CN105904079A - Wire-feeding type electron beam material-increasing manufacturing equipment and operating method thereof - Google Patents

Wire-feeding type electron beam material-increasing manufacturing equipment and operating method thereof Download PDF

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Publication number
CN105904079A
CN105904079A CN201610481383.8A CN201610481383A CN105904079A CN 105904079 A CN105904079 A CN 105904079A CN 201610481383 A CN201610481383 A CN 201610481383A CN 105904079 A CN105904079 A CN 105904079A
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China
Prior art keywords
wire
control unit
central control
electron beam
layer
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CN201610481383.8A
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Inventor
韦寿祺
朱国坤
黄小东
秦玉江
张建飞
黄兴泉
覃胤鸿
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Guilin Shida Electrical And Mechanical Technology Engineering Co Ltd
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Guilin Shida Electrical And Mechanical Technology Engineering Co Ltd
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Priority to CN201610481383.8A priority Critical patent/CN105904079A/en
Publication of CN105904079A publication Critical patent/CN105904079A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/0046Welding
    • B23K15/0086Welding welding for purposes other than joining, e.g. built-up welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/0026Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • B23K15/06Electron-beam welding or cutting within a vacuum chamber

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)

Abstract

The invention discloses wire-feeding type electron beam material-increasing manufacturing equipment and an operating method thereof. A deflecting and scanning device and a secondary electron receiving device are further mounted on an electronic gun. The deflecting and scanning device and the secondary electron receiving device are connected to a central control unit. When an electron beam sent out by the electronic gun processes a manufacturing layer of a fixed segment of a workpiece, an exciting current of the deflecting and scanning device is controlled by the central control unit, so that the electron beam of the electronic gun turns around to quickly scan the manufacturing layer of the fixed segment, the secondary electron receiving device transmits secondary electronic signals received in a back-scanning process to the central control unit, and the central control unit synchronously records the secondary electronic signal of each scanning point on the fixed segment; after scanning, the central control unit analyzes and processes the recorded secondary electronic signal data so as to determine whether the edge of the manufacturing layer of the fixed segment reaches an expected value or not and determine whether the manufacturing layer of the fixed segment has hole defects or not for the convenience of immediate repair.

Description

Wire feed type electron beam increases material and manufactures equipment and operation method thereof
Technical field
The present invention relates to electron beam process equipment technical field, be specifically related to a kind of wire feed type electron beam and increase material Manufacture equipment and operation method thereof.
Background technology
Wire feed type electron beam increases material manufacture equipment work-piece manufacture needs vacuum environment.But, due to electron beam Increase material and manufacture the work characteristics of equipment self, in its vacuum environment, be inevitably present high temperature, high light, X The interference factors such as the pollution of ray, metal dust, electromagnetic field.Therefore, existing wire feed type electron beam increases material system Manufacturing apparatus there is also following two shortcoming and needs to be captured:
1. can produce contraction in various degree due to workpiece under different materials and different sizes, and send The reasons such as silk process wire belt shake, therefore wire feed type electron beam increasing material manufacture equipment manufactured at workpiece Cheng Zhong, workpiece size is difficult to accurately control.Although using negative feedback control technology that this can be overcome difficult in principle Topic, but have a problem in that under this type of vacuum environment, conventional on-line monitoring such as photoelectric sensor, sonar Sensor, radio sensor are the most inapplicable, and the most degenerative signal detection technique cannot solve.Furthermore In manufacture process metal bath, impurity splashes and causes workpiece manufacture layer surface defect also to need to monitor in time and repair Mend.
2. the wire tray of wire feed type electron beam increasing material manufacture equipment is put in a vacuum chamber, when manufacturing large-scale workpiece, Need more to renew wire tray, vacuum chamber now must be made to exit.For avoiding workpiece to aoxidize, need to make workpiece cold But lower temperature is arrived reinflated.And workpiece cooling is very slow in vacuum, large-scale workpiece cools down needs Several to dozens of hour.Evacuation the most again is needed, when therefore replacing wire tray expends a large amount of after changing wire tray Between, the efficiency manufacturing workpiece will be the lowest.Additionally change workpiece continued growth from cold conditions base material after wire tray, The change of workpiece each several part physically or chemically performance, the i.e. concordance of workpiece performance can be caused poor.
