CN105910552A - Optical system vertical type installation and detection device, and installation and detection method - Google Patents
Optical system vertical type installation and detection device, and installation and detection method Download PDFInfo
- Publication number
- CN105910552A CN105910552A CN201610322142.9A CN201610322142A CN105910552A CN 105910552 A CN105910552 A CN 105910552A CN 201610322142 A CN201610322142 A CN 201610322142A CN 105910552 A CN105910552 A CN 105910552A
- Authority
- CN
- China
- Prior art keywords
- dress
- adjusting
- optical system
- vertical
- turntable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses an optical system vertical type installation and detection device, and an optical system vertical type installation and detection method, which belong to the technical field of precision optical application. The optical system vertical type installation and detection device comprises an adjusting turntable and three adjusting brackets arranged on the adjusting turntable from top to bottom in sequence, wherein the adjusting turntable is used for accommodating a part to be installed and detected; the three adjusting brackets are installed on a fixed installation frame, and are respectively a compensating mirror adjusting bracket, an interferometer adjusting bracket and an auto-collimating plane mirror adjusting bracket from bottom to top; and each of three adjusting brackets comprises a vertical guide rail and a transverse guide rail, the vertical guide rail is fixedly connected with the fixed installation frame, and the transverse guide rail can slide up and down along the vertical guide rail. The optical system vertical type installation and detection device and the optical system vertical type installation and detection method can avoid the surface shape problem caused by gravity, can combine and adjust installation and detection optical paths freely, and can satisfy detection requirement of different optical systems.
Description
Technical field
The invention belongs to precision optics applied technical field, relate to a kind of optical system vertical dress checking device and dress detecting method, can be applicable to precision optics applied technical field.
Background technology
Along with the development of China's science and technology, heavy-caliber optical system has in fields such as astronomicalc optics, space remote sensing optics and space ground target detection and identifications and is increasingly widely applied.Heavy-caliber optical system in the design process, in order to meet its high rigidity, high intensity, light-weighted requirement, material, structure that typically employing is special reduce mirror self stress deformation, and use reasonably support, the stress deformation of fit structure reduction mirror group system, raising light axis consistency.Meanwhile, optics dress inspection is also had strict requirements, small light axis consistency error and the stress deformation of mirror all will have a strong impact on optical articles final mass by the heavy-caliber optical system being applied to space optics.
At present, commonly used horizontal dress detecting method, it is illustrated in figure 1 conventional horizontal detection index path, that dress is examined it is important that ensure the light axis consistency of detection light path.If the real use state of mirror group non-horizontal, or when applying in agravic environment, the defect of this dress detecting method is apparent, i.e. cause shaft hole matching gap and stress, deformation uneven along minute surface radial direction due to mirror self gravitation, thus affect light axis consistency and the mirror shape of optical system, cause the image defects of optical articles, especially heavy-caliber optical system impact is become apparent from.
As in Fig. 2 (a), (b), (c) show primary mirror and commonly uses supporting way schematic diagram, and these three supporting way all causes face shape defect due to primary mirror gravity.
Summary of the invention
In order to avoid or reduce the face shape defect that causes due to primary mirror gravity, the present invention provides a kind of optical system vertical dress checking device and dress detecting method.
For solving above technical problem, the present invention provides techniques below scheme:
A kind of optical system vertical dress checking device, it is characterized in that and includes adjusting turntable and adjusting 3 adjusting poles set gradually from bottom to top on turntable；Adjusting turntable and filled zero-detection part for placing, 3 adjusting poles are arranged on a fixing and mounting bracket, the most respectively compensating glass adjusting pole, interferometer adjusting pole and autocollimatic plane mirror adjusting pole；
3 adjusting poles all include that vertical guide and cross slide way, described vertical guide are connected with fixing and mounting bracket, and cross slide way can vertically slide up and down by guide rail；
Described compensating glass adjusting pole also includes compensating glass；Described compensating glass is arranged on corresponding cross slide way, it is possible to transversely guide rail horizontally slips；
Described interferometer adjusting pole also includes laser interferometer；Described laser interferometer is arranged on corresponding cross slide way, it is possible to transversely guide rail horizontally slips；
Described autocollimatic plane mirror adjusting pole also includes autocollimatic plane mirror；Described autocollimatic plane mirror is arranged on corresponding cross slide way, it is possible to transversely guide rail horizontally slips.
