveniently, definition x-axis and the y-axis vertical with x-axis, the easy axle of magnetic of described magnetic field sensing cell 210 is parallel with x-axis, and the magnetosensitive axle of described magnetic field sensing cell 210 is parallel with y-axis.Described magnetic field sensing cell 210 can be anisotropic magnetoresistive (AMR) sensing unit, giant magnetoresistance (GMR) sensing unit or tunnel magneto (GMR) sensing unit.
In one embodiment, described magnetic field sensing cell 210 comprises the lengthwise magnetic resistance bar that extends along its magnetic easy axis direction and is formed on described magnetic resistance bar and becomes several buss be parallel to each other of predetermined angular with described magnetic resistance bar.Described magnetic resistance bar can be made up of soft magnetic materials such as iron, cobalt, nickel, ferro-cobalt boron alloy or Rhometals, and the layer at described magnetic resistance bar place is also referred to as soft magnetosphere or magneto-resistive layer.Described bus is by conductive material, and such as titanium Ti and copper Cu, wait and make.
In conjunction with reference to shown in figure 3a, Fig. 3 b and Fig. 3 c, described spiral resets the spiral magnetic field sensing cell 210 around correspondence of coil 220.Described spiral resets coil 220 and includes and be positioned at the first conductor part 221 above corresponding magnetic field sensing cell 210, be positioned at the second conductor part 222 below corresponding magnetic field sensing cell 210 and connect the privates part 223 through corresponding magnetic field sensing cell 210 place plane of the first conductor part 221 and the second conductor part 222.Obviously, the first conductor part 221 that described spiral resets coil 220 is formed by the conducting layer figure be positioned at above described magnetic field sensing cell 210, and the second conductor part 222 that described spiral resets coil 220 is formed by the conducting layer figure be positioned at below described magnetic field sensing cell 210.That is, described spiral replacement coil 220 is at least formed by two conductive layers.
Described magnetic field sensor 200 also comprises: the second dielectric layer (not shown) between described magnetic field sensing cell 210 and the second conductor part 222 of described spiral replacement coil 220 between first medium layer (not shown) and the first conductor part 221 resetting coil 220 at described magnetic field sensing cell 210 and described spiral.
Described magnetic field sensor 200 has replacement/reset pattern again.Reset/reset pattern again time, reset in coil 220 at described spiral and flow through electric current, now described spiral resets the plane of coil 220 at described magnetic field sensing cell 210 place and produces the magnetic field being parallel to the easy axle of described magnetic, and the magnetic field sensing cell 210 that this magnetic field can reset/reset this correspondence makes the magnetic domain direction of the magnetic field sensing cell of this correspondence get back to the direction of the easy axle of described magnetic.In the present invention, owing to have employed screw type replacement coil, relative to the replacement coil in Fig. 1, it effectively can improve space availability ratio, when same current, can produce stronger magnetic field.
Fig. 4 shows the principle schematic of magnetic field sensor in second embodiment 300 in the present invention.As shown in Figure 4, described magnetic field sensor 400 comprises the first power end 431, second source end 433, first output terminal 433, second output terminal 434, first magnetic field sensing cell 411, second magnetic field sensing cell 412, the 3rd magnetic field sensing cell 413, the 4th magnetic field sensing cell 414, first spiral resets coil 421, second spiral replacement coil 422, the 3rd spiral resets coil 423, the 4th spiral resets coil 424.First spiral resets coil 421, second spiral replacement coil 422, the 3rd spiral resets coil 423, the 4th spiral replacement coil 424 is corresponding with the first magnetic field sensing cell 411, second magnetic field sensing cell 412, the 3rd magnetic field sensing cell 413 and the 4th magnetic field sensing cell 414 respectively.
First power end 431 is connected with the first end of the second magnetic field sensing cell 412 with the first end of the first magnetic field sensing cell 411; Second source end 432 is connected with the second end of the 4th magnetic field sensing cell 424 with the second end of the 3rd magnetic field sensing cell 423; First output terminal 433 is connected with the first end of the 3rd magnetic field sensing cell 423 with the second end of the first magnetic field sensing cell 421; Second output terminal 434 is connected with the first end of the 4th magnetic field sensing cell 424 with the second end of the second magnetic field sensing cell 422.
