CN111261313B - Calibration method for scanning system of charged particle beam processing equipment - Google Patents
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Abstract
The invention discloses a calibration and calibration method for a scanning system of charged particle beam processing equipment, which comprises the steps of firstly establishing a relation between an n-phase winding exciting current instruction and a displacement of a charged particle beam on a corresponding phase winding scanning axis on a working plane, and establishing a one-to-one corresponding relation between a combined displacement and an ideal phase displacement of the charged particle beam on the working plane; and obtaining the included angle of the scanning axis of the n-phase winding; then correcting the phase displacement on the scanning axis of the ideal n-phase winding of the combined displacement into the phase displacement on the scanning axis of the n-phase winding according to the included angle; and finally, establishing a corresponding relation between the coordinates of the charged particle beam scanning point on the working plane and the n-phase winding excitation current instruction according to the relation between the phase excitation current instruction and the phase shift and the relation between the combined displacement and the displacement on the n-phase winding scanning axis, completing calibration and calibration work, and accurately controlling the scanning track of the charged particle beam by the scanning system according to calibration and calibration data.
Description
Technical Field
The invention relates to the technical field of charged particle beam processing equipment, in particular to a calibration and calibration method for a scanning system of charged particle beam processing equipment.
Background
Charged particle beam processing equipment often employs a magnetic scanning device to control the movement of the particle beam in a two-dimensional plane. The magnetic scanning device is in an axisymmetric structure and mainly comprises a ferromagnetic frame and a winding. In large wide-angle accurate scanning equipment with requirements on powder bed electron beam additive manufacturing and the like, the additional defocusing effect of charged particle beams is serious due to the fact that magnetic induction intensity distribution in magnetic scanning devices is uneven due to the quantized distribution of windings, and effective astigmation elimination is difficult to achieve by means of focusing current compensation. Practice proves that the magnetic induction uniformity in the multiphase scanning device is superior to that of the conventional two-phase winding scanning device. In addition, from the perspective of a driving circuit, when the value range of each phase of exciting current is the same, the scanning area of the multi-phase scanning device is larger, and the working broadband of the scanning device is favorably expanded. Therefore, in a charged particle beam processing apparatus requiring a large wide-angle accurate scanning, it is more advantageous to employ a multiphase scanning device.
The main factors affecting the scanning accuracy of the scanning system include: the non-linearity of dead zone and the like of a driving circuit of the scanning device causes the disproportional change of a current control instruction and an output exciting current, the process error of winding of a winding of the scanning device causes the axial line asymmetrical distribution of a phase winding, and in addition, the non-linearity of a ferromagnetic magnetic circuit causes the error of a scanning position and the uncertainty of an additional defocusing correction value due to different decomposition modes of the multi-phase winding scanning device and the exciting current. The numerical relation between the exciting current instruction of the scanning system and the displacement of the charged particle beam is complex, and great difficulty is brought to calibration and calibration work.
Therefore, how to achieve fast and accurate calibration of a scanning system, especially a multiphase scanning device, is a problem that needs to be solved by those skilled in the art.
Disclosure of Invention
In view of this, the present invention provides a calibration and calibration method for a scanning system of a charged particle beam processing apparatus, which quickly and effectively establishes a corresponding relationship between coordinates of each scanning point of a charged particle beam on a working plane and an excitation current command, so that the scanning system realizes accurate scanning.
In order to achieve the purpose, the invention adopts the following technical scheme:
the scanning device is an n (n is an integer not less than 2) phase winding, and the position of the scanning device is adjusted so that the scanning axis of the 1 st phase winding of the scanning device is in a right angle with the right angle seat on the processing planeThe x axes of the mark systems coincide, phase sequence numbers of the 1 st phase winding, the 2 nd phase winding, the … th phase winding and the n th phase winding on the scanning device are sequentially defined according to the counterclockwise direction, and the included angles between the scanning axes of the 1 st phase winding, the 2 nd phase winding, the … th phase winding and the n th phase winding and the x axes are respectively
Wherein
The center position of the charged particle beam on the working plane when the winding of the scanning device is not electrified is defined as the original position of the charged particle beam, the original position is defined as the original point (0, 0) of a rectangular coordinate system on the working plane, the rectangular coordinate (x, y) of the center position of the charged particle beam on the working plane when the winding of the scanning device is electrified is defined as the scanning point coordinate (x, y) of the charged particle beam, and the displacement of the scanning point relative to the original point is defined as the combined displacement of the charged particle beam on the working plane
The ideal n-phase winding axes of the scanning device are symmetrically distributed, the 1 st phase winding scanning axis, the ideal 1 st phase winding scanning axis, the x axis and the like are defined to be coincided, and when n is an odd number, the included angles between the ideal 1 st phase winding scanning axis, the ideal 2 nd phase winding scanning axis, the ideal … phase winding scanning axis and the x axis are defined
Are respectively as
When n is even number, the included angle between the scanning axis of the ideal phase 1, ideal phase 2 and ideal phase n winding and the x axis
Are respectively as
The i-th phase winding sweeps due to manufacturing process constraintsAngle between the drawing axis and the x-axis
The included angle between the scanning axis of the ideal ith phase winding and the x axis
There is a deviation. Defining the i (i is 1, 2, …, n) th phase winding excitation current command as
Corresponding to the exciting current instruction
The displacement of the center of the charged particle beam on the i-th phase winding scanning axis from the original position on the working plane is defined as the displacement on the i-th phase winding scanning axis
Definition of lambdaiThe phase shift data of the ith phase winding is obtained, and the included angle between the scanning axis of the ith phase winding and the x axis is
Then
j is a unit imaginary number; defining an ideal i-th phase winding excitation current command as
Corresponding to the exciting current instruction
The displacement of the center of the charged particle beam on the ideal ith phase winding scanning axis from the original position on the working plane is defined as the displacement on the ideal ith phase winding scanning axis
Define λ'iIs an ideal i-th phaseThe phase shift data of the windings is that the ideal i-th phase winding scanning axis forms an included angle with the x axis
Then
A calibration method for a scanning system of charged particle beam processing equipment comprises the following steps:
step 1: establishing an i-th phase winding excitation current command of a scanning device (3)
Phase shift data λ from i-th phase windingiMathematical model of (2) in (d)
Step 2: establishing a combined displacement of a charged particle beam in a working plane
Is displaced on the scanning axis from the ideal n-phase winding of the scanning device
One-to-one correspondence between
And step 3: detecting the included angle between the scanning axis of the n-phase winding and the scanning axis of the 1 st-phase winding of the scanning device on the working plane of the charged particle beam
And 4, step 4: according to the included angle in the step 3
Establishing a composite of the resultant displacements
N-phase winding phase shift data λ1、λ2、…、λnAnd ideal n-phase winding phase shift data lambda'1、λ'2、…、λ'nMathematical relation betweeni＝fi(λ'1，λ'2，…，λ'n) From said mathematical relation λi＝fi(λ'1，λ'2，…，λ'n) And the combined displacement in the step 2
Corresponding relation with the phase displacement on the scanning axis of the ideal n-phase winding
Obtaining the resultant displacement
Is displaced on the scanning axis from the n-phase winding
In a one-to-one correspondence relationship of
And 5: according to the step 4
And the mathematical model in the step 1
Calculating to obtain the resultant displacement
Corresponding n-phase winding exciting current instruction
Finally establishing the i-th phase winding exciting current instruction
Corresponding to the scanning point coordinates (x, y) of the charged particle beam (41) on said working plane
And realizing the calibration of the scanning system of the charged particle beam processing equipment.