Above-mentioned vertical guide uses ball-screw, and cross slide way is socketed on ball-screw by cast connecting portion, and the vertical guide of 3 adjusting poles is driven by 3 motors respectively.
Above-mentioned ball-screw has two, and the two ends of cross slide way are socketed on ball-screw by cast connecting portion respectively.
Above-mentioned cross slide way uses ball-screw, and the cross slide way of 3 adjusting poles is driven by 3 motors respectively.
Above-mentioned motor is servomotor.
Above-mentioned adjustment turntable and fixing and mounting bracket are arranged on cushion pad.
Above-mentioned cushion pad is vibration isolation parallels.
Above-mentioned adjustment turntable is five dimension turntables.
Utilizing the method that above-mentioned optical system vertical dress checking device carries out dress inspection, it is characterized in that and comprises the following steps,
1) the vertical shaft series regulation of turntable will be adjusted vertically, as dress inspection optical axis center line；
2) will be fixed on the object stage adjusting turntable by dress zero-detection part, make the optical axis by filling zero-detection part overlap with dress inspection optical axis center line；
3) adjust compensating glass and laser interferometer position, check by dress inspection part surface shape, if face shape meets requirement, then carry out next step；If face shape is unsatisfactory for requirement, according to face shape feedback result, adjusting the position of laser interferometer and/or by dress zero-detection part, the face shape of making meets requirement, then carry out next step；
4) on the premise of ensureing to be overlapped with dress inspection optical axis center line by the optical axis of dress zero-detection part, assemble by dress zero-detection part, complete dress inspection work.
Wherein,
Step 2) it is achieved in the following ways:
Rotate and adjust turntable, to be rotated along with the rotation adjusting turntable by dress zero-detection part, imaging is carried out to by dress zero-detection part in by dress zero-detection part rotation process, observe the movement locus of imaging point, if movement locus is unsatisfactory for requirement, then continues regulation and adjust turntable, until movement locus meets requirement, now, overlapped with dress inspection optical axis center line by the optical axis of dress zero-detection part；
Wherein, being filled zero-detection part is optical system or optics list mirror.
The present invention has following technical effect that
1. using vertical dress detecting method, this device and method simple possible, it is to avoid the face shape problem caused in existing dress inspection technology due to gravity, dress inspection light path can independent assortment regulate, and can meet the detection demand of different optical system；
2. the various dimensions that accurate five dimension turntables can realize optical articles adjust, and beneficially light axis consistency the most accurately regulates；
The most electronic LM rolling guide two-dimensional combination SERVO CONTROL can realize being accurately positioned and adjusting, thus ensures to fill stability and the ease for use of inspection process；
Accompanying drawing explanation
Fig. 1 is horizontal detection index path；
Fig. 2 is primary mirror support mode schematic diagram；
Wherein, Fig. 2 (a) is primary mirror support mode schematic diagram one, and Fig. 2 (b) is primary mirror support mode schematic diagram two, and Fig. 2 (c) is primary mirror support mode schematic diagram three, and these three supporting way all causes face shape defect due to primary mirror gravity；
