CN105896785B - A kind of high-speed, high precision two-dimension moving platform - Google Patents
A kind of high-speed, high precision two-dimension moving platform Download PDFInfo
- Publication number
- CN105896785B CN105896785B CN201610274414.2A CN201610274414A CN105896785B CN 105896785 B CN105896785 B CN 105896785B CN 201610274414 A CN201610274414 A CN 201610274414A CN 105896785 B CN105896785 B CN 105896785B
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- China
- Prior art keywords
- straight line
- guide rail
- mover
- stage
- workbench
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K3/00—Details of windings
- H02K3/42—Means for preventing or reducing eddy-current losses in the winding heads, e.g. by shielding
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/20—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K9/00—Arrangements for cooling or ventilating
- H02K9/02—Arrangements for cooling or ventilating by ambient air flowing through the machine
- H02K9/04—Arrangements for cooling or ventilating by ambient air flowing through the machine having means for generating a flow of cooling medium
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Linear Motors (AREA)
Abstract
The invention discloses a kind of high-speed, high precision two-dimension moving platform of linear motor driving, which includes：X platforms, Y stage and workbench, wherein Y stage is mounted on X platforms, workbench is mounted on Y stage, X platforms include mainly the first straight line motor that driving Y stage moves on X platforms and the first straight line guide rail of support Y stage movement, Y stage includes mainly the second straight line motor and the second straight line guide rail for supporting working table movement that driving workbench moves on Y stage, workbench is loaded with load, the invention also includes the magnetic screen babinet being set on first straight line motor and second straight line motor, the magnetic leakage for reducing motor.By said mechanism, the magnetic field of linear motor stator electric is made to be shielded effectively, to reduce the adverse effect of motor flux leakage generation, and realizes workbench high speed in the two-dimensional direction, high-precision control.
Description
Technical field
The present invention relates to two-dimension moving platform field more particularly to a kind of two maintenance and operations under high speed and high-precision occasion
Moving platform.
Background technology
Traditional motion platform is to drive ball screw arrangement by electric rotary machine (motor that mover rotates),
To which with moving platform movement, kinematic chain is transmitted to execution unit from power source motor and needs by many intermediate links, such as
Gear pair, worm gear, lead screw pair etc. will produce larger rotary inertia (such as friction, noise, vibration, mill in these links
Damage), lead to not realize the required high speed of platform, high-precision target.
Invention content
It is an object of the invention to overcome the deficiencies of the prior art and provide a kind of reduction motor flux leakage and high speed can be reached
With the two-dimension moving platform of high-precision requirement.
The purpose of the invention is achieved by the following technical solution：
A kind of high-speed, high precision two-dimension moving platform, including X platforms, Y stage and workbench；The X platforms are fixed, and Y is flat
Platform is mounted on X platforms, and workbench is mounted on Y stage.
The X platforms include first straight line guide rail, first base, first straight line motor and the first feedback transducer, described
First straight line motor includes the first stator, the first mover and the first magnetic screen babinet, and the first straight line guide rail is led including first
Rail and the first sliding block, first feedback transducer include first grating scale and the first reading head；First guide rail is fixed on
Parallel with X-direction in first base, first stator is fixed in first base, and the first magnetic screen babinet is by the first stator
It wraps, reduces magnetic dispersion, first mover is connect with Y stage, and driving Y stage moves back and forth on first straight line guide rail.
The Y stage includes second straight line guide rail, second base, second straight line motor and the second feedback transducer, described
Second straight line motor includes the second stator, the second mover and the second magnetic screen babinet, and the second straight line guide rail is led including second
Rail and the second sliding block, second feedback transducer include second grating scale and the second reading head；The second base is mounted on
It on first sliding block, connect, is driven by the first mover, second guide rail is fixed in second base and and Y-axis with the first mover
Direction is parallel, and second stator is fixed in first base, and the second magnetic screen babinet wraps up the second stator, reduces magnetic
Leakage, the workbench are mounted on the second sliding block, and second mover is connect with workbench, and driving workbench is in second straight line
It is moved on guide rail；Equipped with load on the workbench；The first grating scale is arranged in the side of second base, with the first guide rail
Parallel, first reading head is fixed in first base, reads the scale of first grating scale, and the second grating scale setting exists
The side of workbench, parallel with the second guide rail, second reading head is fixed in second base, reads the quarter of second grating scale
Degree.