Summary of the invention
The technical problem to be solved is that existing wire feed type electron beam increasing material manufacture equipment cannot realize The problem of on-line monitoring, it is provided that a kind of wire feed type electron beam increases material and manufactures equipment and operation method thereof.
For solving the problems referred to above, the present invention is achieved by the following technical solutions:
Wire feed type electron beam increase material manufacture equipment, including central control unit, power-supply system, wire feed system, Coolant circulation system, pumped vacuum systems, vacuum chamber, telecontrol equipment, electron gun, trough and work Platform;Central control unit, power-supply system, the outdoor section of wire feed system, coolant circulation system, take out Vacuum system is arranged on outside vacuum chamber, the indoor section of wire feed system, telecontrol equipment, electron gun, walks Wire casing and workbench are arranged on the inside of vacuum chamber.Being a difference in that, electron gun has been installed the most further partially Sweeping device and secondary electron receive device, inclined sweeping device and secondary electron receive device by supply unit with Central control unit connects;After the manufacture layer of electron beam process finished piece(s) one canned paragraph sent when electron gun, The exciting current of inclined sweeping device is controlled so that the electron beam of electron gun is later quickly swept by central control unit Retouching the manufacture layer of this canned paragraph, secondary electron receives the secondary electron letter that device will receive in flyback process Number it is sent to central control unit, by scanning element secondary each on this canned paragraph of central control unit synchronous recording Electronic signal;After the end of scan, the secondary electron signal data of record are analyzed by central control unit Process, it is judged that whether the edge manufacturing layer of this canned paragraph reaches desired value, and judges this canned paragraph Manufacture whether layer exists cavity blemish, in order to repair in time.
In such scheme, wire feed system is by support, wire tray, wire belt, butt welding machine, dynamic sealing device Form with wire-feed motor;Support, wire tray, wire belt, butt welding machine are arranged on the outside of vacuum chamber, wire feed Machine is arranged on the inside of vacuum chamber;The wire tray being wound with wire belt is rack-mount, wire belt warp It is connected to wire-feed motor by the dynamic sealing device being arranged on vacuum chamber;Butt welding machine is located at wire tray and movable sealing dress Between putting;Wire-feed motor is controlled wire belt to be delivered to the lower section of electron gun and manufactures layer by central control unit Top, and melted by electron beam, molten metal liquid falls and is manufacturing on layer;When a dish wire belt When changing another dish wire belt after being finished, by butt welding machine by the end of upper dish wire belt and lower wall metal The top of silk ribbon welds together, to realize continuing wire feed.
Above-mentioned wire feed type electron beam increases material and manufactures the operation method of equipment, comprises the steps:
Step 1, set-up procedure;Including wearing silk, fixing substrate, evacuation and generation technological parameter;
Step 2, manufacture workpiece;After the vacuum condition of vacuum chamber reaches, the power supply starting electron gun generates Electron beam, forms molten bath on workpiece, and telecontrol equipment drives electron gun and wire-feed motor motion and/or workbench Drive workpiece rotates, and wire belt melts under electron beam effect simultaneously, piles up according to predetermined machining path; After often manufacturing the manufacture layer of finished piece(s) one canned paragraph, electron beam the most quickly scanning, scanning area is the most electric The invariant position of sub-rifle, is controlled scanning by central control unit by controlling the exciting current of inclined sweeping device The scanning track in region, secondary electron receives device and the secondary electron signal received in flyback process is passed Deliver to central control unit, by the secondary electricity of each scanning element on this canned paragraph of central control unit synchronous recording Subsignal;After the end of scan, central control unit is analyzed place to the secondary electron signal data of record Reason, it is judged that whether the edge manufacturing layer in scanning area reaches desired value, and judges system in scanning area Make whether layer exists cavity blemish, in order to repair in time;After completing a manufacture manufacturing layer, Electron gun rises a level altitude manufacturing thickness, carries out upper one manufacture manufacturing layer, respectively manufactures interlayer Form metallurgical binding, pile up layer by layer;
Step 3, workpiece cool down;When producing required workpiece, close power supply and the stopping of electron gun Wire feed system works, stop motion device and working table movement, vacuum pump unit and coolant circulation unit Keep on the go state;The workpiece manufactured cools down under vacuum conditions;Cooling terminates, and stops vacuum pump machine Group and coolant circulation unit work, and finally take out workpiece.