Preferably, the scanning system comprises a central controller, a driving power supply and a scanning device; the central controller is connected with the driving power supply, and the driving power supply is connected with the scanning device; the scanning device is arranged at the outlet end of the charged particle beam generator and comprises n-phase windings; the charged particle beam generated by the charged particle beam generator is projected onto the working plane through the scanning device, and a scanning track is formed on the working plane; and the driving power supply generates n-phase excitation current according to the n-phase winding excitation current instruction sent by the central controller, so that the scanning device controls the charged particle beam to move on the working plane.
Preferably, the specific implementation process of step 1 is as follows:
step 11: placing a metal test board in a working chamber of charged particle beam processing equipment, and making the upper plane of the metal test board be as high as the working plane of the charged particle beam processing equipment;
step 12: starting the charged particle beam processing equipment, wherein n-phase windings of the scanning device are not electrified, the charged particle beam processing equipment performs small beam stream dotting under constant accelerating voltage and a focusing state to obtain a zero offset dotting trace of the charged particle beam on the metal test board, and the center of the zero offset dotting trace is the original position (0, 0) of the charged particle beam;
step 13: respectively carrying out independent power-on dotting tests on 1 st, 2 nd, … th and nth phase windings of the scanning device, wherein when the ith phase winding is subjected to the power-on dotting test, non-ith phase winding exciting current is set to zero, the charged particle beam processing equipment carries out small beam dotting under the constant accelerating voltage and the focusing state, the ith phase winding exciting current instruction comprises m (m is an integer not less than 2) positive instructions and m negative instructions, and m dotting traces of the charged particle beams in positive and negative directions on an ith phase winding scanning axis are obtained on the metal test board;
preferably, the excitation current commands of the respective energization dotting tests of the phase windings are the same and sequentially increase from a negative maximum value to a positive maximum value, that is, 2m excitation current commands of the i-th phase winding are sequentially-mI*、-(m-1)I*、…、-I*、I*、…、(m-1)I*、mI*Wherein
The maximum value of the excitation current instruction is obtained;
step 14: closing the charged particle beam processing equipment, taking out the metal test board, measuring and recording 2m phase displacement data of 2m dotting trace centers corresponding to 2m excitation current instructions corresponding to phase 1, phase 2, phase … and phase n windings in the step 13 relative to the original position (0, 0);
preferably, the excitation current command-mI for the i-th phase winding*、-(m-1)I*、…、-I*、I*、…、(m-1)I*、mI*Detecting the phase shift data lambda corresponding to the i-th phase windingiAre respectively dim-、di(m-1)-、…、di1-、di1+、…、di(m-1)+、dim+Obtaining the winding dotting data of the 1 st phase, the 2 nd phase, … th phase and the nth phase;
step 15: according to 2m coils of the i-th phase windingThe phase shift data establishes an excitation current instruction of the ith phase winding
Phase shift data λ with the i-th phase windingiThe phase shift mathematical model of
Preferably, the mathematical relation
Expressed as a sectional first-order function form, not only matches with the magnetic circuit characteristic of the scanning device, but also eliminates the dead zone of the driving power circuit and the influence of positive and negative asymmetry, i.e.
K in the formula (7)i-、ki+Respectively a negative slope and a positive slope of the i-th phase winding excitation current instruction, bi-、bi+Negative dead zone bias and positive dead zone bias of the i-th phase winding exciting current instruction are respectively;
any two points of the excitation current instruction-pI in the i-th phase winding negative-direction dotting test*、-qI*( p 1, 2, …, m, q 2, …, m, and p < q) corresponding to the i-th phase winding phase shift data λiIs dip-、diq-Calculating said ki-、bi-A corresponding set of data
The calculation formula is as follows:
the negative m dotting test data of the ith phase winding are combined together at any two points
A combination calculated from said formula (8)
Group of
A value;
will be described in
An
The average value of the values is defined as k in said formula (7)i-A value of
An
The average value of the values is defined as b in said formula (7)i-Value, i.e.
Excitation current instruction pI of any two points of the ith phase winding forward dotting test*、qI*Corresponding i-th phase winding phase shift data lambdaiIs dip+、diq+K is obtained by calculationi+、bi+Corresponding set of data
The calculation formula is as follows:
any two-point group of m forward dotting test data of the ith phase windingIn common use
A combination calculated from said formula (10)
Group of
A value;
will be described in
An
The average value of the values is defined as k in said formula (7)i+A value of
An
The average value of the values is defined as b in said formula (7)i+Value, i.e.
Preferably, the one-to-one correspondence in the step 2 is obtained
By displacing said combined position of said charged particle beam with respect to an origin (0, 0) in a working plane
Decomposing the normal 2 n-polygon scanning track principle into the phase displacement on the scanning axis of the ideal n-phase winding
The specific process is：
Step 21: let the combined displacement of the charged particle beam on the working plane by the offset of the original position (0, 0) be
The resultant displacement
Has vertex coordinates of (x, y), the resultant displacement
An angle theta with the x-axis
Step 22: dividing the working plane into 2n sectors, wherein the occupied angle of each sector is
The sector numbers are sequentially defined as a 1 st sector, a 2 nd sector, … and a 2n th sector from the 1 st phase winding scanning axis according to the anticlockwise, when n is an odd number, the ideal n-phase winding scanning axis is a boundary line of the sector, and when n is an even number, the ideal n-phase winding scanning axis is a bisector of the sector;
step 23: displacing the combination
Viewed as a point on the positive 2 n-sided polygon scan trajectory, the resultant displacement
Within the k (k ═ 1, 2, …, 2n) sector, and the total shift is exceeded
The tail end of the sector is used as a perpendicular line of a bisector of the k sector, the perpendicular line and two boundary lines of the k sector are respectively intersected to obtain a side of a positive 2 n-sided polygon in the sector, the positive direction of a side vector of the positive 2 n-sided polygon is defined as a counterclockwise rotation direction, the side vector in the sector is necessarily parallel and is only parallel to 1 scanning axis of the ideal n-phase winding, a scanning axis of the ideal n-phase winding parallel to the side vector is defined as a parallel scanning axis of the side vector of the k sector, and the rest scanning axes of the ideal n-phase winding are defined as non-parallel scanning axes of the side vector of the k sector;
step 24: the resultant displacement
The included angle between the sector and the bisector of the k sector is gamma, and the resultant displacement in the k sector
The amplitudes of the phase shifts on the non-parallel scanning axes of the ideal n-phase winding are all equal to alpha, and the resultant shift is
The displacement data beta on the parallel scanning axis is related to the included angle gamma, and the calculation formula of the alpha and the beta is derived according to the geometrical relation as follows:
step 25: when the positive direction of the non-parallel scanning axis and the ray of the k sector bisector are positioned on the same side of the parallel scanning axis, the phase shift data on the non-parallel scanning axis is alpha; when the positive direction of the non-parallel scanning axis and the ray of the k-th sector bisector are positioned on the opposite side of the parallel scanning axis, the phase shift data on the non-parallel scanning axis is-alpha; when the edge vector in the k-th sector is consistent with the direction of the parallel scanning axis, the displacement data on the parallel scanning axis is beta; when the edge vector in the k sector is opposite to the direction of the parallel scanning axis, the displacement data on the parallel scanning axis is-beta; along the positive side vector direction, the phase displacement data beta on the parallel scanning axis continuously changes from-alpha to alpha.
