CN106180718A - Possess electron beam rapid forming equipment and the operation method thereof of on-line monitoring function - Google Patents
Possess electron beam rapid forming equipment and the operation method thereof of on-line monitoring function Download PDFInfo
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- CN106180718A CN106180718A CN201610842455.7A CN201610842455A CN106180718A CN 106180718 A CN106180718 A CN 106180718A CN 201610842455 A CN201610842455 A CN 201610842455A CN 106180718 A CN106180718 A CN 106180718A
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- electron
- electron beam
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- central control
- secondary electron
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/20—Direct sintering or melting
- B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/30—Process control
- B22F10/36—Process control of energy beam parameters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/30—Process control
- B22F10/38—Process control to achieve specific product aspects, e.g. surface smoothness, density, porosity or hollow structures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/80—Data acquisition or data processing
- B22F10/85—Data acquisition or data processing for controlling or regulating additive manufacturing processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
- B22F12/40—Radiation means
- B22F12/49—Scanners
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y50/00—Data acquisition or data processing for additive manufacturing
- B33Y50/02—Data acquisition or data processing for additive manufacturing for controlling or regulating additive manufacturing processes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
The present invention discloses a kind of electron beam rapid forming equipment possessing on-line monitoring function and operation method thereof, including central control unit, electron gun power supply, partially sweeps power supply, benchtop supply, electron gun, operating room, dress powder case, workbench, secondary electron catcher and secondary electron transmitter;Secondary electron catcher receives the secondary electron information that electron beam microbeam scanning process produces;Secondary electron transmitter sends into central control unit after above-mentioned secondary electron information carries out shaping amplification;The secondary electron signal of synchronous recording is analyzed processing by central control unit, it is judged that manufacture layer whether existing defects.The present invention utilizes secondary reflection electronic signal that electron beam rapid forming equipment is manufactured element process to carry out quality on-line monitoring, thus the shortcoming overcoming optical monitoring means vulnerable to pollution.
Description
Technical field
The present invention relates to electron beam process equipment technical field, the electron beam being specifically related to possess on-line monitoring function is quick
Former and operation method thereof.
Background technology
Electron beam Rapid Prototyping technique is a kind of emerging technology that latest developments are got up, and it makes use of metal powder material at electronics
The principle of the lower fusing of bundle bombardment, completes the course of processing of part by the way of the scanning fusing of layering constituency.Electron beam is quick
The advantage such as be formed with that high, the available material source of capacity usage ratio is extensive and forming speed is high.Adding man-hour, dress powder case is by metal powder
Material is delivered to spread on powder platform, and Powder spreader spreads into the powder on paving powder platform in the forming face of formation cylinder equably.Electron gun
The electron beam launched under control of the computer is focused in the forming face of drip molding, and has according to cross section profile information
The sintering selected.Metal powder material is sintered together under the bombardment of electron beam, and the part formed with lower floor is bonding, layer by layer
Pile up, until whole part has all sintered.
Electron beam Rapid Prototyping Process can accidentally occur molten metal splashing or the phenomenon such as metal powder is defeated and dispersed, and these phenomenons will be made
Workpiece, defect is become even to scrap.Electron beam Rapid Prototyping Process is necessary manufacture workpiece is carried out real time on-line monitoring, and is going out
Existing defect is repaired or reports to the police warning in time.At present, the most frequently used monitoring means is exactly optical image security technology, but electron beam is fast
Rapid-result shape is operated in vacuum environment, and the metallic vapour of generation gradually pollutes light path system, and optical monitoring device will thicken
Unclear.
Summary of the invention
The technical problem to be solved is the optical monitoring means that existing electron beam Rapid Prototyping Process is used
The problem of vulnerable to pollution, it is provided that a kind of electron beam rapid forming equipment possessing on-line monitoring function and operation method thereof.