As improvement, still further comprise and change a step between step 2 and step 3, i.e. central authorities control Unit detects when wire belt is used up soon, just sends and changes silk prompting, simultaneously closes off electron beam, stop sending Silk machine wire feed, and stop motion device and working table movement, central control unit record thrusts dot information; Now the end of upper dish wire belt is welded together by butt welding machine with the top of lower wall wire belt, changes silk After end, central control unit is from thrusting a job repeating step 2.
Above-mentioned steps 1 particularly as follows:
Step 1-1, wear silk;Allow wire belt sequentially pass through butt welding machine, dynamic sealing device, trough and Wire-feed motor is gone directly below electron gun;
Step 1-2, fixing substrate;One piece of metal basal board is fixed on workbench will be on this metal basal board Produce;
Step 1-3, evacuation;Close door for vacuum chamber, start coolant circulation unit, start true successively Empty pump assembly and the molecular pump of electron gun, until internal vacuum chamber vacuum and electron gun internal vacuum are all Reach job requirement;
Step 1-4, generation technological parameter;Central control unit is according to the three-dimensional CAD of workpiece to be manufactured Model is carried out hierarchy slicing process by data processing software, forms machining locus;Set electron beam parameter and After wire feed rate, data processing software automatically generates nc program.
Compared with prior art, the present invention has a characteristic that
1, solve workpiece manufacture process on-line monitoring problem, improve the accuracy of manufacture, reduce or eliminate manufacture Defect.
2, solve continuous wire feed problem, improve and manufacture efficiency.
Accompanying drawing explanation
Fig. 1 is that electron beam of the present invention increases material manufacture equipment composition schematic diagram.
Fig. 2 is that in Fig. 1, electron beam increases material manufacture equipment E-beam area scanning schematic diagram.
Labelling in figure: 1, central control unit;21, supply unit;22, external cable;23, enter the room Cable;24, vacuum electric cable joint;31, support;32, wire tray;33, wire belt;34, butt welding Machine;35, dynamic sealing device;36, wire-feed motor;41, coolant circulation unit;42, coolant pipe; 43, coolant access apparatus;51, vacuum pump unit;52, vacuum pipe;53, vacuum flange;6、 Vacuum chamber;7, telecontrol equipment;8, electron gun;81, scanning means;82, secondary electron receives device; 83, electron beam;9, trough;10, workbench;11, workpiece;12, layer is manufactured;13, scanning area Territory.
Detailed description of the invention
A kind of wire feed type electron beam increases material and manufactures equipment, as it is shown in figure 1, mainly by central control unit 1, Power-supply system, wire feed system, coolant circulation system, pumped vacuum systems, vacuum chamber 6, telecontrol equipment 7, Electron gun 8, trough 9 and workbench 10 form.Central control unit 1, power-supply system, wire feed system It is outside that the outdoor section of system, coolant circulation system, pumped vacuum systems are arranged on vacuum chamber 6, wire feed system Indoor section, telecontrol equipment 7, electron gun 8, trough 9 and the workbench 10 of system are arranged on vacuum chamber The inside of 6.
Central control unit 1: be responsible for control and the monitoring of whole equipment, including setting of electron beam 83 parameter Data process etc. fixed, that workpiece 11 three-dimensional CAD model carries out hierarchy slicing.Central control unit 1 leads to Cross and carry out Real Data Exchangs with supply unit 21 and complete function above.