Preferably, the one-to-one correspondence in the step 2 is obtained
Is to displace the charged particle beam on the working plane relative to the original position (0, 0)
Decomposing the phase displacement into the phase displacement on the scanning axis of the ideal n-phase winding according to the principle of circular scanning track
The specific process comprises the following steps: displacing the combination
Is regarded as a point on the circular scanning track with the amplitude A as the radius, then
Preferably, the specific implementation process of step 3 is as follows:
step 31: placing a metal test board in a working chamber of charged particle beam processing equipment, and making the upper plane of the metal test board be as high as the working plane of the charged particle beam processing equipment;
step 32: starting the charged particle beam processing equipment, wherein the charged particle beam processing equipment performs small beam current work under constant accelerating voltage and a focusing state, and respectively performs independent power-on scanning tests on the 1 st, 2 nd, … th and nth phase windings of the scanning device, wherein the excitation current instruction of the phase winding of the scanning test is constant in frequency and constant in amplitude
The charged particle beam scans n scanning axes corresponding to the n-phase windings on the metal test board;
step 33: closing the charged particle beam processing equipment, taking out the metal test board, and detecting to obtain included angles between the scanning axes of the 1 st, 2 nd, … th and nth phase windings on the metal test board and the scanning axis (x axis) of the 1 st phase winding
Preferably, the specific implementation process of step 4 is as follows:
step 41: ideal s phase winding scanning axial phase shift
Is shifted from ideal t phase winding scanning axis
Resultant partial displacement
s is equal to 1, 2, …, n, t is equal to 1, 2, …, n, and s is equal to t, the ideal s-th phase winding scanning axis and the included angle of the x-axis are
The ideal s-th phase winding is shifted on the scanning axis
The corresponding s phase winding phase shift data is lambda'sThe included angle between the scanning axis of the ideal t-th phase winding and the x axis is
Phase shift on scanning axis of the t-th phase winding
The corresponding t phase winding phase shift data is lambda'tSaid partial displacement
The vertex coordinate is (x)st，yst) Then, then
Step 42: the fractional shift in the step 41
Practically scanning axial shift by the s-th phase winding
Is axially displaced from the scanning axis of the t-th phase winding
Synthesis, i.e. of
The included angle between the scanning axis of the s-th phase winding and the x-axis is
Phase shift on the scanning axis of the s-th phase winding
The corresponding phase shift data of the s-th phase winding is lambdasThe t-th phaseThe included angle between the winding scanning axis and the x axis is
Phase shift on scanning axis of the t-th phase winding
The corresponding t phase winding phase shift data is lambdatThen, then
Step 43: establishing phase shift data lambda of the s-th and t-th phase windings according to the formula (4) of the step 41 and the formula (5) of the step 42s、λtAnd ideal s and t phase winding phase shift data lambda's、λ'tThe mathematical relationship between the two is
Step 44: shifting the ideal phase 2 winding on the scanning axis on the phase when n is odd
And phase shift on the scanning axis of said ideal phase 3 winding
Synthesizing the partial displacement
Phase shifting the ideal 4 th phase winding on the scanning axis
And phase shift on the scanning axis of said ideal phase 5 winding
Synthesizing the partial displacement
Shifting the ideal n-1 phase winding on the scanning axis
And phase shift on the scanning axis of the ideal nth phase winding
Synthesizing the partial displacement
Then the resultant displacement
Displaced from the ideal 1 st scanning axis
And
each of said partial displacements being combined, i.e.
When n is even number, the ideal ith phase winding is shifted on the scanning axis
And the ideal
Phase shift on the scanning axis of the phase winding
Is at an included angle of
Shifting the ideal phase 1 winding on the scanning axis
And the ideal
Phase shift on the scanning axis of the phase winding
Synthesizing the partial displacement
Shifting the ideal 2 nd phase winding on the scanning axis
And the ideal
Phase shift on the scanning axis of the phase winding
Synthesizing the partial displacement
…, applying the ideal
Phase shift on the scanning axis of the phase winding
And the ideal nth phase winding is shifted on the scanning axis
Synthesizing the partial displacement
Then the resultant displacement
By
Each of said partial displacements being combined, i.e.
Step 45: the resultant displacement
Actually scanning the axial phase shift by the n-phase winding
Synthesis, i.e. of
When n is odd number, the 1 st phase winding is phase shifted
Equal to the ideal phase 1 winding phase shift data
Equal, the sum of the displacements
The phase shift data λ of the 2 nd and 3 rd phase windings2、λ3From said ideal 2 nd, ideal 3 rd phase winding phase shift data λ'2、λ'3The phase shift data λ of the 4 th and 5 th phase windings obtained by the calculation of the formula (6) in the step 434、λ5Phase shift data λ 'from the ideal 4 th, ideal 5 th phase winding'4、λ'5The phase shift data λ of the n-1 th and n-th phase windings obtained by the calculation of the formula (6) in the step 43 is …n-1、λnFrom the ideal (n-1) th, ideal (n-1) thn-phase winding phase shift data λ'n-1、λ'nCalculated according to formula (6) of step 43;
when n is an even number, the resultant shift
The 1 st and the second
Phase winding phase shift data λ1、
From the ideal 1 st, ideal second
Phase winding phase shift data λ'1、
Calculated according to the formula (6) in the step 43, the 2 nd and the 2 nd
Phase winding phase shift data λ2、
From the ideal 2 nd, ideal second
Phase winding phase shift data λ'2、
Obtained by calculation according to equation (6) of said step 43, …, said
Phase shift data of n-th phase winding
λnFrom the ideal
Ideal nth phase winding phase shift data
λ'nCalculated according to equation (6) of said step 43.
Preferably, the i-th phase winding excitation current command is established in step 5
Corresponding relation with the scanning point coordinate (x, y) of the charged particle beam on the working plane
The specific process comprises the following steps:
converting the scanning point coordinates (x, y) of the charged particle beam on the working plane into the combined displacement with respect to the origin (0, 0) according to the formula (1) in the step 21
The resultant displacement
Decomposing the method according to the step 2 into the phase displacement on the scanning axis of the ideal n-phase winding
According to the method of step 3, the phase shift data λ of the i-th phase winding is establishediAnd the ideal n-phase winding phase shift data lambda'1、λ'2、…、λ'nIs a relation ofi＝fi(λ'1，λ'2，…，λ'n) Said ideal ith phase winding phase shift data λ 'according to said equation (1) in said step 21'iTo representTo a function λ 'of scan point coordinates (x, y)'i＝ui(x, y), and phase-shifting the i-th phase winding by data λiExpressed as a function of the coordinates (x, y) of the scanning pointi＝wi(x, y) the mathematical model according to step 1
Deducing the i-th phase winding exciting current instruction
Corresponding relation with the scanning point coordinate (x, y)
Preferably, when the charged particle beam machining apparatus performs machining operation, the central controller converts the coordinates (x, y) of the scanning point of the charged particle beam on the working plane into corresponding excitation current commands of the n-phase winding according to the coordinates (x, y) of the scanning point of the charged particle beam on the working plane
-precisely controlling the scanning trajectory of the charged particle beam (41); the specific implementation process is as follows:
step 61: the central controller discretizes and digitizes the scanning track of the charged particle beam to sequentially obtain coordinate data of limited scanning points on the scanning track;
step 62: the central controller calculates the n-phase winding exciting current commands corresponding to the scanning points in the step 61 in sequence according to the method in the step 5
And storing in sequence;
and step 63: the scanning system is based on the n-phase winding exciting current instruction in step 62
Controlling said charged particle beam on said working plane in said step 61The scanning points move in sequence to complete the track scanning.
According to the technical scheme, compared with the prior art, the invention discloses a calibration and calibration method for a scanning system of charged particle beam processing equipment, which comprises the steps of firstly establishing the relation between an n-phase winding exciting current instruction and the displacement of a charged particle beam on the scanning axis of a corresponding phase winding; and obtaining the included angle of the scanning axis of the n-phase winding; then correcting the phase displacement on the scanning axis of the ideal n-phase winding of the charged particle beam combination displacement into the phase displacement on the scanning axis of the n-phase winding according to the included angle; and finally, establishing a corresponding relation between the charged particle beam scanning point coordinate and the n-phase winding exciting current instruction according to the relation between the phase exciting current instruction and the phase shift and the relation between the combined displacement and the displacement on the n-phase winding scanning axis, completing calibration and calibration work, and accurately controlling the charged particle beam scanning track by a scanning system according to calibration and calibration data.