Since stator is after armoured magnetic field, the environment of magnetic screen box sealing necessarily causes the heating inside linear motor,
The excessively high reliability and service life that can all influence motor of the too fast or temperature that heats up, so the high-speed, high precision two dimensional motion is flat
Platform further includes the first fan and the second fan for heat dissipation.First fan is arranged on the first magnetic screen babinet, opposite
Heat dissipation is blowed in first stator；Second fan is arranged on the second magnetic screen babinet, is blowed against the second stator
Heat dissipation.The heat dissipation area of fan is beaten, flow of drying is big, and positive effect is played to the cooling of stator.
In order to further slow down the heating rate of linear motor after magnetic screen, enables linear motor long-play, reduce
The probability to break down, therefore, the first magnetic screen babinet and the second magnetic screen babinet in this programme are equipped with for dissipating
The gas vent of heat.The generation in the top of the first magnetic screen babinet and the second magnetic screen babinet, motor is arranged in the gas vent
Heat can rapidly drain from gas vent.
Due to will produce amount of heat when mover works in high-speed high frequency rate, the air blast air quantity of fan is big, but flow velocity is low,
It is remote with mover standoff distance, it is not enough to quickly reduce the temperature of mover, therefore the invention also includes the tracheae for rapid cooling,
The tracheae is connect with the first mover and the second mover respectively, to the first mover and the blowing heat dissipation of the second mover.Although tracheae
Heat dissipation area is small, but its flow velocity is fast, local good heat dissipation effect, when needing to carry out fast cooling to mover, can open simultaneously
Fan and tracheae make the temperature rapid decrease of mover.
Working process and principle of the invention are：First straight line motor drives second base parallel with X-direction the
It is moved back and forth in one the linear guide, the first feedback transducer accurately measures second base, realizes second base in X-axis side
Upward high-precision control；Likewise, second straight line motor drive operational platform is on the second straight line guide rail parallel with Y direction
It moves back and forth, the second feedback transducer accurately measures workbench, realizes the high-precision control of workbench in the Y-axis direction
System.Meanwhile the stator of linear motor is arranged in magnetic screen babinet, is effectively shielded the magnetic field of stator generation, is reduced electricity
Machine magnetic leakage adverse effect improves the power and torque of linear motor, to which the reaction speed of linear motor be substantially improved
Degree and movement speed.Two-dimension moving platform provided by the invention is simple in structure, easy to use, has at a high speed and high-precision excellent
Point.
Compared with prior art, the present invention also has the advantages that：
(1) present invention is equipped with fan on magnetic screen babinet, carries out large area heat dissipation to stator, makes the primary line in stator
Circle winding cools down rapidly, hence it is evident that improves the stability and reliability of linear motor.
(2) present invention is equipped with the gas vent of upward outlet on magnetic screen babinet, when which is used cooperatively with fan,
Heat in magnetic screen babinet can quickly be drained, further decrease the temperature of motor, postpone its service life.
(3) present invention also installs tracheae on mover, which blows against the secondary coil winding in mover, by
It is fast in the distinguished and admirable speed of tracheae blowout, local rapid cooling can be carried out to secondary coil winding, coordinate the lingering remnants of past customs of fan, Ke Yiyou
Effect reduces the temperature of mover.
(4) present invention can distribute first straight line motor and second straight line well according to the change in location situation of load
The bearing capacity of motor, designated position can steadily be reached by making to be supported under high speed, high-precision movement.