Power-supply system: by supply unit 21, external cable 22, enter the room cable 23 and vacuum electric cable joint 24 compositions.Supply unit 21 includes the control electricity controlling power supply, coolant circulation system of wire feed system Source, pumped vacuum systems control power supply, telecontrol equipment 7 drive power supply, the power supply of electron gun 8 and The driving power supply of workbench 10.Supply unit 21 is by external cable 22 and the electricity consumption portion outside vacuum chamber 6 Part connects, as respective control power supply is delivered to the wire feed system outside vacuum chamber 6, coolant circulation respectively In the consuming parts that system is corresponding with pumped vacuum systems.Supply unit 21 is passed through vacuum by cable 23 of entering the room Cable connector 24 is connected with the consuming parts within vacuum chamber 6, as provided wire feed system wire-feed motor 36 Control the driving electricity driving power supply, the power supply of electron gun 8 and workbench 10 of power supply, telecontrol equipment 7 Source.The structure of vacuum electric cable joint 24 has vacuum and seals and X-ray-preventing leakage function.
Wire feed system: by support 31, wire tray 32, wire belt 33, butt welding machine 34, dynamic sealing device 35 and wire-feed motor 36 form.Wire-feed motor 36 is controlled wire belt 33 to deliver to by central control unit 1 The lower section of electron gun 8 and the top manufacturing layer 12 of workpiece 11, and melted by electron beam 83, fusing Molten metal fall on the manufacture layer 12 of workpiece 11.Wire tray 32 is placed on the outside of vacuum chamber 6, a dish gold Belong to after silk ribbon is finished and update wire tray 32, butt welding machine 34 wire belt 33 is welded together continuation wire feed. It is internal that wire belt 33 introduces vacuum chamber 6 through dynamic sealing device 35, and the structure of dynamic sealing device 35 possesses Vacuum dynamic seal and X-ray-preventing leakage function, its movable sealing has two kinds of versions, a kind of for circle The wire belt in (including ellipse) cross section, the another kind of metal for rectangle (including square) cross section Silk ribbon.Wire tray 32 is placed on outside the vacuum chamber under atmospheric condition, uses movable sealing mode to introduce in vacuum chamber Portion, wire tray 32 Renewal process is not required to exit vacuum chamber, asks so that the present invention solves continuous wire feed Topic, improves and manufactures efficiency.
Coolant circulation system: come in and gone out by coolant circulation unit 41, coolant pipe 42 and coolant and fill Put 43 compositions.The structure of coolant access apparatus 43 has vacuum and seals and X-ray-preventing leakage function. Telecontrol equipment 7, electron gun 8, workbench 10, wire-feed motor in coolant circulation system cooling vacuum room 6 36 grades need the parts of cooling.
Pumped vacuum systems: be made up of vacuum pump unit 51, vacuum pipe 52 and vacuum flange 53, vacuum The structure of flange 53 makes vacuum pipe 52 connect with vacuum chamber 6 and possess X-ray-preventing leakage function. Pumped vacuum systems effect be maintain vacuum chamber 6 internal gas pressure be 1 × 10-3Pa~1 × 10-1PaWork Environment.
Vacuum chamber 6: processed by 30~35mm thick Plate Weldings, the wall of vacuum chamber 6, Men Jibi, The window opened on door and Kong Douxu are resistant to 1 atmospheric pressure, be provided simultaneously with vacuum sealing and X-ray-preventing is let out Leakage function.
Telecontrol equipment 7: electron gun 8 and the three-axis moving of wire-feed motor 36, and the one of electron gun 8 are provided Dimension tilts.