Each magnetic field sensing cell all has the easy axle of magnetic and the magnetosensitive axle vertical with the easy axle of described magnetic.Same, definition x-axis and the y-axis vertical with x-axis, the easy axle of magnetic of each magnetic field sensing cell is parallel with x-axis, and the magnetosensitive axle of each magnetic field sensing cell is parallel with y-axis.The type of each magnetic field sensing cell in Fig. 4, structure, principle and manufacturing process can with reference to the magnetic field sensor unit in figure 3, here no longer repeated description.
Same, described magnetic field sensor 400 has replacement/reset (SET/RESET) pattern again.
Reset/reset pattern again time, reset in coil at each spiral and flow through electric current, the magnetic field that each spiral replacement coil produces can both reset/reset corresponding magnetic field sensing cell 411,412,413,414 and make the magnetic domain direction of each magnetic field sensing cell 411,412,413,414 get back to the direction of the easy axle of described magnetic.Preferably, each spiral replacement coil 421,422,423,424 can finish up and link together, and each spiral resets coil so only needs two links just passable.
According to another aspect of the present invention, present invention also offers the manufacture method of magnetic field sensor as illustrated in figures 3 a and 4.As shown in Figure 5, the manufacture method 500 of described magnetic field sensor comprises the steps.
Step 510, in substrate 610, deposit forms the first conductive layer 620, and its result as shown in Figure 6 a.
Step 520, graphically described first conductive layer 620 is to obtain the second conductor part.
Step 530, on patterned first conductive layer 620, deposit forms first medium layer 630, and its result as shown in Figure 6 b.
Step 540, first medium layer 630 is formed multiple magnetic field sensing cell 640, and its result as fig. 6 c.
Step 550, described magnetic field sensing cell 640 forms second dielectric layer 650, and its result as shown in fig 6d.
Step 560, etching second dielectric layer 650 and first medium layer 630 form multiple through hole 660, and its result as shown in fig 6e.
Step 570, deposit second conductive layer 670 in the second dielectric layer 650 after forming through hole, now the segment conductor material of the second conductive layer 670 is filled described through hole and is formed privates part 680, and its result as shown in Figure 6 f.
In another embodiment, independent one conductor filled vias technique also can be utilized to form privates part 680 to fill described through hole.
Step 580, graphically described second conductive layer 670 is to obtain the second conductor part.
Wherein the first conductor part, the second conductor part and privates part are connected to form multiple spirals replacement coils of the spiral magnetic field sensing cell 640 around correspondence.
It is pointed out that the scope be familiar with person skilled in art and any change that the specific embodiment of the present invention is done all do not departed to claims of the present invention.Correspondingly, the scope of claim of the present invention is also not limited only to previous embodiment.
Claims (9)
1. a magnetic field sensor, is characterized in that, it comprises:
At least one magnetic field sensing cell, it has the easy axle of magnetic and the magnetosensitive axle vertical with the easy axle of described magnetic;
At least one spiral resets coil, its spiral magnetic field sensing cell around correspondence, it includes the privates part through corresponding magnetic field sensing cell place plane being positioned at the first conductor part above corresponding magnetic field sensing cell, being positioned at the second conductor part below corresponding magnetic field sensing cell and connecting the first conductor part and the second conductor part.
2. magnetic field sensor according to claim 1, it is characterized in that, it has replacement/reset pattern again, under replacement/replacement pattern again, described spiral is reset in coil and flows through electric current, described spiral resets the plane of coil at described magnetic field sensing cell place and produces the magnetic field being parallel to the easy axle of described magnetic, and the magnetic field sensing cell that this magnetic field can reset/reset this correspondence makes the magnetic domain direction of the magnetic field sensing cell of this correspondence get back to the direction of the easy axle of described magnetic.
3. magnetic field sensor according to claim 1, it is characterized in that, described magnetic field sensing cell is multiple, and the easy axle of magnetic of each magnetic field sensing cell is parallel to each other, it is multiple that described spiral resets coil, and each spiral resets the corresponding magnetic field sensing cell of coil.