Fig. 3 is vertical check light path (one)；
Fig. 4 is five dimension turntable profile front views；
Fig. 5 is five dimension turntable sectional plan views；
Fig. 6 is five dimension turntable top views；
Fig. 7 is A-A sectional view in Fig. 4；
Fig. 8 is B-B sectional view in Fig. 4 (i.e. the structural representation of trimming assembly)；
Fig. 9 is five dimension turntable pitching and locking principle orientation diagram；
Figure 10 is five dimension turntable translations and locking principle orientation diagram；
Figure 11 is five dimension turntable three-dimensional shaft side views；
Figure 12 is five dimension turntable three dimensional sectional view；
Label in figure: 111-adjusts turntable；211-fixing and mounting bracket；311-compensating glass adjusting pole；411-interferometer adjusting pole；511-autocollimatic plane mirror adjusting pole；611-autocollimatic plane mirror；711-laser interferometer；811-compensating glass；911-is filled the single mirror of inspection；101-is filled microscopy group；
null1-45 ° of plane mirror、2-leveling supports base、3-casing、4-side is fixing axle、5-thrust ball bearing、6-orientation rotation axle、7-the first angular contact ball bearing、8-bearing distance collar、10-torque motor、11-bearing gland、13-supports platform、14-the first translating rails mounting disc、15-track、16-the second translating rails mounting disc、17-bearing block、18-the second bearing、19-pitch axis、20-transition frame、21-object stage、22-threaded rod、23-adjusting nut、24-the first pitch regulation ball pivot、25-the second pitch regulation ball pivot、26-the first gear、27-the second gear、28-bearing housing、29-worm gear、30-worm screw、31-excentric sleeve、32-adpting flange、33-worm shaft、34-drives motor.
Detailed description of the invention
As it is shown on figure 3, the present invention includes adjusting turntable 111, adjust turntable for placing by dress zero-detection part；Adjust and set gradually 3 adjusting poles from bottom to top on turntable；3 adjusting poles are arranged on a fixing and mounting bracket 211, the most respectively compensating glass adjusting pole 311, interferometer adjusting pole 411 and autocollimatic plane mirror adjusting pole；Fixing and mounting bracket is the truss structure with higher-strength and rigidity being welded by shaped steel；
3 adjusting poles all include that vertical guide and cross slide way, vertical guide are connected with fixing and mounting bracket, and cross slide way can vertically slide up and down by guide rail；
Compensating glass adjusting pole also includes compensating glass 811；Compensating glass is arranged on cross slide way, it is possible to transversely guide rail horizontally slips；
Interferometer adjusting pole also includes laser interferometer；Laser interferometer 711 is arranged on cross slide way, it is possible to transversely guide rail horizontally slips；
Autocollimatic plane mirror adjusting pole also includes autocollimatic plane mirror 611；Described autocollimatic plane mirror is arranged on cross slide way, it is possible to transversely guide rail horizontally slips.
Vertical guide uses ball-screw, and cross slide way is socketed on ball-screw by cast connecting portion, and the vertical guide of 3 adjusting poles is driven by 3 motors respectively；Ball-screw can arrange two, and the two ends of cross slide way are socketed on ball-screw by cast connecting portion respectively；
Cross slide way may be used without ball-screw, and the cross slide way of 3 adjusting poles is driven by 3 motors respectively；Motor is servomotor.