Electron gun 8: produce electron beam 83 and receive secondary electron signal.Electron gun 8 has been installed and has partially been swept dress Put 81 and secondary electron receive device 82, often manufactured one and fixed segment and manufacture after layer 12, electron beam 83 The most quickly scanning is as shown in Figure 2.The invariant position of scanning area 13 opposing electronic rifle 8, is controlled by central authorities Unit 1 processed controls the scanning track of scanning area 13 by controlling the exciting current of inclined sweeping device 82, And received device 82 by secondary electron and synchronize to receive each point secondary electron signal being sent on scanning track Central control unit 1.After the end of scan, the central control unit 1 secondary electron signal number to receiving According to being analyzed process, it is judged that whether the edge manufacturing layer 12 in scanning area 13 reaches desired value, with And manufacture whether layer 12 exists cavity blemish in judging scanning area 13, in order to repair in time.From And make the present invention solve workpiece 11 manufacture process on-line monitoring problem, reduce or eliminate manufacturing defect.
Trough 9: the cable in fixing vacuum chamber 6 and coolant pipe, provides wire belt tape transport simultaneously Passage, and thermal insulation protection is provided.Trough 9 has part to be fixed on vacuum chamber 6 inwall, has part Being fixed on telecontrol equipment 7 goes directly electron gun 8 and follow electron gun 8 is synchronized with the movement.
Workbench 10: fixing workpiece 11, and can perform to rotate and one-dimensional banking motion.
The work process of wire feed type electron beam of the present invention increasing material manufacture equipment:
The first step: set-up procedure, including wearing silk, fixing substrate, evacuation and generation technological parameter.
1. wear silk: wire tray 32 is hung on support 31, pull out wire belt 33, allow wire belt 33 Sequentially pass through butt welding machine 34, dynamic sealing device 35, trough 9 and wire-feed motor 36 to go directly electron gun 8 times Side.
2. fixing substrate: be fixed on workbench 10 by one piece of metal basal board, workpiece 11 will be at this metal Grown on substrates is out.The composition of metal basal board is consistent or close with the composition of workpiece 11.
3. evacuation: close vacuum chamber 6, start cooling system, successively start vacuum pump unit 51 and The molecular pump of electron gun, until vacuum chamber 6 internal vacuum and electron gun 8 internal vacuum all reach work It is required.
4. technological parameter is generated: central control unit 1 is according to the three-dimensional CAD model of workpiece 11 to be manufactured Carried out hierarchy slicing process by data processing software, form machining locus;Set electron beam parameter and wire feed After speed, data processing software automatically generates nc program.
Second step: manufacture workpiece.
After the vacuum condition of vacuum chamber 6 reaches, the power supply starting electron gun 8 produces electron beam 83, in work Forming molten bath on part 11, telecontrol equipment 7 drives electron gun 8 and wire-feed motor 36 to move and/or workbench 10 drive workpiece 11 to rotate, and wire belt 33 melts under electron beam 83 acts on simultaneously, according to predetermined Machining path is piled up.
Often having manufactured one to fix segment and manufacture after layer 12, electron beam 83 the most quickly scanning is as shown in Figure 2. The invariant position of scanning area 13 opposing electronic rifle 8, by central control unit 1 by controlling inclined sweeping device The exciting current of 82 controls each point on the scanning track of scanning area 13, and synchronous recording scanning track Secondary electron signal.After the end of scan, the secondary electron signal data of record are entered by central control unit 1 Row analyzing and processing, it is judged that whether the edge manufacturing layer 12 in scanning area 13 reaches desired value, and sentences Manufacture whether layer 12 exists cavity blemish in disconnected scanning area 13, in order to repair in time.
After completing a manufacture manufacturing layer, electron gun 8 rises a level altitude manufacturing thickness, Carrying out upper one manufacture manufacturing layer, each interlayer that manufactures forms metallurgical binding, piles up layer by layer.
3rd step: change silk.
Central control unit 1 detects that the wire belt 33 in wire tray 32 has been used up just to send soon and changes silk and carry Show, simultaneously close off electron beam 83, stop wire-feed motor 36 wire feed, stop motion device 7 and workbench 10 Motion, central control unit 1 have recorded and thrusts dot information.Now wire tray 32 more renews, butt welding machine Wire belt 33 is welded together by 34, and pad carries out deburring process so that solder joint smooths.Change silk After end, central control unit 1 is from thrusting a repetition second step job.If setting up steel wire storage in wire feed system Device a, then process of changing just is not required to interrupt the manufacture work of workpiece 11.