(5) the first mover of first straight line motor provided by the present invention uses vertical monolithic arrangement, can be effectively ensured
The driving force of first straight line motor in X direction, along the center of gravity of Y-direction, reduces the driving force of X-direction in the side Y close to X motion parts
Upward bias, and greatly save first straight line motor and workbench the space occupied in the X direction.
Description of the drawings
Fig. 1 is the stereogram of the present invention.
Fig. 2 is the partial schematic diagram of the present invention.
Label declaration in above-mentioned figure is as follows：1- first bases, the first guide rails of 2-, 3- second bases, the first sliding blocks of 4-, 5-
Second guide rail, the second sliding blocks of 6-, the first magnetic screens of 7- babinet, the first movers of 8-, the first stators of 9-, the first reading heads of 10-, 11-
First grating scale, the second magnetic screens of 12- babinet, the second stators of 13-, the second movers of 14-, the second reading heads of 15-, the second light of 16-
Grid ruler.
Specific implementation mode
To make the objectives, technical solutions, and advantages of the present invention clearer and more explicit, develop simultaneously embodiment pair referring to the drawings
The present invention is described further.
Example example 1：
As depicted in figs. 1 and 2, the invention discloses a kind of high-speed, high precision two-dimension moving platform, including an X platform,
One Y stage and workbench.X platforms include first base 1, first straight line guide rail, first straight line motor and the first feedback sense
Device.First straight line guide rail includes the first guide rail 2 and the first sliding block 4, and first straight line motor includes the first stator 9 and the first mover 8,
First feedback transducer includes first grating scale 11 and the first reading head 10.Y stage include second base 3, second straight line guide rail,
Second straight line motor and the second feedback transducer.Second straight line guide rail includes the second guide rail 5 and the second sliding block 6, second straight line electricity
Machine includes the second stator 13 and the second mover 14, and the second feedback transducer includes second grating scale 16 and the second reading head 15.
First base 1 is fixedly installed, and installs a pair thereon and is parallel to the first straight line guide rail of X-axis, the first stator 9, second
Stator 13 and the first reading head 10.Second base 3 is mounted on the first sliding block 4, and first grating scale 11 is arranged in second base 3 one
The edge of side is opposite with the first reading head 10.First mover 8 is mounted in second base 3, and driving second base 3 is straight first
It is moved on line guide rail.The second straight line guide rail that one width is parallel to Y-axis is installed, erector on second straight line guide rail in second base 3
Make platform, load is carried on workbench.The second reading head 15 is additionally provided in second base 3, workbench is equipped with second grating scale 16,
Second reading head 15 is opposite with second grating scale 16, obtains the scale in second grating scale 16.Second mover 14 connects with workbench
It connects, driving workbench moves on second straight line guide rail.
Preferably, the present invention also provides the magnetic screen babinets for shielding stator field, respectively the first magnetic screen babinet 7
With the second magnetic screen babinet 12, the first magnetic screen babinet 7 covers the first stator 9, and the second magnetic screen babinet 12 is by the second stator
13 cover, and since magnetic screen babinet is made of metal material, play the role of isolation to magnetic induction line, so in magnetic screen babinet
Under effect, the magnetic line of force is stopped by magnetic screen babinet caused by the first stator 9 and the second stator 13, the magnetic leakage phenomenon of linear motor
Greatly reduce, the torque of linear motor is substantially improved, and effectively improves the movement speed of the mover of linear motor.
In order to ensure linear motor can steadily, reliably be run under high speed, high-precision mobile condition, the present invention is also
Including being used for linear motor cooling fan 17, gas vent 18 and tracheae 19.Fan 17 is located on magnetic screen babinet, opposite fixed
The hot gas made at the top of magnetic screen babinet in motor is then arranged in primary coil winding large area blowing in son, gas vent 18
Drain rapidly upward from gas vent 18, and tracheae 19 is arranged on mover, is carried out to the local secondary coil windings on mover
Blowing, makes its fast cooling.