By driven by servomotor vertical guide and cross slide way, to realize the regulation along X, Y both direction of compensating glass and laser interferometer；
Adjustment turntable and fixing and mounting bracket can be arranged on cushion pad.Cushion pad can use vibration isolation parallels.To adjust the explanation present invention as a example by turntable uses five dimension turntables, five dimension turntables include vertical shaft series, translation assembly, tilting component and trimming assembly；Vertical shaft series includes that 45 ° of plane mirrors 1, leveling support base 2, torque motor 10, bearing gland 11, support platform 13, casing 3 and the orientation being arranged in casing and fix axle 4, thrust ball bearing 5, orientation rotation axle the 6, first angular contact ball bearing 7, bearing distance collar 8；
Described box bottom is provided with through hole, casing and 45 ° of plane mirrors and is each attached to leveling and supports on base；45 ° of plane mirrors are positioned at the through hole of box bottom；The sidewall of casing is provided with two through holes, and the two through hole is relative, and the central axis of the two through hole passes described 45 ° of plane mirrors；
Axle is fixed in a tubular form in described orientation, and orientation is fixed axle and is arranged on box bottom, and the central axis of axle and the central axes of box bottom through hole are fixed in orientation；Orientation rotation axle is in a tubular form, it is socketed in orientation and fixes on axle, first angular contact ball bearing is a pair, the back-to-back orientation that is installed on of this diagonal angle contact ball bearing is fixed between axle and orientation rotation axle, the internal diameter of this diagonal angle contact ball bearing and orientation fix that axle is connected, external diameter is connected with orientation rotation axle, and between this diagonal angle contact ball bearing, inside and outside circle is supported by bearing distance collar respectively and connects；Orientation is fixed and is equipped with seam boss on axle and orientation rotation axle, and in the pair of horns contact ball bearing of five dimension turntables, the seam boss that axle and orientation rotation axle are fixed by orientation the most respectively in the inside and outside footpath of the angular contact ball bearing being positioned at bottom supports connection；In this diagonal angle contact ball bearing, the inside and outside footpath of angular contact ball bearing located above is compressed by bearing gland；Bearing gland is fixed axle and is connected by screw is fixing with orientation rotation axle and/or orientation；
Thrust ball bearing is single direction thrust ball bearing, is socketed on orientation rotation axle；Thrust ball bearing includes Huan Hexia footpath, footpath ring, and the external diameter of lower footpath ring is more than the external diameter of upper footpath ring, and lower footpath ring contacts with box bottom；
Torque motor is loaded between orientation rotation axle and casing, and torque motor is used for driving orientation rotation axle to rotate；Supporting platform level to be fixed on orientation rotation axle, the center supporting platform is provided with through hole, the central axis of this through hole and the central axes of box bottom through hole.
Translation assembly includes the first translating rails mounting disc 14 and the second translating rails mounting disc 16；First translating rails mounting disc and the second translating rails mounting disc are sequentially arranged on support platform from bottom to top, be equipped with through hole in first translating rails mounting disc and the second translating rails mounting disc, the central axis of the two through hole all with the central axes of box bottom through hole；
Second translating rails mounting disc is positioned at above the first translating rails mounting disc, and the second translating rails mounting disc can be slided in the first translating rails mounting disc, and the route of slip is cross.
Tilting component includes transition frame 20, object stage 21, bearing block 17 and the second bearing 18 being fixed on bearing block；
Described pitch axis has 4, and 4 pitch axis are evenly distributed in the circumferential direction in transition frame, and pitch axis includes vertical section and traversing section；Vertical section is connected with transition frame, described second bearing holder (housing, cover) is connected on traversing section, and described bearing block has 4, in these 4 bearing blocks, two relative bearing blocks are fixed on the upper surface of the second translating rails mounting disc, additionally relative to two bearing blocks be fixed on the lower surface of object stage；The route that the cross of two groups of relative two bearing block line compositions and the second translating rails mounting disc are slided in the first translating rails mounting disc overlaps.
Five dimension turntables also include trimming assembly, and trimming assembly includes first gear the 26, second gear 27, bearing housing 28, worm gear 29, worm screw 30, excentric sleeve 31, worm shaft 33 and drives motor 34；
First gear, the second gear, bearing housing and worm gear are respectively positioned in casing；First gear and the engagement of the second gear, the first gear is connected by screw and orientation rotation axle are fixing, and the second gear and worm gear are each attached on bearing housing, are provided with location bearing in bearing housing, and bearing housing is fixed on cabinet wall；
Motor is driven to be positioned at outside described casing, drive motor output shaft to fix with one end of worm shaft to be connected, the other end of worm shaft is connected with worm screw, excentric sleeve is socketed in the interlude of worm shaft, by eccentric adjustment axle sleeve offset in the horizontal direction, realize adjusting use and the disabling of the distance between worm and wormwheel, i.e. fine adjustment function；Excentric sleeve is provided with adpting flange, and adpting flange is fixedly installed in cabinet exterior by screw；Realize the engagement of worm gear and worm screw by eccentric adjusting sleeve and separate, in the case of worm gear with worm engaging, driven by motor worm screw is driven to rotate, worm screw rotarily drives worm gear and rotates, and then drive the second gear to rotate, second gear driven the first gear rotates, and then drives orientation rotation axle to rotate, it is achieved that the rotation of five dimension turntables.