4th step: workpiece cools down.
Workpiece 11 manufacture process constantly repeats second step and the 3rd step until producing required workpiece 11, It is then shut off the power supply of electron gun 8 and stops wire feed system work, stop motion device 7 and workbench 10 Motion, vacuum pump unit 51 and coolant circulation unit 41 keep on the go state.The workpiece 11 manufactured Cooling down under vacuum conditions, cool time is set by technological requirement.Cooling terminates, and stops vacuum pump unit 51 and coolant circulation unit 41 work, finally take out workpiece 11.
Electron beam the most of the present invention increases material and manufactures equipment employing built-in electronic rifle structure, is conducive to improving vacuum The utilization rate of room.But the electron beam using external electron gun structure increases material manufactures equipment, if using secondary Electronic signal monitors manufacture process technology and uses external dynamic seal wire feed technology to broadly fall into the present invention Protection domain.

Claims (5)

1. wire feed type electron beam increase material manufacture equipment, including central control unit (1), power-supply system, Wire feed system, coolant circulation system, pumped vacuum systems, vacuum chamber (6), telecontrol equipment (7), Electron gun (8), trough (9) and workbench (10);Central control unit (1), power-supply system, The outdoor section of wire feed system, coolant circulation system, pumped vacuum systems are arranged on vacuum chamber (6) Outside, the indoor section of wire feed system, telecontrol equipment (7), electron gun (8), trough (9) With the inside that workbench (10) is arranged on vacuum chamber (6);It is characterized in that:
Inclined sweeping device (81) installed the most further by electron gun (8) and secondary electron receives device (82), Sweeping device (81) and secondary electron partially receives device (82) by supply unit (21) and central authorities' control Unit processed (1) connects;
The electron beam (83) sent when electron gun (8) processes the system of workpiece (11) canned paragraph After making layer (12), central control unit (1) control the exciting current of inclined sweeping device (82), The electron beam (83) making electron gun (8) the most quickly scans the manufacture layer (12) of this canned paragraph, Secondary electron receives device (82) and the secondary electron signal received in flyback process is sent to central authorities Control unit (1), by each scanning element secondary on this canned paragraph of central control unit (1) synchronous recording Electronic signal;After the end of scan, the central control unit (1) the secondary electron signal data to record It is analyzed processing, it is judged that whether the edge of the manufacture layer (12) of this canned paragraph reaches desired value, with And judge whether the manufacture layer (12) of this canned paragraph exists cavity blemish, in order to repair in time.
Wire feed type electron beam the most according to claim 1 increases material and manufactures equipment, it is characterised in that: Wire feed system is by support (31), wire tray (32), wire belt (33), butt welding machine (34), dynamic close Seal apparatus (35) and wire-feed motor (36) composition;Support (31), wire tray (32), wire belt (33), Butt welding machine (34) is arranged on the outside of vacuum chamber (6), and wire-feed motor (36) is arranged on vacuum chamber (6) Inside;The wire tray (32) being wound with wire belt (33) is arranged on support (31), metal Silk ribbon (33) is connected to wire-feed motor (36) via the dynamic sealing device (35) being arranged on vacuum chamber (6); Butt welding machine (34) is located between wire tray (32) and dynamic sealing device (35);
Wire-feed motor (36) is controlled wire belt (33) to deliver to electronics by central control unit (1) The lower section of rifle (8) and the top of manufacture layer (12), and melted by electron beam (83), fusing Molten metal fall to manufacturing on layer (12);Another dish is changed after a dish wire belt (33) is finished During wire belt (33), by butt welding machine (34) by the end of upper dish wire belt (33) and lower wall The top of wire belt (33) welds together, to realize continuing wire feed.