For solving the problems referred to above, the present invention is achieved by the following technical solutions:
Possess the electron beam rapid forming equipment of on-line monitoring function, including central control unit, electron gun power supply, partially sweep
Power supply, benchtop supply, electron gun, operating room, dress powder case and workbench;Operating room is airtight vacuum cavity;Dress powder case and
Within workbench is arranged on operating room, and dress powder case is positioned at the top of workbench;Electron gun is arranged on outside operating room, and electronics
The electron beam that rifle sends enters operating room and focuses on the paving powder platform surface of workbench;Central control unit is through electron gun power supply
Connect electron gun;Central control unit connects the inclined sweeping device in electron gun through partially sweeping power supply;Central control unit is through workbench
Power supply connecting working table;Central control unit connects dress powder case;It is a difference in that, still further comprises secondary electron catcher
With secondary electron transmitter;Within secondary electron catcher is arranged on operating room, and it is at the electron beam inlet of operating room;Two
Secondary electronics transmitter is arranged on outside operating room;Secondary electron catcher is via secondary electron transmitter with central control unit even
Connect;Secondary electron catcher receives the secondary electron information that electron beam microbeam scanning process produces;Secondary electron transmitter is to upper
State after secondary electron information carries out shaping amplification and send into central control unit;The central control unit secondary electron to synchronous recording
Signal is analyzed processing, it is judged that manufacture layer whether existing defects.
In such scheme, inclined sweeping device is arranged on the port of export of electron gun.
In such scheme, electron gun power supply includes Heating Cathode Source, accelerates high voltage power supply, the inclined power supply of grid and focus on electricity
Source.
In such scheme, workbench includes Powder spreader, paving powder platform, formation cylinder and lowering or hoisting gear.
The operation method of the above-mentioned electron beam rapid forming equipment possessing on-line monitoring function, including preparation process, workpiece
Manufacturing step and workpiece cooling step.
Above-mentioned workpiece manufacturing step specifically includes:
Step 2-1) fall formation cylinder: central control unit is to benchtop supply output order, the lifting dress of operative employee's station
Put so that the formation cylinder Surface Subsidence one of workbench manufactures layer height, open dress powder case switch, the powder in dress powder case simultaneously
Fall on the paving powder platform of workbench;
Step 2-2) paving powder: the powder on paving powder platform is uniformly fed in formation cylinder by the Powder spreader of workbench so that
The upper surface of formation cylinder is concordant with paving powder platform;
Step 2-3) the scanning fusing of electron beam constituency: central control unit carries out the scanning of electron beam constituency, is formed and manufactures layer;
Step 2-4) detection: central control unit controls the exciting current of inclined sweeping device and reduces electron beam value to workbench
The surface of formation cylinder carry out microbeam scanning;Secondary electron catcher gathers each of electron beam scanning region and scans the two of tracing point
Secondary electronic signal, this secondary electron signal sends to central control unit through the shaping amplification of secondary electron transmitter;
Step 2-5) judge: after the microbeam end of scan, central control unit is each to synchronous recording electron beam scanning region
The secondary electron signal of scanning tracing point is analyzed processing, it is judged that manufacture layer whether existing defects;Can if manufacturing layer existence
When repairing defect, the most directly return step 2-2);If manufacture layer exists unrepairable defect, then stop workpiece manufacture, and
Send alarm signal, by manually processing;If manufacturing layer not existing defects, then return step 2-1), until workpiece has manufactured
Become.
Above-mentioned preparation process specifically includes:
Step 1-1) dress powder: powder needed for workpiece to be manufactured is loaded dress powder case;
Step 1-2) fixing substrate: one piece of metal basal board is fixed to the internal lifting with workbench of formation cylinder of workbench
Device top;Operated lowering or hoisting gear by central control unit to move so that the paving powder platform of metal basal board upper surface with workbench is put down
Together;
Step 1-3) evacuation: close operating room's door, start vacuum pump unit, until inside working chamber vacuum and electronics
Rifle internal vacuum all reaches job requirement;
Step 1-4) generate technological parameter: central control unit according to the three-dimensional CAD model of workpiece to be manufactured by data
Reason software carries out hierarchy slicing process, forms machining locus;After setting electron beam parameter, data processing software automatically generates numerical control
Processor.
The cooling of above-mentioned workpiece particularly as follows: workpiece manufacture is closed electron gun power supply, is partially swept power supply and benchtop supply after completing,
Workpiece is allowed to cool down under vacuum conditions.
Compared with prior art, the present invention utilizes secondary reflection electronic signal that electron beam rapid forming equipment is manufactured element
Process carries out quality on-line monitoring, thus the shortcoming overcoming optical monitoring means vulnerable to pollution.
Accompanying drawing explanation
Fig. 1 is the structural representation of the electron beam rapid forming equipment possessing on-line monitoring function.
Fig. 2 is electron beam rapid forming equipment electron beam scanning area schematic in Fig. 1.