Tilting component also includes threaded rod 22, adjusting nut the 23, first pitch regulation ball pivot 24 and the second pitch regulation ball pivot 25, transition frame is provided with 4 through holes being uniformly distributed along the circumference, through hole is near described bearing block, and described threaded rod has 4, and each threaded rod passes a through hole；Described adjusting nut is arranged on the two ends up and down of threaded rod；
Being equipped with groove in the transition frame at the upper and lower two ends of through hole, be respectively symmetrically loading the first pitch regulation ball pivot and the second pitch regulation ball pivot in two grooves, the concave surface of the first pitch regulation ball pivot and the convex surface of the second pitch regulation ball pivot coordinate assembling；
The bearing block being fixed on the second translating rails mounting disc upper surface is clutch shaft bearing seat, and the bearing block being fixed on object stage lower surface is the second bearing block；
Threaded rod near clutch shaft bearing seat is fixed on the lower surface of object stage, and the threaded rod near the second bearing block is fixed on the upper surface of the second translating rails mounting disc.The pitch regulation of object stage is realized by adjusting nut position.
Described first translating rails mounting disc is fixed on support platform, first translating rails mounting disc upper surface is provided with the first track, first track is cross, first track is centrally located at the center of the first translating rails mounting disc, second translating rails mounting disc lower surface is provided with the second track, second track is cross, second track is centrally located at the center of the second translating rails mounting disc, first track and the second track are connected by rolling guide slide block, and the end of the first track and the second track is provided with positioning and locking device.
Second bearing can use angular contact ball bearing, bar heart ball bearing or ball bearing；Orientation is fixed axle, orientation rotation axle, support platform, transition frame and/or object stage and is provided with lightening hole.
Described cabinet wall is provided with the first boss flange, and orientation rotation axle outer wall is provided with the second boss flange, and torque motor includes determining ring and rotating ring, described determine ring and the first boss flange and connects by screw is fixing, and rotating ring and the second boss flange are by the fixing connection of screw.
Five dimension turntable table tops can realize rotating along Y-axis, simultaneously can be along X, and Z axis translates, and around X, the regulation of Z axis pitching.
The optical system vertical dress checking device utilizing the present invention carries out the method (such as Fig. 3) of dress inspection: in Fig. 3 is single mirror by dress zero-detection part；Concrete dress inspection step is:
1. adjust vibration isolation parallels, by five dimension turntable vertical shaft series regulations vertically, as dress inspection optical axis center line；
2. will be fixed by bolts to adjust on the object stage of turntable by the single mirror of dress inspection, the optical axis by filling the single mirror of inspection is made to overlap with dress inspection optical axis center line, specific as follows: to rotate and adjust turntable, to be rotated along with the rotation adjusting turntable by the single mirror of dress inspection, imaging is carried out to by dress zero-detection part in by the single mirror rotation process of dress inspection, observe the movement locus of imaging point, if movement locus is unsatisfactory for requirement, then continue regulation five dimension turntable, by five dimension turntables along X, the translational adjustment of Y-direction and pitch regulation, until movement locus meets requirement, now, overlapped with dress inspection optical axis center line by the optical axis of the single mirror of dress inspection；
3. adjust compensating glass and laser interferometer position according to optical detection light path, complete dress inspection light path, check by the single mirror surface-shaped of dress inspection, if face shape meets requirement, then carry out next step；If face shape is unsatisfactory for requirement, according to face shape feedback result, adjusting the position of laser interferometer and/or by dress zero-detection part, the face shape of making meets requirement, then carry out next step；
4., on the premise of ensureing light axis consistency, on the premise of i.e. being overlapped with dress inspection optical axis center line by the optical axis of dress zero-detection part, complete dress inspection work to being carried out assembling by dress zero-detection part.