Y stage relies on the driving of the electromagnetic force between the first mover 8 and the first stator 9 of the first straight line motor of X platforms
Operation, the direction of motion are parallel with first straight line guide rail.Workbench by the second straight line motor of Y stage the second mover 13 with
The driving of electromagnetic force between second stator 14 is run, and the direction of motion is parallel with second straight line guide rail, and load is placed in workbench
On, drive the quick shifting for realizing orthogonal both direction in plane jointly by second straight line motor and first straight line motor
It is dynamic.
The first reading head 10 on X platforms and first grating scale 11 corresponding thereto form the position feedback on X platforms
Sensor, to detect Y stage second base 3 location information.The second reading head 15 on Y stage and corresponding thereto
Second grating scale 16 forms the position feedback transducer on Y stage, to detect the location information of workbench.Position on X platforms
Feedback transducer is set to be input in control system to realize with the location information detected by the position feedback transducer on Y stage
Accurate location control.
Working process and principle of the invention are：First straight line motor drives second base 3 parallel with X-direction the
It is moved back and forth in one the linear guide, the first feedback transducer accurately measures second base 3, realizes second base 3 in X-axis
High-precision control on direction；Likewise, second straight line motor drive operational platform is in the second straight line guide rail parallel with Y direction
Upper reciprocating motion, the second feedback transducer accurately measure workbench, realize the high-precision control of workbench in the Y-axis direction
System.Meanwhile the stator of linear motor is arranged in magnetic screen babinet, is effectively shielded the magnetic field of stator generation, is reduced electricity
Machine magnetic leakage adverse effect improves the power and torque of linear motor, to which the reaction speed of linear motor be substantially improved
Degree and movement speed.Two-dimension moving platform provided by the invention is simple in structure, easy to use, has at a high speed and high-precision excellent
Point.
The above embodiment is a preferred embodiment of the present invention, but embodiments of the present invention are not by above-described embodiment
Limitation, it is other it is any without departing from the spirit and principles of the present invention made by changes, modifications, substitutions, combinations, simplifications,
Equivalent substitute mode is should be, is included within the scope of the present invention.
Claims (4)
1. a kind of high-speed, high precision two-dimension moving platform, which is characterized in that including X platforms, Y stage and workbench；The X platforms
Fixed, Y stage is mounted on X platforms, and workbench is mounted on Y stage；
The X platforms include first straight line guide rail, first base, first straight line motor and the first feedback transducer, and described first
Linear motor include the first stator, the first mover and the first magnetic screen babinet, the first straight line guide rail include the first guide rail and
First sliding block, first feedback transducer include first grating scale and the first reading head；First guide rail is fixed on first
Parallel with X-direction on pedestal, first stator is fixed in first base, and the first magnetic screen babinet wraps up in the first stator
Firmly, magnetic dispersion is reduced, first mover is connect with Y stage, and driving Y stage moves back and forth on first straight line guide rail；
The Y stage includes second straight line guide rail, second base, second straight line motor and the second feedback transducer, and described second
Linear motor include the second stator, the second mover and the second magnetic screen babinet, the second straight line guide rail include the second guide rail and
Second sliding block, second feedback transducer include second grating scale and the second reading head；The second base is mounted on first
It on sliding block, connect, is driven by the first mover, second guide rail is fixed in second base and and Y direction with the first mover
Parallel, second stator is fixed in first base, and the second magnetic screen babinet wraps up the second stator, is reduced magnetic and is let out
Leakage, the workbench are mounted on the second sliding block, and second mover is connect with workbench, and driving workbench is led in second straight line
It is moved on rail；Equipped with load on the workbench；The first grating scale is arranged in the side of second base, flat with the first guide rail
Row, first reading head are fixed in first base, read the scale of first grating scale, and the second grating scale is arranged in work
The side for making platform, parallel with the second guide rail, second reading head is fixed in second base, reads the quarter of second grating scale
Degree.
