CN106180718A - Possess electron beam rapid forming equipment and the operation method thereof of on-line monitoring function - Google Patents

Possess electron beam rapid forming equipment and the operation method thereof of on-line monitoring function Download PDF

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Publication number
CN106180718A
CN106180718A CN201610842455.7A CN201610842455A CN106180718A CN 106180718 A CN106180718 A CN 106180718A CN 201610842455 A CN201610842455 A CN 201610842455A CN 106180718 A CN106180718 A CN 106180718A
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China
Prior art keywords
electron
electron beam
control unit
central control
secondary electron
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Pending
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CN201610842455.7A
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Chinese (zh)
Inventor
韦寿祺
黄小东
朱国坤
秦玉江
张建飞
黄兴泉
覃胤鸿
费翔
陆苇
唐强
刘新才
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Guilin Shida Electrical And Mechanical Technology Engineering Co Ltd
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Guilin Shida Electrical And Mechanical Technology Engineering Co Ltd
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Priority to CN201610842455.7A priority Critical patent/CN106180718A/en
Publication of CN106180718A publication Critical patent/CN106180718A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/20Direct sintering or melting
    • B22F10/28Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/36Process control of energy beam parameters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/30Process control
    • B22F10/38Process control to achieve specific product aspects, e.g. surface smoothness, density, porosity or hollow structures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F10/00Additive manufacturing of workpieces or articles from metallic powder
    • B22F10/80Data acquisition or data processing
    • B22F10/85Data acquisition or data processing for controlling or regulating additive manufacturing processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F12/00Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
    • B22F12/40Radiation means
    • B22F12/49Scanners
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y30/00Apparatus for additive manufacturing; Details thereof or accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B33ADDITIVE MANUFACTURING TECHNOLOGY
    • B33YADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y50/00Data acquisition or data processing for additive manufacturing
    • B33Y50/02Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Abstract

The present invention discloses a kind of electron beam rapid forming equipment possessing on-line monitoring function and operation method thereof, including central control unit, electron gun power supply, partially sweeps power supply, benchtop supply, electron gun, operating room, dress powder case, workbench, secondary electron catcher and secondary electron transmitter;Secondary electron catcher receives the secondary electron information that electron beam microbeam scanning process produces;Secondary electron transmitter sends into central control unit after above-mentioned secondary electron information carries out shaping amplification;The secondary electron signal of synchronous recording is analyzed processing by central control unit, it is judged that manufacture layer whether existing defects.The present invention utilizes secondary reflection electronic signal that electron beam rapid forming equipment is manufactured element process to carry out quality on-line monitoring, thus the shortcoming overcoming optical monitoring means vulnerable to pollution.

Description

Possess electron beam rapid forming equipment and the operation method thereof of on-line monitoring function
Technical field
The present invention relates to electron beam process equipment technical field, the electron beam being specifically related to possess on-line monitoring function is quick Former and operation method thereof.
Background technology
Electron beam Rapid Prototyping technique is a kind of emerging technology that latest developments are got up, and it makes use of metal powder material at electronics The principle of the lower fusing of bundle bombardment, completes the course of processing of part by the way of the scanning fusing of layering constituency.Electron beam is quick The advantage such as be formed with that high, the available material source of capacity usage ratio is extensive and forming speed is high.Adding man-hour, dress powder case is by metal powder Material is delivered to spread on powder platform, and Powder spreader spreads into the powder on paving powder platform in the forming face of formation cylinder equably.Electron gun The electron beam launched under control of the computer is focused in the forming face of drip molding, and has according to cross section profile information The sintering selected.Metal powder material is sintered together under the bombardment of electron beam, and the part formed with lower floor is bonding, layer by layer Pile up, until whole part has all sintered.
Electron beam Rapid Prototyping Process can accidentally occur molten metal splashing or the phenomenon such as metal powder is defeated and dispersed, and these phenomenons will be made Workpiece, defect is become even to scrap.Electron beam Rapid Prototyping Process is necessary manufacture workpiece is carried out real time on-line monitoring, and is going out Existing defect is repaired or reports to the police warning in time.At present, the most frequently used monitoring means is exactly optical image security technology, but electron beam is fast Rapid-result shape is operated in vacuum environment, and the metallic vapour of generation gradually pollutes light path system, and optical monitoring device will thicken Unclear.