3. wire feed type electron beam based on claim 1 increases the operation method of material manufacture equipment, and it is special Levy and be, comprise the steps:
Step 1, set-up procedure;Including wearing silk, fixing substrate, evacuation and generation technological parameter;
Step 2, manufacture workpiece;
After the vacuum condition of vacuum chamber (6) reaches, the power supply starting electron gun (8) generates electron beam (83), forming molten bath on workpiece (11), telecontrol equipment (7) drives electron gun (8) and send Silk machine (36) motion and/or workbench (10) drive workpiece (11) to rotate, wire belt simultaneously (33) melt under electron beam (83) acts on, pile up according to predetermined machining path;
After often manufacturing the manufacture layer (12) of finished piece(s) (11) canned paragraph, electron beam (83) is later Quickly scanning, is come by controlling the exciting current of inclined sweeping device (82) by central control unit (1) Controlling the scanning track of scanning area (13), secondary electron receives device (82) by flyback process The secondary electron signal received is sent to central control unit (1), by central control unit (1) The secondary electron signal of each scanning element on this canned paragraph of synchronous recording;After the end of scan, central authorities control single The secondary electron signal data of record are analyzed processing by unit (1), it is judged that scanning area (13) Whether the edge of interior manufacture layer (12) reaches desired value, and judges manufacture in scanning area (13) Whether layer (12) exists cavity blemish, in order to repair in time;
After completing a manufacture manufacturing layer (12), electron gun (8) rises one and manufactures layer (12) Thick level altitude, carries out upper one manufacture manufacturing layer (12), respectively manufactures formation smelting between layer (12) Gold combines, and piles up layer by layer;
Step 3, workpiece cool down;
When producing required workpiece (11), close the power supply of electron gun (8) and stop wire feed System works, stop motion device (7) and workbench (10) motion, vacuum pump unit (51) Keep on the go state with coolant circulation unit (41);The workpiece (11) manufactured is at vacuum state Lower cooling;Cooling terminates, and stops vacuum pump unit (51) and coolant circulation unit (41) work, Finally take out workpiece (11).
Wire feed type electron beam the most according to claim 3 increases material and manufactures the operation method of equipment, It is characterized in that, still further comprise and change a step between step 2 and step 3, i.e. central authorities control single Unit (1) detects when wire belt (33) is used up soon, just sends and changes silk prompting, simultaneously closes off electricity Son bundle (83), stopping wire-feed motor (36) wire feed, and stop motion device (7) and workbench (10) Motion, central control unit (1) record thrusts dot information;Now butt welding machine (34) is by upper dish gold The top of the end and lower wall wire belt (33) that belong to silk ribbon (33) welds together, and changes silk and terminates Rear central control unit (1) is from thrusting a job repeating step 2.
Wire feed type electron beam the most according to claim 3 increases material and manufactures the operation method of equipment, It is characterized in that, step 1 particularly as follows:
Step 1-1, wear silk;Wire belt (33) is allowed to sequentially pass through butt welding machine (34), movable sealing dress Put below the through electron gun (8) of (35), trough (9) and wire-feed motor (36);
Step 1-2, fixing substrate;One piece of metal basal board is fixed on workbench (on 10, workpiece (11) To produce on this metal basal board;
Step 1-3, evacuation;Close vacuum chamber (6) door, start coolant circulation unit (41), Start vacuum pump unit (51) and the molecular pump of electron gun successively, until vacuum chamber (6) is internal true Reciprocal of duty cycle and electron gun (8) internal vacuum all reach job requirement;
Step 1-4, generation technological parameter;Central control unit (1) is according to workpiece (11) to be manufactured Three-dimensional CAD model carried out hierarchy slicing process by data processing software, form machining locus;Set After electron beam (83) parameter and wire feed rate, data processing software automatically generates nc program.