In the process of establishing the relation between the n-phase winding exciting current instruction and the displacement data of the charged particle beam on the corresponding phase winding scanning axis, firstly, the exciting current instruction is set, and then, the phase displacement point is correspondingly detected. Compared with the method, firstly, a phase displacement point is set, and then a corresponding exciting current command is determined. The former has simpler operation and higher precision. The relation between the n-phase winding exciting current instruction and the displacement data of the charged particle beam on the scanning axis of the corresponding phase winding adopts a first-order function model, which is matched with the magnetic circuit characteristic of the scanning device and can eliminate the dead zone and the positive and negative asymmetric influence of the driving power circuit. The number of modeling test points can be reduced and modeling can be rapidly carried out again when the operation conditions of the same equipment are changed, such as acceleration voltage change, working height change and the like.
The complicated correction problem of asymmetrical distribution of each phase scanning axis of the multi-phase winding scanning device is simplified into the combination of two-phase scanning axis correction problems. The problem of asymmetric distribution of scanning axes of each phase does not need to be corrected again when the running condition of the same equipment is changed.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic diagram illustrating a calibration process of a scanning system according to the present invention;
FIG. 2 is a schematic diagram of a scanning system according to the present invention;
FIG. 3 is a schematic view of a scanning field sector of the odd-phase winding scanning device provided by the present invention;
FIG. 4 is a schematic view of a scanning field sector of an even-phase winding scanning device according to the present invention;
FIG. 5 is a schematic diagram of the relationship between the normal 2n polygon edge vectors and the parallel scan lines provided by the present invention;
FIG. 6 is a schematic diagram of the relationship between the phase shift combination on the scanning axis of the two-phase winding and the phase shift combination on the scanning axis of the corresponding ideal two-phase winding according to the present invention.
In fig. 2: 1-central controller, 2-driving power supply, 3-scanning device, 4-charged particle beam generator, 41-charged particle beam, 5-working scanning plane.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The scanning system comprises a central controller 1, a driving power supply 2 and a scanning device 3; the central controller 1 is connected with a driving power supply 2, and the driving power supply 2 is connected with a scanning device 3; the scanning device 3 is arranged at the outlet end of the charged particle beam generator 4, and the scanning device 3 comprises n-phase windings; the charged particle beam 41 generated by the charged particle beam generator 4 is projected onto the working plane 5 through the scanning device 3, forming a scanning trajectory on the working plane 5; the drive power supply 2 generates an n-phase excitation current according to an n-phase winding excitation current command sent by the central controller 1, and makes the scanning device 3 control the charged particle beam to move on the working plane 5.
The scanning device 3 is n (n is an integer not less than 2) phase windings, the position of the scanning device 3 is adjusted to ensure that the scanning axis of the 1 st phase winding of the scanning device 3 on the processing plane 5 is coincident with the x axis of a rectangular coordinate system, the phase sequence numbers of the 1 st phase winding, the 2 nd winding, the … th winding and the n th phase winding on the scanning device are sequentially defined according to the counter-clockwise, and the included angles between the scanning axes of the 1 st phase winding, the 2 nd winding, the … th winding and the n th winding and the x axis are respectively
Wherein
The center position of the charged particle beam 41 on the working plane 5 when the windings of the scanning device 3 are not energized is defined as the original position of the charged particle beam 41, the original position is defined as the origin (0, 0) of the rectangular coordinate system on the working plane 5, the rectangular coordinate (x, y) of the center position of the charged particle beam 41 on the working plane 5 when the windings of the scanning device 3 are energized is defined as the scanning point coordinate (x, y) of the charged particle beam 41, and the displacement of the scanning point with respect to the origin is defined as the combined displacement of the charged particle beam 41 on the working plane 5
The ideal n phase winding axes of the scanning device 3 are symmetrically distributed, the 1 st phase winding scanning axis, the ideal 1 st phase winding scanning axis, the x axis and the like are defined to be coincided, and when n is an odd number, the included angles between the ideal 1 st phase winding scanning axis, the ideal 2 nd phase winding scanning axis, the ideal … and the x axis are formed
Are respectively as
When n is an even number, the number 1 is ideal, and the number 1 is ideal2. Ideal angle between scanning axis of n-th phase winding and x-axis
Are respectively as
Due to the restriction of manufacturing process, the included angle between the scanning axis of the i-th phase winding and the x-axis
Included angle between scanning axis of ith phase winding and x axis
There is a deviation. Defining the i (i is 1, 2, …, n) th phase winding excitation current command as
Corresponding to exciting current instruction
The displacement of the center of the charged particle beam on the scanning axis of the i-th phase winding from the original position on the working plane is defined as the displacement on the scanning axis of the i-th phase winding
Definition of lambdaiThe phase shift data of the ith phase winding is obtained, and the included angle between the scanning axis of the ith phase winding and the x axis is
Then
j is a unit imaginary number; defining an ideal i-th phase winding excitation current command as
Corresponding to exciting current instruction
The displacement of the center of the charged particle beam from the original position on the ideal i-th phase winding scanning axis on the working plane is defined as the displacement on the ideal i-th phase winding scanning axis
Define λ'iThe ideal phase shift data of the i-th phase winding is obtained by setting the included angle between the scanning axis of the ideal i-th phase winding and the x-axis
Then
A calibration method for a scanning system of a charged particle beam machining apparatus, as shown in fig. 1, includes the following steps:
s1: establishing i-th phase winding exciting current instruction of scanning device 3
And phase shift data lambdaiMathematical model of
S11: placing a metal test board in a working chamber of the charged particle beam processing equipment, and making the upper plane of the metal test board be as high as the working plane 5 of the charged particle beam processing equipment;
s12: starting the charged particle beam processing equipment, wherein n-phase windings of the scanning device 3 are not electrified, and the charged particle beam processing equipment performs small beam dotting under constant accelerating voltage and a focusing state to obtain a zero-offset dotting trace of the charged particle beam 41 on the metal test board, wherein the center of the zero-offset dotting trace is the original position (0, 0) of the charged particle beam 41;
s13: when the i-th phase winding of the scanning device 3 is subjected to an electrifying dotting test, the non-i-th phase winding exciting current is set to be zero, the charged particle beam processing equipment performs small-beam dotting under the constant accelerating voltage and focusing state, and the i-th phase winding exciting current instruction
In turn, the exciting current instruction
(
The maximum value of the exciting current instruction) is obtained, 8 instruction values are obtained in total, the number of the instruction values is 4, and 8 dotting traces of the charged particle beam on the scanning axis of the i-th phase winding are obtained on the metal test board;
s14: closing the charged particle beam processing equipment, taking out the metal test board, measuring 8 phase displacement data of the centers of 8 dotting traces corresponding to 8 exciting current instructions corresponding to 1 st phase winding, 2 nd phase winding, … th phase winding and n th phase winding in S13 relative to the original position (0, 0), and recording the data in table 1;
TABLE 1
S15: i-th phase winding excitation current command
Phase shift data λ from i-th phase windingiOf the phase shift mathematical model
Using a piecewise first-order functional representation, i.e.