4. magnetic field sensor according to claim 3, is characterized in that, it also includes the first power end, second source end, the first output terminal and the second output terminal,
Described magnetic field sensing cell is four, is designated as the first magnetic field sensing cell, the second magnetic field sensing cell, the 3rd magnetic field sensing cell and the 4th magnetic field sensing cell respectively,
It is four that described spiral resets coil, be designated as the first spiral respectively and reset coil, the second spiral replacement coil, the 3rd spiral replacement coil and the 4th spiral replacement coil, they correspond respectively to the first magnetic field sensing cell, the second magnetic field sensing cell, the 3rd magnetic field sensing cell and the 4th magnetic field sensing cell;
Wherein, the first power end is connected with the first end of the second magnetic field sensing cell with the first end of the first magnetic field sensing cell; Second source end is connected with the second end of the 4th magnetic field sensing cell with the second end of the 3rd magnetic field sensing cell; First output terminal is connected with the first end of the 3rd magnetic field sensing cell with the second end of the first magnetic field sensing cell; Second output terminal is connected with the first end of the 4th magnetic field sensing cell with the second end of the second magnetic field sensing cell.
5. magnetic field sensor according to claim 1, is characterized in that, described magnetic field sensing cell is anisotropic magnetoresistive sensing unit, giant magnetoresistance sensing unit or tunnel magneto sensing unit.
6. magnetic field sensor according to claim 1, is characterized in that, it also comprises:
First medium layer, it resets between the second conductor part of coil at described magnetic field sensing cell and described spiral; With
Second dielectric layer, it resets between the first conductor part of coil at described magnetic field sensing cell and described spiral.
7. magnetic field sensor according to claim 1, it is characterized in that, described magnetic field sensing cell comprises the lengthwise magnetic resistance bar that extends along its magnetic easy axis direction and is formed on described magnetic resistance bar and becomes several buss be parallel to each other of predetermined angular with described magnetic resistance bar.
8. magnetic field sensor according to claim 7, is characterized in that, described magnetic resistance bar is made up of iron, cobalt, nickel, ferro-cobalt boron alloy or Rhometal.
9. a manufacture method for magnetic field sensor, is characterized in that, it comprises:
In substrate, deposit forms the first conductive layer;
Graphically described first conductive layer is to obtain the second conductor part;
On patterned first conductive layer, deposit forms first medium layer;
First medium layer forms multiple magnetic field sensing cell;
Described magnetic field sensing cell forms second dielectric layer;
Etching second dielectric layer and first medium layer form multiple through hole;
Fill each through hole to form privates part in each through hole, deposit second conductive layer in second dielectric layer; With
Graphically described second conductive layer is to obtain the second conductor part;
Wherein, the first conductor part, the second conductor part and privates part are connected to form multiple spirals replacement coils of the spiral magnetic field sensing cell around correspondence.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510700943.XA CN105158710A (en) | 2015-10-26 | 2015-10-26 | Magnetic field sensor provided with spiral reset coils |
| US15/333,178 US20170115363A1 (en) | 2015-10-26 | 2016-10-24 | Magnetic Field Sensor With Three-Dimensional Spiral Reset Coil |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510700943.XA CN105158710A (en) | 2015-10-26 | 2015-10-26 | Magnetic field sensor provided with spiral reset coils |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105158710A true CN105158710A (en) | 2015-12-16 |
Family
ID=54799628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510700943.XA Pending CN105158710A (en) | 2015-10-26 | 2015-10-26 | Magnetic field sensor provided with spiral reset coils |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105158710A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105259520A (en) * | 2015-11-10 | 2016-01-20 | 美新半导体（无锡）有限公司 | A magnetic field sensor with a spiral reset coil |