Claims (10)
1. an optical system vertical dress checking device, it is characterised in that: include adjusting turntable and turning adjusting
3 adjusting poles set gradually from bottom to top on platform；Adjust turntable and filled zero-detection part for placing, 3
Adjusting pole is arranged on a fixing and mounting bracket, the most respectively compensating glass adjusting pole, interferometer
Adjusting pole and autocollimatic plane mirror adjusting pole；
3 adjusting poles all include vertical guide and cross slide way, and described vertical guide is solid with fixing and mounting bracket
Even, cross slide way can vertically slide up and down by guide rail；
Described compensating glass adjusting pole also includes compensating glass；Described compensating glass is arranged on cross slide way, energy
Enough transversely guide rails horizontally slip；
Described interferometer adjusting pole also includes laser interferometer；Described laser interferometer is arranged on laterally to be led
On rail, it is possible to transversely guide rail horizontally slips；
Described autocollimatic plane mirror adjusting pole also includes autocollimatic plane mirror；Described autocollimatic plane mirror is arranged on horizontal stroke
On direction guiding rail, it is possible to transversely guide rail horizontally slips.
Optical system the most according to claim 1 vertical dress checking device, it is characterised in that: described perpendicular
Direction guiding rail uses ball-screw, and cross slide way is socketed on ball-screw by cast connecting portion, 3 adjustment
The vertical guide of support is driven by 3 motors respectively.
Optical system the most according to claim 2 vertical dress checking device, it is characterised in that: described rolling
Ballscrew has two, and the two ends of cross slide way are socketed on ball-screw by cast connecting portion respectively.
Optical system the most according to claim 3 vertical dress checking device, it is characterised in that: described horizontal stroke
Direction guiding rail uses ball-screw, and the cross slide way of 3 adjusting poles is driven by 3 motors respectively.
Optical system the most according to claim 4 vertical dress checking device, it is characterised in that: described electricity
Machine is servomotor.
Optical system the most according to claim 5 vertical dress checking device, it is characterised in that: described tune
Turn over platform and fixing and mounting bracket are arranged on cushion pad.
Optical system the most according to claim 6 vertical dress checking device, it is characterised in that: described slow
Die head is vibration isolation parallels.
Optical system the most according to claim 7 vertical dress checking device, it is characterised in that: described tune
Turn over platform is five dimension turntables.
9. utilize the method that the arbitrary optical system of claim 1 to 8 vertical dress checking device carries out dress inspection, its
It is characterised by: comprise the following steps,
1) the vertical shaft series regulation of turntable will be adjusted vertically, as dress inspection optical axis center line；
2) by being fixed on the object stage adjusting turntable by dress zero-detection part, make to be filled optical axis and the dress of zero-detection part
Inspection optical axis center line overlaps；
3) adjust compensating glass and laser interferometer position, check by dress inspection part surface shape, want if face shape meets
Ask, then carry out next step；If face shape is unsatisfactory for requirement, according to face shape feedback result, adjust laser interference
The position of instrument and/or by dress zero-detection part, the face shape of making meets requirement, then carry out next step；
4) on the premise of ensureing to be overlapped with dress inspection optical axis center line by the optical axis of dress zero-detection part, examine by dress
Part assembles, and completes dress inspection work.