Calculating k according to the dotting test data in S14i-、bi-、ki+、bi+A value;
negative-going dotting exciting current instruction of i-th phase winding
Corresponding phase shift data di4-、di3-、di2-、di1-Calculating ki-、bi-Excitation current instruction of any two points of i-th phase winding negative-going dotting test
(p is 1, 2, 3, 4, q is 2, 3, 4, and p < q) corresponding phase-shift data λ of phase-shifted winding of i-th phaseiIs dip-、diq-Calculating ki-、bi-Corresponding set of data
The negative direction 4 dotting test data of the i-th phase winding are shared by any two-point combination
The combination can be calculated into 6 groups according to the formula
Different values, as shown in Table 2, are found for 6 of Table 2
The average value of the values is taken as ki-Value of, 6 will
The average value of the values is taken as bi-Value, i.e.
TABLE 2
According to excitation current instruction
Corresponding phase shift data di1+、di2+、di3+、di4+Calculating ki+、bi+Excitation current instruction of any two points of i-th phase winding forward dotting test
Corresponding i-th phase winding phase shift data lambdaiIs dip+、diq+Calculating ki+、bi+Corresponding set of data
The forward 4 dotting test data of the ith phase winding have 6 combinations in total by combining any two points, and 6 groups can be calculated
Different values, as shown in Table 3, 6 in Table 3
The average value of the values is taken as ki+Value of, 6 will
The average value of the values is taken as bi+Value, i.e.
TABLE 3
S2: establishing a resultant displacement of the charged particle beam 41 on the working plane 5
Displaced on the scanning axis from the ideal n-phase winding of the scanning device 3
One-to-one correspondence between
Obtain the one-to-one correspondence in S2
By displacing the charged particle beam 41 on the working plane 5 in combination with respect to the origin (0, 0)
Decomposing the normal 2n polygon scanning track into ideal n-phase winding scanning axial phase displacement
The specific process comprises the following steps:
s21: let the combined displacement of the charged particle beam on the working plane by the offset of the original position (0, 0) be
Resultant displacement
Has vertex coordinates of (x, y) and resultant displacement
An angle theta with the x-axis
S22: the working plane is divided into 2n sectors, and the occupied angle of each sector is
The sector numbers are sequentially defined as a 1 st sector, a 2 nd sector, … and a 2n th sector in a counter-clockwise manner, when n is an odd number, the scanning axis of the ideal n-phase winding is a boundary line of the sector, as shown in fig. 3, and when n is an even number, the scanning axis of the ideal n-phase winding is a bisector of the sector, as shown in fig. 4;
s23: will be combined with and move
Is regarded as a point on the positive 2n polygon scanning track, and the resultant displacement
Within the k-th sector, over-closed shift
The tail end of the sector is used as a perpendicular line of a bisector of the kth sector, the perpendicular line and the bisector of the kth sector are respectively intersected to obtain a side of a positive 2 n-sided polygon in the kth sector, the positive direction of a side vector of the positive 2 n-sided polygon is defined as a counterclockwise rotation direction, the side vector in the kth sector is necessarily parallel and is only parallel to scanning axes of 1 ideal n-phase winding, the scanning axes of the ideal n-phase winding parallel to the side vector are defined as parallel scanning axes of the side vector of the kth sector, and the rest scanning axes of the ideal n-phase winding are defined as non-parallel scanning axes of the side vector of the kth sector, as shown in fig. 5;
s24: resultant displacement
The included angle between the sector and the bisector of the k sector is gamma, and the k sector is internally combined with displacement
The amplitudes of the phase shifts on the non-parallel scanning axes of the ideal n-phase winding are all equal to alpha, and the resultant shifts
The data of the phase shift beta on the parallel scanning axis is related to the angle gamma, and is derived from the geometrical relationship of FIG. 5
β＝A sinγ
S25: when the positive direction of the non-parallel scanning axis and the ray of the k sector bisector are positioned on the same side of the parallel scanning axis, the displacement data on the non-parallel scanning axis is alpha; when the positive direction of the non-parallel scanning axis and the ray of the k sector bisector are positioned on the opposite side of the parallel scanning axis, the displacement data on the non-parallel scanning axis is-alpha; when the edge vector in the k sector is consistent with the direction of the parallel scanning axis, the phase shift data on the parallel scanning axis is beta; when the edge vector in the k sector is opposite to the direction of the parallel scanning axis, the phase shift data on the parallel scanning axis is-beta; along the positive direction of the side vector, the phase displacement data beta on the parallel scanning axis continuously changes from-alpha to alpha;
resultant displacement
Decomposing the positive 2 n-polygon scanning track into the phase on the ideal n-phase winding scanning axis
The combination process of sector area, sector bisector angle, phase sequence number of parallel scanning axis and resultant displacement
The angle γ with the bisector of the sector is shown in tables 4 and 5, where the number n of winding phases corresponding to the scanning device 3 in table 4 is odd and the number n of winding phases corresponding to the scanning device 3 in table 5 is even.
TABLE 4
TABLE 5
S3: detecting the angle between the scanning axis of the n-phase winding and the scanning axis of the 1 st phase winding of the scanning device 3 of the charged particle beam 41 on the working plane 5
S31: placing a metal test board in a working chamber of the charged particle beam processing equipment, and making the upper plane of the metal test board be as high as the working plane 5 of the charged particle beam processing equipment;
s32: starting the charged particle beam processing equipment, carrying out small beam flow work under the constant accelerating voltage and the focusing state by the charged particle beam processing equipment, respectively carrying out independent electrification scanning tests on the 1 st, 2 nd, … th and nth phase windings of the scanning device 3, wherein the excitation current instruction of the phase windings of the scanning tests is constant in frequency and constant in amplitude
The isosceles triangle wave command, the charged particle beam 41 scans n scanning axes corresponding to the n-phase windings on the metal test board;
s33: closing the charged particle beam processing equipment, taking out the metal test board, and detecting to obtain the included angles between the scanning axes of the 2 nd, … th and nth phase windings and the scanning axis (x axis) of the 1 st phase winding on the metal test board
S4: according to the included angle in S3
Establishing a resultant displacement
N-phase winding phase shift data λ1、λ2、…、λnAnd ideal n-phase winding phase shift data lambda'1、λ'2、…、λ'nMathematical relation betweeni＝fi(λ'1，λ'2，…，λ'n) From the mathematical relation λi＝fi(λ'1，λ'2，…，λ'n) And one-to-one correspondence in S2
To obtain the resultant displacement
Is displaced on the scanning axis from the n-phase winding
In a one-to-one correspondence relationship of
S41: ideal s phase winding scanning axial phase shift
Is shifted from ideal t phase winding scanning axis
Resultant partial displacement
s is 1, 2, …, n, t is 1, 2, …, n, s is not equal to t, and the ideal s-th phase winding scanning axis forms an included angle with the x-axis
Ideal s phase winding scanning axial phase shift
The corresponding ideal s-phase winding phase shift data is lambda'sThe ideal t-th phase winding scanning axis and the x-axis form an included angle
Phase shift on ideal t phase winding scanning axis
The corresponding ideal t phase winding phase shift data is lambda'tPartial displacement of
The vertex coordinate is (x)st，yst) Then, then
S42: fractional displacement in S41
Practically scanning axial displacement by the s-th phase winding
Is displaced from the scanning axis of the t-th phase winding
Synthesis, i.e. of
The included angle between the scanning axis of the s-th phase winding and the x-axis is
Phase shift on the scanning axis of the s-th phase winding
Corresponding s phase shift data of phase winding is lambdasThe included angle between the scanning axis of the t-th phase winding and the x-axis is
Phase shift on scanning axis of t-th phase winding
Corresponding t phase winding phase shift data is lambdatThen, then
S43: fractional shift according to S41 and S42
Establishing phase shift data lambda of s-th and t-th phase windingss、λtAnd ideal s and t phase winding phase shift data lambda's、λ'tThe mathematical relationship between the two is
S44: when n is odd, the ideal 2 nd phase winding is phase-shifted on the scanning axis
And ideal phase 3 winding scan axis phase shift
Resultant partial displacementPhase shift on the ideal 4 th phase winding scanning axis
And ideal phase 5 winding scan axis
Resultant partial displacement
…, shifting the ideal n-1 phase winding on the scanning axis
And ideal phase n winding scanning axis phase shift
Resultant partial displacement
Then combined displacement
Scanning axial phase shift from ideal phase 1 winding
And
are combined in partial displacement, i.e.