CN201610481383.8A 2016-06-24 2016-06-24 Wire-feeding type electron beam material-increasing manufacturing equipment and operating method thereof Pending CN105904079A (en)

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CN106340339A (en) * 2016-11-23 2017-01-18 桂林狮达机电技术工程有限公司 Automatic setting method and system for focusing currents on workpiece surface of electron beam processing equipment
CN106984894A (en) * 2017-03-14 2017-07-28 西安智熔金属打印系统有限公司 The electron beam fuse of vector wire feed increases material device
CN107806843A (en) * 2017-09-25 2018-03-16 西安智熔金属打印系统有限公司 Electron beam fuse increasing material manufacturing topography measurement device and its compensating control method
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CN109465531A (en) * 2018-11-20 2019-03-15 清华大学 A kind of electron beam fuse deposition increasing material manufacturing real-time monitoring system
CN109752401A (en) * 2019-01-16 2019-05-14 清华大学 Increasing material manufacturing device and method with real-time in-situ detection function
CN110284111A (en) * 2019-07-29 2019-09-27 福建阿石创新材料股份有限公司 A kind of preparation system of metal targets
CN110508918A (en) * 2019-09-06 2019-11-29 中国航空制造技术研究院 A kind of electron beam increases fuse material manufacturing device and method
CN110548966A (en) * 2019-09-06 2019-12-10 佛山耀立电气有限公司 control method and device for wire replacement of welding machine, welding machine and computer readable storage medium
CN111250854A (en) * 2020-02-10 2020-06-09 哈尔滨工业大学 Local cooling auxiliary device and method for electron beam fuse additive manufacturing

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CN106180718A (en) * 2016-09-22 2016-12-07 桂林狮达机电技术工程有限公司 Possess electron beam rapid forming equipment and the operation method thereof of on-line monitoring function
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CN106340339B (en) * 2016-11-23 2017-10-20 桂林狮达机电技术工程有限公司 Electron beam process equipment workpiece surface focus current automatic setting method and system
CN108372355A (en) * 2016-12-20 2018-08-07 中国航空制造技术研究院 A kind of electron beam fuse increasing material manufacturing device and method realized functionally gradient material (FGM) and prepared
CN108372355B (en) * 2016-12-20 2020-07-17 中国航空制造技术研究院 Electron beam fuse wire additive manufacturing device and method for realizing preparation of gradient material
CN106984894A (en) * 2017-03-14 2017-07-28 西安智熔金属打印系统有限公司 The electron beam fuse of vector wire feed increases material device
CN106984894B (en) * 2017-03-14 2019-08-23 西安智熔金属打印系统有限公司 The electron beam fuse of vector wire feed increases material device
CN107806843B (en) * 2017-09-25 2020-01-31 西安智熔金属打印系统有限公司 Electron beam fuse material increase manufacturing appearance measuring device and compensation control method thereof
CN107806843A (en) * 2017-09-25 2018-03-16 西安智熔金属打印系统有限公司 Electron beam fuse increasing material manufacturing topography measurement device and its compensating control method
CN108115249A (en) * 2017-12-29 2018-06-05 西安交通大学 A kind of system for repairing monocrystalline or orienting peritectic alloy blade
CN109465531A (en) * 2018-11-20 2019-03-15 清华大学 A kind of electron beam fuse deposition increasing material manufacturing real-time monitoring system
CN109752401A (en) * 2019-01-16 2019-05-14 清华大学 Increasing material manufacturing device and method with real-time in-situ detection function
CN110284111A (en) * 2019-07-29 2019-09-27 福建阿石创新材料股份有限公司 A kind of preparation system of metal targets
CN110548966A (en) * 2019-09-06 2019-12-10 佛山耀立电气有限公司 control method and device for wire replacement of welding machine, welding machine and computer readable storage medium
CN110508918A (en) * 2019-09-06 2019-11-29 中国航空制造技术研究院 A kind of electron beam increases fuse material manufacturing device and method
CN111250854A (en) * 2020-02-10 2020-06-09 哈尔滨工业大学 Local cooling auxiliary device and method for electron beam fuse additive manufacturing
CN111250854B (en) * 2020-02-10 2021-07-20 哈尔滨工业大学 Local cooling auxiliary device and method for electron beam fuse additive manufacturing

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