Labelling in figure: 1, central control unit;2, electron gun power supply;3, power supply is partially swept;4, secondary electron transmitter;5, work
Station power supply;6, electron gun;61, inclined sweeping device;7, operating room;8, secondary electron catcher;9, dress powder case;10, workbench;
11, electron beam;12, electron beam scanning region;13, layer is manufactured.
Detailed description of the invention
A kind of electron beam rapid forming equipment possessing on-line monitoring function, as it is shown in figure 1, main by central control unit
1, electron gun power supply 2, partially sweep power supply 3, secondary electron transmitter 4, benchtop supply 5, electron gun 6, operating room 7, secondary electron
Catcher 8, dress powder case 9 and workbench 10 form.Operating room 7 is airtight vacuum cavity;Dress powder case 9, workbench 10 and secondary
Within electron collector 8 is arranged on operating room 7.Dress powder case 9 is positioned at the top of workbench 1.Secondary electron catcher 8 is in work
Electron beam 11 porch of room 7.Electron gun 6 and secondary electron transmitter 4 are arranged on outside operating room 7.The electricity that electron gun 6 sends
Son bundle 11 enters operating room 7 and focuses on the paving powder platform surface of workbench 10.Secondary electron catcher 8 becomes via secondary electron
Device 4 is sent to be connected with central control unit 1.Central control unit 1 connects electron gun 6 through electron gun power supply 2;Central control unit 1
Through partially sweeping the inclined sweeping device 61 that power supply 3 connects in electron gun;Central control unit 1 is through benchtop supply 5 connecting working table 10;In
Centre control unit 1 connects dress powder case 9.
Central control unit 1: undertake control and the monitoring of whole equipment, including setting, the workpiece three of electron beam 11 parameter
Vc AD model carries out the data process etc. of hierarchy slicing.Additionally, the secondary electron of synchronous recording is also believed by central control unit 1
Number it is analyzed processing, it is judged that manufacture layer 13 whether existing defects.
Electron gun power supply 2: include the Heating Cathode Source of electron gun 6, the acceleration high voltage power supply of electron beam 11, electron beam 11
The inclined power supply of control gate and focusing power supply etc..
Partially sweep power supply 3: provide x in the inclined sweeping device 61 of electron gun 6 partially to sweep winding and y sweeps the driving power supply of winding partially.
Secondary electron transmitter 4: receive secondary electron catcher 8 signal, is amplified by shaping and sends to central control unit
1。
Benchtop supply 5: in supply workbench 10, workpiece lifting motor and paving powder motor are powered.
Electron gun 6: producing the device of electron beam 11, the port of export at electron gun 6 arranges the inclined sweeping device of x/y plane 61.
Operating room 7: processed by 25~30mm thick Plate Weldings, the wall of operating room 7, Men Jibi, door are opened
Window and Kong Douxu are resistant to 1 atmospheric pressure, are provided simultaneously with vacuum and seal and X-ray-preventing leakage function.
Secondary electron catcher 8: it is internal that secondary electron catcher 8 is arranged on operating room 7, electron beam 11 porch;Secondary
Electron collector 8 receives the secondary electron information that electron beam 11 scanning process produces.
Dress powder case 9: it is internal that dress powder case 9 is arranged on operating room 7, and the powder of built-in workpiece to be manufactured, by central control unit 1
Control powder delivery time and powder outlet quantity.
Workbench 10: be made up of Powder spreader, paving powder platform, formation cylinder and lowering or hoisting gear.Paving powder platform is in operating room 7
Middle part, and be connected with the bottom of operating room 7 by support bar;Powder spreader is movably placed in paving powder platform upper surface;Paving powder platform position
Lower section in dress powder case 9;Formation cylinder is fixed on the lower surface of paving powder platform;The inside of formation cylinder is provided with lifting platform, at the bottom of lifting platform
Portion is provided with elevating lever, and this elevating lever is extended to outside operating room 7 by movable sealing structure.
The operation method of the above-mentioned electron beam rapid forming equipment possessing on-line monitoring function, comprises the steps:
The first step: set-up procedure, including dress powder, fixing substrate, evacuation and generation technological parameter.
Step 1-1) dress powder: powder needed for workpiece to be manufactured is loaded dress powder case 9.