When n is even number, ideal i phase winding scanning axis phase shift
And ideally
Phase shift on the scanning axis of the phase winding
Is at an included angle of
Will be ideal1 phase winding scanning on-axis phase shift
And ideally the first
Phase shift on the scanning axis of the phase winding
Resultant partial displacement
The ideal 2 nd phase winding is shifted on the scanning axis
And ideally the first
Phase shift on the scanning axis of the phase winding
Resultant partial displacement
…, will ideally be
Phase shift on the scanning axis of the phase winding
And ideal phase n winding scanning axis phase shift
Resultant partial displacement
Then combined displacement
By
Are combined in partial displacement, i.e.
S45: resultant displacement
Practically scanning axial phase shift by n-phase windings
Synthesis, i.e. of
When n is odd number, phase shift of 1 st phase winding
Equal to ideal phase 1 winding phase shift
Equal, resultant displacement
Phase shift data lambda of phase 2 and phase 3 windings2、λ3From ideal 2 nd, ideal 3 rd phase winding phase shift data λ'2、λ'3The 4 th and 5 th phase winding phase shift data lambda are obtained by calculation according to the mathematical relation of S434、λ5From ideal 4 th, ideal 5 th phase winding phase shift data λ'4、λ'5The phase shift data lambda of the n-1 th and n-th phase windings of … are obtained by calculation according to the mathematical relation of S43n-1、λnIdeal n-1 th phase winding phase shift data lambda 'is formed by ideal n-th phase winding'n-1、λ'nCalculating according to the mathematical relationship of S43;
when n is an even number, the resultant shift is
1 st, second
Phase winding phase shift data λ1、
From ideal 1, ideal
Phase winding phase shift data λ'1、
Calculated according to the mathematical relationship of S43, 2 nd and 2 nd
Phase winding phase shift data λ2、
From ideal 2, ideal 2
Phase winding phase shift data λ'2、
Obtained by calculation of the mathematical relationship of S43, …
Phase shift data of n-th phase winding
λnFrom the ideal
Ideal nth phase winding phase shift data
λ'nAccording to S43And calculating a mathematical relation.
S5: converting the coordinates (x, y) of the scanning point of the charged particle beam 41 on the working plane 5 into a combined displacement with respect to the origin (0, 0) according to the relation in S21
Resultant displacement
Decomposition into phase shift on ideal n-phase winding scanning axis according to the method of S2
According to the method of S3, i-th phase winding phase shift data lambda is establishediAnd ideal n-phase winding phase shift data lambda'1、λ'2、…、λ'nIs a relation ofi＝fi(λ'1，λ'2，…，λ'n) Ideal ith phase winding phase shift data λ 'according to the relation in S21'iIs expressed as a function λ 'of the coordinates (x, y) of the scanning point'i＝ui(x, y), and phase-shifting the i-th phase winding by data λiExpressed as a function of the coordinates (x, y) of the scanning pointi＝wi(x, y) mathematical model according to S1
Deducing an i-th phase winding excitation current instruction
Corresponding relation with scanning point coordinate (x, y)
And the calibration and calibration of the scanning system of the charged particle beam processing equipment are realized.
To further optimize the above technical solution, the one-to-one correspondence in S2 obtained in S2 is obtained
The other party of (1)By displacing the charged particle beam 41 in the working plane 5 in combination with respect to the original position (0, 0)
Decomposing the phase displacement on the scanning axis of an ideal n-phase winding according to the principle of circular scanning track
The specific process comprises the following steps: will be combined with and move
Viewed as a point on a circular scanning trajectory with the amplitude a as the radius, then
In order to further optimize the above technical solution, when the charged particle beam machining apparatus performs the machining operation, the central controller 1 converts the scanning point coordinates (x, y) of the charged particle beam 41 on the working plane 5 into the corresponding n-phase winding excitation current command
Accurately controlling the scanning track of the charged particle beam 41; the specific implementation process is as follows:
s61: the central controller 1 discretizes and digitizes the scanning track of the charged particle beam 41 to sequentially obtain coordinate data of limited scanning points on the scanning track;
s62: the central controller 1 sequentially calculates the n-phase winding excitation current commands corresponding to the respective scanning point coordinates in S61 in accordance with the method of S5
And storing in sequence;
s63: the scanning system is based on the excitation current instruction of the n-phase winding in S62
The charged particle beam 41 is controlled to move on the working plane 5 in sequence in accordance with the scanning point in S61, and the trajectory scanning is completed.
Example 1
The scanning device 3 of the charged particle beam processing equipment is a 3-phase winding, and the charged particle beam 41 scans the coordinates (x, y) of a scanning point on a working plane 5, and the scanning point moves relative to the original point (0, 0)
Decomposing the regular 6-polygon scanning track principle into the phase shift on the ideal 3-phase winding scanning axis
Ideal 3-phase winding phase shift data λ'1、λ'2、λ'3Are shown in Table 6.
TABLE 6
3-phase winding phase shift data lambda1、λ2、λ3Are each lambda1＝λ'1、
Excitation current command from i-th phase winding
Establishing 3-phase winding exciting current instruction through data substitution
And corresponding relation with the scanning point coordinates (x, y) of the charged particle beam 41 on the working plane 5, and completing calibration and calibration of the scanning system.
Example 2
The scanning device 3 of the charged particle beam processing equipment is a 3-phase winding, and scans the point coordinates (of the charged particle beam 41) on the working plane 5x, y), the resultant displacement of the scanning point relative to the origin (0, 0)
Decomposing the circular scanning track principle into the phase displacement on the scanning axis of an ideal 3-phase winding
Ideal 3-phase winding phase shift data λ'1、λ'2、λ'3Are respectively as
3-phase winding phase shift data lambda1、λ2、λ3Are each lambda1＝λ'1、
Excitation current command from i-th phase winding
Establishing 3-phase winding exciting current instruction through data substitution
And corresponding relation with the scanning point coordinates (x, y) of the charged particle beam 41 on the working plane 5, and completing calibration and calibration of the scanning system.
Example 3
The scanning device 3 of the charged particle beam processing equipment is a 4-phase winding, and the charged particle beam 41 scans the coordinates (x, y) of a scanning point on a working plane 5, and the scanning point moves relative to the original point (0, 0)
Decomposing the regular 6-polygon scanning track principle into the phase shift on the ideal 4-phase winding scanning axis
Ideal 4-phase winding phase shift data λ'1、λ'2、λ'3、λ'4Are shown in Table 7.
TABLE 7
4-phase winding phase shift data lambda1、λ2、λ3、λ4Are respectively as
Excitation current command from i-th phase winding
Establishing 4-phase winding exciting current instruction through data substitution
And corresponding relation with the scanning point coordinates (x, y) of the charged particle beam 41 on the working plane 5, and completing calibration and calibration of the scanning system.