2. high-speed, high precision two-dimension moving platform according to claim 1, which is characterized in that further include for heat dissipation
One fan and the second fan；First fan is arranged on the first magnetic screen babinet, and heat dissipation is blowed to the first stator；Institute
It states the second fan to be arranged on the second magnetic screen babinet, heat dissipation is blowed to the second stator.
3. high-speed, high precision two-dimension moving platform according to claim 1, which is characterized in that the first magnetic screen babinet
It is equipped with the gas vent for heat dissipation with the second magnetic screen babinet；The gas vent is arranged in the first magnetic screen babinet and the second magnetic
The top of shielding case body.
4. high-speed, high precision two-dimension moving platform according to claim 1, which is characterized in that further include being used for rapid cooling
Tracheae, the tracheae connect with the first mover and the second mover respectively, to the first mover and the blowing heat dissipation of the second mover.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610274414.2A CN105896785B (en) | 2016-04-27 | 2016-04-27 | A kind of high-speed, high precision two-dimension moving platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610274414.2A CN105896785B (en) | 2016-04-27 | 2016-04-27 | A kind of high-speed, high precision two-dimension moving platform |
Publications (2)
| Publication Number | Publication Date |
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| CN105896785A CN105896785A (en) | 2016-08-24 |
| CN105896785B true CN105896785B (en) | 2018-11-06 |
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| CN201610274414.2A Active CN105896785B (en) | 2016-04-27 | 2016-04-27 | A kind of high-speed, high precision two-dimension moving platform |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114362471B (en) * | 2021-12-10 | 2023-07-14 | 浙江大学杭州国际科创中心 | Double-stage multi-degree-of-freedom space position precise stabilizing system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101409248A (en) * | 2007-10-12 | 2009-04-15 | 深圳市大族精密机电有限公司 | Two-dimensional motion platform |
| CN101924444A (en) * | 2009-06-10 | 2010-12-22 | 应德贵 | Disk-shaped permanent magnet half-shell shielding device |
| JP6026981B2 (en) * | 2013-09-24 | 2016-11-16 | 山洋電気株式会社 | Linear motor unit |
| CN104167897B (en) * | 2014-08-29 | 2016-06-29 | 东南大学 | A kind of plate transverse magnetic flux switching permanent-magnetism linear motor |
| CN204835879U (en) * | 2015-07-01 | 2015-12-02 | 深圳德康威尔科技有限公司 | Two side C types do not have iron core linear motor motion module |
| CN205725226U (en) * | 2016-04-27 | 2016-11-23 | 广东工业大学 | A kind of high-speed, high precision two-dimension moving platform |
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| CB03 | Change of inventor or designer information |
Inventor after: He Yunbo Inventor after: Tang Hui Inventor after: Ao Yinhui Inventor after: Chen Xin Inventor after: Wang Feiran Inventor after: Hu Yongshan Inventor after: Wu Xiaoming Inventor after: Gao Jian Inventor after: Yang Zhijun Inventor after: Chen Yun Inventor after: Zhang Yu Inventor before: He Yunbo Inventor before: Tang Hui Inventor before: Ao Yinhui Inventor before: Chen Xin Inventor before: Wang Peiran Inventor before: Hu Yongshan Inventor before: Wu Xiaoming Inventor before: Gao Jian Inventor before: Yang Zhijun Inventor before: Chen Yun Inventor before: Zhang Yu |
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Effective date of registration: 20221012 Address after: 528225 Room B507, Block B, Phase I, Nanhai Industrial Think Tank City, Taoyuan Road, Software Park, Shishan Town, Nanhai District, Foshan City, Guangdong Province (application for residence) Patentee after: GUANGDONG ADA INTELLIGENT EQUIPMENT Co.,Ltd. Address before: 510062 Dongfeng East Road, Yuexiu District, Guangzhou, Guangdong 729 Patentee before: GUANGDONG University OF TECHNOLOGY |