Step 1-2) fixing substrate: one piece of metal basal board is fixed to formation cylinder inside and the lowering or hoisting gear top of workbench 10
Portion, workpiece will grow out on this metal basal board.The composition of metal basal board is consistent with the composition of workpiece or close.Controlled by central authorities
Unit 1 processed operates lowering or hoisting gear and moves so that metal basal board upper surface is concordant with the paving powder platform of workbench 10.
Step 1-3) evacuation: close 7, operating room, start vacuum pump unit, until operating room 7 internal vacuum and electricity
Sub-rifle 6 internal vacuum all reaches job requirement.
Step 1-4) generate technological parameter: central control unit 1 according to the three-dimensional CAD model of workpiece to be manufactured by data
Reason software carries out hierarchy slicing process, forms machining locus;After setting electron beam 11 parameter, data processing software automatically generates number
Control processor.
Second step: manufacture workpiece, including fall formation cylinder, paving powder, the scanning fusing of electron beam constituency, detection and judge process.
Step 2-1) fall formation cylinder: central control unit 1 gives benchtop supply 5 output order, the liter of operative employee's station 10
Falling unit makes formation cylinder Surface Subsidence one manufacture layer height, opens dress powder case 9 simultaneously and switchs, and work fallen by suitable powder
On the paving powder platform of platform 10.
Step 2-2) paving powder: the powder on paving powder platform is uniformly fed in formation cylinder by Powder spreader so that formation cylinder
Upper surface is concordant with paving powder platform.
Step 2-3) the scanning fusing of electron beam constituency: central control unit 1 controls electron beam 11 constituency according to processor
Scanning, forms manufacture layer 13 as shown in Figure 2.
Step 2-4) detection: central control unit 1 control inclined sweeping device 61 exciting current and reduce electron beam 11 be worth right
The surface of the formation cylinder of workbench 10 carries out microbeam scanning, as in figure 2 it is shown, scanning process central control unit 1 synchronous recording is electric
Each point secondary electron signal on son bundle scanning area 12 interscan track.The microbeam under-scan of electron beam 11 with fusing powder and
Manufacture layer 13 surface that damage has been melted, microbeam scanning process has different secondary electricity on powder surface and manufacture layer 13 surface
Sub-reflected signal.
Step 2-5) judge: after the microbeam end of scan, the secondary electron signal data of record are carried out by central control unit 1
Analyzing and processing, it is judged that manufacture layer 13 whether existing defects in electron beam scanning region 12.
If manufacture layer 13 is correct and manufacture workpiece is not fully complete (i.e. manufacture layer 13 number of plies and do not reach setting value), then from step
2-1) start new manufacture layer 13 to manufacture;If manufactured, layer 13 is correct and manufacture workpiece is fully completed and (i.e. manufactures layer 13 number of plies
Reach setting value) time, then perform the 3rd step;
If manufacture layer 13 exists recoverable defect, then from step 2-2) start to repeat;If manufacturing layer 13 to exist
During the defect of unrepairable, then stop manufacture process, and send alarm signal, by manually processing.
3rd step: workpiece cools down.
Workpiece manufacture is closed electron gun power supply 2, is partially swept power supply 3 and benchtop supply 5 after completing, allow workpiece at vacuum state
Lower cooling, is set by technological requirement cool time.Cooling terminates, stop vacuum pump unit, finally take out workpiece and clear up unnecessary
Powder.
Claims (7)
1. possess the electron beam rapid forming equipment of on-line monitoring function, including central control unit (1), electron gun power supply (2),
Partially sweep power supply (3), benchtop supply (5), electron gun (6), operating room (7), dress powder case (9) and workbench (10);Operating room (7)
For airtight vacuum cavity;Within dress powder case (9) and workbench (10) are arranged on operating room (7), and dress powder case (9) is positioned at work
The top of platform (1);Electron gun (6) is arranged on outside operating room (7), and the electron beam (11) that electron gun (6) sends enters work
Room (7) also focuses on the paving powder platform surface of workbench (10);Central control unit (1) connects electronics through electron gun power supply (2)
Rifle (6);Central control unit (1) connects the inclined sweeping device (6) (1) in electron gun through partially sweeping power supply (3);Central control unit
(1) through benchtop supply (5) connecting working table (10);Central control unit (1) connects dress powder case (9);It is characterized in that:
Still further comprise secondary electron catcher (8) and secondary electron transmitter (4);Secondary electron catcher (8) is arranged on
Within operating room (7), and it is in electron beam (11) porch of operating room (7);Secondary electron transmitter (4) is arranged on operating room
(7) outside;Secondary electron catcher (8) is connected with central control unit (1) via secondary electron transmitter (4);
Secondary electron catcher (8) receives the secondary electron information that electron beam (11) microbeam scanning process produces;Secondary electron becomes
Device (4) is sent to send into central control unit (1) after above-mentioned secondary electron information carries out shaping amplification;Central control unit (1) is right
The secondary electron signal of synchronous recording is analyzed processing, it is judged that manufacture layer (13) whether existing defects.