Example 4
The scanning device 3 of the charged particle beam processing equipment is a 4-phase winding, and the charged particle beam 41 scans the coordinates (x, y) of a scanning point on a working plane 5, and the scanning point moves relative to the original point (0, 0)
Decomposing the circular scanning track principle into the phase displacement on the ideal 4-phase winding scanning axis
Ideal 4-phase winding phase shift data λ'1、λ'2、λ'3、λ'4Are respectively as
4-phase winding phase shift data lambda1、λ2、λ3、λ4Are respectively as
Excitation current command from i-th phase winding
Establishing 4-phase winding exciting current instruction through data substitution
And corresponding relation with the scanning point coordinates (x, y) of the charged particle beam 41 on the working plane 5, and completing calibration and calibration of the scanning system.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. The device disclosed by the embodiment corresponds to the method disclosed by the embodiment, so that the description is simple, and the relevant points can be referred to the method part for description.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
1. A calibration and calibration method for a scanning system of charged particle beam processing equipment is characterized by comprising the following steps:
step 1: establishing an i-th phase winding excitation current command of a scanning device (3)
Phase shift data with i-th phase winding
Mathematical model of (2) in (d)
；
Step 2: establishing a combined displacement of a charged particle beam (41) in a working plane (5)
Is displaced on the scanning axis from the ideal n-phase winding of the scanning device (3)
、
、…、
One-to-one correspondence between
；
And step 3: detecting the included angle of the scanning axis of the n-phase winding and the scanning axis of the 1 st-phase winding of the scanning device (3) on the working plane (5) of the charged particle beam (41)
、
、…、
；
And 4, step 4: according to the included angle in the step 3
、
、…、
Establishing a composite of the resultant displacements
N-phase winding phase shift data
、
、…、
Phase shift data from ideal n-phase winding
、
、…、
Mathematical relation between
From said mathematical relation
And the combined displacement in the step 2
Corresponding relation with the phase displacement on the scanning axis of the ideal n-phase winding
Obtaining the resultant displacement
Is displaced on the scanning axis from the n-phase winding
、
、…、
In a one-to-one correspondence relationship of
；
And 5: according to the step 4
And the mathematical model in the step 1
Calculating to obtain the resultant displacement
Corresponding n-phase winding exciting current instruction
、
、…、
Finally, establishing the i-th phase winding exciting current instruction
Corresponding to the coordinates (x, y) of the scanning spot of the charged particle beam (41) on the working plane (5)
The calibration and calibration of the scanning system of the charged particle beam processing equipment are realized; the 1 st phase winding scanning axis of the scanning device (3) on the working plane (5) is coincided with the x axis of the rectangular coordinate system, the ideal n phase winding axes of the scanning device (3) are symmetrically distributed, and the 1 st phase winding scanning axis, the ideal 1 st phase winding scanning axis and the x axis are coincided in a three-line mode; the center position of the charged particle beam (41) on the working plane (5) is the original position of the charged particle beam (41) when the winding of the scanning device (3) is not electrified, the original position is the original point (0, 0) of a rectangular coordinate system on the working plane (5), and the rectangular coordinates (x, y) of the center position of the charged particle beam (41) on the working plane (5) when the winding of the scanning device (3) is electrified are the scanning point coordinates (x, y) of the charged particle beam (41).
2. The charged particle beam processing apparatus scanning system calibration method as claimed in claim 1, wherein the scanning system comprises a central controller (1), a driving power supply (2) and a scanning device (3); the central controller (1) is connected with the driving power supply (2), and the driving power supply (2) is connected with the scanning device (3); the scanning device (3) is arranged at the outlet end of the charged particle beam generator (4), and the scanning device (3) comprises n-phase windings; the charged particle beam (41) generated by the charged particle beam generator (4) is projected onto the working plane (5) through the scanning device (3), and a scanning track is formed on the working plane (5); the driving power supply (2) generates n-phase exciting current according to the n-phase winding exciting current instruction sent by the central controller (1), and the scanning device (3) controls the charged particle beam (41) to move on the working plane (5).
3. The charged particle beam processing apparatus scanning system calibration method as claimed in claim 2, wherein the step 1 is implemented as follows:
step 11: placing a metal test board in a working chamber of the charged particle beam processing equipment, and making the upper plane of the metal test board have the same height as the working plane (5) of the charged particle beam processing equipment;
step 12: starting the charged particle beam processing equipment, wherein n-phase windings of the scanning device (3) are not electrified, the charged particle beam processing equipment performs small beam stream dotting under constant acceleration voltage and a focusing state to obtain a zero offset dotting trace of the charged particle beam (41) on the metal test board, and the center of the zero offset dotting trace is the original position of the charged particle beam (41);
step 13: respectively carrying out independent power-on dotting tests on 1 st, 2 nd, … th and nth phase windings of the scanning device (3), wherein when the ith phase winding is subjected to the power-on dotting test, non-ith phase winding exciting current is set to zero, the charged particle beam processing equipment is used for carrying out small beam dotting under the constant accelerating voltage and the focusing state, the ith phase winding exciting current instruction comprises m positive instructions and m negative instructions, and dotting traces of m charged particle beams (41) in positive and negative directions on the scanning axis of the ith phase winding are obtained on the metal test board;
step 14: closing the charged particle beam processing equipment, taking out the metal test board, measuring 2m phase displacement data of 2m dotting trace centers corresponding to 2m excitation current instructions corresponding to the 1 st phase winding, the 2 nd phase winding, the … th phase winding and the nth phase winding in the step 13 relative to the original position, and recording;
step 15: establishing an excitation current instruction of the ith phase winding according to the 2m phase shift data of the ith phase winding
Phase shift data with the i-th phase winding
Mathematical model of (2) in (d)
。
4. The charged particle beam processing apparatus scanning system calibration method as claimed in claim 3, wherein said one-to-one correspondence in said step 2 is obtained
By a combined displacement of the charged particle beam (41) on the working plane (5) relative to the original position
Decomposing the normal 2 n-polygon scanning track principle into the phase displacement on the scanning axis of the ideal n-phase winding
、
、…、
The method comprises the following specific steps:
step 21: the resultant displacement
The rectangular coordinate data of the vertex is (x, y), and the corresponding combined displacement
Amplitude of A, the resultant displacement
At an angle to the x-axis of
Then, then
Step 22: the working plane (5) is divided into 2n sectors, and the occupied angle of each sector is
The sector numbers are sequentially defined as a 1 st sector, a 2 nd sector, … and a 2n th sector from the scanning axis of the 1 st phase winding according to the anticlockwise; when n is an odd number, the ideal n-phase winding scanning axis is a boundary line of the sector; when n is an even number, the ideal n-phase winding scanning axis is a bisector of the sector;
step 23: displacing the combination
As a point on the positive 2 n-sided polygon scanning trajectory, the resultant displacement
Within the k-th sector, over the combined shift
The tail end of the sector is used as a perpendicular line of a bisector of the k sector, the perpendicular line and two boundary lines of the k sector are respectively intersected to obtain a side of a positive 2 n-polygon in the k sector, the positive direction of a side vector of the positive 2 n-polygon is defined as a counterclockwise rotation direction, the side vector in the k sector is necessarily parallel and is only parallel to 1 scanning axis of the ideal n-phase winding, a scanning axis of the ideal n-phase winding parallel to the side vector is defined as a parallel scanning axis of the side vector of the k sector, and the rest scanning axes of the ideal n-phase winding are defined as non-parallel scanning axes of the side vector of the k sector;
step 24: the resultant displacement
An included angle with the bisector of the k-th sector is
The total shift in the k-th sector
The magnitude of the phase shift on the non-parallel scanning axis of the ideal n-phase winding is all equal and is
The resultant displacement
The data of the displacement on the parallel scanning axis is
And is and
step 25: when the non-parallel scanning axis is positiveThe ray with the direction being the same as the k-th sector bisector is positioned on the same side of the parallel scanning axis, and the displacement data on the non-parallel scanning axis is
(ii) a When the positive direction of the non-parallel scanning axis and the ray of the k-th sector bisector are positioned on the opposite side of the parallel scanning axis, the phase shift data on the non-parallel scanning axis is
(ii) a When the edge vector in the k-th sector is consistent with the direction of the parallel scanning axis, the displacement data on the parallel scanning axis is
(ii) a When the edge vector in the k-th sector is opposite to the direction of the parallel scanning axis, the displacement data on the parallel scanning axis is
(ii) a Along the positive side vector direction, the phase shift data on the parallel scanning axis
By
To
Continuously changing.