Method the most according to claim 9, it is characterised in that:
Step 2) it is achieved in the following ways:
Rotate and adjust turntable, will be rotated along with the rotation adjusting turntable by dress zero-detection part, by dress zero-detection
Part rotation process carries out imaging to by dress zero-detection part, observes the movement locus of imaging point, if motion rail
Mark is unsatisfactory for requirement, then continue regulation and adjust turntable, until movement locus meets requirement, now, filled
The optical axis of zero-detection part overlaps with dress inspection optical axis center line；
Wherein, being filled zero-detection part is optical system or optics list mirror.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610322142.9A CN105910552B (en) | 2016-05-16 | 2016-05-16 | A kind of optical system is vertical to fill checking device and dress detecting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610322142.9A CN105910552B (en) | 2016-05-16 | 2016-05-16 | A kind of optical system is vertical to fill checking device and dress detecting method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105910552A true CN105910552A (en) | 2016-08-31 |
| CN105910552B CN105910552B (en) | 2018-07-03 |
Family
ID=56749190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610322142.9A Expired - Fee Related CN105910552B (en) | 2016-05-16 | 2016-05-16 | A kind of optical system is vertical to fill checking device and dress detecting method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105910552B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112596197A (en) * | 2020-12-23 | 2021-04-02 | 中国华录集团有限公司 | Plate glass adjusting mechanism capable of guaranteeing space reference |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101666628B (en) * | 2009-09-22 | 2010-12-01 | 哈尔滨工业大学 | Measuring apparatus with two spliced shafts for large-caliber convex aspheric surface |
| CN102997864B (en) * | 2012-12-17 | 2015-06-17 | 北京理工大学 | Detection system of large-aperture optical aspherical mirror |
| CN205079744U (en) * | 2015-09-08 | 2016-03-09 | 上海现代先进超精密制造中心有限公司 | Detection apparatus for off axis paraboloidal mirror shape of face precision |
| CN105547179B (en) * | 2015-12-01 | 2018-01-26 | 中国科学院长春光学精密机械与物理研究所 | A kind of measuring method of aspherical equation |
| CN205748297U (en) * | 2016-05-16 | 2016-11-30 | 中国科学院西安光学精密机械研究所 | A kind of optical system vertical dress checking device |
-
2016
- 2016-05-16 CN CN201610322142.9A patent/CN105910552B/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112596197A (en) * | 2020-12-23 | 2021-04-02 | 中国华录集团有限公司 | Plate glass adjusting mechanism capable of guaranteeing space reference |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105910552B (en) | 2018-07-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100400225C (en) | Non-spherical optical component composite machining and testing machine tools | |
| CN100547633C (en) | Be used to detect the gantry type four dimensional automatic measurement of the photochromic performance of display screen | |
| EP2813811B1 (en) | Inside-diameter measurement device | |
| CN107707822B (en) | Online camera module active focusing equipment and method | |
| CN100463773C (en) | Numerical control pipe fitting assembly machine | |
| CN106338719B (en) | A kind of two one for rcs measurement hang object support turntable | |
| CN104905811A (en) | Aligning adjustment and separation apparatus of multimodal imaging system, and aligning method | |
| CN105758343A (en) | C-axis gyration center calibrating device and method based on double standard ball | |
| CN207501862U (en) | A kind of Liftable type binocular stereo vision measuring device | |
| CN105425824B (en) | A kind of precision five ties up turntable | |
| CN205302012U (en) | Accurate five dimension revolving stages | |
| CN109974586B (en) | Geometric error compensation device for laser tracker | |
| CN101520320A (en) | Aspheric aperture splicing measuring device based on spherical air-bearing shafts | |
| CN113917669B (en) | Off-axis reflection type telescopic system and installation and adjustment detection device and method thereof | |
| CN102749036A (en) | Online diameter measurement device for large free forgings | |
| CN107655416B (en) | Shaft diameter detection device and detection method | |
| CN205748297U (en) | A kind of optical system vertical dress checking device | |
| CN204813930U (en) | Aim at regulation and separator and PET -CT installation frame | |
| CN102279532B (en) | Device for assembling and regulating lens of projection objective of lithography machine | |
| CN105910552A (en) | Optical system vertical type installation and detection device, and installation and detection method | |
| CN110653788B (en) | Robot device for measuring target positioning in box body | |
| KR100912651B1 (en) | Apparatus for automatic visual inspection | |
| CN208026612U (en) | A kind of small internal surface of hole on-line measuring device | |
| CN116193107A (en) | Wide-angle and long-focus module compatible test structure and test device | |
| CN105698682B (en) | A kind of comprehensive measuring method of lathe spatial accuracy based on laser tracker |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180703 Termination date: 20200516 |