Summary of the invention
The technical problem to be solved is the optical monitoring means that existing electron beam Rapid Prototyping Process is used The problem of vulnerable to pollution, it is provided that a kind of electron beam rapid forming equipment possessing on-line monitoring function and operation method thereof.
For solving the problems referred to above, the present invention is achieved by the following technical solutions:
Possess the electron beam rapid forming equipment of on-line monitoring function, including central control unit, electron gun power supply, partially sweep Power supply, benchtop supply, electron gun, operating room, dress powder case and workbench;Operating room is airtight vacuum cavity;Dress powder case and Within workbench is arranged on operating room, and dress powder case is positioned at the top of workbench;Electron gun is arranged on outside operating room, and electronics The electron beam that rifle sends enters operating room and focuses on the paving powder platform surface of workbench;Central control unit is through electron gun power supply Connect electron gun;Central control unit connects the inclined sweeping device in electron gun through partially sweeping power supply;Central control unit is through workbench Power supply connecting working table;Central control unit connects dress powder case;It is a difference in that, still further comprises secondary electron catcher With secondary electron transmitter;Within secondary electron catcher is arranged on operating room, and it is at the electron beam inlet of operating room;Two Secondary electronics transmitter is arranged on outside operating room;Secondary electron catcher is via secondary electron transmitter with central control unit even Connect;Secondary electron catcher receives the secondary electron information that electron beam microbeam scanning process produces;Secondary electron transmitter is to upper State after secondary electron information carries out shaping amplification and send into central control unit;The central control unit secondary electron to synchronous recording Signal is analyzed processing, it is judged that manufacture layer whether existing defects.
In such scheme, inclined sweeping device is arranged on the port of export of electron gun.
In such scheme, electron gun power supply includes Heating Cathode Source, accelerates high voltage power supply, the inclined power supply of grid and focus on electricity Source.
In such scheme, workbench includes Powder spreader, paving powder platform, formation cylinder and lowering or hoisting gear.
The operation method of the above-mentioned electron beam rapid forming equipment possessing on-line monitoring function, including preparation process, workpiece Manufacturing step and workpiece cooling step.
Above-mentioned workpiece manufacturing step specifically includes:
Step 2-1) fall formation cylinder: central control unit is to benchtop supply output order, the lifting dress of operative employee's station Put so that the formation cylinder Surface Subsidence one of workbench manufactures layer height, open dress powder case switch, the powder in dress powder case simultaneously Fall on the paving powder platform of workbench;
Step 2-2) paving powder: the powder on paving powder platform is uniformly fed in formation cylinder by the Powder spreader of workbench so that The upper surface of formation cylinder is concordant with paving powder platform;
Step 2-3) the scanning fusing of electron beam constituency: central control unit carries out the scanning of electron beam constituency, is formed and manufactures layer;
Step 2-4) detection: central control unit controls the exciting current of inclined sweeping device and reduces electron beam value to workbench The surface of formation cylinder carry out microbeam scanning;Secondary electron catcher gathers each of electron beam scanning region and scans the two of tracing point Secondary electronic signal, this secondary electron signal sends to central control unit through the shaping amplification of secondary electron transmitter;
Step 2-5) judge: after the microbeam end of scan, central control unit is each to synchronous recording electron beam scanning region The secondary electron signal of scanning tracing point is analyzed processing, it is judged that manufacture layer whether existing defects;Can if manufacturing layer existence When repairing defect, the most directly return step 2-2);If manufacture layer exists unrepairable defect, then stop workpiece manufacture, and Send alarm signal, by manually processing;If manufacturing layer not existing defects, then return step 2-1), until workpiece has manufactured Become.
Above-mentioned preparation process specifically includes:
Step 1-1) dress powder: powder needed for workpiece to be manufactured is loaded dress powder case;
Step 1-2) fixing substrate: one piece of metal basal board is fixed to the internal lifting with workbench of formation cylinder of workbench Device top;Operated lowering or hoisting gear by central control unit to move so that the paving powder platform of metal basal board upper surface with workbench is put down Together;
Step 1-3) evacuation: close operating room's door, start vacuum pump unit, until inside working chamber vacuum and electronics Rifle internal vacuum all reaches job requirement;
Step 1-4) generate technological parameter: central control unit according to the three-dimensional CAD model of workpiece to be manufactured by data Reason software carries out hierarchy slicing process, forms machining locus;After setting electron beam parameter, data processing software automatically generates numerical control Processor.
The cooling of above-mentioned workpiece particularly as follows: workpiece manufacture is closed electron gun power supply, is partially swept power supply and benchtop supply after completing, Workpiece is allowed to cool down under vacuum conditions.
Compared with prior art, the present invention utilizes secondary reflection electronic signal that electron beam rapid forming equipment is manufactured element Process carries out quality on-line monitoring, thus the shortcoming overcoming optical monitoring means vulnerable to pollution.
Accompanying drawing explanation
Fig. 1 is the structural representation of the electron beam rapid forming equipment possessing on-line monitoring function.
Fig. 2 is electron beam rapid forming equipment electron beam scanning area schematic in Fig. 1.
Labelling in figure: 1, central control unit;2, electron gun power supply;3, power supply is partially swept;4, secondary electron transmitter;5, work Station power supply;6, electron gun;61, inclined sweeping device;7, operating room;8, secondary electron catcher;9, dress powder case;10, workbench; 11, electron beam;12, electron beam scanning region;13, layer is manufactured.
Detailed description of the invention
A kind of electron beam rapid forming equipment possessing on-line monitoring function, as it is shown in figure 1, main by central control unit 1, electron gun power supply 2, partially sweep power supply 3, secondary electron transmitter 4, benchtop supply 5, electron gun 6, operating room 7, secondary electron Catcher 8, dress powder case 9 and workbench 10 form.Operating room 7 is airtight vacuum cavity;Dress powder case 9, workbench 10 and secondary Within electron collector 8 is arranged on operating room 7.Dress powder case 9 is positioned at the top of workbench 1.Secondary electron catcher 8 is in work Electron beam 11 porch of room 7.Electron gun 6 and secondary electron transmitter 4 are arranged on outside operating room 7.The electricity that electron gun 6 sends Son bundle 11 enters operating room 7 and focuses on the paving powder platform surface of workbench 10.Secondary electron catcher 8 becomes via secondary electron Device 4 is sent to be connected with central control unit 1.Central control unit 1 connects electron gun 6 through electron gun power supply 2;Central control unit 1 Through partially sweeping the inclined sweeping device 61 that power supply 3 connects in electron gun;Central control unit 1 is through benchtop supply 5 connecting working table 10;In Centre control unit 1 connects dress powder case 9.
Central control unit 1: undertake control and the monitoring of whole equipment, including setting, the workpiece three of electron beam 11 parameter Vc AD model carries out the data process etc. of hierarchy slicing.Additionally, the secondary electron of synchronous recording is also believed by central control unit 1 Number it is analyzed processing, it is judged that manufacture layer 13 whether existing defects.
Electron gun power supply 2: include the Heating Cathode Source of electron gun 6, the acceleration high voltage power supply of electron beam 11, electron beam 11 The inclined power supply of control gate and focusing power supply etc..
Partially sweep power supply 3: provide x in the inclined sweeping device 61 of electron gun 6 partially to sweep winding and y sweeps the driving power supply of winding partially.
Secondary electron transmitter 4: receive secondary electron catcher 8 signal, is amplified by shaping and sends to central control unit 1。
Benchtop supply 5: in supply workbench 10, workpiece lifting motor and paving powder motor are powered.
Electron gun 6: producing the device of electron beam 11, the port of export at electron gun 6 arranges the inclined sweeping device of x/y plane 61.
Operating room 7: processed by 25~30mm thick Plate Weldings, the wall of operating room 7, Men Jibi, door are opened Window and Kong Douxu are resistant to 1 atmospheric pressure, are provided simultaneously with vacuum and seal and X-ray-preventing leakage function.
Secondary electron catcher 8: it is internal that secondary electron catcher 8 is arranged on operating room 7, electron beam 11 porch;Secondary Electron collector 8 receives the secondary electron information that electron beam 11 scanning process produces.
Dress powder case 9: it is internal that dress powder case 9 is arranged on operating room 7, and the powder of built-in workpiece to be manufactured, by central control unit 1 Control powder delivery time and powder outlet quantity.
Workbench 10: be made up of Powder spreader, paving powder platform, formation cylinder and lowering or hoisting gear.Paving powder platform is in operating room 7 Middle part, and be connected with the bottom of operating room 7 by support bar;Powder spreader is movably placed in paving powder platform upper surface;Paving powder platform position Lower section in dress powder case 9;Formation cylinder is fixed on the lower surface of paving powder platform;The inside of formation cylinder is provided with lifting platform, at the bottom of lifting platform Portion is provided with elevating lever, and this elevating lever is extended to outside operating room 7 by movable sealing structure.
The operation method of the above-mentioned electron beam rapid forming equipment possessing on-line monitoring function, comprises the steps:
The first step: set-up procedure, including dress powder, fixing substrate, evacuation and generation technological parameter.
Step 1-1) dress powder: powder needed for workpiece to be manufactured is loaded dress powder case 9.
Step 1-2) fixing substrate: one piece of metal basal board is fixed to formation cylinder inside and the lowering or hoisting gear top of workbench 10 Portion, workpiece will grow out on this metal basal board.The composition of metal basal board is consistent with the composition of workpiece or close.Controlled by central authorities Unit 1 processed operates lowering or hoisting gear and moves so that metal basal board upper surface is concordant with the paving powder platform of workbench 10.
Step 1-3) evacuation: close 7, operating room, start vacuum pump unit, until operating room 7 internal vacuum and electricity Sub-rifle 6 internal vacuum all reaches job requirement.
Step 1-4) generate technological parameter: central control unit 1 according to the three-dimensional CAD model of workpiece to be manufactured by data Reason software carries out hierarchy slicing process, forms machining locus;After setting electron beam 11 parameter, data processing software automatically generates number Control processor.
Second step: manufacture workpiece, including fall formation cylinder, paving powder, the scanning fusing of electron beam constituency, detection and judge process.
Step 2-1) fall formation cylinder: central control unit 1 gives benchtop supply 5 output order, the liter of operative employee's station 10 Falling unit makes formation cylinder Surface Subsidence one manufacture layer height, opens dress powder case 9 simultaneously and switchs, and work fallen by suitable powder On the paving powder platform of platform 10.
Step 2-2) paving powder: the powder on paving powder platform is uniformly fed in formation cylinder by Powder spreader so that formation cylinder Upper surface is concordant with paving powder platform.
Step 2-3) the scanning fusing of electron beam constituency: central control unit 1 controls electron beam 11 constituency according to processor Scanning, forms manufacture layer 13 as shown in Figure 2.
Step 2-4) detection: central control unit 1 control inclined sweeping device 61 exciting current and reduce electron beam 11 be worth right The surface of the formation cylinder of workbench 10 carries out microbeam scanning, as in figure 2 it is shown, scanning process central control unit 1 synchronous recording is electric Each point secondary electron signal on son bundle scanning area 12 interscan track.The microbeam under-scan of electron beam 11 with fusing powder and Manufacture layer 13 surface that damage has been melted, microbeam scanning process has different secondary electricity on powder surface and manufacture layer 13 surface Sub-reflected signal.
Step 2-5) judge: after the microbeam end of scan, the secondary electron signal data of record are carried out by central control unit 1 Analyzing and processing, it is judged that manufacture layer 13 whether existing defects in electron beam scanning region 12.
If manufacture layer 13 is correct and manufacture workpiece is not fully complete (i.e. manufacture layer 13 number of plies and do not reach setting value), then from step 2-1) start new manufacture layer 13 to manufacture;If manufactured, layer 13 is correct and manufacture workpiece is fully completed and (i.e. manufactures layer 13 number of plies Reach setting value) time, then perform the 3rd step;
If manufacture layer 13 exists recoverable defect, then from step 2-2) start to repeat;If manufacturing layer 13 to exist During the defect of unrepairable, then stop manufacture process, and send alarm signal, by manually processing.
3rd step: workpiece cools down.
Workpiece manufacture is closed electron gun power supply 2, is partially swept power supply 3 and benchtop supply 5 after completing, allow workpiece at vacuum state Lower cooling, is set by technological requirement cool time.Cooling terminates, stop vacuum pump unit, finally take out workpiece and clear up unnecessary Powder.

Claims (7)

1. possess the electron beam rapid forming equipment of on-line monitoring function, including central control unit (1), electron gun power supply (2), Partially sweep power supply (3), benchtop supply (5), electron gun (6), operating room (7), dress powder case (9) and workbench (10);Operating room (7) For airtight vacuum cavity;Within dress powder case (9) and workbench (10) are arranged on operating room (7), and dress powder case (9) is positioned at work The top of platform (1);Electron gun (6) is arranged on outside operating room (7), and the electron beam (11) that electron gun (6) sends enters work Room (7) also focuses on the paving powder platform surface of workbench (10);Central control unit (1) connects electronics through electron gun power supply (2) Rifle (6);Central control unit (1) connects the inclined sweeping device (6) (1) in electron gun through partially sweeping power supply (3);Central control unit (1) through benchtop supply (5) connecting working table (10);Central control unit (1) connects dress powder case (9);It is characterized in that:
Still further comprise secondary electron catcher (8) and secondary electron transmitter (4);Secondary electron catcher (8) is arranged on Within operating room (7), and it is in electron beam (11) porch of operating room (7);Secondary electron transmitter (4) is arranged on operating room (7) outside;Secondary electron catcher (8) is connected with central control unit (1) via secondary electron transmitter (4);
Secondary electron catcher (8) receives the secondary electron information that electron beam (11) microbeam scanning process produces;Secondary electron becomes Device (4) is sent to send into central control unit (1) after above-mentioned secondary electron information carries out shaping amplification;Central control unit (1) is right The secondary electron signal of synchronous recording is analyzed processing, it is judged that manufacture layer (13) whether existing defects.
Possess the electron beam rapid forming equipment of on-line monitoring function the most according to claim 1, it is characterised in that: partially sweep dress Put (61) and be arranged on the port of export of electron gun (6).
Possess the electron beam rapid forming equipment of on-line monitoring function the most according to claim 1, it is characterised in that: electron gun Power supply (2) includes Heating Cathode Source, accelerates high voltage power supply, the inclined power supply of grid and focusing power supply.
Possess the electron beam rapid forming equipment of on-line monitoring function the most according to claim 1, it is characterised in that: workbench (10) Powder spreader, paving powder platform, formation cylinder and lowering or hoisting gear are included.
5. possesses the operation method of the electron beam rapid forming equipment of on-line monitoring function described in claim 1, including preparing step Suddenly, workpiece manufacturing step and workpiece cooling step;Wherein workpiece manufacturing step specifically includes:
Step 2-1) fall formation cylinder: benchtop supply (5) output order given by central control unit (1), operative employee's station (10) Lowering or hoisting gear makes the formation cylinder Surface Subsidence one of workbench (10) manufacture layer height, opens dress powder case (9) switch, dress simultaneously Powder in powder case (9) is fallen on the paving powder platform of workbench (10);
Step 2-2) paving powder: the powder on paving powder platform is uniformly fed in formation cylinder by the Powder spreader of workbench (10) so that The upper surface of formation cylinder is concordant with paving powder platform;
Step 2-3) the scanning fusing of electron beam constituency: central control unit (1) carries out the scanning of electron beam (11) constituency, is formed and manufactures Layer (13);
It is characterized in that: workpiece manufacturing step may further comprise:
Step 2-4) detection: central control unit (1) controls the exciting current of inclined sweeping device (61) and reduces electron beam (11) value The surface of the formation cylinder of workbench (10) is carried out microbeam scanning;Secondary electron catcher (8) gathers electron beam scanning region (12) each secondary electron signal scanning tracing point, this secondary electron signal is amplified through the shaping of secondary electron transmitter (4) Send to central control unit (1);
Step 2-5) judge: after the microbeam end of scan, central control unit (1) is to synchronous recording electron beam scanning region (12) The secondary electron signal of each scanning tracing point is analyzed processing, it is judged that manufacture layer (13) whether existing defects;If manufacture layer (13) exist when can repair defect, the most directly return step 2-2);If manufacture layer (13) exists unrepairable defect, then stop Only workpiece manufacture, and send alarm signal, by manually processing;If manufacturing layer (13) not existing defects, then return step 2- 1), until workpiece manufacture completes.
Possess the operation method of the electron beam rapid forming equipment of on-line monitoring function, its feature the most according to claim 5 It is: preparation process specifically includes:
Step 1-1) dress powder: powder needed for workpiece to be manufactured is loaded dress powder case (9);
Step 1-2) fixing substrate: the formation cylinder that one piece of metal basal board is fixed to workbench (10) is internal and workbench (10) Lowering or hoisting gear top;Moved so that metal basal board upper surface and workbench (10) by central control unit (1) operation lowering or hoisting gear Paving powder platform concordant;
Step 1-3) evacuation: close operating room (7) door, start vacuum pump unit, until operating room's (7) internal vacuum and electricity Sub-rifle (6) internal vacuum all reaches job requirement;
Step 1-4) generate technological parameter: central control unit (1) is processed by data according to the three-dimensional CAD model of workpiece to be manufactured Software carries out hierarchy slicing process, forms machining locus;After setting electron beam (11) parameter, data processing software automatically generates number Control processor.
Possess the operation method of the electron beam rapid forming equipment of on-line monitoring function, its feature the most according to claim 5 It is: workpiece cooling is particularly as follows: workpiece manufacture is closed electron gun power supply (2), partially swept power supply (3) and benchtop supply after completing (5), workpiece is allowed to cool down under vacuum conditions.
CN201610842455.7A 2016-09-22 2016-09-22 Possess electron beam rapid forming equipment and the operation method thereof of on-line monitoring function Pending CN106180718A (en)

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* Cited by examiner, † Cited by third party
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WO2018217646A1 (en) * 2017-05-22 2018-11-29 Howmedica Osteonics Corp. Device for in-situ fabrication process monitoring and feedback control of an electron beam additive manufacturing process
CN109202080A (en) * 2018-10-17 2019-01-15 浙江海洋大学 A kind of method of selective laser fusing preparation TiAl alloy structural member
CN110523982A (en) * 2019-09-04 2019-12-03 武汉轻工大学 A kind of method of composite material increasing material manufacturing
CN110662618A (en) * 2017-03-31 2020-01-07 阿尔卡姆公司 Method and apparatus for forming three-dimensional articles
CN111261313A (en) * 2020-01-17 2020-06-09 桂林狮达技术股份有限公司 Calibration method for scanning system of charged particle beam processing equipment
CN111822705A (en) * 2019-04-16 2020-10-27 Ap&C高端粉末涂料公司 Electron beam melting additive manufacturing machine with dynamic energy adjustment
US11117195B2 (en) 2018-07-19 2021-09-14 The University Of Liverpool System and process for in-process electron beam profile and location analyses
CN115635101A (en) * 2022-12-01 2023-01-24 北京清研智束科技有限公司 Additive manufacturing apparatus and control method thereof
CN117696930A (en) * 2024-02-06 2024-03-15 西安赛隆增材技术股份有限公司 Powder blowing detection method for additive manufacturing device and additive manufacturing device
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541943A1 (en) * 1975-09-19 1977-03-24 Siemens Ag Electron beam engraving device control - using secondary electron detector near workpiece to produce engraved surface image
JPS53127344A (en) * 1977-04-14 1978-11-07 Toshiba Corp Detecting method for weld line at electron beam welding
CN103235626A (en) * 2013-02-06 2013-08-07 桂林狮达机电技术工程有限公司 Accelerator power supply device of rapid prototyping manufacturing equipment for electron beams and control method of accelerator power supply device
CN103878369A (en) * 2014-03-28 2014-06-25 兴化市兴东铸钢有限公司 Three-dimensional porous metal material sintering forming device and method
CN104001915A (en) * 2014-05-22 2014-08-27 华中科技大学 Equipment for manufacturing large-size metal part in high energy beam additive manufacturing mode and control method of equipment
CN104759623A (en) * 2015-03-10 2015-07-08 清华大学 Additive manufacturing device allowing electron beam and laser composite scanning
JP2015176685A (en) * 2014-03-14 2015-10-05 日本電子株式会社 Charged particle beam irradiation device and charged particle beam irradiation method
CN105904079A (en) * 2016-06-24 2016-08-31 桂林狮达机电技术工程有限公司 Wire-feeding type electron beam material-increasing manufacturing equipment and operating method thereof

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541943A1 (en) * 1975-09-19 1977-03-24 Siemens Ag Electron beam engraving device control - using secondary electron detector near workpiece to produce engraved surface image
JPS53127344A (en) * 1977-04-14 1978-11-07 Toshiba Corp Detecting method for weld line at electron beam welding
CN103235626A (en) * 2013-02-06 2013-08-07 桂林狮达机电技术工程有限公司 Accelerator power supply device of rapid prototyping manufacturing equipment for electron beams and control method of accelerator power supply device
JP2015176685A (en) * 2014-03-14 2015-10-05 日本電子株式会社 Charged particle beam irradiation device and charged particle beam irradiation method
CN103878369A (en) * 2014-03-28 2014-06-25 兴化市兴东铸钢有限公司 Three-dimensional porous metal material sintering forming device and method
CN104001915A (en) * 2014-05-22 2014-08-27 华中科技大学 Equipment for manufacturing large-size metal part in high energy beam additive manufacturing mode and control method of equipment
CN104759623A (en) * 2015-03-10 2015-07-08 清华大学 Additive manufacturing device allowing electron beam and laser composite scanning
CN105904079A (en) * 2016-06-24 2016-08-31 桂林狮达机电技术工程有限公司 Wire-feeding type electron beam material-increasing manufacturing equipment and operating method thereof

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110662618A (en) * 2017-03-31 2020-01-07 阿尔卡姆公司 Method and apparatus for forming three-dimensional articles
US11532760B2 (en) 2017-05-22 2022-12-20 Howmedica Osteonics Corp. Device for in-situ fabrication process monitoring and feedback control of an electron beam additive manufacturing process
WO2018217646A1 (en) * 2017-05-22 2018-11-29 Howmedica Osteonics Corp. Device for in-situ fabrication process monitoring and feedback control of an electron beam additive manufacturing process
US11117195B2 (en) 2018-07-19 2021-09-14 The University Of Liverpool System and process for in-process electron beam profile and location analyses
CN109202080A (en) * 2018-10-17 2019-01-15 浙江海洋大学 A kind of method of selective laser fusing preparation TiAl alloy structural member
US11491575B2 (en) 2019-04-16 2022-11-08 Arcam Ab Electron beam melting additive manufacturing machine with dynamic energy adjustment
CN111822705A (en) * 2019-04-16 2020-10-27 Ap&C高端粉末涂料公司 Electron beam melting additive manufacturing machine with dynamic energy adjustment
CN110523982B (en) * 2019-09-04 2022-06-24 武汉轻工大学 Additive manufacturing method for composite material
CN110523982A (en) * 2019-09-04 2019-12-03 武汉轻工大学 A kind of method of composite material increasing material manufacturing
CN111261313B (en) * 2020-01-17 2021-01-05 桂林狮达技术股份有限公司 Calibration method for scanning system of charged particle beam processing equipment
CN111261313A (en) * 2020-01-17 2020-06-09 桂林狮达技术股份有限公司 Calibration method for scanning system of charged particle beam processing equipment
CN115635101A (en) * 2022-12-01 2023-01-24 北京清研智束科技有限公司 Additive manufacturing apparatus and control method thereof
CN117696930A (en) * 2024-02-06 2024-03-15 西安赛隆增材技术股份有限公司 Powder blowing detection method for additive manufacturing device and additive manufacturing device
CN117696930B (en) * 2024-02-06 2024-05-03 西安赛隆增材技术股份有限公司 Powder blowing detection method for additive manufacturing device and additive manufacturing device

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