Possess the electron beam rapid forming equipment of on-line monitoring function the most according to claim 1, it is characterised in that: partially sweep dress
Put (61) and be arranged on the port of export of electron gun (6).
Possess the electron beam rapid forming equipment of on-line monitoring function the most according to claim 1, it is characterised in that: electron gun
Power supply (2) includes Heating Cathode Source, accelerates high voltage power supply, the inclined power supply of grid and focusing power supply.
Possess the electron beam rapid forming equipment of on-line monitoring function the most according to claim 1, it is characterised in that: workbench
(10) Powder spreader, paving powder platform, formation cylinder and lowering or hoisting gear are included.
5. possesses the operation method of the electron beam rapid forming equipment of on-line monitoring function described in claim 1, including preparing step
Suddenly, workpiece manufacturing step and workpiece cooling step;Wherein workpiece manufacturing step specifically includes:
Step 2-1) fall formation cylinder: benchtop supply (5) output order given by central control unit (1), operative employee's station (10)
Lowering or hoisting gear makes the formation cylinder Surface Subsidence one of workbench (10) manufacture layer height, opens dress powder case (9) switch, dress simultaneously
Powder in powder case (9) is fallen on the paving powder platform of workbench (10);
Step 2-2) paving powder: the powder on paving powder platform is uniformly fed in formation cylinder by the Powder spreader of workbench (10) so that
The upper surface of formation cylinder is concordant with paving powder platform;
Step 2-3) the scanning fusing of electron beam constituency: central control unit (1) carries out the scanning of electron beam (11) constituency, is formed and manufactures
Layer (13);
It is characterized in that: workpiece manufacturing step may further comprise:
Step 2-4) detection: central control unit (1) controls the exciting current of inclined sweeping device (61) and reduces electron beam (11) value
The surface of the formation cylinder of workbench (10) is carried out microbeam scanning;Secondary electron catcher (8) gathers electron beam scanning region
(12) each secondary electron signal scanning tracing point, this secondary electron signal is amplified through the shaping of secondary electron transmitter (4)
Send to central control unit (1);
Step 2-5) judge: after the microbeam end of scan, central control unit (1) is to synchronous recording electron beam scanning region (12)
The secondary electron signal of each scanning tracing point is analyzed processing, it is judged that manufacture layer (13) whether existing defects;If manufacture layer
(13) exist when can repair defect, the most directly return step 2-2);If manufacture layer (13) exists unrepairable defect, then stop
Only workpiece manufacture, and send alarm signal, by manually processing;If manufacturing layer (13) not existing defects, then return step 2-
1), until workpiece manufacture completes.
Possess the operation method of the electron beam rapid forming equipment of on-line monitoring function, its feature the most according to claim 5
It is: preparation process specifically includes:
Step 1-1) dress powder: powder needed for workpiece to be manufactured is loaded dress powder case (9);
Step 1-2) fixing substrate: the formation cylinder that one piece of metal basal board is fixed to workbench (10) is internal and workbench (10)
Lowering or hoisting gear top;Moved so that metal basal board upper surface and workbench (10) by central control unit (1) operation lowering or hoisting gear
Paving powder platform concordant;
Step 1-3) evacuation: close operating room (7) door, start vacuum pump unit, until operating room's (7) internal vacuum and electricity
Sub-rifle (6) internal vacuum all reaches job requirement;
Step 1-4) generate technological parameter: central control unit (1) is processed by data according to the three-dimensional CAD model of workpiece to be manufactured
Software carries out hierarchy slicing process, forms machining locus;After setting electron beam (11) parameter, data processing software automatically generates number
Control processor.
Possess the operation method of the electron beam rapid forming equipment of on-line monitoring function, its feature the most according to claim 5
It is: workpiece cooling is particularly as follows: workpiece manufacture is closed electron gun power supply (2), partially swept power supply (3) and benchtop supply after completing
(5), workpiece is allowed to cool down under vacuum conditions.
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