5. The charged particle beam processing apparatus scanning system calibration method as claimed in claim 3, wherein said one-to-one correspondence in said step 2 is obtained
The method is thatThe combined displacement of the charged particle beam (41) on the working plane (5) relative to the original position
Decomposing the phase displacement into the phase displacement on the scanning axis of the ideal n-phase winding according to the principle of circular scanning track
、
、…、
The method comprises the following specific steps: displacing the combination
As a point on the circular scanning trajectory with the amplitude a as the radius, the resultant displacement
At an angle to the x-axis of
Then, then
The included angles between the scanning axes of the 1 st phase winding, the 2 nd phase winding, the … th phase winding and the nth phase winding and the x axis are respectively
、
、…、
(ii) a Ideal 1 st, ideal 2 nd, … th, ideal n-th phase winding scanning axis included angle with x-axis
、
、…、
。
6. The charged particle beam processing apparatus scanning system calibration method as claimed in claim 2, wherein the step 3 is implemented as follows:
step 31: placing a metal test board in a working chamber of charged particle beam processing equipment, and making the upper plane of the metal test board be equal to the working plane (5) of the charged particle beam processing equipment in height;
step 32: starting the charged particle beam processing equipment, carrying out small beam current work under the constant accelerating voltage and the focusing state by the charged particle beam processing equipment, respectively carrying out independent electrified scanning tests on the 1 st, the 2 nd, the … th and the n-th phase windings of the scanning device (3), wherein the excitation current instruction of the phase windings in the scanning tests is constant in frequency and constant in amplitude
The charged particle beam (41) scans n scanning axes corresponding to the n-phase windings on the metal test board;
step 33: closing the charged particle beam processing equipment, taking out the metal test board, and detecting to obtainThe included angles between the scanning axes of the 1 st, 2 nd, … th and nth phase windings and the scanning axis of the 1 st phase winding on the metal test board are respectively 0,
、…、
。
7. The charged particle beam processing apparatus scanning system calibration method as claimed in claim 1, wherein the step 4 is implemented as follows:
step 41: ideal s phase winding scanning axial phase shift
Is shifted from ideal t phase winding scanning axis
Resultant partial displacement
The included angle between the scanning axis of the ideal s-th phase winding and the x axis is
The ideal s-th phase winding is shifted in phase on the scanning axis
Corresponding to the ideal s-th phase winding phase shift data of
The included angle between the scanning axis of the ideal t-th phase winding and the x axis is
Phase shift on the scanning axis of the t-th phase winding
The corresponding t phase winding phase shift data is
Said partial displacement
The vertex coordinates are (
，
) Then, then
Step 42: the fractional shift in step 41
Practically scanning axial shift by the s-th phase winding
Is axially displaced from the scanning axis of the t-th phase winding
Synthesis of
The included angle between the scanning axis of the s-th phase winding and the x-axis is
Phase shift on the scanning axis of the s-th phase winding
The corresponding phase shift data of the s-th phase winding is
The included angle between the scanning axis of the t-th phase winding and the x axis is
Phase shift on the scanning axis of the t-th phase winding
The corresponding t phase winding phase shift data is
Then, then
Step 43: establishing s and t phase winding phase shift data according to the formula (4) of the step 41 and the formula (5) of the step 42
、
Phase shift data from ideal s, t phase winding
、
The mathematical relationship between the two is
Step 44: when n is odd, the ideal 2 nd, 3 rd, … th and n th phase windings are phase-shifted on the scanning axis
、
、…、
The two-to-two composite partial displacement is the phase displacement on the scanning axis of the ideal 2 nd, ideal 3 rd, … th and ideal n-th phase windings
、
、…、
All are carried out and only once synthesized, co-synthesized
Effective fractional displacement
Then the resultant displacement
Scanning on-axis phase shift by ideal phase 1 winding
And
each of the effective partial displacement
Are combined, i.e.
；
When n is even number, the ideal n-phase winding is shifted on the scanning axis
、
、…、
The two-by-two combination of partial displacement is used for the phase displacement on the scanning axis of the ideal n-phase winding
、
、…、
All are carried out and only once synthesis is carried out, in total
Effective fractional displacement
Then the resultant displacement
By
Each of the effective partial displacement
Are combined, i.e.
；
Step 45: the resultant displacement
Actually scanning the axial phase shift by the n-phase winding
、
、…、
Synthesis, i.e. of
；
When n is odd number, the 1 st phase winding is phase shifted
Equal to said ideal phase 1 winding phase shift
The resultant displacement
Phase shift data of the s-th and t-th phase windings
Phase shift data of the ideal s-th and t-th phase windings
、
Calculated according to formula (6) of step 43;
when n is an even number, the resultant shift
Phase shift data of the s-th and t-th phase windings
Phase shift data of the ideal s-th and t-th phase windings
、
Calculated according to equation (6) of said step 43.
8. The charged particle beam processing apparatus scanning system calibration method as claimed in claim 4 or 5, wherein the i-th phase winding excitation current command is established in said step 5
Corresponding to the coordinates (x, y) of the scanning spot of the charged particle beam (41) on the working plane (5)
The specific process comprises the following steps:
transforming the scanning point coordinates (x, y) of the charged particle beam (41) on the working plane (5) into the resultant displacement relative to the origin (0, 0) according to the equation (1)
The resultant displacement
Decomposing the method according to the step 2 into the phase displacement on the scanning axis of the ideal n-phase winding
、
、…、
According to the method of the step 3, the phase shift data of the i-th phase winding is established
Phase shift data from the ideal n-phase winding
、
、…、
Is a relational expression of
Phase shifting the ideal i-th phase winding according to the equation (1)
Expressed as a function of the coordinates (x, y) of the scanning point
And phase shifting the i-th phase winding by data
Expressed as a function of the coordinates (x, y) of the scanning point
Said mathematical model according to said step 1
And deducing the i-th phase winding excitation current instruction
Corresponding relation with the scanning point coordinate (x, y)
。
9. The calibration method according to claim 2, wherein during the machining operation of the charged particle beam machining apparatus, the central controller (1) converts the scanning point coordinates (x, y) of the charged particle beam (41) on the working plane (5) into the corresponding excitation current commands of the n-phase winding according to the scanning point coordinates (x, y) of the charged particle beam (41)
、
、…、
Controlling the scanning trajectory of the charged particle beam (41); the specific implementation process is as follows:
step 61: the central controller (1) discretizes and digitizes the scanning track of the charged particle beam (41) to sequentially obtain the coordinate data of the limited scanning points on the scanning track;
step 62: the central controller (1) calculates the steps 61 in turn according to the method of the step 5The n-phase winding exciting current instruction corresponding to each scanning point
、
、…、
And sequentially storing;
and step 63: the scanning system is based on the n-phase winding exciting current instruction in step 62
、
、…、
And controlling the charged particle beam (41) to move on the working plane (5) in sequence according to the scanning points in the step 61, and finishing the track scanning.
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Denomination of invention: Calibration and calibration method for scanning system of charged particle beam processing equipment Effective date of registration: 20231027 Granted publication date: 20210105 Pledgee: Bank of China Limited by Share Ltd. Guilin branch Pledgor: Guilin Shida Technology Co.,Ltd. Registration number: Y2023980063291 |
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