| CN105911490A (en) * | 2016-05-12 | 2016-08-31 | 美新半导体（无锡）有限公司 | Magnetic field sensor with self-check set lead |
| CN108333538A (en) * | 2018-03-29 | 2018-07-27 | 美新半导体（无锡）有限公司 | A kind of magnetic resistance sensor |
| CN108363025A (en) * | 2018-05-14 | 2018-08-03 | 美新半导体（无锡）有限公司 | Magnetic field sensor |
| CN108931745A (en) * | 2018-05-18 | 2018-12-04 | 上海华虹宏力半导体制造有限公司 | Anisotropic magnetoresistance sensor and its set/reset circuit and manufacturing method |
| CN109581250A (en) * | 2017-09-29 | 2019-04-05 | 恩智浦有限公司 | Magnetic field sensor and manufacturing method with loop construction |
| CN110780243A (en) * | 2019-11-19 | 2020-02-11 | 中国电子科技集团公司第四十九研究所 | High-sensitivity micro magnetic sensing unit for underwater navigation, sensor comprising same and preparation method of sensing unit |
-
2015
- 2015-10-26 CN CN201510700943.XA patent/CN105158710A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105259520A (en) * | 2015-11-10 | 2016-01-20 | 美新半导体（无锡）有限公司 | A magnetic field sensor with a spiral reset coil |
| CN105911490A (en) * | 2016-05-12 | 2016-08-31 | 美新半导体（无锡）有限公司 | Magnetic field sensor with self-check set lead |
| CN105911490B (en) * | 2016-05-12 | 2018-06-15 | 美新半导体（无锡）有限公司 | Magnetic field sensor with self-test resetting conducting wire |
| CN109581250A (en) * | 2017-09-29 | 2019-04-05 | 恩智浦有限公司 | Magnetic field sensor and manufacturing method with loop construction |
| CN108333538A (en) * | 2018-03-29 | 2018-07-27 | 美新半导体（无锡）有限公司 | A kind of magnetic resistance sensor |
| CN108363025A (en) * | 2018-05-14 | 2018-08-03 | 美新半导体（无锡）有限公司 | Magnetic field sensor |
| CN108363025B (en) * | 2018-05-14 | 2023-10-13 | 美新半导体（无锡）有限公司 | magnetic field sensor |
| CN108931745A (en) * | 2018-05-18 | 2018-12-04 | 上海华虹宏力半导体制造有限公司 | Anisotropic magnetoresistance sensor and its set/reset circuit and manufacturing method |
| CN110780243A (en) * | 2019-11-19 | 2020-02-11 | 中国电子科技集团公司第四十九研究所 | High-sensitivity micro magnetic sensing unit for underwater navigation, sensor comprising same and preparation method of sensing unit |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105158710A (en) | Magnetic field sensor provided with spiral reset coils | |
| JP3835354B2 (en) | Magnetic sensor | |
| CN102565727B (en) | For measuring the magnetic resistance sensor in magnetic field | |
| CN105182258A (en) | Magnetic field sensor capable of realizing resetting and self-inspection | |
| US9200884B2 (en) | Magnetic sensor system including three detection circuits | |
| US20180372812A1 (en) | Equilibrium-type magnetic field detection device | |
| JP2011149949A (en) | Magnetoresistive sensor element and method for reducing angular error of magnetoresistive sensor element | |
| US20220308095A1 (en) | Magnetic field detection apparatus and current detection apparatus | |
| US11885835B2 (en) | Magnetic field detection apparatus and current detection apparatus | |
| US20170115363A1 (en) | Magnetic Field Sensor With Three-Dimensional Spiral Reset Coil | |
| JP2006267120A (en) | Magnetic sensor | |
| US11549970B2 (en) | Magnetic field detection apparatus and current detection apparatus | |
| JP2016001118A (en) | Current detection device, magnetic field detection device, and method thereof | |
| CN105911490B (en) | Magnetic field sensor with self-test resetting conducting wire | |
| US20230099490A1 (en) | Magnetic field detection apparatus and current detection apparatus | |
| CN105259520A (en) | A magnetic field sensor with a spiral reset coil | |
| JP7024811B2 (en) | Magnetic field detector and current detector | |
| US11243275B2 (en) | Magnetic field sensing device | |
| CN109738838B (en) | TMR sensor, preparation method thereof and resistance value adjusting method | |
| JP4404069B2 (en) | Magnetic sensor | |
| CN104155620A (en) | Magnetic sensing device and sensing method and preparation technology thereof | |
| CN108363025B (en) | magnetic field sensor | |
| CN205620530U (en) | Magnetic field sensor with self -checking resetting wire | |
| US9817086B2 (en) | CPP-GMR sensor for electronic compass | |
| CN104793155A (en) | Magnetic sensor and preparation technology thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication |